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1

Zhang, Nuer, Yong Feng Ren, and Sheng Kun Li. "Research on Testing Method of Dynamic Characteristic for MEMS-Gyroscope." Advanced Materials Research 346 (September 2011): 515–20. http://dx.doi.org/10.4028/www.scientific.net/amr.346.515.

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Анотація:
Gave a test method of the dynamic characteristics about gyroscope. In the process of using Gyroscope, it will be affected by various external factors irresistibly in making the gyroscope working at certain vibration frequency. Designed the experiments of steel plate vibrating to examine the relationship between the sensitive angular rate of gyroscope and vibration frequency. Firstly, fixed the plate on the desk; then made the plate to vibrate, collected the data from the gyroscope which vibrating with steel plate. To analyze the data of collection, gained the dynamic characteristics of gyroscope. In addition, designed rotating floor calibration experiment, calibrated the relationship between input and output of gyroscope and verified the rationality of the steel plate vibrating experiment. The result prove that gain the dynamic characteristics of gyroscope by steel plate vibrating, not only the method is simple but the result also can achieve the good precision.
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2

Qin, Zhengcheng, Yang Gao, Jia Jia, Xukai Ding, Libin Huang, and Hongsheng Li. "The Effect of the Anisotropy of Single Crystal Silicon on the Frequency Split of Vibrating Ring Gyroscopes." Micromachines 10, no. 2 (February 14, 2019): 126. http://dx.doi.org/10.3390/mi10020126.

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This paper analyzes the effect of the anisotropy of single crystal silicon on the frequency split of the vibrating ring gyroscope, operated in the n = 2 wineglass mode. Firstly, the elastic properties including elastic matrices and orthotropic elasticity values of (100) and (111) silicon wafers were calculated using the direction cosines of transformed coordinate systems. The (111) wafer was found to be in-plane isotropic. Then, the frequency splits of the n = 2 mode ring gyroscopes of two wafers were simulated using the calculated elastic properties. The simulation results show that the frequency split of the (100) ring gyroscope is far larger than that of the (111) ring gyroscope. Finally, experimental verifications were carried out on the micro-gyroscopes fabricated using deep dry silicon on glass technology. The experimental results are sufficiently in agreement with those of the simulation. Although the single crystal silicon is anisotropic, all the results show that compared with the (100) ring gyroscope, the frequency split of the ring gyroscope fabricated using the (111) wafer is less affected by the crystal direction, which demonstrates that the (111) wafer is more suitable for use in silicon ring gyroscopes as it is possible to get a lower frequency split.
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3

Tanaka, K., Y. Mochida, M. Sugimoto, K. Moriya, T. Hasegawa, K. Atsuchi, and K. Ohwada. "A micromachined vibrating gyroscope." Sensors and Actuators A: Physical 50, no. 1-2 (August 1995): 111–15. http://dx.doi.org/10.1016/0924-4247(96)80093-8.

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4

Kim, Chang Boo, Chong Du Cho, and Hyeon Gyu Beom. "Dynamics of a Vibrating Micro Three-Axis Ring Gyroscope." Key Engineering Materials 306-308 (March 2006): 1241–46. http://dx.doi.org/10.4028/www.scientific.net/kem.306-308.1241.

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Анотація:
This paper presents electro-mechanical characteristics of a micro-machined vibrating silicon ring gyroscope which can measure angular velocity components about three orthogonal axes. The ring gyroscope has a ring connected to the gyroscope main body by support ligaments that are arranged with cyclic symmetry. The natural modes of its vibration can be distinguished into the in-plane motion and the out-of-motion that are coupled by the gyro-effect due to the rotation of the gyroscope main body. The motions of the ring are electro-statically driven, sensed and balanced by electrodes. The equations of motion are formulated with considering the electrostatic effects of electrodes. The measuring method of angular velocities of the gyroscope main body by force-torebalance is proposed. The dynamic characteristics of the ring gyroscope are discussed.
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5

Katz, Amnon, and Alton Highsmith. "The Optimal Size of a Resonant Vibrating Beam Gyroscope." Journal of Dynamic Systems, Measurement, and Control 123, no. 1 (August 14, 2000): 49–53. http://dx.doi.org/10.1115/1.1341201.

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Анотація:
The level of thermal noise in a resonant vibrating beam gyroscope is lower, the longer the beam. A limitation on the length of the beam arises from the consideration that the beam acts as a mechanical bandpass filter transmitting the signal being measured (the instantaneous rate of rotation) from the drive axis to the sense axis. A longer beam vibrates at a lower frequency and has a narrower resonance. The length that is acceptable depends on the bandwidth of the time variation of angular rate, which in turn, depends on the nature and mission of the vehicle that uses the gyroscope for inertial navigation. High rates of maneuvering indicate millimeter scale gyroscopes that are realized as micro-electro-mechanical devices. In the case of General Aviation, considerations of noise, as well as cost, favor a centimeter scale device.
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6

Liu, Yu, Yao Yu Duan, Shen Liu, and Yi Ou. "Research of Mechanical Sensibility on Vibrating-Beam Piezoelectricity Gyroscope." Applied Mechanics and Materials 184-185 (June 2012): 402–7. http://dx.doi.org/10.4028/www.scientific.net/amm.184-185.402.

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According to sensibility and output accuracy is effected by mechanical coupling of positive and negative piezoelectricity films, analysis change of vibration beam nodes which result from coupling of positive and negative piezoelectricity films. In this paper, a new mosaic method of mechanical coupling is proposed which based on structure of the vibration beam gyroscope; the numerical calculations which result from carrying out for 60mm alloyed vibration beam illustrate the sensitivity of the Vibrating-beam Piezoelectricity Gyroscope improved 6.64%. Simulation results demonstrate sensitivity is increased 6.57% and in line with the theoretical calculations.
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7

Inoue, Jun-ichi. "Piezoelectric Vibrating Gyroscope and Application." HYBRIDS 8, no. 4 (1992): 35–41. http://dx.doi.org/10.5104/jiep1985.8.4_35.

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8

Su,, Yan, Henggao Ding,, and Shou-Rong Wang,. "Silicon Micro-Machined Vibrating Gyroscope." Journal for Manufacturing Science and Production 4, no. 4 (June 2002): 197–202. http://dx.doi.org/10.1515/ijmsp.2002.4.4.197.

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9

Harris, A. J., G. Cooper, J. S. Burdess, J. Cruickshank, and D. Wood. "Vibrating silicon diaphragm micromechanical gyroscope." Electronics Letters 31, no. 18 (August 31, 1995): 1567–68. http://dx.doi.org/10.1049/el:19951070.

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10

Niu, Shao Hua, Shi Qiao Gao, Hai Peng Liu, and Lei Jin. "An ADRC Method for Vibrating MEMS Gyrosocope Drive." Advanced Materials Research 211-212 (February 2011): 264–69. http://dx.doi.org/10.4028/www.scientific.net/amr.211-212.264.

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Анотація:
The stability and accuracy of the drive mode are important for the performance of vibrating MEMS gyroscope. At present, the PI-like controller is always used in the control of the drive mode of vibrating MEMS gyroscope. The PI-like control has good effect on rejecting the literal disturbance, but it can’t reject the time-dependent disturbance well. The disturbance for the MEMS gyroscope is so uncertain that the stability and accuracy of the PI-like control for the gyro are comparatively low. In this paper, an ADRC method for vibrating MEMS gyroscope drive is introduced, and it is proved that this method can rapidly and stably control the MEMS gyro drive mode by simulation and comparing with the PI-like method.
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11

Gallacher, B. J., J. Hedley, J. S. Burdess, A. J. Harris, and M. E. McNie. "Multimodal tuning of a vibrating ring using laser ablation." Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science 217, no. 5 (May 1, 2003): 557–76. http://dx.doi.org/10.1243/095440603765226858.

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This paper investigates laser ablation as a mechanism for fine tuning the flexural modes of vibration of a slightly imperfect suspended ring. A theoretical analysis of the effect of ablation on the natural frequencies of both in-plane and out-of-plane flexural modes is developed. Contributions made to the frequency shift from the reduced mechanical stiffness and reduced mass, as a result of ablation, are included. A specific cyclic symmetric relationship between the modes of vibration and the ablation configuration permitting multimodal tuning is developed. This relationship is expanded for the particular case of flexural modes of order 2 and 3, which are commonly used in vibrating ring gyroscope designs. For vibrating ring gyroscopes, tuning between certain flexural modes of vibration greatly increases the sensitivity of the device to applied rates of rotation. Therefore, a fine-tuning mechanism is highly desirable. An experimental examination of multimodal tuning using laser ablation is performed. In-plane modes of order 2 and out-of-plane modes of order 3 are investigated. Stiffness reduction as a possible method for modifying the natural frequencies of the out-of-plane modes of vibration is explored.
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12

Crescenzi, Rocco, Giuseppe Vincenzo Castellito, Simone Quaranta, and Marco Balucani. "Design of a Tri-Axial Surface Micromachined MEMS Vibrating Gyroscope." Sensors 20, no. 10 (May 15, 2020): 2822. http://dx.doi.org/10.3390/s20102822.

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Анотація:
Gyroscopes are one of the next killer applications for the MEMS (Micro-Electro-Mechanical-Systems) sensors industry. Many mature applications have already been developed and produced in limited volumes for the automotive, consumer, industrial, medical, and military markets. Plenty of high-volume applications, over 100 million per year, have been calling for low-cost gyroscopes. Bulk silicon is a promising candidate for low-cost gyroscopes due to its large scale availability and maturity of its manufacturing industry. Nevertheless, it is not suitable for a real monolithic IC integration and requires a dedicated packaging. New designs are supposed to eliminate the need for magnets and metal case package, and allow for a real monolithic MEMS-IC (Integrated Circuit) electronic system. In addition, a drastic cost reduction could be achieved by utilizing off-the-shelf plastic packaging with lead frames for the final assembly. The present paper puts forward the design of a novel tri-axial gyroscope based on rotating comb-drives acting as both capacitive sensors and actuators. The comb-drives are comprised of a single monolithic moving component (rotor) and fixed parts (stators). The former is made out of different concentrated masses connected by curved silicon beams in order to decouple the motion signals. The sensor was devised to be fabricated through the PolyMUMPs® process and it is intended for working in air in order to semplify the MEMS-IC monolithic integration.
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13

Ayazi, F., and K. Najafi. "A HARPSS polysilicon vibrating ring gyroscope." Journal of Microelectromechanical Systems 10, no. 2 (June 2001): 169–79. http://dx.doi.org/10.1109/84.925732.

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14

Singh, A. K., and U. K. Gorain. "Development of Vibrating Disc Piezoelectric Gyroscope." Defence Science Journal 54, no. 3 (July 1, 2004): 387–93. http://dx.doi.org/10.14429/dsj.54.2053.

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15

Qiu, A. P., Y. Su, S. R. Wang, and B. L. Zhou. "Effect of Residual Stresses on a Micromachined Z-Axis Vibrating Rate Gyroscope." Key Engineering Materials 295-296 (October 2005): 101–6. http://dx.doi.org/10.4028/www.scientific.net/kem.295-296.101.

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Анотація:
The design of mechanical structures depends upon characterizing the stress/strain state in these devices under the combined influence of both loading and residual stresses. The performance of the dynamic structures is strongly influenced by residual stresses. Understanding of the behavior of gyroscopes in presence of residual stresses and ability to relieve the stresses are essential for improving the performance. In this paper, we briefly analyze the cause of residual stresses. The effect of residual stresses on natural frequencies of the drive mode and sense mode is theoretically analyzed. The FE model of the z-axis gyroscope is built to investigate the relation between the frequencies and the residual stress by model analysis. Methods for residual stress relief are presented. The results of the simulation demonstrate that the performance of the gyroscopes with serpentine beams and stress relief slots can be improved significantly.
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16

Bai, Xian Lin, Yong Le Lu, and Yu Liu. "Research on the Short-Time Bias Stability of the Solid Vibration Beam Gyroscope." Advanced Materials Research 179-180 (January 2011): 86–91. http://dx.doi.org/10.4028/www.scientific.net/amr.179-180.86.

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In this paper, Short-term bias stability of solid state vibration beam gyroscope is studied. Based on the dynamical equation of solid vibration beam gyroscope, the elements effecting the zero stability which effects the short term bias stability was discussed. The computed result shows that the main factors for short-term bias stability is transient solution error. The output signal has been filtered by the low pass filter, according to the characteristic of transient solution error. Simulation results demonstrate that low-pass filter can effectively suppress the error of output signal. In addition, the signal of solid state vibrating gyroscope filtered by low-pass filter agrees well with the simulation result. From the simulation and experiment data, the validity of the model and the feasibility of the filtering programs has been proved.
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17

Lu, Cheng, Liang Hua, Xinsong Zhang, Huiming Wang, and Yunxiang Guo. "Adaptive Sliding Mode Control Method for Z-Axis Vibrating Gyroscope Using Prescribed Performance Approach." Applied Sciences 10, no. 14 (July 11, 2020): 4779. http://dx.doi.org/10.3390/app10144779.

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This paper investigates one kind of high performance control methods for Micro-Electro-Mechanical-System (MEMS) gyroscopes using adaptive sliding mode control (ASMC) scheme with prescribed performance. Prescribed performance control (PPC) method is combined with conventional ASMC method to provide quantitative analysis of gyroscope tracking error performances in terms of specified tracking error bound and specified error convergence rate. The new derived adaptive prescribed performance sliding mode control (APPSMC) can maintain a satisfactory control performance which guarantees system tracking error, at any time, to be within a predefined error bound and the error convergences faster than the error bound. Besides, adaptive control (AC) technique is integrated with PPC to online tune controller parameters, which will converge to their true values at last. The stability of the control system is proved in the Lyapunov stability framework and simulation results on a Z-axis MEMS gyroscope is conducted to validate the effectiveness of the proposed control approach.
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18

Zhang, Rui Xue, Zhi Yong Chen, and Rong Zhang. "A Micro-Machined Silicon Vibrating Ring Gyroscope." Advanced Materials Research 403-408 (November 2011): 4244–51. http://dx.doi.org/10.4028/www.scientific.net/amr.403-408.4244.

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Анотація:
The presented work focuses on the design, fabrication and frequency characteristics of a multi-mass MEMS vibrating ring gyroscope. After modal and harmonic simulation in ANSYS, the first 12 modes’ resonant frequencies and impacts on the sense-axis displacement are obtained. This gyroscope is fabricated through the silicon-on-glass process and deep etching bulk silicon MEMS technology. With a view to obtain the frequency characteristics, the authors attempt set of frequency sweeping experiment, whose record agrees well with ANSYS simulation results. The preliminary experimental data present the relationship between drive voltage and resonant characteristics and indicate that the structural design of vibrating ring and multi-mass can effectively depart the operational modes away from the interfering modes with a higher Q of sense axis at atmospheric pressure.
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19

KOU Zhi-wei, 寇志伟, 曹慧亮 CAO Hui-liang, 石云波 SHI Yun-bo, 张英杰 ZHANG Ying-jie, and 刘. 俊. LIU Jun. "Development of capacitive MEMS vibrating ring gyroscope." Optics and Precision Engineering 27, no. 4 (2019): 842–48. http://dx.doi.org/10.3788/ope.20192704.0842.

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20

Ansel, Y., Ph Lerch, and Ph Renaud. "Mode coupling aspects in a vibrating gyroscope." Sensors and Actuators A: Physical 62, no. 1-3 (July 1997): 576–81. http://dx.doi.org/10.1016/s0924-4247(97)01572-0.

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21

Fujita, Takayuki, Kenta Hatano, Takuya Mizuno, Kazusuke Maenaka, and Muneo Maeda. "Preliminary study on rotational vibrating disk gyroscope." IEEJ Transactions on Sensors and Micromachines 119, no. 8-9 (1999): 411–16. http://dx.doi.org/10.1541/ieejsmas.119.411.

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22

Gallacher, B. J., J. S. Burdess, and A. J. Harris. "Principles of a three-axis vibrating gyroscope." IEEE Transactions on Aerospace and Electronic Systems 37, no. 4 (2001): 1333–43. http://dx.doi.org/10.1109/7.976969.

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23

Wang, Qing Yi, Xiao Wei Liu, Rui Zhang, Liang Yin, and Zhi Ping Zhou. "Sine-Wave Exciting Circuit for Quartz Vibrating Gyroscope." Key Engineering Materials 562-565 (July 2013): 417–20. http://dx.doi.org/10.4028/www.scientific.net/kem.562-565.417.

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Анотація:
Quartz vibrating gyroscope is a kind of angular rate sensor which is the compromise between the high performance and the small volume. Improvement of the performance is a focus of reach. In this paper, a sine-wave exciting method is discussed. A sine-wave exciting circuit is design and processed with 0.5μm CMOS processing technology. During comparing the sine-wave exciting response and the square-wave one, the sine-wave exciting circuit is more beneficial to improve the performance of the quartz vibrating gyroscope.
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24

Raspopov, V. Ya, A. I. Volchikhin, A. V. Ladonkin, V. V. Likhosherst, I. A. Volchikhin, Yu V. Vedeshkin, and S. I. Shepilov. "CORIOLIS VIBRATING GYROSCOPE WITH A METAL RESONATOR. DEVELOPMENT AND MANUFACTURING." Spravochnik. Inzhenernyi zhurnal, no. 276 (2020): 11–20. http://dx.doi.org/10.14489/hb.2020.03.pp.011-020.

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Анотація:
Coriolis vibrating gyroscope (CVG) with cavity resonators are promising inertial angle and angular velocity sensors. Cavity resonators are sensitive elements of the CVG; they can be produced of quartz glass or metal. CVG with a metal resonator demonstrates high vibration resistance and vibration strength compared to a CVG with a quartz resonator. Therefore, a CVG with a metal resonator is more suitable for dynamic land, sea, and aerospace-based carriers. For these carriers based on a CVG with a metal resonator, measuring modules for orientation, stabilization and navigation systems of middle class accuracy can be made, comparable to similar systems using some types of fiber-optic and rotor vibration gyros. Preparing the production of a CVG with a metal resonator required solving the following tasks: developing control electronics, tuning and calibrating techniques for the given ranges of measuring the angular velocities of carriers in a wide temperature range, choosing a resonator material and working out the technological cycle of its manufacture taking into account mechanical and heat treatment. A series of research and development practices has been completed for the development of the resonator balancing technique that eliminates four forms of mass defect distribution. In the series production a CVG with a metal resonator having technical and operational characteristics that meet the technical conditions for its manufacturing was obtained. The dynamics features of a Coriolis vibrating gyroscope (CVG) with a metal resonator and the technology of its production have been considered. The technical characteristics of a CVG, manufactured by Michurinsky “Progress” plant, are given.
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25

Eley, R., C. H. J. Fox, and S. McWilliam. "The dynamics of a vibrating-ring multi-axis rate gyroscope." Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science 214, no. 12 (December 1, 2000): 1503–13. http://dx.doi.org/10.1243/0954406001523443.

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Анотація:
A novel, multi-axis rate sensor based on the vibration properties of a ring structure is presented. Vibrating ring structures have been used successfully to detect rates applied about the axis perpendicular to the plane of the ring using Coriolis coupling between in-plane displacements. The presented multi-axis sensor is capable of detecting rate applied about three mutually perpendicular axes using Coriolis coupling between in-plane and out-of-plane displacements. The steady state amplitude of the induced displacements are proportional to the applied rate. Coriolis coupling is only present for certain combinations of in-plane and out-of-plane displacement patterns, which allows a number of feasible concepts for two- and three-axis rate sensitivity.
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26

Unker, Faruk. "Tuned Gyro-Pendulum Stabilizer for Control of Vibrations in Structures." International Journal of Acoustics and Vibration 25, no. 3 (September 30, 2020): 355–62. http://dx.doi.org/10.20855/ijav.2020.25.31632.

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Анотація:
A special combined gyro-pendulum stabilizer (a gyroscope with coupling to a pendulum) mounted on a vibrating mass is considered for investigation of the vibration responses. This paper mainly focuses on the derivation of the frequency equations and on finding the required angular momentum for vibration control of the system. Besides, there is also an ANSYS simulation model of gyro-pendulum, which was built to verify the mathematical model. The dynamic responses of both that obtained from ANSYS simulation and that obtained from numerical solving of a Lagrangian mathematical model are analyzed comparatively. The angular momentum ($Omega I_p$), in relation to the natural frequency ($omega_n$) of the primary mass, shows that this vibration control device is more adaptable than other conventional ones by producing unidirectional thrust along the forcing excitation axis whilst the gyroscope is spinning.
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27

Liu, Ji Li, De Yong Chen, and Jun Bo Wang. "Control System of an Electromagnetic Vibrating Ring Gyroscope." Key Engineering Materials 609-610 (April 2014): 952–56. http://dx.doi.org/10.4028/www.scientific.net/kem.609-610.952.

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Анотація:
Presented is a control system that is designed for an electromagnetic vibrating ring gyroscope. Three functions are realized in this control system. First, fixed amplitude of the drive-mode is guaranteed by using a variable gain control (VGC). Test result shows that the stability of the drive-mode amplitude is about 0.4% in the range of-40°C~80°C. Second, suitable drive-frequency is set up. And experimental result indicates that the suitable drive-frequency should be set between the drive-and sense-mode resonance frequencies, which results in a superior sensitivity. Third, regulation module is employed to further improve the performance.
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28

Raspopov, V. Ya, A. V. Ladonkin, and V. V. Likhosherst. "Competitive Coriolis Vibrating Gyroscope with a Metal Resonator." Mekhatronika, Avtomatizatsiya, Upravlenie 19, no. 12 (December 8, 2018): 777–87. http://dx.doi.org/10.17587/mau.19.777-787.

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Анотація:
The article deals with the design and features of manufacturing a Coriolis vibrating gyroscope (CVG, angular rate sensor) with a metal resonator. Piezoelectric elements are used to excite and detect oscillations of the resonator.The design of the resonator is very important, because the technical characteristics of the CVG mainly depend on the resonator. For the production of a high-quality metal resonator with predetermined properties, a good choice is the precision alloy of 21NKMT-VI. Elimination of defects in the manufacture of the resonator, which lead to a variety of frequencies and variability, is achieved by balancing. The basic method is balancing in the 4th form of the distribution of mass defects. Calibration of the CVG with the electronics unit is the final stage of the CVG manufacturing, which results in: providing a resonance tuning condition for the sensing element, determining the feedback coefficients of the oscillation retention loop, determining the metrological characteristics of the CVG, and obtaining the correction function of the output signal from various parameters after the test complex.When determining the correction function, the fact was taken into account that the signals for suppressing the quadrature and coriolis components are not absolutely independent. When the node signal is demodulated to quadrature and coriolis components, it is necessary to analyze the signal passed through piezoelectric elements, amplifiers and ADC. Each of these elements adds a temperature-dependent phase shift to the node signal. This phase shift can be taken into account, but not with absolute accuracy. Therefore, the output signal of the CVG should be considered as a linear combination of signals of the quadrature and coriolis components of the compensation signal. To reduce the noise of the output signal, it is possible to use various types of noise suppressing filtersThe results of tests of the CVG confirming its competitiveness in comparison with the commercial analogue. The electronic control module can be designed using the Russian element base.
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29

FUJISHIMA, SATORU. "The New World Developed by Vibrating Gyroscope Sensors." Journal of the Institute of Electrical Engineers of Japan 115, no. 8 (1995): 507–10. http://dx.doi.org/10.1541/ieejjournal.115.507.

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30

Cai, Tijing. "Dynamics of micromachined vibrating gimbal and wheel gyroscope." Communications in Nonlinear Science and Numerical Simulation 5, no. 2 (June 2000): 45–48. http://dx.doi.org/10.1016/s1007-5704(00)90000-5.

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31

SATO, Hiroshi, Fumihito ARAI, Toshio FUKUDA, Kouichi ITOIGAWA, and Yasunori Tsukahara. "Design and Analysis of Parallel Beam Vibrating Gyroscope." IEEJ Transactions on Sensors and Micromachines 120, no. 3 (2000): 128–33. http://dx.doi.org/10.1541/ieejsmas.120.128.

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32

Gill, Waqas Amin, Dima Ali, Boo Hyun An, Wajih U. Syed, Numan Saeed, Muneera Al-shaibah, Ibrahim M. Elfadel, Sultan Al Dahmani, and Daniel S. Choi. "MEMS multi-vibrating ring gyroscope for space applications." Microsystem Technologies 26, no. 8 (March 2, 2020): 2527–33. http://dx.doi.org/10.1007/s00542-020-04793-x.

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33

Wang, Xiong, Ding Bang Xiao, Xue Zhong Wu, and Sheng Yi Li. "Vibration Frequency Analytical Formula and Parameter Sensitivity Analysis for Rocking Mass Gyroscope." Advanced Materials Research 317-319 (August 2011): 1068–73. http://dx.doi.org/10.4028/www.scientific.net/amr.317-319.1068.

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Анотація:
Rocking-Mass Gyroscope (RMG) is a dual-axial symmetry vibrating mass gyroscope, whose operational modes are completely uniform, and values of frequency are equal. RMG has the potential to be the gyroscope with high sensitivity. Predicting the frequencies for the operational modes of RMG is critical. The natural frequency analytical formula of RMG is developed by using the assumed modal method and vector composition method. The FEM simulations and experiments validate the analytical formula. The sensitivities of natural frequency to different parameters are also analyzed. The presented results provide references for optimization design of RMG.
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34

Fox, C. H. J. "The Dynamics of a Vibrating Cylinder Gyro with Imperfection." Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science 210, no. 5 (September 1996): 453–64. http://dx.doi.org/10.1243/pime_proc_1996_210_219_02.

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Анотація:
This paper presents an analysis of the mechanics of a vibrating cylinder rate gyroscope including the effects of structural imperfection which is inevitably present in a real device. Imperfection has important consequences for the vibration properties of the cylinder which affect gyro performance. Interaction between imperfection and externally imposed motion of the cylinder gives rise to a number of potential error mechanisms which are identified and analysed. Analytical expressions are developed by means of which the error mechanisms are quantified in a practically useful way.
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35

Li, Zezhang, Shiqiao Gao, Lei Jin, Haipeng Liu, and Shaohua Niu. "Micromachined Vibrating Ring Gyroscope Architecture with High-Linearity, Low Quadrature Error and Improved Mode Ordering." Sensors 20, no. 15 (August 3, 2020): 4327. http://dx.doi.org/10.3390/s20154327.

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Анотація:
A new micromachined vibrating ring gyroscope (VRG) architecture with low quadrature error and high-linearity is proposed, which successfully optimizes the working modes to first order resonance mode of the structure. The improved mode ordering can significantly reduce the vibration sensitivity of the device by adopting the hinge-frame mechanism. The frequency difference ratio is introduced to represent the optimization effect of modal characteristic. Furthermore, the influence of the structural parameters of hinge-frame mechanism on frequency difference ratio is clarified through analysis of related factors, which contributes to a more effective design of hinge-frame structure. The designed VRG architecture accomplishes the goal of high-linearity by using combination hinge and variable-area capacitance strategy, in contrast to the conventional approach via variable-separation drive/sense strategy. Finally, finite element method (FEM) simulations are carried out to investigate the stiffness, modal analysis, linearity, and decoupling characteristics of the design. The simulation results are sufficiently in agreement with theoretical calculations. Meanwhile, the hinge-frame mechanism can be widely applied in other existing ring gyroscopes, and the new design provides a path towards ultra-high performance for VRG.
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36

Li, Yu Xin, De Yong Chen, Gang Huang, and Qi Li. "An Electromagnetic Vibrating Ring Gyroscope Using SOI-MEMS Technology." Key Engineering Materials 645-646 (May 2015): 522–27. http://dx.doi.org/10.4028/www.scientific.net/kem.645-646.522.

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Анотація:
This paper presents the design, fabrication and tests of an electro-magnetic vibrating ring gyroscope based on a control system and SOI-MEMS technology. The control system, including variable gain control (VGC), drive-frequency control and regulation module, is designed to improve mode matching. In device fabrication, and buffered hydrofluoric acid (BHF) solution is used to remove the buried oxide layer and release the suspended spring. Meanwhile, a compensate disk and negative photo resist (AZ303) coated on the backside of the wafer are employed to weaken the Lag and Footing effects during through-wafer etching process. The design of the gyroscope is optimized by FEA simulation and the fabricated devices show a rather good performance.
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37

Indeitsev, D. A., Ya V. Belyaev, A. V. Lukin, I. A. Popov, V. S. Igumnova, and N. V. Mozhgova. "Analysis of imperfections sensitivity and vibration immunity of MEMS vibrating wheel gyroscope." Nonlinear Dynamics 105, no. 2 (July 2021): 1273–96. http://dx.doi.org/10.1007/s11071-021-06664-0.

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38

McCluskey, Patrick, Chandradip Patel, and David Lemus. "Performance and Reliability of MEMS Gyroscopes and Packaging at High Temperatures." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2010, HITEC (January 1, 2010): 000359–66. http://dx.doi.org/10.4071/hitec-pmccluskey-tha22.

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Анотація:
Elevated temperatures can significantly affect the performance and reliability of MEMS gyroscope sensors. A MEMS vibrating resonant gyroscope measures angular velocity via a displacement measurement which can be on the order on nanometers. High sensitivity to small changes in displacement causes the MEMS Gyroscope sensor to be strongly affected by changes in temperature which can affect the displacement of the sensor due to thermal expansion and thermomechanical stresses. Analyzing the effect of temperature on MEMS gyroscope sensor measurements is essential in mission critical high temperature applications, such as inertial tracking of the movement of a fire fighter in a smoke filled indoor environment where GPS tracking is not possible. In this paper, we will discuss the development of the high temperature package for the tracking application, including the characterization of the temperature effects on the performance of a MEMS gyroscope. Both stationary and rotary tests were performed at room and at elevated temperatures on 10 individual single axis MEMS gyroscope sensors.
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39

Wu, Yu Lie, Qing Lei Luan, Hong Juan Cui, Xiao Mei Wu, and Xiang Xi. "Research of a Novel Combined Metal-Fused Silica Resonator for Cylinder Shell Vibrating Gyroscopes." Key Engineering Materials 516 (June 2012): 443–46. http://dx.doi.org/10.4028/www.scientific.net/kem.516.443.

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A novel combined metal-fused silica resonator for the cylinder vibrating gyroscope is proposed in this paper. The cylinder wall of the resonator is made of fused silica, while the bottom is made of metal, and then the two parts are connected by strong glue. With this method, the manufacturing difficulty of the fused silica resonator can be reduced significantly and the performance can be retained without remarkable degeneration. In this paper, the novel metal-fused silica resonator is analyzed, including the structural optimization design and fabrication, testing of the stability of the resonance frequency and the Q factor. The preliminary experimental results show that the low-cost combined metal-fused silica resonator has potential good performance to achieve high accuracy in a cylinder shell vibrating gyroscope.
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40

Lo, Van Hao, and Tamara G. Nesterenko. "Resonant Tuning System of MEMS Multi-Axis Vibrating Gyroscope." Proceedings of Universities. Electronics 24, no. 3 (June 2019): 267–78. http://dx.doi.org/10.24151/1561-5405-2019-24-3-267-278.

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41

Bhadbhade, Vikrant, Nader Jalili, and S. Nima Mahmoodi. "A novel piezoelectrically actuated flexural/torsional vibrating beam gyroscope." Journal of Sound and Vibration 311, no. 3-5 (April 2008): 1305–24. http://dx.doi.org/10.1016/j.jsv.2007.10.017.

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42

Seter, D. J., O. Bochobza-Degani, E. Socher, S. Kaldor, E. Scher, and Y. Nemirovsky. "Characterization of a novel micromachined optical vibrating rate gyroscope." Review of Scientific Instruments 70, no. 2 (February 1999): 1274–76. http://dx.doi.org/10.1063/1.1149585.

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43

Li, Wei, Xiao-Dong Yang, Wei Zhang, and Yuan Ren. "Modeling and Performance Investigation of a Piezoelectric Vibrating Gyroscope." IEEE Sensors Journal 19, no. 21 (November 1, 2019): 9832–40. http://dx.doi.org/10.1109/jsen.2019.2930084.

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44

Wu, Guoqiang, Geng Li Chua, Navab Singh, and Yuandong Gu. "A Quadruple Mass Vibrating MEMS Gyroscope With Symmetric Design." IEEE Sensors Letters 2, no. 4 (December 2018): 1–4. http://dx.doi.org/10.1109/lsens.2018.2873000.

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45

Frye, Mark A. "Behavioral Neurobiology: A Vibrating Gyroscope Controls Fly Steering Maneuvers." Current Biology 17, no. 4 (February 2007): R134—R136. http://dx.doi.org/10.1016/j.cub.2006.12.021.

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46

Cao, Huiliang, Yu Liu, Zhiwei Kou, Yingjie Zhang, Xingling Shao, Jinyang Gao, Kun Huang, et al. "Design, Fabrication and Experiment of Double U-Beam MEMS Vibration Ring Gyroscope." Micromachines 10, no. 3 (March 13, 2019): 186. http://dx.doi.org/10.3390/mi10030186.

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Анотація:
This study presents a new microelectromechanical system, a vibration ring gyroscope with a double U-beam (DUVRG), which was designed using a combination of mathematical analysis and the finite element method. First, a ring vibration resonator with eight double U-beam structures was developed, and 24 capacitive electrodes were designed for drive and sense according to the advantageous characteristics of a thin-shell vibrating gyroscope. Then, based on the elastic mechanics and thin-shell theory, a mathematical stiffness model of the double U-beam was established. The maximum mode resonant frequency error calculated by the DUVRG stiffness model, finite element analysis (FEA) and experiments was 0.04%. DUVRG structures were manufactured by an efficient fabrication process using silicon-on-glass (SOG) and deep reactive ion etching (DRIE), and the FEA value and theoretical calculation had differences of 5.33% and 5.36% with the measured resonant frequency value, respectively. Finally, the static and dynamic performance of the fabricated DUVRG was tested, and the bias instability and angular random walk were less than 8.86 (°)/h and 0.776 (°)/√h, respectively.
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47

Qiu, Anping. "EFFECT OF STRESSES ON MICROMACHINED z-AXIS VIBRATING RATE GYROSCOPE." Chinese Journal of Mechanical Engineering 41, no. 06 (2005): 228. http://dx.doi.org/10.3901/jme.2005.06.228.

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48

Tsuchiya, Toshiyuki, Yasuyuki Kageyama, Hirofumi Funabashi, and Jiro Sakata. "Vibrating gyroscope consisting of three layers of polysilicon thin films." Sensors and Actuators A: Physical 82, no. 1-3 (May 2000): 114–19. http://dx.doi.org/10.1016/s0924-4247(99)00371-4.

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49

Yoon, Sungjin, Usung Park, Jaewook Rhim, and Sang Sik Yang. "Tactical grade MEMS vibrating ring gyroscope with high shock reliability." Microelectronic Engineering 142 (July 2015): 22–29. http://dx.doi.org/10.1016/j.mee.2015.07.004.

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50

Kim, Yong Woo, and Hong Hee Yoo. "Design of a vibrating MEMS gyroscope considering design variable uncertainties." Journal of Mechanical Science and Technology 24, no. 11 (November 2010): 2175–80. http://dx.doi.org/10.1007/s12206-010-0904-4.

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