Статті в журналах: "Vacuum Measurement"

1

ONO, Masatoshi. "Vacuum Measurement." Journal of the Society of Mechanical Engineers 92, no. 848 (1989): 596–98. http://dx.doi.org/10.1299/jsmemag.92.848_596.

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2

Gan, Zhiyin, Dong Lin, Xuefang Wang, Chenggang, Honghai Zhang, and Sheng Liu. "Vacuum measurement on vacuum packaged MEMS devices." Journal of Physics: Conference Series 48 (July 1, 2007): 1429–34. http://dx.doi.org/10.1088/1742-6596/48/1/264.

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3

de Araujo Duarte, Celso. "A thermocouple vacuum gauge for low vacuum measurement." Vacuum 85, no. 10 (March 2011): 972–74. http://dx.doi.org/10.1016/j.vacuum.2011.02.004.

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4

INAYOSHI, Sakae. "Outgassing Measurement for Vacuum Engineering." Journal of the Vacuum Society of Japan 58, no. 2 (2015): 57–62. http://dx.doi.org/10.3131/jvsj2.58.57.

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5

Redhead, P. A. "Measurement of vacuum; 1950–2003." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 21, no. 5 (September 2003): S1—S6. http://dx.doi.org/10.1116/1.1599871.

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6

Shrivastava*, Shailaj Kumar, and Chandan Shrivastava. "Production, Measurement and Applications of Vacuum Systems." International Journal of Engineering and Advanced Technology 10, no. 3 (February 28, 2021): 155–62. http://dx.doi.org/10.35940/ijeat.c2252.0210321.

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The most common type of vacuum pumps and measuring gauges based on available literature are studied with emphasis on how new research and development will enable the new generation of vacuum technology specially in designing, its operational procedure and applications. The technologies were developed to meet the operational goal which include vacuum chamber structures, compatible materials, specialized vacuum pump and gauges. There are many areas where different vacuum condition is required for conducting experiments therefore modeling of pumping system is on demand. The basic understanding of how and when the particular pumping and measurement system can be applied most effectively and economically is essential. The poor choice of pumping and measurement system will interfere the scientific objectives and may leads to substantial maintenance demands and an unpleasant working environment. The development and fundamental investigation of innovative vacuum techniques for creation and measurement of vacuum used for various applications necessary for the research work to be done in future are presented.

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7

Fryč, Jiří, Josef Los, Radovan Kukla, and Jan Kudělka. "Vacuum Fluctuation in 2 × 13 Herringbone Milking Parlour in Dependence on Vacuum Control Method." Acta Technologica Agriculturae 18, no. 4 (December 1, 2015): 118–21. http://dx.doi.org/10.1515/ata-2015-0023.

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Abstract Vacuum fluctuation was measured using three different vacuum control methods. Firstly, the use was made of a control valve delivered by the manufacturer; then, an additionally installed frequency converter was used. Lastly, a frequency converter fitted with the stabilisation device prototype was used. First, control sensitivity according to ISO was measured in all the three alternatives. Then, vacuum fluctuation during milking was measured. To conduct the measurements under objectively identified conditions, another measurement was conducted with air feed during milking being replaced with a precisely defined variable flow rate. The conducted measurement confirmed the fact that when the frequency converter is used, vacuum fluctuation in stabilised condition is at the same level as when the control valve is used. If there are sudden changes in flow rate and the frequency converter is used, vacuum fluctuation increases. The proposed stabilisation device prototype can reduce the fluctuation in small milking plant but it is not suitable in large milking parlours.

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8

Fryč, Jiří, Josef Los, Radovan Kukla, Tomáš Lošák, and Kristina Somerlíková. "Vacuum Fluctuation in a 2×3 Tandem Milking Plant in Dependence on the Vacuum Control Method." Acta Universitatis Agriculturae et Silviculturae Mendelianae Brunensis 64, no. 3 (2016): 775–79. http://dx.doi.org/10.11118/actaun201664030775.

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Vacuum fluctuation was measured using three different vacuum control methods. Firstly, the use was made of a control valve delivered by the manufacturer; then, an additionally installed frequency converter was used. Lastly, a frequency converter fitted with the stabilisation device prototype was used. First, the control sensitivity according to ISO was measured in all three alternatives. Then the vacuum fluctuation during milking was measured. To conduct the measurements under objectively identified conditions, another measurement was conducted with the air feed during milking being replaced with a precisely defined variable flow rate. The conducted measurement confirmed the fact that when the frequency converter is used, the vacuum fluctuation in the stabilised condition is at the same level as when the control valve is used. If there are sudden changes in the flow rate and the frequency converter is used, the vacuum fluctuation increases. The proposed stabilisation device prototype can reduce the fluctuation.

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9

YOSHIDA, Hajime. "Quantitative Measurement and its Uncertainty on Vacuum Pressure Measurement." Journal of the Vacuum Society of Japan 56, no. 11 (2013): 449–56. http://dx.doi.org/10.3131/jvsj2.56.449.

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10

Kuvandykov, R. E. "On the Possibility of Using the Strain-Frequency Method for Measuring the Absolute Gas Pressure in Reference Vacuum Gauges." Measurement Standards. Reference Materials 18, no. 3 (December 30, 2022): 17–28. http://dx.doi.org/10.20915/2077-1177-2022-18-3-17-28.

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An especially important direction in metrological science is ensuring the accuracy of vacuum measurements, which is crucial for industry. In Russia, predominantly foreign vacuum gauges with a vacuum measurement range PNPI – PVPI 0.1–1000 Pa are used as reference vacuum gauges for verification and calibration of vacuum gauges. On the basis of the analysis of the characteristics of reference vacuum gauges used in Russia based on various methods for measuring gas pressure, it can be argued that the most accurate and common measurement method among reference vacuum gauges is the strain method. However, the strain method has a number of limitations associated with the need to introduce the following corrections: correction for the residual pressure in the comparative chamber, correction for the influence of temperature effects during temperature control of the primary measuring transducer. The purpose of this work was to study the compliance of the metrological characteristics of a vacuum gauge based on a new strain-frequency method for measuring the absolute gas pressure with the requirements for reference vacuum gauges given in state verification schemes in the field of vacuum measurements.The main research methods were the study of the metrological characteristics of the strain-frequency vacuum gauge, taking into account the correction for the residual pressure in the comparative chamber; corrections for the influence of temperature effects during temperature control of the primary measuring transducer, as well as for the compliance of the method with the requirements of state verification schemes in the field of vacuum measurements. An assessment of the accuracy indicators of the strain-frequency method for measuring the absolute gas pressure based on the analysis of the measurement equation, taking into account the assessment of the components of the uncertainty sources, is given. The obtained results have shown the possibility of using the strain-frequency method of pressure measurement, with the exception of the correction for the residual pressure in the comparative chamber, corrections for the influence of temperature effects during temperature control of the primary measuring transducer in reference vacuum gauges that meet the requirements of state verification schemes in the field of vacuum measurements.As a result of the study, it was found that the expanded uncertainty of the result of measuring pressure with a vacuum gauge based on the new strain-frequency method does not exceed 2 %. This makes it possible to use this method in reference vacuum gauges.The practical significance of the developed scientific and methodological principles, and technological solutions for calculating and manufacturing the primary measuring transducer of a vacuum gauge based on a new method for measuring low absolute pressure lies in the possibility to manufacture the primary measuring transducer at Russian enterprises using domestic technologies of microsystem technology.

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11

Gibbins, N. J., D. M. Albury, and A. E. Holme. "Vacuum Measurement and Process Control Systems." Measurement and Control 20, no. 8 (October 1987): 25–31. http://dx.doi.org/10.1177/002029408702000805.

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12

Leck, JH. "Total pressure measurement in vacuum technology." Vacuum 37, no. 10 (January 1987): 773. http://dx.doi.org/10.1016/0042-207x(87)90268-5.

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13

Hennessy, Robert G., Max M. Shulaker, Matt Messana, Andrew B. Graham, Nathan Klejwa, J. Provine, Tom W. Kenny, and Roger T. Howe. "Vacuum encapsulated resonators for humidity measurement." Sensors and Actuators B: Chemical 185 (August 2013): 575–81. http://dx.doi.org/10.1016/j.snb.2013.05.016.

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14

Ng, N., R. E. Collins, and L. So. "Thermal conductance measurement on vacuum glazing." International Journal of Heat and Mass Transfer 49, no. 25-26 (December 2006): 4877–85. http://dx.doi.org/10.1016/j.ijheatmasstransfer.2006.05.032.

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15

Wüest, Martin. "Vacuum Pressure Measurement in Industrial Environments." Vakuum in Forschung und Praxis 31, no. 4 (August 2019): 24–28. http://dx.doi.org/10.1002/vipr.201900716.

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16

Zhu, Xi, Wangqing An, Liu Chang, Li ZhenWei, and Liu Zeyuan. "Research of digital temperature measurement system in vacuum thermal test based on DS18B20." MATEC Web of Conferences 173 (2018): 03076. http://dx.doi.org/10.1051/matecconf/201817303076.

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Temperature measurement is a very important measurement project in spacecraft vacuum thermal test, and thermocouple measurement system is generally used for temperature measurement. In order to reduce the number of wire measuring circuit and improving the measurement system of anti disturbance and high measurement accuracy in vacuum thermal test process, which can be used in digital temperature measurement system of vacuum thermal test design, realizes the digital temperature measuring equipment of spacecraft and ground equipment. The system is composed of digital temperature sensor DS18B20 and acquisition device. It can be connected with remote monitoring computer through LAN network to realize remote monitoring of temperature. The hardware structure, communication protocol and software design of the digital temperature measurement system are given in this paper. The vacuum thermal environment test and comparison with the platinum resistance temperature measurement system. The results show that the stability of the system is good and the difference between the measured value and the PT100 measurement is within 0.5 °C, and the linearity is about ±0.1% which satisfies the requirement of vacuum thermal test.

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17

Cherenshchykov, S. A. "A low-voltage Penning cell for vacuum measurement and vacuum technology." Vacuum 73, no. 2 (March 2004): 285–89. http://dx.doi.org/10.1016/j.vacuum.2003.12.003.

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18

Giebel, Friederike Julia, Marcel Köhle, Till Stramm, Klaus T. Kallis, and Horst L. Fiedler. "Concept for a MEMS-type vacuum sensor based on electrical conductivity measurements." Journal of Sensors and Sensor Systems 6, no. 2 (November 16, 2017): 367–74. http://dx.doi.org/10.5194/jsss-6-367-2017.

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Abstract. The concept of the micro-structured vacuum sensor presented in this article is the measurement of the electrical conductivity of thinned gases in order to develop a small, economical and quite a simple type of vacuum sensor. There are already some approaches for small vacuum sensors. Most of them are based on conservative measurement principles similar to those used in macroscopic vacuum gauges. Ionization gauges use additional sources of energy, like hot cathodes, ultraviolet radiation or high voltage for example, for ionizing gas molecules and thereby increasing the number of charge carriers for measuring low pressures. In contrast, the concept discussed here cannot be found in macroscopic sensor systems because it depends on the microscopic dimension of a gas volume defined by two electrodes. Here we present the concept and the production of a micro-structured vacuum sensor chip, followed by the electrical characterization. Reference measurements with electrodes at a distance of about 1 mm showed currents in the size of picoampere and a conductivity depending on ambient pressure. In comparison with these preliminary measurements, fundamental differences regarding pressure dependence of the conductivity are monitored in the electrical characterization of the micro-structured sensor chip. Finally the future perspectives of this sensor concept are discussed.

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19

YOSHIDA, Hajime. "Basics of Vacuum Measurement from the Viewpoint of Metrology (1) Technical Terms used in Vacuum Measurement." Journal of the Vacuum Society of Japan 58, no. 3 (2015): 117–21. http://dx.doi.org/10.3131/jvsj2.58.117.

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20

YOSHIDA, Hajime. "Basics of Vacuum Measurement from Viewpoint of Metrology (2) Technical Terms used in Vacuum Measurement (Sequel)." Journal of the Vacuum Society of Japan 58, no. 4 (2015): 155–61. http://dx.doi.org/10.3131/jvsj2.58.155.

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21

Merrick, Alan. "Uncharted Waters: Vibration Measurement in Thermal Chambers." Journal of the IEST 46, no. 1 (September 14, 2003): 135–40. http://dx.doi.org/10.17764/jiet.46.1.73l46720q1502340.

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Most space flight structures typically are tested for thermal and vacuum survivability, cycled initially at the component level to relieve internal strains and as an end product to verify thermal balance and operation as a complete system. Dynamic testing is generally performed on the individual components and as a complete system prior to the thermal vacuum test. This paper discusses a test requiring vibration data measurement in a thermal environment. Vibrations were induced internally by the thermal cycling of the structure (internal stress relief) as well as input with a shaker system capable of operating at cryogenic (LN2) temperatures. The intent of this vibration input was to characterize the structure rather than performing a qualification vibration environment. Requests for vibration measurements in thermal and vacuum environments are becoming more common, although this is the first test completed at Lockheed Martin Sunnyvale.

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22

Gao, Yinghao, Jinxia Feng, Yuanji Li, and Kuanshou Zhang. "Generation and Measurement of Squeezed Vacuum States at Audio-Band Frequencies." Applied Sciences 9, no. 7 (March 27, 2019): 1272. http://dx.doi.org/10.3390/app9071272.

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Squeezed vacuum states at audio-band frequencies are important quantum resources for practical applications. We demonstrated the generation of squeezed vacuum states at the audio-band frequencies from a subthreshold optical parametric oscillator with a periodically poled KTiOPO4 crystal pumped by a homemade continuous wave single-frequency dual-wavelength laser. To detect squeezed vacuum states at audio-band frequencies, the influences of the local oscillator (LO) power, the common mode rejection ratio (CMRR) of balanced homodyne detectors, and the phase jitter between the LO and squeezed vacuum field on the measurement of squeezed vacuum states at audio-band frequencies were considered. By optimizing the LO power, improving the CMRR of photodetectors to 67 dB based on the design of differential fine-tuning circuit and adjustable bias voltage, and reducing the phase jitter between the LO and squeezed vacuum field to 1.7° with the help of the coherent locking technique, 6.1 ± 0.3 dB squeezed vacuum states at audio frequencies from 5 kHz to 20 kHz were generated. A 3.0 ± 0.3 dB phase squeezed vacuum state was obtained at the audio frequency of 3.5 kHz.

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23

Ahmedov, Haci, Mehnet Celik, Recep Orhan, Beste Korutlu, Sahin Ersoy, and Ramiz Hamid. "A UME Kibble balance displacement measurement procedure." ACTA IMEKO 9, no. 3 (September 30, 2020): 11. http://dx.doi.org/10.21014/acta_imeko.v9i3.766.

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<p>The redefinition of the kilogram in terms of Planck constant came into effect on 20 May 2019. The National Metrology Institute of Turkey (UME) realised the new definition by means of the oscillating magnet Kibble balance. The novel dynamical measurement procedure developed for Kibble balance in Turkey has the advantage of being less sensitive to environmental disturbances compared to the traditional Kibble balance experiments. Precise displacement measurements are performed either with Michelson or Fabry-Perot interferometers in worldwide Kibble balances. Moreover, most of them operate in a global vacuum. A commercial Michelson interferometer has been used in UME’s Kibble balance experiment. In this article, we determine the contribution of ultra-small oscillations to the Planck constant by taking simultaneous displacement measurements on two back-to-back mirrors attached to the piezoelectric transducer, undergoing an oscillatory motion with the Michelson and Fabry-Perot interferometers. The following novel measurement procedure makes such measurements possible in a regular laboratory environment. Otherwise, the experiment needs to be performed in a global vacuum. This is why we were required to investigate the resolution performances of these devices in laboratory conditions. As the expected relative uncertainty in the redefinition of kilogram is above the resolution uncertainties of both interferometers, we may conclude that a commercial Michelson interferometer will serve our purposes in our route to the redefinition of a kilogram by means of local vacuum.</p>

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24

Li, Detian, Yongjun Wang, Huzhong Zhang, Zhenhua Xi, and Gang Li. "Applications of Vacuum Measurement Technology in China’s Space Programs." Space: Science & Technology 2021 (February 27, 2021): 1–14. http://dx.doi.org/10.34133/2021/7592858.

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The significance of vacuum measurement technology is increasingly prominent in China’s thriving space industry. Lanzhou Institute of Physics (LIP) has been dedicated to the development of payloads and space-related vacuum technology for decades, and widely participated in China’s space programs. In this paper, we present several payloads carried on satellites, spaceships, and space stations; the methodologies of which covered the fields of total and partial pressure measurement, vacuum and pressure leak detection, and standard gas inlet technology. Then, we introduce the corresponding calibration standards developed in LIP, which guaranteed the detection precision of these payloads. This review also provides some suggestions and expectations for the future development and application of vacuum measurement technology in space exploration.

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25

wang, Chengxiang, Zhanqiang Hou, Yunbin Kuang, Yulie Wu, Yongmeng Zhang, Xuezhong Wu, and Dingbang Xiao. "A newly MEMS vacuum gauge with multi-modes for low vacuum measurement." Vacuum 192 (October 2021): 110446. http://dx.doi.org/10.1016/j.vacuum.2021.110446.

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26

Shi, Xiong, Zhi-Yin Gan, and Sheng Liu. "Vacuum Degree Measurement for MEMS Vacuum Package Based on Quartz Crystal Oscillator." Sensor Letters 6, no. 1 (February 1, 2008): 178–83. http://dx.doi.org/10.1166/sl.2008.023.

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27

KATO, Shinichi, Junichiro KAMIYA, Kazami YAMAMOTO, Masahiro YOSHIMOTO, and Michikazu KINSHO. "Outgassing Rate Measurement of SUS430 Vacuum Chamber." Journal of the Vacuum Society of Japan 55, no. 4 (2012): 160–63. http://dx.doi.org/10.3131/jvsj2.55.160.

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28

AKIMICHI, Hitoshi. "Vacuum Gauges and their Principles of Measurement." Journal of the Vacuum Society of Japan 56, no. 6 (2013): 220–26. http://dx.doi.org/10.3131/jvsj2.56.220.

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29

YOSHIDA, Hajime. "Introductory Remarks to “Vacuum Measurement”." Journal of the Vacuum Society of Japan 59, no. 9 (2016): 237–38. http://dx.doi.org/10.3131/jvsj2.59.237.

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30

WANG Yu-zhao, 王玉朝, 滕霖 TENG Lin, 孙香政 SUN Xiang-zheng, 王刚 WANG Gang, 郭志想 GUO Zhi-xiang, and 余才佳 YU Cai-jia. "Quality factor measurement of vacuum-packaged microgyroscopes." Optics and Precision Engineering 22, no. 10 (2014): 2708–14. http://dx.doi.org/10.3788/ope.20142210.2708.

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31

Shin, Yong Hyeon, Seung Soo Hong, In Tae Lim, J. H. Kim, Dae Jin Seong, Kwang Hwa Chung, G. W. Moon, and Sung Woo Choi. "Measurement of Outgassing in a Vacuum Environment." Key Engineering Materials 277-279 (January 2005): 831–37. http://dx.doi.org/10.4028/www.scientific.net/kem.277-279.831.

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Outgassing, the evolution of gas from the material in a vacuum, is not only a source of micro contamination in a semiconductor or the flat display panel production process, but it also a limitation factor in the ultra clean process of nano-technology. The outgassing from the materials of satellites and spacecrafts must be controlled for increased safety and function because space is also a vacuum environment. Several methods are used in outgassing measurement in general, but there is no one method suitable for obtaining all outgassing data. The most suitable method for a particular application must be chosen by the experimenter or user. Three types of outgassing measurement systems were fabricated and characterized, ‘Throughput method,’ ‘Rate of Rise method’ and ‘Mass Loss Measurement method’. The outgassing rates of many kinds of materials were measured and characterized using these systems.

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32

Zucchetti, A., W. Vogel, and D. G. Welsch. "Quantum-state homodyne measurement with vacuum ports." Physical Review A 54, no. 1 (July 1, 1996): 856–62. http://dx.doi.org/10.1103/physreva.54.856.

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33

Marks, H. S., I. I. Beilis, and R. L. Boxman. "Measurement of the Vacuum Arc Plasma Force." IEEE Transactions on Plasma Science 37, no. 7 (July 2009): 1332–37. http://dx.doi.org/10.1109/tps.2009.2022011.

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34

Smith, Richard S., and Nathan G. Woodard. "Optical measurement of electron bunching in vacuum." Applied Physics Letters 57, no. 11 (September 10, 1990): 1087–89. http://dx.doi.org/10.1063/1.103541.

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35

Polyanskiy, A. M., V. A. Polyanskiy, K. P. Frolova, and Yu A. Yakovlev. "Vacuum vs argon technology for hydrogen measurement." Procedia Structural Integrity 13 (2018): 1408–13. http://dx.doi.org/10.1016/j.prostr.2018.12.293.

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36

Bussell, Alan. "Balzers advances in measurement at Vacuum 88." Vacuum 38, no. 8-10 (January 1988): 963. http://dx.doi.org/10.1016/0042-207x(88)90553-2.

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37

Kuz’min, V. V. "A systems approach to vacuum measurement methods." Measurement Techniques 42, no. 7 (July 1999): 673–79. http://dx.doi.org/10.1007/bf02512090.

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38

Gasparinetti, Simone, Simon Berger, Abdufarrukh A. Abdumalikov, Marek Pechal, Stefan Filipp, and Andreas J. Wallraff. "Measurement of a vacuum-induced geometric phase." Science Advances 2, no. 5 (May 2016): e1501732. http://dx.doi.org/10.1126/sciadv.1501732.

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Berry’s geometric phase naturally appears when a quantum system is driven by an external field whose parameters are slowly and cyclically changed. A variation in the coupling between the system and the external field can also give rise to a geometric phase, even when the field is in the vacuum state or any other Fock state. We demonstrate the appearance of a vacuum-induced Berry phase in an artificial atom, a superconducting transmon, interacting with a single mode of a microwave cavity. As we vary the phase of the interaction, the artificial atom acquires a geometric phase determined by the path traced out in the combined Hilbert space of the atom and the quantum field. Our ability to control this phase opens new possibilities for the geometric manipulation of atom-cavity systems also in the context of quantum information processing.

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39

Choi, In-Mook, Sam-Yong Woo, and Seung-Soo Hong. "Vacuum measurement by carbon nanotube field emission." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 24, no. 4 (July 2006): 1556–59. http://dx.doi.org/10.1116/1.2167984.

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40

Fitting, H. J., E. Schreiber, and Th Hingst. "Avalanche Measurement in ZnS by Vacuum Emission." physica status solidi (a) 122, no. 2 (December 16, 1990): K165—K168. http://dx.doi.org/10.1002/pssa.2211220257.

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41

YASUDA, K., Y. ITO, R. ISHIGAMI, K. TAKAGI, M. HATASHITA, and S. HATORI. "PIXE measurement system at the Wakasa Wan Energy Research Center." International Journal of PIXE 10, no. 03n04 (January 2000): 97–100. http://dx.doi.org/10.1142/s0129083500000146.

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At the Wakasa Wan Energy Research Center, construction of an ion beam accelerator system has almost completed. Two beam lines for PIXE measurements are equipped; one is for the measurement with a micro beam in vacuum, and the other is for the measurement in air. Details of these beam lines together with a data handling system are discussed.

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42

Jetty, Ninad R. "Nil-potent vacuum in homodyne noise." Journal of Optics 24, no. 3 (January 26, 2022): 035201. http://dx.doi.org/10.1088/2040-8986/ac4871.

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Abstract In the absence of a signal field, vacuum entering through the empty beam splitter port is considered to be the sole contributor to the output noise of conventional two-port homodyne detection. We study a modified configuration that alters the input coefficient of vacuum, predicting an output noise less than that of the conventional configuration. Measurements, however, reveal identical output noise profiles for both the configurations. We explain the observations in terms of the incident field noise alone, and suggest that vacuum does not contribute to homodyne noise or shot-noise. We extend our results to the measurement of squeezed light, with non-ideal detectors.

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43

Chen, Shu-Jung, and Yung-Chuan Wu. "Active Thermoelectric Vacuum Sensor Based on Frequency Modulation." Micromachines 11, no. 1 (December 21, 2019): 15. http://dx.doi.org/10.3390/mi11010015.

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This paper introduces a thermoelectric-type sensor with a built-in heater as an alternative approach to the measurement of vacuum pressure based on frequency modulation. The proposed sensor is fabricated using the TSMC (Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan) 0.35 μm complementary metal-oxide-semiconductor-microelectro-mechanical systems (CMOS–MEMS) process with thermocouples positioned central-symmetrically. The proposed frequency modulation technique involves locking the sensor output signal at a given frequency using a phase-lock-loop (PLL) amplifier to increase the signal-to-noise ratio (SNR) and thereby enhance the sensitivity of vacuum measurements. An improved first harmonic signal detection based on asymmetrical applied heating gives a precise measurement. Following calibration, the output voltage is in good agreement with the calibration values, resulting in an error of 0.25% under pressures between 0.1–10 Torr.

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44

Song, Han Wook, Jong Ho Kim, and Sam Yong Woo. "Development of a refractive index measurement system for vacuum pressure measurement." Journal of the Korean Physical Society 78, no. 2 (January 2021): 124–29. http://dx.doi.org/10.1007/s40042-020-00012-y.

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45

Barker, Daniel S., Bishnu P. Acharya, James A. Fedchak, Nikolai N. Klimov, Eric B. Norrgard, Julia Scherschligt, Eite Tiesinga, and Stephen P. Eckel. "Precise quantum measurement of vacuum with cold atoms." Review of Scientific Instruments 93, no. 12 (December 1, 2022): 121101. http://dx.doi.org/10.1063/5.0120500.

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Анотація:

We describe the cold-atom vacuum standards (CAVS) under development at the National Institute of Standards and Technology (NIST). The CAVS measures pressure in the ultra-high and extreme-high vacuum regimes by measuring the loss rate of sub-millikelvin sensor atoms from a magnetic trap. Ab initio quantum scattering calculations of cross sections and rate coefficients relate the density of background gas molecules or atoms to the loss rate of ultra-cold sensor atoms. The resulting measurement of pressure through the ideal gas law is traceable to the second and the kelvin, making it a primary realization of the pascal. At NIST, two versions of the CAVS have been constructed: a laboratory standard used to achieve the lowest possible uncertainties and pressures, and a portable version that is a potential replacement for the Bayard–Alpert ionization gauge. Both types of CAVSs are connected to a combined extreme-high vacuum flowmeter and dynamic expansion system to enable sensing of a known pressure of gas. In the near future, we anticipate being able to compare the laboratory scale CAVS, the portable CAVS, and the flowmeter/dynamic expansion system to validate the operation of the CAVS as both a standard and vacuum gauge.

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46

Wang, Ling Yun, Xiao Hui Du, Yuan Zhe Su, Jie He, Yi Pan Li, De Zhi Wu, and Dao Heng Sun. "Accuracy Analysis of Quality Factor Measurement Based on Time Domain Method for MEMS Resonators." Key Engineering Materials 609-610 (April 2014): 1131–37. http://dx.doi.org/10.4028/www.scientific.net/kem.609-610.1131.

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To reduce the measurement cost and time, a time domain measurement method of quality factor for MEMS resonator is presented in this paper. The relation curve between quality factor and vacuum level is obtained. The results indicate that measurement error is larger under high vacuum level when the sampling frequency is lower. The reason causing the error is analyzed and measurement precision is improved by increasing the sampling frequency. The measurement results indicate time domain measurement is advisable and improvable for MEMS resonator measurement.

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47

Liu, Zhiheng, Xiongying Duan, Minfu Liao, Guowei Ge, and Jiyan Zou. "A model-based measurement method for intelligent circuit breaker with data communication." Transactions of the Institute of Measurement and Control 40, no. 6 (March 15, 2017): 1854–62. http://dx.doi.org/10.1177/0142331217693672.

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In this paper, an object-oriented information model of an intelligent vacuum circuit breaker based on its physical structure and function (service) was established to integrate the measuring information flow of field parameters, the monitoring information flow of status data, and the operating and controlling information flow. The status parameters of the intelligent vacuum breaker were detected by analysing the principles and methods based on IEC61850 and IEC62271 standards. The IEC 61850 standard repository can be extended according to the characteristics of the intelligent vacuum breaker status parameters, and the IED server model was constructed to be suitable for the vacuum breaker. A key feature of the new method is the use of a multimode fibre that is incorporated into the IED server model to transmit the status parameters from the target to the sensor. The main characteristic of the measurement method is that it exhibits real-time transmission of data collection. The model includes temperature testing of the switch contact, vacuum arc testing, detection of vacuum switch motion and primary circuit parameters testing. Furthermore, we show how the IEC61850 standard can be used to give a better insight on data communication of the data collector and intelligent circuit breaker. Experimental results showed that the feasibility of intelligent vacuum breaker status monitoring through the switching-on test. It purposes to achieve information integration and a frame communication platform for the intelligent vacuum breaker.

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48

Hong, S. S., Y. H. Shin, and J. Y. Lim. "Measurement Uncertainties for Vacuum Standards from a Low to an Ultra-high Vacuum." Applied Science and Convergence Technology 23, no. 3 (May 30, 2014): 103–12. http://dx.doi.org/10.5757/asct.2014.23.3.103.

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49

Nakano, Yusuke, Masahiro Kozako, Masayuki Hikita, Tsuyoshi Tanaka, and Masato Kobayashi. "Estimation method of degraded vacuum in vacuum interrupter based on partial discharge measurement." IEEE Transactions on Dielectrics and Electrical Insulation 26, no. 5 (October 2019): 1520–26. http://dx.doi.org/10.1109/tdei.2019.008142.

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50

Zhang, Feng Tian, Ying Bin Zheng, Bin Tang, Wei Su, and Zhen’an Tang. "Design and Fabrication of High Vacuum Gauge Based on Micro Hotplate." Key Engineering Materials 645-646 (May 2015): 698–705. http://dx.doi.org/10.4028/www.scientific.net/kem.645-646.698.

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Vacuum gauge based on micro hotplate (MHP) is a kind of promising MEMS vacuum gauge due to its advantages including high sensitivity, wide measurement range, fast response speed and comparably easy fabrication, etc. In this paper, through analyzing various of heat dissipation approaches including solid heat conduction, gas heat conduction, heat radiation, and convection, the sensor output expression of MHP-based vacuum gauge is obtained when keeping electric current of heating resistor constant. With the structure size and material properties, the relationship curve between vacuum gauge output and gas pressure can be obtained. By wet etching silicon under the compound dielectric films with embedded metal film resistor, MHP suspended over silicon substrate is fabricated. Then the sensor chip is assembled and put into vacuum system, and test is conducted when keeping the heating resistor at constant heating current of 5mA. The measurement results show that the sensor measurement range is 5×10-3Pa~103Pa, which is basically consistent with the theoretical analyzing results.

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