Дисертації з теми "SUBMICRON TECHNOLOGIES"
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Muñoz, Gamarra Jose Luis. "NEMS/MEMS integration in submicron CMOS Technologies." Doctoral thesis, Universitat Autònoma de Barcelona, 2014. http://hdl.handle.net/10803/285060.
Повний текст джерелаThe reduction of MEMS devices dimensions to the nano scale (NEMS) has allowed them to access a host of new physics and promise to revolutionize sensing applications. However this miniaturization has been obtained at an expense of dedicated, difficult and non reproducible fabrication processes. This thesis deals with the miniaturization of MEMS structures following a CMOS-MEMS approach. In order to it a small pitch CMOS technology (ST 65nm) is studied in depth, NEMS structures are defined using its available layers (width= 60 nm, thickness= 100nm in polysilicon and width= 90nm, thickness= 180nm in metal 1 based on copper) and a post-CMOS releasing process is developed in order to release them. Successful integration of NEMS devices is demostrated with the added value of a robust, reproducible fabrication and an easy integration with additional circuitry. However this aggressive scaling has a main drawback, small output signals. As an alternative to capacitive read-out, the implementation of a resonant gate transduction, based on the idea of modulate the charge of a transistor by the movement of a mechanical structure, is studied and implemented. The frequency response of a polysilicon resonator implemented in AMS 0.35um CMOS technology (24 MHz) has been successfully characterized and its operation as a low voltage switch (2.25 V pull-in) is demonstrated. In addition, we propose the use of mechanical switches not only as memory or logic devices (due to its energy efficiency), but also as the building blocks of a ring oscillator configuration composed exclusively by mechanical switches. This new approach extends their use to other application as mass sensing but with the added value of a digital output signal. In order to implement this new configuration a model to simulate its behavior is developed and mechanical switches are built using different CMOS technologies, trying always to reduce their dimensions. Low operating voltages (5 V, MIM approach), abrupt response (4.3 mV/decade, ST Metal 1) and good ION/IOFF ratio (1.104, MIM approach) are obtained.
Manhas, Sanjeev Kumar. "Hot carrier degradation in deep submicron n-MOS technologies." Thesis, De Montfort University, 2003. http://hdl.handle.net/2086/10787.
Повний текст джерелаBazarjani, Seyfollah Carleton University Dissertation Engineering Electronics. "Mixed analog-digital design considerations in deep submicron CMOS technologies." Ottawa, 1996.
Знайти повний текст джерелаSilvestri, Marco. "AGEING AND IONIZING RADIATION SYNERGETIC EFFECTS IN DEEP-SUBMICRON CMOS TECHNOLOGIES." Doctoral thesis, Università degli studi di Padova, 2010. http://hdl.handle.net/11577/3422233.
Повний текст джерелаI processi termonucleari che si verificano all’interno del sole danno origine a radiazioni ionizzanti, tempeste elettromagnetiche ed emissioni di masse di plasma coronarico ionizzato che possono raggiungere l’atmosfera terrestre. Inoltre gli effetti indotti dai raggi cosmici, la presenza delle fasce di Van Allen, nonché gli ambienti radioattivi artificiali costruiti dall’uomo, espongono i circuiti microelettronici a condizioni di funzionamento estremo nello spazio e sulla terra. Al giorno d’oggi molte attività umane si basano su satelliti geostazionari che devono rimanere funzionanti ed affidabili per lungo tempo: sistemi GPS, comunicazioni audio e video, sistemi di sorveglianza, satelliti meteorologici, applicazioni per la difesa, etc. Inoltre il traffico aereo civile ad alta quota, anch’esso esposto a radiazioni, è sempre in maggiore espansione e naturalmente ogni passeggero si augura di atterrare sano e salvo ogni volta che necessiti di volare. Non da meno le centrali nucleari che forniscono il fabbisogno energetico alle nazioni più avanzate devono assolutamente operare in sicurezza evitando tremendi disastri naturali e sociali. Ognuna di queste applicazioni è tuttavia fortemente dipendente dall’elettronica che gestisce e controlla ogni attività in modo trasparente rispetto all’utente. La sfida principale per ingegneri e scienziati che lavorano in questo ambito, è quella di studiare e progettare microelettronica in grado di operare in ambienti ostili per lungo tempo e in modo affidabile. Il progresso tecnologico dei dispositivi CMOS verso dimensioni sub-micrometriche gioca un ruolo fondamentale in termini di affidabilità. Infatti, a prescindere dagli effetti delle radiazioni, la riduzione delle dimensioni dei dispositivi e l’implementazione di ossidi ultra sottili influiscono sull’affidabilità dei transistor MOS a causa dell’aumento intrinseco dei campi elettrici che accelerano i naturali processi di degradazione. Per esempio, l’iniezione di portatori caldi è una delle cause più importanti di degradazione in quanto l’energia che gli elettroni possono acquisire è correlata al campo elettrico accelerante. Questa tesi sviluppa questa problematica sia su transistor standard (Open Layout Transistor, OLT) che su transistor ad anello (Enclosed layout Transistor, ELT), questi ultimi progettati per essere immuni dagli effetti di dose totale (Total Ionizing Dose, TID). Sebbene i meccanismi e gli effetti legati ai portatori caldi siano ben documentati nella letteratura di settore, questa tesi è uno dei pochi lavori che si propone di investigare le sinergie con gli effetti indotti dai raggi X, introducendo nuovi e interessanti aspetti legati all’affidabilità. Inoltre la previsione del tempo di vita dell’ossido di gate è una delle informazioni più importanti da tenere in considerazione quando si intende pianificare una missione a lungo termine. Questa tesi dimostra che l’esposizione ai raggi X può alterare i successivi test di affidabilità a causa dell’interazione tra i difetti generati dalle radiazioni e dagli stress elettrici. Di conseguenza, un approccio nuovo va seguito quando si intende valutare l’adeguatezza dei dispositivi da implementare in applicazioni ove siano presenti radiazioni ionizzanti. Senza considerare questi aspetti le previsioni che emergono dai test sperimentali possono in alcuni casi fortunati essere conservative, in altri meno fortunati sottostimare i fenomeni portando a conclusioni fuorvianti e addirittura pericolose per il buon esito di una missione. Una nuova fonte di incertezza e di sinergia per le tecnologie CMOS avanzate esposte a raggi X riguarda il diverso assorbimento di dose totale indotto dalle interconnessioni metalliche. Infatti la necessità di integrazione sempre più spinta obbliga i progettisti ad incrementare il numero di strati di interconnessione nel back-end del dispositivo nonché la riduzione dello spessore dei dielettrici isolanti. Di conseguenza, a fronte di una esposizione ai raggi X, gli elettroni secondari generati dall’interazione con gli strati metallici possono raggiungere più facilmente l’area attiva del transistor degradandolo in modo non uniforme. In questa tesi questo effetto viene studiato grazie all’uso di strutture appositamente progettate, contribuendo cosi allo sviluppo di dispositivi il più possibile immuni da tale fenomeno. D’altro canto gli effetti indotti da particelle cariche (Single Event Effect, SEE) nelle moderne tecnologie stanno diventando la principale fonte di errore. L’elettronica implementata a bordo di navicelle spaziali, satelliti, aerei civili e militari, e perfino al livello del suolo terrestre è affetta da SEEs, a volte distruttivi, a volte no. In particolare questa tesi si focalizza sulla rottura istantanea e permanente dell’ossido di gate causata dal passaggio di uno ione pesante in presenza di alti campi elettrici (Single Event Gate Rupture, SEGR) che, a causa delle sue caratteristiche, lo pone tra gli eventi più rischiosi. In questa tesi vengono studiati diversi fattori: l’influenza del tipo di struttura di test, della polarizzazione mantenuta durante gli esperimenti e l’influenza dei raggi X. Anche in questo caso si dimostra l’esistenza di diverse forme di sinergia tra radiazioni e stress elettrico, fornendo indicazioni circa le metodologie di test e l’uso di strutture che possano fornire risultati realistici riguardo l’incidenza di questo fenomeno nei moderni transistor utilizzati per l’elettronica spaziale. In conclusione questa tesi vuole essere il primo forte contributo scientifico per lo studio degli effetti sinergici tra radiazione ionizzante e test di vita accelerati su dispositivi CMOS avanzati, da implementare in ambienti radioattivi quali lo spazio o gli esperimenti di fisica delle alte energie.
Finkelstein, Hod. "Shallow-trench-isolation bounded single-photon avalanche diodes in commercial deep submicron CMOS technologies." Connect to a 24 p. preview or request complete full text in PDF format. Access restricted to UC campuses, 2007. http://wwwlib.umi.com/cr/ucsd/fullcit?p3274523.
Повний текст джерелаTitle from first page of PDF file (viewed October 3, 2007). Available via ProQuest Digital Dissertations. Vita. Includes bibliographical references (p. 256-271).
Havránek, Miroslav [Verfasser]. "Development of pixel front-end electronics using advanced deep submicron CMOS technologies / Miroslav Havránek." Bonn : Universitäts- und Landesbibliothek Bonn, 2014. http://d-nb.info/1077288867/34.
Повний текст джерелаKlein, Adam Sherman. "Design and Characterization of RFIC Voltage Controlled Oscillators in Silicon Germanium HBT and Submicron MOS Technologies." Thesis, Virginia Tech, 2003. http://hdl.handle.net/10919/34435.
Повний текст джерелаMaster of Science
Halek, Basel. "The analysis and optimisation of performance and reliability metrics of capacitive links in deep submicron semiconductor technologies." Thesis, University of Newcastle Upon Tyne, 2010. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.514992.
Повний текст джерелаBaptista, Acácio João Galhardo. "Novel techniques for the design and practical realization of switched-capacitor circuits in deep-submicron CMOS technologies." Doctoral thesis, FCT - UNL, 2009. http://hdl.handle.net/10362/2619.
Повний текст джерелаSwitches presenting high linearity are more and more required in switched-capacitor circuits,namely in 12 to 16 bits resolution analog-to-digital converters. The CMOS technology evolves continuously towards lower supply voltages and, simultaneously, new design techniques are necessary to fulfill the realization of switches exhibiting a high dynamic range and a distortion compatible with referred resolutions. Moreover, with the continuously downing of the sizes, the physic constraints of the technology must be considered to avoid the excessive stress of the devices when relatively high voltages are applied to the gates. New switch-linearization techniques, with high reliability, must be necessarily developed and demonstrated in CMOS integrated circuits. Also, the research of new structures of circuits with switched-capacitor is permanent. Simplified and efficient structures are mandatory, adequate to the new demands emerging from the proliferation of portable equipments, necessarily with low energy consumption while assuring high performance and multiple functions. The work reported in this Thesis comprises these two areas. The behavior of the switches under these new constraints is analyzed, being a new and original solution proposed, in order to maintain the performance. Also, proposals for the application of simpler clock and control schemes are presented, and for the use of open-loop structures and amplifiers with localfeedback. The results, obtained in laboratory or by simulation, assess the feasibility of the presented proposals.
ARUMUGAM, THIAGARAJAN. "A heuristic approach for Capacitive Crosstalk Avoidance during Post Global Routing Crosstalk Synthesis for Deep Submicron Technologies." University of Cincinnati / OhioLINK, 2008. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1204214738.
Повний текст джерелаSchmitz, Axel [Verfasser]. "Reduktion des Ruhestroms bei Deep Submicron CMOS-Technologien / Axel Schmitz." Aachen : Shaker, 2005. http://d-nb.info/1186581255/34.
Повний текст джерелаFischer, Jürgen [Verfasser]. "Adiabatische Schaltungen und Systeme in Deep-Submicron-CMOS-Technologien / Jürgen Fischer." Aachen : Shaker, 2006. http://d-nb.info/1166514110/34.
Повний текст джерелаGlastre, Geneviève. "Realisation et etude du transistor a base permeable en technologie silicium." ENST, 1988. http://www.theses.fr/1988ENST0002.
Повний текст джерелаRaynaud, Christine. "Contribution à la caractérisation et à la modélisation de transistors NMOS submicroniques en haute fréquence." Grenoble INPG, 1988. http://www.theses.fr/1988INPG0124.
Повний текст джерелаCave, Michael David Davis John H. "Scalable voltage reference for ultra deep submicron technologies." 2005. http://repositories.lib.utexas.edu/bitstream/handle/2152/1839/cavem99046.pdf.
Повний текст джерелаCave, Michael David. "Scalable voltage reference for ultra deep submicron technologies." Thesis, 2005. http://hdl.handle.net/2152/1839.
Повний текст джерелаKurapati, Vijaya Chandra. "Analysis of IP based implementations of adders and multipliers in submicron and deep submicron technologies." 2008. http://digital.library.okstate.edu/etd/kurapati_okstate_0664m_10122.pdf.
Повний текст джерелаKeller, Keith James. "Fault list reduction for non-classical faults in submicron technologies." 2002. http://catalog.hathitrust.org/api/volumes/oclc/50137984.html.
Повний текст джерелаTypescript. eContent provider-neutral record in process. Description based on print version record. Includes bibliographical references (leaves 42-43).
BONGIOVANNI, SIMONE. "Design techniques for secure cryptographic circuits in deep submicron technologies." Doctoral thesis, 2015. http://hdl.handle.net/11573/1265920.
Повний текст джерелаDhanasekaran, Vijayakumar. "Baseband analog circuits in deep-submicron cmos technologies targeted for mobile multimedia." 2008. http://hdl.handle.net/1969.1/ETD-TAMU-2947.
Повний текст джерелаHsu, Tzu-Hsuan, and 許慈軒. "The Study of Advanced Technologies and Novel Structures for High Performance Deep Submicron CMOS Image Sensors." Thesis, 2005. http://ndltd.ncl.edu.tw/handle/35923709514151394891.
Повний текст джерела國立成功大學
微電子工程研究所碩博士班
93
Solid-state image sensors, such as the CMOS image sensor (CIS) and the charge-coupled device (CCD), have been applied widely in various machines. In the past several years, a great deal of attention have been paid to the CIS for its superior advantages over CCD in areas such as lower voltage and lower power consumption, compatible with the standard CMOS logic process, and especially providing the integration solution for the SOC. Simultaneously, the CIS has been considered as a viable alternative to the CCD in many applications, such as the digital still camera, the optical mouse and the mobile phone. However, several disadvantages of the logic compatible CIS were found, for example, higher device driving current caused the higher dark signal and the white pixel, thicker backend thickness enlarged optical crosstalk and the degraded photosensitivity from using multi-dielectric films, including SiON, SiO2 and SiN. On the other hand, the pixel size is shrunk continuously for the strong demand of the higher resolution and smaller chip size. But accompany the shrinking of pixel size, several challenges were found. Two major of them are the sensitivity degradation caused by the less fill factor, and the pixel crosstalk enhancement induced by the smaller geometry. In this thesis, we propose some effective approaches to improve the pixel performance of the deep sub-micron CIS. Firstly, we propose to use the thinner epitaxial (Epi) wafer to reduce the electrical crosstalk, especially for longer wavelength light. Because the light with different wavelengths generates the photoelectron at different depth in a Si substrate i.e., the longer wavelength, the deeper penetration depth is. Therefore, adopting the thinner Epi wafer can reduce the electrical crosstalk. With proper process design, the electrical crosstalk of a smaller pixel size can be good enough as the previous larger pixel size. Secondly, we suggest using the thinner backend (TB) scheme to reduce the optical crosstalk as shrinking the pixel size. In order to be compatible with the CMOS logic technology, large inter-metal thickness for lower capacitance is adopted in the CIS process. However, if we scale the device horizontal dimension without thinning the vertical thickness, the optical crosstalk would be enhanced due to the oblique incident light would easily illuminate on the nearby pixel. Hence, thinning down the backend thickness is necessary while shrinking the pixel size. Furthermore, thinning down the backend thickness not only reduces the crosstalk but also suppresses the sensitivity degradation as increase of incident light angles. Thirdly, we develop three advanced backend structures, i.e., Light Guide (LG), Air-Gap-Guard-Ring (AGGR) and Air-Gap-in-situ-MicroLens (AGML), to reduce the optical of the CIS. As continually shrinking the sensor pixel size and adopting multi-layer metal in deep sub-micron process, the crosstalk issue and sensitivity degradation are getting worse for the severe optical scattering. To find out more power solutions for improving the optical performance of the CIS becomes necessary. Based on the Snall’s law, using the refractive index (RI) difference between different dielectric films and the air make the light total reflection occur in the backend of the CIS, thus effectively suppressing the optical crosstalk. Consequently, by using the TB+AGML structure, the pixel size can be further downscaled to smaller geometry with good optical performance. Fourthly, a novel dielectric structure by removing the shallow trench isolation (STI) from the photodiode area and then forming a deposition of SiON was proposed to improve the CIS sensitivity. In the advanced CIS technology, both silicide and borderless contact (BLC) processes have been adopted, thus the photodiode must be placed below the STI SiO2, with SiON film on its surface, in order to enhance the sensitivity. However, as the incident light passes through the dielectric film with abrupt changes of (refractive index) RI, such as low RI (1.46) / high RI (2.15) / low RI (1.46) / high RI (3.44) for ILD_SiO2 / SiON / STI_SiO2 / Si, a destructive interference occurs between these interfaces, thus degrading the sensitivity of the CIS. By using the proposed structure, experimental results show better quantum efficiency (QE) compared to conventional structure, especially illuminated at the blue light. Therefore, we show that the photodiode under Si surface would provide better spectral response than the photodiode under the STI. On the other hand, QE of the photodiode with different dielectric film thickness is simulated. We find that the SiON film is another key layer that might degrade the QE of the photodiode. Consequently, proper choice of the dielectric film structure and the thickness can result in higher quantum efficiency for CMOS image sensors. Finally, we proposed an effective method to evaluate the degradation, thus a guideline has been provided for designers to prevent the performance degradation of CIS from hot carriers effect. For the active pixel sensor (APS) operated at some special conditions, hot carriers generated at the source follower (SF) transistor have been found to degrade the pixel performance such as the increase of dark signal and the decrease of operation range. We study the degradation mechanism of the pixel output signal induced by hot carriers with overall useful bias conditions. And based on the studies, an effective method was proposed to evaluate the degradation. Thus, a guideline has been provided for designers to prevent the performance degradation of APS from hot carriers.
GUPTA, RENU. "REALIZATION OF SIGNAL PROCESSING & GENERATING CIRCUITS USING OTRA." Thesis, 2011. http://dspace.dtu.ac.in:8080/jspui/handle/repository/13875.
Повний текст джерелаWith the evolution of submicron technologies such as 0.18 micron and 0.13 micron, the supply voltages have been reduced to 1.5 volts and lower. This makes it difficult to design a voltage mode CMOS circuit with high linearity and wide dynamic range. Also as signal processing extends to higher frequencies, the traditional design methods based on voltage operational amps are no longer adequate. To overcome these problems circuits operating in current mode are preferred. Various analog building blocks operating in the current mode are available. Operational Trans-Resistance Amplifier (OTRA) is one of them. OTRA is a current controlled voltage source. Both its input and output terminals are characterized by low impedance, therefore eliminating response limitations incurred by capacitive time constants. Its bandwidth is independent of closed loop voltage gain. Thus using the OTRA as the active building block various signal processing and generating circuits can be realized with more flexibility in controlling the frequencies of waveforms. The Operational Trans-Resistance Amplifier (OTRA) is though not available as a single IC but various CMOS circuit realizations are available in literature and can also be implemented using two standard CFOAs. One such CFOA that can be used is the commercially available AD844AN IC 5 manufactured by Analog Devices Inc., US. The AD844AN has current feedback architecture. In this project Operational Trans-Resistance Amplifier (OTRA) based different analog signal processing and generating circuits such as Filters, Multiphase Sinusoidal Oscillators (MSO), Voltage Controlled Oscillator (VCO) and LC oscillator based on active realization of inductor have been realized. The theoretical results have been verified through PSPICE simulations and experimental work by assembling practical circuits of the above and testing them to give near theoretical results. For practical circuits the OTRA has been realized using the AD844AN CFOA ICs manufactured by Analog Devices.
Huang, Yi-Jyun, and 黃意君. "Part 1: Effect of Pre-Gate Oxide Clean Water Temperature on The Performances of Deep-submicron CMOSPart 2: Impact of Silicide Technologies on The Integrity of Thin Gate Oxide Film Dielectric." Thesis, 2006. http://ndltd.ncl.edu.tw/handle/57980954762570742140.
Повний текст джерела國立成功大學
微電子工程研究所碩博士班
94
Part 1 Effect of silicon surface micro-roughness and stress caused by hot DI water rinse on the electrical properties of deep-submicron CMOS transistors and MOS capacitors such as threshold voltage, saturation current, leakage current and breakdown voltage (VBD) and charge to breakdown (QBD) have been studied systematically. It shows that the hot DI water rinse can lead to micro-roughness causing the wider distribution of the saturation current as well as threshold voltage and degrading the breakdown voltage of devices. Additionally, increase of surface roughness could induce higher interface trap charge. The micro-roughness of silicon surface is evaluated by the atomic force microscope (AFM) while the density of interface trap charges is measured by the C-V measurement. Part 2 The impact of different silicide technologies on the gate oxide integrity (GOI) in the metal-oxide-semiconductor (MOS) has been studied in detail. We found that the in situ doped polysilicon results in lower breakdown voltage and more interface trap charges due to the penetration of phosphorus atoms. The implant-polysilicon was found to improve the gate oxide integrity (GOI) under the 800oC, 20 minutes furnace anneal. But the GOI become worse for higher temperature and longer anneal time due to the thermal process caused dopants diffusing into the gate oxide film results in more traps in the oxide, then degrades the gate oxide integrity.