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Автор: Grafiati

Опубліковано: 6 вересня 2023

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1

Ryabcev, I. A., A. A. Ershov, D. V. Ryaikkenen, A. P. Burovikhin, R. V. Haponchyk, I. Yu Tatsenko, A. A. Stashkevich, A. A. Nikitin, and A. B. Ustinov. "Investigation of the Optical Properties of Silicon-on-Insulator Microring Resonators Using Optical Backscatter Reflectometry." Journal of the Russian Universities. Radioelectronics 25, no. 6 (December 28, 2022): 79–89. http://dx.doi.org/10.32603/1993-8985-2022-25-6-79-89.

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Introduction. Optical backscatter reflectometry is one of the most promising methods used to examine characteristic parameters relevant to the design of microring resonators. This method paves the way for experimental determination of the coupling coefficient and propagation loss. However, experimental verification of this technique by comparing the transmission characteristics obtained by reflectometry and those directly measured by an optical vector analyzer has not been carried out.Aim. To determine the parameters of microring resonators by optical reflectometry and to calculate on their basis the transmission characteristics of microring resonators. To compare the calculated transmission characteristics with those obtained experimentally using a high-resolution vector analyzer.Materials and methods. The characteristic parameters of silicon-on-insulator microring resonators were investigated using an ultra-high resolution reflectometer. An original algorithm was employed to derive the characteristic parameters of microring resonators from reflectograms. An optical vector analyzer was used to study the transmission characteristics of microring resonators. Numerical modeling of transmission characteristics considering the obtained parameters was carried out according an analytical approach based on partial wave analysis.Results. The obtained values of the power coupling coefficient κ = 0.167 and propagation losses α = 3.25 dB/cm were used for numerical simulation of the transmission characteristics of a microring resonator. These characteristics were found to agree well with those obtained experimentally. The free spectral range of 88.8 GHz and Q-factor of 45 000 were determined.Conclusion. An experimental study of the characteristic parameters of silicon-on-insulator microring resonators was conducted using an optical backscatter reflectometer. The performed comparison of the experimental and theoretical transmission characteristics showed good agreement, which indicates the high accuracy of the determined resonator parameters and, as a result, the relevance of the described method.

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2

Tan, Ying, and Daoxin Dai. "Silicon microring resonators." Journal of Optics 20, no. 5 (April 18, 2018): 054004. http://dx.doi.org/10.1088/2040-8986/aaba20.

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3

Bogaerts, W., P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. Kumar Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, and R. Baets. "Silicon microring resonators." Laser & Photonics Reviews 6, no. 1 (September 13, 2011): 47–73. http://dx.doi.org/10.1002/lpor.201100017.

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4

Ramiro-Manzano, Fernando, Stefano Biasi, Martino Bernard, Mattia Mancinelli, Tatevik Chalyan, Fabio Turri, Mher Ghulinyan, et al. "Microring Resonators and Silicon Photonics." MRS Advances 1, no. 48 (2016): 3281–93. http://dx.doi.org/10.1557/adv.2016.393.

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ABSTRACTSilicon Photonics is the technological to face the future challenges in data communications and processing. This technology follows the same paradigm as the technological revolution of the integrated circuit industry, that is, the miniaturization and the standardization. One of the most important building blocks in Silicon Photonics is the microresonator, a circular optical cavity, which enables many different passive and active optical functions. Here, we will describe the new physics of the intermodal coupling, which occurs when multi radial mode resonators are coupled to waveguides, and of the optical chaos, which develops in coupled sequence of resonators. In addition, an application of resonators in the label-free biosensing will be discussed.

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5

Shi, W., X. Wang, W. Zhang, H. Yun, C. Lin, L. Chrostowski, and N. A. F. Jaeger. "Grating-coupled silicon microring resonators." Applied Physics Letters 100, no. 12 (March 19, 2012): 121118. http://dx.doi.org/10.1063/1.3696082.

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6

Luo, Lian-Wee, Gustavo S. Wiederhecker, Kyle Preston, and Michal Lipson. "Power insensitive silicon microring resonators." Optics Letters 37, no. 4 (February 9, 2012): 590. http://dx.doi.org/10.1364/ol.37.000590.

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7

Liu, Jiacheng, Chao Wu, Gongyu Xia, Qilin Zheng, Zhihong Zhu, and Ping Xu(). "Bandwidth-tunable silicon nitride microring resonators." Chinese Physics B 31, no. 1 (January 1, 2022): 014201. http://dx.doi.org/10.1088/1674-1056/ac2e64.

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We designed a reconfigurable dual-interferometer coupled silicon nitride microring resonator. By tuning the integrated heater on interferometer’s arms, the “critical coupling” bandwidth of resonant mode is continuously adjustable whose quality factor varies from 7.9 × 104 to 1.9 × 105 with the extinction ratio keeping higher than 25 dB. Also a variety of coupling spanning from “under-coupling” to “over-coupling” were achieved, showing the ability to tune the quality factor from 6.0 × 103 to 2.3 × 105. Our design can provide an adjustable filtering method on silicon nitride photonic chip and contribute to optimize the nonlinear process for quantum photonics and all-optical signal processing.

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8

Guha, Biswajeet, Bernardo B. C. Kyotoku, and Michal Lipson. "CMOS-compatible athermal silicon microring resonators." Optics Express 18, no. 4 (February 3, 2010): 3487. http://dx.doi.org/10.1364/oe.18.003487.

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9

Hu, Yingtao, Xi Xiao, Zhiyong Li, Yuntao Li, Yude Yu, and Jinzhong Yu. "Slow light in silicon microring resonators." Frontiers of Optoelectronics in China 4, no. 3 (July 22, 2011): 282–87. http://dx.doi.org/10.1007/s12200-011-0137-x.

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10

Voronkov, Grigory, Aida Zakoyan, Vladislav Ivanov, Anna Voronkova, Ivan Stepanov, Ellizaveta Grakhova, Vladimir Lyubopytov, and Ruslan Kutluyarov. "Fully integrated optical sensor system with intensity interrogation." Information and Control Systems, no. 6 (December 27, 2022): 20–30. http://dx.doi.org/10.31799/1684-8853-2022-6-20-30.

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Introduction: Today sensor systems based on integrated photonics devices are the most important branch of embedded information and control systems for various functions. The output characteristics of a sensor system are significantly determined by the efficiency of the interrogator. The intensity interrogator based on a microring resonator can provide a high scanning rate and sensitivity that meets the requirements of a wide range of applications. Purpose: To develop an effective sensor system composed of a refractometric sensor and an interrogator located on the same photonic integrated circuit for marker-free determination of the concentration of substances in liquids. Methods: We use the numerical simulation of electromagnetic field propagation in a waveguide system (integrated silicon waveguides on a silicon dioxide substrate) in the research. The simulation has been carried out using the Ansys Lumerical environment, the FDTD (Finite Difference Time Domain) solver. The parameters of the microring resonators were optimized to obtain the coupling coefficients between the waveguides, providing the operation in the critical coupling mode. Results: We propose the concept of a fully integrated photonic sensor system based on micro-ring add-drop resonators. A sensor based on microring resonators has been developed, which consists of two half-rings with a radius of 18 μm, connected by sections of straight waveguides 3 μm long. An interrogator represented by a microring resonator with a radius of 10 µm has been developed. According to simulation results with a broadband source, the achieved sensor sensitivity was 110 nm per refractive index change, or 1350 dB per refractive index change. We propose a technique for choosing the optimal characteristics of the sensor and interrogator targeted to improve the complete system efficiency. Practical relevance: Sensor systems based on photonic integrated circuits can meet the demand for devices characterized by low power consumption, small size, immunity to electromagnetic interference and low cost.

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11

Yan, Hai, Lijun Huang, Xiaochuan Xu, Naimei Tang, Swapnajit Chakravarty, Huiping Tian, and Ray T. Chen. "Silicon based On-chip Sub-Wavelength Grating Ring and Racetrack Resonator BioSensors." MRS Advances 2, no. 30 (2017): 1577–89. http://dx.doi.org/10.1557/adv.2016.678.

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ABSTRACTIn this paper, we experimentally study the unique surface sensing property and enhanced sensitivity in subwavelength grating (SWG) based microring resonator biosensors versus conventional ring resonator biosensors. In contrast to a conventional ring, the effective sensing region in the SWG microring resonator includes not only the top and side of the waveguide, but also the space between the silicon pillars on the propagation path of the optical mode. It leads to an unique property of thickness-independent surface sensitivity versus common evanescent wave sensors; in other words, the surface sensitivity remains constantly high with progressive attachment of biomolecules to the sensor surface. To increase the robustness of performance of ring shaped circular SWG biosensors, we experimentally demonstrate silicon SWG racetrack resonators. A quality factor of 9800 and bulk sensitivity (S) is ∼429.7 nm/RIU (refractive index per unit) results in an intrinsic detection limit (iDL) 3.71×10-4 RIU in racetrack SWG biosensors while still retaining the accumulated surface thickness properties of circular rings.

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12

Ruan, Zhengsen, Nan Zhou, Shuang Zheng, Xiaoping Cao, Yun Long, Lin Chen, and Jian Wang. "Releasing the light field in subwavelength grating slot microring resonators for athermal and sensing applications." Nanoscale 12, no. 29 (2020): 15620–30. http://dx.doi.org/10.1039/d0nr00833h.

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13

Kirk, James T., Kerry W. Lannert, Daniel M. Ratner, and Jill M. Johnsen. "Serologic and Phenotypic Analysis of Blood Types Via Silicon Nanophotonics." Blood 124, no. 21 (December 6, 2014): 1565. http://dx.doi.org/10.1182/blood.v124.21.1565.1565.

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Abstract Tens of millions of donor and patient samples are tested yearly to establish blood type compatibility between donor and recipient and to protect recipients from blood-borne infectious diseases. Blood type testing, particularly donor testing, is traditionally based in centralized clinical laboratories. However, current blood typing methods are encumbered by reagent availability, cost, technical training requirements, and time, placing a costly burden on the medical system. To address practical needs in blood typing, we have developed a multiplexed blood analysis platform using a low-cost and scalable silicon photonic biochip. This study investigates the use of silicon microring sensors to capture, detect, and quantify specific red blood cell (RBC) membrane antigens and anti-blood type antibodies from blood. To validate ABO blood phenotyping, microring resonators were streptavidin coated and functionalized with biotinylated anti-A IgM or biotinylated anti-B IgM antibodies. First, the response of anti-A/B functionalized microring resonators to characterized RBC membranes (RBC ghosts, 108 cells/ml) were measured in real-time (Figure 1). The biosensor arrays also exhibited minimal non-specific adsorption of RBC membrane fragments to the sensor surface. Microring resonators were shown to be suitable for identifying RBC ABO phenotype from donor blood samples. For ABO serologic analysis, silicon chips were functionalized with synthetic multivalent polymeric blood group antigens to serve as capture elements for circulating anti-ABO antibodies. Each chip also had sensors functionalized with biotinylated Protein A (btn-ProtA) and a biotinylated polyacrylamide polymer scaffold (btn-paa) to serve as on-chip positive and negative controls, respectively. The multiplexed biosensor chips were exposed to 100mL of plasma, followed by an anti-human-IgM antibody to enhance detection and quantification of antibodies bound to the surface. The resonance shift in each microring resonator was monitored over time, and the sensor response of the polymeric A and B blood group antigens was normalized to the control sensors. Figure 2 illustrates the levels of bound anti-A and anti-B for a panel of donor blood samples with varying ABO blood type, expressed as a relative shift in sensor resonance wavelength. These results demonstrate the detection of the naturally occurring' anti-A/B IgM antibodies for each respective ABO blood type. We have demonstrated that microring resonator biosensor arrays can quantitatively determine the donor ABO phenotypic and serologic status while incorporating on-chip controls for process standardization. Our work serves as proof-of-concept that a multiplexed silicon nanophotonics platform can rapidly detect both RBC antigens and anti-RBC antibodies in biological samples. This method has the potential for broad applicability in hematology and transfusion medicine for blood typing, quantitative monitoring of specific antibodies, and pathogen screening. Figure 1 Figure 1. Figure 2 Figure 2. Disclosures No relevant conflicts of interest to declare.

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14

Yang, Fenghe, Pengfei Sun, Ruixuan Chen, and Zhiping Zhou. "A controllable coupling structure for silicon microring resonators based on adiabatic elimination." Chinese Optics Letters 18, no. 1 (2020): 013601. http://dx.doi.org/10.3788/col202018.013601.

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15

Igarashi, Anh, Maho Abe, Shigeki Kuroiwa, Keishi Ohashi, and Hirohito Yamada. "Enhancement of Refractive Index Sensitivity Using Small Footprint S-Shaped Double-Spiral Resonators for Biosensing." Sensors 23, no. 13 (July 5, 2023): 6177. http://dx.doi.org/10.3390/s23136177.

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We demonstrate an S-shaped double-spiral microresonator (DSR) for detecting small volumes of analytes, such as liquids or gases, penetrating a microfluidic channel. Optical-ring resonators have been applied as label-free and high-sensitivity biosensors by using an evanescent field for sensing the refractive index of analytes. Enlarging the ring resonator size is a solution for amplifying the interactions between the evanescent field and biomolecules to obtain a higher refractive index sensitivity of the attached analytes. However, it requires a large platform of a hundred square millimeters, and 99% of the cavity area would not involve evanescent field sensing. In this report, we demonstrate the novel design of a Si-based S-shaped double-spiral resonator on a silicon-on-insulator substrate for which the cavity size was 41.6 µm × 88.4 µm. The proposed resonator footprint was reduced by 680 times compared to a microring resonator with the same cavity area. The fabricated resonator exposed more sensitive optical characteristics for refractive index biosensing thanks to the enhanced contact interface by a long cavity length of DSR structures. High quality factors of 1.8 × 104 were demonstrated for 1.2 mm length DSR structures, which were more than two times higher than the quality factors of microring resonators. A bulk sensitivity of 1410 nm/RIU was calculated for detecting 1 µL IPA solutions inside a 200 µm wide microchannel by using the DSR cavity, which had more than a 10-fold higher sensitivity than the sensitivity of the microring resonators. A DSR device was also used for the detection of 100 ppm acetone gas inside a closed bottle.

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16

Henriksson, Anders, Laura Kasper, Matthias Jäger, Peter Neubauer, and Mario Birkholz. "An Approach to Ring Resonator Biosensing Assisted by Dielectrophoresis: Design, Simulation and Fabrication." Micromachines 11, no. 11 (October 22, 2020): 954. http://dx.doi.org/10.3390/mi11110954.

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The combination of extreme miniaturization with a high sensitivity and the potential to be integrated in an array form on a chip has made silicon-based photonic microring resonators a very attractive research topic. As biosensors are approaching the nanoscale, analyte mass transfer and bonding kinetics have been ascribed as crucial factors that limit their performance. One solution may be a system that applies dielectrophoretic forces, in addition to microfluidics, to overcome the diffusion limits of conventional biosensors. Dielectrophoresis, which involves the migration of polarized dielectric particles in a non-uniform alternating electric field, has previously been successfully applied to achieve a 1000-fold improved detection efficiency in nanopore sensing and may significantly increase the sensitivity in microring resonator biosensing. In the current work, we designed microring resonators with integrated electrodes next to the sensor surface that may be used to explore the effect of dielectrophoresis. The chip design, including two different electrode configurations, electric field gradient simulations, and the fabrication process flow of a dielectrohoresis-enhanced microring resonator-based sensor, is presented in this paper. Finite element method (FEM) simulations calculated for both electrode configurations revealed ∇E2 values above 1017 V2m−3 around the sensing areas. This is comparable to electric field gradients previously reported for successful interactions with larger molecules, such as proteins and antibodies.

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17

Cardenosa-Rubio, Maria C., Richard M. Graybill, and Ryan C. Bailey. "Combining asymmetric PCR-based enzymatic amplification with silicon photonic microring resonators for the detection of lncRNAs from low input human RNA samples." Analyst 143, no. 5 (2018): 1210–16. http://dx.doi.org/10.1039/c7an02045g.

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18

PITAKWONGSAPORN, SANTHAD, and SURASAK CHIANGGA. "TUNABLE ASYMMETRIC FANO LINESHAPES IN SILICON-BASED MICRORING RESONATORS WITH FEEDBACK." Journal of Nonlinear Optical Physics & Materials 20, no. 03 (September 2011): 357–66. http://dx.doi.org/10.1142/s0218863511006145.

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We theoretically examine the Fano lineshapes of silicon-based compound microring resonators consisting of a single resonator channel dropping filter linked to a loop as a feedback structure. All possible optical effects for the continuous-wave operating regime, such as linear absorption or scattering, two-photon absorption, free-carrier absorption and dispersion, thermo-optics, are simultaneously considered. We show that sharp Fano resonances can be tuned by variation in the coupling coefficients, length of feedback loop, effective free carrier lifetime and the temperature inside the device. Tunable Fano lineshapes open up opportunities for applications in sensing, computing, and communications.

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19

Xu, L., C. Li, C. Y. Wong, and H. K. Tsang. "DQPSK demodulation using integrated silicon microring resonators." Optics Communications 284, no. 1 (January 2011): 172–75. http://dx.doi.org/10.1016/j.optcom.2010.08.056.

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20

Xu, Qianfan, David Fattal та Raymond G. Beausoleil. "Silicon microring resonators with 1.5-μm radius". Optics Express 16, № 6 (14 березня 2008): 4309. http://dx.doi.org/10.1364/oe.16.004309.

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21

Lin, Shiyun, Ethan Schonbrun, and Kenneth Crozier. "Optical Manipulation with Planar Silicon Microring Resonators." Nano Letters 10, no. 7 (July 14, 2010): 2408–11. http://dx.doi.org/10.1021/nl100501d.

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22

Bachman, Daniel, Zhijiang Chen, Ashok M. Prabhu, Robert Fedosejevs, Ying Y. Tsui, and Vien Van. "Femtosecond laser tuning of silicon microring resonators." Optics Letters 36, no. 23 (December 1, 2011): 4695. http://dx.doi.org/10.1364/ol.36.004695.

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23

Zhang, Chuang, Chang-Ling Zou, Yan Zhao, Chun-Hua Dong, Cong Wei, Hanlin Wang, Yunqi Liu, Guang-Can Guo, Jiannian Yao, and Yong Sheng Zhao. "Organic printed photonics: From microring lasers to integrated circuits." Science Advances 1, no. 8 (September 2015): e1500257. http://dx.doi.org/10.1126/sciadv.1500257.

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A photonic integrated circuit (PIC) is the optical analogy of an electronic loop in which photons are signal carriers with high transport speed and parallel processing capability. Besides the most frequently demonstrated silicon-based circuits, PICs require a variety of materials for light generation, processing, modulation, and detection. With their diversity and flexibility, organic molecular materials provide an alternative platform for photonics; however, the versatile fabrication of organic integrated circuits with the desired photonic performance remains a big challenge. The rapid development of flexible electronics has shown that a solution printing technique has considerable potential for the large-scale fabrication and integration of microsized/nanosized devices. We propose the idea of soft photonics and demonstrate the function-directed fabrication of high-quality organic photonic devices and circuits. We prepared size-tunable and reproducible polymer microring resonators on a wafer-scale transparent and flexible chip using a solution printing technique. The printed optical resonator showed a quality (Q) factor higher than 4 × 105, which is comparable to that of silicon-based resonators. The high material compatibility of this printed photonic chip enabled us to realize low-threshold microlasers by doping organic functional molecules into a typical photonic device. On an identical chip, this construction strategy allowed us to design a complex assembly of one-dimensional waveguide and resonator components for light signal filtering and optical storage toward the large-scale on-chip integration of microscopic photonic units. Thus, we have developed a scheme for soft photonic integration that may motivate further studies on organic photonic materials and devices.

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24

Miarabbas Kiani, Khadijeh, Dawson B. Bonneville, Andrew P. Knights, and Jonathan D. B. Bradley. "High-Q TeO2–Si Hybrid Microring Resonators." Applied Sciences 12, no. 3 (January 27, 2022): 1363. http://dx.doi.org/10.3390/app12031363.

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We present the design and experimental measurement of tellurium oxide-clad silicon microring resonators with internal Q factors of up to 1.5 × 106, corresponding to a propagation loss of 0.42 dB/cm at wavelengths around 1550 nm. This compares to a propagation loss of 3.4 dB/cm for unclad waveguides and 0.97 dB/cm for waveguides clad with SiO2. We compared our experimental results with the Payne–Lacey model describing propagation dominated by sidewall scattering. We conclude that the relative increase in the refractive index of TeO2 reduces scattering sufficiently to account for the low propagation loss. These results, in combination with the promising optical properties of TeO2, provide a further step towards realizing compact, monolithic, and low-loss passive, nonlinear, and rare-earth-doped active integrated photonic devices on a silicon photonic platform.

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25

Hazura, H., A. R. Hanim, B. Mardiana, S. Shaari, B. Y. Majlis, and P. S. Menon. "Performance of Optical Wavelength Demultiplexer Based on Silicon-on-Insulator (SOI) Microring Resonators (MRRs)." Advanced Materials Research 378-379 (October 2011): 549–52. http://dx.doi.org/10.4028/www.scientific.net/amr.378-379.549.

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In this paper, we presented the performance analysis of Silicon- on- Insulator (SOI) based, four channels optical wavelength demultiplexer using microrings. The characterizations are done employing Finite- Difference Time- Domain (FDTD) mode simulations from RSOFT. Serially cascaded microring arrays up to the third order are demonstrated to discuss the design issues of the laterally coupled wavelength demultiplexer. Characteristics like the Free Spectral Range (FSR), crosstalk and insertion loss losses are studied.

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26

Padmaraju, Kishore, and Keren Bergman. "Resolving the thermal challenges for silicon microring resonator devices." Nanophotonics 3, no. 4-5 (August 1, 2014): 269–81. http://dx.doi.org/10.1515/nanoph-2013-0013.

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AbstractSilicon microring resonators have been hailed for their potential use in next-generation optical interconnects. However, the functionality of silicon microring based devices suffer from susceptibility to thermal fluctuations that is often overlooked in their demonstrated results, but must be resolved for their future implementation in microelectronic applications. We survey the emerging efforts that have been put forth to resolve these thermal susceptibilities and provide a comprehensive discussion of their advantages and disadvantages.

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27

Mordan, Emily H., James H. Wade, Eric Pearce, David M. Meunier, and Ryan C. Bailey. "A linear mass concentration detector for solvent gradient polymer separations." Analyst 145, no. 13 (2020): 4484–93. http://dx.doi.org/10.1039/c9an02533b.

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Silicon photonic microring resonators are an optical sensor utilized here as a detector for gradient elution liquid chromatography of polymers. Universal refractive index based detection and a linear mass concentration response is observed.

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28

Borga, Piero, Francesca Milesi, Nicola Peserico, Chiara Groppi, Francesco Damin, Laura Sola, Paola Piedimonte, et al. "Active Opto-Magnetic Biosensing with Silicon Microring Resonators." Sensors 22, no. 9 (April 25, 2022): 3292. http://dx.doi.org/10.3390/s22093292.

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Integrated optical biosensors are gaining increasing attention for their exploitation in lab-on-chip platforms. The standard detection method is based on the measurement of the shift of some optical quantity induced by the immobilization of target molecules at the surface of an integrated optical element upon biomolecular recognition. However, this requires the acquisition of said quantity over the whole hybridization process, which can take hours, during which any external perturbation (e.g., temperature and mechanical instability) can seriously affect the measurement and contribute to a sizeable percentage of invalid tests. Here, we present a different assay concept, named Opto-Magnetic biosensing, allowing us to optically measure off-line (i.e., post hybridization) tiny variations of the effective refractive index seen by microring resonators upon immobilization of magnetic nanoparticles labelling target molecules. Bound magnetic nanoparticles are driven in oscillation by an external AC magnetic field and the corresponding modulation of the microring transfer function, due to the effective refractive index dependence on the position of the particles above the ring, is recorded using a lock-in technique. For a model system of DNA biomolecular recognition we reached a lowest detected concentration on the order of 10 pm, and data analysis shows an expected effective refractive index variation limit of detection of 7.5×10−9 RIU, in a measurement time of just a few seconds.

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Borga, Piero, Francesca Milesi, Nicola Peserico, Chiara Groppi, Francesco Damin, Laura Sola, Paola Piedimonte, et al. "Active Opto-Magnetic Biosensing with Silicon Microring Resonators." Sensors 22, no. 9 (April 25, 2022): 3292. http://dx.doi.org/10.3390/s22093292.

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Integrated optical biosensors are gaining increasing attention for their exploitation in lab-on-chip platforms. The standard detection method is based on the measurement of the shift of some optical quantity induced by the immobilization of target molecules at the surface of an integrated optical element upon biomolecular recognition. However, this requires the acquisition of said quantity over the whole hybridization process, which can take hours, during which any external perturbation (e.g., temperature and mechanical instability) can seriously affect the measurement and contribute to a sizeable percentage of invalid tests. Here, we present a different assay concept, named Opto-Magnetic biosensing, allowing us to optically measure off-line (i.e., post hybridization) tiny variations of the effective refractive index seen by microring resonators upon immobilization of magnetic nanoparticles labelling target molecules. Bound magnetic nanoparticles are driven in oscillation by an external AC magnetic field and the corresponding modulation of the microring transfer function, due to the effective refractive index dependence on the position of the particles above the ring, is recorded using a lock-in technique. For a model system of DNA biomolecular recognition we reached a lowest detected concentration on the order of 10 pm, and data analysis shows an expected effective refractive index variation limit of detection of 7.5×10−9 RIU, in a measurement time of just a few seconds.

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30

Zhang Fanfan, 张凡凡, 张磊 Zhang Lei, and 杨林 Yang Lin. "Directed Logic Circuits Based on Silicon Microring Resonators." Laser & Optoelectronics Progress 51, no. 11 (2014): 110004. http://dx.doi.org/10.3788/lop51.110004.

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31

Ballesteros, G. C., J. Matres, J. Martí, and C. J. Oton. "Characterizing and modeling backscattering in silicon microring resonators." Optics Express 19, no. 25 (December 5, 2011): 24980. http://dx.doi.org/10.1364/oe.19.024980.

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32

Noury, Adrien, Xavier Le Roux, Laurent Vivien, and Nicolas Izard. "Controlling carbon nanotube photoluminescence using silicon microring resonators." Nanotechnology 25, no. 21 (May 2, 2014): 215201. http://dx.doi.org/10.1088/0957-4484/25/21/215201.

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33

Jiang, Wei C., Jidong Zhang, and Qiang Lin. "Compact suspended silicon microring resonators with ultrahigh quality." Optics Express 22, no. 1 (January 10, 2014): 1187. http://dx.doi.org/10.1364/oe.22.001187.

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34

Zhang, Yaojing, Liang Wang, Zhenzhou Cheng, and Hon Ki Tsang. "Forward stimulated Brillouin scattering in silicon microring resonators." Applied Physics Letters 111, no. 4 (July 24, 2017): 041104. http://dx.doi.org/10.1063/1.4996367.

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35

Guha, Biswajeet, Jaime Cardenas, and Michal Lipson. "Athermal silicon microring resonators with titanium oxide cladding." Optics Express 21, no. 22 (October 28, 2013): 26557. http://dx.doi.org/10.1364/oe.21.026557.

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36

Li, Ang, Thomas Van Vaerenbergh, Peter De Heyn, Peter Bienstman, and Wim Bogaerts. "Backscattering in silicon microring resonators: a quantitative analysis." Laser & Photonics Reviews 10, no. 3 (April 9, 2016): 420–31. http://dx.doi.org/10.1002/lpor.201500207.

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37

Pintus, Paolo, Michael Hofbauer, Costanza L. Manganelli, Maryse Fournier, Sarat Gundavarapu, Olivier Lemonnier, Fabrizio Gambini, et al. "Silicon Microring Resonators: PWM‐Driven Thermally Tunable Silicon Microring Resonators: Design, Fabrication, and Characterization (Laser Photonics Rev. 13(9)/2019)." Laser & Photonics Reviews 13, no. 9 (September 2019): 1970035. http://dx.doi.org/10.1002/lpor.201970035.

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38

Dengke Zhang, Dengke Zhang, Xue Feng Xue Feng, and Yidong Huang Yidong Huang. "Simulation of 60-GHz microwave photonic filters based on serially coupled silicon microring resonators." Chinese Optics Letters 10, no. 2 (2012): 021302–21305. http://dx.doi.org/10.3788/col201210.021302.

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39

Zeng, Desheng, Qiang Liu, Chenyang Mei, Hongwei Li, Qingzhong Huang, and Xinliang Zhang. "Demonstration of Ultra-High-Q Silicon Microring Resonators for Nonlinear Integrated Photonics." Micromachines 13, no. 7 (July 21, 2022): 1155. http://dx.doi.org/10.3390/mi13071155.

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A reflowing photoresist and oxidation smoothing process is used to fabricate ultra-high-Q silicon microring resonators based on multimode rib waveguides. Over a wide range of wavelengths near 1550 nm, the average Q-factor of a ring with 1.2-μm-wide waveguides reaches up to 1.17 × 106, with a waveguide loss of approximately 0.28 dB/cm. For a resonator with 1.5-μm-wide waveguides, the average Q-factor reaches 1.20 × 106, and the waveguide loss is 0.27 dB/cm. Moreover, we theoretically and experimentally show that a reduction in the waveguide loss significantly improves the conversion efficiency of four-wave mixing. A high four-wave mixing conversion efficiency of −17.0 dB is achieved at a pump power of 6.50 dBm.

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40

Miao, Binglin. "Fabrication of silicon microring resonators with narrow coupling gaps." Journal of Micro/Nanolithography, MEMS, and MOEMS 4, no. 2 (April 1, 2005): 023013. http://dx.doi.org/10.1117/1.1898605.

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41

Cooper, Michael L., Greeshma Gupta, Jung S. Park, Mark A. Schneider, Ivan B. Divliansky, and Shayan Mookherjea. "Quantitative infrared imaging of silicon-on-insulator microring resonators." Optics Letters 35, no. 5 (February 26, 2010): 784. http://dx.doi.org/10.1364/ol.35.000784.

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42

Lo, Stanley M., Jonathan Y. Lee, Sharon M. Weiss, and Philippe M. Fauchet. "Bloch mode selection in silicon photonic crystal microring resonators." Optics Letters 43, no. 12 (June 15, 2018): 2957. http://dx.doi.org/10.1364/ol.43.002957.

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43

Frankis, Henry C., Khadijeh Miarabbas Kiani, Daniel Su, Richard Mateman, Arne Leinse, and Jonathan D. B. Bradley. "High-Q tellurium-oxide-coated silicon nitride microring resonators." Optics Letters 44, no. 1 (December 21, 2018): 118. http://dx.doi.org/10.1364/ol.44.000118.

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44

Wang, Jiaqi, Zhenzhou Cheng, Chester Shu, and Hon Ki Tsang. "Optical Absorption in Graphene-on-Silicon Nitride Microring Resonators." IEEE Photonics Technology Letters 27, no. 16 (August 15, 2015): 1765–67. http://dx.doi.org/10.1109/lpt.2015.2443051.

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45

Jeyaselvan, Vadivukkarasi, and Shankar Kumar Selvaraja. "Lateral Dopant Diffusion Length Measurements Using Silicon Microring Resonators." IEEE Photonics Technology Letters 30, no. 24 (December 15, 2018): 2163–66. http://dx.doi.org/10.1109/lpt.2018.2879574.

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46

McClellan, Melinda S., Leslie L. Domier, and Ryan C. Bailey. "Label-free virus detection using silicon photonic microring resonators." Biosensors and Bioelectronics 31, no. 1 (January 2012): 388–92. http://dx.doi.org/10.1016/j.bios.2011.10.056.

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47

Hu, Yingtao, Xi Xiao, Hao Xu, Xianyao Li, Kang Xiong, Zhiyong Li, Tao Chu, Yude Yu, and Jinzhong Yu. "High-speed silicon modulator based on cascaded microring resonators." Optics Express 20, no. 14 (June 20, 2012): 15079. http://dx.doi.org/10.1364/oe.20.015079.

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48

Park, Mi Kyoung, Jack Sheng Kee, Jessie Yiying Quah, Vivian Netto, Junfeng Song, Qing Fang, Eric Mouchel La Fosse, and Guo-Qiang Lo. "Label-free aptamer sensor based on silicon microring resonators." Sensors and Actuators B: Chemical 176 (January 2013): 552–59. http://dx.doi.org/10.1016/j.snb.2012.08.078.

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49

Lee, Jonathan Y., and Philippe M. Fauchet. "Slow-light dispersion in periodically patterned silicon microring resonators." Optics Letters 37, no. 1 (December 26, 2011): 58. http://dx.doi.org/10.1364/ol.37.000058.

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50

Hong, Yixiao, Hua Ge, and Jianxun Hong. "Compact biosensors based on thin film silicon nitride microring resonators." Journal of Physics: Conference Series 2012, no. 1 (September 1, 2021): 012037. http://dx.doi.org/10.1088/1742-6596/2012/1/012037.

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