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Статті в журналах з теми "Silicon microphotonics"
Kimerling, Lionel C. "Silicon microphotonics." Applied Surface Science 159-160 (June 2000): 8–13. http://dx.doi.org/10.1016/s0169-4332(00)00126-4.
Повний текст джерелаde Dood, M. J. A., A. Polman, T. Zijlstra, and E. W. J. M. van der Drift. "Amorphous silicon waveguides for microphotonics." Journal of Applied Physics 92, no. 2 (July 15, 2002): 649–53. http://dx.doi.org/10.1063/1.1486055.
Повний текст джерелаFitzgerald, E. A., and L. C. Kimerling. "Silicon-Based Microphotonics and Integrated Optoelectronics." MRS Bulletin 23, no. 4 (April 1998): 39–47. http://dx.doi.org/10.1557/s0883769400030256.
Повний текст джерелаFerrara, Maria Antonietta, and Luigi Sirleto. "Integrated Raman Laser: A Review of the Last Two Decades." Micromachines 11, no. 3 (March 23, 2020): 330. http://dx.doi.org/10.3390/mi11030330.
Повний текст джерелаTsuchizawa, T., K. Yamada, H. Fukuda, T. Watanabe, Jun-ichi Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita. "Microphotonics devices based on silicon microfabrication technology." IEEE Journal of Selected Topics in Quantum Electronics 11, no. 1 (January 2005): 232–40. http://dx.doi.org/10.1109/jstqe.2004.841479.
Повний текст джерелаBorselli, Matthew, Thomas J. Johnson, and Oskar Painter. "Measuring the role of surface chemistry in silicon microphotonics." Applied Physics Letters 88, no. 13 (March 27, 2006): 131114. http://dx.doi.org/10.1063/1.2191475.
Повний текст джерелаLin, Pao Tai, Vivek Singh, Yan Cai, Lionel C. Kimerling, and Anu Agarwal. "Air-clad silicon pedestal structures for broadband mid-infrared microphotonics." Optics Letters 38, no. 7 (March 20, 2013): 1031. http://dx.doi.org/10.1364/ol.38.001031.
Повний текст джерелаBelyakov, V. A., V. A. Burdov, R. Lockwood, and A. Meldrum. "Silicon Nanocrystals: Fundamental Theory and Implications for Stimulated Emission." Advances in Optical Technologies 2008 (June 29, 2008): 1–32. http://dx.doi.org/10.1155/2008/279502.
Повний текст джерелаLin, Pao Tai, Vivek Singh, Hao-Yu Greg Lin, Tom Tiwald, Lionel C. Kimerling, and Anuradha Murthy Agarwal. "Low-Stress Silicon Nitride Platform for Mid-Infrared Broadband and Monolithically Integrated Microphotonics." Advanced Optical Materials 1, no. 10 (July 17, 2013): 732–39. http://dx.doi.org/10.1002/adom.201300205.
Повний текст джерелаNatrayan, L., P. V. Arul Kumar, S. Kaliappan, S. Sekar, Pravin P. Patil, R. Jayashri, and E. S. Esakki Raj. "Analysis of Incorporation of Ion-Bombarded Nickel Ions with Silicon Nanocrystals for Microphotonic Devices." Journal of Nanomaterials 2022 (August 16, 2022): 1–7. http://dx.doi.org/10.1155/2022/5438084.
Повний текст джерелаДисертації з теми "Silicon microphotonics"
Sandland, Jessica Gene 1977. "Sputtered silicon oxynitride for microphotonics : a materials study." Thesis, Massachusetts Institute of Technology, 2004. http://hdl.handle.net/1721.1/30250.
Повний текст джерелаIncludes bibliographical references (leaves 121-134).
Silicon oxynitride (SiON) is an ideal waveguide material because the SiON materials system provides substantial flexibility in composition and refractive index. SiON can be varied in index from that of silicon dioxide (n=1.46) to that of silicon-rich silicon nitride (n-2.3). This flexibility in refractive index allows for the optimization of device performance by allowing trade-offs between the advantages of low-index contrast systems (low scattering losses and easy fiber-to-waveguide coupling) and the benefits of high-index-contrast systems (small waveguide size and tight bending radii). This work presents sputter processing as an alternative to traditional CVD processing. Two room-temperature SiON sputter processes are explored. The first process is a co- sputtered deposition from a silicon oxide and a silicon nitride target. The second is a reactive sputtering process from a silicon nitride target in an oxygen ambient. Silicon nitride sputtered from a silicon nitride target is also investigated. Models are provided that predict the index and composition in both the reactive and co- sputtered depositions. The cosputtered deposition is shown to follow a mixture model, while the reactive sputter deposition is shown to be either Si-flux limited or O-flux limited, depending on the partial pressure of oxygen in the reaction chamber and the power applied to the silicon nitride target. A materials study is provided that shows sputtered SiON to be a homogeneous material that gives good control of refractive index. Reactively sputtered SiON is shown to be Si-rich. These sputtered materials investigated for use in waveguides and in Er-doped waveguide amplifiers.
(cont.) Low loss waveguides are demonstrated for both co-sputtered and reactively sputtered depositions. Losses below 1 dB/cm are shown for co-sputtered deposition (n=1.65). Photoluminescence of Er-doped material shows lifetimes comparable to commercial EDFA material for both co-sputtered SiON and sputtered silicon dioxide.
by Jessica Gene Sandland.
Ph.D.
Lee, Kevin Kidoo 1972. "Transmission and routing of optical signals in on-chip waveguides for silicon microphotonics." Thesis, Massachusetts Institute of Technology, 2001. http://hdl.handle.net/1721.1/8768.
Повний текст джерелаIncludes bibliographical references (p. 139-142).
In this thesis, guiding and routing of optical signals in high index difference ([delta]m) waveguide systems are studied for silicon microphotonic applications. High [delta]n waveguide systems offer compact device sizes that enable highly dense integrated optics suitable for silicon microphotonics. Scattering loss due to the roughness at the core/cladding interfaces is identified as a major source of loss in a high M system. Using both experimental and theoretical approaches, the interdependence of scattering loss, waveguide dimension, and roughness is investigated. We developed a 3 dimensional model that successfully explains the scattering loss dependence on the waveguide dimension. Using this model, a loss contour map is constructed to better understand the scattering loss from interface roughness. This map provides an effective methodology to reduce roughness scattering, which we used to develop two fabrication technologies. Loss reduction from 32 dB/cm to 0.8 dB/cm is achieved for [delta]n =2.0. This is the lowest loss ever achieved for a single-mode, high An system. PolySi/Si02 waveguide systems are investigated due to the compatibility of multi-level processing. Our best PolySi/Si02 waveguide shows additional 10 dB/cm loss, coming mainly from the top surface roughness due to grain boundary grooving. compared to a Si/Si02 waveguide. Compact high An routing devices such as round bends, Y-splitters, and Multi-Mode Interference (MMI) splitters are fabricated and tested. We show that single-mode waveguide bends exhibit μm size bending with low loss and single-mode splitters show splitting with good uniformity. MMis show advantages over equivalent Y-splitter based structures in terms of size and loss. Our MMI design led to the fabrication of the smallest optical 1x16 fanout ever built. High Transmission Cavity (HTC) based bends, splitters, and resonators, that are compatible with an anisotropic etching technique, are demonstrated. An index engineering map, which shows competing trends of minimum bending radius and scattering loss as tin is changed. is constructed. From this map, the optimal M can be found for a given fabrication technology. Improvement in the fabrication technology allows for higher tin and provides a scaling law in optical devices. This point is proven by our 0.8 dB/cm Si/Si02 waveguides, which lifts the upper limit of the usable [delta]n.
by Kevin Kidoo Lee.
Ph.D.
Scarangella, Adriana. "Efficient light emission from bismuth-doped rare earths compounds for Si microphotonics." Doctoral thesis, Università di Catania, 2016. http://hdl.handle.net/10761/4044.
Повний текст джерелаCardile, Paolo. "Emission and amplification of light from novel Si-based materials." Doctoral thesis, Università di Catania, 2012. http://hdl.handle.net/10761/934.
Повний текст джерелаLim, Desmond Rodney. "Device integration for silicon microphotonic platforms." Thesis, Massachusetts Institute of Technology, 2000. http://hdl.handle.net/1721.1/16784.
Повний текст джерелаAlso available online at the MIT Theses Online homepage
Includes bibliographical references (p. 199-211).
This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections.
Silicon ULSI compatible, high index contrast waveguides and devices provide high density integration for optical networking and on-chip optical interconnects. Four such waveguide systems were fabricated and analyzed: crystalline silicon-on-insulator (SOI) strip, polycrystalline silicon (polySi) strip, silicon nitride strip and SPARROW waveguides. The loss of 15 dB/cm measured through an SOI waveguide was the smallest ever measured for a silicon strip waveguide and is due to improved side-wall roughness. The TM mode of a single mode polySi strip waveguide with a 1:2.5 aspect ratio exhibited, surprisingly, smaller loss than the TE mode. Further, analysis shows that high index contrast waveguides are more sensitive to polarization dependent loss in the presence of surface roughness. Single mode bends and splits in both silicon and silicon nitride were studied. 0.01 dB/turn loss has been measured for 2 micron radius silicon bends. Polarization dependent loss was also observed; the bending loss of a TM mode was, as expected, much larger than that of a TE mode. The splitting losses for two-degree Y-split was 0.15 dB/split. A 1x16 multi-mode interferometer splitter occupied an area of 480 sq-microns and exhibited loss of 3 dB. ULSI compatible waveguide structures integrated with micro-resonators have been studied. Qs of 10000 and efficiencies close to 100% were achieved in high index contrast ring resonators and Qs of 100 million were achieved in microsphere resonators. A thermal and mechanical tuning mechanism was demonstrated for micro-ring resonators.
(cont.) In addition, >95% coupling efficiency between SPARROW waveguides and microspheres was achieved, the first microspheres to be coupled to integrated optics waveguides. 1x4 wavelength division multiplexing devices have been, for the first time, demonstrated in high index contrast silicon and silicon nitride strip waveguide systems. These systems have a component density of 1-million devices/sq-cm. Higher order filters made from multiple rings exhibited flat top responses and the expected steeper roll-off resonance response. Integrated modulators and switches based on waveguides and rings were also studied. Finally, the integration of the components in systems applications was analyzed. A study of the effect of polarization and loss in silicon microphotonics waveguide systems is presented.
by Desmond Rodney Lim Chin Siong.
Ph.D.
Dai, Daoxin. "Designs and simulations of silicon-based microphotonic devices." Doctoral thesis, Stockholm: Division of Electromagnetic Theory, Royal Institute of Technology, 2005. http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-226.
Повний текст джерелаGao, Weijie. "Effective-Medium-Clad Dielectric Components Towards Terahertz Integrated Platform." Thesis, 2021. https://hdl.handle.net/2440/135599.
Повний текст джерелаThesis (Ph.D.) -- University of Adelaide,School of Electrical and Electronic Engineering, 2022
Книги з теми "Silicon microphotonics"
Ossicini, Stefano, Lorenzo Pavesi, and Francesco Priolo. Light Emitting Silicon for Microphotonics. Berlin, Heidelberg: Springer Berlin Heidelberg, 2003. http://dx.doi.org/10.1007/b13588.
Повний текст джерелаInternational School of Physics "Enrico Fermi" (1998 Varenna, Italy). Silicon-based microphotonics: From basics to applications : Varenna on Lake Como, Villa Monastero, 21-31 July 1998. Amsterdam: IOS Press, 1999.
Знайти повний текст джерелаAalto, Timo. Microphotonic silicon waveguide components. [Espoo, Finland]: VTT, 2004.
Знайти повний текст джерелаSolehmainen, Kimmo. Fabrication of microphotonic waveguide components on silicon. [Espoo, Finland]: VTT Technical Research Centre of Finland, 2007.
Знайти повний текст джерелаLight Emitting Silicon for Microphotonics. Springer, 2004.
Знайти повний текст джерелаINTERNATIONAL SCHOOL OF PHYSICS ENRICO and O. Bisi. Silicon-based Microphotonics (Proceedings of the International School of Physics). Ios Pr Inc, 2000.
Знайти повний текст джерелаLight Emitting Silicon for Microphotonics Springer Tracts in Modern Physics Paperback. Springer, 2010.
Знайти повний текст джерелаЧастини книг з теми "Silicon microphotonics"
Kik, P. G., M. J. A. de Dood, and A. Polman. "Silicon Microphotonics." In Nonlinear Optics for the Information Society, 75. Dordrecht: Springer Netherlands, 2001. http://dx.doi.org/10.1007/978-94-015-1267-1_13.
Повний текст джерелаKimerling, L. C. "Silicon Microphotonics." In Interconnect Technology and Design for Gigascale Integration, 383–401. Boston, MA: Springer US, 2003. http://dx.doi.org/10.1007/978-1-4615-0461-0_10.
Повний текст джерелаKimerling, L. C., L. Dal Negro, S. Saini, Y. Yi, D. Ahn, S. Akiyama, D. Cannon, et al. "Monolithic Silicon Microphotonics." In Topics in Applied Physics, 89–120. Berlin, Heidelberg: Springer Berlin Heidelberg, 2004. http://dx.doi.org/10.1007/978-3-540-39913-1_3.
Повний текст джерелаAgarwal, Anuradha M., and Jurgen Michel. "Amorphous Silicon in Microphotonics." In Springer Handbook of Glass, 1483–93. Cham: Springer International Publishing, 2019. http://dx.doi.org/10.1007/978-3-319-93728-1_43.
Повний текст джерелаKimerling, Lionel C. "Silicon Microphotonics: The Next Killer Technology." In Towards the First Silicon Laser, 465–76. Dordrecht: Springer Netherlands, 2003. http://dx.doi.org/10.1007/978-94-010-0149-6_40.
Повний текст джерелаТези доповідей конференцій з теми "Silicon microphotonics"
Kimerling, Lionel C. "Silicon Microphotonics." In Integrated Photonics Research. Washington, D.C.: OSA, 2002. http://dx.doi.org/10.1364/ipr.2002.ifb1.
Повний текст джерелаLau, K. Y., O. Solgaard, N. Tien, M. Daneman, M. Kiang, and R. S. Muller. "Silicon Micromachined Microphotonics." In 1996 International Conference on Solid State Devices and Materials. The Japan Society of Applied Physics, 1996. http://dx.doi.org/10.7567/ssdm.1996.d-4-1.
Повний текст джерелаKimerling, Lionel C. "Silicon Microphotonics: High Volume Manufacturing." In Integrated Photonics Research, Silicon and Nanophotonics. Washington, D.C.: OSA, 2015. http://dx.doi.org/10.1364/iprsn.2015.it1a.3.
Повний текст джерелаAlmeida, Vilson R., and Michal Lipson. "Optical bistability on silicon microphotonics." In Integrated Photonics Research. Washington, D.C.: OSA, 2004. http://dx.doi.org/10.1364/ipr.2004.iwa3.
Повний текст джерелаSerpenguzel, A. "Silicon microspheres for VLSI silicon CMOS microphotonics." In 2012 Opto-Electronics and Communications Conference (OECC). IEEE, 2012. http://dx.doi.org/10.1109/oecc.2012.6276672.
Повний текст джерелаJanz, S., P. Cheben, A. Delâge, B. Lamontagne, M. J. Picard, D. X. Xu, K. P. Yap, and W. N. Ye. "Enabling technologies for silicon-based microphotonics." In Integrated Photonics Research and Applications. Washington, D.C.: OSA, 2005. http://dx.doi.org/10.1364/ipra.2005.imb1.
Повний текст джерелаLin, Pao Tai, Vivek Singh, Hao-Yu Greg Lin, Tom Tiwald, Dawn T. H. Tan, Lionel C. Kimerling, and Anuradha Murthy Agarwal. "Low-Stress Silicon Nitride for Mid-Infrared Microphotonics." In Integrated Photonics Research, Silicon and Nanophotonics. Washington, D.C.: OSA, 2014. http://dx.doi.org/10.1364/iprsn.2014.im4a.4.
Повний текст джерелаKimerling, L. C. "Silicon Microphotonics: Hardware for the Information Age." In 2006 International SiGe Technology and Device Meeting. IEEE, 2006. http://dx.doi.org/10.1109/istdm.2006.246570.
Повний текст джерелаNandgaonkar, A. B., S. B. Deosarka, and Pragnesh Shah. "Silicon Microphotonics : A New Technology for Next Generation." In 2007 International Conference on Electromagnetics in Advanced Applications. IEEE, 2007. http://dx.doi.org/10.1109/iceaa.2007.4387386.
Повний текст джерелаBorselli, Matthew, Thomas J. Johnson, and Oskar Painter. "Loss characterization and surface passivation in silicon microphotonics." In 2006 Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference. IEEE, 2006. http://dx.doi.org/10.1109/cleo.2006.4627618.
Повний текст джерела