Добірка наукової літератури з теми "[SiH4 + CO2 + He] plasma"
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Статті в журналах з теми "[SiH4 + CO2 + He] plasma"
Samanta, Arup, and Debajyoti Das. "Structural investigation of nC-Si/SiOx:H thin films from He diluted (SiH4+CO2) plasma at low temperature." Applied Surface Science 259 (October 2012): 477–85. http://dx.doi.org/10.1016/j.apsusc.2012.07.070.
Повний текст джерелаSamanta, Arup, and Debajyoti Das. "Studies on the structural properties of SiO:H films prepared from (SiH4+CO2+He) plasma in RF-PECVD." Solar Energy Materials and Solar Cells 93, no. 5 (May 2009): 588–96. http://dx.doi.org/10.1016/j.solmat.2008.12.005.
Повний текст джерелаSobajima, Yasushi, Shota Kinoshita, Shinnosuke Kakimoto, Ryoji Okumoto, Chitose Sada, Akihisa Matsuda, and Hiroaki Okamoto. "Control of growth process for obtaining high-quality a-SiO:H." Canadian Journal of Physics 92, no. 7/8 (July 2014): 582–85. http://dx.doi.org/10.1139/cjp-2013-0558.
Повний текст джерелаJo, Sanghyun, Suik Kang, Kyungjun Lee, and Ho Jun Kim. "Helium Metastable Distributions and Their Effect on the Uniformity of Hydrogenated Amorphous Silicon Depositions in He/SiH4 Capacitively Coupled Plasmas." Coatings 12, no. 9 (September 15, 2022): 1342. http://dx.doi.org/10.3390/coatings12091342.
Повний текст джерелаErshov, I. A., V. I. Pustovoy, V. I. Krasovskii, A. N. Orlov, S. I. Rasmagin, L. D. Iskhakova, F. O. Milovich, M. N. Kirichenko, L. L. Chaikov, and E. A. Konstantinova. "Synthesis and properties of silicon carbide nanoparticles obtained by laser pyrolysis method." Physics and Chemistry of Materials Treatment 1 (2021): 51–57. http://dx.doi.org/10.30791/0015-3214-2021-1-51-57.
Повний текст джерелаPark, Hwanyeol, and Ho Jun Kim. "Theoretical Analysis of Si2H6 Adsorption on Hydrogenated Silicon Surfaces for Fast Deposition Using Intermediate Pressure SiH4 Capacitively Coupled Plasma." Coatings 11, no. 9 (August 29, 2021): 1041. http://dx.doi.org/10.3390/coatings11091041.
Повний текст джерелаJia, Haijun, and Michio Kondo. "High rate synthesis of crystalline silicon films from SiH4+He using high density microwave plasma." Journal of Applied Physics 105, no. 10 (May 15, 2009): 104903. http://dx.doi.org/10.1063/1.3129321.
Повний текст джерелаDas, Debajyoti, Madhusudan Jana та A. K. Barua. "Characterization of undoped μc-SiO:H films prepared from (SiH4+CO2+H2)-plasma in RF glow discharge". Solar Energy Materials and Solar Cells 63, № 3 (липень 2000): 285–97. http://dx.doi.org/10.1016/s0927-0248(00)00035-0.
Повний текст джерелаLee, Sung‐Woo, Du‐Chang Heo, Jin‐Kyu Kang, Young‐Bae Park, and Shi‐Woo Rhee. "Microcrystalline Silicon Film Deposition from H 2 ‐ He ‐ SiH4 Using Remote Plasma Enhanced Chemical Vapor Deposition." Journal of The Electrochemical Society 145, no. 8 (August 1, 1998): 2900–2904. http://dx.doi.org/10.1149/1.1838733.
Повний текст джерелаDian, J., J. Valenta, J. Hála, A. Poruba, P. Horváth, K. Luterová, I. Gregora, and I. Pelant. "Visible photoluminescence in hydrogenated amorphous silicon grown in microwave plasma from SiH4 strongly diluted with He." Journal of Applied Physics 86, no. 3 (August 1999): 1415–19. http://dx.doi.org/10.1063/1.370904.
Повний текст джерелаДисертації з теми "[SiH4 + CO2 + He] plasma"
Lin, Hsiu-Chi, and 林秀錡. "The characteristics of SiH4-H2 plasma with additional He, Ne, Ar gases and their effects on the resultant properties of nc-Si:H thin films." Thesis, 2015. http://ndltd.ncl.edu.tw/handle/em2hmr.
Повний текст джерела明志科技大學
材料工程系碩士班
104
In this study, hydrogenated nanocrystalline silicon (nc-Si:H) films were prepared using ICP-CVD system attached with four internal U-shaped low inductance antennas. Ar, He, and Ne gases were introduced into SiH4/H2 plasma during deposition, with the variation of gas flow rate and SiH4/H2 ratios. During deposition, an OES (optical emission spectrometer) and a plasma probe were used to characterize the conditions of plasma. The crystalllinity, structure, and Si-H bonding of these Si:H films were investigated using Raman scattering spectroscopy, XRD, and FTIR. The correlations of plasma characteristics and thin film properties were studied. It is found that the crystallinity of nc-Si:H film increases with the introduction of Ar, He, and Ne gases, especially when Ar is added. The plasma density and IH* increase with the increase of the inert gases, most likely due to penning ionization effect. The deposition rate decreases with the inert gases. This might be caused by the enhancement of hydrogen etching.
Тези доповідей конференцій з теми "[SiH4 + CO2 + He] plasma"
Akaishi, Ryushiro, Kouhei Kitazawa, Satoshi Ono, Kazuhiro Gotoh, Eiji Ichihara, Shinya Kato, Noritaka Usami, and Yasuyoshi Kurokawa. "Deposition and Characterization of Si Quantum Dot Multilayers Prepared by Plasma Enhanced Chemical Vapor Deposition using SiH4 and CO2 Gases." In 2018 IEEE 7th World Conference on Photovoltaic Energy Conversion (WCPEC) (A Joint Conference of 45th IEEE PVSC, 28th PVSEC & 34th EU PVSEC). IEEE, 2018. http://dx.doi.org/10.1109/pvsc.2018.8548207.
Повний текст джерелаPershin, L., and J. Mostaghimi. "Yttria Deposition by a Novel Plasma Torch." In ITSC2010, edited by B. R. Marple, A. Agarwal, M. M. Hyland, Y. C. Lau, C. J. Li, R. S. Lima, and G. Montavon. DVS Media GmbH, 2010. http://dx.doi.org/10.31399/asm.cp.itsc2010p0038.
Повний текст джерелаSankur, Haluk, C. Pritt, and Jeffrey G. Nelson. "Plasma luminescence generated in laser evaporation of optical thin-film material." In OSA Annual Meeting. Washington, D.C.: Optica Publishing Group, 1985. http://dx.doi.org/10.1364/oam.1985.fl2.
Повний текст джерелаDecker, Jennifer E., Simon Lagacé, Jean Bérubé, Yves Beaudoin, and See Leang Chin. "Stable operation of a powerful 3-Hz line-tunable TEA-CO2 oscillator-amplifier system." In OSA Annual Meeting. Washington, D.C.: Optica Publishing Group, 1990. http://dx.doi.org/10.1364/oam.1990.tuqq1.
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