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Статті в журналах з теми "Ring-type piezoresistive force sensor"
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Kurniawan, W., R. Tjandra, and E. Obermeier. "Bulk-type piezoresistive force sensor for high pressure applications." Procedia Chemistry 1, no. 1 (September 2009): 544–47. http://dx.doi.org/10.1016/j.proche.2009.07.136.
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Chen, Jin Jun, and Ting Xiang. "Robot Soft Grabbing with New Piezoresistive Tactile Sensor." Advanced Materials Research 744 (August 2013): 501–4. http://dx.doi.org/10.4028/www.scientific.net/amr.744.501.
Повний текст джерелаАнотація:
A type of tactile sensors based on piezoresistive principle is designed for the robot grab force detection and control. According to human behaves and awareness, the robot grabbing control program imitate human hand grasp active perception and action mechanisms. With the tactile sensors, the slip and grasping process pressure signal is sampled and analysed by general time-domain statistical parameter, and a simpler control algorithm is researched. In the experiment the robot has accomplished soft grabbing by modeling human hand action and applied appropriate grabbing force on objects of different weights or material by means of the control algorithm. Experiments suggest that this sensor and action biomimetic process is suitable to be used in the tele-presence technology application in the case of the visible range or visual equipment aid especially.
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Sitaramgupta V, V. S. N., Arjun B. S, Bhagaban Behera, Deepak Padmanabhan, and Hardik J. Pandya. "A Ring-Shaped MEMS-Based Piezoresistive Force Sensor for Cardiac Ablation Catheters." IEEE Sensors Journal 21, no. 22 (November 15, 2021): 26042–49. http://dx.doi.org/10.1109/jsen.2021.3118298.
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Liu, Yan, Haijun Han, Yuming Mo, Xiaolong Wang, Huafeng Li, and Jin Zhang. "A flexible tactile sensor based on piezoresistive thin film for 3D force detection." Review of Scientific Instruments 93, no. 8 (August 1, 2022): 085006. http://dx.doi.org/10.1063/5.0083428.
Повний текст джерелаАнотація:
This paper presents a flexible tactile sensor with a compact structure based on a piezoresistive thin film and an elastomer for detecting three-dimensional (3D) force. The film contains four independent sensing cells, which were made using a type of piezoresistive ink and a specific pectinate conductive circuit pattern based on the flexible substrate to decrease the coupling effect. The elastomer with a spherical surface is bonded to the surface of the film and transfers the force to the sensing array. A model of 3D force detection based on the proposed sensor was established, and a prototype was designed and developed. Static and dynamic experiments were carried out, and the results show that the range of the prototype is 0–50 N in the z-axis and 0–6 N in the x-axis and y-axis, which with good static and dynamic performance, especially a low coupling effect, validates the mechanism of the proposed sensor and indicates that it has good potential application in robotic grasping.
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Lee, Da-Huei, Cheng-Hsin Chuang, Muhammad Omar Shaikh, Yong-Syuan Dai, Shao-Yu Wang, Zhi-Hong Wen, Chung-Kun Yen, Chien-Feng Liao, and Cheng-Tang Pan. "Flexible Piezoresistive Tactile Sensor Based on Polymeric Nanocomposites with Grid-Type Microstructure." Micromachines 12, no. 4 (April 16, 2021): 452. http://dx.doi.org/10.3390/mi12040452.
Повний текст джерелаАнотація:
Piezoresistive tactile sensors made using nanocomposite polymeric materials have been shown to possess good flexibility, electrical performance, and sensitivity. However, the sensing performance, especially in the low-pressure range, can be significantly improved by enabling uniform dispersion of the filler material and utilization of effective structural designs that improve the tactile sensing performance. In this study, a novel flexible piezoresistive tactile sensor with a grid-type microstructure was fabricated using polymer composites comprising multi-walled carbon nanotubes (MWCNTs) as the conductive filler and polydimethylsiloxane (PDMS) as the polymeric matrix. The research focused on improving the tactile sensor performance by enabling uniform dispersion of filler material and optimizing sensor design and structure. The doping weight ratio of MWCNTs in PDMS varied from 1 wt.% to 10 wt.% using the same grid structure-sensing layer (line width, line spacing, and thickness of 1 mm). The sensor with a 7 wt.% doping ratio had the most stable performance, with an observed sensitivity of 6.821 kPa−1 in the lower pressure range of 10–20 kPa and 0.029 kPa−1 in the saturation range of 30–200 kPa. Furthermore, the dimensions of the grid structure were optimized and the relationship between grid structure, sensitivity, and sensing range was correlated. The equation between pressure and resistance output was derived to validate the principle of piezoresistance. For the grid structure, dimensions with line width, line spacing, and thickness of 1, 1, and 0.5 mm were shown to have the most stable and improved response. The observed sensitivity was 0.2704 kPa−1 in the lower pressure range of 50–130 kPa and 0.0968 kPa−1 in the saturation range of 140–200 kPa. The piezoresistive response, which was mainly related to the quantum tunneling effect, can be optimized based on the dopant concentration and the grid microstructure. Furthermore, the tactile sensor showed a repeatable response, and the accuracy was not affected by temperature changes in the range of 10 to 40 °C and humidity variations from 50 to 80%. The maximum error fluctuation was about 5.6% with a response delay time of about 1.6 ms when cyclic loading tests were performed under a normal force of 1 N for 10,200 cycles. Consequently, the proposed tactile sensor shows practical feasibility for a wide range of wearable technologies and robotic applications such as touch detection and grasping.
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Li, Shuge, Pengju Zhao, and Wencheng Sun. "Structural Design and Static Calibration of Six-axis Force/Torque Sensor." Journal of Physics: Conference Series 2557, no. 1 (July 1, 2023): 012075. http://dx.doi.org/10.1088/1742-6596/2557/1/012075.
Повний текст джерелаАнотація:
Abstract A six-axis force/torque sensor is designed to solve the problems of the sensor with a resistance strain gauge. For instance, if the adhesive layer of the resistance strain gauge is not firm, the elastic sensing beam will have plastic deformation. The cylindrical conductive rubber is used as the sensing unit, which can detect force/torque by the change of the piezoresistive values. The units are arranged in a spatial eight-point staggered manner, which can reduce the dimensional coupling from the structure. The sensor static calibration is systematically analyzed and researched. The linear decoupling model of the measurement system that incorporating the Least Squares algorithm is established to reduce the dimensional coupling. The new type of sensor structure and static linear calibration algorithm proposed in this paper have good practical applications and popularization values.
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Huang, Kaiyan, Shuying Tong, Xuewei Shi, Jie Wen, Xiaoyang Bi, Alamusi Li, Rui Zou, et al. "The Numerical and Experimental Investigation of Piezoresistive Performance of Carbon Nanotube/Carbon Black/Polyvinylidene Fluoride Composite." Materials 16, no. 16 (August 11, 2023): 5581. http://dx.doi.org/10.3390/ma16165581.
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The composites with multiple types of nano-carbon fillers have better electrical conductivity and piezoresistive properties as compared with composites with a single type of nano-carbon fillers. As previously reported, the nano-carbon fillers with various aspect ratios, such as carbon nanotube (CNT) and carbon black (CB), have synergistic enhanced effects on the piezoresistive performance of composite sensors. However, most of the works that have been reported are experimental investigations. The efficient and usable numerical simulation investigation needs to be further developed. In this study, based on an integrated 3D statistical resistor network model, a numerical simulation model was created to calculate the piezoresistive behavior of the CNT/CB/ Polyvinylidene Fluoride (PVDF) composite. This model also takes into account the tunneling effect between nearby nano-fillers. It is found from numerical simulation results that the piezoresistive sensitivity of composite simulation cells can be influenced by the fraction of CNT and CB. In the case that the CNT content is 0.073 wt.%, the best force-electrical piezoresistive sensitivity can be achieved when the CB loading is up to 0.2 wt.%. To verify the validity of the simulation model, the previous experimental investigation results are also compared. The experimental results confirm the validity of the model. The investigation is valuable and can be utilized to design a strain sensor for this nano-composite with increased sensitivity.
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Zhang, Peng, Yucheng Chen, Yuxia Li, Yun Zhao, Wei Wang, Shuyuan Li, and Liangsong Huang. "Flexible Piezoresistive Sensor with the Microarray Structure Based on Self-Assembly of Multi-Walled Carbon Nanotubes." Sensors 19, no. 22 (November 15, 2019): 4985. http://dx.doi.org/10.3390/s19224985.
Повний текст джерелаАнотація:
High-performance flexible pressure sensors have great application prospects in numerous fields, including the robot skin, intelligent prosthetic hands and wearable devices. In the present study, a novel type of flexible piezoresistive sensor is presented. The proposed sensor has remarkable superiorities, including high sensitivity, high repeatability, a simple manufacturing procedure and low initial cost. In this sensor, multi-walled carbon nanotubes were assembled onto a polydimethylsiloxane film with a pyramidal microarray structure through a layer-by-layer self-assembly system. It was found that when the applied external pressure deformed the pyramid microarray structure on the surface of the polydimethylsiloxane film, the resistance of the sensor varied linearly as the pressure changed. Tests that were performed on sensor samples with different self-assembled layers showed that the pressure sensitivity of the sensor could reach − 2.65 kPa − 1 , which ensured the high dynamic response ability and the high stability of the sensor. Moreover, it was proven that the sensor could be applied as a strain sensor under the tensile force to reflect the stretching extent or the bending object. Finally, a flexible pressure sensor was installed on five fingers and the back of the middle finger of a glove. The obtained results from grabbing different weights and different shapes of objects showed that the flexible pressure sensor not only reflected the change in the finger tactility during the grasping process, but also reflected the bending degree of fingers, which had a significant practical prospect.
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Krestovnikov, Konstantin, Aleksei Erashov, and Аleksandr Bykov. "Development of circuit solution and design of capacitive pressure sensor array for applied robotics." Robotics and Technical Cybernetics 8, no. 4 (December 30, 2020): 296–307. http://dx.doi.org/10.31776/rtcj.8406.
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This paper presents development of pressure sensor array with capacitance-type unit sensors, with scalable number of cells. Different assemblies of unit pressure sensors and their arrays were considered, their characteristics and fabrication methods were investigated. The structure of primary pressure transducer (PPT) array was presented; its operating principle of array was illustrated, calculated reference ratios were derived. The interface circuit, allowing to transform the changes in the primary transducer capacitance into voltage level variations, was proposed. A prototype sensor was implemented; the dependency of output signal power from the applied force was empirically obtained. In the range under 30 N it exhibited a linear pattern. The sensitivity of the array cells to the applied pressure is in the range 134.56..160.35. The measured drift of the output signals from the array cells after 10,000 loading cycles was 1.39%. For developed prototype of the pressure sensor array, based on the experimental data, the average signal-to-noise ratio over the cells was calculated, and equaled 63.47 dB. The proposed prototype was fabricated of easily available materials. It is relatively inexpensive and requires no fine-tuning of each individual cell. Capacitance-type operation type, compared to piezoresistive one, ensures greater stability of the output signal. The scalability and adjustability of cell parameters are achieved with layered sensor structure. The pressure sensor array, presented in this paper, can be utilized in various robotic systems.
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Li, Gang, Lei Li, Xiao Feng Zhao, Dian Zhong Wen, and Yang Yu. "The Vibration Pickup of Micro-Pump Diaphragm Based on MEMS Technology Design." Key Engineering Materials 609-610 (April 2014): 837–41. http://dx.doi.org/10.4028/www.scientific.net/kem.609-610.837.
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This paper designs a micro-pump silicon diaphragm vibration pickup sensor. In this newsensor which is based on piezoresistive effect, four MOSFETs with nc-Si/c-Si heterojunction drainand source are manufactured on the surface of silicon wafer by using the technique of CMOS andPECVD, at edge of <100> orientation of the N-type silicon diaphragm rectangle, and using MEMStechnology, the back of the four MOSFETs device silicon substrate processed into silicon cup, whichconstitutes the vibration pickup sensor. The micro-pump silicon diaphragm vibration pickup sensornot only has all the advantages of conventional force sensitive resistance vibration pickup sensor, butalso has the advantages of small temperature drift, high detection precision, and it can satisfy themicro-pump silicon diaphragm vibration requirements.
Дисертації з теми "Ring-type piezoresistive force sensor"
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Chiu, Ming-Chieh, and 邱明傑. "The Design of Signal Process Circuits for Array-Type Piezoresistive Force Sensor." Thesis, 2008. http://ndltd.ncl.edu.tw/handle/6v84p5.
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碩士國立臺北科技大學
自動化科技研究所
96
With the advent and rising development of semiconductor technology, MEMS technology also comes to maturity, and can be integrated together with IC to fabricate a system chip (SOC) to enhance the performance and get cost-down in fabrication. The purpose of this paper is to realize the design and layout of array type signal process circuits, moreover to compare the differences of performance between pre-sim and post-sim. Finally, this study integrates array type piezoresistive force sensor with signal processing circuitry in the standard CMOS technology, and lead its application to on-line real-time monitor the contact force of probe card. We prove the design of operational amplifier can be applied to amplify signal and the specific signal can control analog switches on each sensor accurately from measurement results. The chip design was based on 0.35μm Mixed-Signal 2P4M Polycide 3.3/5V Manufacture process of TSMC provided by NSC chip Implementation Center. Finally, Hspice software was employed to simulate the circuit and Laker software was used to implement layout.
Тези доповідей конференцій з теми "Ring-type piezoresistive force sensor"
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Pandya, Hardik J., Hyun Tae Kim, and Jaydev P. Desai. "A Microscale Piezoresistive Force Sensor for Nanoindentation of Biological Cells and Tissues." In ASME 2013 Dynamic Systems and Control Conference. American Society of Mechanical Engineers, 2013. http://dx.doi.org/10.1115/dscc2013-3994.
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We present the design and fabrication of a Micro-Electro-Mechanical Systems based piezoresistive cantilever force sensor as a potential candidate for micro/nano indentation of biological specimens such as cells and tissues. The fabricated force sensor consists of a silicon cantilever beam with a p-type piezoresistor and a cylindrical probing tip made from SU-8 polymer. One of the key features of the sensor is that a standard silicon wafer is used to make silicon-on-insulator (SOI), thereby reducing the cost of fabrication. To make SOI from standard silicon wafer the silicon film was sputtered on an oxidized silicon wafer and annealed at 1050 °C so as to obtain polycrystalline silicon. The sputtered silicon layer was used to fabricate the cantilever beam. The as-deposited and annealed silicon films were experimentally characterized using X-ray diffraction (XRD) and Atomic Force Microscopy (AFM). The annealed silicon film was polycrystalline with a low surface roughness of 3.134 nm (RMS value).
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Cullinan, Michael A., Robert M. Panas, Cody R. Daniel, Joshua B. Gafford, and Martin L. Culpepper. "Non-Cleanroom Fabrication of Carbon Nanotube-Based MEMS Force and Displacement Sensors." In ASME 2011 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. ASMEDC, 2011. http://dx.doi.org/10.1115/detc2011-47945.
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Traditional microelectromechanical MEMS fabrications such photolithography and deep reactive ion etching (DRIE) are expensive and time consuming. This limits the types and designs of MEMS devices that can be produced cost effectively since in order to overcome the high startup costs and times associated with traditional MEMS fabrication techniques tens of thousands of each type of MEMS device must be produced and sold. In this paper, we will present a method for placing carbon nanotube (CNT) based piezoresistive sensors onto metallic flexural elements that are created via micromachining. This method reduces the fabrication time from over 3 months to less than 3 days. In addition, the fabrication cost is reduced form over $500 per device to less than $20 per device. This flexible, low cost fabrication method enables rapid prototyping of MEMS devices which is an important step in the design and development process for electromechanical systems. Also, the development of this type of low cost fabrication method will help to make low volume manufacturing of MEMS devices feasible from a cost prospective. In this fabrication method, a micromill is used to fabricate the flexure beams. Electron beam evaporation is then used to deposit (1) an insulating ceramic thin film layer and (2) metal traces on the flexure. A shadow mask is used to define the wire patterns. Either a tungsten wire or a focused ion beam (FIB) is used to define a 1–5 μm gap in the wire traces. Dielectrophoresis is then used to orient/position the CNT sensors across the gap. Finally, the structure is coated with a thin ceramic layer to protect the sensor and mitigate noise. When the flexure element is deflected, the CNTs strain which results in a measurable change in resistance. Several meso-scale test devices were produced using this fabrication method. The devices that were fabricated using a FIB to create the gap in the wire traces have the same strain sensitivity as devices fabricated using traditional cleanroom based techniques. However, the devices that were fabricated using the tungsten wire have a strain sensitivity that is almost 7 times lower than the devices fabricated using traditional cleanroom based fabrication techniques. This is because the gap size for the tungsten wire fabrication method is about an order of magnitude larger than for the FIB cut or lithography based gap fabrication methods. Therefore, the CNT are not able to stretch across the entire gap. This creates CNT-CNT junctions in the electrical pathway of the sensors which significantly increases the sensor resistance and decreases the strain sensitivity of the sensor. Overall, these results show that functional CNT-based piezoresistive MEMS sensors may be fabricated without conventional integrated circuit (IC) microfabrication technologies but that tight control over the gap size is needed in order to ensure that the sensor performance is not degraded.
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Chadwick, K. M., D. J. Deturris, and J. A. Schetz. "Direct Measurements of Skin Friction in Supersonic Combustion Flow Fields." In ASME 1992 International Gas Turbine and Aeroengine Congress and Exposition. American Society of Mechanical Engineers, 1992. http://dx.doi.org/10.1115/92-gt-320.
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An experimental investigation was conducted to measure skin friction along the chamber walls of supersonic combustors. A direct force measurement device was used to simultaneously measure an axial and transverse component of the small tangential shear force passing over a non-intrusive floating element. This measurement was made possible with a sensitive piezoresistive deflection sensing unit. The floating head is mounted to a stiff cantilever beam arrangement with deflection due to the flow on the order of 0.00254 mm (0.0001 in). This allowed the instrument to be a non-nulling type. A second gauge was designed with active cooling of the floating sensor head to eliminate non-uniform temperature effects between the sensor head and the surrounding wall. The key to this device is the use of a quartz tube cantilever with piezoresistive strain gages bonded directly to its surface. A symmetric fluid flow was developed inside the quartz tube to provide cooling to the backside of the floating head. Tests showed that this flow did not influence the tangential force measurement. Measurements were made in three separate combustor test facilities. Tests at NASA Langley Research Center consisted of a Mach 3.0 vitiated air flow with hydrogen fuel injection at Pt = 500 psia (3446 kPa) and Tt = 3000 R (1667 K). Two separate sets of tests were conducted at the General Applied Science Laboratory (GASL) in a scramjet combustor model with hydrogen fuel injection in vitiated air at Mach = 3.3, Pt = 800 psia (5510 kPa), and Tt = 4000 R (2222 K). Skin friction coefficients between 0.001–0.005 were measured dependent on the facility and measurement location. Analysis of the measurement uncertainties indicate an accuracy to within ±10–15% of the streamwise component.
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Fullerton, Anne M., and Thomas C. Fu. "Pressure Gage Measurements in a Dry to Wet Environment." In ASME 2009 Fluids Engineering Division Summer Meeting. ASMEDC, 2009. http://dx.doi.org/10.1115/fedsm2009-78463.
Повний текст джерелаАнотація:
Pressure gages are used in many fluid measurements applications. One such application is the measurement of wave impact pressures on structures. This application poses a unique problem of measuring pressures in a “wet to dry” environment. Often there is a thermal drift component in the pressure readings that makes it difficult to extract the actual pressure rise due to wave loading. These types of measurements also require high response rates to measure the detail of the short duration impacts, usually on the order of one to twenty kilohertz. Several bench tests were carried out in at the Naval Surface Warfare Center, Carderock Division, in 2008 to investigate various types of gages to find a robust gage that could withstand this type of application. Three different gages were used in this investigation. The first sensor (gage 1) is a dynamics general purpose ICP (integrated circuit piezoelectric) pressure sensor, capable of making very high frequency dynamic pressure measurements, rated to 200 psi. The second sensor (gage 2) is a voltage compensated, media isolated piezoresistive sensor, rated to 15 psi. This gage had a pressure port which was filled with water during testing to eliminate air compression effects. The third sensor (gage 3) is a semiconductor pressure gage rated to 25 psi (172.4 kPa). A water “drop” test setup was constructed of 2 inch (5.1 cm) PVC pipe. The pressure gages were mounted to the bottom of the setup facing up, and the pipe was filled from the top, with a quick acting gate valve located 2 feet (0.61 m) from the pressure sensors. Once the pipe was filled with the desired amount of water, the gate valve was opened as quickly as possible, and the impact force was measured. Vent pipes were mounted to a “cross” fitting in the vertical pipe which allowed for the air to escape. Several water “drop” tests were performed with this setup. From these tests, the thermal drift of gage 1 is evident. Gage 3 exhibits similar behavior. Gage 2 captures the water pressure impact, and then returns to a small positive static pressure as a result of the water that is sitting above it. Of the three sensors, gage 2 appears to be the most temperature stable.
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Okuyama, Takeshi, Tomoki Sugimoto, and Mami Tanaka. "Mechanical modeling of a ring-type fingertip force sensor*." In 2022 IEEE International Conference on Systems, Man, and Cybernetics (SMC). IEEE, 2022. http://dx.doi.org/10.1109/smc53654.2022.9945291.
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Yamamoto, Yusuke, Mizuki Kinugasa, Mayo Morita, and Toru Katayama. "Motion Performance of Miniaturized Spar-Buoy With Ring-Fin Motion Stabilizer for Wind Observations by Doppler Lidar and Development of Stabilized Platform to Mount the Doppler Lidar." In ASME 2022 41st International Conference on Ocean, Offshore and Arctic Engineering. American Society of Mechanical Engineers, 2022. http://dx.doi.org/10.1115/omae2022-78175.
Повний текст джерелаАнотація:
Abstract In this paper, motion performance of a miniaturized spar-buoy with a ring-fin motion stabilizer comparing with the previous studied the same type spar-buoy is experimentally investigated and compared with the performance of the previous studied large size spar-buoy[2], and they are confirmed that its pitch amplitude increases at the same wave period or the same wave height, and its maximum pitch amplitude may not change much, moreover, the tendency is not related to the mooring system or water depth. Moreover, it is investigated to reduce its pitch amplitude further. By placing the Doppler Lidar on a rigid body swing as a motion stabilized platform and constructing an active control that keeps the Doppler Lidar upright using a reinforcement learning, the motion of the sensor itself is reduced and the accuracy of measurement is improved. Numerical simulations are conducted using the motion data of the spar-buoy in regular and irregular waves measured by scale model tests, and it is confirmed that it is possible to reduce the motion of the Doppler Lidar itself by adjusting the control gain of the motion stabilized platform by using a constant damping coefficient or the variable damping coefficients decided by the skyhook damper theory In order to reduce the motion further, an external force cancellation control using the motion of the spar-buoy in irregular waves simulated by the supervised machine learning is also applied.