Дисертації з теми "Microelectromechanical system sensors"
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Xu, Wenjun. "Carbon material based microelectromechanical system (MEMS): fabrication and devices." Diss., Georgia Institute of Technology, 2011. http://hdl.handle.net/1853/39554.
Повний текст джерелаLi, Weizhuo. "Wavelength Multiplexing of MEMS Pressure and Temperature Sensors Using Fiber Bragg Gratings and Arrayed Waveguide Gratings." University of Cincinnati / OhioLINK, 2005. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1123972586.
Повний текст джерелаKok, Wing Hang (Ronald). "Development of a wireless MEMS inertial system for health monitoring of structures." Link to electronic thesis, 2004. http://www.wpi.edu/Pubs/ETD/Available/etd-11244-122741/.
Повний текст джерелаKeywords: angular rate; cantilever; wireless; RF; microcontroller; tilt and rotation; health monitoring; inertial sensors; MEMS. Includes bibliographical references (p. 139-145).
Lee, Jin-Hwan. "MEMS Needle-Type Multi-Analyte Microelectrode Array Sensors for In Situ Biological Applications." University of Cincinnati / OhioLINK, 2008. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1212146149.
Повний текст джерелаMangels, John Donald III, Syed Ammar Raza, Kevin Mueller, Namrah Habib, Josh Raymond, Daniel Brauer, Mohammed Azri Adb Rahim, et al. "Micro-Air Vehicle Control Using Microelectromechanical Systems Sensors." Thesis, The University of Arizona, 2017. http://hdl.handle.net/10150/625078.
Повний текст джерелаRaza, Syed Ammar, Kevin Mueller, Daniel Brauer, Namrah Habib, John Mangels, Azri Rahim, Joshua Raymond, et al. "Micro-Air Vehicle Control Using Microelectromechanical Systems Sensors." Thesis, The University of Arizona, 2017. http://hdl.handle.net/10150/625128.
Повний текст джерелаNeelisetti, Raghu Kisore Lim Alvin S. "Improving reliability of wireless sensor networks for target tracking using wireless acoustic sensors." Auburn, Ala., 2009. http://hdl.handle.net/10415/1931.
Повний текст джерелаLee, Wook. "Diffraction-based integrated optical readout for micromachined optomechanical sensors." Diss., Available online, Georgia Institute of Technology, 2006, 2006. http://etd.gatech.edu/theses/available/etd-09292006-115918/.
Повний текст джерелаF. Levent Degertekin, Committee Chair ; David S. Citrin, Committee Member ; Paul E. Hasler, Committee Member ; Peter J. Hesketh, Committee Member ; Zhiping Zhou, Committee Member.
Jacobson, Carl P. "Code Division Multiplexing of Fiber Optic and Microelectromechanical Systems (MEMS) Sensors." Diss., Virginia Tech, 2000. http://hdl.handle.net/10919/27486.
Повний текст джерелаPh. D.
Mendonça, Lucas Gonçalves Dias. "Desenvolvimento de um micro-transdutor acústico capacitivo." Universidade de São Paulo, 2013. http://www.teses.usp.br/teses/disponiveis/3/3152/tde-17102014-113303/.
Повний текст джерелаThis work presents a new process to fabricate an acoustic micro transducer to be used as a microsensor or a microactuator. The acoustic transducers are based on the electrostatic effect and consist on arrays of microfabricated capacitors. Such devices are commonly referred as CMUT, Capacitive Micromachined Ultrasonic Transducer. The bottom electrode (evaporated aluminum) of each capacitor is fixed on the surface of glass substrate, while the top electrode is a thin plate structure of copper or aluminum suspended on a cavity surrounded by posts. Since the top electrode is flexible, it bends toward the bottom electrode when a DC bias is applied. In this way, the top electrode can be forced to vibrate using an AC signal to be used as an acoustic wave emitter. Conversely, an ultrasound receiver is achieved as the measured capacitance changes when the DC biased top electrode moves following an external acoustic wave pressure. An innovation of this work is the use of the photoresist SU-8 to fabricate the post structures surrounding the cavities of the capacitive micro transducers. Its relatively simple processing steps and adequate mechanical properties make the SU-8 a convenient choice as an inexpensive structural material. The bottom part of the device is prepared on a glass substrate using an aluminum layer evaporated and etched to form the bottom electrodes. Then, SU-8 is spin coated, baked and etched adequately to form the posts surrounding the cavities. The top part is prepared by simply spinning an AZ-type photoresist on aluminum or copper plate. Finally, both halves are bonded under pressure on a hot plate. Several modeling and simulation analyses were performed in order to estimate the working performance of the micro transducers. The results of simulations helped to define the initial parameters and materials for the fabrication process. Samples submitted to a DC bias were initially characterized using an RCL meter in order to infer impedance, capacitance and phase angle behavior as a function of frequency (from 1 kHz to 1 MHz). Protection circuits were used in order to test CMUTs with high DC bias. These circuits allow to apply high DC bias, and an AC signal while other measuring equipments are protected. The device responded to application of mechanical loading, excitation by an AC signal and excitation by mechanical wave as well. The results showed that the device has good potential to be applied to the analysis of fluids.
Mustafa, Haithem Ali Babiker. "Development of a noncontact current sensor based on MEMS technology." Thesis, Cape Peninsula University of Technology, 2007. http://hdl.handle.net/20.500.11838/1082.
Повний текст джерелаMost ofMEMS sensors are based on the micro-cantilever technology, which use wide range of different design materials and structures. The benefit ofMEMS technology is in developing devices having lower cost, lower power consumption, higher performance, and integration. A free-end cantileverbeam made of magnetic material (PerrnaIloy) and a movable mass attached to the free-end has been designed using MEMS software tools. The magnetic material was used to improve the sensitivity of the cantilever-beam to an external applied magnetic field. The deflection of the cantilever was detected using capacitive sensing method. The aim of this research was to develop a non-contact current sensor based on MEMS technology by analysing the simulation of the system design of the micro cantilever when subjected to a magnetic field produced by a current-carrying conductor. When the signal, a sinusoidal current with a constant frequency is applied, the cantilever-beam exhibits a vibration motion along the vertical axis when it is placed closer to the line current. This creates corresponding capacitance changes and generates a voltage output proportional to the capacitive change in the signal processing circuitry attached to the micro cantilever. Modelling of the magnetic moment of a magnetic cantilever-beam placed in a field, the deflection of { the beam, the natural frequency of the cantilever-beam, the maximum deflection, the change in differential capacitive sensing technique, linearity of the differential capacitive, and capacitive sensitivity the circuit designed for readout was derived.
Black, Richard Allyn. "A flush mounted microelectromechanical system (MEMS) pressure and flow sensor based air data system /." Thesis, Connect to this title online; UW restricted, 1999. http://hdl.handle.net/1773/10012.
Повний текст джерелаLeichle, Thierry C. "A micromachined resonant magnetic field sensor." Thesis, Georgia Institute of Technology, 2002. http://hdl.handle.net/1853/13833.
Повний текст джерелаYi, Yudan. "On improving the accuracy and reliability of GPS/INS-based direct sensor georeferencing." Columbus, Ohio : Ohio State University, 2007. http://rave.ohiolink.edu/etdc/view?acc%5Fnum=osu1186671990.
Повний текст джерелаYoo, Seung-jin. "Micromachined wavelength selective microbolometer sensors operating at room temperature /." Full text (PDF) from UMI/Dissertation Abstracts International, 2000. http://wwwlib.umi.com/cr/utexas/fullcit?p3004406.
Повний текст джерелаToh, Edwin. "Implementation of an optical readout system for high-sensitivity terahertz microelectromechanical sensor array." Thesis, Monterey, California: Naval Postgraduate School, 2014. http://hdl.handle.net/10945/44019.
Повний текст джерелаIn this thesis, an optical readout scheme was successfully developed based on the Fourier 4F optical configuration and integrated with a custom-fabricated microelectromechanical system (MEMS)-based, terahertz (THz), detector array. The MEMS THz detector array and 4F Fourier optics were able to transduce the THz scene into an optical signal that was captured by a commercial charged coupled device (CCD) camera for generating images. A quantum cascade laser (QCL) provided the THz illumination for generating images while post-image processing performed background subtraction in order to obtain the THz scene. The Fourier 4F optical readout system that was implemented was able to profile the general shape of the QCL beam pattern and displayed good linearity of response of about 23 gray level values per Kelvin. The concept of optical readout from a micromechanical sensor array was also validated.
Zhang, Qiliang Lec Ryszard. "Characterization of the interfacial interactions between microparticles and surfaces using piezoelectric sensors /." Philadelphia, Pa. : Drexel University, 2006. http://hdl.handle.net/1860/1778.
Повний текст джерелаCookson, Jeremy L. "A method for testing the dynamic accuracy of Microelectro-Mechanical Systems (MEMS) Magnetic, Angular Rate, and Gravity (MARG) sensors for Inertial Navigation Systems (INS) and human motion tracking applications." Thesis, Monterey, California : Naval Postgraduate School, 2010. http://edocs.nps.edu/npspubs/scholarly/theses/2010/Jun/10Jun%5FCookson.pdf.
Повний текст джерелаThesis Advisor(s): Yun, Xiaoping ; Second Reader: Romano, Marcello. "June 2010." Description based on title screen as viewed on July 14, 2010. Author(s) subject terms: micro-electro-mechanical systems, MEMS, magnetic, angular rate, gravity sensor, MARG sensors, inertial navigation system, INS, inertial test, MicroStrain, 3DM-GX1, 3DMGX3, CompactRIO, MATLAB GUI, dynamic accuracy test. Includes bibliographical references (p. 187-189). Also available in print.
Arecco, Daniel. "Analysis and preliminary characterization of a MEMS cantilever-type chemical sensor." Link to electronic thesis, 2003. http://www.wpi.edu/Pubs/ETD/Available/etd-0511104-150948.
Повний текст джерелаKeywords: frequency; vibration; vibrometry; detection; resonance; micromechanical; polymer; absorption; AFM; SEM; holography; optoelectronic; silicon; hydrogen; palladium. Includes bibliographical references (p. 151-161).
Sohn, Young-Soo. "MEMS based microfluidic structure for biological and chemical sensor array /." Full text (PDF) from UMI/Dissertation Abstracts International, 2001. http://wwwlib.umi.com/cr/utexas/fullcit?p3008446.
Повний текст джерелаHaneef, Ibraheem. "SOI CMOS MEMS flow sensors." Thesis, University of Cambridge, 2009. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.611843.
Повний текст джерелаZhang, Peng. "Design and fabrication of chemiresistor type micro/nano hydrogen gas sensors using interdigitated electrodes." Orlando, Fla. : University of Central Florida, 2008. http://purl.fcla.edu/fcla/etd/CFE0002478.
Повний текст джерелаTulabandula, Sridhar. "Localization of wireless sensor networks using multidimensional scaling." Diss., Columbia, Mo. : University of Missouri-Columbia, 2007. http://hdl.handle.net/10355/4986.
Повний текст джерелаThe entire dissertation/thesis text is included in the research.pdf file; the official abstract appears in the short.pdf file (which also appears in the research.pdf); a non-technical general description, or public abstract, appears in the public.pdf file. Title from title screen of research.pdf file (viewed on April 17, 2008) Includes bibliographical references.
Kulkarni, Vinod Dilip. "Integration of micromachined thermal shear stress sensors with microchannels : design, fabrication and testing /." Online version of thesis, 2005. http://hdl.handle.net/1850/5201.
Повний текст джерелаJeedigunta, Sathyaharish. "Growth and characterization of nanocrystalline diamond films for microelectronics and microelectromechanical systems." [Tampa, Fla] : University of South Florida, 2008. http://purl.fcla.edu/usf/dc/et/SFE0002532.
Повний текст джерелаLiu, Ting-Hung. "Testing and Packaging for MEMS Acoustic Emission Sensors." Scholar Commons, 2018. https://scholarcommons.usf.edu/etd/7692.
Повний текст джерелаAlsaleem, Fadi M. "Dynamics of hybrid MEMS sensors and switches for mass and acceleration detection." Diss., Online access via UMI:, 2009.
Знайти повний текст джерелаIncludes bibliographical references.
Ghassemi, Parham. "Multi-Constriction Microfluidic Sensors for Single-Cell Biophysical Characterization." Thesis, Virginia Tech, 2017. http://hdl.handle.net/10919/89947.
Повний текст джерелаMS
Beardslee, Luke Armitage. "Liquid-phase operation of mems resonators for biochemical sensing in point of care and embedded applications." Diss., Georgia Institute of Technology, 2011. http://hdl.handle.net/1853/44924.
Повний текст джерелаAvila, Gomez Adrian Enrique. "Development MEMS Acoustic Emission Sensors." Scholar Commons, 2017. https://scholarcommons.usf.edu/etd/7392.
Повний текст джерелаPark, Jong-Jin. "Design of a new arrayed temperature sensor system and thermal interface materials /." Thesis, Connect to this title online; UW restricted, 2004. http://hdl.handle.net/1773/7062.
Повний текст джерелаShakir, Ali M. "A prototype multifunction differential pressure-flow sensor for medical and industrial applications." Diss., Online access via UMI:, 2009.
Знайти повний текст джерелаIncludes bibliographical references.
Fonseca, Michael Agapito. "Polymer/Ceramic Wireless MEMS Pressure Sensors for Harsh Environments: High Temperature and Biomedical Applications." Diss., Atlanta, Ga. : Georgia Institute of Technology, 2007. http://hdl.handle.net/1853/19789.
Повний текст джерелаCommittee Chair: Dr. Mark G. Allen; Committee Co-Chair: Dr. Oliver Brand; Committee Member: Dr. Andrew Peterson; Committee Member: Dr. Elliot Chaikof; Committee Member: Dr. Gregory Durgin; Committee Member: Dr. Robert Butera.
Reiman, Stephen E. "Exploitation of Nonlinear Behavior to Improve the Performance of a Magnetic Sensor." Thesis, Georgia Institute of Technology, 2004. http://hdl.handle.net/1853/5244.
Повний текст джерелаTeves, André da Costa. "Otimização de acelerômetros MEMS eletroestáticos de alto desempenho." Universidade de São Paulo, 2013. http://www.teses.usp.br/teses/disponiveis/3/3152/tde-01082013-144527/.
Повний текст джерелаMicro-Electro-Mechanical Systems (MEMS) are a class of devices that combine mechanical and electronic functions on a micrometric scale. Through the use of microfabrication techniques, adapted from the semiconductor industry, the integration of mobile structures, sensors, actuators and electronics is performed, allowing the implementation of fully miniaturized systems. Electrostatic accelerometers are among the highest volume MEMS products nowadays, with worldwide annual sales topping 100 million units and growing steadily. Bulk-type accelerometers are generally manufactured using three thick silicon wafers, bonded together one on top of the other. The intermediate layer is obtained by etching processes and consists of a big proof mass suspended by one or more beams. It is separated from the upper and lower wafers by a small gap, resulting in two sets of parallel plate capacitors. The flexibility of the beams allows the mass to move proportionally to the external acceleration and its displacement is estimated by the change in capacitance of the set. The design of such sensors is a complex task, since they depend on many performance requirements, which are most often conflicting. If a design is modified to improve one characteristic, others are inevitably affected. Therefore, optimization techniques are regularly used in the design stage of MEMS sensors. Aiming to improve the performance of capacitive micro-accelerometers, in the present work two optimization techniques are presented, the first is based on Parametric Optimization (PO) and the other is the Topology Optimization Method (TOM). The PO starts from a predefined topology and uses some of its geometric characteristics as design variables. In order to account for uncertainties in the dimensions and material properties, which is a key element in the design and fabrication of MEMS devices, in this work the PO is combined with the Reliability-based Design Optimization (RBDO) method. The First-Order Reliability Method (FORM) is applied to calculate the probabilities involved in the RBDO formulation. The TOM combines the Finite Element Method (FEM) and a material model with optimization techniques to find the best constrained material distribution in a fixed design domain. The design variables are the pseudo-densities that describe the amount of material at each point of the domain. The FE model is discretized using the Reissner-Mindlin plate element with the Mixed Interpolation of Tensorial Components (MITC) formulation. Practical examples using both approaches are presented and discussed in order to evaluate the potential of each technique to the design of capacitive micro-accelerometers.
Palasagaram, Jithendra N. Riggs Lloyd Stephen. "Efforts towards the design and development of an electromagnetic induction sensor optimized for detection and discrimination of unexploded ordnance." Auburn, Ala., 2006. http://repo.lib.auburn.edu/2006%20Spring/master's/PALASAGARAM_NAGASANJEEVA_44.pdf.
Повний текст джерелаLee, Jung Chul. "Fabrication, characterization, and application of multifunctional." Diss., Atlanta, Ga. : Georgia Institute of Technology, 2007. http://hdl.handle.net/1853/22697.
Повний текст джерелаCommittee Chair: King, William; Committee Member: Allen, Mark; Committee Member: Brand, Oliver; Committee Member: Glezer, Ari; Committee Member: Joshi, Yogendra.
Ellern, Ilya. "Metal organic frameworks based microcantilever gas sensors for detection of volatile organic compounds." Thesis, Georgia Institute of Technology, 2013. http://hdl.handle.net/1853/49127.
Повний текст джерелаDavis, Bradford S., and T. Gordon Brown. "COMBINING SENSORS WITH AIRBORNE TELEMETRY INSTRUMENTATION TO MAKE RANGE MEASUREMENTS AND OBTAIN AERODYNAMICS." International Foundation for Telemetering, 1999. http://hdl.handle.net/10150/608710.
Повний текст джерелаObtaining a projectile’s free-flight motion profile and its aerodynamic coefficients is typically accomplished at indoor test ranges using photographic techniques synchronized to timing stations. Since these ranges are relatively short, many discrete tests are necessary to compile a complete understanding of the projectile’s behavior. When Time Space Position Information (TSPI) is requested over long-range flights, it has been gathered with expensive video, laser, and radar trackers. These can be inaccurate at times and are limited to locations where the range equipment is able to track the projectile’s entire flight. With the ever-increasing sophistication of ordnance, such as smart and competent munitions that have multi-stage thrusting and maneuvering capability, it is becoming increasingly difficult to make the necessary measurements using current measurement techniques. Microelectromechanical Systems (MEMS) sensors and other electro-optical and magnetic sensors referenced to the sun and earth allow the projectile’s angular rates (spin, pitch, and yaw) and accelerations (axial and radial) to be measured throughout the flight. These sensors have been packaged into miniaturized telemetry instrumentation systems and placed within empty voids of the munition or in place of the fuze or warhead section. By combining this sensor data with a 6-DOF trajectory code, many of the projectiles aerodynamic coefficients including drag, static moment, and damping moment over a large Mach Number range and over multiple flight paths have been obtained. These techniques decrease the number of test shots required, reduce the complexity of the test setup, and reduce the test costs. Test data from instrumented tank, artillery, and rocket flight tests are presented in this report to show the current capability of making inflight measurements using telemetry-based techniques.
Enriquez, Karla Cecilia. "Development of an ultra-low power sensor for highway health monitoring." To access this resource online via ProQuest Dissertations and Theses @ UTEP, 2009. http://0-proquest.umi.com.lib.utep.edu/login?COPT=REJTPTU0YmImSU5UPTAmVkVSPTI=&clientId=2515.
Повний текст джерелаMendonça, Lucas Gonçalves Dias. "Micro-sensor capacitivo para avaliação da qualidade de combustíveis automotivos." Universidade de São Paulo, 2008. http://www.teses.usp.br/teses/disponiveis/3/3152/tde-30092008-173401/.
Повний текст джерелаThis work proposes a capacitive sensor with interdigitated electrodes in order to evaluate the quality of automotive fuel. Interdigitated electrodes have some interesting features for this type of sensor. Among them, they increase the capacitance by having several capacitors in parallel, and by having a structure feasible to be manufactured by conventional microfabrication processes. In addition, automotive fuel, serving as the dielectric material, fills the gaps of the electrodes. Modeling and computational simulations of the sensor were carried out in order to realize the influence of several design parameters. Samples were manufactured using alumina substrates with electroplated nickel electrodes. The width of the electrodes was chosen to be between 50m and 100m, with gaps of similar size. The paired length of the electrodes was 800m. The height of the electrodes varied between 20m and 40m. The whole sensor was around 4cm² in area. Several measurements were carried out using mixtures of alcohol and water, gasoline and alcohol, gasoline and kerosene, and others. Characterizations showed good results, validating the method. The sensor was capable of detecting the main types of fuel adulteration used in Brazil: addition of water to alcohol, and addition of organic solvents or alcohol to gasoline beyond the acceptable limit.
FENG, Zhifu. "Electron Beam Lithography and Focused Ion Beam Techniques for the Development of Low Power Consumption Microelectromechanical Systems-based Chemiresistive Gas Sensors." Doctoral thesis, Università degli studi di Ferrara, 2023. https://hdl.handle.net/11392/2502108.
Повний текст джерелаGas sensors are widely used for detecting toxic gases for environmental protection, industrial monitoring, household safety, breath analysis and food deterioration. Apart from the electrochemical gas sensors, which have a short lifetime, and optical gas sensors with large volume size with high cost, semiconductor metal oxide (SMO) gas sensors as one of the chemiresistive type gas sensors are now developing fast owing to its low production cost, stable physical properties and chemical versatility. However, regarding the high operational temperature of SMO gas sensors, reduction of power consumption is extremely important for its application in smartphones and other portable devices. For this purpose, miniaturization of SMO gas sensor devices, primarily for the hotplate part acting as mechanical support of the sensing material and heater/electrode part, is an effective way to improve the power efficiency. Microelectromechanical systems (MEMS) offer an opportunity to achieve such goal. This dissertation addressed to miniaturization of the hotplate, was focused on hotplate fabrication by using Electron Beam Lithography (EBL) and Focused Ion Beam (FIB). Then two different approaches were studied and used at Bruno Kessler Foundation facilities to microfabricate the hotplates. First method combined EBL and FIB techniques to define the layout. EBL was used to exposure the micro-level size electrode part (or pad part), and FIB was used to mill the heater circuit part with fine and dense structure. The patterned hotplate structure was characterized by Scanning Electron Microscope (SEM), and the milling result was analyzed by Secondary-ion Mass Spectrometry (SIMS). By studying these results, the optimized parameters for EBL and FIB were selected. The second method used two-step EBL exposure. Low energy of electron beam with low dose and large writing field for the electrode part exposure and high energy of electron beam with high dose and small writing field for the dense heater circuit patterning. After these hotplates were fabricated, their electrical and thermal properties were experimentally evaluated. Subsequently, chemiresistive sensors based on the developed hotplates were developed. In particular, n-type sensing material ZnO nano film was deposited on MHP2 and NHP1 by magnetron sputtering technique. SEM revealed the nano size of ZnO particle, and the calcination condition effect on the size of ZnO. ZnO crystal structure was characterized by X-ray Powder Diffraction (XRD), and X-Ray Photoelectron Spectroscopy (XPS) proved the atom ratio of Zn and O. ZnO nanofilm did not show strong response to humidity, but humidity could decrease the response toward NO2, and increase the response toward ethanol. Thick films of SnO2 highly doped by antimony with concentration of 10 wt% (ATO1) and 15wt% (ATO2) were drop coated on MHP1. These materials were characterized by SEM, XRD and XPS. It suggested that antimony doping modified the morphology of SnO2 powder by preventing the growth of powder particles. The results of the XPS experiment demonstrated that the concentration of antimony was higher on the surface of SnO2 than its inside. It was found that ATO sensors led to a particularly high selectivity and sensitivity to NO2 when compared to the other gases at 400 °C in dry air. Additionally, the sensing response of ATO1 and ATO2 was only moderately affected by humidity, which made them ideal candidates to detect NO2 in the actual atmosphere.
Swafford, Robert D. "Development of a new generation of electric current sensors through advances in manufacturing techniques and material design." Diss., Georgia Institute of Technology, 2013. http://hdl.handle.net/1853/50306.
Повний текст джерелаPatil, Nishad. "Design And Analysis Of MEMS Angular Rate Sensors." Thesis, Indian Institute of Science, 2006. http://hdl.handle.net/2005/291.
Повний текст джерелаKranz, Michael S. "Micro-mechanical sensor for the spectral decomposition of acoustic signals." Diss., Georgia Institute of Technology, 2011. http://hdl.handle.net/1853/39496.
Повний текст джерелаChoi, Seungkeun. "A micromachined magnetic field sensor for low power electronic compass applications." Diss., Available online, Georgia Institute of Technology, 2007, 2007. http://etd.gatech.edu/theses/available/etd-04092007-105302/.
Повний текст джерелаAllen, Mark, Committee Chair ; Brand, Oliver, Committee Member ; Kenney, James, Committee Member ; Hesketh, Peter, Committee Member ; Michaels, Jennifer, Committee Member.
Jalil, Jubayer. "Micromachined Vibrating-reed Electrometer in Silicon-on-Glass Technology." Thesis, Griffith University, 2019. http://hdl.handle.net/10072/389082.
Повний текст джерелаThesis (PhD Doctorate)
Doctor of Philosophy (PhD)
School of Eng & Built Env
Science, Environment, Engineering and Technology
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Deng, Kangfa, Gerald Gerlach, and Margarita Guenther. "Force-compensated hydrogel-based pH sensor." SPIE, 2015. https://tud.qucosa.de/id/qucosa%3A35185.
Повний текст джерелаWaterfall, Tyler Lane. "Design of Piezoresistive MEMS Force and Displacement Sensors." Diss., CLICK HERE for online access, 2006. http://contentdm.lib.byu.edu/ETD/image/etd1549.pdf.
Повний текст джерелаAiyar, Avishek R. "Microfabrication of a MEMS piezoresistive flow sensor - materials and processes." Thesis, Atlanta, Ga. : Georgia Institute of Technology, 2008. http://hdl.handle.net/1853/24696.
Повний текст джерела