Статті в журналах: "MEMS Gas Sensors"

1

Khater, M. E., M. Al-Ghamdi, S. Park, K. M. E. Stewart, E. M. Abdel-Rahman, A. Penlidis, A. H. Nayfeh, A. K. S. Abdel-Aziz, and M. Basha. "Binary MEMS gas sensors." Journal of Micromechanics and Microengineering 24, no. 6 (April 28, 2014): 065007. http://dx.doi.org/10.1088/0960-1317/24/6/065007.

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2

Zhu, Jianxiong, Xinmiao Liu, Qiongfeng Shi, Tianyiyi He, Zhongda Sun, Xinge Guo, Weixin Liu, Othman Bin Sulaiman, Bowei Dong, and Chengkuo Lee. "Development Trends and Perspectives of Future Sensors and MEMS/NEMS." Micromachines 11, no. 1 (December 18, 2019): 7. http://dx.doi.org/10.3390/mi11010007.

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With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life. This review paper introduces the development trends and perspectives of the future sensors and MEMS/NEMS. Starting from the issues of the MEMS fabrication, we introduced typical MEMS sensors for their applications in the Internet of Things (IoTs), such as MEMS physical sensor, MEMS acoustic sensor, and MEMS gas sensor. Toward the trends in intelligence and less power consumption, MEMS components including MEMS/NEMS switch, piezoelectric micromachined ultrasonic transducer (PMUT), and MEMS energy harvesting were investigated to assist the future sensors, such as event-based or almost zero-power. Furthermore, MEMS rigid substrate toward NEMS flexible-based for flexibility and interface was discussed as another important development trend for next-generation wearable or multi-functional sensors. Around the issues about the big data and human-machine realization for human beings’ manipulation, artificial intelligence (AI) and virtual reality (VR) technologies were finally realized using sensor nodes and its wave identification as future trends for various scenarios.

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3

Samotaev, Nikolay, Konstantin Oblov, Anastasia Ivanova, Boris Podlepetsky, Nikolay Volkov, and Nazar Zibilyuk. "Technology for SMD Packaging MOX Gas Sensors." Proceedings 2, no. 13 (November 30, 2018): 934. http://dx.doi.org/10.3390/proceedings2130934.

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The perspective combination of laser micromilling technology and jet (aerosol) printing technologies for ceramic MEMS producing of microhotplate in the surface mounted device (SMD) package for the metal oxide (MOX) sensor is describing. There are discusses technological and economic aspects of small-scale production of gas MOX sensors. Experiments with laser micromilling of Al2O3 ceramics confirmed possibility to produce MEMS microhotplate for MOX gas sensor in SMD package with form-factor SOT-23. Developed technology process is close to 3D prototype philosophy—rapid, simple and cheap.

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4

Samotaev, Nikolay, Konstantin Oblov, and Anastasia Ivanova. "Laser Micromilling Technology as a Key for Rapid Prototyping SMD ceramic MEMS devices." MATEC Web of Conferences 207 (2018): 04003. http://dx.doi.org/10.1051/matecconf/201820704003.

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The flexible laser micromilling technology for ceramic MEMS producing of microhotplate in the surface mounted device (SMD) package for the metal oxide (MOX) gas sensors is describing. There are discusses technological and economic aspects of small-scale production of gas MOX sensors in comparison with classical clean room technologies using for mass production MEMS devices. The main technical factors affecting on using MOX sensors in various applications are presented. Current results demonstrate that using described technology possible to manufacturing all parts of MOX gas sensor in the SMD form-factor SOT-23 package type.

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5

Asri, Muhammad Izzudin Ahmad, Md Nazibul Hasan, Mariatul Rawdhah Ahmad Fuaad, Yusri Md Yunos, and Mohamed Sultan Mohamed Ali. "MEMS Gas Sensors: A Review." IEEE Sensors Journal 21, no. 17 (September 1, 2021): 18381–97. http://dx.doi.org/10.1109/jsen.2021.3091854.

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6

DiMeo, Frank, Ing-Shin Chen, Philip Chen, Jeffrey Neuner, Andreas Roerhl, and James Welch. "MEMS-based hydrogen gas sensors." Sensors and Actuators B: Chemical 117, no. 1 (September 2006): 10–16. http://dx.doi.org/10.1016/j.snb.2005.05.007.

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7

Al-Ghamdi, M. S., M. E. Khater, K. M. E. Stewart, A. Alneamy, E. M. Abdel-Rahman, and A. Penlidis. "Dynamic bifurcation MEMS gas sensors." Journal of Micromechanics and Microengineering 29, no. 1 (November 26, 2018): 015005. http://dx.doi.org/10.1088/1361-6439/aaedf9.

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8

Wang, Yu-Hsiang, Chang-Pen Chen, Chih-Ming Chang, Chia-Pin Lin, Che-Hsin Lin, Lung-Ming Fu, and Chia-Yen Lee. "MEMS-based gas flow sensors." Microfluidics and Nanofluidics 6, no. 3 (January 8, 2009): 333–46. http://dx.doi.org/10.1007/s10404-008-0383-4.

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9

Samotaev, Nikolay, Konstantin Oblov, Pavel Dzhumaev, Marco Fritsch, Sindy Mosch, Mykola Vinnichenko, Nikolai Trofimenko, Christoph Baumgärtner, Franz-Martin Fuchs, and Lena Wissmeier. "Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors." Micromachines 12, no. 12 (November 25, 2021): 1440. http://dx.doi.org/10.3390/mi12121440.

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The work describes a fast and flexible micro/nano fabrication and manufacturing method for ceramic Micro-electromechanical systems (MEMS)sensors. Rapid prototyping techniques are demonstrated for metal oxide sensor fabrication in the form of a complete MEMS device, which could be used as a compact miniaturized surface mount devices package. Ceramic MEMS were fabricated by the laser micromilling of already pre-sintered monolithic materials. It has been demonstrated that it is possible to deposit metallization and sensor films by thick-film and thin-film methods on the manufactured ceramic product. The results of functional tests of such manufactured sensors are presented, demonstrating their full suitability for gas sensing application and indicating that the obtained parameters are at a level comparable to those of industrial produced sensors. Results of design and optimization principles of applied methods for micro- and nanosystems are discussed with regard to future, wider application in semiconductor gas sensors prototyping.

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10

Singh, Avneet, Anjali Sharma, Nidhi Dhull, Anil Arora, Monika Tomar, and Vinay Gupta. "MEMS-based microheaters integrated gas sensors." Integrated Ferroelectrics 193, no. 1 (October 13, 2018): 72–87. http://dx.doi.org/10.1080/10584587.2018.1514877.

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11

Ren, Shengle, Mingyuan Ren, and Honghai Xu. "A Readout Circuit for MEMS Gas Sensor." Micromachines 14, no. 1 (January 6, 2023): 150. http://dx.doi.org/10.3390/mi14010150.

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Анотація:

In recent years, the application of gas sensors is becoming more and more extensive. Driven by potential applications such as the Internet of Things, its technology development direction begins with miniaturization, integration, modularization, and intelligence. However, there is a bottleneck in the research of interface circuits, which restricts the development of gas sensors in volume, power consumption, and intelligence. To solve this problem, a MEMS gas sensor interface circuit based on ADC technology is proposed in this paper. Under the condition of the Huahong 110 nm process, the working voltage is 3.3 V, the resistance change of 100 Ω~1 MΩ can be detected, the conversion error is in the range of 0.5~1%, and the maximum power consumption is 986 μW. The overall layout area is 0.49 × 0.77 mm2. Finally, the correctness of the circuit function is verified by post-layout simulation.

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12

Han, Runqi, Zheng You, Yue Shi, and Yong Ruan. "Investigation on spin relaxation of microfabricated vapor cells with buffer gas." International Journal of Applied Electromagnetics and Mechanics 64, no. 1-4 (December 10, 2020): 1391–99. http://dx.doi.org/10.3233/jae-209458.

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MEMS vapor cells with buffer gas are the core components of chip scale atomic sensors due to the spin precession. We microfabricated rubidium vapor cells filled with neon based on MEMS technology and characterized the performance of MEMS vapor cells by measuring the longitudinal relaxation time. The dependence of spin relaxation time on buffer gas pressure and cell temperature was theoretically and experimentally investigated and the consistency was achieved. This provides a potential simpler approach to evaluate the performance of chip scale atomic sensors, such as atomic magnetometers, based on MEMS vapor cells.

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13

Du, Guizhen, Xianshan Dong, Xinglong Huang, Wei Su, and Peng Zhang. "Reliability Evaluation Based on Mathematical Degradation Model for Vacuum Packaged MEMS Sensor." Micromachines 13, no. 10 (October 11, 2022): 1713. http://dx.doi.org/10.3390/mi13101713.

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Vacuum packaging is used extensively in MEMS sensors for improving performance. However, the vacuum in the MEMS chamber gradually degenerates over time, which adversely affects the long-term performance of the MEMS sensor. A mathematical model for vacuum degradation is presented in this article for evaluating the degradation of vacuum packaged MEMS sensors, and a temperature-accelerated test of MEMS gyroscope with different vacuums is performed. A mathematical degradation model is developed to fit the parameters of the degradation of Q-factor over time at three different temperatures. The results indicate that the outgassing rate at 85 °C is the highest, which is 0.0531 cm2/s; the outgassing rate at 105 °C is the lowest, which is 0.0109 cm2/s; and the outgassing rate at 125 °C is in the middle, which is 0.0373 cm2/s. Due to the different mechanisms by which gas was released, the rate of degradation did not follow this rule. It will also be possible to predict the long-term reliability of vacuum packaged MEMS sensors at room temperature based on this model.

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14

Jia, Hao, Pengcheng Xu, and Xinxin Li. "Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid." Micromachines 12, no. 6 (May 31, 2021): 645. http://dx.doi.org/10.3390/mi12060645.

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Resonant micro/nanoelectromechanical systems (MEMS/NEMS) with on-chip integrated excitation and readout components, exhibit exquisite gravimetric sensitivities which have greatly advanced the bio/chemical sensor technologies in the past two decades. This paper reviews the development of integrated MEMS/NEMS resonators for bio/chemical sensing applications mainly in air and liquid. Different vibrational modes (bending, torsional, in-plane, and extensional modes) have been exploited to enhance the quality (Q) factors and mass sensing performance in viscous media. Such resonant mass sensors have shown great potential in detecting many kinds of trace analytes in gas and liquid phases, such as chemical vapors, volatile organic compounds, pollutant gases, bacteria, biomarkers, and DNA. The integrated MEMS/NEMS mass sensors will continuously push the detection limit of trace bio/chemical molecules and bring a better understanding of gas/nanomaterial interaction and molecular binding mechanisms.

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15

Samotaev, Nikolay. "Rapid Prototyping of MOX Gas Sensors in Form-Factor of SMD Packages." Proceedings 14, no. 1 (June 19, 2019): 52. http://dx.doi.org/10.3390/proceedings2019014052.

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By laser micromilling technology it is possible to fabricate custom MEMS microhotplate platform and also SMD package for MOX sensor, that gives complete solution for integration in mobile devices-smart phones, tablets and etc. The 3D design and fabrication of MEMS microhotplates and packages products occurs simultaneously that give opportunity for ultra-fast time making unique solutions for MOX sensors (number of microhotplates, hot spot size on microhotplates, diameter holes in package cap and etc.) without looking at standard solutions (primarily the package type).

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16

Vasiliev, A. A., A. V. Pisliakov, A. V. Sokolov, N. N. Samotaev, S. A. Soloviev, K. Oblov, V. Guarnieri, et al. "Non-silicon MEMS platforms for gas sensors." Sensors and Actuators B: Chemical 224 (March 2016): 700–713. http://dx.doi.org/10.1016/j.snb.2015.10.066.

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17

Hu, Jiahao, Tao Zhang, Ying Chen, Pengcheng Xu, Dan Zheng, and Xinxin Li. "Area-Selective, In-Situ Growth of Pd-Modified ZnO Nanowires on MEMS Hydrogen Sensors." Nanomaterials 12, no. 6 (March 18, 2022): 1001. http://dx.doi.org/10.3390/nano12061001.

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Nanomaterials are widely utilized as sensing materials in semiconductor gas sensors. As sensor sizes continue to shrink, it becomes increasingly challenging to construct micro-scale sensing materials on a micro-sensor with good uniformity and stability. Therefore, in-situ growth with a desired pattern in the tiny sensing area of a microsensor is highly demanded. In this work, we combine area-selective seed layer formation and hydrothermal growth for the in-situ growth of ZnO nanowires (NWs) on Micro-electromechanical Systems (MEMS)-based micro-hotplate gas sensors. The results show that the ZnO NWs are densely grown in the sensing area. With Pd nano-particles’ modification of the ZnO NWs, the sensor is used for hydrogen (H2) detection. The sensors with Pd-ZnO NWs show good repeatability as well as a reversible and uniform response to 2.5 ppm–200 ppm H2. Our approach offers a technical route for designing various kinds of gas sensors.

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18

Wang, Chen, Runlong Li, Lingyan Feng, and Jiaqiang Xu. "The SnO2/MXene Composite Ethanol Sensor Based on MEMS Platform." Chemosensors 10, no. 3 (March 11, 2022): 109. http://dx.doi.org/10.3390/chemosensors10030109.

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In recent years, two-dimensional layered material MXene has attracted extensive attention in the fields of sensors due to its large specific surface area and rich active sites. So, we employed multilayer Ti3C2TX and SnO2 microspheres to prepare SnO2/MXene composites for enhancing gas-sensing properties of pristine SnO2. The composite was brushed on a microelectromechanical system (MEMS) platform to make resistance-type gas sensors with low power consumption. The gas-sensing results show that the SnO2/MXene sensor with the best composite ratio (SnO2: MXene mass ratio is 5:1, named SM-5) greatly improves gas sensitivity of SnO2 sensor, among which the sensitivity to ethanol gas is the highest. At the same time, the composite also speeds up the response recovery speed of the sensor. When the SM-5 sensor worked at its optimal temperature 230 °C, its response value to 10 ppm ethanol reaches 5.0, which is twice that of the pristine SnO2 sensor. Its response and recovery time are only 14 s and 26 s, respectively. The sensing mechanism of the composite is discussed according to the classical the space charge or depletion layer model. It is concluded that the Schottky barrier of composites and the metal properties of Ti3C2Tx are responsible for improvement of the gas-sensing properties of the composite.

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19

Seoudi, Tarek, Julien Charensol, Wioletta Trzpil, Fanny Pages, Diba Ayache, Roman Rousseau, Aurore Vicet, and Michael Bahriz. "Highly Sensitive Capacitive MEMS for Photoacoustic Gas Trace Detection." Sensors 23, no. 6 (March 20, 2023): 3280. http://dx.doi.org/10.3390/s23063280.

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An enhanced MEMS capacitive sensor is developed for photoacoustic gas detection. This work attempts to address the lack of the literature regarding integrated and compact silicon-based photoacoustic gas sensors. The proposed mechanical resonator combines the advantages of silicon technology used in MEMS microphones and the high-quality factor, characteristic of quartz tuning fork (QTF). The suggested design focuses on a functional partitioning of the structure to simultaneously enhance the collection of the photoacoustic energy, overcome viscous damping, and provide high nominal capacitance. The sensor is modeled and fabricated using silicon-on-insulator (SOI) wafers. First, an electrical characterization is performed to evaluate the resonator frequency response and nominal capacitance. Then, under photoacoustic excitation and without using an acoustic cavity, the viability and the linearity of the sensor are demonstrated by performing measurements on calibrated concentrations of methane in dry nitrogen. In the first harmonic detection, the limit of detection (LOD) is 104 ppmv (for 1 s integration time), leading to a normalized noise equivalent absorption coefficient (NNEA) of 8.6 ⋅ 10−8 Wcm−1 Hz−1/2, which is better than that of bare Quartz-Enhanced Photoacoustic Spectroscopy (QEPAS), a state-of-the-art reference to compact and selective gas sensors.

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20

Bing, Yu, Fuyun Zhang, Jiatong Han, Tingting Zhou, Haixia Mei, and Tong Zhang. "A Method of Ultra-Low Power Consumption Implementation for MEMS Gas Sensors." Chemosensors 11, no. 4 (April 10, 2023): 236. http://dx.doi.org/10.3390/chemosensors11040236.

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In recent years, there has been a growing need for the development of low-power gas sensors. This paper proposes pulse heating and a corresponding measurement strategy using a Pulse Width Modulation (PWM) signal to realize the ultra-low power consumption for metal oxide semiconductor (MOS) gas sensors. A Micro-Hot-Plate (MHP) substrate was chosen to investigate the temperature and power characteristics of the MHP under different applied heating methods. The temperature of this given substrate could respond to the applied voltage within 0.1 s, proving the prac ticability of a pulse heating strategy. In addition, Pd-doped SnO2 was synthesized as the sensing material in the implementation of an ultra-low power gas sensor. The sensing performance and power consumption under different conditions were compared in the detection of reducing gases such as ethanol (C2H5OH) and formaldehyde (HCHO). Additionally, the results revealed that the sensor could work under PWM excitation while reducing the operating power to less than 1mW. The features shown in the measurements provide the feasibility for MOS gas sensors’ application in wearable and portable devices.

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21

Vasiliev, A. A., A. S. Lipilin, A. M. Mozalev, A. S. Lagutin, A. V. Pisliakov, N. P. Zaretskiy, N. N. Samotaev, A. V. Sokolov, and S. A. Soloviev. "Gas Sensors Based on Ceramic MEMS Structures Made of Anodic Alumina and Yttria Stabilized Zirconia Films." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2012, CICMT (September 1, 2012): 000528–34. http://dx.doi.org/10.4071/cicmt-2012-wp33.

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The application of thin ceramic films for the fabrication of MEMS devices enables the extension of their working temperature range up to 600°C, a decrease in heating power consumption, and a very considerable decrease in production cost of sensors and actuators based on this technology. These advantages are very important for the application of gas sensors under harsh environmental conditions, in autonomous and wireless sensor networks. The methods of the fabrication of MEMS platforms for metal oxide semiconductor and thermocatalytic gas sensors, fast thermometers, and flowmeters based on yttria stabilized zirconia (YSZ) and alumina membranes for gas sensors are described. Alumina membranes stable up to 800°C have thickness of about 12 microns and are produced by anodic oxidation of aluminum foil in diluted oxalic acid followed by high-temperature annealing. YSZ membrane with the same thickness is made by slip casting with consequent annealing under mechanic load. Platinum heaters are deposited onto the surface of the membrane by magnetron sputtering through metallic shadow mask. Perfect adhesion of platinum to ceramic material permits us to avoid the application of adhesive sub-layers, and, therefore, improves long-term stability of the heater at high temperature. The sensor chip has a shape of triangle cut by laser beam; the heater meander is located in the vertex of triangle. This approach simplifies the technology of the fabrication of the platform and decreases power necessary for the heating of the sensing layer up to working temperature of 400 – 600°C. It is shown that the application of such triangle shaped membranes permits a decrease in power consumption of the MEMS working at 450°C down to ~ 40 mW at continuous and down to < 1 mW at pulse heating of gas sensor with duty cycle of 1 %. Thermal response time of the microheater is of about 80 ms.

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22

Kita, Jaroslaw, Frank Rettig, Ralf Moos, Karl-Heinz Drüe, and Heiko Thust. "Laser forming of LTCC Ceramics for Hot-Plate Gas Sensors." Journal of Microelectronics and Electronic Packaging 2, no. 1 (January 1, 2005): 14–18. http://dx.doi.org/10.4071/1551-4897-2.1.14.

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Hot-plate LTCC gas sensors combine advantages of silicon structures (low power consumption) and typical ceramics gas sensors (stability and reliability). Such elements can be integrated in MEMS packages as well as in ceramic sensor arrays. Moreover, they can be produced in small series with relatively low cost. One important key in hot-plate design are properly formed beams. This paper presents possibilities and problems related to laser forming of LTCC ceramics for hot-plate gas sensors. Influence of beam width on power consumption and temperature distribution is discussed. Possibilities to achieve beam width as narrow as possible are practically tested by laser cutting. Obtained results are very promising for future work and for possible application of LTCC ceramics in such type of gas sensors.

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23

Berndt, Dominik, Matthias Lindner, Karl Tschurtschenthaler, Christoph Langer, and Rupert Schreiner. "Miniaturized Plasma Actuator Flow Measurements by MEMS-Based Thermal Conductivity Sensors." Proceedings 2, no. 13 (December 19, 2018): 939. http://dx.doi.org/10.3390/proceedings2130939.

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The gasflow created by a minaturized dielectric barrier discharge (DBD) plasma actuator is measured by a MEMS-based thermal conductivity gas sensor giving an indication of flow velocity and flow direction. The possiblity of several sensors in a small area gives a far better accuracy of local flow phenomena compared to conventional sensors. This is important for a better understanding of plasma- induced flow characteristics.

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24

Liu, Haotian, Li Zhang, King Li, and Ooi Tan. "Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach." Micromachines 9, no. 11 (October 29, 2018): 557. http://dx.doi.org/10.3390/mi9110557.

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The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (MEMS) technology dominate the market due to their balance in performance and cost. Integrating sensors with signal conditioning circuits on a single chip can significantly reduce the noise and package size. However, the fabrication process of MEMS sensors must be compatible with the complementary metal oxide semiconductor (CMOS) circuits, which imposes restrictions on the materials and design. In this paper, the sensing mechanism, design and operation of these sensors are reviewed, with focuses on the approaches towards performance improvement and CMOS compatibility.

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25

Samotaev, Nikolay, Konstantin Oblov, Denis Veselov, Boris Podlepetsky, Maya Etrekova, Nikolay Volkov, and Nazar Zibilyuk. "Technology of SMD MOX Gas Sensors Rapid Prototyping." Materials Science Forum 977 (February 2020): 231–37. http://dx.doi.org/10.4028/www.scientific.net/msf.977.231.

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This work discusses the design of flexible laser micromilling technology for fast prototyping of metal oxide based (MOX) gas sensors in SMD packages as an alternative to traditional silicon clean room technologies. By laser micromilling technology it is possible to fabricate custom Micro Electro Mechanical System (MEMS) microhotplate platform and also packages for MOX sensor, that gives complete solution for its integration in devices using IoT conception. The tests described in the work show the attainability of the stated results for the fabrication of microhotplates.

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26

Yeh, Yu-Ming, Shoou-Jinn Chang, Pin-Hsiang Wang, and Ting-Jen Hsueh. "A TSV-Structured Room Temperature p-Type TiO2 Nitric Oxide Gas Sensor." Applied Sciences 12, no. 19 (October 3, 2022): 9946. http://dx.doi.org/10.3390/app12199946.

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Planar MOS/MEMS gas sensors have been widely studied and applied, but the detection of exhaled gas has been little developed. The flow rate of exhaled gas affects the suspension structure of the MEMS gas sensor and the operating temperature of the gas sensor. Therefore, this study uses the Bosch process and the atomic layer deposition (ALD) process to prepare a room-temperature (RT) TSV-structured TiO2 gas sensor. The results indicated that the TiO2 sensing film is uniformed and covers the through-silicon via (TSV) structure and the TiO2 sensing film is confirmed to be a p-type MOS. In terms of gas sensing at room temperature, the response of the sensor increases with the increasing NO concentration. The sensor response is 16.5% on average, with an inaccuracy of <± 0.5% for five cycles at 4 ppm NO concentration. For gas at 10 ppm, the response of the sensor to NO is 24.4%, but the sensor produces almost no response to other gases (CO, CO2, SO2, and H2S). The RT TiO2 gas sensor with a TSV structure exhibits good stability, reversibility, and selectivity to NO gas.

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27

Chen, Lungtai, Chinsheng Chang, Liangju Chien, Borshiun Lee, and Wenlo Shieh. "A Novel Packaging of the MEMS Gas Sensors Used for Harsh Outdoor and Human Exhale Sampling Applications." Sensors 23, no. 11 (May 26, 2023): 5087. http://dx.doi.org/10.3390/s23115087.

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Dust or condensed water present in harsh outdoor or high-humidity human breath samples are one of the key sources that cause false detection in Micro Electro-Mechanical System (MEMS) gas sensors. This paper proposes a novel packaging mechanism for MEMS gas sensors that utilizes a self-anchoring mechanism to embed a hydrophobic polytetrafluoroethylene (PTFE) filter into the upper cover of the gas sensor packaging. This approach is distinct from the current method of external pasting. The proposed packaging mechanism is successfully demonstrated in this study. The test results indicate that the innovative packaging with the PTFE filter reduced the average response value of the sensor to the humidity range of 75~95% RH by 60.6% compared to the packaging without the PTFE filter. Additionally, the packaging passed the High-Accelerated Temperature and Humidity Stress (HAST) reliability test. With a similar sensing mechanism, the proposed packaging embedded with a PTFE filter can be further employed for the application of exhalation-related, such as coronavirus disease 2019 (COVID-19), breath screening.

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28

Rua-Taborda, Maria Isabel, Onuma Santawitee, Angkana Phongphut, Bralee Chayasombat, Chanchana Thanachayanont, Seeroong Prichanont, Catherine Elissalde, Jérome Bernard, and Helene Debeda. "Printed PZT Thick Films Implemented for Functionalized Gas Sensors." Key Engineering Materials 777 (August 2018): 158–62. http://dx.doi.org/10.4028/www.scientific.net/kem.777.158.

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Attractive for MEMS, PZT thick films are often microstructured on Si supporting platforms to span the gap between ceramics and thin film technologies. Printing process might lead to lower cost than ceramic process to open routes for MEMS applications. In this paper processing by screen-printing of Au/PZT/Au thick-films supported on alumina or completely released from the substrate are described. Investigations of the film microstructures nevertheless show lower densification than those of bulk ceramics. Prior to selective coating deposition, routes to improve the reduction of the film’s porosity are proposed.

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29

Nazemi, Haleh, Jenitha Antony Balasingam, Siddharth Swaminathan, Kenson Ambrose, Muhammad Umair Nathani, Tara Ahmadi, Yameema Babu Lopez, and Arezoo Emadi. "Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers—CMUT and PMUT." Sensors 20, no. 7 (April 3, 2020): 2010. http://dx.doi.org/10.3390/s20072010.

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Microelectromechanical system (MEMS)-based mass sensors are proposed as potential candidates for highly sensitive chemical and gas detection applications owing to their miniaturized structure, low power consumption, and ease of integration with readout circuits. This paper presents a new approach in developing micromachined mass sensors based on capacitive and piezoelectric transducer configurations for use in low concentration level gas detection in a complex environment. These micromachined sensors operate based on a shift in their center resonant frequencies. This shift is caused by a change in the sensor’s effective mass when exposed to the target gas molecules, which is then correlated to the gas concentration level. In this work, capacitive and piezoelectric-based micromachined sensors are investigated and their principle of operation, device structures and configurations, critical design parameters and their candidate fabrication techniques are discussed in detail.

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Xu, Shaohang, Na Zhou, Meng Shi, Chenchen Zhang, Dapeng Chen, and Haiyang Mao. "Overview of the MEMS Pirani Sensors." Micromachines 13, no. 6 (June 14, 2022): 945. http://dx.doi.org/10.3390/mi13060945.

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Vacuum equipment has a wide range of applications, and vacuum monitoring in such equipment is necessary in order to meet practical applications. Pirani sensors work by using the effect of air density on the heat conduction of the gas to cause temperature changes in sensitive structures, thus detecting the pressure in the surrounding environment and thus vacuum monitoring. In past decades, MEMS Pirani sensors have received considerable attention and practical applications because of their advances in simple structures, long service life, wide measurement range and high sensitivity. This review systematically summarizes and compares different types of MEMS Pirani sensors. The configuration, material, mechanism, and performance of different types of MEMS Pirani sensors are discussed, including the ones based on thermistors, thermocouples, diodes and surface acoustic wave. Further, the development status of novel Pirani sensors based on functional materials such as nanoporous materials, carbon nanotubes and graphene are investigated, and the possible future development directions for MEMS Pirani sensors are discussed. This review is with the purpose to focus on a generalized knowledge of MEMS Pirani sensors, thus inspiring the investigations on their practical applications.

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Yeh, Cheng-Han, Yuji Suzuki, and Kenichi Morimoto. "Performance Assessment of Parylene-Based MEMS Gas Sensors." Proceedings of the Symposium on Micro-Nano Science and Technology 2017.8 (2017): PN—52. http://dx.doi.org/10.1299/jsmemnm.2017.8.pn-52.

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Fang, Mao Bo, Xiao Lin Zhao, Jian Hua Li, Zi Wang, Yan Fang Wang, and Zhong Yu Hou. "A MEMS-Based Ionization Gas Sensor with ZnO Nanorods Coated Distributed Micro-Discharge Structure." Applied Mechanics and Materials 551 (May 2014): 460–65. http://dx.doi.org/10.4028/www.scientific.net/amm.551.460.

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A kind of ionization gas sensor based on the polarization structure was designed and manufactured by MEMS technology. The gas sensor device consists of 3 main parts: the anode electrode, the cathode and the distributed polarization structure array which lie between the former two parts. All parts were coated with ZnO nanorods by a two-step hydrothermal method. Different concentration acetone gas was tested using the device. The results support that the ionization gas sensors exhibit reasonable sensitivity and good repeatability at the applied voltages lower than 4V.

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Chen, Shu-Jung, and Yung-Chuan Wu. "A New Macro-Model of Gas Flow and Parameter Extraction for a CMOS-MEMS Vacuum Sensor." Symmetry 12, no. 10 (September 26, 2020): 1604. http://dx.doi.org/10.3390/sym12101604.

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When using a MEMS sensor to measure the vacuum of a medium, the transition flow between the viscous flow and molar flow is usually used to describe the gas convection due to the physical principle, which is difficult to study through analysis and simulation. In this study, the description of gas flow under different pressures in a CMOS-MEMS vacuum sensors has been incorporated into a new behavioral ANSYS model. The proposed model was built and the characteristic parameters in the model were obtained based on a CMOS-MEMS thermopile patterned with circular symmetry and an embedded heater as a heat source. It contains a characteristic length to describe the effective distance of heat dissipation to the silicon substrate, and the corresponding transition pressure to describe the symmetrical phenomenon of gas heat conduction. The macro-model is based on the description of the physical characteristics of heat transfer and the characteristic parameters of the CMOS-MEMS vacuum sensor. The characteristic length of 49 μm and the corresponding transition pressure of 2396 mTorr for the thermoelectric-type vacuum sensor were extracted and verified successfully. The results show that the average error for the prediction of vacuum sensing by the macro-model we proposed is about 1.11%. This approach provides more applications for vacuum analysis. It can reduce the complexity of simulation and analysis and provide better simulation effects, including gas conduction mechanisms.

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Takahashi, Toshiaki, Yong-Joon Choi, Kazuaki Sawada, and Kazuhiro Takahashi. "A ppm Ethanol Sensor Based on Fabry–Perot Interferometric Surface Stress Transducer at Room Temperature." Sensors 20, no. 23 (November 30, 2020): 6868. http://dx.doi.org/10.3390/s20236868.

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Disease screening by exhaled breath diagnosis is less burdensome for patients, and various devices have been developed as promising diagnostic methods. We developed a microelectromechanical system (MEMS) optical interferometric surface stress sensor to detect volatile ethanol gas at room temperature (26~27 °C) with high sensitivity. A sub-micron air gap in the optical interferometric sensor reduces interference orders, leading to increased spectral response associated with nanomechanical deflection caused by ethanol adsorption. The sub-micron cavity was embedded in a substrate using a transfer technique of parylene-C nanosheet. The sensor with a 0.4 µm gap shows a linear stable reaction, with small standard deviations, even at low ethanol gas concentrations of 5–110 ppm and a reversible reaction to the gas concentration change. Furthermore, the possibility of detecting sub-ppm ethanol concentration by optimizing the diameter and thickness of the deformable membrane is suggested. Compared with conventional MEMS surface stress gas sensors, the proposed optical interferometric sensor demonstrated high-sensitivity gas detection with exceeding the detection limit by two orders of magnitude while reducing the sensing area.

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Bogue, Robert. "Nanosensors and MEMS: connecting the nanoscale with the macro world with microscale technology." Sensor Review 36, no. 1 (January 18, 2016): 1–6. http://dx.doi.org/10.1108/sr-08-2015-0137.

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Purpose – This paper aims to illustrate how sensors can be fabricated by combining nanomaterials with micro-electromechanical system (MEMS) technology and to give examples of recently developed devices arising from this approach. Design/methodology/approach – Following a short introduction, this paper first identifies the benefits of MEMS technology. It then discusses the techniques for integrating carbon nanotubes with MEMS and provides examples of physical and molecular sensors produced by these methods. Combining other gas-responsive nanomaterials with MEMS is then considered and finally techniques for producing graphene on silicon devices are discussed. Brief concluding comments are drawn. Findings – This shows that many physical and molecular sensors have been developed by combining nanomaterials with MEMS technology. These have been fabricated by a diverse range of techniques which are often complex and multi-stage, but significant progress has been made and some are compatible with standard CMOS processes, yielding fully integrated nanosensors. Originality/value – This provides an insight into how two key technologies are being combined to yield families of advanced sensors.

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Mirza, Asif, Nor Hisham Hamid, Mohd Haris Md Khir, Khalid Ashraf, M. T. Jan, and Kashif Riaz. "Design, Modeling and Simulation of CMOS-MEMS Piezoresistive Cantilever Based Carbon Dioxide Gas Sensor for Capnometry." Advanced Materials Research 403-408 (November 2011): 3769–74. http://dx.doi.org/10.4028/www.scientific.net/amr.403-408.3769.

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This paper reports design, modeling and simulation of MEMS based sensor working in dynamic mode with fully differential piezoresistive sensing for monitoring the concentration of exhaled carbon dioxide (CO2) gas in human breath called capnometer. CO2 being a very important biomarker, it is desirable to extend the scope of its monitoring beyond clinical use to home and ambulatory services. Currently the scope of capnometers and its adaption is limited by high cost, large size and high power consumption of conventional capnometers . In recent years, MEMS based micro resonant sensors have received considerable attention due to their potential as a platform for the development of many novel physical, chemical, and biological sensors with small size, low cost and low power requirements. The sensor is designed using 0.35 micron CMOS technology. CoventorWare and MATLAB have been used as simulation software. According to the developed model and simulation results the resonator has resonant frequency 57393 Hz and mass sensitivity of 3.2 Hz/ng. The results show that the longitudinal relative change of resistance is 0.24%/µm while the transverse relative change of resistance is -0.03%/µm.

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Esashi, Masayoshi, Shuji Tanaka, Seiji Aoyagi, Takashi Mineta, Koichi Suzumori, Tetsuji Dohi, and Norihisa Miki. "Special Issue on MEMS for Robotics and Mechatronics." Journal of Robotics and Mechatronics 32, no. 2 (April 20, 2020): 279–80. http://dx.doi.org/10.20965/jrm.2020.p0279.

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MEMS (Micro Electro Mechanical Systems) is a technology that is used to incorporate sensors, actuators, microstructures, and circuits on chips by using a combination of various technologies with semiconductor process. MEMS are also used in robotics and mechatronics since they can provide compact, low-cost functional components that play crucial roles in their respective systems. We would like to elaborate on the history of MEMS technology, whose initial development started around 1970. In 1960s, Dr. Isemi Igarashi of Toyota Central R&D Labs., Inc. in Japan developed a semiconductor pressure sensor of piezo-resistance type. In 1980s, the pressure sensors were used to control automobile engines to clear exhaust gas regulations and thus contributed to solving environmental issues. In 1990s, semiconductor acceleration sensors were used for passive safety technologies to detect collision of automobiles and activate air bags, which resulted in decrease in traffic fatalities. In 2000s, an active safety system with gyro sensors was developed to detect and control spinning of a vehicle. In future, space recognition sensors with optical scanners to measure light propagation time and detect distance to an object will be used for autonomous driving. For smartphones, a microphone, an acceleration sensor, and a gyro sensor are used in user interface, and a film bulk acoustic wave resonator (FBAR) is used in a wireless communication filter. For projectors, the built-in circuit of a mirror array system is used to move mirrors placed in an array. After the development of projectors, films have not been used in movie theaters. MEMS are also widely used in medical and biological fields, such as blood pressure measurement. Esashi began research on a semiconductor ion sensor ISFET (ion sensitive field effect transistor) in 1971. ISFET detects ion concentration in electrolyte by exposing the insulating film of an insulated gate transistor to the liquid. He set up a prototyping facility when he was a graduate student and wrote only one paper on this research, although the prototyping facility was used afterwards. The ion sensor was certified under the Pharmaceutical Affairs Law after a 12-year application process and was used as catheter-type pH sensor to diagnose reflux esophagitis. MEMS are widely used for minimally invasive medical treatment, which causes minimum damage to human body. Moreover, MEMS are used as disposable sensors to prevent infection or as implanted devices. In addition, MEMS are used for production inspection and scientific instrument, including scanning probe microscopes (SPMs), which observe atoms using extremely small nano-probes, and probe cards that simultaneously test several integrated circuits on a wafer using aligned probes. When he was an associate professor, Esashi improved the prototyping facility that he made when he was a student and made a large scale integrated circuit (LSI). After he became a professor, he accepted researchers from more than 130 companies and developed MEMS using the prototyping facility to develop a product through the academia-industry collaboration. He realized integrated MEMS by combining LSI and MEMS. This includes a system of many tactile sensors attached on the body surface of a safe robot for real-time detection of contact through packet communication. After he retired from the university, he developed a “prototype coin laundry,” which enables companies to do develop without having their own prototyping facility. The prototype coin laundry is a system where engineers can use the prototyping facility to develop devices, and the system has been managed by successors. Unlike integrated circuits for which standardization is easy, standardization of MEMS is challenging because of difficulty in development. It is necessary to access various knowledge for the development of MEMS, and he has made efforts to provide the knowledge. Finally, we would like to thank authors who submitted papers to this Special Issue on MEMS for Robotics and Mechatronics as well as those who were involved in editing and reviewing the papers. We sincerely hope for further development in this field of research.

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Gassner, Simon, Rainer Schaller, Matthias Eberl, Carsten von Koblinski, Simon Essing, Mohammadamir Ghaderi, Katrin Schmitt, and Jürgen Wöllenstein. "Anodically Bonded Photoacoustic Transducer: An Approach towards Wafer-Level Optical Gas Sensors." Sensors 22, no. 2 (January 17, 2022): 685. http://dx.doi.org/10.3390/s22020685.

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We present a concept for a wafer-level manufactured photoacoustic transducer, suitable to be used in consumer-grade gas sensors. The transducer consists of an anodically bonded two-layer stack of a blank silicon wafer and an 11 µm membrane, which was wet-etched from a borosilicate wafer. The membrane separates two cavities; one of which was hermetically sealed and filled with CO2 during the anodic bonding and acts as an infrared absorber. The second cavity was designed to be connected to a standard MEMS microphone on PCB-level forming an infrared-sensitive photoacoustic detector. CO2 sensors consisting of the detector and a MEMS infrared emitter were built up and characterized towards their sensitivity and noise levels at six different component distance ranging from 3.0 mm to 15.5 mm. The signal response for the sample with the longest absorption path ranged from a decrease of 8.3% at a CO2 concentration of 9400 ppm to a decrease of 0.8% at a concentration of 560 ppm. A standard deviation of the measured values of 18 ppm was determined when the sensor was exposed to 1000 ppm CO2.

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39

Wang, Yu-Hsiang, Chia-Yen Lee, Che-Hsin Lin, and Lung-Ming Fu. "Enhanced sensing characteristics in MEMS-based formaldehyde gas sensors." Microsystem Technologies 14, no. 7 (November 20, 2007): 995–1000. http://dx.doi.org/10.1007/s00542-007-0460-8.

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Liess, M. "A new low-cost hydrogen sensor build with a thermopile IR detector adapted to measure thermal conductivity." Journal of Sensors and Sensor Systems 4, no. 2 (September 8, 2015): 281–88. http://dx.doi.org/10.5194/jsss-4-281-2015.

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Abstract. It is demonstrated how a commercially available MEMS thermopile infrared radiation sensor can be used as thermal conductivity gas detector (TCD). Since a TCD requires a heater while IR-thermopile sensors have no integrated heater, the thermopile itself is used as heater and temperature sensor at the same time. It is exposed to the measured gas environment in its housing. It is shown that, by using a simple driving circuitry, a mass-produced low-cost IR sensor can be used for hydrogen detection in applications such as hydrogen safety and smart gas metering. The sensor was tested to measure hydrogen in nitrogen with concentration of 0–100 % with a noise equivalent concentration of 3.7 ppm.

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Vasiliev, Alexey A., Vitaliy P. Kim, Sergey V. Tkachev, Denis Yu Kornilov, Sergey P. Gubin, Ivan S. Vlasov, Igor E. Jahatspanian, and Alexy S. Sizov. "Platinum Based Material for Additive Technology of Gas Sensors." Proceedings 2, no. 13 (December 20, 2018): 738. http://dx.doi.org/10.3390/proceedings2130738.

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We prepared platinum nanoparticle ink usable for the fabrication of MEMS microheatersof high-temperature gas sensors and thermoresistors operating up to 450 °C and present somepreliminary results on the application of the ink in sensor microheater manufacturing. The inkconsists of platinum particles (3–8 nm) suspended in ethylene glycol solution of polyvinylpyrrolidone.The ink is usable in both InkJet and AerosolJet printers. The annealing at temperature of about 600 °Cleads to the formation of uniform microheater structure. The experiments on microheater agingconfirm the stability of the printed microstructure at 450 °C for at least one year of operation. Thesubstrates used for printing were thin alumina and LTCC ceramics with thickness of 12–20 μm.

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42

Gilewski, Marian. "The ripple-curry amplifier in photonic applications." Photonics Letters of Poland 14, no. 4 (December 31, 2022): 86–88. http://dx.doi.org/10.4302/plp.v14i4.1187.

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This paper discusses the new design of a amplifier for the miniature MEMS-type spectrometer. The application problem of the new amplifier was the correct conditioning of the sensor's photoelectric pulses. The processed signal was a sequence of pulses that had variable both frequency and amplitude value. Thus, such a broadband amplifier should have the functionality of automatic gain control. This paper describes the concept of the new circuit, develops its detailed application, and then performs validation tests. Measurement results of the new circuit are discussed in the final section of the paper. Full Text: PDF ReferencesC. Ortolani, Flow Cytometry Today. Detectors and Electronics, (Springer 2022). pp. 97-119, CrossRef D. Maes, L. Reis, S. Poelman, E. Vissers, V. Avramovic, M. Zaknoune, G. Roelkens, S. Lemey, E. Peytavit, B. Kuyken, "High-Speed Photodiodes on Silicon Nitride with a Bandwidth beyond 100 GHz", Conference on Lasers and Electro-Optics, Optica Publishing Group, (2022). CrossRef R. Das, Y. Xie, A.P. Knights, "All-Silicon Low Noise Photonic Frontend For LIDAR Applications", 2022 IEEE Photonics Conference (IPC), IEEE Xplore (2022). CrossRef FEMTO Messtechnik GmbH, Variable Gain Photoreceiver - Fast Optical Power Meter Series OE-200, DirectLink M. Nehir, C. Frank, S. Aßmann, E.P. Achterberg, "Improving Optical Measurements: Non-Linearity Compensation of Compact Charge-Coupled Device (CCD) Spectrometers", Sensors 19(12), 2833 (2019). CrossRef F. Thomas,; R. Petzold, C. Becker, U. Werban, "Application of Low-Cost MEMS Spectrometers for Forest Topsoil Properties Prediction", Sensors 21(11), 3927 (2021). CrossRef M. Muhiyudin, D. Hutson, D. Gibson, E. Waddell, S. Song, S. Ahmadzadeh, "Miniaturised Infrared Spectrophotometer for Low Power Consumption Multi-Gas Sensing", Sensors 20(14), 3843 (2020). CrossRef S. Maruyama, T Hizawa, K. Takahashi, K. Sawada, "Optical-Interferometry-Based CMOS-MEMS Sensor Transduced by Stress-Induced Nanomechanical Deflection", Sensors 18(1), 138 (2018). CrossRef S. Merlo, P. Poma, E. Crisà, D. Faralli, M. Soldo, "Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry", Sensors 17(3), 8 (2017). CrossRef M.S. Wei, F. Xing, B. Li, Z. You, "Investigation of Digital Sun Sensor Technology with an N-Shaped Slit Mask", Sensors 11(10), 9764 (2011). CrossRef Z. Yang, T. Albrow-Owen, W. Cai, T. Hasan, "Miniaturization of optical spectrometers", Science 371, 6528 (2021). CrossRef Hamamatsu Photonics K.K. Fingertip size, ultra-compact spectrometer head integrating MEMS and image sensor technologies. DirectLink Microchip Technology Inc, MCP6291/1R/2/3/4/5 1.0 mA 10 MHz Rail-to-Rail Op Amp, CrossRef Microchip Technology Inc. MCP6021/1R/2/3/4 Rail-to-Rail Input/Output 10 MHz Op Amps, CrossRef

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43

Randjelović, D. V., A. G. Kozlov, O. M. Jakšić, M. M. Smiljanić, and P. D. Poljak. "Analytical modelling of the transient response of thermopile-based MEMS sensors." Electronics ETF 19, no. 2 (July 15, 2016): 70. http://dx.doi.org/10.7251/els1519070r.

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This work presents an analytical model dedicated to study of the transient response of multipurpose MEMS devices based on thermopile sensors. In general, thermopile sensors response depends on ambient temperature, thermal conductivity of the gas inside the housing and the pressure of the gas. The presented model takes into account all these parameters. This model was sucessfully implemented for the study of transient behaviour of our multifunctional sensors with p+Si/Al thermocouples and a bulk micromachined bilayered membrane. Simulations were performed for different gases of interest and conclusions were deduced regarding the influence of relevant parameters on the thermal time constant. This analytical approach is general and flexible enough to be implemented for analysis of the transient behaviour of thermopile-based sensors when used for different applications.

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Huang, Chi-Yo, Pei-Han Chung, Joseph Shyu, Yao-Hua Ho, Chao-Hsin Wu, Ming-Che Lee, and Ming-Jenn Wu. "Evaluation and Selection of Materials for Particulate Matter MEMS Sensors by Using Hybrid MCDM Methods." Sustainability 10, no. 10 (September 27, 2018): 3451. http://dx.doi.org/10.3390/su10103451.

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Air pollution poses serious problems as global industrialization continues to thrive. Since air pollution has grave impacts on human health, industry experts are starting to fathom how to integrate particulate matter (PM) sensors into portable devices; however, traditional micro-electro-mechanical systems (MEMS) gas sensors are too large. To overcome this challenge, experts from industry and academia have recently begun to investigate replacing the traditional etching techniques used on MEMS with semiconductor-based manufacturing processes and materials, such as gallium nitride (GaN), gallium arsenide (GaAs), and silicon. However, studies showing how to systematically evaluate and select suitable materials are rare in the literature. Therefore, this study aims to propose an analytic framework based on multiple criteria decision making (MCDM) to evaluate and select the most suitable materials for fabricating PM sensors. An empirical study based on recent research was conducted to demonstrate the feasibility of our analytic framework. The results provide an invaluable future reference for research institutes and providers.

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45

Godignon, Phillippe. "SiC Materials and Technologies for Sensors Development." Materials Science Forum 483-485 (May 2005): 1009–14. http://dx.doi.org/10.4028/www.scientific.net/msf.483-485.1009.

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Silicon Carbide has proven its strong interest for power and high frequency devices but it also has superior characteristics for application in the sensors and MEMS fields. The characteristic requirements of the starting material are different from that of power devices since the level of defects is not so critical while the layer stress is important especially in 3C-SiC on Si. The keyprocess for MEMS fabrication is the etching, which is progressing thanks to ICP process improvements. A perfect control of the etching step could allow the obtention of nano-resonators in SiC with fairly superior characteristics to the Si ones. Other electrical sensors for high temperature application such as gas sensors or Hall sensors have been also successfully developed taking profit of the deep etching process improvement and high temperature contact developments.

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46

Gorokh, Gennady, Igor Taratyn, Uladzimir Fiadosenka, Olga Reutskaya, and Andrei Lozovenko. "Heater Topology Influence on the Functional Characteristics of Thin-Film Gas Sensors Made by MEMS-Silicon Technology." Chemosensors 11, no. 8 (August 9, 2023): 443. http://dx.doi.org/10.3390/chemosensors11080443.

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The design of the heater plays a decisive role in the energy consumption, sensitivity, and speed of chemical sensors. The paper analyzes various options for the topology of meander-type platinum heaters in chemical sensors fabricated on thin dielectric membranes using MEMS-silicon technology. Comprehensive studies of the heater’s current–voltage characteristics have been carried out, heating rates have been measured at various currents, experimental temperature characteristics for various meander topologies have been obtained, heater options have been determined, and optimal heat transfer processes are ensured at a low power consumption of about 20–25 mW. Sensors with an optimal heater topology based on a double dielectric membrane were fabricated according to the described technological process, and sensory responses to 0.5 vol.% CH4 and 0.2% C3H8 were studied. The obtained results showed good results and confirmed the need to choose the optimal heater topology when designing sensors for recording the given type of gas mixtures in a certain temperature range.

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47

Bouchaala, Adam, Nizar Jaber, Omar Yassine, Osama Shekhah, Valeriya Chernikova, Mohamed Eddaoudi, and Mohammad Younis. "Nonlinear-Based MEMS Sensors and Active Switches for Gas Detection." Sensors 16, no. 6 (May 25, 2016): 758. http://dx.doi.org/10.3390/s16060758.

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48

YANG, Guang, Zheng ZHANG, Yan-Lin ZHANG, Yuan-Yuan LUO, Xuan XIONG, and Guo-Tao DUAN. "Thermal simulation of micro hotplate for multiple MEMS gas sensors." Chinese Journal of Analytical Chemistry 50, no. 1 (January 2022): 38–43. http://dx.doi.org/10.1016/j.cjac.2021.11.001.

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49

Hajjam, Arash, and Siavash Pourkamali. "Fabrication and Characterization of MEMS-Based Resonant Organic Gas Sensors." IEEE Sensors Journal 12, no. 6 (June 2012): 1958–64. http://dx.doi.org/10.1109/jsen.2011.2181360.

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50

Suter, Jonathan D., Cameron J. Hohimer, Jacob M. Fricke, Josef Christ, Hanseup Kim, and Allan T. Evans. "Principles of Meniscus-Based MEMS Gas or Liquid Pressure Sensors." Journal of Microelectromechanical Systems 22, no. 3 (June 2013): 670–77. http://dx.doi.org/10.1109/jmems.2013.2239258.

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