Статті в журналах з теми "MEMS Gas Sensors"
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Khater, M. E., M. Al-Ghamdi, S. Park, K. M. E. Stewart, E. M. Abdel-Rahman, A. Penlidis, A. H. Nayfeh, A. K. S. Abdel-Aziz, and M. Basha. "Binary MEMS gas sensors." Journal of Micromechanics and Microengineering 24, no. 6 (April 28, 2014): 065007. http://dx.doi.org/10.1088/0960-1317/24/6/065007.
Повний текст джерелаZhu, Jianxiong, Xinmiao Liu, Qiongfeng Shi, Tianyiyi He, Zhongda Sun, Xinge Guo, Weixin Liu, Othman Bin Sulaiman, Bowei Dong, and Chengkuo Lee. "Development Trends and Perspectives of Future Sensors and MEMS/NEMS." Micromachines 11, no. 1 (December 18, 2019): 7. http://dx.doi.org/10.3390/mi11010007.
Повний текст джерелаSamotaev, Nikolay, Konstantin Oblov, Anastasia Ivanova, Boris Podlepetsky, Nikolay Volkov, and Nazar Zibilyuk. "Technology for SMD Packaging MOX Gas Sensors." Proceedings 2, no. 13 (November 30, 2018): 934. http://dx.doi.org/10.3390/proceedings2130934.
Повний текст джерелаSamotaev, Nikolay, Konstantin Oblov, and Anastasia Ivanova. "Laser Micromilling Technology as a Key for Rapid Prototyping SMD ceramic MEMS devices." MATEC Web of Conferences 207 (2018): 04003. http://dx.doi.org/10.1051/matecconf/201820704003.
Повний текст джерелаAsri, Muhammad Izzudin Ahmad, Md Nazibul Hasan, Mariatul Rawdhah Ahmad Fuaad, Yusri Md Yunos, and Mohamed Sultan Mohamed Ali. "MEMS Gas Sensors: A Review." IEEE Sensors Journal 21, no. 17 (September 1, 2021): 18381–97. http://dx.doi.org/10.1109/jsen.2021.3091854.
Повний текст джерелаDiMeo, Frank, Ing-Shin Chen, Philip Chen, Jeffrey Neuner, Andreas Roerhl, and James Welch. "MEMS-based hydrogen gas sensors." Sensors and Actuators B: Chemical 117, no. 1 (September 2006): 10–16. http://dx.doi.org/10.1016/j.snb.2005.05.007.
Повний текст джерелаAl-Ghamdi, M. S., M. E. Khater, K. M. E. Stewart, A. Alneamy, E. M. Abdel-Rahman, and A. Penlidis. "Dynamic bifurcation MEMS gas sensors." Journal of Micromechanics and Microengineering 29, no. 1 (November 26, 2018): 015005. http://dx.doi.org/10.1088/1361-6439/aaedf9.
Повний текст джерелаWang, Yu-Hsiang, Chang-Pen Chen, Chih-Ming Chang, Chia-Pin Lin, Che-Hsin Lin, Lung-Ming Fu, and Chia-Yen Lee. "MEMS-based gas flow sensors." Microfluidics and Nanofluidics 6, no. 3 (January 8, 2009): 333–46. http://dx.doi.org/10.1007/s10404-008-0383-4.
Повний текст джерелаSamotaev, Nikolay, Konstantin Oblov, Pavel Dzhumaev, Marco Fritsch, Sindy Mosch, Mykola Vinnichenko, Nikolai Trofimenko, Christoph Baumgärtner, Franz-Martin Fuchs, and Lena Wissmeier. "Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors." Micromachines 12, no. 12 (November 25, 2021): 1440. http://dx.doi.org/10.3390/mi12121440.
Повний текст джерелаSingh, Avneet, Anjali Sharma, Nidhi Dhull, Anil Arora, Monika Tomar, and Vinay Gupta. "MEMS-based microheaters integrated gas sensors." Integrated Ferroelectrics 193, no. 1 (October 13, 2018): 72–87. http://dx.doi.org/10.1080/10584587.2018.1514877.
Повний текст джерелаRen, Shengle, Mingyuan Ren, and Honghai Xu. "A Readout Circuit for MEMS Gas Sensor." Micromachines 14, no. 1 (January 6, 2023): 150. http://dx.doi.org/10.3390/mi14010150.
Повний текст джерелаHan, Runqi, Zheng You, Yue Shi, and Yong Ruan. "Investigation on spin relaxation of microfabricated vapor cells with buffer gas." International Journal of Applied Electromagnetics and Mechanics 64, no. 1-4 (December 10, 2020): 1391–99. http://dx.doi.org/10.3233/jae-209458.
Повний текст джерелаDu, Guizhen, Xianshan Dong, Xinglong Huang, Wei Su, and Peng Zhang. "Reliability Evaluation Based on Mathematical Degradation Model for Vacuum Packaged MEMS Sensor." Micromachines 13, no. 10 (October 11, 2022): 1713. http://dx.doi.org/10.3390/mi13101713.
Повний текст джерелаJia, Hao, Pengcheng Xu, and Xinxin Li. "Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid." Micromachines 12, no. 6 (May 31, 2021): 645. http://dx.doi.org/10.3390/mi12060645.
Повний текст джерелаSamotaev, Nikolay. "Rapid Prototyping of MOX Gas Sensors in Form-Factor of SMD Packages." Proceedings 14, no. 1 (June 19, 2019): 52. http://dx.doi.org/10.3390/proceedings2019014052.
Повний текст джерелаVasiliev, A. A., A. V. Pisliakov, A. V. Sokolov, N. N. Samotaev, S. A. Soloviev, K. Oblov, V. Guarnieri, et al. "Non-silicon MEMS platforms for gas sensors." Sensors and Actuators B: Chemical 224 (March 2016): 700–713. http://dx.doi.org/10.1016/j.snb.2015.10.066.
Повний текст джерелаHu, Jiahao, Tao Zhang, Ying Chen, Pengcheng Xu, Dan Zheng, and Xinxin Li. "Area-Selective, In-Situ Growth of Pd-Modified ZnO Nanowires on MEMS Hydrogen Sensors." Nanomaterials 12, no. 6 (March 18, 2022): 1001. http://dx.doi.org/10.3390/nano12061001.
Повний текст джерелаWang, Chen, Runlong Li, Lingyan Feng, and Jiaqiang Xu. "The SnO2/MXene Composite Ethanol Sensor Based on MEMS Platform." Chemosensors 10, no. 3 (March 11, 2022): 109. http://dx.doi.org/10.3390/chemosensors10030109.
Повний текст джерелаSeoudi, Tarek, Julien Charensol, Wioletta Trzpil, Fanny Pages, Diba Ayache, Roman Rousseau, Aurore Vicet, and Michael Bahriz. "Highly Sensitive Capacitive MEMS for Photoacoustic Gas Trace Detection." Sensors 23, no. 6 (March 20, 2023): 3280. http://dx.doi.org/10.3390/s23063280.
Повний текст джерелаBing, Yu, Fuyun Zhang, Jiatong Han, Tingting Zhou, Haixia Mei, and Tong Zhang. "A Method of Ultra-Low Power Consumption Implementation for MEMS Gas Sensors." Chemosensors 11, no. 4 (April 10, 2023): 236. http://dx.doi.org/10.3390/chemosensors11040236.
Повний текст джерелаVasiliev, A. A., A. S. Lipilin, A. M. Mozalev, A. S. Lagutin, A. V. Pisliakov, N. P. Zaretskiy, N. N. Samotaev, A. V. Sokolov, and S. A. Soloviev. "Gas Sensors Based on Ceramic MEMS Structures Made of Anodic Alumina and Yttria Stabilized Zirconia Films." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2012, CICMT (September 1, 2012): 000528–34. http://dx.doi.org/10.4071/cicmt-2012-wp33.
Повний текст джерелаKita, Jaroslaw, Frank Rettig, Ralf Moos, Karl-Heinz Drüe, and Heiko Thust. "Laser forming of LTCC Ceramics for Hot-Plate Gas Sensors." Journal of Microelectronics and Electronic Packaging 2, no. 1 (January 1, 2005): 14–18. http://dx.doi.org/10.4071/1551-4897-2.1.14.
Повний текст джерелаBerndt, Dominik, Matthias Lindner, Karl Tschurtschenthaler, Christoph Langer, and Rupert Schreiner. "Miniaturized Plasma Actuator Flow Measurements by MEMS-Based Thermal Conductivity Sensors." Proceedings 2, no. 13 (December 19, 2018): 939. http://dx.doi.org/10.3390/proceedings2130939.
Повний текст джерелаLiu, Haotian, Li Zhang, King Li, and Ooi Tan. "Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach." Micromachines 9, no. 11 (October 29, 2018): 557. http://dx.doi.org/10.3390/mi9110557.
Повний текст джерелаSamotaev, Nikolay, Konstantin Oblov, Denis Veselov, Boris Podlepetsky, Maya Etrekova, Nikolay Volkov, and Nazar Zibilyuk. "Technology of SMD MOX Gas Sensors Rapid Prototyping." Materials Science Forum 977 (February 2020): 231–37. http://dx.doi.org/10.4028/www.scientific.net/msf.977.231.
Повний текст джерелаYeh, Yu-Ming, Shoou-Jinn Chang, Pin-Hsiang Wang, and Ting-Jen Hsueh. "A TSV-Structured Room Temperature p-Type TiO2 Nitric Oxide Gas Sensor." Applied Sciences 12, no. 19 (October 3, 2022): 9946. http://dx.doi.org/10.3390/app12199946.
Повний текст джерелаChen, Lungtai, Chinsheng Chang, Liangju Chien, Borshiun Lee, and Wenlo Shieh. "A Novel Packaging of the MEMS Gas Sensors Used for Harsh Outdoor and Human Exhale Sampling Applications." Sensors 23, no. 11 (May 26, 2023): 5087. http://dx.doi.org/10.3390/s23115087.
Повний текст джерелаRua-Taborda, Maria Isabel, Onuma Santawitee, Angkana Phongphut, Bralee Chayasombat, Chanchana Thanachayanont, Seeroong Prichanont, Catherine Elissalde, Jérome Bernard, and Helene Debeda. "Printed PZT Thick Films Implemented for Functionalized Gas Sensors." Key Engineering Materials 777 (August 2018): 158–62. http://dx.doi.org/10.4028/www.scientific.net/kem.777.158.
Повний текст джерелаNazemi, Haleh, Jenitha Antony Balasingam, Siddharth Swaminathan, Kenson Ambrose, Muhammad Umair Nathani, Tara Ahmadi, Yameema Babu Lopez, and Arezoo Emadi. "Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers—CMUT and PMUT." Sensors 20, no. 7 (April 3, 2020): 2010. http://dx.doi.org/10.3390/s20072010.
Повний текст джерелаXu, Shaohang, Na Zhou, Meng Shi, Chenchen Zhang, Dapeng Chen, and Haiyang Mao. "Overview of the MEMS Pirani Sensors." Micromachines 13, no. 6 (June 14, 2022): 945. http://dx.doi.org/10.3390/mi13060945.
Повний текст джерелаYeh, Cheng-Han, Yuji Suzuki, and Kenichi Morimoto. "Performance Assessment of Parylene-Based MEMS Gas Sensors." Proceedings of the Symposium on Micro-Nano Science and Technology 2017.8 (2017): PN—52. http://dx.doi.org/10.1299/jsmemnm.2017.8.pn-52.
Повний текст джерелаFang, Mao Bo, Xiao Lin Zhao, Jian Hua Li, Zi Wang, Yan Fang Wang, and Zhong Yu Hou. "A MEMS-Based Ionization Gas Sensor with ZnO Nanorods Coated Distributed Micro-Discharge Structure." Applied Mechanics and Materials 551 (May 2014): 460–65. http://dx.doi.org/10.4028/www.scientific.net/amm.551.460.
Повний текст джерелаChen, Shu-Jung, and Yung-Chuan Wu. "A New Macro-Model of Gas Flow and Parameter Extraction for a CMOS-MEMS Vacuum Sensor." Symmetry 12, no. 10 (September 26, 2020): 1604. http://dx.doi.org/10.3390/sym12101604.
Повний текст джерелаTakahashi, Toshiaki, Yong-Joon Choi, Kazuaki Sawada, and Kazuhiro Takahashi. "A ppm Ethanol Sensor Based on Fabry–Perot Interferometric Surface Stress Transducer at Room Temperature." Sensors 20, no. 23 (November 30, 2020): 6868. http://dx.doi.org/10.3390/s20236868.
Повний текст джерелаBogue, Robert. "Nanosensors and MEMS: connecting the nanoscale with the macro world with microscale technology." Sensor Review 36, no. 1 (January 18, 2016): 1–6. http://dx.doi.org/10.1108/sr-08-2015-0137.
Повний текст джерелаMirza, Asif, Nor Hisham Hamid, Mohd Haris Md Khir, Khalid Ashraf, M. T. Jan, and Kashif Riaz. "Design, Modeling and Simulation of CMOS-MEMS Piezoresistive Cantilever Based Carbon Dioxide Gas Sensor for Capnometry." Advanced Materials Research 403-408 (November 2011): 3769–74. http://dx.doi.org/10.4028/www.scientific.net/amr.403-408.3769.
Повний текст джерелаEsashi, Masayoshi, Shuji Tanaka, Seiji Aoyagi, Takashi Mineta, Koichi Suzumori, Tetsuji Dohi, and Norihisa Miki. "Special Issue on MEMS for Robotics and Mechatronics." Journal of Robotics and Mechatronics 32, no. 2 (April 20, 2020): 279–80. http://dx.doi.org/10.20965/jrm.2020.p0279.
Повний текст джерелаGassner, Simon, Rainer Schaller, Matthias Eberl, Carsten von Koblinski, Simon Essing, Mohammadamir Ghaderi, Katrin Schmitt, and Jürgen Wöllenstein. "Anodically Bonded Photoacoustic Transducer: An Approach towards Wafer-Level Optical Gas Sensors." Sensors 22, no. 2 (January 17, 2022): 685. http://dx.doi.org/10.3390/s22020685.
Повний текст джерелаWang, Yu-Hsiang, Chia-Yen Lee, Che-Hsin Lin, and Lung-Ming Fu. "Enhanced sensing characteristics in MEMS-based formaldehyde gas sensors." Microsystem Technologies 14, no. 7 (November 20, 2007): 995–1000. http://dx.doi.org/10.1007/s00542-007-0460-8.
Повний текст джерелаLiess, M. "A new low-cost hydrogen sensor build with a thermopile IR detector adapted to measure thermal conductivity." Journal of Sensors and Sensor Systems 4, no. 2 (September 8, 2015): 281–88. http://dx.doi.org/10.5194/jsss-4-281-2015.
Повний текст джерелаVasiliev, Alexey A., Vitaliy P. Kim, Sergey V. Tkachev, Denis Yu Kornilov, Sergey P. Gubin, Ivan S. Vlasov, Igor E. Jahatspanian, and Alexy S. Sizov. "Platinum Based Material for Additive Technology of Gas Sensors." Proceedings 2, no. 13 (December 20, 2018): 738. http://dx.doi.org/10.3390/proceedings2130738.
Повний текст джерелаGilewski, Marian. "The ripple-curry amplifier in photonic applications." Photonics Letters of Poland 14, no. 4 (December 31, 2022): 86–88. http://dx.doi.org/10.4302/plp.v14i4.1187.
Повний текст джерелаRandjelović, D. V., A. G. Kozlov, O. M. Jakšić, M. M. Smiljanić, and P. D. Poljak. "Analytical modelling of the transient response of thermopile-based MEMS sensors." Electronics ETF 19, no. 2 (July 15, 2016): 70. http://dx.doi.org/10.7251/els1519070r.
Повний текст джерелаHuang, Chi-Yo, Pei-Han Chung, Joseph Shyu, Yao-Hua Ho, Chao-Hsin Wu, Ming-Che Lee, and Ming-Jenn Wu. "Evaluation and Selection of Materials for Particulate Matter MEMS Sensors by Using Hybrid MCDM Methods." Sustainability 10, no. 10 (September 27, 2018): 3451. http://dx.doi.org/10.3390/su10103451.
Повний текст джерелаGodignon, Phillippe. "SiC Materials and Technologies for Sensors Development." Materials Science Forum 483-485 (May 2005): 1009–14. http://dx.doi.org/10.4028/www.scientific.net/msf.483-485.1009.
Повний текст джерелаGorokh, Gennady, Igor Taratyn, Uladzimir Fiadosenka, Olga Reutskaya, and Andrei Lozovenko. "Heater Topology Influence on the Functional Characteristics of Thin-Film Gas Sensors Made by MEMS-Silicon Technology." Chemosensors 11, no. 8 (August 9, 2023): 443. http://dx.doi.org/10.3390/chemosensors11080443.
Повний текст джерелаBouchaala, Adam, Nizar Jaber, Omar Yassine, Osama Shekhah, Valeriya Chernikova, Mohamed Eddaoudi, and Mohammad Younis. "Nonlinear-Based MEMS Sensors and Active Switches for Gas Detection." Sensors 16, no. 6 (May 25, 2016): 758. http://dx.doi.org/10.3390/s16060758.
Повний текст джерелаYANG, Guang, Zheng ZHANG, Yan-Lin ZHANG, Yuan-Yuan LUO, Xuan XIONG, and Guo-Tao DUAN. "Thermal simulation of micro hotplate for multiple MEMS gas sensors." Chinese Journal of Analytical Chemistry 50, no. 1 (January 2022): 38–43. http://dx.doi.org/10.1016/j.cjac.2021.11.001.
Повний текст джерелаHajjam, Arash, and Siavash Pourkamali. "Fabrication and Characterization of MEMS-Based Resonant Organic Gas Sensors." IEEE Sensors Journal 12, no. 6 (June 2012): 1958–64. http://dx.doi.org/10.1109/jsen.2011.2181360.
Повний текст джерелаSuter, Jonathan D., Cameron J. Hohimer, Jacob M. Fricke, Josef Christ, Hanseup Kim, and Allan T. Evans. "Principles of Meniscus-Based MEMS Gas or Liquid Pressure Sensors." Journal of Microelectromechanical Systems 22, no. 3 (June 2013): 670–77. http://dx.doi.org/10.1109/jmems.2013.2239258.
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