Дисертації з теми "MEMS Gas Sensors"
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Gatty, Hithesh K. "MEMS-based electrochemical gas sensors and wafer-level methods." Doctoral thesis, KTH, Mikro- och nanosystemteknik, 2015. http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-172955.
Повний текст джерелаQC 20150907
DeBoer, John Raymond. "Evaluation Methods for Porous Silicon Gas Sensors." Thesis, Georgia Institute of Technology, 2004. http://hdl.handle.net/1853/4971.
Повний текст джерелаZhang, Chen. "Piezoelectric-Based Gas Sensors for Harsh Environment Gas Component Monitoring." Thesis, University of North Texas, 2019. https://digital.library.unt.edu/ark:/67531/metadc1538769/.
Повний текст джерелаUdina, Oliva Sergi. "Smart Chemical Sensors: Concepts and Application." Doctoral thesis, Universitat de Barcelona, 2012. http://hdl.handle.net/10803/84079.
Повний текст джерелаLa tesis introduce conceptos básicos sobre el diseño de sensores químicos inteligentes, en particular presenta los estándares propuestos IEEE-1451 y BS-7986, y elabora una propuesta para el diseño óptimo de dichos sensores químicos inteligentes. Se implementa la propuesta de diseño para una aplicación concreta, el análisis de gas natural. Además de la aplicación de los conceptos sobre sensores químicos inteligentes se pretende además diseñar un analizador compacto, rápido y de bajo coste, para ello se estudia el uso de un microsensor termoeéctrico como sensor principal del analizador. Una vez probada su viabilidad se implementan ambos conceptos (sensores inteligentes y microsensor termoeléctrico) en un prototipo funcional validado en laboratorio. Como resultado se obtiene una propuesta para el diseño de sensores químicos inteligentes basada en estándares, y por otro lado se presenta un nuevo analizador de gas natural, más rápido y compacto que los existentes. Los resultados obtenidos originan diversas publicaciones en revistas así como dos patentes de método y sistema.
Haapalainen, T. (Tomi). "Gas response properties of metal oxide nanoparticle based sensors on MEMS microhotplate platforms." Master's thesis, University of Oulu, 2015. http://jultika.oulu.fi/Record/nbnfioulu-201509031953.
Повний текст джерелаPuigcorbé, Punzano Jordi. "Anàlisi termo-mecànica d'estructures micromecanitzades per a sensors de gas." Doctoral thesis, Universitat de Barcelona, 2003. http://hdl.handle.net/10803/1509.
Повний текст джерелаL'estudi del comportament tèrmic de les estructures micromecanitzades ha permès obtenir les característiques bàsiques que controlaran el comportament del sensor, com són el consum en potència, la distribució de temperatura i el temps de resposta del substrat. L'anàlisi termomecànic ha consistit en determinar els esforços residuals en cada estructura així com l'estudi de la deformació dels diferents dissenys per a diferents temperatures de treball. S'han identificat diferents mecanismes de degradació en els materials que formen els sensors i s'ha obtingut el comportament termomecànic fins la ruptura del sensor. Tant en l'estudi tèrmic com en el termomecànic, la interacció entre la capa sensora i el substrat micromecanitzat així com l'influencia del material sensor en el comportament global del dispositiu han estat aspectes investigats.
El treball inclou, a més, la caracterització termomecànica del Pt-Ti emprat en estructures micromecanitzades a través de la utilització de mètodes de Nanoindentació, Microscopia de Forces Atòmiques (AFM), Difracció de Raigs X (XRD) i espectroscopia Auger.
També inclou el desenvolupament d'una metodologia per predir la fatiga tèrmica en microsistemes basada en la combinació dels models elasto-plàstics de metalls en capa prima (Alumini, Pt-Ti) amb simulacions numèriques.
Finalment, de la metodologia d'anàlisi electro-termo-mecànic que s'ha dut a terme, es poden obtenir regles de disseny per la implementació de microsistemes que treballin en diferents règims de temperatura i en concret, directament aplicables al disseny i fabricació d'estructures micromecanitzades per a sensors de gas
This work presents a complete thermomechanical study of different micromachined gas sensor substrates based on closed and suspended membrane microstructures. The work has been carried out combining coupled electro-thermo-mechanical three-dimensional finite element method simulations with different experimental techniques such as those used in Microsystems characterization (thermo-electrical, thermography, AFM, XRD, confocal microscopy, Auger..). The performances predicted by simulations, such as the power consumption, the temperature distribution, the time response, the membrane deflection during operation and the preferential failure sites in the micromachined substrates have been confirmed by experience.
The work includes the thermo-mechanical characterization of Pt-Ti thin films used in the structures using Nanoindentation, AFM, XRD and Auger spectroscopy. Additionally, a methodology to predict the thermal fatigue in microsystems, which combines experimental thin metal elasto-plastic models (Al, Pt-Ti) and coupled thermo-mechanical FEM simulations, has been developed.
The good agreement between simulations and experimental results validates the numerical models, and allows us to consider the adaptability of the analyzed designs as micromachined substrates for integrated gas sensors.
Keywords: MEMS, Microsystems, gas sensors, thermal fatigue, Al, Pt-Ti, FEM.
En este trabajo se ha establecido una metodología de análisis y caracterización térmica y termomecánica de estructuras micromecanizadas en silicio para aplicaciones en sensores de gas. Esta investigación ha combinado simulaciones numéricas mediante el método de los elementos finitos con técnicas experimentales de caracterización utilizadas en el campo de los microsistemas (medidas electro-térmicas, termografía, AFM, XRD, microscopia confocal, Auger).
El estudio térmico de dichas estructuras ha permitido obtener su consumo en potencia, la distribución de temperaturas, la dinámica térmica, así como ha permitido fijar con precisión las propiedades térmicas de los materiales típicamente utilizados en la tecnología de los microsistemas. El estudio mecánico ha permitido obtener los esfuerzos residuales inducidos por los procesos de fabricación. Además, se ha obtenido la deformación de las estructuras a diferentes temperaturas de trabajo hasta la ruptura total de las membranas. Durante las altas temperaturas de trabajo se han detectado y analizado diferentes mecanismos de degradación en los materiales.
El trabajo incluye además, la caracterización termo-mecánica del Pt-Ti depositado por sputtering, ampliamente utilizado en microsensores de gas, mediante el empleo de técnicas de Nanoindentación, Microscopia AFM, Difracción de Rayos X (XRD) y espectrocopia Auger.
También presenta el desarrollo de una metodología para la predicción de la fatiga térmica en microsistemas, que se basa en la combinación de modelos elasto-plásticos para metales en capa delgada con simulaciones numéricas.
Finalmente, de la metodología de análisis termo-mecánico que se ha llevado a cabo, se pueden obtener reglas de diseño para microsistemas que trabajen a diferentes temperaturas, y en concreto directamente aplicables al diseño y fabricación de estructuras micromecanizadas para sensores de gas.
Palabras clave: MEMS, microsistemas, sensores de gas, fatiga térmica, Al, Pt-Ti, MEF.
Nagaiah, Narasimha. "NOVEL CONCEPTUAL DESIGN AND ANLYSIS OF POLYMER DERIVED CERAMIC MEMS SENSORS FOR GAS TURBINE ENVIRONMENT." Master's thesis, University of Central Florida, 2006. http://digital.library.ucf.edu/cdm/ref/collection/ETD/id/4086.
Повний текст джерелаM.S.M.E.
Department of Mechanical, Materials and Aerospace Engineering;
Engineering and Computer Science
Mechanical Engineering
Gong, Jianwei. "NON-SILICON MICROFABRICATED NANOSTRUCTURED CHEMICAL SENSORS FOR ELECTRIC NOSE APPLICATION." Doctoral diss., University of Central Florida, 2005. http://digital.library.ucf.edu/cdm/ref/collection/ETD/id/4082.
Повний текст джерелаPh.D.
Department of Mechanical, Materials and Aerospace Engineering;
Engineering and Computer Science
Mechanical Engineering
CICIOTTI, FULVIO. "Oscillator-Based CMOS Readout Interfaces for Gas Sensing Applications." Doctoral thesis, Università degli Studi di Milano-Bicocca, 2019. http://hdl.handle.net/10281/241089.
Повний текст джерелаDetection of toxic and dangerous gases has always been a need for safety purpose and, in recent years, portable and low-cost gas sensing systems are becoming of main interest. This thesis presents fast, high precision, low-power, versatile CMOS interface circuits for portable gas sensing applications. The target sensors are Metal Oxide Semiconductor (MOX) sensors which are widely used due to their inherent compatibility with integrated MEMS technologies. The chosen readout typologies are based on the time-domain Resistor-Controlled Oscillator. This guarantees wide dynamic range, good precision and the ability to cope with the large MOX sensor resistance variations. Four different prototypes have been successfully developed and tested. Chemical measurements with a real SnO2 MOX sensor have also been performed to validate the results, showing a minimum CO detection capability in ambient air of 5 ppm. The ASICs are able to cover 128 dB of DR at 4 Hz of digital output data rate, or 148 dB at 0.4 Hz, while providing a relative error always better than 0.4% (SNDR >48 dB). Target performances have been achieved with aggressive design strategies and system-level optimization, and using a scaled (compared to typical implementations in this field) 130nm CMOS technology provided by Infineon Technologies AG. Power consumption is about 450 μA. Moreover, this work introduces the possibility to use the same oscillator-based architecture to perform capacitive sensors readout. Measurement results with capacitive MEMS sensors have shown 116 dB of DR in CSENS mode, with an SNR of 74 dB at 10 Hz of digital output data rate. The architectures developed in this thesis are compatible with the modern standards in the portable gas sensing industry.
Navaei, Milad. "Integration of a micro-gas chromatography system for detection of volatile organic compounds." Diss., Georgia Institute of Technology, 2015. http://hdl.handle.net/1853/53924.
Повний текст джерелаSarfraz, Sohab. "A high temperature gas flow invariant thermal conductivity sensor developed in SOI CMOS MEMS technology." Thesis, University of Cambridge, 2014. https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.708412.
Повний текст джерелаBoudjiet, Mohand-Tayeb. "Microsystèmes durables de mesures de concentration d'hydrogène utilisant des micropoutres sans couche sensible." Thesis, Bordeaux, 2015. http://www.theses.fr/2015BORD0137/document.
Повний текст джерелаThese PhD research tries to meet a need for a reliable and a sustainable hydrogen concentration monitoring in a radioactive environment. In this work, we propose the study and development of resonant silicon microcantilever-based physical hydrogen sensors. The special feature of this sensor is that it does not contain any sensitive and consequently the reliability is improved, compared to devices with sensitive coating. In view of the low density of hydrogen compared to that of air, and the good sensitivity of a resonant microcantilever to the physical properties of the surrounding gas (density and viscosity), the use of vibrating uncoated microcantilever for monitoring hydrogen concentration in air is therefore possible. The objective of this research is to improve the sensitivity and the limit of detection of such sensors. First of all, a study of methods for monitoring small changes in resonant frequency has been conducted in order to determine the method having the best signal to noise ratio, thus, allowing improvement of its resolution in terms of resonant frequency variation measurement. In a second part, a study of the influence of microcantilever geometries and dimensions on their sensitivity to the gas density variation has been performed. As a result, geometrical and dimensional criteria for optimizing the sensitivity to the gas density have been identified. Other factors in a view of improving performance (sensitivity and detection limit) of vibrating microbeams have been studied, such as the influence of the actuating current and bias voltages (electromagnetic actuation and piezoresistive detection) and using high resonant modes. Furthermore, the study of the influence of environmental parameters (temperature and pressure) on the sensors behavior has been established
TOMMASI, ALESSIO. "Integration of ZnO nanostructures onto a microhotplate for gas sensing." Doctoral thesis, Politecnico di Torino, 2016. http://hdl.handle.net/11583/2641068.
Повний текст джерелаWatanabe, Naoki. "Fundamental Study on Wide-Bandgap-Semiconductor MEMS and Photodetectors for Integrated Smart Sensors." 京都大学 (Kyoto University), 2013. http://hdl.handle.net/2433/174944.
Повний текст джерелаMahdavifar, Alireza. "Computational and experimental development of ultra-low power and sensitive micro-electro-thermal gas sensor." Diss., Georgia Institute of Technology, 2015. http://hdl.handle.net/1853/54923.
Повний текст джерелаKankanam, Gamage Sisira. "Exploration of Novel Silicon Devices Toward the Realization of a MEMS-Based Microsystem for Utilities (Water, Gas, Electrical) Monitoring." University of Cincinnati / OhioLINK, 2001. http://rave.ohiolink.edu/etdc/view?acc_num=ucin985901586.
Повний текст джерелаLefebvre, Anthony. "Simulation et conception de microsources infrarouges nanophotoniques pour la détection de gaz." Thesis, Université Paris-Saclay (ComUE), 2015. http://www.theses.fr/2015SACLO002/document.
Повний текст джерелаJoule-heated suspended microhotplates can be used as infrared sources in cheap, low-consumption spectroscopic gas sensors. To enhance the very low efficiency of first generation structures, both their thermal and optical designs have to be optimized.The implementation of frustrated plasmonic resonators on top of the membrane grants both spectral and angular control of its emissivity. It is thus possible to make it radiate only at the frequencies absorbed by the gas under study, and in the solid angle of the detector. This leads to an increase in useful radiated power while the overall electrical consumption is decreased. Dynamical studies of membrane heating provide welcome insight on the relationship between membrane radius, heating time and energy consumption per measurement. The existence of a compromise is demonstrated in order to maximize the radiative efficiency, and its physical interpretation is detailed.Eventually, membranes fabricated in LETI’s clean room were characterized to measure their electrical, optical and mechanical properties. The implementation of such sources in a CO2 prototype sensor led to state-of-the-art results, with a few dozen ppm sensitivity with a power consumption of only one milliwatt
Antelius, Mikael. "Wafer-scale Vacuum and Liquid Packaging Concepts for an Optical Thin-film Gas Sensor." Doctoral thesis, KTH, Mikro- och nanosystemteknik, 2013. http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-119839.
Повний текст джерелаQC 20130325
Truax, Stuart. "A microscale chemical sensor platform for environmental monitoring." Diss., Georgia Institute of Technology, 2011. http://hdl.handle.net/1853/45780.
Повний текст джерелаMohammadi, Saeed. "Phononic band gap micro/nano-mechanical structures for wireless communications and sensing applications." Diss., Georgia Institute of Technology, 2010. http://hdl.handle.net/1853/41069.
Повний текст джерелаGaddis, Christopher Stephen. "Diatom Alchemy." Thesis, Georgia Institute of Technology, 2004. http://hdl.handle.net/1853/7611.
Повний текст джерелаTortissier, Grégory. "Étude et développement d’une plateforme de détection chimique à ondes acoustiques de surface pour environnement sévère haute température." Thesis, Bordeaux 1, 2009. http://www.theses.fr/2009BOR13859/document.
Повний текст джерелаMeasuring pollutants concentrations in gas and vapors emissions are important environmental issues. This work presents a stand-alone portable device for high temperature assessment. The system includes a Langasite (LGS) acoustic sensor, a ceramic heater and a platform with RF connections for remote in-situ measurements. The packaging consists in a hermetic stainless steel cell which enables safe gas detection. In situ temperature measurements have been achieved and the thermal behavior was successfully investigated in the temperature range 25-450°C. The designed cell highlights good agreement with theoretical models and reproducibility of the measures. Volatile organic compounds exposures have been investigated and promising ppm level detections have been obtained
Xiang, Shu. "Piezoelectric thin films and nanowires: synthesis and characterization." Thesis, Georgia Institute of Technology, 2011. http://hdl.handle.net/1853/41139.
Повний текст джерелаGraf, Alexander. "Entwicklung eines miniaturisierten Ionenfilters und Detektors für die potentielle Anwendung in Ionenmobilitätsspektrometern." Doctoral thesis, Saechsische Landesbibliothek- Staats- und Universitaetsbibliothek Dresden, 2015. http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-163935.
Повний текст джерелаChou, Ping-Huan, and 鄒秉寰. "MEMS Gas Sensors Using Carbon Nanotubes With Full CMOS Compatibility." Thesis, 2007. http://ndltd.ncl.edu.tw/handle/4a72gn.
Повний текст джерела國立臺北科技大學
製造科技研究所
95
A class of multi-walled carbon nanotube (MWNT) gas sensors in consideration of CMOS and MEMS compatibility were proposed and developed. The sensor fabricated by CMOS-MEMS micromachining process was implemented on silicon substrate featuring a dielectric membrane and micro-heaters, and operated as a chemoresistive device. MWNTs were employed as active sensing clusters and deposited onto the membrane. MWNTs aligned laterally and linked with adjacent ones across electrodes through a room-temperature dielectrophoresis (DEP) process. Experiments to specify the sensor structure and verify sensing characteristics of MWNTs were carried out, and successfully demonstrate the reversible physisorption in response to the presence of nitrogen(H2) and sensing behaviour in response to the presence of oxygen (O2) between 2500 ppm and 7500 ppm, and carbon monoxide (CO2) between 120 ppm and 300 ppm. The more the gas concentration, the more the sensitivity. Based on this research results, it should be a fundamental and effective integration experience to combine MWCNT gas sensing applications with realization of CMOS smart gas sensor technologies in the near future.
LIN, CHIA-MIN, and 林佳潣. "Study on Fabrication of MEMS Cantilevers for Photoacoustic Spectroscopy Gas Sensors." Thesis, 2017. http://ndltd.ncl.edu.tw/handle/3c579a.
Повний текст джерела國立暨南國際大學
電機工程學系
105
In this study, micro-electromechanical system (MEMS) cantilevers for the photoacoustic spectroscopy (PAS) gas sensing applications were designed and fabricated. The cantilevers were fabricated on a silicon-on-insulator (SOI) wafer with the buried oxide layer (BOX) as the sacrificial layer. The deep-reactive-ion etching (DRIE, ICP) was used to define the shape of cantilever, and for the through wafer etching. The structure was then released, removing the BOX layer, in hydrofluoric acid solution. The cantilevers were measured under a white light interferometer to determine the static out-of-plane displacement. In order to analyze the physical properties (resonance frequency, Young’s modulus, spring constant, displacement amplitudes) of cantilevers, the measurement was then taken using a laser Doppler vibrometer. This device can achieve better analytical sensitivity, highly linear response, and greater physical movement than that the conventional membrane microphone does.
Sun, Liwei. "Design and fabrication of surface textured MEMS for infrared gas sensors." Thesis, 2004. http://spectrum.library.concordia.ca/8394/1/MR04402.pdf.
Повний текст джерелаJaber, Nizar. "Dynamic Approaches to Improve Sensitivity and Performance of Resonant MEMS Sensors." Diss., 2018. http://hdl.handle.net/10754/630094.
Повний текст джерелаDwivedi, Priyanka. "Development of gas sensor prototypes based on semiconductor nanostructures and their integration with mems." Thesis, 2018. http://eprint.iitd.ac.in:80//handle/2074/7956.
Повний текст джерелаLiao, Kuan-Hsun, and 廖冠勛. "Novel MEMS gas sensors using mesoporous carbon nano-powderimmobilized by the dielectrophoresis process." Thesis, 2008. http://ndltd.ncl.edu.tw/handle/rr632g.
Повний текст джерела國立臺北科技大學
製造科技研究所
96
Innovative micro gas sensors using mesoporous carbon powder (MCP) as the sensitive film is presented for the first time with MEMS manufacturing technology. Powdered mesoporous carbon is employed as active sensing layers and deposited between electrodes on a thin membrane. The basic concept of the mesoporous carbon gas sensor features is a thin membrane (including silicon dioxide and silicon nitride) and electrodes. Mesoporous carbon layers are aligned and immobilized between electrodes over the membrane by AC-powered dielectrophoresis, Due to its nano-scale structure, the MCP active layer is found very sensitive to heater operation and thus it causes significant noise during measurement. A new method using high-voltage to recover MCP material and measure resistance changes after gas tests without heater implementation is successfully proposed. Mesoporous carbon gas sensors are tested with a variety of gases like O2, NH3 and CO and significant resistance changes are measured to detect various. The sensors are located in a vacuum environment (10-2 ~10-3 Torr) and employed gas concentrations of O2, NH3 and CO gases ranging between 500~4000ppm, 200~800ppm and 100~400ppm, respectively. The result of resistance changes at the MCP active layer is found distinct and their sensitivity is also prominent up to 14.2%. The chemoresistive effect of gas detections using MCP gas sensors is proven and promising for further applications with CMOS and MEMS compatibility.
Rao, L. LRajeswara. "Design, Fabrication and Characterization of Metal Oxide Semiconductor Based MEMS Gas Sensors for Carbon Monoxide Detection." Thesis, 2017. https://etd.iisc.ac.in/handle/2005/4788.
Повний текст джерелаKhater, Mahmoud Elsayed. "Use of Instabilities in Electrostatic Micro-Electro-Mechanical Systems for Actuation and Sensing." Thesis, 2011. http://hdl.handle.net/10012/6398.
Повний текст джерела逄宜哲. "Research on Nano CMOS MEMS Gas Sensor." Thesis, 2010. http://ndltd.ncl.edu.tw/handle/x63z9d.
Повний текст джерела國立彰化師範大學
機電工程學系
98
Abstract This study proposes two different types of CO gas sensors, one of the ion sensor using field effect transistors (Ion Selective Field Effect Transistor, ISFET) to carry out carbon monoxide gas sensor manner, and its interface circuit technology and design combined with the sensing element structure, integrated gas sensor chip is made. Carbon monoxide sensors based on Si (Silicon) as substrate, P-type polysilicon (P-poly Silicon) when the micro-heater resistance, N-type poly (N-poly Silicon) When the etch stop layer, the N-type polysilicon, the re-heating a thin layer of oxide growth, the sensing material SnO2 was deposited onto the electrodes after sol-gel formation to detect the structure of CO gas. When the micro-heater temperature resistance to provide work, the number detected in the ISFET Telecommunications (Vs) at different CO concentrations in different variations. We use the TSMC 0.35μm CMOS 2P4M standard process and the production design process, after carbon monoxide sensors, ISFET amplifier circuit through the small amount of input and output voltages are different, but the actual measured results, as expected, did not significantly sensor signal, for sensing the gas from the electric sensor chip, the sensor out of the telecommunications insensitive and beating No. Although a large volume of design that we can try to clear the mechanism of the charge, the charge will reflect the volume after the measurement, the re- set to zero, in order to improve its telecommunications number of sensor in order to avoid signal saturation. III Another model for the resistance of carbon monoxide gas sensor, which is designed to honeycomb sensing electrode Finger type, using standard TSMC 2P4M 0.35um process of the metal layer Metal1 as Metal Mask, and to Metal4/Via34/Metal3/Via23/Metal2 level as a series of metal sensing electrode, and by P-type polysilicon (P-poly Silicon) when the micro-heater resistance 4.2kΩ, to provide heating power 120uW, the sensing material SnO2 was deposited onto the electrodes after sol-gel formation to detect CO gas, CO gas molecules when the sensor falls within the region, the adsorption on the sensor electrode, making electrode plate and the resistance value between electrodes changed, the corresponding measurements The sensitivity to the smallest resistor is 0.08%, while the CO concentration corresponding to the minimum limit of 4ppm the following. Keyword : Carbon monoxide、micro-heater、sol-gel、SnO2、ISFET.
Ting-ChiaWeng and 翁梃嘉. "Bifacial Sensing Sides SnO2 MEMS Gas Sensor." Thesis, 2017. http://ndltd.ncl.edu.tw/handle/5qu8ds.
Повний текст джерелаShih, Ching-Wen, and 史景文. "Research on Sol-Gel CMOS MEMS Gas Sensor." Thesis, 2011. http://ndltd.ncl.edu.tw/handle/90138855830225953062.
Повний текст джерела國立彰化師範大學
積體電路設計研究所
99
Abstract Because of the rapid industrial and technological development, air pollution was getting worse. People increase the demand for gas sensors day by day. Nowadays many researches study for sensors, the application of gas sensors is increasingly being used. In recent years, along with micro-electromechanical system (MEMS) technology progressed so fast that the bulky and high cost production machinery could be implemented in a small chip. The CMOS MEMS chip not only could reduce the cost of production and reach produce to short and small volume, but also could has better performance than the traditional machine because CMOS process could integrate the circuit and MEMS structure. This thesis proposes a CMOS MEMS CO gas sensor which is fabricated by TSMC (Taiwan Semiconductor Manufacturing Company) 0.35μm 2P4M-CMOS process and wet etching of post process. We design a CMOS MEMS gas sensor and use poly1 to be the micro-heater for providing the working temperature, and use metal2 and metal4 to be the electrode A, metal3 to be the electrode B. Finally we use the sol-gel method to produce tin oxide sensing film for sensing carbon monoxide. In this thesis, we will introduce the post-process and CMOS process and production of sensing film by using sol-gel method. Finally we analyze the sensitivity of carbon monoxide by using CMOS MEMS gas sensor, and do the experimentation for relative humidity (%RH). Keywords: Gas sensor, Tin oxide, CMOS MEMS, Carbon monoxide
Zheng, Yu-Zhan, and 鄭宇展. "Study of The SnO2:Ni MEMS gas sensor." Thesis, 2018. http://ndltd.ncl.edu.tw/handle/t8q6ay.
Повний текст джерела國立雲林科技大學
電子工程系
106
SnO2 material has many excellent characteristics and can detect most gases, but the disadvantage is that it cannot distinguish the type of gas. In this study, SnO2 is used as a sensing material and surface-doped Ni-resistive resistive gas sensor. First, the indoor gases of volatile organic compounds (VOC) and formaldehyde (HCHO) are distinguished and the best parameters are found, and finally compared with other gases. In this research process, Si3N4/ SiO2 is first deposited by LPCVD as an insulating layer on six inch wafer P-type (100). The use of E-Gun Pt / Ti deposited it up and define the patterned as electrode, micro heater and electric film group, then use RF SnO2 as the sensing layer deposited on the electrode, then the use of E-Gun, the nickel metal respectively by 3nm, 5nm, 10nm and 20nm of different thickness deposited on the sensing layer as the catalyst layer. Then ICP-DRIE is used to etch a thermal insulation slot at the bottom of the micro heater to form a suspension structure to complete the sensor element. Finally, the best result of this experiment is Ni (3nm) /SnO2, which is annealed for 10 minutes at atmospheric temperature for 400℃, and at a certain power 136.9mW, at the operating temperature of 250℃, the concentration of VOC and HCHO is 80ppb. HCHO has super high response rate of 74% and has good selectivity. More detailed information on the research will be discussed in this paper. Keyword:Indoor air quality、SnO2、Transition metal、formaldehyde、VOC、gas sensor
Wang, Chia-Chuan, and 王嘉傳. "A gas flow control system integrating MEMS flow sensor." Thesis, 2013. http://ndltd.ncl.edu.tw/handle/17698419680003583299.
Повний текст джерела國立交通大學
工學院半導體材料與製程設備學程
101
Gas control in the electronics industry and the semiconductor manufacturing are very important key process. Commonly in gas flow control system the key product is use mass flow controller to control flow rate generally called MFC (Mass Flow controller).Mass flow controller is combined the flow sensor, proportional valve, PID controller device, but when any device needs to re-calibration or maintenance and change the specifications in the production line or re-design will cause a trouble and inconvenience. This thesis focused on use new generation of MEMS fabrication process flow sensor to replace the traditional thermal flow sensor, and introduce how to combine independent proportional valve, PID controller, PLC and HMI to do a like MFC function flow control system. Because each component are independent modular system, so not only more convenient to maintenance and calibration, and via the independent modular components can be separately applied to various gas flow control system, and can be effectively used in industrial equipment.
Chien-HuaPeng and 彭建華. "Zinc Oxide Nanorods MEMS Gas Sensor with Blue Light Enhancement." Thesis, 2018. http://ndltd.ncl.edu.tw/handle/y84kng.
Повний текст джерелаChia-HuiLu and 呂嘉輝. "Zinc Oxide Thin Film MEMS Gas Sensor with Different Structure." Thesis, 2019. http://ndltd.ncl.edu.tw/handle/na42xn.
Повний текст джерела李文傑. "Research on Magnetic Catalytic Application of CMOS MEMS Compatible Gas Sensor." Thesis, 2013. http://ndltd.ncl.edu.tw/handle/48624793484013899440.
Повний текст джерела國立彰化師範大學
機電工程學系
101
Due to the environment pollution issues and industrial demands, many researches are committed to develop a high-performance gas sensor, which can be used to detect toxic and explosive gases. CO gas sensor is one of the important research topics utilized to detect CO concentrations in environments. In this research, a gas sensor with mesh stacked electrodes mainly by using 2P4M 0.35μm CMOS MEMS IC technology of TSMC to detect the CO concentration with combination of sensing circuit. SnO2 doped with Fe3O4 is taken as sensing material and a Magnetic-Catalyst is proposed in this research. The sensitivities of gas sensing are enhanced through different angle and magnitude of magnetic field. The experiment results reveal that when the magnitude of magnetic field decreases, the sensitivities declines. Staying in horizontal magnetic field surroundings under the condition of 12 Gauss, the highest sensitivity of gas sensor 1.73%/ppm is obtained and is 7 times higher than the sensitivity of gas sensor without Magnetic-Catalyst.
Chang, Shu-Yu, and 張書瑜. "Research and development of gas sensor based on CMOS-MEMS process." Thesis, 2018. http://ndltd.ncl.edu.tw/handle/427w3z.
Повний текст джерела國立交通大學
電控工程研究所
107
In this study, a gas sensor was successfully developed using the COMS-MEMS process. The materials of the micro-heater platform were not required to be coated with precious metals by the post-process, and were completely compatible with the standard COMS process. After the wafer is out of the fab, the devices have been followed by a deep reactive ion etching(DRIE) and deposited sensing film by liquid phase deposition method. Different from the traditional way, the catalyst was successfully doped on the sensing film by using printing technique. Because the COMS-MEMS process can significantly reduce the uncertainty caused by the process, it can improve the yield and reduce the cost and sensor area. The micro-heater platform use tungsten as a micro-heater. When the temperature is operated at 400 °C, the heater uniformity can be controlled within 10 degrees and the power consumption is about 40mW, which is in line with the original simulation goal of this study. Before measuring the carbon monoxide gas, doping the palladium chloride aqueous solution onto the sensing film, and adjusting the number of printing to achieve a quantitative effect. The concentration of carbon monoxide gas is 50PPM, 100PPM, 150PPM to 200PPM, respectively. The sensitivity and resolution of the sensor are recorded under four different carbon monoxide concentrations. Also compare the number of times of printing to one to five times the effect of gas reaction. It is known from the experimental results that the number of times of printing can greatly increase the sensitivity regardless of the number of times of printing. In terms of gas resolution, the best result is obtained when printing the catalyst four times, the slope is 0.134, and the result is superior to CCS801 on the market.
Lee, Mu-Tsun, and 李牧錞. "The Study of Fabrication and Gas Characteristics of MEMS-based Benzene Gas Sensor Incorporated in WO3 Films." Thesis, 2006. http://ndltd.ncl.edu.tw/handle/469ggt.
Повний текст джерела國立臺北科技大學
冷凍空調工程系所
94
Benzene (C6H6)is a highly important commercial chemical due to its chemical activity, high purity and relative cheapness. It is an organic compound that causes serious concerns in environmental health due to its toxicity and carcinogenic properties, even at low concentrations. The OSHA(Occupational Safety & Health Administration)has established a permissible Time-Weighted-Average exposure limit of 1 ppm. This paper describes the preparation of tungsten trioxide(WO3)thin films by the reactive RF magnetron sputter. The primary deposition parameters that influence the microstructure, chemical and electrical properties of WO3 thin films formed by reactive magnetron sputtering are substrate temperature, Ar/O2 concentration ratio, total pressure, and RF power. The films are then stabilized by annealing in dry air. The platinum catalytic filter were developed to enhance the sensitivity of tungsten trioxide to benzene. The characterists of their structural properties were presented by means of XRD measurements and the film morphology by the SEM microscope. The sensors were operated at the temperature range from 250 to 350℃ to analyse the effect of working temperature on their response. The present sensor shows good speed of response and highly detective limit of concentration at 350℃.
張峻銘. "Analysis of MEMS Gas Flow Sensor with Pressure Drop Induced by Perforated Plates." Thesis, 2013. http://ndltd.ncl.edu.tw/handle/94346204256148272795.
Повний текст джерелаJIONG, HENG LU, and 盧炯亨. "Research on Electromagnetic Field Effect of Novel Tip Type CMOS-MEMS Gas Sensor." Thesis, 2014. http://ndltd.ncl.edu.tw/handle/97003694183737911240.
Повний текст джерела國立彰化師範大學
機電工程學系
102
In this research, we proposed a novel electromagnetic coupling-catalyst of CMOS-MEMS gas sensor. The conventional gas sensor with finger type electrode enhances the sensitivity by sensing material. A new gas sensor with the tip-type electrode achieve high electric field in a standard CMOS process. The sensing material SnO2/Fe3O4 coated on sensing structure was catalyzed by Electromagnetic coupling. The research focus on electric field catalysis, Magnetic-catalysis and Electromagnetic coupling-Catalyst. We apply 6V~30V on each tip-type electrode which the distance between the tip-type electrodes is 8.5m. The sensitivity of proposed monoxide sensor with electric field catalysis is 1.72 times higher than the sensitivity of gas sensor without electric field catalysis. On the other hand, when the magnetic field and electric field are parallel, the sensitivity would increase. The sensitivity of sensors can be 1.94 times higher than the sensitivity of gas sensor without magnetic-catalyst. Staying electromagnetic coupling field, the highest sensitivity of gas sensor 0.68 %/ppm is obtained and is 2.62 times higher than the sensitivity of gas sensor under 30 V electric field catalysis. The experimental measurement shows a new approach of gas sensing enhancement with electromagnetic coupling catalyst, and it is applicable for an ultra-low power CO sensor with high sensitivity.
Emadi, Tahereh Arezoo. "Development of a MEMS chemicapacitor polymer-based gas sensor on a temperature controlled platform." 2011. http://hdl.handle.net/1993/4815.
Повний текст джерелаChen, Yen-Cheng, and 陳彥呈. "A CMOS MEMS Gas Sensor Using Monolayer Protected Gold nanoClusters Coating On Three-Dimensional interdigitated Electrodes." Thesis, 2012. http://ndltd.ncl.edu.tw/handle/37365153714313787817.
Повний текст джерела國立臺灣大學
生醫電子與資訊學研究所
100
In this research, we developed a chemiresistive gas sensor for micro gas chromatography system. The sensing material, monolayer protected gold nano-cluster (MPC), was coated onto the three dimensional interdigitated electrodes (3D IDEs) of the sensor. The measuring principle of this sensitive material is based on the impedance variation corresponding to different gas concentrations. This chemiresistive sensor was realized by using CMOS-MEMS fabrication process is based on TSMC 0.35μm 2P4M (2 polysilicon 4 metal) process and post process. The device was completed after spreading the sensitive material MPC on its surface. The 3D IDEs are composed by the first and third layer of the metal on one side and the second and forth layer of the metal on the other side. Our 3D IDEs not only increased the sensing surface area at a given chip area but also decreased the gap distance between electrodes to 1μm. This reduced gap distance increased the sensitivity of the sensor as well as lowered the resistance of the deposited sensing material. In this research, the great linearity and sensitivity of the sensor were demonstrated with three compounds (Octane, Butanol, and Toluene) at different concentrations in the range of 30ppm to 5000ppm and manifested the good linearity and sensitivity. Our sensor with exceptional reliability was also demonstrated by a prolonged testing over three months with minimal drift.
Yan, Bo-Kai, and 顏伯凱. "A CMOS MEMS capacitive tactile sensor with polymer gap and metal sensing electrode." Thesis, 2010. http://ndltd.ncl.edu.tw/handle/50126597817918409228.
Повний текст джерелаJang, Drung-Han, and 詹宗翰. "The Study of MEMS-based Ozone Gas Sensor Incorporated in WO3 Films and its Application in Effective Ventilation." Thesis, 2008. http://ndltd.ncl.edu.tw/handle/3jjhyv.
Повний текст джерела國立臺北科技大學
能源與冷凍空調工程系碩士班
96
This paper describes the preparation of tungsten trioxide(WO3)thin films by the reactive RF magnetron sputter for the ozone sensor. The primary deposition parameters that influence the microstructure, chemical and electrical properties of WO3 thin films formed by reactive magnetron sputtering are substrate temperature, Ar/O2 concentration ratio, total pressure, and RF power. The films are then stabilized by annealing in dry air. The platinum catalytic filter was developed to enhance the sensitivity of tungsten trioxide to benzene. The characteristics of its structural properties were presented by means of XRD measurements and the film morphology by the SEM microscope. The sensors were operated at the temperature range from 250 to 350℃ to analyze the effect of working temperature on their response. On the other hand, at modern time use of the photogravure press, tabulating machine and other business machines produce a lot of new indoor air pollution and cause the influence of the different aspects on the health. The result that comes down for a long time, because indoor air quality is bad, causes the sick building syndrome (SBS) and building related illness. In ventilated interior environments of buildings, the determination of air-flow velocities, temperatures and concentrations of pollutants is required to evaluate comfort conditions and indoor air quality. This thesis also investigates the effective ventilation by computational fluid dynamics(CFD)methods. The indoor air quality is determined by computing the mean age of air and concentration of ozone in a specified office. The results from the present study can be used to manufacture a practical MEMS-based ozone sensor and corporate it into the building HVAC control system for the effective ventilation in impelling the ozone pollution.
Huang, Yen-Chi, and 黃彥期. "Design, Implementation and Measurement of a MEMS Type Gas Sensor with SnO2 Sensing Film Prepared by Liquid Phase Deposition Method." Thesis, 2010. http://ndltd.ncl.edu.tw/handle/10803727673561292010.
Повний текст джерела國立交通大學
電控工程研究所
99
In this thesis, a micro H2S gas sensor with liquid phase deposition (LPD) based sensing film on the micro hotplate, was successfully implemented by utilizing MEMS fabrication technology. Versatile advantages including miniaturized structure, low-power consumption, high-sensitivity and high-yield production were achieved by the proposed method. Additionally, cantilever bridge structure design allows shorter heating time with low power supply to reach required working temperature. The thermal response time constant of proposed structures shows more than 50 times faster than the un-suspended structures under room temperature. Moreover, 2-types of heater designs, including serpentine and annular structures, were tested for heat conduction performance comparison. By applying the proposed LPD method, complex equipments with vacuum chamber were no longer needed for high-performance sensing film fabrication. Finally, related heat and gas response characterization for micro-heater and thin-film structure were measured and discussed, respectively.
Graf, Alexander. "Entwicklung eines miniaturisierten Ionenfilters und Detektors für die potentielle Anwendung in Ionenmobilitätsspektrometern." Doctoral thesis, 2014. https://tud.qucosa.de/id/qucosa%3A28629.
Повний текст джерела