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Автор: Grafiati

Опубліковано: 6 вересня 2023

Оновлено: 7 вересня 2023

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1

Liu, Leshu, Ken Liu, Ning Liu, Zhihong Zhu, and Jianfa Zhang. "Fano-Resonant Metasurface with 92% Reflectivity Based on Lithium Niobate on Insulator." Nanomaterials 12, no. 21 (October 31, 2022): 3849. http://dx.doi.org/10.3390/nano12213849.

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Анотація:

Lithium niobate is an excellent optoelectronic and nonlinear material, which plays an important role in integrated optics. However, lithium niobate is difficult to etch due to its very stable chemical nature, and the microstructure of lithium niobate’s metasurface is generally of subwavelength, which further increases its processing difficulty. Here, by using Ar+-based inductively coupled plasma etching and KOH wet etching, we improve the etching quality and fabricate a Fano-resonant metasurface based on lithium niobate on insulator, which has a very high reflectivity of 92% at near-infrared wavelength and the potential of becoming a high-reflectivity film. In addition, to evaluate the practical performance of the metasurface, we constructed a Fabry–Perot cavity by using it as a cavity mirror, whose reflection spectrum shows a finesse of 38. Our work paves the way for the development of functional metasurfaces and other advanced photonic devices based on lithium niobate on insulator.

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2

Maeder, Andreas, Helena Weigand, and Rachel Grange. "Lithium niobate on insulator from classical to quantum photonic devices." Photoniques, no. 116 (2022): 48–53. http://dx.doi.org/10.1051/photon/202211648.

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Анотація:

Integrated photonics is becoming more and more multifunctional thanks to the recent availability of an established material, lithium niobate, as thin films of less than 1 micron thickness. Overcoming key fabrication challenges has put this platform on its way to achieve scalability. Here, we show the performances of integrated and free space devices such as electrooptic modulators and active metasurfaces. Finally, we mention possible roles of lithium niobate on insulator in quantum photonics.

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3

Ge, Renyou, Hao Li, Ya Han, Lifeng Chen, Jian Xu, Meiyan Wu, Yongqing Li, Yannong Luo, and Xinlun Cai. "Polarization diversity two-dimensional grating coupler on x-cut lithium niobate on insulator." Chinese Optics Letters 19, no. 6 (2021): 060006. http://dx.doi.org/10.3788/col202119.060006.

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4

Qi, Yifan, and Yang Li. "Integrated lithium niobate photonics." Nanophotonics 9, no. 6 (April 28, 2020): 1287–320. http://dx.doi.org/10.1515/nanoph-2020-0013.

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AbstractLithium niobate (LiNbO3) on insulator (LNOI) is a promising material platform for integrated photonics due to single crystal LiNbO3 film’s wide transparent window, high refractive index, and high second-order nonlinearity. Based on LNOI, the fast-developing ridge-waveguide fabrication techniques enabled various structures, devices, systems, and applications. We review the basic structures including waveguides, cavities, periodically poled LiNbO3, and couplers, along with their fabrication methods and optical properties. Treating those basic structures as building blocks, we review several integrated devices including electro-optic modulators, nonlinear optical devices, and optical frequency combs with each device’s operating mechanism, design principle and methodology, and performance metrics. Starting from these integrated devices, we review how integrated LNOI devices boost the performance of LiNbO3’s traditional applications in optical communications and data center, integrated microwave photonics, and quantum optics. Beyond those traditional applications, we also review integrated LNOI devices’ novel applications in metrology including ranging system and frequency comb spectroscopy. Finally, we envision integrated LNOI photonics’ potential in revolutionizing nonlinear and quantum optics, optical computing and signal processing, and devices in ultraviolet, visible, and mid-infrared regimes. Beyond this outlook, we discuss the challenges in integrated LNOI photonics and the potential solutions.

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5

Siew, Shawn Y., Soham S. Saha, Mankei Tsang, and Aaron J. Danner. "Rib Microring Resonators in Lithium Niobate on Insulator." IEEE Photonics Technology Letters 28, no. 5 (March 1, 2016): 573–76. http://dx.doi.org/10.1109/lpt.2015.2508103.

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6

Huang, Haijin, Armandas Balčytis, Aditya Dubey, Andreas Boes, Thach G. Nguyen, Guanghui Ren, Mengxi Tan, and Arnan Mitchell. "Spatio-temporal isolator in lithium niobate on insulator." Opto-Electronic Science 2, no. 3 (2023): 220022. http://dx.doi.org/10.29026/oes.2023.220022.

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7

Wu, Zhenlin, Yumeng Lin, Shaoshuai Han, Xiong Yin, Menghan Ding, Lei Guo, Xin Yang, and Mingshan Zhao. "Simulation and Analysis of Microring Electric Field Sensor Based on a Lithium Niobate-on-Insulator." Crystals 11, no. 4 (March 30, 2021): 359. http://dx.doi.org/10.3390/cryst11040359.

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Анотація:

With the increasing sensitivity and accuracy of contemporary high-performance electronic information systems to electromagnetic energy, they are also very vulnerable to be damaged by high-energy electromagnetic fields. In this work, an all-dielectric electromagnetic field sensor is proposed based on a microring resonator structure. The sensor is designed to work at 35 GHz RF field using a lithium niobate-on-insulator (LNOI) material system. The 2.5-D variational finite difference time domain (varFDTD) and finite difference eigenmode (FDE) methods are utilized to analyze the single-mode condition, bending loss, as well as the transmission loss to achieve optimized waveguide dimensions. In order to obtain higher sensitivity, the quality factor (Q-factor) of the microring resonator is optimized to be 106 with the total ring circumference of 3766.59 μm. The lithium niobate layer is adopted in z-cut direction to utilize TM mode in the proposed all-dielectric electric field sensor, and with the help of the periodically poled lithium niobate (PPLN) technology, the electro-optic (EO) tunability of the device is enhanced to 48 pm·μm/V.

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8

Li, Qingyun, Honghu Zhang, Houbin Zhu, and Hui Hu. "Characterizations of Single-Crystal Lithium Niobate Thin Films." Crystals 12, no. 5 (May 6, 2022): 667. http://dx.doi.org/10.3390/cryst12050667.

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Single-crystal lithium niobate thin films (lithium niobate on insulator, LNOI) are becoming a new material platform for integrating photonics. Investigation into the physical properties of LNOI is important for the design and fabrication of photonic devices. Herein, LNOIs were prepared by two methods: ion implantation and wafer bonding; and wafer bonding and grinding. High-resolution X-ray diffraction (HRXRD) and confocal Raman spectroscopy were used to study the LNOI lattice properties. The full-width at half-maximum (FWHM) of HRXRD and Raman spectra showed a regular crystal lattice arrangement of the LNOIs. The domain inversion voltage and electro-optical coefficient of the LNOIs were close to those of LN bulk material. This study provides useful information for LNOI fabrication and for photonic devices in LNOI.

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9

Tian, Xiao-Hui, Wei Zhou, Kun-Qian Ren, Chi Zhang, Xiaoyue Liu, Guang-Tai Xue, Jia-Chen Duan, et al. "Effect of dimension variation for second-harmonic generation in lithium niobate on insulator waveguide [Invited]." Chinese Optics Letters 19, no. 6 (2021): 060015. http://dx.doi.org/10.3788/col202119.060015.

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10

Al-Shammari, Rusul M., Mohammad Amin Baghban, Nebras Al-attar, Aoife Gowen, Katia Gallo, James H. Rice, and Brian J. Rodriguez. "Photoinduced Enhanced Raman from Lithium Niobate on Insulator Template." ACS Applied Materials & Interfaces 10, no. 36 (August 14, 2018): 30871–78. http://dx.doi.org/10.1021/acsami.8b10076.

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11

Poberaj, G., H. Hu, W. Sohler, and P. Günter. "Lithium niobate on insulator (LNOI) for micro-photonic devices." Laser & Photonics Reviews 6, no. 4 (February 15, 2012): 488–503. http://dx.doi.org/10.1002/lpor.201100035.

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12

Zhang, Jianhao, Rongbo Wu, Min Wang, Youting Liang, Junxia Zhou, Miao Wu, Zhiwei Fang, Wei Chu, and Ya Cheng. "An Ultra-High-Q Lithium Niobate Microresonator Integrated with a Silicon Nitride Waveguide in the Vertical Configuration for Evanescent Light Coupling." Micromachines 12, no. 3 (February 25, 2021): 235. http://dx.doi.org/10.3390/mi12030235.

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We demonstrate the hybrid integration of a lithium niobate microring resonator with a silicon nitride waveguide in the vertical configuration to achieve efficient light coupling. The microring resonator is fabricated on a lithium niobate on insulator (LNOI) substrate using photolithography assisted chemo-mechanical etching (PLACE). A fused silica cladding layer is deposited on the LNOI ring resonator. The silicon nitride waveguide is further produced on the fused silica cladding layer by first fabricating a trench in the fused silica while using focused ion beam (FIB) etching for facilitating the evanescent coupling, followed by the formation of the silicon nitride waveguide on the bottom of the trench. The FIB etching ensures the required high positioning accuracy between the waveguide and ring resonator. We achieve Q-factors as high as 1.4 × 107 with the vertically integrated device.

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13

Yuan, Shuai, Changran Hu, An Pan, Yuedi Ding, Xuanhao Wang, Zhicheng Qu, Junjie Wei, Yuheng Liu, Cheng Zeng, and Jinsong Xia. "Photonic devices based on thin-film lithium niobate on insulator." Journal of Semiconductors 42, no. 4 (April 1, 2021): 041304. http://dx.doi.org/10.1088/1674-4926/42/4/041304.

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14

Kang, Shuting, Ru Zhang, Zhenzhong Hao, Di Jia, Feng Gao, Fang Bo, Guoquan Zhang, and Jingjun Xu. "High-efficiency chirped grating couplers on lithium niobate on insulator." Optics Letters 45, no. 24 (December 8, 2020): 6651. http://dx.doi.org/10.1364/ol.412902.

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15

Krasnokutska, Inna, Robert J. Chapman, Jean-Luc J. Tambasco, and Alberto Peruzzo. "High coupling efficiency grating couplers on lithium niobate on insulator." Optics Express 27, no. 13 (June 12, 2019): 17681. http://dx.doi.org/10.1364/oe.27.017681.

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16

Krasnokutska, Inna, Jean-Luc J. Tambasco, Xijun Li, and Alberto Peruzzo. "Ultra-low loss photonic circuits in lithium niobate on insulator." Optics Express 26, no. 2 (January 9, 2018): 897. http://dx.doi.org/10.1364/oe.26.000897.

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17

Lin, Jintian, Junxia Zhou, Rongbo Wu, Min Wang, Zhiwei Fang, Wei Chu, Jianhao Zhang, Lingling Qiao, and Ya Cheng. "High-Precision Propagation-Loss Measurement of Single-Mode Optical Waveguides on Lithium Niobate on Insulator." Micromachines 10, no. 9 (September 15, 2019): 612. http://dx.doi.org/10.3390/mi10090612.

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Анотація:

We demonstrate the fabrication of single-mode optical waveguides on lithium niobate on an insulator (LNOI) by optical patterning combined with chemomechanical polishing. The fabricated LNOI waveguides had a nearly symmetric mode profile of ~2.5 µm mode field size (full-width at half-maximum). We developed a high-precision measurement approach by which single-mode waveguides were characterized to have propagation loss of ~0.042 dB/cm.

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18

Xiang Junmin, 项君民, 蔡明璐 Cai Minglu, 吴侃 Wu Kan, 张广进 Zhang Guangjin та 陈建平 Chen Jianping. "绝缘体上掺铒铌酸锂放大器建模与实验研究". Acta Optica Sinica 42, № 13 (2022): 1323002. http://dx.doi.org/10.3788/aos202242.1323002.

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19

Luo Qiang, 罗强, 薄方 Bo Fang, 孔勇发 Kong Yongfa, 张国权 Zhang Guoquan та 许京军 Xu Jingjun. "铌酸锂薄膜微腔激光器研究进展（特邀）". Infrared and Laser Engineering 50, № 11 (2021): 20210546. http://dx.doi.org/10.3788/irla20210546.

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20

Jia, Yuechen, Lei Wang, and Feng Chen. "Ion-cut lithium niobate on insulator technology: Recent advances and perspectives." Applied Physics Reviews 8, no. 1 (March 2021): 011307. http://dx.doi.org/10.1063/5.0037771.

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21

Su, Shubin, Xiaona Ye, Shijie Liu, Yuanlin Zheng, and Xianfeng Chen. "Active mode selection by defects in lithium niobate on insulator microdisks." Optics Express 29, no. 8 (March 31, 2021): 11885. http://dx.doi.org/10.1364/oe.422113.

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22

Yang, Sipan, Yaqian Li, Jinbin Xu, Min Wang, Liying Wu, Xueling Quan, Min Liu, Liucheng Fu, and Xiulan Cheng. "Low loss ridge-waveguide grating couplers in lithium niobate on insulator." Optical Materials Express 11, no. 5 (April 7, 2021): 1366. http://dx.doi.org/10.1364/ome.418423.

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23

Xiao, Zeyu, Kan Wu, Minglu Cai, Tieying Li, and Jianping Chen. "Single-frequency integrated laser on erbium-doped lithium niobate on insulator." Optics Letters 46, no. 17 (August 19, 2021): 4128. http://dx.doi.org/10.1364/ol.432921.

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24

Elmanov, I., F. Sardi, K. Xia, T. Kornher, V. Kovalyuk, A. Prokhodtsov, P. An, et al. "Development of focusing grating couplers for lithium niobate on insulator platform." Journal of Physics: Conference Series 1695 (December 2020): 012127. http://dx.doi.org/10.1088/1742-6596/1695/1/012127.

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25

Sayem, Ayed Al, Risheng Cheng, Sihao Wang, and Hong X. Tang. "Lithium-niobate-on-insulator waveguide-integrated superconducting nanowire single-photon detectors." Applied Physics Letters 116, no. 15 (April 13, 2020): 151102. http://dx.doi.org/10.1063/1.5142852.

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26

Jiao, Yuejian, Zhen Shao, Sanbing Li, Xiaojie Wang, Fang Bo, Jingjun Xu, and Guoquan Zhang. "Nano-Domains Produced through a Two-Step Poling Technique in Lithium Niobate on Insulators." Materials 13, no. 16 (August 16, 2020): 3617. http://dx.doi.org/10.3390/ma13163617.

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We proposed a two-step poling technique to fabricate nanoscale domains based on the anti-parallel polarization reversal effect in lithium niobate on insulator (LNOI). The anti-parallel polarization reversal is observed when lithium niobate thin film in LNOI is poled by applying a high voltage pulse through the conductive probe tip of atomic force microscope, which generates a donut-shaped domain structure with its domain polarization at the center being anti-parallel to the poling field. The donut-shaped domain is unstable and decays with a time scale of hours. With the two-step poling technique, the polarization of the donut-shaped domain can be reversed entirely, producing a stable dot domain with a size of tens of nanometers. Dot domains with diameter of the order of ∼30 nm were fabricated through the two-step poling technique. The results may be beneficial to domain-based applications such as ferroelectric domain memory.

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27

Zhang, Jianhao, Zhiwei Fang, Jintian Lin, Junxia Zhou, Min Wang, Rongbo Wu, Renhong Gao, and Ya Cheng. "Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator." Nanomaterials 9, no. 9 (August 29, 2019): 1218. http://dx.doi.org/10.3390/nano9091218.

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We report the fabrication of crystalline microresonators of high quality (Q) factors with a controllable wedge angle on lithium niobate on insulator (LNOI). Our technique relies on a femtosecond laser assisted chemo-mechanical polish, which allows us to achieve ultrahigh surface smoothness as critically demanded by high Q microresonator applications. We show that by refining the polish parameters, Q factors as high as 4.7 × 107 can be obtained and the wedge angle of the LNOI can be continuously tuned from 9° to 51°.

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28

Chen, Yang, Xiaomeng Zhao, Zhongxu Li, Xinjian Ke, Chengli Wang, Min Zhou, Wenqin Li, Kai Huang, and Xin Ou. "Wafer-Scale Fabrication of Silicon Film on Lithium Niobate on Insulator (LNOI)." Crystals 12, no. 10 (October 18, 2022): 1477. http://dx.doi.org/10.3390/cryst12101477.

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Hybrid integration of silicon photonics with lithium niobate (LN) devices provides a promising route to enable an excellent modulation performance in silicon photonic integrated circuits. To realize this purpose, a substrate containing a Si film on an LNOI substrate, called Si on the LNOI structure, was analyzed and fabricated. The mode propagation properties in the Si-on-LNOI structure were simulated in detail and a vertical adiabatic coupler (VAC) between the Si waveguide and LN waveguide was simulated to help in the determination of the dimension of this structure. A 4-inch wafer-scale Si on an LNOI hybrid structure was fabricated through the ion-cut process. This structure has a single-crystalline quality, high thickness uniformity, smooth surface, and sharp bonding interface, which are practical for realizing low loss and high coupling efficiency.

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29

Gao, Renhong, Haisu Zhang, Fang Bo, Wei Fang, Zhenzhong Hao, Ni Yao, Jintian Lin, et al. "Broadband highly efficient nonlinear optical processes in on-chip integrated lithium niobate microdisk resonators of Q-factor above 10⁸." New Journal of Physics 23, no. 12 (December 1, 2021): 123027. http://dx.doi.org/10.1088/1367-2630/ac3d52.

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Abstract Microresonators of ultrahigh quality (Q) factors represent a crucial type of photonic devices aiming at ultra-high spectral resolution, ultra-high sensitivity to the environmental perturbations, and efficient nonlinear wavelength conversions at low threshold pump powers. Lithium niobate on insulator (LNOI) microdisks of high Q factors are particularly attractive due to its large second-order nonlinear coefficient and strong electro-optic property. In this letter, we break through the long standing bottleneck in achieving the Q factors of LNOI microresonators beyond 108, which approaches the intrinsic material absorption limit of lithium niobate (LN). The ultra-high Q factors give rise to a rich family of nonlinear optical phenomena from optical parametric oscillation (OPO) to harmonics generation with unprecedented characteristics including ultra-low pump threshold, high wavelength conversion efficiency, and ultra-broad operation bandwidth. Specifically, the threshold of OPO is measured to be only 19.6 μW, and the absolute conversion efficiency observed in the second harmonic generation reaches 23%. The record-breaking performances of the on-chip ultra-high Q LNOI microresonators will have profound implication for both photonic research and industry.

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30

Liang, Youting, Junxia Zhou, Zhaoxiang Liu, Haisu Zhang, Zhiwei Fang, Yuan Zhou, Difeng Yin, et al. "A high-gain cladded waveguide amplifier on erbium doped thin-film lithium niobate fabricated using photolithography assisted chemo-mechanical etching." Nanophotonics 11, no. 5 (January 17, 2022): 1033–40. http://dx.doi.org/10.1515/nanoph-2021-0737.

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Abstract Erbium doped integrated waveguide amplifier and laser prevail in power consumption, footprint, stability and scalability over the counterparts in bulk materials, underpinning the lightwave communication and large-scale sensing. Subject to the highly confined mode in the micro-to-nanoscale and moderate propagation loss, gain and power scaling in such integrated devices prove to be more challenging compared to their bulk counterparts. In this work, a thin cladding layer of tantalum pentoxide (Ta2O5) is employed in the erbium doped lithium niobate (LN) waveguide amplifier fabricated on the thin film lithium niobate on insulator (LNOI) wafer by the photolithography assisted chemo-mechanical etching (PLACE) technique. Above 20 dB small signal internal net gain is achieved at the signal wavelength around 1532 nm in the 10 cm long LNOI amplifier pumped by the diode laser at ∼980 nm. Experimental characterizations reveal the advantage of Ta2O5 cladding in higher optical gain compared with the air-clad amplifier, which is further explained by the theoretical modeling of the LNOI amplifier including the guided mode structures and the steady-state response of erbium ions.

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31

Yin, DiFeng, Yuan Zhou, Zhaoxiang Liu, Zhe Wang, Haisu Zhang, Zhiwei Fang, Wei Chu, et al. "Electro-optically tunable microring laser monolithically integrated on lithium niobate on insulator." Optics Letters 46, no. 9 (April 22, 2021): 2127. http://dx.doi.org/10.1364/ol.424996.

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32

Luo, Haozhi, Zhiyan Chen, Hao Li, Lifeng Chen, Ya Han, Zhongjin Lin, Siyuan Yu, and Xinlun Cai. "High-Performance Polarization Splitter-Rotator Based on Lithium Niobate-on-Insulator Platform." IEEE Photonics Technology Letters 33, no. 24 (December 15, 2021): 1423–26. http://dx.doi.org/10.1109/lpt.2021.3123101.

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33

Jin, Wei, and Kin Seng Chiang. "Leaky-mode long-period grating on a lithium-niobate-on-insulator waveguide." Optica 8, no. 12 (December 16, 2021): 1624. http://dx.doi.org/10.1364/optica.442607.

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34

Li, Geng-Lin, Yue-Chen Jia, and Feng Chen. "Research progress of photonics devices on lithium-niobate-on-insulator thin films." Acta Physica Sinica 69, no. 15 (2020): 157801. http://dx.doi.org/10.7498/aps.69.20200302.

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35

Cai, Lutong, Huangpu Han, Shaomei Zhang, Hui Hu, and Keming Wang. "Photonic crystal slab fabricated on the platform of lithium niobate-on-insulator." Optics Letters 39, no. 7 (March 28, 2014): 2094. http://dx.doi.org/10.1364/ol.39.002094.

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36

Liu, Shijie, Yuanlin Zheng, and Xianfeng Chen. "Cascading second-order nonlinear processes in a lithium niobate-on-insulator microdisk." Optics Letters 42, no. 18 (September 13, 2017): 3626. http://dx.doi.org/10.1364/ol.42.003626.

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37

Wang, Lei, Ling-Qi Li, Xin-Tong Zhang, and Feng Chen. "Type I phase matching in thin film of lithium niobate on insulator." Results in Physics 16 (March 2020): 103011. http://dx.doi.org/10.1016/j.rinp.2020.103011.

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38

Saha, Soham, Siew Shawn Yohanes, Deng Jun, Aaron Danner, and Mankei Tsang. "Fabrication and Characterization of Optical Devices on Lithium Niobate on Insulator Chips." Procedia Engineering 140 (2016): 183–86. http://dx.doi.org/10.1016/j.proeng.2016.07.343.

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39

Saitoh, E., Y. Kawaguchi, K. Saitoh, and M. Koshiba. "TE/TM-Pass Polarizer Based on Lithium Niobate on Insulator Ridge Waveguide." IEEE Photonics Journal 5, no. 2 (April 2013): 6600610. http://dx.doi.org/10.1109/jphot.2013.2250938.

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40

Lin, Jintian, Fang Bo, Ya Cheng, and Jingjun Xu. "Advances in on-chip photonic devices based on lithium niobate on insulator." Photonics Research 8, no. 12 (November 30, 2020): 1910. http://dx.doi.org/10.1364/prj.395305.

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41

Osellame, Roberto. "New effective technique to produce waveguides in lithium niobate on insulator (LNOI)." Quantum Engineering 1, no. 1 (March 2019): e11. http://dx.doi.org/10.1002/que2.11.

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42

Meerasha, Mubarak Ali, Toijam Sunder Meetei, and Krishnamoorthy Pandiyan. "Design of configurable photonic multiplexer using proton‐exchanged lithium niobate on insulator." Microwave and Optical Technology Letters 62, no. 9 (April 28, 2020): 3077–86. http://dx.doi.org/10.1002/mop.32414.

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43

Han, Xinqing, Cong Liu, Meng Zhang, Qing Huang, Xuelin Wang, and Peng Liu. "Thermal Spike Responses and Structure Evolutions in Lithium Niobate on Insulator (LNOI) under Swift Ion Irradiation." Crystals 12, no. 7 (July 5, 2022): 943. http://dx.doi.org/10.3390/cryst12070943.

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Анотація:

Irradiating solid materials with energetic ions are extensively used to explore the evolution of structural damage and specific properties in structural and functional materials under natural and artificial radiation environments. Lithium niobate on insulator (LNOI) technology is revolutionizing the lithium niobate industry and has been widely applied in various fields of photonics, electronics, optoelectronics, etc. Based on 30 MeV 35Cl and 40Ar ion irradiation, thermal spike responses and microstructure evolution of LNOI under the action of extreme electronic energy loss are discussed in detail. Combining experimental transmission electron microscopy characterizations with numerical calculations of the inelastic thermal spike model, discontinuous and continuous tracks with a lattice disorder structure in the crystalline LiNbO3 layer and recrystallization in the amorphous SiO2 layer are confirmed, and the ionization process via energetic ion irradiation is demonstrated to inherently connect energy exchange and temperature evolution processes in the electron and lattice subsystems of LNOI. According to Rutherford backscattering/channeling spectrometry and the direct impact model, the calculated track damage cross–section is further verified, coinciding with the experimental observations, and the LiNbO3 layer with a thickness of several hundred nanometers presents track damage behavior similar to that of bulk LiNbO3. Systematic research into the damage responses of LNOI is conducive to better understanding and predicting radiation effects in multilayer thin film materials under extreme radiation environments, as well as to designing novel multifunctional devices.

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44

Snigirev, Viacheslav, Annina Riedhauser, Grigory Lihachev, Mikhail Churaev, Johann Riemensberger, Rui Ning Wang, Anat Siddharth, et al. "Ultrafast tunable lasers using lithium niobate integrated photonics." Nature 615, no. 7952 (March 15, 2023): 411–17. http://dx.doi.org/10.1038/s41586-023-05724-2.

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AbstractEarly works1 and recent advances in thin-film lithium niobate (LiNbO3) on insulator have enabled low-loss photonic integrated circuits2,3, modulators with improved half-wave voltage4,5, electro-optic frequency combs6 and on-chip electro-optic devices, with applications ranging from microwave photonics to microwave-to-optical quantum interfaces7. Although recent advances have demonstrated tunable integrated lasers based on LiNbO3 (refs. 8,9), the full potential of this platform to demonstrate frequency-agile, narrow-linewidth integrated lasers has not been achieved. Here we report such a laser with a fast tuning rate based on a hybrid silicon nitride (Si3N4)–LiNbO3 photonic platform and demonstrate its use for coherent laser ranging. Our platform is based on heterogeneous integration of ultralow-loss Si3N4 photonic integrated circuits with thin-film LiNbO3 through direct bonding at the wafer level, in contrast to previously demonstrated chiplet-level integration10, featuring low propagation loss of 8.5 decibels per metre, enabling narrow-linewidth lasing (intrinsic linewidth of 3 kilohertz) by self-injection locking to a laser diode. The hybrid mode of the resonator allows electro-optic laser frequency tuning at a speed of 12 × 1015 hertz per second with high linearity and low hysteresis while retaining the narrow linewidth. Using a hybrid integrated laser, we perform a proof-of-concept coherent optical ranging (FMCW LiDAR) experiment. Endowing Si3N4 photonic integrated circuits with LiNbO3 creates a platform that combines the individual advantages of thin-film LiNbO3 with those of Si3N4, which show precise lithographic control, mature manufacturing and ultralow loss11,12.

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45

Wu, Rongbo, Min Wang, Jian Xu, Jia Qi, Wei Chu, Zhiwei Fang, Jianhao Zhang, et al. "Long Low-Loss-Litium Niobate on Insulator Waveguides with Sub-Nanometer Surface Roughness." Nanomaterials 8, no. 11 (November 6, 2018): 910. http://dx.doi.org/10.3390/nano8110910.

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In this paper, we develop a technique for realizing multi-centimeter-long lithium niobate on insulator (LNOI) waveguides with a propagation loss as low as 0.027 dB/cm. Our technique relies on patterning a chromium thin film coated on the top surface of LNOI into a hard mask with a femtosecond laser followed by chemo-mechanical polishing for structuring the LNOI into the waveguides. The surface roughness on the waveguides was determined with an atomic force microscope to be 0.452 nm. The approach is compatible with other surface patterning technologies, such as optical and electron beam lithographies or laser direct writing, enabling high-throughput manufacturing of large-scale LNOI-based photonic integrated circuits.

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46

Liu, Zhao, Le Qiu, Lan Zhao, Lijun Luo, Wenhao Du, Lingjie Zhang, Bao Sun, Zhiyao Zhang, Shangjian Zhang, and Yong Liu. "Three-Dimensional Broadband Electric Field Sensor Based on Integrated Lithium Niobate on Insulator." Applied Sciences 13, no. 2 (January 8, 2023): 873. http://dx.doi.org/10.3390/app13020873.

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A three-dimensional (3D) electric field sensing scheme is proposed and experimentally demonstrated based on an integrated lithium niobate on insulator (LNOI) platform. The 3D measurement is realized by packing three LNOI-based sensor chips in a triangular-prism-type clamp. For each sensor chip, the optical waveguide has an asymmetrical Michelson interferometer architecture, and the tapered dipole antenna is inclined to the optical waveguide. By finely placing the three sensor chips in the clamp, the three pairs of inclined tapered dipole antennas are mutually orthogonal and can be applied to measure the electric field in three orthogonal polarization directions. The volume of the packaged 3D sensor is 9.5 cm3. In the experiment, a flat response in the frequency range of 10 MHz to 3 GHz is demonstrated. In addition, a 3 × 3 response calibration matrix is obtained and utilized to reduce the measurement error. After calibration, the relative measurement error of the electric field amplitude is smaller than 5.1% for every polarization direction.

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47

Hsu, Tzu-Hsuan, Kuan-Ju Tseng, and Ming-Huang Li. "Thin-film lithium niobate-on-insulator (LNOI) shear horizontal surface acoustic wave resonators." Journal of Micromechanics and Microengineering 31, no. 5 (April 20, 2021): 054003. http://dx.doi.org/10.1088/1361-6439/abf1b5.

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48

Liu, Jia-Min, and De-Long Zhang. "Air-slot assisted TM-pass waveguide polarizer based on lithium niobate on insulator." Optics & Laser Technology 155 (November 2022): 108421. http://dx.doi.org/10.1016/j.optlastec.2022.108421.

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49

Gao, Renhong, Jianglin Guan, Ni Yao, Li Deng, Jintian Lin, Min Wang, Lingling Qiao, et al. "On-chip ultra-narrow-linewidth single-mode microlaser on lithium niobate on insulator." Optics Letters 46, no. 13 (June 23, 2021): 3131. http://dx.doi.org/10.1364/ol.430015.

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50

Obrzud, Ewelina, Séverine Denis, Hamed Sattari, Gregory Choong, Stefan Kundermann, Olivier Dubochet, Michel Despont, Steve Lecomte, Amir H. Ghadimi, and Victor Brasch. "Stable and compact RF-to-optical link using lithium niobate on insulator waveguides." APL Photonics 6, no. 12 (December 1, 2021): 121303. http://dx.doi.org/10.1063/5.0070103.

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