Статті в журналах: "High resolution displacement sensor"

1

Forsyth, Perry W. F., Kathryn S. Hayward, Lyle E. Roberts, Stephen F. Cox, Daniel A. Shaddock, and Bram J. J. Slagmolen. "Large dynamic range, high resolution optical heterodyne readout for high velocity slip events." Review of Scientific Instruments 93, no. 6 (June 1, 2022): 064503. http://dx.doi.org/10.1063/5.0082970.

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We present a free-space optical displacement sensor for measuring geological slip event displacements within a laboratory setting. This sensor utilizes a fiberized Mach-Zehnder based optical heterodyne system coupled with a digital phase lock loop, providing a large dynamic range (multiple centimeters), high displacement resolution (with an amplitude spectral density of [Formula: see text] m/[Formula: see text] for frequencies above 100 Hz), and high velocity tracking capabilities (up to 4.96 m/s). This displacement sensor is used to increase the displacement and the time sensitivity for measuring laboratory-scale earthquakes induced in geological samples by using a triaxial compression apparatus. The sensor architecture provides an improved displacement and time resolution for the millisecond-duration slip events, at high containment and loading pressure and high temperatures. Alternatively, the sensor implementation can be used for other non-contact displacement readouts that required high velocity tracking with low noise and large dynamic range sensing. We use 13 high-velocity slip events in Fontainebleau sandstone to show the large dynamic range displacement tracking ability and displacement amplitude spectral densities to demonstrate the optical readout’s unique sensing capabilities.

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2

Chui, Talso, Konstantin Penanen, and M. Barmatz. "High-resolution displacement sensor using SQUID array amplifier." Nuclear Physics B - Proceedings Supplements 134 (September 2004): 214–16. http://dx.doi.org/10.1016/j.nuclphysbps.2004.08.035.

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3

He, Qiang, Shixun Fan, Ning Chen, Ruoyu Tan, Fan Chen, and Dapeng Fan. "Analysis of Inductive Displacement Sensors with Large Range and Nanoscale Resolution." Applied Sciences 11, no. 21 (October 28, 2021): 10134. http://dx.doi.org/10.3390/app112110134.

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With the advantages of high resolution, structural simplicity, reliability, compact size, and high sensitivity, inductive sensors have been widely used in nanopositioning systems. However, the measuring range of traditional inductive sensors are usually limited to 0.2 mm. A novel analysis and design methodology of the miniaturized inductive sensor with large measuring range and nanoscale resolution is proposed. Firstly, an accurate leakage inductance model is established. Secondly, a design rule of armature size is proposed by considering the fringing effect. Then, the error terms introduced by the measurement circuit of differential inductive sensors are analyzed and the corresponding error suppression methods are illustrated. Moreover, A design rule of selecting the optimal excitation frequency is proposed to meet the requirements of high Q value and high bandwidth, and to minimize the impact of core loss resistance on the performance of the sensor. Validated by the experiments, the proposed analysis and design method can effectively guide the design of the miniaturized inductive sensor with nanoscale resolution in the measuring range of ±0.5 mm. The overall size of the fabricated sensor prototypes is less than 6 mm × 6 mm × 3 mm. Combined with large range, high resolution and ideal miniaturization, this inductive sensor can be well suitable for compact and large stroke nanopositioning systems.

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4

Peng, Donglin. "STUDY ON DIFFERENTIAL GRATING DISPLACEMENT SENSOR WITH HIGH RESOLUTION." Chinese Journal of Mechanical Engineering 40, no. 12 (2004): 105. http://dx.doi.org/10.3901/jme.2004.12.105.

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5

Khiat, A., F. Lamarque, C. Prelle, N. Bencheikh, and E. Dupont. "High-resolution fibre-optic sensor for angular displacement measurements." Measurement Science and Technology 21, no. 2 (January 19, 2010): 025306. http://dx.doi.org/10.1088/0957-0233/21/2/025306.

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6

Liu, Weiping, Zhaofeng Wang, Ximing Zhang, Yulin Wang, Bochun Hu, and Ye Zhuang. "Fault Tolerant and Nano Displacement Drive Control Method of Photoelectric Motor for Battery Electric Vehicle." Journal of Nanoelectronics and Optoelectronics 16, no. 2 (February 1, 2021): 293–302. http://dx.doi.org/10.1166/jno.2021.2957.

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The low-resolution photoelectric position sensor is used, that is, Hall position sensor replaces the traditional photoelectric encoder and other high-resolution position sensors to monitor the rotor position. However, because the three-phase Hall position sensor can only output six position signals, a hardware circuit design of low-resolution position sensor monitoring rotor position signal is proposed. Meanwhile, nanotechnology has been introduced in the study of micro drive of battery electric vehicle (BEV). BEV driver has some disadvantages such as hysteresis, creep and nonlinearity, which seriously affects its application in nano environment. A nano displacement sensor is designed for the characteristics of BEV driver. The nonlinear problem of micro driver is solved through the closed-loop control of position feedback. In the test, through the verification of rotor position and current waveform, it can be proved that the method based on photoelectric position sensor and rotor position signal monitoring can ensure the low deviation of rotor position calculation and correct output signal of three-phase photoelectric position sensor. The decoupling performance of vector control is verified by 3/2 transformation. In the displacement detection of micro driver, the designed nano displacement sensor has higher resolution and its performance is better than that of the previous three generations of displacement sensors.

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7

Xu, Yi, Baowei Gao, Axin He, Tongzhou Zhang, and Jiasen Zhang. "An ultra-compact angstrom-scale displacement sensor with large measurement range based on wavelength modulation." Nanophotonics 11, no. 6 (February 2, 2022): 1167–76. http://dx.doi.org/10.1515/nanoph-2021-0754.

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Abstract Optical displacement metrology is important in nanotechnology and used to identify positions and displacements of nanodevices. Although several methods have been proposed, a sensor with ultracompact size, angstrom-scale resolution, and large measurement range is still lacking. We propose an optical displacement sensor with wavelength modulation that can demonstrate subwavelength footprint and angstrom-level resolution with large measurement range in this study. The proposed sensor consists of two optical slot antennas. Surface plasmon polaritons (SPPs) are launched at antennas and interfere when a tightly focused broadband light source illuminates the sensor. Spectrum of output SPPs presents a dip, which depends on the position of focal spot of incident light and is used to extract displacement. A maximum resolution of 0.734 nm was obtained. Furthermore, we used interference fringe of two broadband beams as light source and the measurement range of the sensor is not limited by the size of the tightly focused light source while maintaining high resolution. The method utilizes a new mechanism of wavelength modulation to overcome the trade-off between the high resolution and large measurement range, and achieve a variety of potential applications for nanometrology in the future.

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8

Hsu, Cheng Chih, Ju Yi Lee, C. C. Wu, and H. C. Shih. "3D Displacement Measurement with Pico-Meter Resolution Using Single Heterodyne Grating Interferometry." Key Engineering Materials 381-382 (June 2008): 283–86. http://dx.doi.org/10.4028/www.scientific.net/kem.381-382.283.

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The precision positioning device becomes significant requirement in scientific instruments used for the applications of nanotechnology for a few decades. To achieve the high resolution positioning, the sensing methods of displacement sensor become more important in positioning device. In this paper, a novel method is presented for measuring both in-plane/out-plane displacements with the single heterodyne grating interferometry (HGI). We demonstrated the 1D, 2D, and 3D measurement results respectively and the smallest displacement can be detected was better than 6 pm. Furthermore, the nanometer resolution can be ensured within 20 µm displacement. Hence, the in-plane/out-plane measurements with single apparatus can be realized by our method and might be a displacement sensor using in the motorized stage with suitable opto-mechanics structure minimization.

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9

Remo, John L. "High-resolution optic displacement measurement using a dual-photodiode sensor." Optical Engineering 36, no. 8 (August 1, 1997): 2279. http://dx.doi.org/10.1117/1.601454.

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10

Kwa, T. A., and R. F. Wolffenbuttel. "Optical angular displacement sensor with high resolution integrated in silicon." Sensors and Actuators A: Physical 32, no. 1-3 (April 1992): 591–97. http://dx.doi.org/10.1016/0924-4247(92)80049-9.

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11

Yu, Guang Ping, Shan Hui Wang, and Ying Gang Zhou. "Research of Displacement Measuring System Based on Capacitive Grating Sensor." Applied Mechanics and Materials 20-23 (January 2010): 1260–64. http://dx.doi.org/10.4028/www.scientific.net/amm.20-23.1260.

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Capacitive grating sensor can be used to measure the length, as its capacitance changes with the shift difference. There are several measuring systems consisting of capacitive sensor, but all their basic principles are capacitive differential sensing. The structure, principles and characteristics of capacitive sensors are introduced in this paper. Especially, we designed a high-resolution electronic length measuring system based on Capacitive Grating Sensor. And the measurement error of the system and the reason are analysed. For this system, the measuring range is from 0 to 500mm, the resolution is 1um, the indication error is 5um, the measuring speed is 1m/s. Accurate measurement on account of large displacement is achieved with the system.

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12

Bravo, Mikel, and Manuel López-Amo. "Remote-Time Division Multiplexing of Bending Sensors Using a Broadband Light Source." Journal of Sensors 2012 (2012): 1–6. http://dx.doi.org/10.1155/2012/154586.

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This work experimentally demonstrates a remote sensing network which interrogates bending sensors using time-division multiplexing techniques and a broadband light source. The bending sensors are located 50 km away from the monitoring station. They are based on a simple tie displacement sensor and offer high-resolution measurements of displacement.

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13

Li, Xin, Yu Rong Chen, and Sheng Huai Wang. "One Kind of High Precision Non-Contact Displacement Sensor and its Application." Advanced Materials Research 328-330 (September 2011): 2102–7. http://dx.doi.org/10.4028/www.scientific.net/amr.328-330.2102.

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In this article, one new non-contact displacement sensor and its principle has been introduced; it is based upon improved Foucault focus detection and equipped with diffraction grating measuring system. Driven by piezoelectric actuator instead of voice coil motor and diffraction grating metrology system being adopted, the non-contact displacement sensor avoids non-linear error and other measurement error caused by the movement of the voice coil motor and therefore has higher measurement accuracy, which has be proved by series of experiments. During measuring the workpiece surface contour profiles, piezoelectric actuator drives focus object lens to make vertical displacement, and ensures focus in every sampling interval to go to the workpiece surface. In the mean time the focus error signal can be set to zero. The sensor has large range and high resolution, which can be applied in profile measurement. This non-contact displacement sensor resolution can reach 10nm.

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14

Wang, Shinn Fwu, Chi Tun Chen, Fu Hsi Kao, Yi Chu, Shyh Rong Lay, Yu Pin Liao, Liuh Chii Lin, and An Li Liu. "Experimental Evaluation of a Small-Displacement Sensing System Based on the Surface Plasmon Resonance Technology in Heterodyne Interferometry." Applied Mechanics and Materials 479-480 (December 2013): 682–86. http://dx.doi.org/10.4028/www.scientific.net/amm.479-480.682.

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In this article, a small-displacement sensing system based on the surface plasmon resonance technology in heterodyne interferometry is proposed and evaluated. The basic sensing unit is composed of a prism assembly and a displacement probe. The prism assembly consists of a halfwave (λ/2) plate, two right-angle prisms and two rotation stages. The small-displacement sensor is with high sensitivity and resolution due to the attenuated total reflection effect in heterodyne interferometry. Besides, we can obtain the results of the experiment in a distant place by uses of the USB data acquisition card (DAQ card) and a ZigBee module. It can be found that the displacement resolution of the small-displacement sensor can reach 0.155nm by numerical simulation. The small-displacement sensor has some merits, e.g., easy operation, high measurement accuracy, high resolution and rapid measurement, etc.

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15

Wang, Shinn Fwu, Ting Huan Chen, Pei Cheng Ke, Yi Chu, Yu Pin Liao, Yuan Fong Chau, Fu Hsi Kao, and An Li Liu. "Z-Axis Displacement Sensor Based on Total-Internal Reflection and Surface Plasmon Resonance in Heterodyne Interferometry." Advanced Materials Research 746 (August 2013): 564–69. http://dx.doi.org/10.4028/www.scientific.net/amr.746.564.

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In this paper, a z-axis displacement sensor based on Total-Internal Reflection and Surface Plasmon Resonance in heterodyne interferometry is proposed. The sensing unit is composed of a parallelogram prism, i.e. elongated prism, and a displacement probe. One side surface of the elongated prism was coated with a 2 nm Ti-film and a 45.5 nm Au-film, but the other side surface of that were not coated with metal films. The z-axis displacement sensor is with high sensitivity and resolution due to multiple attenuated total reflections and total internal reflections effects. Besides, we can obtain the results of the experiment in a distant place by uses of the USB data acquisition card (DAQ card) and a ZigBee module. In fact, the displacement resolution of the z-axis displacement meter can reach sub-nanometer by numerical simulation. The small-displacement sensor has some merits, e.g., in real-time test, easy operation, high measurement accuracy, high resolution, etc.

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16

Büyükşahin, Utku, and Ahmet Kırlı. "A low-cost, human-like, high-resolution, tactile sensor based on optical fibers and an image sensor." International Journal of Advanced Robotic Systems 15, no. 4 (July 1, 2018): 172988141878363. http://dx.doi.org/10.1177/1729881418783631.

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Tactile sensors are commonly a coordinated group of receptors forming a matrix array meant to measure force or pressure similar to the human skin. Optic-based tactile sensors are flexible, sensitive, and fast; however, the human fingertip’s spatial resolution, which can be regarded as the desired spatial resolution, still could not be reached because of their bulky nature. This article proposes a novel and patented optic-based tactile sensor design, in which fiber optic cables are used to increase the number of sensory receptors per square centimeter. The proposed human-like high-resolution tactile sensor design is based on simple optics and image processing techniques, and it enables high spatial resolution and easy data acquisition at low cost. This design proposes using the change in the intesity of the light occured due to the deformation on contact/measurement surface. The main idea is using fiber optic cables as the afferents of the human physiology which can have 9 µm diameters for both delivering and receiving light beams. The variation of the light intensity enters sequent mathematical models as the input, then, the displacement, the force, and the pressure data are evaluated as the outputs. A prototype tactile sensor is manufactured with 1-mm spatial and 0.61-kPa pressure measurement resolution with 0–15.6 N/cm2 at 30 Hz sampling frequency. Experimental studies with different scenarios are conducted to demonstrate how this state-of-the-art design worked and to evaluate its performance. The overall accuracy of the first prototype, based on different scenarios, is calculated as 93%. This performance is regarded as promising for further developments and applications such as grasp control or haptics.

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17

LU Jin, 鲁. 进., 陈锡侯 CHEN Xi-hou, 武. 亮. WU Liang, and 汤其富 TANG Qi-fu. "High resolution time grating angular displacement sensor based on planar coils." Optics and Precision Engineering 25, no. 1 (2017): 172–81. http://dx.doi.org/10.3788/ope.20172501.0172.

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18

Kim, J.-D., and S.-R. Nam. "Development of a Micro-Positioning Grinding Table Using Piezoelectric Voltage Feedback." Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture 209, no. 6 (December 1995): 469–74. http://dx.doi.org/10.1243/pime_proc_1995_209_110_02.

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Micro-positioning systems using piezoelectric actuators have a very wide range of applications including ultra-precision machine tools, optical devices and measurement systems. In order to ensure a high-precision displacement resolution, they use a position sensor and error feedback. From a practical point of view, a high-resolution displacement sensor system is very expensive and it is difficult to guarantee that such sensitive sensors work properly in the harsh operating environments of industry. In this paper, a micro-positioning grinding table has been developed which does not require a position sensor but instead uses piezoelectric voltage feedback. It is driven by a hysteresis-sensitive reference input voltage calculated by computer using the actuator/sensor characteristics of piezoelectric materials. The experimental results illustrate the fast and stable response of the micro-positioning system, and the paper suggests a more efficient technique for controlling piezoelectric actuators.

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19

Zhou, L., H. B. Zhang, and Qiang Liu. "Development of Differential Capacitive Displacement Sensor Based on RC Multi-Oscillating Circuit." Applied Mechanics and Materials 10-12 (December 2007): 643–46. http://dx.doi.org/10.4028/www.scientific.net/amm.10-12.643.

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In order to meet the demands for high precise micro-displacement testing, a differential capacitive displacement sensor based on RC multi-oscillating circuit was designed. It has two couples of polar plates, and gets the displacement by testing frequency through the multi-oscillating circuit. This capacitive sensor has many advantages such as simple structure and testing circuit, high resolution and good stability.

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20

Lee, S. J., Y. Melikhov, D. C. Jiles, C. M. Park, and H. Hauser. "Magneto-optic linear-displacement sensor with high spatial resolution and low noise." Journal of Applied Physics 99, no. 8 (April 15, 2006): 08B301. http://dx.doi.org/10.1063/1.2159390.

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21

Xia, Sha, and Stoyan Nihtianov. "Power-Efficient High-Speed and High-Resolution Capacitive-Sensor Interface for Subnanometer Displacement Measurements." IEEE Transactions on Instrumentation and Measurement 61, no. 5 (May 2012): 1315–22. http://dx.doi.org/10.1109/tim.2011.2178678.

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22

Dong, Hao, Shicheng Liu, Liming Yang, Jiangbo Peng, and Keming Cheng. "Optical Fiber Displacement Sensor Based on Microwave Photonics Interferometry." Sensors 18, no. 11 (October 31, 2018): 3702. http://dx.doi.org/10.3390/s18113702.

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An optical fiber displacement sensor based on the microwave photonics interferometric (MWPI) method is proposed and experimented, which provides an ideal solution for large range displacement measurement with high resolution. The sensor used a Michelson microwave photonics interferometer to sense the displacement with one sensing arm and a length-adjusted reference arm. The displacement variation would change the period of the microwave response function of the interferometer. According to the principle that the phase difference in one free spectral range (FSR) of the microwave response function is 360°, the displacement can be retrieved by the microwave response function by means of a vector network analyzer (VNA). A programmable path-switching true time delay line was used in the reference arm to decrease the microwave bandwidth. The measurement results show that the displacement sensing range is larger than 3 m and the measurement resolution is 31 μm. Finally, the measurement stability is tested, and the factors affecting the measurement resolution of this method and the main source of errors are investigated in detail.

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23

He, Jin, Hao Zhang, and Meng Zhu. "Calibration of Eddy Current Sensor Using Speckle Photography." Applied Mechanics and Materials 734 (February 2015): 79–83. http://dx.doi.org/10.4028/www.scientific.net/amm.734.79.

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Double exposure speckle is proposed to calibrate eddy current sensor in micro-displacement measurement for its simplicity, robustness and high resolution. The specklegram is taken as the vector of the displacement. The actual displacement of an object is calculated according to the speckle displacement on the spatial term, which is worked out according to the fringe spacing on the spectrum surface. A calibration system is proposed with proper speckle size and imaging magnification. Experiments showed that the accuracy of displacement measurement is 0.196um with an optical magnification 65.8. The calibration curve of the eddy current sensor is consistent with the result by a nanopositioning system.

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24

Hou, Max Ti-Kuang. "High-resolution microfabricated Vernier-type displacement sensor using suspended gate field-effect transistors." Journal of Micro/Nanolithography, MEMS, and MOEMS 10, no. 1 (January 1, 2011): 011502. http://dx.doi.org/10.1117/1.3533325.

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25

Ghaffar, Abdul, Qi Li, Shah Ali Haider, An Sun, Arnaldo G. Leal-Junior, Lifeng Xu, Muhammad Chhattal, and Mujahid Mehdi. "A simple and high-resolution POF displacement sensor based on face-coupling method." Measurement 187 (January 2022): 110285. http://dx.doi.org/10.1016/j.measurement.2021.110285.

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26

Yang, Liang En, Xuan Ze Wang, and Lin Zheng. "Displacement Sensor with Controlled Measuring Force and its Characteristics Analysis." Applied Mechanics and Materials 103 (September 2011): 309–13. http://dx.doi.org/10.4028/www.scientific.net/amm.103.309.

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A displacement sensor with controlled measuring force and its characteristics analysis are discussed in this paper. The displacement sensor consists of an electric induction transducer with high resolution and a voice coil motor (VCM). The measuring principles, structure of the sensor are discussed. Theory model, dynamic and static characteristics of VCM are analysed. A measuring system for surface topography with large measuring range is constructed based on the displacement sensor and 2D moving platform. Measuring force of the sensor in measurement process of surface topography can be controlled at μN level and hardly changes. It has been used in measurement of bearing ball，bullet mark, etc.

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27

Zhang, Ke, Cankun Yang, Xiaojuan Li, Chunping Zhou, and Ruofei Zhong. "High-Efficiency Microsatellite-Using Super-Resolution Algorithm Based on the Multi-Modality Super-CMOS Sensor." Sensors 20, no. 14 (July 20, 2020): 4019. http://dx.doi.org/10.3390/s20144019.

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To realize the application of super-resolution technology from theory to practice, and to improve microsatellite spatial resolution, we propose a special super-resolution algorithm based on the multi-modality super-CMOS sensor which can adapt to the limited operation capacity of microsatellite computers. First, we designed an oblique sampling mode with the sensor rotated at an angle of 26.56 ∘ ( arctan 1 2 ) to obtain high overlap ratio images with sub-pixel displacement. Secondly, the proposed super-resolution algorithm was applied to reconstruct the final high-resolution image. Because the satellite equipped with this sensor is scheduled to be launched this year, we also designed the simulation mode of conventional sampling and the oblique sampling of the sensor to obtain the comparison and experimental data. Lastly, we evaluated the super-resolution quality of images, the effectiveness, the practicality, and the efficiency of the algorithm. The results of the experiments showed that the satellite-using super-resolution algorithm combined with multi-modality super-CMOS sensor oblique-mode sampling can increase the spatial resolution of an image by about 2 times. The algorithm is simple and highly efficient, and can realize the super-resolution reconstruction of two remote-sensing images within 0.713 s, which has good performance on the microsatellite.

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28

Peng, Dong Lin, Ji Sen Yang, Xi Hou Chen, and Zi Ran Chen. "The Principle and Structure of Novel High-Precision Linear Time Grating Displacement Sensors." Applied Mechanics and Materials 236-237 (November 2012): 1216–21. http://dx.doi.org/10.4028/www.scientific.net/amm.236-237.1216.

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The existing grating type sensors such as optical grating sensor, have long been designed to rely on the precise mechanical space division technology, which is hard to develop without heavy investment. A theoretical concept, time-space coordinate transformation, was presented to realize measuring spatial displacement with time difference. Similar to the principle of circular time grating based on rotating electrical machine, linear time grating is designed based on the principle of linear motor, with which the physical and mathematical models of linear time grating are established. Based on these models linear time grating mechanical structure is designed, which has commercialization value. The resolution of linear time grating can achieve 0.1μm tested by National Institute of Measurement and Testing Technology.

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29

Lebang, Annamaintin Kobong, A. Arifin, and Bualkar Abdullah. "DETECTION OF DISPLACEMENT USING GLASS OPTICAL FIBER SENSOR WITH VARIOUS CONFIGURATION." Indonesian Physical Review 4, no. 3 (September 30, 2021): 166–80. http://dx.doi.org/10.29303/ipr.v4i3.124.

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The research has measured the landslide using a displacement sensor based on Glass Optical Fiber (GOF) and Optical Time Domain Reflectometer (OTDR). The sensor manufacture process consists of various materials, structures, configurations, diameters, and directions. The sensor is made using GOF with a single-mode structure and single mode-multimode-Singlemode (SMS) structure. Each system is given a variety of configurations, namely gamma, bowknot, and three loops configuration. Each arrangement is provided a variation of the indentation diameter in three displacement directions. The test results will be read as the power loss on the OTDR in dB units. The results obtained were then compared between two materials, two structures, and directions. Displacement resulting landslides and changes to the sensor, causing power losses, and affecting the characteristics of each sensor. We found the best measurement results with the sensitivity value of 0.241 dB/mm and the resolution value of 0.004 mm. The displacement sensor has been made for measuring landslide in the laboratory-scale simulation based on GOF and OTDR with easier fabrication, easy operation, high sensitivity, better resolution and can be connected to a computer

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30

Yu, Pei Jun. "Study on Artificial Polycrystalline Piezoelectric Material with the Calibration Mechanism of the Micro-Displacement Sensor Based on Piezoelectric Ceramic." Advanced Materials Research 703 (June 2013): 312–15. http://dx.doi.org/10.4028/www.scientific.net/amr.703.312.

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In this paper, a calibration mechanism of sensor based on artificial polycrystalline piezoelectric material and a kind of micro-voltage output system have been designed through understanding the characteristics and the parameters of the capacitive displacement sensor, so as to achieve the sensor calibration interval reaches the piezoelectric ceramic resolution of 5 nm. Through the measured values in the condition that 10mV/100mV is input to piezoelectric ceramic, it can be seen that the design meets the initial requirements. Such mechanism can be used for the calibration of a variety of high-precision sensors; however, it must be used in a stable environment.

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31

Hu, Lin, Jin Zhao, and Jinlong Yang. "Nano-scale displacement sensing based on van der Waals interactions." Nanoscale 7, no. 19 (2015): 8962–67. http://dx.doi.org/10.1039/c5nr00023h.

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We propose that a nano-scale displacement sensor with high resolution in weak-force systems can be realized based on vertically stacked two-dimensional (2D) atomic corrugated layer materials bound through van der Waals (vdW) interactions.

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32

Lu, Zhong, Yuan Cao, Guangying Wang, Yang Ran, Xinhuan Feng, and Bai-Ou Guan. "High-Resolution Displacement Sensor Based on a Chirped Fabry–Pérot Interferometer Inscribed on a Tapered Microfiber." Applied Sciences 9, no. 3 (January 25, 2019): 403. http://dx.doi.org/10.3390/app9030403.

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In this study, a high-resolution optical fiber Fabry–Pérot (FP) interferometer displacement sensor with chirped spectral characteristics based on a tapered microfiber is theoretically discussed and experimentally implemented. Instead of inscribing two fiber Bragg gratings (FBGs) on the symmetric position of the microfiber, we continuously inscribed one long FBG along the microfiber region to reduce the cavity length. The bandwidth of the interferometer is over 35 nm, and its displacement sensitivity is as high as 36.5 nm/mm at the tension state.

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33

Chen, Yu Rong, Xu Dong Yang, and Tie Bang Xie. "A Non-Contact Displacement Sensor with Diffraction Grating Metrology System for Profile Measurement." Key Engineering Materials 364-366 (December 2007): 74–79. http://dx.doi.org/10.4028/www.scientific.net/kem.364-366.74.

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Focus detection method is one of non-contact profile measurement methods. However, the measurement accuracy of current focus detection method is limited by voice coil motor adopted by it. In this paper, based on an improved Foucault focus detection method, a new non-contact displacement sensor with diffraction grating metrology system is presented. Driven by a piezoelectric actuator instead of a voice coil motor, and a diffraction grating metrology system being with it, the sensor has high measurement accuracy. During surface profile sampling, according to focusing deviation signal, the focusing lens was driven to move vertically by the piezoelectric actuator so that its focus was always located on the workpiece surface, synchronously the vertical displacement of the focusing lens was obtained by the diffraction grating metrology system as the profile height of sampling points. The displacements of all sampling points gave the whole profile of the measured surface, which can be processed by a characterization software to obtain the measurement result. The resolution of the non-contact displacement sensor was 10 nm.

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34

Shimonomura, Kazuhiro. "Tactile Image Sensors Employing Camera: A Review." Sensors 19, no. 18 (September 12, 2019): 3933. http://dx.doi.org/10.3390/s19183933.

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A tactile image sensor employing a camera is capable of obtaining rich tactile information through image sequences with high spatial resolution. There have been many studies on the tactile image sensors from more than 30 years ago, and, recently, they have been applied in the field of robotics. Tactile image sensors can be classified into three typical categories according to the method of conversion from physical contact to light signals: Light conductive plate-based, marker displacement- based, and reflective membrane-based sensors. Other important elements of the sensor, such as the optical system, image sensor, and post-image analysis algorithm, have been developed. In this work, the literature is surveyed, and an overview of tactile image sensors employing a camera is provided with a focus on the sensing principle, typical design, and variation in the sensor configuration.

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Orłowska, Karolina, Michał Świątkowski, Piotr Kunicki, Daniel Kopiec, and Teodor Gotszalk. "High-resolution and wide-bandwidth light intensity fiber optic displacement sensor for MEMS metrology." Applied Optics 55, no. 22 (July 26, 2016): 5960. http://dx.doi.org/10.1364/ao.55.005960.

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Kranz, Michael, Tracy Hudson, Brian Grantham, and Michael Whitley. "Optical Cavity Interrogation for MEMS Accelerometers." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2015, DPC (January 1, 2015): 001649–70. http://dx.doi.org/10.4071/2015dpc-wp34.

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MEMS accelerometers utilizing electrostatic, piezoelectric, and magnetic proof mass displacement readout approaches have achieved success in both commercial- and defense-related applications. However, there is a desire for improved acceleration resolution suitable for navigation-grade applications. Optical readout of mechanical displacements has demonstrated high levels of resolution in macro-scale applications including precision movement and placement systems. In addition, optical techniques are common in high performance inertial sensors such as fiber optic gyros and ring laser gyros. Incorporating optical readout approaches into MEMS acceleration devices may yield sufficient resolution to achieve navigation-grade performance. Therefore, the U.S. Army AMRDEC is developing MEMS accelerometers based on optical cavity resonance readout. In the device, an optical cavity is formed between a MEMS proof mass and a reference reflector. A tunable laser excites the cavity on the edge of its resonance peak. Small displacements of the cavity from its rest position are detected by frequency shifts of the resonance, leading to high-resolution proof mass displacement detection and therefore high acceleration resolutions. This paper will present modeling associated with the design concept, as well predictions of device geometries and performance with the goal of achieving less than 1 micro-g bias instability and a velocity random walk of better than 0.2 micro-g/rt.Hz.

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Cui, Jian Jun, Xing Hua Qu, and Yan Hui Kang. "Performance Test for Nanometer Accuracy Capacitance Displacement Sensor." Key Engineering Materials 609-610 (April 2014): 898–902. http://dx.doi.org/10.4028/www.scientific.net/kem.609-610.898.

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In checking to see the performance of the nanometer accuracy capacitive sensor, some parameters, such as, the linearity, repeatability and so on are presented as the characterization parameters. Firstly, the series of test method and test devices is designed to measure and evaluate these parameters of a capacitance sensor. Secondly, the measuring setup is consisted by the traceable laser interferometer with high accuracy and nanometer micro-motion system. Finally, in order to meet the displacement linearity test, the measuring method is in line with the Abbe principle. Experimental results indicate that this approach and setup can realize in the best reference line to the minimum linearity is better than 0.01%, repeatability is better than that of 3.5nm, resolution is less than 0.3nm, measurement capability is more unwavering than 3nm. It can satisfy the measurement requirements of capacitance sensor performance testing with nanometer accuracy.

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Guo, Dong Mei, and Hai Qing Jiang. "Wavelength Modulating Self-Mixing Interferometer." Applied Mechanics and Materials 870 (September 2017): 15–20. http://dx.doi.org/10.4028/www.scientific.net/amm.870.15.

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Self-mixing interference (SMI) was used to measure the displacement with a resolution of λ/2 by counting the interference signal peaks. In order to increase the measurement accuracy beyond λ/2, sinusoidal wavelength modulation (SWM) technique is introduced in SMI in this paper. Wavelength modulation of the laser beam is obtained by sinusoidal modulating the injection current of the laser diode. Fourier analysis method is proposed to demodulate the phase. Experimentally, the micro-movements of a high precision commercial PZT have been reconstructed, which can obtain a displacement measurement resolution of a few nanometers. It provides a potential displacement sensor with high accuracy and quite compact configuration.

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Amin, Saqib, Usman Zabit, Olivier D. Bernal, and Tassadaq Hussain. "High Resolution Laser Self-Mixing Displacement Sensor Under Large Variation in Optical Feedback and Speckle." IEEE Sensors Journal 20, no. 16 (August 15, 2020): 9140–47. http://dx.doi.org/10.1109/jsen.2020.2988851.

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40

Zhao, Shuangshuang, Changlun Hou, Juan Zhang, Jian Bai, and Guoguang Yang. "A high-resolution displacement sensor based on a grating interferometer with the phase modulation technique." Measurement Science and Technology 23, no. 10 (August 1, 2012): 105102. http://dx.doi.org/10.1088/0957-0233/23/10/105102.

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41

Mohammadfam, B., M. H. Mahdieh, and H. Veladi. "Optofluidic conical microresonator for precise displacement sensing." Journal of Instrumentation 17, no. 03 (March 1, 2022): P03025. http://dx.doi.org/10.1088/1748-0221/17/03/p03025.

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Abstract In the present work we report fabrication of a compact optical displacement sensor based on whispering gallery mode with common materials on Polydimethylsiloxane (PDMS) medium with mold master technique. Conical and hollow geometry of microcavity filled with Rhodamine B-doped Glycerol as active medium. The fabricated device can be utilized for sensing applications. Coupling junction can be tuned so that moving the conical microcavity of about 100 μm in the axial direction is equivalent to ∼1.5 nm shift in resonant wavelength. Also, a small change in concentration of active medium results in a shift in the resonant wavelength which provides the feasibility of sensing the refractive index. The proposed structure demonstrates the ability of considerably high-resolution sensing for fine displacement steps which is limited by the resolution of the spectrometer (0.6 nm).

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42

Wang, Wen, X. X. Li, and Zi Chen Chen. "A Planar Capacitive Sensor for Large Scale Measurement." Key Engineering Materials 381-382 (June 2008): 509–12. http://dx.doi.org/10.4028/www.scientific.net/kem.381-382.509.

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A planar capacitive sensor (PCS) is proposed for X and Y directions measurement. One axial displacement can be measured without the coupling of another axial movement. Two groups electrodes with 90 degree out-of-phase, forming triangle sine and triangle cosine wave, can be applied for direction detection and interpolation, aiming at high resolution. Simulation results show that proposed PCS is available for planar measurement.

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Xu, Lan-Lan, Ya-Xian Fan, Huan Liu, Tao Zhang, and Zhi-Yong Tao. "Terahertz Displacement Sensing Based on Interface States of Hetero-Structures." Electronics 9, no. 8 (July 28, 2020): 1213. http://dx.doi.org/10.3390/electronics9081213.

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Herein, we propose a nano displacement sensor based on the interface state of a terahertz hetero-structure waveguide. The waveguide consists of two periodically corrugated metallic tubes with different duty ratios, which can result in similar forbidden bands in their frequency spectra. It was found that the topological properties of these forbidden bands are different, and the hetero-structure can be formed by connecting these two waveguides. In the hetero-structure waveguide, the interface state of an extraordinary transmission can always arise within the former forbidden bands, the peak frequency of which is highly dependent on the cavity length at the interface of the two periodic waveguides. So, by carefully designing the structure’s topological property, the hetero-structure waveguide can be efficiently used to produce a displacement sensor in the THz frequency range. The simulations show that the resolution of the displacement can be as small as 90 nm and the sensitivity can reach over 1.2 GHz/μm. Such a sensitive interface state of the proposed hetero-structure waveguide will greatly benefit THz applications of functional devices, including not only displacement sensors but also switches with high extinction ratios, tunable narrow-band filters, and frequency division multiplexers.

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44

Prelle, Christine, Frédéric Lamarque, and Philippe Revel. "Reflective optical sensor for long-range and high-resolution displacements." Sensors and Actuators A: Physical 127, no. 1 (February 2006): 139–46. http://dx.doi.org/10.1016/j.sna.2005.11.005.

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45

Vykhristyuk, Ignat, Rodion Kulikov, and Evgeny Sysoev. "IMPROVEMENT OF LATERAL RESOLUTION UNDER DIMENSIONAL MEASUREMENTS OF NANORELIEF STEP STUCTURES." Interexpo GEO-Siberia 8 (2019): 183–90. http://dx.doi.org/10.33764/2618-981x-2019-8-183-190.

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The phase shifting interferometry methods allow to reach longitudinal resolution up to ~ 0.1 nm, but value of lateral resolution remains on level of ~ 1 μm. For providing of high lateral resolution of linear measurements in the interference microscope profilometer it was proposed to use the sensor of sharp-edge position detection. Principle of sensor’s measurement is based on registration of laser spot intensity scattered by the measurement sample surface under displacement of sample in the lateral direction. Measurement process and experimental results are presented. The combining of measurement results performed by the profilometer and the sensor of sharp-edge position detection can allow to increase the resolution of measurement of distance between sharp edges on the reconstructed surface nanorelief.

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46

Li, Chengyu, Ziming Wang, Sheng Shu, and Wei Tang. "A Self-Powered Vector Angle/Displacement Sensor Based on Triboelectric Nanogenerator." Micromachines 12, no. 3 (February 25, 2021): 231. http://dx.doi.org/10.3390/mi12030231.

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Recently, grating-structured triboelectric nanogenerators (TENG) operating in freestanding mode have been the subject of intensive research. However, standard TENGs based on interdigital electrode structures are unable to realize real-time sensing of the direction of the freestanding electrode movement. Here, a newly designed TENG, consisting of one group of grating freestanding electrodes and three groups of interdigitated induction electrodes with the identical period, has been demonstrated as a self-powered vector angle/displacement sensor (SPVS), capable of distinguishing the real-time direction of the freestanding electrode displacement. Thanks to the unique coupling effect between triboelectrification and electrostatic induction, periodic alternating voltage signals are generated in response to the rotation/sliding movement of the top freestanding electrodes on the bottom electrodes. The output peak-to-peak voltage of the SPVS can reach as high as 300 V at the rotation rate of 48 rpm and at the sliding velocity of 0.1 m/s, respectively. The resolution of the sensor reaches 8°/5 mm and can be further enhanced by decreasing the width of the electrodes. This present work not only demonstrates a novel method for angle/displacement detection but also greatly expands the applicability of TENG as self-powered vector sensors.

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Rosas Salaroli, Camila Haydée, Yan Li, and David Huang. "High-resolution optical coherence tomography visualization of LASIK flap displacement." Journal of Cataract & Refractive Surgery 35, no. 9 (September 2009): 1640–42. http://dx.doi.org/10.1016/j.jcrs.2009.04.025.

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Shimizu, Matsukuma, and Gao. "Optical Sensors for Multi-Axis Angle and Displacement Measurement Using Grating Reflectors." Sensors 19, no. 23 (December 1, 2019): 5289. http://dx.doi.org/10.3390/s19235289.

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In dimensional metrology it is necessary to carry out multi-axis angle and displacement measurement for high-precision positioning. Although the state-of-the-art linear displacement sensors have sub-nanometric measurement resolution, it is not easy to suppress the increase of measurement uncertainty when being applied for multi-axis angle and displacement measurement due to the Abbe errors and the influences of sensor misalignment. In this review article, the state-of-the-art multi-axis optical sensors, such as the three-axis autocollimator, the three-axis planar encoder, and the six-degree-of-freedom planar encoder based on a planar scale grating are introduced. With the employment of grating reflectors, measurement of multi-axis translational and angular displacement can be carried out while employing a single laser beam. Fabrication methods of a large-area planar scale grating based on a single-point diamond cutting with the fast tool servo technique and the interference lithography are also presented, followed by the description of the evaluation method of the large-area planar scale grating based on the Fizeau interferometer.

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D'Alessandro, A., and G. D'Anna. "Retrieval of Ocean Bottom and Downhole Seismic sensors orientation using integrated MEMS gyroscope and direct rotation measurements." Advances in Geosciences 40 (December 15, 2014): 11–17. http://dx.doi.org/10.5194/adgeo-40-11-2014.

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Abstract. The absolute orientation of the horizontal components of ocean bottom or downhole seismic sensors are generally unknown. Almost all the methods proposed to overcome this issue are based on the post-processing of the acquired signals and so the results are strongly dependent on the nature, quantity and quality of the acquired data. We have carried out several test to evaluate the ability of retrieve sensor orientation using integrated low cost MEMS gyroscope. Our tests have shown that the tested MEMS gyroscope (the model 1044_0–3/3/3 Phidget Spatial Precision High Resolution) can be used to measure angular displacement and therefore to retrieve the absolute orientation of the horizontal components of a sensor that has been subjected to rotation in the horizontal plane. A correct processing of the acquired signals permit to retrieve, for rotation at angular rate between 0 and 180° s−1, angular displacement with error less 2°.

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Talbot, Bruce, and Rasmus Astrup. "A review of Sensors, Sensor-Platforms and Methods Used in 3D Modelling of Soil Displacement after Timber Harvesting." Croatian journal of forest engineering 42, no. 1 (October 20, 2020): 149–64. http://dx.doi.org/10.5552/crojfe.2021.837.

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Proximal sensing technologies are becoming widely used across a range of applications in environmental sciences. One of these applications is in the measurement of the ground surface in describing soil displacement impacts from wheeled and tracked machinery in the forest. Within a period of 2–3 years, the use photogrammetry, LiDAR, ultrasound and time-of-flight imaging based methods have been demonstrated in both experimental and operational settings. This review provides insight into the aims, sampling design, data capture and processing, and outcomes of papers dealing specifically with proximal sensing of soil displacement resulting from timber harvesting. The work reviewed includes examples of sensors mounted on tripods and rigs, on personal platforms including handheld and backpack mounted, on mobile platforms constituted by forwarders and skidders, as well as on unmanned aerial vehicles (UAVs). The review further highlights and discusses the benefits, challenges, and some of the shortcomings of the various technologies and their application as interpreted by the authors.The majority of the work reviewed reflects pioneering approaches and innovative applications of the technologies. The studies have been carried out almost simultaneously, building on little or no common experience, and the evolution of standardized methods is not yet fully apparent. Some of the issues that will likely need to be addressed in developing this field are (i) the tendency toward generating apparently excessively high resolution micro-topography models without demonstrating the need for or contribution of such resolutions on accuracy, (ii) the inadequacy of conventional manual measurements in verifying the accuracy of these methods at such high resolutions, and (iii) the lack of a common protocol for planning, carrying out, and reporting this type of study.

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