Статті в журналах з теми "Focused Ion Beam machining"
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Allen, D. M., P. Shore, R. W. Evans, C. Fanara, W. O’Brien, S. Marson, and W. O’Neill. "Ion beam, focused ion beam, and plasma discharge machining." CIRP Annals 58, no. 2 (2009): 647–62. http://dx.doi.org/10.1016/j.cirp.2009.09.007.
Повний текст джерелаHung, N. P., Y. Q. Fu, and M. Y. Ali. "Focused ion beam machining of silicon." Journal of Materials Processing Technology 127, no. 2 (September 2002): 256–60. http://dx.doi.org/10.1016/s0924-0136(02)00153-x.
Повний текст джерелаYoung, Richard J. "Micro-machining using a focused ion beam." Vacuum 44, no. 3-4 (March 1993): 353–56. http://dx.doi.org/10.1016/0042-207x(93)90182-a.
Повний текст джерелаChen, Yan, Li Bao An, and Xiao Xia Yang. "Recent Development of Focused Ion Beam System and Application." Advanced Materials Research 753-755 (August 2013): 2578–81. http://dx.doi.org/10.4028/www.scientific.net/amr.753-755.2578.
Повний текст джерелаSun, Ji Ning, Xi Chun Luo, Wen Long Chang, and James M. Ritchie. "Fabrication of Freeform Micro Optics by Focused Ion Beam." Key Engineering Materials 516 (June 2012): 414–19. http://dx.doi.org/10.4028/www.scientific.net/kem.516.414.
Повний текст джерелаAtiqah, N., I. H. Jaafar, Mohammad Yeakub Ali, and B. Asfana. "Application of Focused Ion Beam Micromachining: A Review." Advanced Materials Research 576 (October 2012): 507–10. http://dx.doi.org/10.4028/www.scientific.net/amr.576.507.
Повний текст джерелаTaniguchi, Jun, Shin-ichi Satake, Takaki Oosumi, Akihisa Fukushige, and Yasuo Kogo. "Dwell time adjustment for focused ion beam machining." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 307 (July 2013): 248–52. http://dx.doi.org/10.1016/j.nimb.2013.02.039.
Повний текст джерелаKitamura, Masaru, Eijiro Koike, Noboru Takasu, and Tetsuro Nishimura. "Focused Ion Beam Machining for Optical Microlens Fabrication." Japanese Journal of Applied Physics 41, Part 1, No. 6A (June 15, 2002): 4019–21. http://dx.doi.org/10.1143/jjap.41.4019.
Повний текст джерелаDavies, ST, and B. Khamsehpour. "Focused ion beam machining and deposition for nanofabrication." Vacuum 47, no. 5 (May 1996): 455–62. http://dx.doi.org/10.1016/0042-207x(95)00235-9.
Повний текст джерелаJiang, Xiao Xiao, Feng Wen Wang, Zhen He Ma, Qiong Chan Gu, Jiang Tao Lv, and Guang Yuan Si. "Arbitrary Structures Fabricated by Focused Ion Beam Milling." Advanced Materials Research 661 (February 2013): 66–69. http://dx.doi.org/10.4028/www.scientific.net/amr.661.66.
Повний текст джерелаHUNG, WEN-CHANG, A. ADAWI, A. TAHRAOUI, and A. G. CULLIS. "ORGANIC SEMICONDUCTOR MICRO-PILLAR PROCESSED BY FOCUSED ION BEAM MILLING." International Journal of Quantum Information 03, supp01 (November 2005): 223–28. http://dx.doi.org/10.1142/s0219749905001407.
Повний текст джерелаPellerin, J. G. "Focused ion beam machining of Si, GaAs, and InP." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 8, no. 6 (November 1990): 1945. http://dx.doi.org/10.1116/1.584880.
Повний текст джерелаDravid, Vinayak P., Steven Kim, and Luke N. Brewer. "Focused Ion Beam (FIB): More than Just a Fancy Ion Beam Thinner." Microscopy and Microanalysis 6, S2 (August 2000): 504–5. http://dx.doi.org/10.1017/s1431927600035017.
Повний текст джерелаHosokawa, Hiroyuki, Takeshi Nakajima, and Koji Shimojima. "Focused Ion Beam Micro-Machining Properties on WC-Co Alloys." Journal of the Japan Society of Powder and Powder Metallurgy 53, no. 2 (2006): 187–91. http://dx.doi.org/10.2497/jjspm.53.187.
Повний текст джерелаYoshida, Y., W. Okazaki, and T. Uchida. "Laser and focused ion beam combined machining for micro dies." Review of Scientific Instruments 83, no. 2 (February 2012): 02B901. http://dx.doi.org/10.1063/1.3662018.
Повний текст джерелаThaus, D. M. "Development of focused ion-beam machining techniques for Permalloy structures." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 14, no. 6 (November 1996): 3928. http://dx.doi.org/10.1116/1.588697.
Повний текст джерелаLee, Hiwon, Jin Han, Byung-Kwon Min, and Sang Jo Lee. "Geometric Compensation of Focused Ion Beam Machining Using Image Processing." Applied Physics Express 1 (December 5, 2008): 127002. http://dx.doi.org/10.1143/apex.1.127002.
Повний текст джерелаGuénolé, J., A. Prakash, and E. Bitzek. "Atomistic simulations of focused ion beam machining of strained silicon." Applied Surface Science 416 (September 2017): 86–95. http://dx.doi.org/10.1016/j.apsusc.2017.04.027.
Повний текст джерелаDravid, Vinayak P. "Focused Ion Beam (FIB): More than Just a Fancy Ion Beam Thinner." Microscopy and Microanalysis 7, S2 (August 2001): 926–27. http://dx.doi.org/10.1017/s1431927600030701.
Повний текст джерелаOKUMOTO, Takashi, Kousuke SAWAI, Jun TANIGUCHI, Takaki OOSUMI, Shin-ichi SATAKE, Shun YAMASHINA, and Yasuo KOGO. "A31 Focused ion beam machining of silicon carbide(M4 processes and micro-manufacturing for science)." Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21 2009.5 (2009): 623–26. http://dx.doi.org/10.1299/jsmelem.2009.5.623.
Повний текст джерелаYOSHIDA, Yoshikazu. "102 Laser and focused ion beam combined machining for micro dies." Proceedings of Yamanashi District Conference 2012 (2012): 4–5. http://dx.doi.org/10.1299/jsmeyamanashi.2012.4.
Повний текст джерелаMasuzawa, Tsuneaki, Yoshikazu Yoshida, Hiromichi Ikeda, Keigo Oguchi, Hikaru Yamagishi, and Yuji Wakabayashi. "Development of a local vacuum system for focused ion beam machining." Review of Scientific Instruments 80, no. 7 (July 2009): 073708. http://dx.doi.org/10.1063/1.3186060.
Повний текст джерелаDi Maio, D., and S. G. Roberts. "Measuring fracture toughness of coatings using focused-ion-beam-machined microbeams." Journal of Materials Research 20, no. 2 (February 1, 2005): 299–302. http://dx.doi.org/10.1557/jmr.2005.0048.
Повний текст джерелаKim, Y., A. Y. Abuelfilat, S. P. Hoo, A. Al-Abboodi, B. Liu, Tuck Ng, P. Chan, and J. Fu. "Tuning the surface properties of hydrogel at the nanoscale with focused ion irradiation." Soft Matter 10, no. 42 (2014): 8448–56. http://dx.doi.org/10.1039/c4sm01061b.
Повний текст джерелаWang, Houxiao, Wei Zhou, and Er Ping Li. "Focused Ion Beam Assisted Interface Detection for Fabricating Functional Plasmonic Nanostructures." Journal of Nanomaterials 2015 (2015): 1–9. http://dx.doi.org/10.1155/2015/468069.
Повний текст джерелаMiura, Kohichi, Syou Satoh, Takazo Yamada, and Hwa Soo Lee. "Effect of Machining of Small Tools by Means of Focused Ion Beam." Advanced Materials Research 565 (September 2012): 588–93. http://dx.doi.org/10.4028/www.scientific.net/amr.565.588.
Повний текст джерелаWang, Hou Xiao, Wei Zhou, and Er Ping Li. "Focused Ion Beam Nano-Precision Machining for Analyzing Photonic Structures in Butterfly." Key Engineering Materials 447-448 (September 2010): 174–77. http://dx.doi.org/10.4028/www.scientific.net/kem.447-448.174.
Повний текст джерелаITO, Hiroaki, Kohshi ITO, Masahiro ARAI, Kohichi SUGIMOTO, Toshiaki MATSUKURA, and Ryutaro MAEDA. "Focused Ion Beam Machining of Precision Die for Micro Optical Lens Molding." Journal of the Japan Society for Precision Engineering, Contributed Papers 70, no. 12 (2004): 1549–53. http://dx.doi.org/10.2493/jspe.70.1549.
Повний текст джерелаLalev, G., S. Dimov, J. Kettle, F. van Delft, and R. Minev. "Data preparation for focused ion beam machining of complex three-dimensional structures." Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture 222, no. 1 (January 2008): 67–76. http://dx.doi.org/10.1243/09544054jem864.
Повний текст джерелаSabouri, Aydin, Carl J. Anthony, Philip D. Prewett, James Bowen, and Haider Butt. "Effects of current on early stages of focused ion beam nano-machining." Materials Research Express 2, no. 5 (May 11, 2015): 055005. http://dx.doi.org/10.1088/2053-1591/2/5/055005.
Повний текст джерелаPicard, Y. N., D. P. Adams, M. J. Vasile, and M. B. Ritchey. "Focused ion beam-shaped microtools for ultra-precision machining of cylindrical components." Precision Engineering 27, no. 1 (January 2003): 59–69. http://dx.doi.org/10.1016/s0141-6359(02)00188-5.
Повний текст джерелаKim, Sang-Jae, and Koji Iwasaki. "Development of Focused Ion Beam Machining Systems for Fabricating Three-Dimensional Structures." Japanese Journal of Applied Physics 47, no. 6 (June 20, 2008): 5120–22. http://dx.doi.org/10.1143/jjap.47.5120.
Повний текст джерелаSabouri, A., C. J. Anthony, J. Bowen, V. Vishnyakov, and P. D. Prewett. "The effects of dwell time on focused ion beam machining of silicon." Microelectronic Engineering 121 (June 2014): 24–26. http://dx.doi.org/10.1016/j.mee.2014.02.025.
Повний текст джерелаWollschläger, Nicole, Werner Österle, Ines Häusler, and Mark Stewart. "Ga+implantation in a PZT film during focused ion beam micro-machining." physica status solidi (c) 12, no. 3 (February 9, 2015): 314–17. http://dx.doi.org/10.1002/pssc.201400096.
Повний текст джерелаSrinivasan, Dheepa, and GE Power. "Cold Spray: Advanced Characterization Methods—Focused Ion Beam Machining and Electron Probe Microanalysis." AM&P Technical Articles 175, no. 4 (May 1, 2017): 42–43. http://dx.doi.org/10.31399/asm.amp.2017-04.p042.
Повний текст джерелаDeinhart, Victor, Lisa-Marie Kern, Jan N. Kirchhof, Sabrina Juergensen, Joris Sturm, Enno Krauss, Thorsten Feichtner, et al. "The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication." Beilstein Journal of Nanotechnology 12 (April 6, 2021): 304–18. http://dx.doi.org/10.3762/bjnano.12.25.
Повний текст джерелаRussell, P. E., T. J. Stark, D. P. Griffis, and J. C. Gonzales. "Chemically Assisted Focused ION Beam Micromachining: Overview, Recent Developments and Current Needs." Microscopy and Microanalysis 7, S2 (August 2001): 928–29. http://dx.doi.org/10.1017/s1431927600030713.
Повний текст джерелаBauer, Jens, Melanie Ulitschka, Frank Frost, and Thomas Arnold. "Figuring of optical aluminium devices by reactive ion beam etching." EPJ Web of Conferences 215 (2019): 06002. http://dx.doi.org/10.1051/epjconf/201921506002.
Повний текст джерелаJoe, Hang-Eun, Won-Sup Lee, Martin B. G. Jun, No-Cheol Park, and Byung-Kwon Min. "Material interface detection based on secondary electron images for focused ion beam machining." Ultramicroscopy 184 (January 2018): 37–43. http://dx.doi.org/10.1016/j.ultramic.2017.10.012.
Повний текст джерелаTAKAHASHI, Nobuhiko, Hayato YOSHIOKA, and Hidenori SHINNO. "Study on Nano-Machining of Hard and Brittle Material with Focused Ion Beam." Journal of the Japan Society for Precision Engineering 74, no. 5 (2008): 491–97. http://dx.doi.org/10.2493/jjspe.74.491.
Повний текст джерелаSun, J., J. Li, R. R. J. Maier, D. P. Hand, W. N. MacPherson, M. K. Miller, J. M. Ritchie, and X. Luo. "Fabrication of a side aligned optical fibre interferometer by focused ion beam machining." Journal of Micromechanics and Microengineering 23, no. 10 (September 5, 2013): 105005. http://dx.doi.org/10.1088/0960-1317/23/10/105005.
Повний текст джерелаJakubéczyová, Dagmar, and Beáta Ballóková. "The Analyse of Nanocomposite Thin Coatings Using Specimens Prepared by Focused Ion Beam Milling." Materials Science Forum 891 (March 2017): 579–85. http://dx.doi.org/10.4028/www.scientific.net/msf.891.579.
Повний текст джерелаAhn, Sung-Hoon, Hae-Sung Yoon, Ki-Hwan Jang, Eun-Seob Kim, Hyun-Taek Lee, Gil-Yong Lee, Chung-Soo Kim, and Suk-Won Cha. "Nanoscale 3D printing process using aerodynamically focused nanoparticle (AFN) printing, micro-machining, and focused ion beam (FIB)." CIRP Annals 64, no. 1 (2015): 523–26. http://dx.doi.org/10.1016/j.cirp.2015.03.007.
Повний текст джерелаScott, Simon, and Zulfiqur Ali. "Fabrication Methods for Microfluidic Devices: An Overview." Micromachines 12, no. 3 (March 18, 2021): 319. http://dx.doi.org/10.3390/mi12030319.
Повний текст джерелаXia, Xinyi, Nahid Al-Mamun, Warywoba Daudi, Fan Ren, Aman Haque, and Stephen J. Pearton. "Ga+ Focused Ion Beam Damage in n-type Ga2O3 and Its Recovery after Annealing Treatment." ECS Meeting Abstracts MA2022-02, no. 34 (October 9, 2022): 1245. http://dx.doi.org/10.1149/ma2022-02341245mtgabs.
Повний текст джерелаKawasegi, Noritaka, Tomoyuki Niwata, Noboru Morita, Kazuhito Nishimura, and Hideki Sasaoka. "Improving machining performance of single-crystal diamond tools irradiated by a focused ion beam." Precision Engineering 38, no. 1 (January 2014): 174–82. http://dx.doi.org/10.1016/j.precisioneng.2013.09.001.
Повний текст джерелаDing, X., D. L. Butler, G. C. Lim, C. K. Cheng, K. C. Shaw, K. Liu, W. S. Fong, and H. Y. Zheng. "Machining with micro-size single crystalline diamond tools fabricated by a focused ion beam." Journal of Micromechanics and Microengineering 19, no. 2 (January 14, 2009): 025005. http://dx.doi.org/10.1088/0960-1317/19/2/025005.
Повний текст джерелаKawasegi, Noritaka, Kazuma Ozaki, Noboru Morita, Kazuhito Nishimura, Makoto Yamaguchi, and Noboru Takano. "Nanopatterning on Nano-Polycrystalline Diamond and Cubic Boron Nitride Using Focused Ion Beam and Heat Treatment to Fabricate Textured Cutting Tools." Materials Science Forum 874 (October 2016): 543–48. http://dx.doi.org/10.4028/www.scientific.net/msf.874.543.
Повний текст джерелаYang, Liangliang, Jiangtao Wei, Zhe Ma, Peishuai Song, Jing Ma, Yongqiang Zhao, Zhen Huang, Mingliang Zhang, Fuhua Yang, and Xiaodong Wang. "The Fabrication of Micro/Nano Structures by Laser Machining." Nanomaterials 9, no. 12 (December 16, 2019): 1789. http://dx.doi.org/10.3390/nano9121789.
Повний текст джерелаJoe, Hang-Eun, Jae-Hyeong Park, Seong Hyeon Kim, Gyuho Kim, Martin B. G. Jun, and Byung-Kwon Min. "Effects of coating material on the fabrication accuracy of focused ion beam machining of insulators." Japanese Journal of Applied Physics 54, no. 9 (August 28, 2015): 096602. http://dx.doi.org/10.7567/jjap.54.096602.
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