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Автор: Grafiati

Опубліковано: 5 жовтня 2024

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1

Girard, A., D. Hitz, G. Melin, and K. Serebrennikov. "Electron cyclotron resonance plasmas and electron cyclotron resonance ion sources: Physics and technology (invited)." Review of Scientific Instruments 75, no. 5 (May 2004): 1381–88. http://dx.doi.org/10.1063/1.1675926.

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2

San Andrés, E., A. Del Prado, A. J. Blázquez, I. Mártil, and G. González-Díaz. "Procesos de oxidación de Si mediante plasma de resonancia ciclotrónica de electrones." Boletín de la Sociedad Española de Cerámica y Vidrio 43, no. 2 (April 30, 2004): 379–82. http://dx.doi.org/10.3989/cyv.2004.v43.i2.546.

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3

Girard, A., C. Pernot, G. Melin, and C. Lécot. "Modeling of electron-cyclotron-resonance-heated plasmas." Physical Review E 62, no. 1 (July 1, 2000): 1182–89. http://dx.doi.org/10.1103/physreve.62.1182.

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4

Outten, C. A., J. C. Barbour, and W. R. Wampler. "Characterization of electron cyclotron resonance hydrogen plasmas." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 9, no. 3 (May 1991): 717–21. http://dx.doi.org/10.1116/1.577350.

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5

Shufflebotham, P. K., and D. J. Thomson. "Stability and spatial characterization of electron cyclotron resonance processing plasmas." Canadian Journal of Physics 69, no. 3-4 (March 1, 1991): 195–201. http://dx.doi.org/10.1139/p91-032.

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Анотація:

This paper presents preliminary measurements of the spatial variation of the plasma density, electron temperature, plasma potential, and floating voltage within a divergent magnetic field electron cyclotron resonance (ECR) plasma processing reactor. The measurements are performed using an orbital-motion-limited cylindrical Langmuir probe designed specifically for use in these plasmas. A brief discussion of the stability and uniformity of divergent field plasmas in general, and qualitative techniques for the diagnosis of these properties, is also given. It was found that these plasmas generally occurred in distinct "modes," characterized by unique shapes and dependences on system variables, and between which discontinuous, noisy, and often bistable transitions occurred. Axially resolved probe measurements performed under ECR conditions showed that the plasma density exhibited a broadly peaked profile, while the electron temperature showed a sharp peak at ECR. The differences in these profiles leads to three qualitatively different plasma regions available for use in ECR processing. The variation of the plasma potential explains the origin of the axial ion beams that commonly occur in these systems.

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6

Jiang, Wence, Daniel Verscharen, Seong-Yeop Jeong, Hui Li, Kristopher G. Klein, Christopher J. Owen, and Chi Wang. "Velocity-space Signatures of Resonant Energy Transfer between Whistler Waves and Electrons in the Earth’s Magnetosheath." Astrophysical Journal 960, no. 1 (December 20, 2023): 30. http://dx.doi.org/10.3847/1538-4357/ad0df8.

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Abstract Wave–particle interactions play a crucial role in transferring energy between electromagnetic fields and charged particles in space and astrophysical plasmas. Despite the prevalence of different electromagnetic waves in space, there is still a lack of understanding of fundamental aspects of wave–particle interactions, particularly in terms of energy flow and velocity-space characteristics. In this study, we combine a novel quasilinear model with observations from the Magnetospheric Multiscale mission to reveal the signatures of resonant interactions between electrons and whistler waves in magnetic holes, which are coherent structures often found in the Earth’s magnetosheath. We investigate the energy transfer rates and velocity-space characteristics associated with Landau and cyclotron resonances between electrons and slightly oblique propagating whistler waves. In the case of our observed magnetic hole, the loss of electron kinetic energy primarily contributes to the growth of whistler waves through the n = −1 cyclotron resonance, where n is the order of the resonance expansion in linear Vlasov–Maxwell theory. The excitation of whistler waves leads to a reduction of the temperature anisotropy and parallel heating of the electrons. Our study offers a new and self-consistent understanding of resonant energy transfer in turbulent plasmas.

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7

Hansen, S. K., S. K. Nielsen, J. Stober, J. Rasmussen, M. Salewski, M. Willensdorfer, M. Hoelzl, and M. Stejner. "Parametric Decay Instabilities during Electron Cyclotron Resonance Heating of Fusion Plasmas, Problems and Possibilities." EPJ Web of Conferences 277 (2023): 01002. http://dx.doi.org/10.1051/epjconf/202327701002.

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We review parametric decay instabilities (PDIs) expected in connection with electron cyclotron resonance heating (ECRH) of magnetically confined fusion plasmas, with a specific focus on conditions relevant for the ITER tokamak. PDIs involving upper hybrid (UH) waves are likely to occur in O-mode ECRH scenarios at ITER if electron density profiles allowing trapping of UH waves near the ECRH frequency are present. Such PDIs may occur near the plasma center in ITER full-field scenarios heated by 170 GHz O-mode ECRH and on the high-field side of half-field ITER plasmas heated by 110 GHz or 104 GHz O-mode ECRH. Additionally, 110 GHz O-mode ECRH of half-field ITER scenarios may have low ECRH absorption, due to the electron cyclotron resonance being located on the high-field side of the main plasma. This potentially allows PDIs driven by a significant amount of ECRH radiation reaching the UH resonance in X-mode to occur, as X-mode radiation can be generated by reflection of unabsorbed O-mode radiation from the high-field side wall. The occurrence of PDIs during ECRH may damage microwave diagnostics, such as the electron cyclotron emission and low-field side reflectometer systems at ITER, as well as complicate the calculation of heating and current drive characteristics. However, if PDIs are induced in a controlled manner, they may provide novel diagnostic tools and allow the generation of a moderate fast ion population in plasmas heated only by ECRH.

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8

Castagna, T. J., J. L. Shohet, D. D. Denton, and N. Hershkowitz. "X rays in electron‐cyclotron‐resonance processing plasmas." Applied Physics Letters 60, no. 23 (June 8, 1992): 2856–58. http://dx.doi.org/10.1063/1.106846.

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9

Goeckner, M. J., J. A. Meyer, G. ‐H Kim, J. ‐S Jenq, A. Matthews, J. W. Taylor, and R. A. Breun. "Role of contaminants in electron cyclotron resonance plasmas." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 11, no. 5 (September 1993): 2543–52. http://dx.doi.org/10.1116/1.578605.

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10

Racz, Richárd, Sándor Biri, and József Palinkas. "Visible Light Emission of Electron Cyclotron Resonance Plasmas." IEEE Transactions on Plasma Science 39, no. 11 (November 2011): 2462–63. http://dx.doi.org/10.1109/tps.2011.2150244.

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11

Marchetti, M. T., M. Cavenago, and F. Pegoraro. "Models of many-element electron cyclotron resonance plasmas." Review of Scientific Instruments 69, no. 2 (February 1998): 1123–25. http://dx.doi.org/10.1063/1.1148644.

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12

Pu, Yi-Kang, Zhi-Gang Guo, Zheng-De Kang, Jie Ma, Zhi-Cheng Guan, Guang-Yu Zhang, and En-Ge Wang. "Comparative characterization of high-density plasma reactors using emission spectroscopy from VUV to NIR." Pure and Applied Chemistry 74, no. 3 (January 1, 2002): 459–64. http://dx.doi.org/10.1351/pac200274030459.

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Emission spectroscopy is used to investigate the effect of inert gas mixing in nitrogen plasmas generated in inductively coupled plasma (ICP) and electron cyclotron resonance (ECR) plasma sources. Vacuum ultraviolet (VUV) emission of resonance lines is used to determine concentration of atomic nitrogen while electron temperature is obtained from optical emission spectra. It is found that electron temperature can be either raised or reduced effectively by mixing helium or argon in a nitrogen discharge. Electron-electron collisions and superelastic collisions involving metastable species are key factors in electron temperature tuning.

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13

Virko, V. F., V. M. Slobodyan, and Yu V. Virko. "Coupling of Helicon Antennas to Plasma near the Electron Cyclotron Resonance." Ukrainian Journal of Physics 61, no. 11 (November 2016): 956–59. http://dx.doi.org/10.15407/ujpe61.11.0956.

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14

Rawwagah, F., M. Al-Ali, A. Al-Khateeb, and M. Bawa'aneh. "Collisional and resonance absorption of electromagnetic waves in a weakly collisional, inhomogeneous magnetoplasma slab." Advanced Electromagnetics 9, no. 2 (August 28, 2020): 25–30. http://dx.doi.org/10.7716/aem.v9i2.1466.

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Absorbance of normally incident electromagnetic wave on a cold, weakly collisional, and inhomogeneous magnetoplasma slab is investigated. The plasma density is Budden-like sinusoidal profile, where the inhomogeniety is treated as a multilayered system of homogeneous sub-cells within the transfer matrix technique. For incident wave frequencies much above the ion cyclotron frequency, only right hand circularly polarized waves are relevant for wave propagation parallel to a static magnetic field. Calculations are performed in normalized parameters, that make the results suitable for many applications including atmospheric and laboratory plasmas. The presence of the dc-magnetic field leads to the formation of two absorption bands explained by plasma collisional dissipation and electron cyclotron resonance in the low frequency branch of the $R$-wave below the electron cyclotron frequency. The transmittance shows the emergence of the low frequency electron cyclotron wave, which becomes a Whistler mode at very low frequency. More detailed discussion on the effect of plasma collisionality, inhomogeneity, and dc-magnetic field on the propagation characteristics is given at the relevant place within the body of the manuscript.

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15

Hansen, S. K., S. K. Nielsen, and J. Stober. "Relativistic analysis of upper hybrid wave propagation and trapping." Physics of Plasmas 30, no. 4 (April 2023): 042103. http://dx.doi.org/10.1063/5.0138249.

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We investigate the impact of relativistic effects on upper hybrid (UH) waves in plasmas with thermal electrons, particularly focusing on modifications of the conditions under which UH wave trapping and related low-threshold parametric decay instabilities (PDIs) may occur. A moderately relativistic (MR) dispersion relation for UH waves, valid for electron temperatures up to 25 keV and wave frequencies up to twice the electron cyclotron frequency, is obtained from previous results and shown to reduce to the warm non-relativistic result commonly used for PDI studies at low electron temperatures. The conditions under which MR UH waves propagate are then determined and compared with warm and cold plasma theory, showing a general increase in the electron density and background magnetic field strength at which the UH resonance occurs for finite electron temperatures. We next investigate the impact of the MR corrections on the possibility of UH wave trapping for X-mode electron cyclotron resonance heated (ECRH) plasmas at the ASDEX Upgrade tokamak and scaled versions of the ASDEX Upgrade parameters with core electron temperatures resembling those expected in ITER X-mode ECRH plasmas. The MR UH wave trapping conditions are virtually unchanged for ASDEX Upgrade relative to warm theory, due to the low electron temperatures, while potentially important differences between warm and MR theory exist for ITER-like core electron temperatures; cold theory is found to be insufficient in both cases. Finally, the MR dispersion relation is shown to qualitatively reproduce the PDI thresholds from warm theory for previously studied ASDEX Upgrade cases.

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16

MISRA, A. P., G. BRODIN, M. MARKLUND, and P. K. SHUKLA. "Circularly polarized modes in magnetized spin plasmas." Journal of Plasma Physics 76, no. 6 (September 2, 2010): 857–64. http://dx.doi.org/10.1017/s0022377810000450.

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AbstractThe influence of the intrinsic spin of electrons on the propagation of circularly polarized waves in a magnetized plasma is considered. New eigenmodes are identified, one of which propagates below the electron cyclotron frequency, one above the spin-precession frequency, and another close to the spin-precession frequency. The latter corresponds to the spin modes in ferromagnets under certain conditions. In the non-relativistic motion of electrons, the spin effects become noticeable even when the external magnetic field B0 is below the quantum critical magnetic field strength, i.e. B0 < BQ = 4.4138 × 109T and the electron density satisfies n0 ≫ nc ≃ 1032m−3. The importance of electron spin (paramagnetic) resonance (ESR) for plasma diagnostics is discussed.

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17

Castagna, T. J., J. L. Shohet, K. A. Ashtiani, and N. Hershkowitz. "X‐ray diagnostics for electron cyclotron resonance processing plasmas." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 10, no. 4 (July 1992): 1325–30. http://dx.doi.org/10.1116/1.578247.

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18

Sharma, R. P., Yogesh Kumar Tripathi, and A. Kumar. "Parametric instabilities during electron cyclotron resonance heating in plasmas." Physical Review A 35, no. 8 (April 1, 1987): 3567–70. http://dx.doi.org/10.1103/physreva.35.3567.

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19

Arunasalam, V., P. C. Efthimion, J. C. Hosea, H. Hsuan, and G. Taylor. "Doppler splitting of electron cyclotron absorption resonance in plasmas." Physical Review A 36, no. 8 (October 1, 1987): 3909–11. http://dx.doi.org/10.1103/physreva.36.3909.

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20

Jacob, W., P. Reinke, and W. Möller. "Ion energy distributions from electron cyclotron resonance methane plasmas." Diamond and Related Materials 2, no. 2-4 (March 1993): 378–82. http://dx.doi.org/10.1016/0925-9635(93)90086-h.

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21

Kumar, P., G. Rodrigues, P. S. Lakshmy, D. Kanjilal, and R. Kumar. "Charge-state distributions of metallic electron cyclotron resonance plasmas." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 26, no. 1 (January 2008): 97–102. http://dx.doi.org/10.1116/1.2823486.

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22

Viktorov, M., I. Izotov, E. Kiseleva, A. Polyakov, S. Vybin, and V. Skalyga. "Kinetic whistler instability in a mirror-confined plasma of a continuous ECR ion source." Physics of Plasmas 30, no. 2 (February 2023): 022101. http://dx.doi.org/10.1063/5.0133930.

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Kinetic instabilities in a dense plasma of a continuous electron cyclotron resonance (ECR) discharge in a mirror magnetic trap at the Gasdynamic Ion Source for Multipurpose Operation (GISMO) setup are studied. We experimentally define unstable regimes and corresponding plasma parameters, where the excitation of electromagnetic emission is observed, accompanied by the precipitation of energetic electrons from the magnetic trap. A comprehensive experimental study of the precipitating electron energy distribution and plasma electromagnetic emission spectra, together with theoretical estimates of the cyclotron instability increment proves that under the experimental conditions, the observed instability is related to the excitation of whistler-mode waves, which are a driver of losses of energetic electrons from the magnetic trap. The results of this study are important for the further development of the GISMO electron cyclotron resonance ion source facility and for the improvement of its parameters as an ion source. Also, this research on plasma kinetic instabilities is of fundamental interest and provides experimental tools to simultaneously study plasma electromagnetic activity and corresponding changes in a resonant electron energy distribution.

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23

Robinson, P. A. "Electron cyclotron waves: dispersion and accessibility conditions in isotropic and anisotropic plasmas." Journal of Plasma Physics 35, no. 2 (April 1986): 187–207. http://dx.doi.org/10.1017/s0022377800011272.

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Dispersion and accessibility conditions for electron cyclotron waves are investigated for arbitrary weakly relativistic plasmas and for specific isotropic and loss-cone distributions. The transition between the cold plasma and vacuum dispersion relations is investigated as a function of temperature and density. The behaviour of mode structure (including mode coupling), cut-offs and resonances are also examined. Generalizations are obtained of earlier results which indicate that access by extraordinary waves to regions nearthe cyclotron layer from the low-field side is easier in weakly relativistic plasmas than predicted by cold plasma theory because of a reduction in the cut-off frequency of the fast extraordinary mode. This effect is found to be more pronounced in loss-cone distributions than in isotropic distributions, permitting access at temperatures considerably lower than those predicted in the isotropic case. Extra loss-cone modes are found to appear near the cyclotron frequency in loss-cone plasmas which also exhibit instabilities near the cyclotron harmonics.

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24

Rácz, R., S. Biri, and J. Pálinkás. "Electron cyclotron resonance plasma photos." Review of Scientific Instruments 81, no. 2 (February 2010): 02B708. http://dx.doi.org/10.1063/1.3267289.

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25

Kitamura, N., M. Kitahara, M. Shoji, Y. Miyoshi, H. Hasegawa, S. Nakamura, Y. Katoh, et al. "Direct measurements of two-way wave-particle energy transfer in a collisionless space plasma." Science 361, no. 6406 (September 6, 2018): 1000–1003. http://dx.doi.org/10.1126/science.aap8730.

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Particle acceleration by plasma waves and spontaneous wave generation are fundamental energy and momentum exchange processes in collisionless plasmas. Such wave-particle interactions occur ubiquitously in space. We present ultrafast measurements in Earth’s magnetosphere by the Magnetospheric Multiscale spacecraft that enabled quantitative evaluation of energy transfer in interactions associated with electromagnetic ion cyclotron waves. The observed ion distributions are not symmetric around the magnetic field direction but are in phase with the plasma wave fields. The wave-ion phase relations demonstrate that a cyclotron resonance transferred energy from hot protons to waves, which in turn nonresonantly accelerated cold He+ to energies up to ~2 kilo–electron volts. These observations provide direct quantitative evidence for collisionless energy transfer in plasmas between distinct particle populations via wave-particle interactions.

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26

Chen, Geng Shun, Rui Hong Tong, and An Hua Zhang. "Magnetic Confinement of Plasmas Generated by Coaxial Twinned Electron Cyclotron Resonance (ECR) Discharge." Advanced Materials Research 413 (December 2011): 18–23. http://dx.doi.org/10.4028/www.scientific.net/amr.413.18.

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Effects of the magnetic field on confinement of the coaxial twined ECR plasmas were studied using the Lanmuir probe diagnostic technique. Under the magnetic-mirror confinement, the plasma density was quite high in the vicinity of the axis of the ECR sources but it decreased rapidly with increasing radial distance; while under the cusped field confinement, the density was lower but uniform. The trend was similar for the electron temperature and the plasma potential. This property may be utilized in materials processes to meet different requirements. Key words: Electron cyclotron resonance (ECR), Plasma, Magnetic confinement, The cusped field confinement.PACS: 52.80.Pi, 52.55.-s, 52.70.-m

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27

Narita, Y., E. Marsch, C. Perschke, K. H. Glassmeier, U. Motschmann, and H. Comişel. "Wave–particle resonance condition test for ion-kinetic waves in the solar wind." Annales Geophysicae 34, no. 4 (April 7, 2016): 393–98. http://dx.doi.org/10.5194/angeo-34-393-2016.

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Abstract. Conditions for the Landau and cyclotron resonances are tested for 543 waves (identified as local peaks in the energy spectra) in the magnetic field fluctuations of the solar wind measured by the Cluster spacecraft on a tetrahedral scale of 100 km. The resonance parameters are evaluated using the frequencies in the plasma rest frame, the parallel components of the wavevectors, the ion cyclotron frequency, and the ion thermal speed. The observed waves show a character of the sideband waves associated with the ion Bernstein mode, and are in a weak agreement with the fundamental electron cyclotron resonance in spite of the ion-kinetic scales. The electron cyclotron resonance is likely taking place in solar wind turbulence near 1 AU (astronomical unit).

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28

Mishra, Bharat, Angelo Pidatella, Alessio Galatà, Sandor Biri, Richard Rácz, Eugenia Naselli, Maria Mazzaglia, Giuseppe Torrisi, and David Mascali. "Probing Electron Properties in ECR Plasmas Using X-ray Bremsstrahlung and Fluorescence Emission." Condensed Matter 6, no. 4 (November 5, 2021): 41. http://dx.doi.org/10.3390/condmat6040041.

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A quantitative analysis of X-ray emission from an electron cyclotron resonance (ECR) plasma was performed to probe the spatial properties of electrons having energy for effective ionisation. A series of measurements were taken by INFN-LNS and ATOMKI, capturing spatially and spectrally resolved X-ray maps as well as volumetric emissions from argon plasma. Comparing the former with model generated maps (involving space-resolved phenomenological electron energy distribution function and geometrical efficiency calculated using ray-tracing Monte Carlo (MC) routine) furnished information on structural aspects of the plasma. Similarly, fitting a model composed of bremsstrahlung and fluorescence to the volumetric X-ray spectrum provided valuable insight into the density and temperature of confined and lost electrons. The latter can be fed back to existing electron kinetics models for simulating more relevant energies, consequently improving theoretical X-ray maps and establishing the method as an excellent indirect diagnostic tool for warm electrons, required for both fundamental and applied research in ECR plasmas.

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29

Zerbini, M., P. Buratti, O. Tudisco, G. Giruzzi, A. Bruschi, S. Cirant, G. Granucci, et al. "Electron cyclotron emission diagnostic of high temperature electron cyclotron resonance heated plasmas on Frascati tokamak upgrade." Review of Scientific Instruments 70, no. 1 (January 1999): 1007–10. http://dx.doi.org/10.1063/1.1149519.

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30

Skalyga, V. A., I. V. Izotov, S. V. Golubev, S. V. Razin, A. V. Sidorov, and M. E. Viktorov. "Gasdynamic electron cyclotron ion sources: Basic physics, applications, and diagnostic techniques." Review of Scientific Instruments 93, no. 3 (March 1, 2022): 033502. http://dx.doi.org/10.1063/5.0075486.

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Анотація:

The gasdynamic electron cyclotron resonance (ECR) ion source is a type of the device in which the ionization efficiency is achieved primarily due to a high plasma density. Because of a high particle collision rate, the confinement is determined by a gasdynamic plasma outflow from a magnetic trap. Due to high efficiency of resonant heating, electrons gain energy significantly higher than that in inductively or capacitively coupled plasmas. As a consequence of such a parameter combination, the gasdynamic ECR plasma can be a unique source of low to medium charged ions, providing a high current and an ultimate quality of an ion beam. One of the most demanded directions of its application today is a development of high-current proton injectors for modern accelerators and neutron sources of different intensities. Special plasma parameters allow for the use of diagnostic techniques, traditional for multiply charged ECR plasmas as well as for other types of discharges with a high plasma density. Among the additional techniques, one can mention the methods of numerical simulation and reconstruction of the plasma density and temperature from the parameters of the extracted ion beams. Another point is that the high plasma density makes it possible to measure it from the Stark broadening of hydrogen lines by spectroscopy of plasma emission in the visible range, which is a fairly convenient non-invasive diagnostic method. The present paper discusses the main physical aspects of the gasdynamic ECR plasma, suitable diagnostic techniques, and possibilities and future prospects for its various applications.

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31

KENNETT, M. P., D. B. MELROSE, and Q. LUO. "Cyclotron effects on wave dispersion in pulsar plasmas." Journal of Plasma Physics 64, no. 4 (October 2000): 333–52. http://dx.doi.org/10.1017/s0022377800008862.

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Анотація:

Dispersion in an intrinsically relativistic, one-dimensional, electron–positron pair plasma (a pulsar plasma) is treated exactly, generalizing earlier results that applied in the low-frequency limit and that neglected the cyclotron resonance. The general theory involves two additional relativistic plasma dispersion functions, evaluated at the normal and anomalous Doppler resonances. These two functions are associated with the non-gyrotropic and gyrotropic parts of the response respectively. The functions are evaluated for bell-type and Jüttner distributions. Wave dispersion is discussed for a non-gyrotropic pulsar plasma with a highly relativistic Alfvén speed. Emphasis is placed on crossings of the light line, defined in terms of the parallel phase velocity. Subluminal waves exist only for sufficiently small angles of propagation, and are confined to frequencies below about the mean gyrofrequency of the relativistic particles.

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32

Fukumasa, Osamu, and Masanori Matsumori. "Negative Ion Volume Production in Electron Cyclotron Resonance Hydrogen Plasmas." Japanese Journal of Applied Physics 38, Part 1, No. 7B (July 30, 1999): 4581–85. http://dx.doi.org/10.1143/jjap.38.4581.

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33

Mehlman, G., C. R. Eddy, and S. R. Douglass. "Characterization of electron cyclotron resonance plasmas by vacuum ultraviolet spectroscopy." Journal of Applied Physics 78, no. 11 (December 1995): 6421–26. http://dx.doi.org/10.1063/1.360525.

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34

Ueda, Yoko, and Yoshinobu Kawai. "Role of extraordinary waves in uniform electron cyclotron resonance plasmas." Applied Physics Letters 71, no. 15 (October 13, 1997): 2100–2102. http://dx.doi.org/10.1063/1.120416.

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35

Zhao, H. Y., H. W. Zhao, L. T. Sun, X. Z. Zhang, H. Wang, B. H. Ma, X. X. Li, et al. "Extreme ultraviolet narrow band emission from electron cyclotron resonance plasmas." Review of Scientific Instruments 79, no. 2 (2008): 02C719. http://dx.doi.org/10.1063/1.2814258.

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36

Rossnagel, S. M., K. Schatz, S. J. Whitehair, R. C. Guarnieri, D. N. Ruzic, and J. J. Cuomo. "The effects of substrate potentials on electron cyclotron resonance plasmas." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 9, no. 3 (May 1991): 702–6. http://dx.doi.org/10.1116/1.577347.

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37

Ganguli, A., M. K. Akhtar, R. D. Tarey, and R. K. Jarwal. "Absorption of left-polarized microwaves in electron cyclotron resonance plasmas." Physics Letters A 250, no. 1-3 (December 1998): 137–43. http://dx.doi.org/10.1016/s0375-9601(98)00833-0.

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38

Pool, F. S., and Y. H. Shing. "Deposition of diamondlike films by electron cyclotron resonance microwave plasmas." Journal of Applied Physics 68, no. 1 (July 1990): 62–65. http://dx.doi.org/10.1063/1.347094.

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39

Lee, J. W., S. J. Pearton, C. R. Abernathy, W. S. Hobson, and F. Ren. "Damage introduction in InGaP by electron cyclotron resonance Ar plasmas." Applied Physics Letters 67, no. 21 (November 20, 1995): 3129–31. http://dx.doi.org/10.1063/1.114856.

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40

Zhang, Mei, Lujun Pan, Tsutomu Miyazaki, and Yoshikazu Nakayama. "Carbon Nitride Films Produced Using Electron Cyclotron Resonance Nitrogen Plasmas." Japanese Journal of Applied Physics 36, Part 1, No. 7B (July 30, 1997): 4897–900. http://dx.doi.org/10.1143/jjap.36.4897.

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41

Samukawa, Seiji, Yukito Nakagawa, and Kei Ikeda. "Ion Energy Distributions at the Electron Cyclotron Resonance Position in Electron Cyclotron Resonance Plasma." Japanese Journal of Applied Physics 29, Part 2, No. 12 (December 20, 1990): L2319—L2321. http://dx.doi.org/10.1143/jjap.29.l2319.

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42

Sun, B. J., M. A. Ochando, and D. López-Bruna. "Acoustic mode driven by fast electrons in TJ-II Electron Cyclotron Resonance plasmas." EPL (Europhysics Letters) 115, no. 3 (August 1, 2016): 35001. http://dx.doi.org/10.1209/0295-5075/115/35001.

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43

Cao, L. H., Wei Yu, M. Y. Yu, and C. Y. Yu. "Terahertz Radiation from a Plasma Cylinder with External Radial Electric and Axial Magnetic Fields." Laser and Particle Beams 2021 (January 29, 2021): 1–6. http://dx.doi.org/10.1155/2021/6666760.

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Анотація:

Terahertz (THz) radiation from a plasma cylinder with embedded radial electric and axial magnetic fields is investigated. The plasma density and the electric and magnetic fields are such that the electron plasma frequency is near the electron cyclotron frequency and in the THz regime. Two-dimensional particle-in-cell simulations show that the plasma electrons oscillate not only in the azimuthal direction but also in the radial direction. Spectral analysis shows that the resulting oscillating current pattern has a clearly defined characteristic frequency near the electron cyclotron frequency, suggesting resonance between the cyclotron and plasma oscillations. The resulting far-field THz radiation in the axial direction is also discussed.

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44

MIATSUO, Seitero. "Electron cyclotron resonance plasma process technology." Journal of the Japan Society for Precision Engineering 54, no. 10 (1988): 1877–80. http://dx.doi.org/10.2493/jjspe.54.1877.

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45

Whang, Ki Woong, Seok Hyun Lee, and Ho Jun Lee. "Cryogenic electron cyclotron resonance plasma etching." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 10, no. 4 (July 1992): 1307–12. http://dx.doi.org/10.1116/1.578244.

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46

Mejia, S. R., T. Chau, R. D. McLeod, K. C. Kao, and H. C. Card. "Electron cyclotron resonance microwave-plasma etching." Canadian Journal of Physics 65, no. 8 (August 1, 1987): 856–58. http://dx.doi.org/10.1139/p87-131.

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Electron cyclotron resonance microwave-plasma etching of Si and SiO2 using a (CF4 + O2) gas mixture is investigated in a magnetically confined plasma. High etch rates have been obtained at 0.8 Torr pressure, where the etching mechanism may be due primarily to neutral active species (1 Torr = 133 Pa). The high etch rate can be explained by a high dissociation efficiency of the ECR microwave plasma, and the directionality by carbon deposits associated with it. The magnetic confinement is likely to play a role similar to that of ion and electron screening.

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47

Gaudin, C., L. Hay, J. M. Buzzi, M. Bacal, and M. Lamoureux. "Compact electron cyclotron resonance plasma source." Review of Scientific Instruments 69, no. 2 (February 1998): 890–92. http://dx.doi.org/10.1063/1.1148584.

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48

Nagase, M. "Silicidation using electron cyclotron resonance plasma." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 10, no. 3 (May 1992): 1087. http://dx.doi.org/10.1116/1.586083.

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49

Lorenz, G., P. Baumann, G. Castrischer, I. Kessler, K. H. Kretschmer, and B. Dumbacher. "An electron cyclotron resonance plasma source." Materials Science and Engineering: A 139 (July 1991): 302–6. http://dx.doi.org/10.1016/0921-5093(91)90633-x.

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50

Nishikawa, Kazuyasu, Yoshihiro Kusumi, Tatsuo Oomori, Minoru Hanazaki, and Keisuke Namba. "Platinum Etching and Plasma Characteristics in RF Magnetron and Electron Cyclotron Resonance Plasmas." Japanese Journal of Applied Physics 32, Part 1, No. 12B (December 30, 1993): 6102–8. http://dx.doi.org/10.1143/jjap.32.6102.

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