Готові списки джерел за темами / Dimensional Nanometrology

Добірка наукової літератури з теми "Dimensional Nanometrology"

Автор: Grafiati

Опубліковано: 14 березня 2023

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Статті в журналах з теми "Dimensional Nanometrology"

MISUMI, Ichiko. "Standard Sample in Dimensional Nanometrology." Journal of the Japan Society for Precision Engineering 74, no. 3 (2008): 222–25. http://dx.doi.org/10.2493/jjspe.74.222.

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Yacoot, Andrew, and Ludger Koenders. "Recent developments in dimensional nanometrology using AFMs." Measurement Science and Technology 22, no. 12 (October 25, 2011): 122001. http://dx.doi.org/10.1088/0957-0233/22/12/122001.

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Töpfer, Susanne C. N., Uwe Nehse, and Gerhard Linß. "Automated inspections for dimensional micro- and nanometrology." Measurement 40, no. 2 (February 2007): 243–54. http://dx.doi.org/10.1016/j.measurement.2006.06.010.

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Simão, C., D. Tuchapsky, W. Khunsin, A. Amann, M. A. Morris, and C. M. Sotomayor Torres. "Dimensional and defectivity nanometrology of directed self-assembly patterns." physica status solidi (c) 12, no. 3 (February 25, 2015): 267–70. http://dx.doi.org/10.1002/pssc.201400211.

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Malinovski, I., R. S. França, M. S. Lima, M. S. Bessa, C. R. Silva, and I. B. Couceiro. "High-resolution interferometic microscope for traceable dimensional nanometrology in Brazil." Journal of Physics: Conference Series 733 (July 2016): 012060. http://dx.doi.org/10.1088/1742-6596/733/1/012060.

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Tondare, Vipin N., John S. Villarrubia, and András E. Vladár. "Three-Dimensional (3D) Nanometrology Based on Scanning Electron Microscope (SEM) Stereophotogrammetry." Microscopy and Microanalysis 23, no. 5 (September 18, 2017): 967–77. http://dx.doi.org/10.1017/s1431927617012521.

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Анотація:

AbstractThree-dimensional (3D) reconstruction of a sample surface from scanning electron microscope (SEM) images taken at two perspectives has been known for decades. Nowadays, there exist several commercially available stereophotogrammetry software packages. For testing these software packages, in this study we used Monte Carlo simulated SEM images of virtual samples. A virtual sample is a model in a computer, and its true dimensions are known exactly, which is impossible for real SEM samples due to measurement uncertainty. The simulated SEM images can be used for algorithm testing, development, and validation. We tested two stereophotogrammetry software packages and compared their reconstructed 3D models with the known geometry of the virtual samples used to create the simulated SEM images. Both packages performed relatively well with simulated SEM images of a sample with a rough surface. However, in a sample containing nearly uniform and therefore low-contrast zones, the height reconstruction error was ≈46%. The present stereophotogrammetry software packages need further improvement before they can be used reliably with SEM images with uniform zones.

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Jäger, Gerd, T. Hausotte, Eberhard Manske, H. J. Büchner, R. Mastylo, N. Dorozhovets, R. Füßl, and R. Grünwald. "Nanometrology – Nanopositioning- and Nanomeasuring Machine with Integrated Nanopobes." Materials Science Forum 505-507 (January 2006): 7–12. http://dx.doi.org/10.4028/www.scientific.net/msf.505-507.7.

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The paper describes the operation of a high-precision wide scale three-dimensional nanopositioning and nanomeasuring machine (NPM-Machine) having a resolution of 0,1 nm over the positioning and measuring range of 25 mm x 25 mm x 5 mm. The NPM-Machine has been developed by the Technische Universität Ilmenau and manufactured by the SIOS Meßtechnik GmbH Ilmenau. The machines are operating successfully in several German and foreign research institutes including the Physikalisch-Technische Bundesanstalt (PTB). The integration of several, optical and tactile probe systems and scanning force microscopes makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and water inspection, circuit testing as well as measuring optical and mechanical precision work pieces such as micro lens arrays, concave lenses, mm-step height standards.

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Jorio, Ado. "Raman Spectroscopy in Graphene-Based Systems: Prototypes for Nanoscience and Nanometrology." ISRN Nanotechnology 2012 (December 6, 2012): 1–16. http://dx.doi.org/10.5402/2012/234216.

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Raman spectroscopy is a powerful tool to characterize the different types of sp2 carbon nanostructures, including two-dimensional graphene, one-dimensional nanotubes, and the effect of disorder in their structures. This work discusses why sp2 nanocarbons can be considered as prototype materials for the development of nanoscience and nanometrology. The sp2 nanocarbon structures are quickly introduced, followed by a discussion on how this field evolved in the past decades. In sequence, their rather rich Raman spectra composed of many peaks induced by single- and multiple-resonance effects are introduced. The properties of the main Raman peaks are then described, including their dependence on both materials structure and external factors, like temperature, pressure, doping, and environmental effects. Recent applications that are pushing the technique limits, such as multitechnique approach and in situ nanomanipulation, are highlighted, ending with some challenges for new developments in this field.

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Krumrey, Michael, Gudrun Gleber, Frank Scholze, and Jan Wernecke. "Synchrotron radiation-based x-ray reflection and scattering techniques for dimensional nanometrology." Measurement Science and Technology 22, no. 9 (August 8, 2011): 094032. http://dx.doi.org/10.1088/0957-0233/22/9/094032.

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Endres, J., A. Diener, M. Wurm, and B. Bodermann. "Investigations of the influence of common approximations in scatterometry for dimensional nanometrology." Measurement Science and Technology 25, no. 4 (March 5, 2014): 044004. http://dx.doi.org/10.1088/0957-0233/25/4/044004.

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Більше джерел

Дисертації з теми "Dimensional Nanometrology"

Mrinalini, R. Sri Muthu. "A Probing System with Replaceable Tips for Three Dimensional Nano-Metrology." Thesis, 2017. http://etd.iisc.ernet.in/2005/3711.

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With increase in the number of three dimensional (3-D) nanometer-scale objects that are being either fabricated or studied, there is a need to accurately characterize their geometry. While the Atomic force microscope (AFM) is a versatile tool for performing nano-metrology, it suffers from issues of poor accessibility of 3-D features and inability to measure 3-D forces that limit its applicability in 3-D nano-metrology. This thesis investigates the design and development of a novel probing system based on AFM that improves accessibility and enables direct measurement of 3-D forces acting on the AFM tip. Two approaches are investigated to address the issue of poor accessibility. The first is to develop a novel system that enables in-situ replacement and reuse of specialized AFM tips that improve accessibility, and the second is to design a special AFM tip that can actively re-orient about two independent axes. In order to perform in-situ tip replacement, a liquid meniscus based micro-gripper is developed and integrated on to a conventional AFM probe. The stiffness of the gripper is analyzed and shown to be adequately high along all three axes for AFM imaging to be performed. Tip replacement and re-use are both experimentally demonstrated by employing a novel tip-exchange station. The replaced tips are employed to show artifact-free AFM imaging of a standard calibration grating in both tapping-mode and contact-mode. To actively re-orient a conventional tip, a novel magnetically-actuated micro-scale ball-and-socket joint is integrated onto an AFM probe. The quasi-static behavior of the joint is experimentally characterized, and the ability of the tip to independently re-orient about two axes is demonstrated. The achieved range is about +/- 90 degrees about both X- and Y-axes. In order to realize the potential of the proposed probes for 3-D nano-metrology, an AFM is developed in-house that possesses the capability to make direct measurement of 3-D forces. Optimization of the measurement system to achieve identical sensitivities and resolution along all three axes is studied. Subsequently, the necessary electronics for measurement, actuation and control are developed. All the subsystems are experimentally calibrated and integrated. The overall AFM is shown to have a resolution of about 0.2 nm when operated in tapping-mode. The developed AFM is employed to showcase the following applications: characterization of the coefficient of kinetic friction of Muscovite mica, force controlled nano-scribing on polymethyl methacrylate (PMMA) and tapping-mode imaging of a calibration grating with the developed re-orientable AFM probe. Finally, the unique ability of the re-orientable AFM probe to control its tip-orientation is employed to develop a nanometer-scale coordinate measurement machine (CMM). The developed nano-CMM is shown to access the vertical wall of a sample and obtain its topography.

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Частини книг з теми "Dimensional Nanometrology"

Villarrubia, John S. "Tip Characterization for Dimensional Nanometrology." In Applied Scanning Probe Methods, 147–68. Berlin, Heidelberg: Springer Berlin Heidelberg, 2004. http://dx.doi.org/10.1007/978-3-642-35792-3_5.

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Danzebrink, Hans-Ulrich, Frank Pohlenz, Gaoliang Dai, and Claudio Dal Savio. "Metrological Scanning Probe Microscopes - Instruments for Dimensional Nanometrology." In Nanoscale Calibration Standards and Methods, 1–21. Weinheim, FRG: Wiley-VCH Verlag GmbH & Co. KGaA, 2006. http://dx.doi.org/10.1002/3527606661.ch1.

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Koenders, L., T. Dziomba, P. Thomsen-Schmidt, and G. Wilkening. "Standards for the Calibration of Instruments for Dimensional Nanometrology." In Nanoscale Calibration Standards and Methods, 243–58. Weinheim, FRG: Wiley-VCH Verlag GmbH & Co. KGaA, 2006. http://dx.doi.org/10.1002/3527606661.ch18.

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Barsic, Gorana, Vedran Simunovic, and Marko Katic. "Ensuring Measurement Unity in the Field of Dimensional Nanometrology." In DAAAM Proceedings, 0841–42. DAAAM International Vienna, 2011. http://dx.doi.org/10.2507/22nd.daaam.proceedings.412.

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Тези доповідей конференцій з теми "Dimensional Nanometrology"

Danzebrink, H. U., G. Dai, F. Pohlenz, T. Dziomba, S. Butefisch, J. Flugge, and H. Bosse. "Dimensional nanometrology at PTB." In 2012 IEEE International Instrumentation and Measurement Technology Conference (I2MTC). IEEE, 2012. http://dx.doi.org/10.1109/i2mtc.2012.6229183.

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Martinez, Pol, Aitor Matilla, Cristina Cadevall, Carlos Bermudez, André Felgner, and Roger Artigas. "Residual flatness error correction in three-dimensional imaging confocal microscopes." In Optical Micro- and Nanometrology, edited by Christophe Gorecki, Anand K. Asundi, and Wolfgang Osten. SPIE, 2018. http://dx.doi.org/10.1117/12.2306903.

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Isoda, Kazutaka, Mizue Ebisawa, Yukitoshi Otani, and Kohki Nagata. "Numerical analysis of angle-selective one-dimensional periodic structure for building energy management." In Optical Micro- and Nanometrology, edited by Christophe Gorecki, Anand K. Asundi, and Wolfgang Osten. SPIE, 2018. http://dx.doi.org/10.1117/12.2307306.

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Yacoot, Andrew, Richard Leach, Ben Hughes, Claudiu Giusca, Christopher Jones, and Alan Wilson. "Dimensional nanometrology at the National Physical Laboratory." In International Symposium on Instrumentation Science and Technology, edited by Jiubin Tan and Xianfang Wen. SPIE, 2008. http://dx.doi.org/10.1117/12.807994.

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Huang, Jiebin, Peng Han, Chaoxiong Chen, and Guanling Yang. "Multiple channeled filtering in one-dimensional photonic quantum-well and super-lattice structures." In Nanophotonics, Nanostructure, and Nanometrology II. SPIE, 2007. http://dx.doi.org/10.1117/12.757120.

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Lazar, Josef, Miroslava Hola, Jan Hrabina, Jindřich Oulehla, Ondřej Číp, Miloslav Vychodil, Petra Sedlář, and Milan Provazník. "Advanced interferometry systems for dimensional measurement in nanometrology." In Optics and Measurement Conference 2014, edited by Jana Kovačičinová and Tomáš Vít. SPIE, 2015. http://dx.doi.org/10.1117/12.2086613.

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Dziomba, Thorsten, Ludger Koenders, and Günter Wilkening. "Standardization in dimensional nanometrology: development of a calibration guideline for Scanning Probe Microscopy." In Optical Systems Design 2005. SPIE, 2005. http://dx.doi.org/10.1117/12.626018.

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