Rozprawy doktorskie na temat „SiNx film”
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Lee, Hyun Ho. "A thin film transistor driven microchannel device". Texas A&M University, 2004. http://hdl.handle.net/1969.1/1439.
Pełny tekst źródłaBeche, Eric. "Etude par spectrométries de photoémission (XPS) et d'électrons AUGER (AES) des environnements chimiques dans des films minces amorphes à base de silicium SiCx, SiNx, SiOx, SiCxNy, SiOxNy hydrogénés ou non". Besançon, 1996. http://www.theses.fr/1996BESA2057.
Pełny tekst źródłaThe aim of this work was the study by X. P. S. And A. E. S. Of C. V. D. Or P. V. D. Silicon based amorphous thin films : SiCx, SiNx , SiOx, SiCxNy, SiOxNy in some cases hydrogenated which were deposited on low temperatures substrates. The local orders around silicon or carbon atoms were investigated by the examination of Si KLL, Si LVV and C KVV line shapes and the decomposition of core level photoelectron peaks Si 2p and C 1s. The components extracted from the decomposition of the Si 2p peaks were attributed to various tetrahedral environments of silicon and their distribution were compared to the distributions calculated from two models describing the silicon amorphous phases : The Random Bonding Model (R. B. M. ) and the Random Mixture Model (R. M. M. ). For the SiCx:H films, we have shown that the chemical environments of Si and C change with the substrate temperature. For the SiNx:H and SiOxNy:H films, our results show that the microstructure can be described by the Random Bonding Model. We have shown that C-N bonds might be present in nitrogen rich SiCxNy:H films. In these films, X. P. S. Results (Si KLL line shapes) revealed the presence of various environments of silicon. For SiOxP. V. D. Deposits, our results show a significant difference between the distribution of the chemical environments of silicon deduced from Si 2p decomposition and those calculated from the Random Bonding Model (R. B. M. ). This work is a contribution for a global approach of the amorphous structure of silicon based compounds
Maurício, Elsa Sofia Belchior. "A divina tragédia-sinais da cultura ocidental no filme Se7en de David Fincher". Master's thesis, Instituições portuguesas -- UL-Universidade de Lisboa -- -Faculdade de Letras, 2000. http://dited.bn.pt:80/29264.
Pełny tekst źródłaDanneman, Lundkvist Manne. "Neoformalistisk analys av Sin City". Thesis, Örebro University, Department of Humanities, 2007. http://urn.kb.se/resolve?urn=urn:nbn:se:oru:diva-1556.
Pełny tekst źródłaSyftet med min analys är att se via en neoformalistisk stilanalys vilka grepp som filmen Sin City har hämtat från film noir. Jag ser även via intertextuella kopplingar vad Sin City har hämtat från serietidningen som filmen baseras på. Fokus i analysen ligger dock på fyra grepp som jag anser är de mest klassiska film noirgreppen; Ljussättning, Femme fatale, en mörk värld och protagonisten. Jag kommer bl.a. fram till att Sin Citys använder sig av klassiska film noirstilgrepp men drar dem till det extrema, kanske för att passa in på den serievärld som filmen är länkad till. Filmen använder sig även flitigt av hypermarkerade objekt för att leda in åskådaren på mer estetiska tankebanor.
Chapman, Sharon Jeanette. "Classical Hollywood film directors' female-as-object obsession and female directors' cinematic response: A deconstructionist study of six films". CSUSB ScholarWorks, 1996. https://scholarworks.lib.csusb.edu/etd-project/1258.
Pełny tekst źródłaBarnell, Anton, i Fredrik Bergström. "Historielärare och film - Lärares erfarenheter av att använda film i historieundervisningen". Thesis, Malmö universitet, Fakulteten för lärande och samhälle (LS), 2018. http://urn.kb.se/resolve?urn=urn:nbn:se:mau:diva-28773.
Pełny tekst źródłaKulbay, Gülbeden. "Film som psykomagi : En analys av clownfiguren i Alejandro Jodorowskys film ”Poesía sin fin”". Thesis, Högskolan Dalarna, Bildproduktion, 2021. http://urn.kb.se/resolve?urn=urn:nbn:se:du-36510.
Pełny tekst źródłaStrong, Richard Jeremy. "Six English novels adapted for the cinema". Thesis, University of Stirling, 1999. http://hdl.handle.net/1893/2605.
Pełny tekst źródłaGustafsson, Anton, i Kathinka Lindhe. "Filmen "Dylans Historia" möter sin publik : - en receptionsstudie". Thesis, Högskolan i Halmstad, Sektionen för hälsa och samhälle (HOS), 2012. http://urn.kb.se/resolve?urn=urn:nbn:se:hh:diva-19823.
Pełny tekst źródłaTeli, Lorenzo <1994>. "中意合拍片 Present Scenarios for Sino-Italian Film Co-production". Master's Degree Thesis, Università Ca' Foscari Venezia, 2019. http://hdl.handle.net/10579/15447.
Pełny tekst źródłaVecchi, Pierpaolo. "Caratterizzazione elettrica e spettroscopia superficiale di film sottili a base di silicio". Bachelor's thesis, Alma Mater Studiorum - Università di Bologna, 2018. http://amslaurea.unibo.it/16338/.
Pełny tekst źródłaDong, Jichen. "Project Shanghai: An Experimental Short Film Commenting on Income Inequality in Shanghai". Scholarship @ Claremont, 2019. https://scholarship.claremont.edu/cmc_theses/2137.
Pełny tekst źródłaTakezawa, Hideharu. "Study on amorphous SiOχ film anode prepared by reactive evaporation for lithium-ion batteries". Kyoto University, 2017. http://hdl.handle.net/2433/227630.
Pełny tekst źródłaStrong, Austin Michael. "Lean Six Sigma's Impact on Firm Innovation Performance". BYU ScholarsArchive, 2018. https://scholarsarchive.byu.edu/etd/6877.
Pełny tekst źródłaVollbrecht, Ralf. "Konzepte der Filmbildung und der pädagogische Widerwille gegen den Seh-Sinn". Saechsische Landesbibliothek- Staats- und Universitaetsbibliothek Dresden, 2016. http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-195893.
Pełny tekst źródłaCommon concepts of film education are presented and discussed in their pedagogical implications. In particular, the canon concept is presented as well as the approach favored by the author to understand films as a subject of a narrative educational theory
Lebar, Sanders Anna. ""Man åldras för varje produktion!" : Några filmarbetares upplevelser av hälsotillstånd i sin yrkesutövning". Thesis, Högskolan Väst, Avd för medier och design, 2013. http://urn.kb.se/resolve?urn=urn:nbn:se:hv:diva-5916.
Pełny tekst źródłaAltier, Infantes Alexandra. "Diffusive Gradients in Thin-films (DGT) beyond perfect-sink conditions". Doctoral thesis, Universitat de Lleida, 2018. http://hdl.handle.net/10803/585874.
Pełny tekst źródłaLa presencia de elementos metálicos en el medio ambiente está fuertemente influenciada por actividades antropogénicas entre las que emerge el uso de nuevos materiales basados en nanopartículas metálicas y óxidos metálicos. La disponibilidad de elementos metálicos y sus propiedades tóxicas o nutritivas están determinadas por un conjunto de procesos físico-químicos de carácter dinámico, donde la especiación en condiciones de equilibrio, a pesar de su amplio uso, representa sólo un caso límite. La finalidad de este trabajo ha sido la medida de los flujos de metales disponibles a diferentes escalas de tiempo y espacio mediante la técnica analítica dinámica DGT (Diffusive Gradient in Thin-films) así como el desarrollo de modelos fisicoquímicos adecuados para la interpretación de los resultados. El marco interpretativo de los resultados DGT se ha completado con la inclusión de efectos escasamente descritos en la literatura reciente, tales como la influencia de los efectos de competición, equilibrio o saturación de la resina además de la relevancia de los fenómenos electrostáticos a bajas fuerzas iónicas. Se presenta el análisis de estos fenómenos, con expresiones analíticas aproximadas deducidas a partir de la formulación del problema y se aplican a sistemas experimentales para observar la validez de dichas aproximaciones. Una vez abordado el trabajo de sistemas simples con sólo iones metálicos, se han estudiado sistemas con un único ligando y sistemas con mezclas de ligandos. Con estos sistemas se ha analizado hasta qué punto la contribución de los complejos a la disponibilidad depende de la composición del sistema, corroborándose que medidas del grado de labilidad en sistemas con un único complejo pueden predecir el flujo en las mezclas. Se reportan los mecanismos fisicoquímicos que describen la influencia del efecto mezcla sobre el grado de labilidad de un complejo determinado. Debido a las variaciones espaciales y temporales que pueden sufrir los iones metálicos en aguas naturales, la última parte del estudio se ha centrado en evaluar la capacidad de respuesta de la técnica DGT para medir fluctuaciones en la concentración. Este estudio ha demostrado que además de proporcionar concentraciones promediadas con el tiempo en condiciones relativamente simples, esta técnica es capaz de determinar concentraciones representativas en una amplia gama de condiciones naturales.
The presence of heavy metals in the environment is strongly influenced by anthropogenic activities due to the emerging use of new materials based on metallic nanoparticles or metal oxides. The speciation of metal ions plays a fundamental role in the determination of bioavailability, ecotoxicity and in general in its circulation in natural media. The availability of metal ions and their toxic or nutritive properties are determined by a set of physical-chemical processes, where equilibrium conditions, despite its widespread use, only represent a limiting case. The aim of this work was to measure the flux of available metals at different time and space scales through the dynamic analytical technique DGT (Diffusive Gradient in Thin-films). The interpretative framework of the DGT results has also been completed with the inclusion of effects scarcely described in the recent literature, such as the influence of competition, saturation of the resin sites, kinetic effects in the binding of the target analyte to the resin domain or the relevance of electrostatic phenomena at low ionic strengths. Approximate analytical expressions were deduced from the basic formulation and applied to experimental systems to check the agreement with the experimental accumulations. Once the study of simple systems with only metal ions has been addressed, systems with a single ligand or systems with a mixture of complexes have been studied. These systems were analyzed to test if the composition of the system modifies the availability of the complexes. As a conclusion of this work, it was shown that the lability degree of complexes measured in single ligand systems can be used to approximately predict the accumulation in mixtures. A physicochemical explanation of the mechanism by which the lability of a complex changes in a mixture was reported. Since spatial and temporal variations in metal concentrations are common in natural waters, the last part of this study has focused on the assessment of the response capabilities of the DGT technique to measure concentration fluctuations. This study has shown that besides it provides time-weighted average concentrations over time for relatively simple conditions, this technique is able to determine accurate and representative metal concentrations in a wide range of natural conditions.
De, Voghelaer Nathalie. "Cinéma, mémoire et imaginaire collectif : ou Comment les réalisateurs allemands représentent le génocide dans les films de fiction entre 1945 et 1960". Lille 3, 1999. http://www.theses.fr/1999LIL3A008.
Pełny tekst źródłaOvcharenko, A. P., V. I. Bilozertseva, D. T. Tranh, D. A. Gaman i H. M. Khlyap. "New Aspects of Design of Wide-Band Interference Coatings Based on Six-Layer Period". Thesis, Sumy State University, 2012. http://essuir.sumdu.edu.ua/handle/123456789/35457.
Pełny tekst źródłaKreische, Alexander [Verfasser], Kay [Akademischer Betreuer] Kirchmann i Kay [Gutachter] Kirchmann. "Zwischen Präsenz und Lesbarkeit - Der Diskurs zu Buster Keaton im Spannungsfeld von Sinn und Sinnlichkeit / Alexander Kreische ; Gutachter: Kay Kirchmann ; Betreuer: Kay Kirchmann". Erlangen : Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU), 2021. http://d-nb.info/1240903413/34.
Pełny tekst źródłaPitton, Yves. "Etude de l'adhésion de films minces SiOx déposés sur polyéthylène téréphtalate /". [S.l.] : [s.n.], 1996. http://library.epfl.ch/theses/?nr=1553.
Pełny tekst źródłaBucher, Eliane. "Welches sind die Informationsbedürfnisse von Wirtschaftsjournalisten auf Zeitungsredaktionen?" St. Gallen, 2008. http://www.biblio.unisg.ch/org/biblio/edoc.nsf/wwwDisplayIdentifier/02602761002/$FILE/02602761002.pdf.
Pełny tekst źródłaAchlan, Moustafa. "Surface Plasmon Polariton and Wave Guide Modes in a Six Layer Thin Film Stack". Thesis, Université Paris-Saclay (ComUE), 2018. http://www.theses.fr/2018SACLS109.
Pełny tekst źródłaIn this thesis, we investigate the optical properties of a six-layer stack (air-Au-SiO₂-Au-Ti-glass). The interfaces are flat and the modeling is performed using elementary Fresnel expressions at the interface and plane wave propagation in the layers. Two models are used where the sample is: i) excited by a source at infinity (excitation by source at infinity (ESI)); ii) excited by a local source. In the experiments we are modeling this source consists of the inelastic tunneling electrons from a scanning tunneling microscope (STM). In our modeling this source is replaced by a vertical oscillating dipole. Using these two models one calculates the reflected (reflectance) and the transmitted (transmittance) flux from a source at infinity and the transmitted flux of a local source. Surface plasmon polariton (SPP) and wave guide (WG) modes may be identified in the reflectance, transmittance and transmitted flux. In a particular wavelength domain the SPP and WG repel each other giving rise to an avoided crossing. The choice of the gold (Au) and silica (SiO₂) thicknesses of the six-layer stack is guided by two requirements: high amplitude of the observable and wide wavelength dependence of the in-plane wave vector. We also study the influence of the gold and silica thicknesses on the observables. We find that the observables are significant for dAu[10, 90 nm] for the three and dAu[10, 50 nm] for six layer stacks and this predictive study guided the choice of the experimental sample thicknesses. The wave guide mode appears for dSiO₂ >190 nm. The electric field as a function of the penetration coordinate z is calculated in order to characterize the location of the field in the stack and to assign the nature of the modes. We observe that for the SPP the electric field is confined at the Au-air interface whereas, the electric fields corresponding to the WG mode are confined inside SiO₂ layer. Our calculations presented in this work are in good agreement with the experimental measurements performed in our group
Wharton, David [Verfasser], Rüdiger [Akademischer Betreuer] Korff i Harald [Akademischer Betreuer] Hundius. "Language, Orthography and Buddhist Manuscript Culture of the Tai Nuea - an apocryphal jātaka text in Mueang Sing, Laos / David Wharton ; Rüdiger Korff, Harald Hundius". Passau : Universität Passau, 2018. http://d-nb.info/1152077384/34.
Pełny tekst źródłaWenger, Magnus, i Jonathan Webb. "Med barnasinnet kvar : En kartläggning av hur Nordisk Film kan marknadsföra sina produkter mot nya marknadssegment". Thesis, Stockholm University, School of Business, 2005. http://urn.kb.se/resolve?urn=urn:nbn:se:su:diva-6107.
Pełny tekst źródłaDenna uppsats har skrivits i syfte att undersöka hur Nordisk Film, distributören av Sonys spelprodukter i Sverige, kan använda sin marknadsföring för att attrahera nya segment av marknaden. Nordisk Film har sedan en tid distribuerat ett flertal spel, som till sin utformning skiljer sig från majoriteten av det befintliga utbudet på tv-spelsmarknaden. Dessa spel riktar sig mot äldre användare, varför vi ansett det intressant att studera vilka möjligheter detta leder till ur företagets perspektiv. Detta har gjorts med utgångspunkt ur etablerade teorier och två statistiska undersökningar vilka utformats i både explorativt och deskriptivt syfte. Den första undersökningen utfördes på ett större urval och avsåg ta reda på generella åsikter samt kunskap om tv-spel i allmänhet och vissa specifika speltitlar i synnerhet. Vår andra undersökning hade ett betydligt mindre urval och med denna ville vi istället se hur respondenternas inställning förändras efter att ha provspelat två spel av detta slag. Resultaten av undersökningarna visade att dessa nya spel var mycket uppskattade av våra respondenter, samt att inställningen till tv-spel förbättrats efter provspelning, varför de kan anses ge Nordisk Film goda förutsättningar att nå nya kunder. Våra slutsatser och rekommendationer utifrån detta är att företaget bör marknadsföra dessa spel än mer aktivt mot denna målgrupp med fokus på deras unika attribut, för att på så sätt öka den sociala acceptansen för tv-spel. Därigenom bör företaget ha goda möjligheter att attrahera detta segment av marknaden att köpa deras produkter.
Hoaas, Terje. "Takeshi Kitano : i sin egen beat /". Oslo : Institutt for medier og kommunikasjon, Universitetet i Oslo, 2008. http://www.duo.uio.no/publ/mediekomm/2008/80551/HoaasxTerje_Masteroppgave_V2008.pdf.
Pełny tekst źródłaAhammou, Brahim. "Control of the mechanical and optical properties of SiNx-based films for optical and strain engineering applications". Electronic Thesis or Diss., Université de Rennes (2023-....), 2023. https://ged.univ-rennes1.fr/nuxeo/site/esupversions/1e39bf0e-e06f-4457-a06f-b08b11c3bef6.
Pełny tekst źródłaDue to their attractive properties, silicon nitride (SiNx) based films have been recognized as essential dielectric films in the microelectronic and optoelectronic industries. In this PhD thesis, we describe how we can control the refractive index and the mechanical properties of SiNx and silicon oxynitride (SiOyNx) films by tuning the deposition process parameters. We use two different plasma-enhanced chemical vapor deposition reactors: a standard capacitively coupled reactor with radiofrequency excitation and an electron cyclotron resonance reactor with microwave excitation. We discuss the fabrication and characterization of multilayer structures as an optical application of our thin films. We focus on characterizing and understanding these thin films’ optical properties through spectroscopic ellipsometry. We also study their mechanical properties experimentally using the wafer curvature measurement technique, microstructure fabrication, and nanoindentation measurements. Finally, we show accurate measurements of the strain distribution induced within GaAs wafers when such thin films are structured in the shape of elongated stripes of variable width, using standard optical lithography and plasma etching. For this, we map the anisotropic deformation, measuring the degree of polarization of the spectrally integrated photoluminescence (PL) generated within GaAs by excitation with a red laser. PL from bulk cubic semiconductors such as GaAs is unpolarized, whereas anisotropic strain produces some degree of polarization. These maps were measured either from the semiconductor surface or from cleaved cross-sections. They provide a detailed and complete image of the crystal deformation in the vicinity of the structured stressor film. Then, we performed some finite element simulations trying to reproduce the experimental maps. We believe our simulation scheme is helpful for designing the photonic components, e.g., to predict the local changes in the refractive index due to the photoelastic effect
Piao, Jinchun. "Study on Solution-Based Formation of Device-Element Thin Films at Low Temperatures". 京都大学 (Kyoto University), 2012. http://hdl.handle.net/2433/161017.
Pełny tekst źródłaSolis, Israel. "(Re)Creating a Hero's Narrative through Music: Different Musical Landscapes in Six Live Action Batman Films". Diss., The University of Arizona, 2013. http://hdl.handle.net/10150/311589.
Pełny tekst źródłaChen, Cheng. "Anchoring Transitions of Liquid Crystals on Large Angle Deposited SiOx Thin Films". Kent State University / OhioLINK, 2006. http://rave.ohiolink.edu/etdc/view?acc_num=kent1164139845.
Pełny tekst źródłaEriksson, Johanna, i Sofia Wiren. "Hur man rör någon till tårar : En studie om vilka berättarkomponenter som behövs för att beröra sina tittare". Thesis, Högskolan Dalarna, Bildproduktion, 2018. http://urn.kb.se/resolve?urn=urn:nbn:se:du-27476.
Pełny tekst źródłaKaspersen, Kristian. "Madonna- en missionär för sin samtid? : en analys av religionens återkomst utifrån popartisten Madonna". Thesis, Södertörn University College, School of Gender, Culture and History, 2008. http://urn.kb.se/resolve?urn=urn:nbn:se:sh:diva-1685.
Pełny tekst źródłaZapf, Michael [Verfasser], Michael [Gutachter] Sing i Jean [Gutachter] Geurts. "High-Z Perovskite Oxides: Thin Film Deposition and Spectroscopic Investigations / Michael Zapf ; Gutachter: Michael Sing, Jean Geurts". Würzburg : Universität Würzburg, 2019. http://d-nb.info/1193051169/34.
Pełny tekst źródłaErni, Barbara. "Sind Gute Dienste überholt? Würdigung einer Tradition aus schweizerischer Perspektive". St. Gallen, 2005. http://www.biblio.unisg.ch/org/biblio/edoc.nsf/wwwDisplayIdentifier/02605749001/$FILE/02605749001.pdf.
Pełny tekst źródłaDelmotte, Franck. "Dépôts de films minces SiNx assistés par plasma de haute densité. Etudes corrélées de la phase gazeuse, de l'interface SiNx/InP et de la passivation du transistor bipolaire à hétérojonction InP". Phd thesis, Université Paris Sud - Paris XI, 1998. http://tel.archives-ouvertes.fr/tel-00430327.
Pełny tekst źródłaNordström, Johanna. "Lyckliga i alla sina dagar? : Makt, kön och heterosexualitet i tre Disneyfilmer". Thesis, Umeå universitet, Institutionen för kultur- och medievetenskaper, 2015. http://urn.kb.se/resolve?urn=urn:nbn:se:umu:diva-101727.
Pełny tekst źródłaBontrager, Nicholas A. "The Conflation of Image Making and Image Fixation in Six Acts". The Ohio State University, 2011. http://rave.ohiolink.edu/etdc/view?acc_num=osu1307722193.
Pełny tekst źródłaHeller, Fabian. "Weshalb sind die Goldreserven der Zentralbanken im internationalen Vergleich so unterschiedlich?" St. Gallen, 2006. http://www.biblio.unisg.ch/org/biblio/edoc.nsf/wwwDisplayIdentifier/01050426001/$FILE/01050426001.pdf.
Pełny tekst źródłaGamboni, Claudia. "Sind Mikrokredite ein wirksames Mittel gegen Armut? Ein Cross-Country-Vergleich /". St. Gallen, 2006. http://www.biblio.unisg.ch/org/biblio/edoc.nsf/wwwDisplayIdentifier/02604593002/$FILE/02604593002.pdf.
Pełny tekst źródłaChi, Miao. "La fabrication de l’histoire : la seconde guerre sino-japonaise au cinéma sous Mao Zedong, 1949-1966". Electronic Thesis or Diss., Université de Lorraine, 2020. http://www.theses.fr/2020LORR0208.
Pełny tekst źródłaThe staging of the Second Sino-Japanese War represents a delicate issue in China, since this war marks a turning point in the interplay of political powers within the country, contributing to the seizure of power by the Chinese Communist Party in 1949. The subject of this work is the study of Chinese films reconstructing the history of the Second Sino-Japanese War from 1949 to 1966. The understanding of this issue first involves the analysis of political interference in cinema and the reaction of professionals. Then, the study addresses more specifically the creations as such, the messages of propaganda films about war and the ways in which cinema then makes use of war. Two methodologies are applied to achieve this. Firstly, the socio-political analysis focuses on the exploration of the political, ideological and social context related to the production of Chinese cinema (1949-1966). With the introduction of Foucault’s theory of discourse in the analysis of political texts and the primary sources of articles by film professionals, we shed light on the order of cinematic discourse established in the “Talks at the Yan’an Conference on Literature and Art” written by Mao Zedong. We also highlight the confrontation and conflict between the film world and the Party leadership during this period. Secondly, film analysis allows us to understand interpretations and censorship, and to examine the evolution of cinematic discourse. Our study focuses on the decoding of the anti-Japanese war film as a complex artistic product combining image, dialogue and sound, with the aim of uncovering the political and cultural interpretations of the staging of the war. We also reveal the concrete aspects that characterise the political influence and hindrance on the image of the body in anti-Japanese war films and their evolution under Mao
Ramasamy, Celambarasan. "The design, production and analysis of a realistic stereo CG short film on a six month budget". Connect to this title online, 2009. http://etd.lib.clemson.edu/documents/1249066511/.
Pełny tekst źródłaOu, Jong-Chyan, i 歐仲乾. "Grow the SiNx thin film by pulsed laser deposition and study the characteristic of phase-shifting mask by this SiNx thin film". Thesis, 1998. http://ndltd.ncl.edu.tw/handle/85511598417447059705.
Pełny tekst źródłaChang, En-Tai, i 張恩泰. "The Transmittance Study of SiNx Film for Display Technology Application". Thesis, 2017. http://ndltd.ncl.edu.tw/handle/52738401161918957985.
Pełny tekst źródła國立中興大學
光電工程研究所
105
This experiment aims to grow low stress silicon nitride film on glass substrate with Plasma Enhanced Chemical Vapor Deposition (PECVD), discuss the physical characteristics of silicon nitride film, and further apply the silicon nitride film to TFT-LCD. It intends to confirm the overall transmittance promotion to reduce the backlight brightness for better power saving in order to enhance the product use time. The transmittance of silicon nitride film is determined by the internal bonding, Si – rich (silicon rich) or N - rich (Nitrogen-rich). NH3 and SiH4 in the processing vapor and the power present great effects on film characteristics. Both deposited film pressure and deposited film spacing also show great influence. The increasing power would result tensile stress moving towards compressive stress and increasing ion bombardment effect. Increasing SiH4 gas flow would accelerate the deposition speed. Although it could neutralize and resist ion bombardment effect, the transmittance (Tr%) would be reduced, and film stress would move towards tensile stress. Increasing pressure flow would accelerate the deposition speed as well as neutralize ion bombardment effect. Film stress, at the moment, moves towards tensile stress, but the refractive index reduces. Accordingly, there is not merely a factor in film transmittance. Power, pressure, deposited film spacing, gas flow or gas ratio, and temperature in the process would affect the final characteristics of silicon nitride film.
CHENG, KA-CHUN, i 鄭嘉俊. "Structural stabilization effects of SiNx/Si thin film anodes for lithium ion batteries". Thesis, 2019. http://ndltd.ncl.edu.tw/handle/2g69g9.
Pełny tekst źródła逢甲大學
材料科學與工程學系
107
In this report, we study the electrochemical performance of amorphous silicon as the anode for lithium ion batteries. Silicon has high theatrical capacity of 4200 mAh/g toward lithium metal. However, Li insertion/Li extraction of silicon electrode causes huge volume expansion. In this study, radio frequency (RF) magnetron sputtering is used to deposit amorphous silicon thin films on nickel foam current collectors. This flexible three-dimensional structure is found to relieve stress caused by the volume expansion. Furthermore, we sputter a SiNx thin film on silicon to be a buffer layer. From the potential window of 1.2 V - 0.01 V, long cycle test have been executed to investigate the electrochemical performances of various N-Si coated Si-based lithium ion batteries anode materials. The cycling stability is enhanced via nitride layer coating as silicon nitride films are converted to Li3N with covered Si thin films. After 300th cycle, the capacity retention is 96% and the discharge capacity is 1380 mAh/g due to low charge transfer resistance resulted from silicon nitride films. The results reveal that the inactive phase could be a good buffer layer for Si anodes.
Lan, Shun-Li, i 藍順醴. "A Study on Copper Conductive-Bridging Random Access Memory Made by SiNx Thin Film". Thesis, 2015. http://ndltd.ncl.edu.tw/handle/35915441995169507164.
Pełny tekst źródła國立交通大學
電子工程學系 電子研究所
103
Electronic products of nowadays, flash memory is the mainstream for non-volatile memory. Because it has high density and low cost characteristics in the manufacturing process early and widely used in a variety of memory devices. With the evolution of technology nodes in Moore's Law, there are bad effects on reliability of flash memory. The number of electrons in the electron storage layer is less and less. Just a few electrons loosing will cause read errors. Emerging conductive-bridging random access memory(CBRAM) is also a non-volatile memory. Switching characteristics depend on the value of the resistance not number of electrons. There are some advantages of operation like nondestructive readout, low bit error rate, simple structure(MIM), high density integration, fast speed, good data retention, high endurance, low power and multi-level storage. Therefore CBRAM was paid attention to become the next generation of non-volatile memory devices. This thesis first researched『Cu/TiW/SiNx/Pt』device of CBRAM, and DC endurance could be larger than 10^3 cycles. But in variable-temperature experiment, current of low resistance state(LRS) decreased so fast as temperature increased. These phenomena showed that rising temperature will change the distribution of the copper atoms in silicon nitride which caused metal filament to disconnect. The 85℃ retention was only about 500 sec. Temperature sensitive phenomenon is attributed to higher thermal conductivity of Cu(401 W/mK) than SiNx(below 0.5 W/mK). Slight temperature variation will cause heat flow to transmit through filament and the distribution of the copper atoms in silicon nitride will be changed. In practical application, resistance states of CBRAM must have the ability to resist environmental temperature variation. Therefore, how to ease the resistance states sensitive to temperature changing is very important. The second part of the experiment is for improving temperature sensitive phenomenon in device of pure copper top electrode. Titanium is low thermal conductivity metal. Copper doped oxygen also can reduce thermal conductivity. There are good resistance against varied temperature(∆T=10℃/point) in “CuTi/Cu:O” top electrode of CBRAM. The DC endurance of 『CuTi/Cu:O/SiNx/Pt』device is 3×10^3 cycles at 25℃ and 6.8×10^3 cycles at 85℃. In retention test, it can keep 10^4 resistance ratio above 105 sec at 85℃ and larger than 10^2 resistance ratio until 1.2×10^4 sec at 200℃. Because Pt electrode is not acceptable in real application, we have to find new metal electrodes which are widely used in IC manufacturing process. So we choose two common metal materials including ”TiN” and “W”. For the device of『CuTi/Cu:O/SiNx/TiN』,endurance is 4×10^3 cycles at 25℃ and 7.2×10^3 cycles at 85℃. In retention test, it can keep 10^4 resistance ratio above 10^5 sec at 85℃ and larger than 10^2 resistance ratio until 3.2×10^4 sec at 200℃. For the device of『CuTi/Cu:O/SiNx/W』,endurance is 3.8×10^3 cycles at 25℃ and 5×10^3 cycles at 85℃. In retention test, it can keep at least larger than 10^2 resistance ratio above 10^5 sec at 85℃. There are some fluctuations in resistance states at 150℃. Because after temperature rising from 85℃ to 150℃, heat flow changes distribution of coppers near bottom electrode. That will destroy complete filament to be ruptured. On the other hand, the distribution of switching voltage is dependent on surface roughness and thermal conductivity of bottom electrode.
Chen, Yu-Jen, i 陳郁仁. "Memory Effect of the Silicon Nano-Dots Embedded in SiNx Thin Film Grown by PECVD". Thesis, 2004. http://ndltd.ncl.edu.tw/handle/06436639962077875078.
Pełny tekst źródła國立清華大學
電子工程研究所
92
In recent years, particularly, metal–insulator–semiconductor (MIS) structures based on nano-dots are widely studied for their new physical phenomena as well as their potential applications in single-electron memory devices of the next generation. Transmission electron microscopy (TEM) showed that Si NDs embedded in the silicon nitride (SiNx) thin film have been fabricated by plasma enhanced chemical vapor deposition technique, and the sheet density is the order of 1011–1012 cm-2. Charge trapping and storage in nc-Si were exhibited in capacitance–voltage (C–V) measurements at room temperature through the hysteresis and shift of the flat-band voltage (ΔVFB) of the nc-Si samples. In the nitride memory, we know there are many deep energy-level of defect traps in this sample, and the carriers transport at low electric-field with hopping trapping named Poole-Frenkle emission. In the silicon oxide thin film, the carriers transport at high electrical–field names Fowler-Norhdiem effect tunneling, as is known to all. Differ from the storage media containing two kinds of discrete charge storage centers: nitride traps in the case of SONOS and isolated Si nanocrystals in the flash memory, the Si NDs embedded in the (SiNx) thin film grown by plasma enhanced chemical vapor deposition has a larger window size of hysteresis in C-V curve. In this study, we observed the two different hysteresis phenomenon measured with the same repeated sweep voltage in the same device. We try to analyze the relationship between memory effect and the ratio of SiH4 and N2, and the different memory phenomenon from the traps and the silicon nano-dots. The Other thing is to investigate the carrier transport mechanism in the SiNx thin film.
Chang, Shih-Yu, i 張世育. "The study of synthesis and optical property of silicon quantum dots embedded in SiNx film". Thesis, 2006. http://ndltd.ncl.edu.tw/handle/62534452602212892564.
Pełny tekst źródła中華大學
電機工程學系碩士班
94
Silicon quantum dots (QDs) were formed on SiO2/Si substrate by using high density plasma chemical vapor deposition (HDP-CVD) at the different temperatures with annealing process at 300 and 600℃ to increase its density. For the silicon quantum dots, therefore, the optical properties of silicon-nitride thin films could be issued by the quantum confinement effect and localization surface effect. The photoluminescence properties are also been investigated according to the results of this experiment. With these results of photoluminescence (PL), fourier transform infrared spectroscopy (FTIR) and high-resolution transmission electron microscope (HRTEM) measurements, we could understand the relationship between peak-shifted phenomenon in PL and the properties of the embedded silicon quantum dots fabricated at different temperature in silicon-nitride films. We observed the strong photoluminescence effect at room temperature (RT) and ensured that the optimum sample of Si QDs in silicon-nitride thin film (SiNx/SiO2/Si structure) can be obtained at low deposited temperature with a following annealing treatment.
Lee, Jung-Ming, i 李榮明. "A optimization study of SiNx film thickness and uniformity for TFT-LCD isolation gate by Taguchi Method". Thesis, 2014. http://ndltd.ncl.edu.tw/handle/42740817691997066339.
Pełny tekst źródła國立高雄第一科技大學
機械與自動化工程研究所
102
Time of high-pixel , high-resolution of large-size LCD panel is coming . LCD process technology requires constant innovation , in order to achieve large output , low cost and product quality optimization . Taguchi method has been extensively improves the single product , quality optimization in this field . However , the influence factors of the product process are two or more than two quality characteristics , and the design parameter only relying on professional engineer’s experience of choosing the control factors . It is easy to cause uncertainty and fuzziness , due to engineers’ recognizes are different . Besides , it is a tough decision for engineers to choose best selection of combination , considering of each quality characteristic is relevance . In view of this subject , the research firstly uses Taguchi Method by processing one single quality ; calculate separately the S/N Ration . Finally , it unifies the Analysis of Variance to find the S/N Ration , the highest data is best , to determine the process optimization . For demonstrating the effectiveness and the usability of the research , using the case – The study of Film Thickness Uniform Optimal Parameters for Gate Isolation Layer Process by Fuzzy - Based Taguchi Method to analysis the Pattern of numerical of LCD . Demonstrating the best parameter, combination so that it can achieve three goals ; shorten the experimental duration , reduce the experimental cost , and promote the optimization of the product quality .
Chou, Tsung-Chih, i 周聰智. "Effect of N2O-Plasma Treated SiOxNy/SiNx Gate Insulator on theInverted-Staggered Amorphous-Silicon Thin-Film Transistor". Thesis, 1993. http://ndltd.ncl.edu.tw/handle/07708123446887440274.
Pełny tekst źródłaChang, Hsu-Yu, i 張旭佑. "The Low Temperature a-SiNx Passivation Films and The Uniform Poly-Si Grain Thin Film Transistors with Application to Organic Light Emitting Diode". Thesis, 2005. http://ndltd.ncl.edu.tw/handle/24776075772334296252.
Pełny tekst źródła國立臺灣大學
電子工程學研究所
93
Two important problems concerning the active matrix organic light emitting diode (AMOLED) are considered. The first is the passivation layer to protect the top emitting OLED. The second is to obtain poly-Si thin film transistor with better uniformity and good performance. The a-SiNx film with high optical gap and impermeability fabricated by plasma enhanced chemical vapor deposition (PECVD) has been chosen as the passivation layer. The optimum ratio of reaction gas is SiH4:NH3:N2 = 10:3:197 sccm. The optical gap is higher than 3 eV and reaction temperature could be as low as 70℃ and the film doesn’t show any degradation after removing from the growth chamber for 5000 hours. A new method to prepare uniform and large grain size poly-Si was discovered. The uniformity of the thin film transistor fabricated by excimer laser annealing (ELA) of amorphous Si with metallic (Cr/Al) photonic crystal structure has been substantially improved. The best on/off current ratio could reach 8 order of magnitude and the mobility could attain 354 cm2/V-sec. After comparing the Cr/Al with Al photonic crystal pads, the Cr could efficiently impede the diffusion of Al into Si.