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Artykuły w czasopismach na temat "Microsensor"

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Hashim, Hairulazwan, Hisataka Maruyama, Yusuke Akita i Fumihito Arai. "Hydrogel Fluorescence Microsensor with Fluorescence Recovery for Prolonged Stable Temperature Measurements". Sensors 19, nr 23 (29.11.2019): 5247. http://dx.doi.org/10.3390/s19235247.

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This work describes a hydrogel fluorescence microsensor for prolonged stable temperature measurements. Temperature measurement using microsensors has the potential to provide information about cells, tissues, and the culture environment, with optical measurement using a fluorescent dye being a promising microsensing approach. However, it is challenging to achieve stable measurements over prolonged periods with conventional measurement methods based on the fluorescence intensity of fluorescent dye because the excited fluorescent dye molecules are bleached by the exposure to light. The decrease in fluorescence intensity induced by photobleaching causes measurement errors. In this work, a photobleaching compensation method based on the diffusion of fluorescent dye inside a hydrogel microsensor is proposed. The factors that influence compensation in the hydrogel microsensor system are the interval time between measurements, material, concentration of photo initiator, and the composition of the fluorescence microsensor. These factors were evaluated by comparing a polystyrene fluorescence microsensor and a hydrogel fluorescence microsensor, both with diameters of 20 µm. The hydrogel fluorescence microsensor made from 9% poly (ethylene glycol) diacrylate (PEGDA) 575 and 2% photo initiator showed excellent fluorescence intensity stability after exposure (standard deviation of difference from initial fluorescence after 100 measurement repetitions: within 1%). The effect of microsensor size on the stability of the fluorescence intensity was also evaluated. The hydrogel fluorescence microsensors, with sizes greater than the measurement area determined by the axial resolution of the confocal microscope, showed a small decrease in fluorescence intensity, within 3%, after 900 measurement repetitions. The temperature of deionized water in a microchamber was measured for 5400 s using both a thermopile and the hydrogel fluorescence microsensor. The results showed that the maximum error and standard deviation of error between these two sensors were 0.5 °C and 0.3 °C, respectively, confirming the effectiveness of the proposed method.
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de Beer, Dirk, i Andreas Schramm. "Micro-environments and mass transfer phenomena in biofilms studied with microsensors". Water Science and Technology 39, nr 7 (1.04.1999): 173–78. http://dx.doi.org/10.2166/wst.1999.0356.

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Direct observations on chemical micro-environment and microbial composition in biofilms are rare. The combination of microsensor and molecular techniques is highly useful for studies on the microbial ecology of biofilms. We shortly describe some applications of microsensors to study mass transfer phenomena and microbial processes in biofilms. It has recent been recognized that biofilms are not always flat layers of cells, but can consist of complex structures allowing liquid flow. Thus the classical view, that transport in biofilms is diffusional, is challenged. In laboratory grown biofilms the effect of convection on mass transfer was demonstrated. The microsensor technique has improved, so that direct in situ measurements in living biofilms are possible. By direct measurements of liquid flow with microsensors we show that in biofilms grown in bioreactors heterogeneity and convectional transport must also be taken into account. For the description of the microbial population we use molecular techniques, such as in situ hybridisation with 16S rRNA-targeted oligonucleotide probes. In a nitrifying-denitrifying biofilm we found a complex nitrifying community consisting of members of the genera Nitrosomonas, Nitrosospira, Nitrobacter and Nitrospira. Their occurrence was correlated with nitrification activity as determined by microsensor measurements.
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Yang, Pengfei, Xiaolong Wen, Zhaozhi Chu, Xiaoming Ni i Chunrong Peng. "AC/DC Fields Demodulation Methods of Resonant Electric Field Microsensor". Micromachines 11, nr 5 (19.05.2020): 511. http://dx.doi.org/10.3390/mi11050511.

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Electric field microsensors have the advantages of a small size, a low power consumption, of avoiding wear, and of measuring both direct-current (DC) and alternating-current (AC) fields, which are especially suited to applications in power systems. However, previous reports were chiefly concerned with proposing new structures or improving the resolution, and there are no systematic studies on the signal characteristics of the microsensor output and the demodulation methods under different electric fields. In this paper, the use of an improved resonant microsensor with coplanar electrodes, and the signal characteristics under a DC field, power frequency field, and AC/DC hybrid fields were thoroughly analyzed respectively, and matching demodulation methods derived from synchronous detection were proposed. We theoretically obtained that the frequencies of the detectable electric fields should be less than half of the resonant frequency of the microsensor, and that the sensitivities of the microsensor were identical for AC/DC hybrid fields with different frequencies. Experiments were conducted to verify the proposed demodulation methods. Within electric field ranges of 0–667 kV/m, the uncertainties were 2.4% and 1.5% for the most common DC and 50 Hz power frequency fields, respectively. The frequency characteristic test results of the microsensor were in agreement with those of the theoretical analysis in the range of 0–1 kHz.
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Xiang, Chao, Yulan Lu, Pengcheng Yan, Jian Chen, Junbo Wang i Deyong Chen. "A Resonant Pressure Microsensor with Temperature Compensation Method Based on Differential Outputs and a Temperature Sensor". Micromachines 11, nr 11 (21.11.2020): 1022. http://dx.doi.org/10.3390/mi11111022.

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This paper presents the analysis and characterization of a resonant pressure microsensor, which employs a temperature compensation method based on differential outputs and a temperature sensor. Leveraging a silicon-on-insulator (SOI) wafer, this microsensor mainly consists of a pressure-sensitive diagram and two resonant beams (electromagnetic driving and electromagnetic induction) to produce a differential output. The resonators were vacuum packaged with a silicon-on-glass (SOG) cap using anodic bonding and the wire interconnection was realized by sputtering an Au film on highly topographic surfaces using a hard mask. After the fabrication of the resonant pressure microsensor, systematic experiments demonstrated that the pressure sensitivity of the presented microsensor was about 0.33 kPa/Hz. Utilizing the differential frequency of the two resonators and the signal from a temperature sensor to replace the two-frequency signals by polynomial fitting, the temperature compensation method based on differential outputs aims to increase the surface fitting accuracy of these microsensors which have turnover points. Employing the proposed compensation approach in this study, the errors were less than 0.02% FS of the full pressure scale (a temperature range of −40 to 85 °C and a pressure range of 200 kPa to 2000 kPa).
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Nathan, Arokia. "Microsensors for physical signals: Principles, device design, and fabrication technologies". Canadian Journal of Physics 74, S1 (1.12.1996): 115–30. http://dx.doi.org/10.1139/p96-844.

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Microsensors are miniaturized devices, fabricated using silicon-based and related technologies, that convert input physical and chemical signals into an output electrical signal. The key driving force in microsensor research has been the integrated circuit (IC) and micromachining technologies. The latter, in particular, is fueling tremendous activity in micro-electromechanical systems (MEMS). In terms of technology and design tools, MEMS is at a stage where microelectronics was 30 years ago and is expected to evolve at an equally rapid pace. The synergy between the IC, micromachining, and integrated photonics technologies can potentially spawn a new generation of microsystems that will feature a unique marriage of microsensor, signal-conditioning and -processing circuitry, micromechanics, and optomechanics possibly on a single chip. In this paper, the physical transduction principles, materials considerations, process-fabrication technologies, and computer-aided-design (CAD) tools will be reviewed along with pertinent examples drawn from our microsensor research activity at the Microelectronics Laboratory, University of Waterloo.
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Rathnayake, Rathnayake M. L. D., Shogo Sugahara, Hideaki Maki, Gen Kanaya, Yasushi Seike i Hisashi Satoh. "High spatial resolution analysis of the distribution of sulfate reduction and sulfide oxidation in hypoxic sediment in a eutrophic estuary". Water Science and Technology 75, nr 2 (23.11.2016): 418–26. http://dx.doi.org/10.2166/wst.2016.516.

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Bottom hypoxia and consequential hydrogen sulfide (H2S) release from sediment in eutrophic estuaries is a major global environmental issue. We investigated dissolved oxygen, pH and H2S concentration profiles with microsensors and by sectioning sediment cores followed by colorimetric analysis. The results of these analyses were then compared with the physicochemical properties of the bottom water and sediment samples to determine their relationships with H2S production in sediment. High organic matter and fine particle composition of the sediment reduced the oxidation-reduction potential, stimulating H2S production. Use of a microsensor enabled measurement of H2S concentration profiles with submillimetre resolution, whereas the conventional sediment-sectioning method gave H2S measurements with a spatial resolution of 10 mm. Furthermore, microsensor measurements revealed H2S consumption occurring at the sediment surface in both the microbial mat and the sediment anoxic layer, which were not observed with sectioning. This H2S consumption prevented H2S release into the overlying water. However, the microsensor measurements had the potential to underestimate H2S concentrations. We propose that a combination of several techniques to measure microbial activity and determine its relationships with physicochemical properties of the sediment is essential to understanding the sulfur cycle under hypoxic conditions in eutrophic sediments.
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Wen, Xiaolong, Pengfei Yang, Zhouwei Zhang, Zhaozhi Chu, Chunrong Peng, Yutao Liu, Shuang Wu, Bo Zhang i Fengjie Zheng. "Resolution-Enhancing Structure for the Electric Field Microsensor Chip". Micromachines 12, nr 8 (7.08.2021): 936. http://dx.doi.org/10.3390/mi12080936.

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Electrostatic voltage is a vital parameter in industrial production lines, for reducing electrostatic discharge harms and improving yields. Due to such drawbacks as package shielding and low resolution, previously reported electric field microsensors are still not applicable for industrial static monitoring uses. In this paper, we introduce a newly designed microsensor package structure, which enhances the field strength inside the package cavity remarkably. This magnification effect was studied and optimized by both theoretical calculation and ANSYS simulation. By means of the digital synthesizer and digital coherent demodulation method, the compact signal processing circuit for the packaged microsensor was also developed. The meter prototype was calibrated above a charged metal plate, and the electric field resolution was 5 V/m, while the measuring error was less than 3 V, from −1 kV to 1 kV in a 2 cm distance. The meter was also installed into a production line and showed good consistency with, and better resolution than, a traditional vibratory capacitance sensor.
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Jung, Dong Geon, Junyeop Lee, Jin Beom Kwon, Bohee Maeng, Hee Kyung An i Daewoong Jung. "Low-Voltage-Driven SnO2-Based H2S Microsensor with Optimized Micro-Heater for Portable Gas Sensor Applications". Micromachines 13, nr 10 (27.09.2022): 1609. http://dx.doi.org/10.3390/mi13101609.

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To realize portable gas sensor applications, it is necessary to develop hydrogen sulfide (H2S) microsensors capable of operating at lower voltages with high response, good selectivity and stability, and fast response and recovery times. A gas sensor with a high operating voltage (>5 V) is not suitable for portable applications because it demands additional circuitry, such as a charge pump circuit (supply voltage of common circuits is approximately 1.8–5 V). Among H2S microsensor components, that is, the substrate, sensing area, electrode, and micro-heater, the proper design of the micro-heater is particularly important, owing to the role of thermal energy in ensuring the efficient detection of H2S. This study proposes and develops tin (IV)-oxide (SnO2)-based H2S microsensors with different geometrically designed embedded micro-heaters. The proposed micro-heaters affect the operating temperature of the H2S sensors, and the micro-heater with a rectangular mesh pattern exhibits superior heating performance at a relatively low operating voltage (3–4 V) compared to those with line (5–7 V) and rectangular patterns (3–5 V). Moreover, utilizing a micro-heater with a rectangular mesh pattern, the fabricated SnO2-based H2S microsensor was driven at a low operating voltage and offered good detection capability at a low H2S concentration (0–10 ppm), with a quick response (<51 s) and recovery time (<101 s).
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Charavet, Carole, Michel Le Gall, Adelin Albert, Annick Bruwier i Sophie Leroy. "Patient compliance and orthodontic treatment efficacy of Planas functional appliances with TheraMon microsensors". Angle Orthodontist 89, nr 1 (3.08.2018): 117–22. http://dx.doi.org/10.2319/122917-888.1.

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ABSTRACT Objectives: To assess patient compliance and treatment efficacy of preventive expansion treatment with removable Planas functional appliances using an integrated microsensor. Materials and Methods: Wear time (WT) and behavior of 69 patients undergoing treatment with Planas functional appliances were assessed and analysed using TheraMon microsensors (Gschladt, Hargelsberg, Austria). Patients were followed up for a period of 9 months, and visits were made every 3 months to download WT data from the microsensor and to assess wearing behavior. From individual WT graphs,10 parameters were derived to characterize compliance for each patient. Treatment efficacy was measured by eight parameters determining the level of expansion after 9 months of treatment. Results: Patients wore their device on average 15.8 ± 5.2 h/d. WT was unrelated to age and gender, but it was positively influenced by patient habits when keeping appliances during eating, sports, care and handling. Treatment efficacy in terms of intercanine and intermolar expansion was 4.4 ± 1.9 mm and 4.6 ± 2.0 mm for the maxilla, and 5.3 ± 2.0 mm and 4.7 ± 2.3 mm for the mandible, respectively. Efficacy was negatively affected by poor compliance (WT &lt; 9 h/d) and by high variability of within-subject WT recordings. Conclusions: Perfect compliance is not necessary to achieve treatment success, but patients should exhibit sufficient wear time to allow maxillary expansion to occur. The TheraMon microsensor offers a new perspective and aid to individualize treatment prescriptions.
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Chen, Siyuan, Jiaxin Qin, Yulan Lu, Bo Xie, Junbo Wang, Deyong Chen i Jian Chen. "An All-Silicon Resonant Pressure Microsensor Based on Eutectic Bonding". Micromachines 14, nr 2 (13.02.2023): 441. http://dx.doi.org/10.3390/mi14020441.

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In this paper, an all-Si resonant pressure microsensor based on eutectic bonding was developed, which can eliminate thermal expansion coefficient mismatches and residual thermal stresses during the bonding process. More specifically, the resonant pressure microsensor included an SOI wafer with a pressure-sensitive film embedded with resonators, which was eutectically bonded with a silicon cap for vacuum encapsulation. The all-Si resonant pressure microsensor was carefully designed and simulated numerically, where the use of the silicon cap was shown to effectively address temperature disturbances of the microsensor. The microsensor was then fabricated based on MEMS processes where eutectic bonding was adopted to link the SOI wafer and the silicon cap. The characterization results showed that the temperature disturbances of the resonant pressure microsensor encapsulated with the silicon cap were quantified as −0.82 Hz/°C of the central resonator and −2.36 Hz/°C of the side resonator within a temperature range from −40 °C to 80 °C, which were at least eight times lower than that of the microsensor encapsulated with the glass cap. Compared with the microsensor using the glass cap, the all-silicon microsensor demonstrated an accuracy improvement from 0.03% FS to 0.01% FS and a reduction in short-term frequency fluctuations from 3.2 Hz to 1.5 Hz.
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Rozprawy doktorskie na temat "Microsensor"

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Oldenziel, Weite Hendrik. "Application of a glutamate microsensor to brain tissue construction, evaluation and application of a glutamate microsensor /". [S.l. : [Groningen : s.n.] ; University Library Groningen] [Host], 2006. http://irs.ub.rug.nl/ppn/297660691.

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Byun, Albert Joonsoo. "Chemical Application of Silicon-Based Resonant Microsensor". Thesis, Georgia Institute of Technology, 2007. http://hdl.handle.net/1853/16296.

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The detection of volatile organic compounds in liquid is of interest for applications in public health, workplace safety and environmental monitoring. Traditionally, water samples were taken and analyzed in the laboratory using classical laboratory instrumentation. Current trends target real-time measurements using e.g. chemical microsensors built with microfabrication technologies. Among these, mass-sensitive chemical sensors, based on cantilever beams or surface acoustic devices, have shown substantial promise in gas-phase applications. In a liquid environment, the resonant microstructures typically suffer from high damping, which negatively affects the sensor resolution. In this work, a novel disk-type resonator developed at Georgia Tech was investigated as chemical microsensor for liquid-phase applications. The micromachined resonator vibrates in a rotational in-plane mode shape, reducing damping in a liquid environment. As part of the present research, a measurement setup with a custom-made flow cell for liquid-phase chemical measurements and a coating system to locally deposit polymer sensitive films onto the resonators were developed. To improve the film adhesion on the resonator surface in liquid, physical and chemical binding techniques were developed and tested on wafer samples. Polymers such as poly(4-vinylpyrrolidone), poly(ethylene-co-propylene) and poly(styrene-co-butadiene) were deposited using the custom-designed coating system onto the disk-type resonators. Liquid-phase measurements using tetrachloroethylene as the chemical analyte were performed. The experimental results are discussed, sources of problems are identified and recommendations for future research are made.
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Tang, David 1977. "Rotor speed microsensor for the MIT Microengine". Thesis, Massachusetts Institute of Technology, 2001. http://hdl.handle.net/1721.1/8554.

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Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2001.
Includes bibliographical references (p. 123-127).
This thesis presents the design, fabrication, and testing of a temperature-based sensor for measuring rotor speeds in the MIT MEMS micro gas turbine engine. The MIT microengine is a gas combustion engine made by micromachining and bonding six silicon wafers. The sensor is a boron-doped polysilicon resistor with a serpentine geometry that is thermally isolated from the substrate. The sensor is designed to measure the rotor rpm by responding to the heat flux fluctuations on the wall above the compressor blade tips. This thesis investigates the feasibility of this approach. The sensor development process involved fabricating stand-alone devices (which have only the sensor and contact pads and not integrated with other microengine components) and testing them using a furnace and a shock tube. The furnace test characterized the stability with thermal cycling and annealing. The shock tube test characterized the dynamic response. The temperature coefficient of resistivity (TCR), 0.009/K , and the room temperature resistance, ~9 kohms, measured in the furnace characterization experiments were approximately 50% less and 300% more than the predicted values, respectively. These discrepancies may be due to the fabrication process conditions, such as ion implant dose, polysilicon deposition temperature, and anneal conditions. The time constant, 9-10 [mu] sec, measured from the shock tube experiments matched predicted values to within 20-40% depending on the model used to estimate the convective heat flux into the sensor. However, the sensor's amplitude response was less than predicted values by approximately 10 - 75% perhaps due to the simplicity of the models used to estimate the convective heat flux. The experimental results suggest that this concept is viable as a microengine rpm sensor. Some design changes are suggested which should improve sensor performance.
by David Tang.
S.M.
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Kim, Ho-Young 1971. "Microsensor development for the study of droplet spreading". Thesis, Massachusetts Institute of Technology, 1996. http://hdl.handle.net/1721.1/40244.

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Adams, Douglas Edward. "A high resolution capacitance-based lateral position microsensor". Thesis, Massachusetts Institute of Technology, 1997. http://hdl.handle.net/1721.1/46050.

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Shih, Eugene Inghaw 1976. "An energy-efficient radio for wireless microsensor networks". Thesis, Massachusetts Institute of Technology, 2001. http://hdl.handle.net/1721.1/86763.

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Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2001.
Includes bibliographical references (p. 139-142).
by Eugene Inghaw Shih.
S.M.
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Phanaphat, Piyada 1978. "Protocol stacks for power-aware wireless microsensor networks". Thesis, Massachusetts Institute of Technology, 2002. http://hdl.handle.net/1721.1/8076.

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Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2002.
Includes bibliographical references (p. 71-72).
In a distributed wireless sensor system, a need to prolong the lifetime of the network is crucial and limited by battery capacity. As communication traffic among sensor nodes is triggered by sensing events, the network can exploit these time-varying scenarios to obtain power savings by adjusting its operating conditions accordingly. A coherent design of application-specific network protocol stacks is the key. Specifically, embedding power aware features in the link layer and media access control (MAC) layer promises to extend the lifetime of the sensor network. The power-aware design will be illustrated on [mu]AMPS sensor node prototypes. With the integrated design framework, lower layers of the network stack provides configurable power-aware features to be controlled by higher network layers that maintain broaderview knowledge of the environment. TDMA has been chosen as a MAC Layer protocol for its inherited power-aware mechanism of radio shutdowns outside its TDMA slot and in absence of sensing events. Another level of power-aware features can be deployed in MAC ID and TDMA slot assignments. In a field of scattered sensor nodes, not all the nodes are in radio range of one another or of the base station. Hence, assigning N TDMA slots for the network of N sensor nodes that are not all in radio range will waste the receiver energy and link bandwidth. An algorithm for a re-use of MAC ID and MAC time slot is proposed based on the number of neighboring nodes. Hence, varying the number of neighboring nodes by varying the transmit power can optimize the system lifetime and bandwidth. An implementation of the Link and MAC infrastructure is completed. Power scalability is illustrated on [mu]AMPS node prototypes, with TDMA Media Access and a vehicle tracking application demonstration.
by Phanaphat Piyada.
M.Eng.
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Wang, Andrew Yu 1976. "Base station design for a wireless microsensor system". Thesis, Massachusetts Institute of Technology, 2000. http://hdl.handle.net/1721.1/86627.

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Hager, Jonathan M. "Development and calibration of a heat flux microsensor". Thesis, Virginia Tech, 1989. http://hdl.handle.net/10919/44640.

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The concept, design, fabrication, and calibration of a new type of layered heat flux gage is described. Using thin-film microfabrication techniques the gage design is able to combine many of the desireable characteristics of other previous gage designs to produce a gage that has a very small size, high frequency response, and the ability to measure very high heat flux rates. The heat flux microsensor incorporates a differential thermopile, a set of 100 differential thermocouple pairs connected in series across a thin thermal resistance layer. The gage is fabricated on a model surface without the need for additional adhesives. The design configuration allows the thermal insulating layer to remain very thin, while still retaining the high output typical of much thicker gages. The small overall thickness of the gage, less than 2 µm, gives it a fast time response with the capability of measuring heat transfer in transient flow conditions. The combination of small thickness and small surface dimensions, 1 mm by 1 cm, gives the microsensor negligible flow and thermal disruption. The performance of a prototype microsensor deposited on Corning 7059 glass was measured. Steady-state calibrations were done using a convection calibration apparatus. The measured sensitivity (before amplification) was 0.164 mV per watt/cm². The output was linear over the range tested from 800 to 9000 watts/m². The unsteady response was tested using a continuous laser beam directed through a variable speed chopper wheel onto the gage surface. Results showed a frequency response of at least 1 kHz.
Master of Science
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Lartz, Douglas John. "Feedforward temperature control using a heat flux microsensor". Thesis, This resource online, 1993. http://scholar.lib.vt.edu/theses/available/etd-06302009-040309/.

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Książki na temat "Microsensor"

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Hierlemann, Andreas. Integrated chemical microsensor systems in CMOS technology. Berlin: Springer, 2005.

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Hierlemann, A. Integrated chemical microsensor systems in CMOS technology. Berlin: Springer, 2005.

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Baltes, H., Hiroyuki Fujita i Dorian Liepmann, red. Integrated Chemical Microsensor Systems in CMOS Technology. Berlin/Heidelberg: Springer-Verlag, 2005. http://dx.doi.org/10.1007/b138987.

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Al-Khalifa, Sherzad. Identification of a binary gas mixture from a single resistive microsensor. [s.l.]: typescript, 2000.

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Revsbech, Niels Peter. Mikrosensor-analyse af stratificerede mikrobielle samfund =: Microsensor analysis of stratified microbial communities. Århus: Institut for genetik og økologi, Aarhus universitet, Danmark, 1988.

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Hooijmans, C. M. Diffusion coupled with bioconversion in immobilized systems: Use of an oxygen microsensor. Amsterdam: Thesis Publishers, 1990.

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S, Muller Richard, i IEEE Electron Devices Society, red. Microsensors. New York: IEEE Press, 1991.

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Elwenspoek, Miko. Mechanical Microsensors. Berlin, Heidelberg: Springer Berlin Heidelberg, 2001.

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Elwenspoek, Miko, i Remco Wiegerink. Mechanical Microsensors. Berlin, Heidelberg: Springer Berlin Heidelberg, 2001. http://dx.doi.org/10.1007/978-3-662-04321-9.

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Microsensors: Principles and applications. Chichester: Wiley, 1994.

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Części książek na temat "Microsensor"

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Gardner, Julian W., Vijay K. Varadan i Osama O. Awadelkarim. "IDT Microsensor Fabrication". W Microsensors, MEMS, and Smart Devices, 347–58. West Sussex, England: John Wiley & Sons, Ltd,., 2013. http://dx.doi.org/10.1002/9780470846087.ch12.

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Menini, Philippe. "Gas Microsensor Technology". W Chemical Sensors and Biosensors, 175–209. Hoboken, NJ, USA: John Wiley & Sons, Inc., 2013. http://dx.doi.org/10.1002/9781118561799.ch8.

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Leme, Carlos Azeredo, i Henry Baltes. "Interfaces for Microsensor Systems". W Analog Circuit Design, 163–81. Boston, MA: Springer US, 1994. http://dx.doi.org/10.1007/978-1-4757-2310-6_10.

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Gardner, Julian W., Vijay K. Varadan i Osama O. Awadelkarim. "IDT Microsensor Parameter Measurement". W Microsensors, MEMS, and Smart Devices, 337–46. West Sussex, England: John Wiley & Sons, Ltd,., 2013. http://dx.doi.org/10.1002/9780470846087.ch11.

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Ache, H. J., J. Bürck, W. Faubel, W. Hoffmann, J. Reichert, W. Menz, B. Büstgens i in. "Three-Dimensional Microsensor Technology". W Sensors, 79–133. Weinheim, Germany: Wiley-VCH Verlag GmbH, 2008. http://dx.doi.org/10.1002/9783527620180.ch4.

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Senturia, Stephen D., i Rosemary L. Smith. "Microsensor Packaging and System Partitioning". W Ceramic Engineering and Science Proceedings, 997–1009. Hoboken, NJ, USA: John Wiley & Sons, Inc., 2008. http://dx.doi.org/10.1002/9780470320419.ch1.

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Solzbacher, F. "Fabrication Technologies for 3D- microsensor Structures". W Advanced Microsystems for Automotive Applications Yearbook 2002, 35–39. Berlin, Heidelberg: Springer Berlin Heidelberg, 2002. http://dx.doi.org/10.1007/978-3-642-18213-6_6.

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Jurczyk, M., i M. Nowak. "Introduction to hydrogen microsensor and detectors". W Hydrogen Storage Materials, 466–73. Berlin, Heidelberg: Springer Berlin Heidelberg, 2018. http://dx.doi.org/10.1007/978-3-662-54261-3_72.

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Walt, David, i Tamar Sternfeld. "Optical Microsensor Arrays for Explosives Detection". W Electronic Noses & Sensors for the Detection of Explosives, 81–92. Dordrecht: Springer Netherlands, 2004. http://dx.doi.org/10.1007/978-1-4020-2800-7_6.

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Wang, Jiaqi, i Zhenan Tang. "Integrated Vacuum Microsensor Systems in CMOS Technology". W Micro/Nano Technologies, 577–94. Singapore: Springer Singapore, 2018. http://dx.doi.org/10.1007/978-981-10-5945-2_10.

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Streszczenia konferencji na temat "Microsensor"

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Seo, Young Ho, Ki-Ho Han i Young-Ho Cho. "Design, Fabrication and Characterization of a New Magnetic Microsensor Using Plasma Hall Effect". W ASME 2000 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2000. http://dx.doi.org/10.1115/imece2000-1080.

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Abstract This paper is the first attempt to use the plasma Hall effect for magnetic field detection. The plasma Hall microsensor measures the Hall voltage induced by AC plasma electrons. In a theoretical analysis, we develop an analytical model of the plasma Hall sensor in order to express the plasma Hall voltage as a function of electrode geometry, magnetic field, plasma discharge field and chamber pressure. On this basis, we have designed and fabricated a new class of magnetic microsensors using AC neon plasma. In the experimental study, we have measured the plasma Hall voltage for varying five different conditions, including the frequency and magnitude of magnetic field, the frequency and magnitude of plasma discharge voltage, and the neon pressure. The plasma Hall microsensors show a magnetic field sensitivity of 8.87±0.18mvV/G with 4.48% nonlinearity. The experimental results agree well with those estimated from the theoretical analysis, thus verifying the feasibility of the plasma Hall device for a new class of magnetic microsensor.
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Nathan, A. "Microsensor Modeling". W Electro International, 1991. IEEE, 1991. http://dx.doi.org/10.1109/electr.1991.718184.

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Liu, Duncan T., Harold Kirkham, Alan R. Johnston, Larry A. Bergman, Julian P. G. Bristow i Jeffrey N. Schoess. "Microsensor networks". W SPIE's International Symposium on Optical Engineering and Photonics in Aerospace Sensing, redaktor Edward W. Taylor. SPIE, 1994. http://dx.doi.org/10.1117/12.177644.

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Bronk, Karen S., Brian G. Healey i David R. Walt. "Optical microsensor arrays". W 10th Optical Fibre Sensors Conference. SPIE, 1994. http://dx.doi.org/10.1117/12.184964.

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Gao, Meng, i Lin Gui. "A Liquid Metal Based Capacitive Microsensor". W ASME 2014 12th International Conference on Nanochannels, Microchannels, and Minichannels collocated with the ASME 2014 4th Joint US-European Fluids Engineering Division Summer Meeting. American Society of Mechanical Engineers, 2014. http://dx.doi.org/10.1115/icnmm2014-21205.

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Capacitive microsensor is a widely used detection technique for the analysis and assays in biochemistry, biomedicine, environmental monitoring and force measurement in MEMS. In this study, a liquid-metal based capacitive microsensor is proposed. A pair of high aspect ratio polydimethylsiloxane (PDMS) microchannels were fabricated symmetrically and vertically to both sides of detection channel. These two microchannels were filled with room temperature liquid-metal to form two electrodes. These two liquid-metal microchannels worked as two polar plates of a micro parallel-plate capacitor with the detection channel going between them. When the fluid changes in the detection channel, the capacitance of the micro parallel-plate capacitor will also change. Thus, by measuring the change in the capacitance of the micro capacitor, the fluid in the detection channel can be therefore detected. The capacitive microsensor can provide a wide range of applications in microfluidic technologies, such as detection of droplets, cells, particles or biological macromolecules. For better understanding of the capacitive microsensor, theoretical model was developed to reveal the working principle. To evaluate the capacitive microsensor, experiments were also performed to measure the microparticle concentration in deionized water by measuring its dielectric constant.
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Mirshekari, G., M. Brouillette i L. G. Frechette. "Piezoelectric pressure microsensor arrays". W 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII). IEEE, 2013. http://dx.doi.org/10.1109/transducers.2013.6627132.

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Todorova, V., i M. Mladenov. "Matrix microsensor information scanning". W 26th International Spring Seminar on Electronics Technology: Integrated Management of Electronic Materials Production, 2003. IEEE, 2003. http://dx.doi.org/10.1109/isse.2003.1260475.

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TERRELL, J., J. HAGER, S. ONISHI i T. DILLER. "Heat flux microsensor measurements". W AlAA 4th International Aerospace Planes Conference. Reston, Virigina: American Institute of Aeronautics and Astronautics, 1992. http://dx.doi.org/10.2514/6.1992-5038.

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Nagel, David J. "MEMS-enabled microsensor clusters". W Smart Materials and MEMS, redaktorzy Derek Abbott, Vijay K. Varadan i Karl F. Boehringer. SPIE, 2001. http://dx.doi.org/10.1117/12.418763.

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Angulo Barrios, Carlos. "Ultrasensitive nanomechanical photonic microsensor". W Microtechnologies for the New Millennium, redaktorzy Ali Serpengüzel, Gonçal Badenes i Giancarlo C. Righini. SPIE, 2007. http://dx.doi.org/10.1117/12.723390.

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Raporty organizacyjne na temat "Microsensor"

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Hughes, R., i C. Drebing. Microsensor research. Office of Scientific and Technical Information (OSTI), kwiecień 1990. http://dx.doi.org/10.2172/7150092.

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Chandrakasan, Anantha P. Power Aware Wireless Microsensor Networks. Fort Belvoir, VA: Defense Technical Information Center, maj 2003. http://dx.doi.org/10.21236/ada415425.

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Fujita, Mel. Smart Integrated Microsensor System (SIMS). Fort Belvoir, VA: Defense Technical Information Center, listopad 1992. http://dx.doi.org/10.21236/ada259430.

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Reshotko, Eli, i Mehran Mehregany. Development and Calibration of Wall-Shear-Stress Microsensor Systems. Fort Belvoir, VA: Defense Technical Information Center, kwiecień 2001. http://dx.doi.org/10.21236/ada387738.

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Ramanathan, Parameswaran. Location-Centric Distributed Computational and Signal Processing in Microsensor Networks. Fort Belvoir, VA: Defense Technical Information Center, maj 2004. http://dx.doi.org/10.21236/ada423786.

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Batterman, S. A., i E. T. Zellers. Assessment of subsurface VOCs using a chemical microsensor array. Final report. Office of Scientific and Technical Information (OSTI), czerwiec 1993. http://dx.doi.org/10.2172/10132560.

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Domansky, K., V. S. Zapf, J. W. Grate, A. J. Ricco, W. G. Yelton i J. Janata. Integrated chemiresistor and work function microsensor array with carbon black/polymer composite materials. Office of Scientific and Technical Information (OSTI), maj 1998. http://dx.doi.org/10.2172/658201.

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Branch, Darren W., Dale L. Huber, Susan Marie Brozik i Thayne L. Edwards. Shear horizontal surface acoustic wave microsensor for Class A viral and bacterial detection. Office of Scientific and Technical Information (OSTI), październik 2008. http://dx.doi.org/10.2172/1028915.

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Ramchandran, Kannan, i Kristofer Pister. Sensor Webs of SmartDust: Distributed Signal Processing/Data Fusion/Inferencing in Large Microsensor Arrays. Fort Belvoir, VA: Defense Technical Information Center, marzec 2004. http://dx.doi.org/10.21236/ada422190.

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Davis, Chad Edward, Michael Loren Thomas, Jerome L. Wright, Phillip Isabio Pohl, Robert Clark Hughes, Yifeng Wang, Lucas K. McGrath, Clifford Kuofei Ho i Huizhen Gao. Potential application of microsensor technology in radioactive waste management with emphasis on headspace gas detection. Office of Scientific and Technical Information (OSTI), wrzesień 2004. http://dx.doi.org/10.2172/919659.

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