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Autor: Grafiati

Data publikacji: 4 czerwca 2021

Data aktualizacji: 31 lipca 2024

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Murarka, Apoorva. "Contact-printed microelectromechanical systems". Thesis, Massachusetts Institute of Technology, 2012. http://hdl.handle.net/1721.1/77080.

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Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2012.
Cataloged from PDF version of thesis.
Includes bibliographical references (p. 105-107).
Microelectromechanical systems (MEMS) are ubiquitous. Scalable large-area arrays of MEMS on a variety of substrates, including flexible substrates, have many potential applications. Novel methods for additive fabrication of thin (125±15 nm thick) suspended gold membranes on a variety of rigid and flexible cavity-patterned substrates for MEMS applications are reported. The deflection of these membranes, suspended over cavities in a dielectric layer atop a conducting electrode, can be used to produce sounds or monitor pressure. The reported fabrication methods employ contact-printing, and avoid fabrication of MEMS diaphragms via wet or deep reactive-ion etching, which in turn removes the need for etch-stops and wafer bonding. Elevated temperature processing is also avoided to enable MEMS fabrication on flexible polymeric substrates. Thin films up to 12.5 mm2 in area are fabricated. The MEMS devices are electrically actuated and the resulting membrane deflection is characterized using optical interferometry. Preliminary sound production is demonstrated, and further applications of this technology are discussed.
by Apoorva Murarka.
M.Eng.

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Latif, Rhonira. "Microelectromechanical systems for biomimetical application". Thesis, University of Edinburgh, 2013. http://hdl.handle.net/1842/7955.

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The application of adaptive micro-electro-mechanical systems (MEMS) device in biologically-inspired cochlear model (cochlear biomodel) has been seen as a preferable approach to mimic closely the human cochlear response. The thesis focuses on the design and fabrication of resonant gate transistor (RGT) device applied towards the development of RGT cochlear biomodel. An array of RGT devices can mimic the cochlea by filtering the sound input signals into multiple electrical outputs. The RGT device consists of two main components; a) the MEMS bridge gate structure that transduces the sound input into mechanical vibrations and b) the channel with source/drain regions underneath the bridge gate structure that transduce the mechanical vibrations into electrical signals. The created mathematical model for RGT calculates the electrical outputs that are suited for neural spike coding. The neuromorphic auditory system is proposed by integrating the RGT devices with the spike event interface circuits. The novelty of the system lies in the adaptive characteristics of the RGT devices that can self-tune the frequency and sensitivity using the feedback control signals from the neuromorphic circuits. The bridge gates have been designed to cover the audible frequency range signals of 20 Hz - 20 kHz. Aluminium and tantalum have been studied as the material for the bridge gate structure. The fabrication of a bridge gate requires a gentle etch release technique to release the structure from a sacrificial layer. The downstream etch release technique employing oxygen/nitrogen plasma has been introduced and characterised. In the first iteration, aluminium bridge gates have been fabricated. The presence of tensile stress within aluminium had caused the aluminium bridge gates of length >1mm to collapse. In order to address this issue, tantalum bridge gates have been fabricated in the second iteration. Straight tantalum bridge gates in tensile stress and buckled tantalum bridge gates in compressive stress have been characterised. The frequency range of 550 Hz - 29.4 kHz has been achieved from the fabricated tantalum bridge gates of length 0.57mm - 5.8mm. The channel and source/drain regions have been fabricated and integrated with the aluminium or tantalum bridge gate structures to create the RGTs. In this study, the n-channel and p-channel resonant gate transistor (n-RGT and p-RGT) have been considered. In n-RGT, phosphorus ions are implanted to form the source/drain regions. High subthreshold currents have been measured from the n-RGTs. Thus, p- RGTs have been employed with considerably small subthreshold current. In p-RGT, boron ions are implanted to form the source/drain regions. The threshold voltage, transconductance and subthreshold current for both n-channel and p-channel resonant gate transistor devices have been characterised. In this work, the channel conductance of the n-RGT and p-RGT devices has been modulated successfully and the sensitivity tuning within the audible frequency range has been achieved from the tantalum bridge gates of the p-RGT devices. The characterisation and optimisation of the resonant gate transistor provide the first step towards the development of the adaptive RGT cochlear biomodel for the neuromorphic auditory system application.

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Lemay, Scott A. "Microelectromechanical propulsion systems for spacecraft". Thesis, Monterey, California. Naval Postgraduate School, 2002. http://hdl.handle.net/10945/5883.

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This is a survey of current research on micropropulsion options for very small satellites (less than ten kilogram). The concentration of research and performance evaluations utilize Micro Systems Technology (MST) and Micro Electromechanical Systems technology (MEMS) integrated with existing theories. State of the art methods used for the design and manufacturing of MEMS devices are included to provide a size perspective of microthruster technology. Nine viable microthruster options are presented, including a detailed performance analysis of the Pulsed Plasma Thruster. Exploration of the future role of micropropulsion in space is the influential factor benefiting research efforts on extremely small scale microthrusters. Significant background information on astrodynamics is included to assist the intended reader: a student of Engineering Science with interest in the Aerospace Propulsion Industry.

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Ramaswamy, Deepak 1974. "Simulation tools for microelectromechanical systems". Thesis, Massachusetts Institute of Technology, 2001. http://hdl.handle.net/1721.1/8625.

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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Civil and Environmental Engineering, 2001.
Includes bibliographical references (p. 101-104).
In this thesis efficient techniques to solve complex 3-D electromechanical problems are developed. Finite element discretization of complex structures such as the micromirror lead to thousands of internal degrees of freedom. Their mostly rigid motion is exploited leading to a mixed rigid-elastic formulation. This formulation's advantage is apparent when it is incorporated in an efficient coupled domain simulation technique and examples are presented exploring geometry effects on device behavior. Then for system level simulation where full device simulation costs add up we need models with much reduced order with little degradation in accuracy. We describe a model reduction formulation for the electromechanical problem based on implicit techniques which accurately capture the original model behavior.
by Deepak Ramaswamy.
Ph.D.

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Then, Alan M. (Alan Michael) 1965. "Commercialization of microelectromechanical systems (MEMS)". Thesis, Massachusetts Institute of Technology, 2001. http://hdl.handle.net/1721.1/8920.

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Thesis (S.M.M.O.T.)--Massachusetts Institute of Technology, Sloan School of Management, Management of Technology Program, 2001.
Includes bibliographical references (leaves 69-72).
Microelectromechanical systems (MEMS), at their core are a set of technologies that employ the processes developed in the integrated circuit (IC) and semiconductor industries to construct electro- mechanical devices. In the case of Microopticelectromechanical systems (MOEMS), optical elements are also integrated into these devices. MEMS technology holds the promise of significantly miniaturizing, reducing the cost of, and enhancing the performance of many sensors and actuators, evidence its widespread use in the manufacture of accelerometers, ink jet printer heads and various chemical gas sensors. Despite its stellar success in these "killer-applications," MEMS technology has failed to realize the widespread success many had predicted for it. Nonetheless, this technology has recently been explored extensively for new electro-optics applications, specifically in telecommunications for dense wavelength division multiplexing (DWDM) and optical switching. This thesis examines various models of dynamic technology adoption and explores how they apply to MEMS technology. Furthermore, by way of historical comparison to the development of application specific integrated circuit (ASIC), it will identify various developmental similarities. Finally, a unique model outlining the critical driving forces behind the adoption of MEMS technology will be constructed.
by Alan M. Then.
S.M.M.O.T.

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Cragun, Rebecca. "Thermal microactuators for microelectromechanical systems /". Diss., CLICK HERE for online access, 1999. http://contentdm.lib.byu.edu/ETD/image/etd170.pdf.

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Wilson, Aubrey Marie Mueller. "Transgene Delivery via Microelectromechanical Systems". BYU ScholarsArchive, 2012. https://scholarsarchive.byu.edu/etd/3936.

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The invention of pronuclear microinjection initiated the field of transgenic research. Over 30 years later microinjection remains the most straight-forward and most commonly used transgene delivery option. In this work we address the current progress of microelectromechanical systems (MEMS) used as transgenic delivery mechanisms. The nanoinjector is a specially designed MEMS device which uses electrostatic charge to manipulate transgene molecules. The process of nanoinjection was designed as an alternative to microinjection which causes less damage to developing embryos, improves embryo survival, birth rates, and overall efficiency of injections. In vivo testing of nanoinjection demonstrates it is both safe and effective. Additionally nanoinjection has the potential to make transgenesis via yeast artificial chromosomes more practical as the nanoinjector may prevent shearing of the YAC molecules. A second nanoinjection protocol termed intracellular electroporetic nanoinjcetion (IEN) was designed to allow for cytoplasmic injections. Cytoplasmic injections are faster and easier than pronuclear injection and do not require the pronuclei to be visible; yet previous attempts to develop cytoplasmic injection have met with limited success. In IEN injections the nanoinjector is used to place transgenic molecules in the cytoplasm. The transgenes are then propelled through the cytoplasm and electroporated into the pronucleus using electrical pulses. Electroporation of whole embryos has not resulted in transgenic animals, but the MEMS device allows localized electroporation to occur within the cytoplasm, giving transgene access to the pronucleus before degradation can occur. In this report we describe the principles which allow for localized electroporation of the pronuclei including: the location of the pronuclei between 21-28 hours post-hCG treatment, modeling data predicting the voltages needed for localized electroporation of pronuclei, and data on the movement of transgenic DNA based on the voltages delivered by IEN. We further report results of an IEN versus microinjection comparative study in which IEN produced transgenic pups with viability, transgene integration, and expression rates statistically comparable to microinjection. The ability to perform injections without visualizing or puncturing the pronuclei will widely benefit transgenic research, and will be particularly advantageous for the production of transgenic animals with embryos exhibiting reduced pronuclear visibility.

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Ruzziconi, Laura. "Nonlinear dynamics in microelectromechanical systems". Doctoral thesis, Università Politecnica delle Marche, 2011. http://hdl.handle.net/11566/242133.

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La tesi affronta lo studio delle dinamiche nonlineari in alcuni dispositivi MEMS. Le tematiche di dinamica nonlineare attualmente affrontate in letteratura sono indispensabili per studiare la loro risposta. L’accuratezza della modellazione dinamica nonlineare è importante per garantire l’affidabilità dei risultati e gli strumenti attuali di dinamica nonlineare riescono ad interpretare scrupolosamente i dati sperimentali della risposta di questi dispositivi. La tesi considera due diversi casi-studio. Il primo caso-studio è un dispositivo MEMS con carico assiale, forma iniziale ad arco molto ribassato e attuazione elettrostatica ed elettrodinamica. È analizzato in un intorno della biforcazione da una singola ad una doppia buca di potenziale. Sia le configurazioni statiche nonlineari sia l’analisi dinamica lineare non possono essere risolte in forma chiusa e sono approssimate con il metodo di Galerkin. Vengono usate per costruire un accurato modello ridotto delle dinamiche nonlineari ad un solo grado di libertà. In questo modello il termine del quinto ordine (che dipende dall’espansione in serie di Taylor nell’equazione del moto) è eliminato per avere una buona approssimazione delle buche di potenziale e del comportamento globale. Altri modelli ridotti sono considerati e paragonati. Si esegue l’analisi dinamica nonlineare, con l’uso combinato di curve di risposta in frequenza, ritratti di fase attrattori-bacini e mappe di comportamento. In un intorno di ciascuna frequenza naturale, la risposta del dispositivo presenta le tipiche caratteristiche di un oscillatore softening. I casi di singola e doppia buca di potenziale vengono paragonati. Il secondo caso-studio analizza i dati sperimentali di pull-in dinamico in risonanza primaria di un dispositivo MEMS (un accelerometro capacitivo). Iniziando da questo caso particolare, si affronta la tematica dell’integrità dinamica in un sistema meccanico. Viene eseguito il suo calcolo qualitativo, scegliendo gli strumenti più appropriati in base alle condizioni sperimentali considerate. Si evidenzia l’efficacia di questa analisi, mostrando l’accuratezza delle curve di percentuale costante di fattore di integrità nell’interpretare l’esistenza di disturbi negli esperimenti e nella pratica. Inoltre, si mostra il loro utilizzo nella progettazione.
This dissertation deals with the nonlinear dynamics in MEMS devices. The nonlinear dynamic topics currently addressed in the literature are essential to investigate their response. The accuracy of the nonlinear dynamic modeling is important to guarantee the reliability of the results and current nonlinear dynamic tools succeed in carefully interpreting the experimental data of the response of these devices. The dissertation considers two different case-studies. The first case-study is a MEMS device with axial load, very shallow arched initial shape and electrostatic and electrodynamic actuation. It is analyzed in the neighborhood of the bifurcation from a single potential well to a twin well. Both the nonlinear static configurations and the linear dynamic analysis cannot be solved in closed form and they are approximated by the Galerkin technique. They are used to derive an accurate single degree of freedom reduced order model of the nonlinear dynamics. In this model the fifth order term (connected to the Taylor expansion in the equation of motion) is removed to obtain a good approximation of the potential wells and of the global behavior. Other reduced order models are considered and compared. The nonlinear dynamic analysis is performed, with the combined use of frequency response curves, attractor-basins phase portraits and behavior charts. In a neighborhood of each natural frequency, the response of the device has the typical characteristics of a softening oscillator. The cases of the single and the double potential well are compared. The second case-study analyzes the experimental dynamic pull-in data at primary resonance for a MEMS device (a capacitive accelerometer). Starting from this particular case, the issue of the dynamical integrity in a mechanical system is addressed. Its qualitative evaluation is performed, choosing the most suitable tools according to the considered experimental conditions. The effectiveness of this analysis is highlighted, showing the accuracy of the curves of constant percentage of integrity factor in interpreting the existence of disturbances in experiments and practice. Also, their use in a design is proposed.

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Lusk, Craig P. "Ortho-Planar Mechanisms for Microelectromechanical Systems". Diss., CLICK HERE for online access, 2005. http://contentdm.lib.byu.edu/ETD/image/etd902.pdf.

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Zeng, Yang. "Finite Element Methods for Microelectromechanical Systems". Thesis, Uppsala University, Department of Information Technology, 2009. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-110896.

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The stationary Joule heating problem is a crucial multiphysical problem for many microelectromechanical (MEMS) applications. In our paper, we derive a finite element method for this problem and introduce iterative solution-techniques to compute the numerical simulation. Further we construct an adaptive algorithm for mesh refinement based on a posteriori error estimation.Finally, we present two numerical tests: convergences analysis of different iterative methods for distinct materials which are classified by electrical conductivities, and a test of the new adaptive refinement algorithm. All the numerical implementations have been done in MATLAB.

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Robinson, Gary Neil 1960. "The commercialization of microelectromechanical systems (MEMS)". Thesis, Massachusetts Institute of Technology, 1999. http://hdl.handle.net/1721.1/9534.

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Thesis (S.M.M.O.T.)--Massachusetts Institute of Technology, Sloan School of Management, Management of Technology Program, 1999.
Includes bibliographical references (leaf 80).
Microelectromechanical systems (MEMS) comprise a set of technologies for the micromachining and electromechanical integration of sensors and actuators. MEMS allow for the radical miniaturization of such devices, as well as for significant improvements in performance and cost over conventionally fabricated mechanical and electrical components. In this thesis, I attempt to assess the value inherent in MEMS innovations and to understand how companies have tried to capture that value. In doing so, I assess the pathways and prospects for the commercialization of MEMS-based devices. I have chosen to focus on two classes of devices: (1) micromachined accelerometers for crash sensing and subsequent air bag deployment in automobiles, and (2) microfabricated chemical sensing and analysis devices for detecting and quantifying gas phase molecules, analyzing complex molecular mixtures, and carrying out high throughput screening of chemical compounds. Accelerometers are an example of a MEMS-based sensor that has almost completely displaced existing electromechanical substitute devices. Applications of MEMS to chemical sensing and analysis, however, are less mature and widespread adoption is less assured. In both cases, I evaluate the opportunities in the new technology from several different perspectives: (1) the factors that affect the transition from innovative technologies to marketable products; (2) the economic, market, and strategic forces that influence the adoption of these products; and (3) the business models of companies that have attempted to profit from MEMS innovations. I conclude the thesis with a chapter on potential strategic market barriers to successful commercialization of MEMS-based devices.
by Gary N. Robinson.
S.M.M.O.T.

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Cragun, Rebecca. "Thermal Microactuators for Microelectromechanical Systems (MEMS)". BYU ScholarsArchive, 2003. https://scholarsarchive.byu.edu/etd/54.

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Microactuators are needed to convert energy into mechanical work at the microscale. Thermal microactuators can be used to produce this needed mechanical work. The purpose of this research was to design, fabricate, and test thermal microactuators for use at the microscale in microelectromechanical systems (MEMS). The microactuators developed were tested to determine the magnitude of their deflection and estimate their force. Five groups of thermal microactuators were designed and tested. All of the groups used the geometrically constrained expansion of various segments to produce their deflection. The first group, Thermal Expansion Devices (TEDs), produced a rotational displacement and had deflections up to 20 µm. The second group, Bi-directional Thermal Expansion Devices (Bi-TEDs) were similar to the TEDs. The difference, as the name implies, was that the Bi-TEDs deflected up to 6 µm in two directions. Thermomechanical In-plane Micromechanisms (TIMs) were the third group tested. They produced a linear motion up to 20 µm. The fourth group was the Rapid Expansion Bi-directional Actuators (REBAs). These microactuators were bi-directional and produced up to 12 µm deflection in each direction. The final group of thermal microactuators was the Joint Actuating Micro-mechanical Expansion Systems (JAMESs). These thermal microactuators rotated pin joints up to 8 degrees. The thermal microactuators studied can be used in a wide variety of applications. They can move ratchets, position valves, move switches, change devices, or make connections. The thermal microactuator groups have their own unique advantages. The TIMS can be tailored for the amount of deflection and output force they produce. This will allow them to replace some microactuator arrays and decrease the space used for actuation. The Bi-TEDs and REBAs are bi-directional and can possibly replace two single direction micro-actuators. The JAMESs can be attached directly to a pin joint of an existing mechanism. These advantages allow these thermal microactuator groups to be used for a wide variety of applications.

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Lienstromberg, Christina. "On Microelectromechanical Systems with General Permittivity". Thesis, Université Paris-Saclay (ComUE), 2016. http://www.theses.fr/2016SACLN007/document.

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Dans le cadre de la thèse des modèles physico-mathématiques pour des microsystèmes électromécaniques avec une permittivité générale sont développés et analysés par des méthodes mathématiques modernes du domaine des équations aux dérivées partielles. En particulier ces systèmes sont à frontière libre et pour conséquence difficiles à traiter. Des méthodes numériques ont été développées pour valider les résultats analytiques obtenus
In the framework of this thesis physical/mathematical models for microelectromechanical systems with general permittivity have been developed and analysed with modern mathematical methods from the domain of partial differential equations. In particular these systems are moving boundary problems and thus difficult to handle. Numerical methods have been developed in order to validate the obtained analytical results

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Kim, Seong Jin Dean Robert Neal. "An evaluation system for mechanical and electrical characterization of MEMS devices". Auburn, Ala, 2009. http://hdl.handle.net/10415/1592.

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Corkovic, Silvana. "Piezoelectric thick films for microelectromechanical systems application". Thesis, Cranfield University, 2007. http://dspace.lib.cranfield.ac.uk/handle/1826/1826.

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This thesis concerns the processing and characterization of thick PZT sol-gel films for potential applications in MEMS devices. The deposition method was spin-coating. The aim was to reduce the number of coatings in the film processing by increasing the thickness of a single coating, with the restriction that the processed films must be crackfree and dense. Only by retaining the thick film dense, pore-free and crack-free one can obtain the piezoelectric properties in thick films that make the PZT thin sol-gel films attractive for the MEMS applications. Three PZT compositions, PZT 40/60, PZT 60/40 and PZT 52/48 were investigated. Each one of these PZT compositions has different crystallographic structure and thus differences in the piezoelectric properties were expected. The processing of thickness-increased sol-gel films was investigated. A combination of analysis techniques was employed. The stress development was monitored via ex-situ wafer deflection measurement after various fabrication steps. The ongoing processes in the sol-gel film were identified and correlated to certain temperature ranges and to the stress that is induced with each process in the film. It was found that crack-free films could be fabricated if a stress-controlled heating profile was applied. The PZT films were deposited on platinised silicon substrate and it was found that stress-related recrystallization was taking place in the platinum electrode which affected the total stress. After the platinum recrystallization the stress state in the bottom electrode and in the substrate was stable. Films up to 5 μm thick were obtained by repeated deposition of 200 nm thick single layers. The maximum thickness of a single coating was increased to 500 nm and a 2.5 μm film was fabricated by only 5 repeated coatings. The crystallographic orientation of all three employed PZT compositions was studied systematically on Pt/Si substrate at different thicknesses. Also, individual PZT films were deposited onto platinised sapphire substrates, or on LNO/Si substrate. It was found that the orientation of the films changes gradually with each coating. The residual stresses in all three PZT compositions were studied. A stress model for composite structures was applied for the first time in PZT films stress analysis. The results have shown that the residual stress at the room temperature is due to thermal expansion mismatch between the individual layers. Furthermore, a large orientation dependent stress variation was found in PZT 52/48 films that could be only explained if anisotropic thermal expansion in PZT were considered. The lattice parameters of all PZT compositions were determined and were in good agreement with the residual stress results. Thus, using the stress model it was possible to understand the origin of stress in PZT films. Finally, the electrical properties of the PZT films were determined. It was found that the piezoelectric, dielectric and ferroelectric properties of PZT films vary with PZT composition, film thickness and depend on the substrate type. Based on the finding it was proposed that there must be an interfacial layer that is responsible for domain wall pinning and thus reduced PZT properties in films below 5 μm thickness. In thick PZT 40/60 films enhanced piezoelectric properties were found making these PZT compositions very promising candidates for MEMS application.

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Hill, Tyrone F. (Tyrone Frank) 1980. "Analysis of DRIE uniformity for microelectromechanical systems". Thesis, Massachusetts Institute of Technology, 2004. http://hdl.handle.net/1721.1/18060.

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Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2004.
Includes bibliographical references (p. 81-82).
A quantitative model capturing pattern density effects in Deep Reactive Ion Etch (DRIE), which are important in MEMS, is presented. Our previous work has explored the causes of wafer-level variation and demonstrated die-to-die interactions resulting from pattern density and reactant species consumption. Several reports have focused on experimental evidence and modeling of feature level (aspect ratio) dependencies. This thesis contributes a computationally efficient and effective modeling approach which focuses on layout pattern density-induced nonuniformity in DRIE. This is a key component in an integrated model combining wafer-, die-, and feature-level DRIE dependencies to predict etch depth for an input layout and a characterized etch tool and process. The modeling approach proposed here is inspired by previous work in modeling of chemical mechanical polishing (CMP). Computationally, this involves the convolution of an etch "layout impulse response" function or filter with the layout information (or equivalently but more efficiently the multiplication of FFTs). The proposed model is validated by using a mask layer from the MIT Microengine project as a demonstration layout. The model can be tuned to predict the etch behavior to an accuracy of 0.1% RMS normalized error. Furthermore, a feature level model, which considers the effects of sidewall loading on the depletion of reactants is presented. Finally, methods of synthesizing dummy features to improve across-die uniformity in a layout are explored; a by tiling bare areas of the wafer into "fill zones," an improvement in intra-die uniformity is seen. In summary, a semi-empirical modeling approach has been developed for predicting the layout dependent pattern density nonuniformities present
(cont.) in DRIE. The approach can be tuned to specific tools and processes, and is computationally efficient. The model can serve as the basis for layout optimization to improve DRIE uniformity.
by Tyrone F. Hill.
S.M.

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Steyn, J. Lodewyk (Jasper Lodewyk) 1976. "Hydraulic amplification for actuation in microelectromechanical systems". Thesis, Massachusetts Institute of Technology, 2002. http://hdl.handle.net/1721.1/16834.

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Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Aeronautics and Astronautics, 2002.
Includes bibliographical references (p. [121]-123).
This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections.
In this work the concept of hydraulic amplification as a means of stroke amplification is explored for applications in MicroElectroMechanical Systems (MEMS). Building on the batch fabrication technologies of the semiconductor industry, MEMS technology could enable the simultaneous fabrication of multiple microhydraulic systems of which hydraulic amplifiers would form part. Precision lithography would furthermore make dense arrays of microhydraulic systems possible, with the eventual goal being to create high power density microscale actuation and power generation systems. This document provides an overview of the design considerations required for a successful microfabricated hydraulic amplifier, and proceeds to discuss the techniques developed to successfully fabricate, assemble and test such a device. Deep Reactive Ion Etching (DRIE) techniques were developed for creating strong tethered membrane structures using Silicon On Insulator (SOI) technology. Bonding techniques included silicon-silicon fusion bonding of fragile wafers and silicon-glass anodic bonding and alignment on the wafer and die level to produce multi-layered structures. Liquid filling of micromachined dead volumes through micron-size channels was performed. Static sealing techniques for leak-free sealing of micromachined, filled dead volumes with minimal seal compression and dynamic sealing techniques when quasi-static actuation is not a prerequisite were successfully developed. Using these techniques, several hydraulic amplification devices have been produced. Testing of these devices revealed good correlation with theoretical predictions. Stroke amplification ratios as high as 48 : 1 have been observed. In addition, natural frequencies of up to 10kHz were measured. In conclusion, this work verifies the viability of hydraulic amplification for applications in microscale actuation systems.
by J. Lodewyk Steyn.
S.M.

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Martyniuk, Mariusz. "Low-temperature micro-opto-electro-mechanical technologies for temperature sensitive substrates". University of Western Australia. School of Electrical, Electronic and Computer Engineering, 2006. http://theses.library.uwa.edu.au/adt-WU2007.0042.

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[Truncated abstract] The salient feature of next generation infrared (IR) on-chip integrated sensors is likely to be sensitivity in a narrow wavelength band that is tuneable over a selected range of the IR spectrum. It is proposed that this can be achieved by the integration of present-day HgCdTe IR detectors with thin-film based microelectro- mechanical systems (MEMS) optical mirror technology. Narrow-band sensitivity is obtained by optical resonance phenomena within a Fabry-Perot (FP) cavity, that is created by two Bragg reflectors and is monolithically integrated with an HgCdTe IR detector. Electrostatic actuation of the thin-film membrane supported Bragg reflector is the means of providing wavelength discrimination of the incident IR photons which, for example, could be used for target discrimination or detection of various chemical/biological species via identification of narrow spectral features . . . The outcomes from this thesis have been incorporated into a monolithic integrated technology comprising low-temperature MEMS and HgCdTe IR detector technology. The integrated technology has been shown to be viable, and successful prototypes have been fabricated. Structural properties of the SiNx, SiOx, and Ge layers encompassed in the suspended IR reflector have allowed for IR photon detection in a narrow wavelength band with full-width at halfmaximum of ∼100nm that is tunable over a wavelength range from 2.2 to 1.85μm using a maximum tuning voltage of only 7.5V. Although the thesis objectives have been focused on a specific application related to multi-spectral IR detection technology as a demonstration vehicle, the findings of this thesis are directly applicable to any MEMS technologies that are to be merged with temperaturesensitive substrates/materials.

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Giner, de Haro Joan Josep. "Development of microelectromechanical systems for RF signal processing". Doctoral thesis, Universitat Autònoma de Barcelona, 2012. http://hdl.handle.net/10803/96241.

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El objectiu d’aquesta tesis ha sigut l’estudi de ressonadors CMOS-MEMS monolíticament integrats per a la seva aplicació en transceptors de radio freqüència. En concret s’ha treballat sobre filtre y ressonadors de RF així com la seva caracterització. En el camp del filtres s’han investigat dos tipus de conceptes: el filtres series i els filtres paral·lels. Els filtre sèrie desenvolupats en aquesta tesi consten de dos tipus d’acoblament: acoblament mecànic, dintre dels quals s’han estudiat dos tipus d’acobladors (en forma de U i en forma de V) i l’acoblament electrostàtic. En els filtres mecànics el ample de banda es defineix amb el disseny de l’acoblador i el punt d’acoblament amb el ressonador mentre que en els filtre electrostàtics, en teoria, el ample de banda el fixa la diferencia de tensió entre els ressonadors. Els filtres en paral·lel, permeten aconseguir, gracies a la seva integració amb la circuiteria, una millor del rebuig fora de banda comparats amb els filtres anteriors. D’altra banda s’ha combinat el filtrat paral·lel i els filtres series per aconseguir un filtre dual. En el camp dels ressonador en el rang de VHF i UHF s’han dissenya fabricat i mesurat dos tipus de ressonador basat en la ressonància longitudinal de la estructura (LBAR): el LBAR millorat, al que se li han afegit dues masses en els seus extrem lliures, i que treballa a una freqüència de 250MHz i el LBAR hiperbòlic, capaç d’assolir freqüències al voltant dels 380MHz S’ha estudiat la caracterització dels elements ressonant d’aquesta tesis, transduits electrostàticament. S’ha proposat una nova topologia basada en la fabricació de quatre elèctrodes que permet eliminar per complert la capacitat paràsita en aquest tipus de transducció.
The objective of this thesis is the study of CMOS MEMS monolithically integrated resonators, for RF transceivers applications. In particular, it has focuses on design and characterization of RF resonators and filters. Two types of filter concepts have been investigated: series filtering and parallel filtering. The series filters are composed of two different coupling methods: mechanical couplings that are divided into two types of couplers (the U-coupler and the V-coupler), and the electrostatic coupling. In mechanical coupled resonator filters, the bandwidth is fixed through the coupler design and the selection of its coupling point with the resonator whereas in the electrostatic filters the voltage applied between the constituent resonators fixes the bandwidth. The parallel filter allows increasing the out of band rejection due to the integration with circuitry. Finally, the parallel filtering and series filtering have been combined to achieve a dual filter. In the field of RF resonators, two types of resonator based on longitudinal acoustic resonance have been designed, fabricated, and measured: The enhanced LBAR, that includes to masses at the free ends in order to increase the coupling area, works at 250MHz and the hyperbolic LBAR that is capable to reach 380MHz resonant frequency. The electrostatic actuated mad capacitive read MEM devices characterization has been studied. In addition a new four-electrode based topology has been propose in order to cancel the feedthrough current that exists in this type of transduction.

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Frank, Niklaus. "Adhesive Wafer Bonding for Microelectronic and Microelectromechanical Systems". Doctoral thesis, KTH, Signals, Sensors and Systems, 2002. http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-3410.

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Semiconductor wafer bonding has been a subject of interestfor many years and a wide variety of wafer bonding techniqueshave been reported in literature. In adhesive wafer bondingorganic and inorganic adhesives are used as intermediatebonding material. The main advantages of adhesive wafer bondingare the relatively low bonding temperatures, the lack of needfor an electric voltage or current, the compatibility withstandard CMOS wafers and the ability to join practically anykind of wafer materials. Adhesive wafer bonding requires nospecial wafer surface treatmentssuch as planarisation.Structures and particles at the wafer surfaces can be toleratedand compensated for some extent by the adhesive material.Adhesive wafer bonding is a comparably simple, robust andlowcost bonding process. In this thesis, adhesive wafer bondingtechniques with different polymer adhesives have beendeveloped. The relevant bonding parameters needed to achievehigh quality and high yield wafer bonds have been investigated.A selective adhesive wafer bonding process has also beendeveloped that allows localised bonding on lithographicallydefined wafer areas.

Adhesive wafer bonding has been utilised in variousapplication areas. A novel CMOS compatible film, device andmembrane transfer bonding technique has been developed. Thistechnique allows the integration of standard CMOS circuits withthin film transducers that can consist of practically any typeof crystalline or noncrystalline high performance material(e.g. monocrystalline silicon, gallium arsenide,indium-phosphide, etc.). The transferred transducers or filmscan be thinner than 0.3 µm. The feature sizes of thetransferred transducers can be below 1.5 µm and theelectrical via contacts between the transducers and the newsubstrate wafer can be as small as 3x3 µm2. Teststructures for temperature coefficient of resistancemeasurements of semiconductor materials have been fabricatedusing device transfer bonding. Arrays of polycrystallinesilicon bolometers for use in uncooled infrared focal planearrays have been fabricated using membrane transfer bonding.The bolometers consist of free-hanging membrane structures thatare thermally isolated from the substrate wafer. Thepolycrystalline silicon bolometers are fabricated on asacrificial substrate wafer. Subsequently, they are transferredand integrated on a new substrate wafer using membrane transferbonding. With the same membrane transfer bonding technique,arrays of torsional monocrystalline silicon micromirrors havebeen fabricated. The mirrors have a size of 16x16 µm2 anda thickness of 0.34 µm. The advantages of micromirrorsmade of monocrystalline silicon are their flatness, uniformityand mechanical stability. Selective adhesive wafer bonding hasbeen used to fabricate very shallow cavities that can beutilised in packaging and component protection applications. Anew concept is proposed that allows hermetic sealing ofcavities fabricated using adhesive wafer bonding. Furthermore,microfluidic devices, channels and passive valves for use inmicro total analysis systems are presented.

Adhesive wafer bonding is a generic CMOS compatible bondingtechnique that can be used for fabrication and integration ofvarious microsystems such as infrared focal plane arrays,spatial light modulators, microoptical systems, laser systems,MEMS, RF-MEMS and stacking of active electronic films forthree-dimensional high-density integration of electroniccircuits. Adhesive wafer bonding can also be used forfabrication of microcavities in packaging applications, forwafer-level stacking of integrated circuit chips (e.g. memorychips) and for fabrication of microfluidic systems.

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Lienstromberg, Christina [Verfasser]. "On microelectromechanical systems with general permittivity / Christina Lienstromberg". Hannover : Technische Informationsbibliothek (TIB), 2016. http://d-nb.info/1099105137/34.

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Farnsworth, Michael. "Multi-level and multidisciplinary optimisation of microelectromechanical systems". Thesis, Cranfield University, 2012. http://dspace.lib.cranfield.ac.uk/handle/1826/8048.

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A comparative investigation into the role multi-level and multidisciplinary design optimisation can play in the automated design synthesis of microelectromechanical systems (MEMS) is presented. Microelectromechanical systems are a field grown out of the integrated circuit industry, with the goal of developing smart micro devices which can interact with the environment in some form. They promise to revolutionise our present day lifestyles as much as the integrated circuit has done in recent decades. The complexity in fabrication, the delicacy in size that each device encompasses and the multidisciplinary nature means design synthesis is a highly complicated process. Current challenges stemming from their design include the high levels of computational cost required in their modeling and analysis, and the often increasing complexity of design through the coupling of multiple components and devices into a functioning system. The development of automated design synthesis tools and methodologies to aid MEMS design is therefore important to overcome these challenges in order to accommodate the growing field of MEMS as it expands into more and more areas and continues opening up to more and more applications. An update of the current state of the art in automated MEMS design synthesis and optimisation is first presented, utilizing state of the art multi-objective evolutionary algorithms over five separate MEMS design optimisation case studies. The field of multilevel and multidisciplinary optimisation is critically reviewed and discussed with respect to their application to MEMS design synthesis and optimisation. The outcome is twofold, with the construction of both a novel multidisciplinary optimisation algorithm tailored towards MEMS design and a set of multi-level design optimisation strategies. This thesis next outlines and develops a novel modular soft computing framework to house the multi-objective, multi-level and multidisciplinary design optimisation strategies. In order to evaluate both the current state of the art in automated MEMS design synthesis and the multi-level and multidisciplinary optimisation strategies outlined a hierarchical MEMS bandpass filter case study has been constructed. Incorporating a novel state of the art electrical equivalent modelling and design synthesis approach, six novel design problems structured around the MEMS bandpass filter were developed and formed the basis for the comparative study to follow. Finally both the current state of the art in automated MEMS design synthesis, multiobjective evolutionary algorithms, and the outlined and developed multi-level and multidisciplinary optimisation strategies are applied to the six design problems developed. Comparative analysis and discussion is then given, showing a marked improvement in MEMS design synthesis for the multi-level and multidisciplinary optimisation strategies over the current state of the art methodology.

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Chua, D. H. C. "Diamond-like carbon for microelectromechanical systems (MEMS) applications". Thesis, University of Cambridge, 2005. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.597675.

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This work investigates Diamond-like Carbon thick and thin films for applications in Microelectromechanical systems (MEMS). As such, this work intends to combine 2 highly specialized but independent research issues. In the field of diamond and related materials, there are many types of diamond-like carbon films. In this work, nonhydrogenated tetrahedral amorphous carbon (ta-C) and amorphous Carbon (a-C) types of diamond-like carbon films were investigated. High density ta-C films have been deposited with Young's modulus of ~750GPa, density of 3.4 g/cm³ and optical gap of 3.9eV. After gaining a thorough understanding of basic ta-C growth and characterization, the next step was to increase the film thickness. Previously, the thickness of these films was limited due to the intrinsic compressive residual stress of ~9 GPa. In this section, various methods of thick film deposition were investigated, including thermal annealing, soft underlayer substrates, substrate biasing and hybrids consisting of two or more of the above. Substrate biasing using a pulsed and high voltage is a unique technique known as plasma ion immersion implantation (PHI). Films deposited by PHI had lower sp³ content and thus are labeled amorphous Carbon (a-C). These films have been tested to have residual stress

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Roberts, Robert Christopher. "Jet Printed Au Nanoparticle Films For Microelectromechanical Systems". Case Western Reserve University School of Graduate Studies / OhioLINK, 2012. http://rave.ohiolink.edu/etdc/view?acc_num=case1342809712.

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Mangels, John Donald III, Syed Ammar Raza, Kevin Mueller, Namrah Habib, Josh Raymond, Daniel Brauer, Mohammed Azri Adb Rahim i in. "Micro-Air Vehicle Control Using Microelectromechanical Systems Sensors". Thesis, The University of Arizona, 2017. http://hdl.handle.net/10150/625078.

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Micro Air Vehicles (MAV) are small unmanned aircraft that are highly sensitive to environmental disturbances causing dynamic changes in attitude and flight stability compared to more traditional unmanned air vehicles. Controlling the stability of an MAV is difficult and a significant research issue. The goal of this project is to perform a proof of concept study based on literature to demonstrate that Microelectromechanical Systems (MEMS) sensors can control the longitudinal stability of an MAV. MEMS sensors, specifically flow sensors used in this project, predict perturbations and aerodynamic effects which is critical for MAV performance because flight predictions can be used to prevent stall and failure in an MAV. The project focused on developing a control system that implemented MEMS sensors on a wing section and was tested in The University of Arizona's Educational Wind Tunnel.

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Raza, Syed Ammar, Kevin Mueller, Daniel Brauer, Namrah Habib, John Mangels, Azri Rahim, Joshua Raymond i in. "Micro-Air Vehicle Control Using Microelectromechanical Systems Sensors". Thesis, The University of Arizona, 2017. http://hdl.handle.net/10150/625128.

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Moulton, Kellen S. "Straightness of Growth for Carbon Nanotube Microelectromechanical Systems". BYU ScholarsArchive, 2010. https://scholarsarchive.byu.edu/etd/2413.

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The purpose of this research is to examine the effect of iron catalyst thickness on the straightness of growth of carbon nanotube microelectromechanical systems (CNT-MEMS). One of the key benefits of CNT-MEMS is that they can potentially have very high aspect ratios. One of the challenges in attaining these high aspect ratios is maintaining device straightness; as these devices get taller, the edges tend to curve rather than grow straight vertically. Scanning electron mi- croscope images of samples grown using various iron catalyst thicknesses show that both straight growth and relatively good edge definition can be achieved using iron thicknesses between 7 and 8 nm. Below this thickness, individual CNT are well-aligned, but CNT forests are not necessarily straight. Above this thickness, the CNT forests are relatively straight, but individual CNT are not well-aligned and edge definition is very poor. Iron availability for CNT growth is also affected by a device's or feature's proximity to other regions of iron. By using an iron catalyst thickness ap- propriate for straight growth, and by adding borders of iron around features or devices, a designer can greatly improve straightness of growth for CNT-MEMS.

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Joung, Yeun-Ho. "Electroplating bonding technology for chip interconnect, wafer level packaging and interconnect layer structures". Diss., Available online, Georgia Institute of Technology, 2004:, 2003. http://etd.gatech.edu/theses/available/etd-04052004-180025/unrestricted/joung%5Fyeun-ho%5F200312%5Fphd.pdf.

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Lee, Wook. "Diffraction-based integrated optical readout for micromachined optomechanical sensors". Diss., Available online, Georgia Institute of Technology, 2006, 2006. http://etd.gatech.edu/theses/available/etd-09292006-115918/.

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Thesis (Ph. D.)--Electrical and Computer Engineering, Georgia Institute of Technology, 2006.
F. Levent Degertekin, Committee Chair ; David S. Citrin, Committee Member ; Paul E. Hasler, Committee Member ; Peter J. Hesketh, Committee Member ; Zhiping Zhou, Committee Member.

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Wittwer, Jonathan W. "Simulation-Based Design Under Uncertainty for Compliant Microelectromechanical Systems". Diss., CLICK HERE for online access, 2005. http://contentdm.lib.byu.edu/ETD/image/etd723.pdf.

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DelRio, Frank William. "Van der Waals and capillary adhesion in microelectromechanical systems". Diss., Connect to online resource, 2006. http://gateway.proquest.com/openurl?url_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:dissertation&res_dat=xri:pqdiss&rft_dat=xri:pqdiss:3239374.

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Reynen, Gregory Peter. "Leveraging eigenvalue veering for improved sensing with microelectromechanical systems". Thesis, University of British Columbia, 2012. http://hdl.handle.net/2429/42808.

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Energy localization in nearly periodic microsystems can be leveraged to create a new sensing paradigm that is orders of magnitude more sensitive than current resonant-frequency based systems. In this thesis, the theory which supports this claim is independently developed from a mathematical description of a two degree-of-freedom resonant system. A novel proof-of-concept microelectromechanical system (MEMS) was also designed and fabricated to support the theoretical claims. The system employed a unique resonator design with two different approaches to inducing asymmetry in the system which in turn leads to the localization of energy in one of the resonators. The system proved the resonant frequency dependence on disorder in the system and also showed that the eigenvector sensitivity to disorder was at least an order of magnitude greater than the frequency sensitivity. However, the eigenvector sensitivity could not be matched with theory. This was likely due to the time-varying nature of the coupling spring stiffness (up to a 300% change in magnitude). The coupling spring stiffness was time-varying due to the inverse cubic relationship to coupling gap distance. The gap distance changes with time since it is practically impossible to excite only the common mode, leading to a superposition with the anti-phase mode. This was partially due to the input signal displaying non harmonic tendencies. At the same time, energy localization in the system leads to different amplitudes of vibration for each resonator which will also lead to gap distance modulation. A three degree-of-freedom system was also examined theoretically with different approaches to stiffness perturbation and the resultant sensitivity expressions which can be leveraged for improved sensors were developed. The analysis shows that three degree-of-freedom systems can yield a 250% improvement over two degree-of-freedom systems which themselves are practically able to provide three to four order of magnitude improvements in sensitivity over resonant-frequency based sensors of the same size. The tools and insight needed to design for higher degree-of-freedom system are also provided in the form of the eigen-derivatives approach to calculating eigenvalue and eigenvector sensitivity to disorder in a symmetric system.

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Ma, Wei. "Low temperature metal-based micro fabrication and packaging technology /". View abstract or full-text, 2005. http://library.ust.hk/cgi/db/thesis.pl?MECH%202005%20MA.

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Cookson, Jeremy L. "A method for testing the dynamic accuracy of Microelectro-Mechanical Systems (MEMS) Magnetic, Angular Rate, and Gravity (MARG) sensors for Inertial Navigation Systems (INS) and human motion tracking applications". Thesis, Monterey, California : Naval Postgraduate School, 2010. http://edocs.nps.edu/npspubs/scholarly/theses/2010/Jun/10Jun%5FCookson.pdf.

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Thesis (M.S. in Electrical Engineering)--Naval Postgraduate School, June 2010.
Thesis Advisor(s): Yun, Xiaoping ; Second Reader: Romano, Marcello. "June 2010." Description based on title screen as viewed on July 14, 2010. Author(s) subject terms: micro-electro-mechanical systems, MEMS, magnetic, angular rate, gravity sensor, MARG sensors, inertial navigation system, INS, inertial test, MicroStrain, 3DM-GX1, 3DMGX3, CompactRIO, MATLAB GUI, dynamic accuracy test. Includes bibliographical references (p. 187-189). Also available in print.

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Cho, Jeong-Hyun. "Design, fabrication, and characterization of a MEMS thermal switch and integration with a dynamic micro heat engine". Online access for everyone, 2007. http://www.dissertations.wsu.edu/Dissertations/Fall2007/J_Cho_111607.pdf.

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Mustafa, Haithem Ali Babiker. "Development of a noncontact current sensor based on MEMS technology". Thesis, Cape Peninsula University of Technology, 2007. http://hdl.handle.net/20.500.11838/1082.

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Thesis (MTech (Technology))--Cape Peninsula University of Technology, 2007
Most ofMEMS sensors are based on the micro-cantilever technology, which use wide range of different design materials and structures. The benefit ofMEMS technology is in developing devices having lower cost, lower power consumption, higher performance, and integration. A free-end cantileverbeam made of magnetic material (PerrnaIloy) and a movable mass attached to the free-end has been designed using MEMS software tools. The magnetic material was used to improve the sensitivity of the cantilever-beam to an external applied magnetic field. The deflection of the cantilever was detected using capacitive sensing method. The aim of this research was to develop a non-contact current sensor based on MEMS technology by analysing the simulation of the system design of the micro cantilever when subjected to a magnetic field produced by a current-carrying conductor. When the signal, a sinusoidal current with a constant frequency is applied, the cantilever-beam exhibits a vibration motion along the vertical axis when it is placed closer to the line current. This creates corresponding capacitance changes and generates a voltage output proportional to the capacitive change in the signal processing circuitry attached to the micro cantilever. Modelling of the magnetic moment of a magnetic cantilever-beam placed in a field, the deflection of { the beam, the natural frequency of the cantilever-beam, the maximum deflection, the change in differential capacitive sensing technique, linearity of the differential capacitive, and capacitive sensitivity the circuit designed for readout was derived.

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Machiraju, Harita. "Thermal analysis and design of a MEMS-based safety and arming system". Diss., Online access via UMI:, 2007.

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Dawson, Jeremy M. "Through-wafer interrogation of MEMS device motion". Morgantown, W. Va. : [West Virginia University Libraries], 1999. http://etd.wvu.edu/templates/showETD.cfm?recnum=856.

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Thesis (M.S.)--West Virginia University, 1999.
Title from document title page. Document formatted into pages; contains xii, 122 p. : ill. (some col.) Includes abstract. Includes bibliographical references (p. 119-122).

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Forester, Sean M. "Energy harvesting for self-powered, ultra-low power microsystems with a focus on vibration-based electromechanical conversion". Thesis, Monterey, California : Naval Postgraduate School, 2009. http://edocs.nps.edu/npspubs/scholarly/theses/2009/Sep/09Sep%5FForester.pdf.

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Thesis (M.S. in Computer Science)--Naval Postgraduate School, September 2009.
Thesis Advisor(s): Singh, Gurminder ; Gibson, John. "September 2009." Description based on title screen as viewed on November 6, 2009. Author(s) subject terms: Microelectromechanical systems, photovoltaic, piezoelectric, thermocouple, power harvesting, energy scavenging, thermoelectric. Includes bibliographical references (p. 59-65). Also available in print.

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Xiong, Xiaorong. "Controlled multi-batch self-assembly of micro devices /". Thesis, Connect to this title online; UW restricted, 2004. http://hdl.handle.net/1773/5917.

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Wang, Limin. "Modeling and real-time feedback control of MEMS device". Morgantown, W. Va. : [West Virginia University Libraries], 2004. https://etd.wvu.edu/etd/controller.jsp?moduleName=documentdata&jsp%5FetdId=3711.

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Thesis (Ph. D.)--West Virginia University, 2004.
Title from document title page. Document formatted into pages; contains v, 132 p. : ill. (some col.). Includes abstract. Includes bibliographical references (p. 128-132).

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Alastalo, Ari. "Microelectromechanical resonator-based components for wireless communications : filters and transmission lines /". Espoo VTT, 2006. http://www.vtt.fi/inf/pdf/publications/2006/P616.pdf.

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Bolognini, Francesca. "An integrated simulation-based generative design method for microelectromechanical systems". Thesis, University of Cambridge, 2009. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.611409.

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Klaubert, Heather L. "Tiny design : a study of the design of microelectromechanical systems". Thesis, University of Cambridge, 1998. https://www.repository.cam.ac.uk/handle/1810/272160.

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Younis, Mohammad Ibrahim. "Modeling and Simulation of Microelectromechanical Systems in Multi-Physics Fields". Diss., Virginia Tech, 2004. http://hdl.handle.net/10919/11202.

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The first objective of this dissertation is to present hybrid numerical-analytical approaches and reduced-order models to simulate microelectromechanical systems (MEMS) in multi-physics fields. These include electric actuation (AC and DC), squeeze-film damping, thermoelastic damping, and structural forces. The second objective is to investigate MEMS phenomena, such as squeeze-film damping and dynamic pull-in, and use the latter to design a novel RF-MEMS switch. In the first part of the dissertation, we introduce a new approach to the modeling and simulation of flexible microstructures under the coupled effects of squeeze-film damping, electrostatic actuation, and mechanical forces. The new approach utilizes the compressible Reynolds equation coupled with the equation governing the plate deflection. The model accounts for the slip condition of the flow at very low pressures. Perturbation methods are used to derive an analytical expression for the pressure distribution in terms of the structural mode shapes. This expression is substituted into the plate equation, which is solved in turn using a finite-element method for the structural mode shapes, the pressure distributions, the natural frequencies, and the quality factors. We apply the new approach to a variety of rectangular and circular plates and present the final expressions for the pressure distributions and quality factors. We extend the approach to microplates actuated by large electrostatic forces. For this case, we present a low-order model, which reduces significantly the cost of simulation. The model utilizes the nonlinear Euler-Bernoulli beam equation, the von K´arm´an plate equations, and the compressible Reynolds equation. The second topic of the dissertation is thermoelastic damping. We present a model and analytical expressions for thermoelastic damping in microplates. We solve the heat equation for the thermal flux across the microplate, in terms of the structural mode shapes, and hence decouple the thermal equation from the plate equation. We utilize a perturbation method to derive an analytical expression for the quality factor of a microplate with general boundary conditions under electrostatic loading and residual stresses in terms of its structural mode shapes. We present results for microplates with various boundary conditions. In the final part of the dissertation, we present a dynamic analysis and simulation of MEMS resonators and novel RF MEMS switches employing resonant microbeams. We first study microbeams excited near their fundamental natural frequencies (primary-resonance excitation). We investigate the dynamic pull-in instability and formulate safety criteria for the design of MEMS sensors and RF filters. We also utilize this phenomenon to design a low-voltage RF MEMS switch actuated with a combined DC and AC loading. Then, we simulate the dynamics of microbeams excited near half their fundamental natural frequencies (superharmonic excitation) and twice their fundamental natural frequencies (subharmonic excitation). For the superharmonic case, we present results showing the effect of varying the DC bias, the damping, and the AC excitation amplitude on the frequency-response curves. For the subharmonic case, we show that if the magnitude of the AC forcing exceeds the threshold activating the subharmonic resonance, all frequency-response curves will reach pull-in.
Ph. D.

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Xuqian, Zheng. "Lead Zirconate Titanate Piezoelectric Cantilevers for Multimode Vibrating Microelectromechanical Systems". Case Western Reserve University School of Graduate Studies / OhioLINK, 2015. http://rave.ohiolink.edu/etdc/view?acc_num=case1428592535.

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Nabholz, Ulrike. "Physical Modelling and Identification of Nonlinear Effects in Microelectromechanical Systems". Universitätsverlag Chemnitz, 2020. https://monarch.qucosa.de/id/qucosa%3A73139.

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Analytical and semi-analytical physical models for MEMS are derived from nonlinear mechanics. By taking into account system characteristics and assumptions, system identification enables the derivation of a mathematical model that is tailored to the effect and the MEMS under analysis. Such an adapted model can successfully emulate and explain the nonlinear dynamics of individual MEMS, including resonant actuation of parasitic modes. The performed analyses also confirm that small deviations in the mode spectrum between devices influence the occurrence of nonlinear effects.:1 Introduction 2 MEMS: Design, Devices & Modelling 3 Nonlinear Mechanics of Dynamical Systems 4 Modelling Approach 5 System Identification & Characterization 6 Conclusion
Analytische und semi-analytische physikalische Modelle für MEMS werden aus der nichtlinearen Mechanik abgeleitet. Durch die Berücksichtigung systemspezifischer Merkmale und Annahmen, ermöglicht die Systemidentifikation das Ableiten eines mathematischen Modells, das auf den analysierten Effekt und das MEMS zugeschnitten ist. Ein solches Modell kann für die Erklärung der nichtlinearen Dynamik einzelner MEMS herangezogen werden und bildet erfolgreich nichtlineare Effekte nach, einschließlich des resonanten Aufschwingens von Parasitärmoden. Die durchgeführten Analysen bestätigen auch, dass geringe Abweichungen im Modenspektrum zwischen Bauteilen das Auftreten nichtlinearer Effekte beeinflussen.:1 Introduction 2 MEMS: Design, Devices & Modelling 3 Nonlinear Mechanics of Dynamical Systems 4 Modelling Approach 5 System Identification & Characterization 6 Conclusion

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Rittenhouse, Scott A. "Diagnosis of operational changes in microelectromechanical systems via fault detection". Morgantown, W. Va. : [West Virginia University Libraries], 2004. https://etd.wvu.edu/etd/controller.jsp?moduleName=documentdata&jsp%5FetdId=3632.

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Thesis (M.S.)--West Virginia University, 2004.
Title from document title page. Document formatted into pages; contains v, 141 p. : ill. (some col.). Includes abstract. Includes bibliographical references (p. 137-141).

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Lemay, Scott A. "Microelectromecanical propulsion systems for spacecraft". Monterey, California: Naval Postgraduate School, 2002. http://hdl.handle.net/10945/9767.

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Approved for public release; distribution is unlimited
This is a survey of current research on micropropulsion options for very small satellites (less than ten kilogram). The concentration of research and performance evaluations utilize Micro Systems Technology (MST) and Micro Electromechanical Systems technology (MEMS) integrated with existing theories. State of the art methods used for the design and manufacturing of MEMS devices are included to provide a size perspective of microthruster technology. Nine viable microthruster options are presented, including a detailed performance analysis of the Pulsed Plasma Thruster. Exploration of the future role of micropropulsion in space is the influential factor benefiting research efforts on extremely small scale microthrusters. Significant background information on astrodynamics is included to assist the intended reader: a student of Engineering Science with interest in the Aerospace Propulsion Industry.

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Kanikella, Phaninder Reddy. "Process development and applications of a dry film photoresist". Diss., Rolla, Mo. : University of Missouri-Rolla, 2007. http://scholarsmine.umr.edu/thesis/pdf/Kanikella_09007dcc803c3a3a.pdf.

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Thesis (M.S.)--University of Missouri--Rolla, 2007.
Vita. The entire thesis text is included in file. Title from title screen of thesis/dissertation PDF file (viewed December 6, 2007) Includes bibliographical references.

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