Artykuły w czasopismach: „Microcantilever Beam”

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Kim, Yun Young. "An evaluation technique for high-frequency dynamic behavior of a sandwich microcantilever beam". Journal of Sandwich Structures & Materials 21, nr 3 (22.05.2017): 1133–49. http://dx.doi.org/10.1177/1099636217708146.

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A method was developed to measure the first- and second-order vibration modes in a sandwich microcantilever beam oscillating in the megahertz frequency regime in the present study. Taking advantage of the ultrasonic frequency, a test platform was developed to induce free vibration of the microcantilever using a high-power radio frequency pulser that transmits tone burst signals to a contact transducer, and the resonant frequencies of the microcantilever were measured using a laser-optic interferometer. Results show that the microcantilever’s vibration above 8 MHz can be successfully detected, and its vibration modes were identified through a theoretical study based on the Euler–Bernoulli beam theory and a numerical analysis using the finite element method. The present study proposes a facile and effective way to actuate a high-speed sandwich microcantilever and detect its high-frequency response so that the technique can be employed to study the characteristics of micro- and nanomechanical sandwich structures and their properties.

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LIM, TEIK-CHENG. "ANALYSIS OF AUXETIC BEAMS AS RESONANT FREQUENCY BIOSENSORS". Journal of Mechanics in Medicine and Biology 12, nr 05 (grudzień 2012): 1240027. http://dx.doi.org/10.1142/s0219519412400271.

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The mechanics of beam vibration is of fundamental importance in understanding the shift of resonant frequency of microcantilever and nanocantilever sensors. Unlike the simpler Euler–Bernoulli beam theory, the Timoshenko beam theory takes into consideration rotational inertia and shear deformation. For the case of microcantilevers and nanocantilevers, the minute size, and hence low mass, means that the topmost deviation from the Euler–Bernoulli beam theory to be expected is shear deformation. This paper considers the extent of shear deformation for varying Poisson's ratio of the beam material, with special emphasis on solids with negative Poisson's ratio, which are also known as auxetic materials. Here, it is shown that the Timoshenko beam theory approaches the Euler–Bernoulli beam theory if the beams are of solid cross-sections and the beam material possess high auxeticity. However, the Timoshenko beam theory is significantly different from the Euler–Bernoulli beam theory for beams in the form of thin-walled tubes regardless of the beam material's Poisson's ratio. It is herein proposed that calculations on beam vibration can be greatly simplified for highly auxetic beams with solid cross-sections due to the small shear correction term in the Timoshenko beam deflection equation.

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Mouro, João, Rui Pinto, Paolo Paoletti i Bruno Tiribilli. "Microcantilever: Dynamical Response for Mass Sensing and Fluid Characterization". Sensors 21, nr 1 (27.12.2020): 115. http://dx.doi.org/10.3390/s21010115.

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A microcantilever is a suspended micro-scale beam structure supported at one end which can bend and/or vibrate when subjected to a load. Microcantilevers are one of the most fundamental miniaturized devices used in microelectromechanical systems and are ubiquitous in sensing, imaging, time reference, and biological/biomedical applications. They are typically built using micro and nanofabrication techniques derived from the microelectronics industry and can involve microelectronics-related materials, polymeric materials, and biological materials. This work presents a comprehensive review of the rich dynamical response of a microcantilever and how it has been used for measuring the mass and rheological properties of Newtonian/non-Newtonian fluids in real time, in ever-decreasing space and time scales, and with unprecedented resolution.

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Song, Ya Qin, i Xiao Gang Yang. "Photothermal Response in Semiconducting Microcantilevers Produced by Laser Excitation". Advanced Materials Research 705 (czerwiec 2013): 81–84. http://dx.doi.org/10.4028/www.scientific.net/amr.705.81.

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The elastic vibration of semiconducting microcantilever, which was excited with a frequency-modulated pump laser, was optically detected use another probe beam. The photothermal signals were measurement near the resonant frequency. The changes of vibration amplitude and phase with the change of modulation frequency were obtained for a set of different sized microcantilevers. The results showed that the experimental results had a good agreement with the theoretical ones.

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Liu, Xing Fang, Guo Guo Yan, Zhan Wei Shen, Zheng Xin Wen, Jun Chen, Ya Wei He, Wan Shun Zhao i in. "Theoretical Calculation and Simulation for Microcantilevers Based on SiC Epitaxial Layers". Materials Science Forum 954 (maj 2019): 26–30. http://dx.doi.org/10.4028/www.scientific.net/msf.954.26.

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The resonant frequency and Q factor of the SiC microcantilever were theoretically analyzed and calculated based on the stereotyped basic theories of the cantilever beam, and the relationship between the vibration mode and structure geometries was also simulated. Modal analysis by means of finite element method was performed on millimeter-, micron-and nanoscale microcantilevers, and the results showed that the smaller the microstructure was, the higher the resonant frequency can be obtained. The Q factor can be extracted from hamonic spectra after modal analysis, and the amplitude of Q factor was about 105. This paper shows that SiC epitaxial layers have great potential in microcantilevers.

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Formica, Giovanni, Walter Lacarbonara i Hiroshi Yabuno. "Nonlinear Dynamic Response of Nanocomposite Microbeams Array for Multiple Mass Sensing". Nanomaterials 13, nr 11 (5.06.2023): 1808. http://dx.doi.org/10.3390/nano13111808.

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A nonlinear MEMS multimass sensor is numerically investigated, designed as a single input-single output (SISO) system consisting of an array of nonlinear microcantilevers clamped to a shuttle mass which, in turn, is constrained by a linear spring and a dashpot. The microcantilevers are made of a nanostructured material, a polymeric hosting matrix reinforced by aligned carbon nanotubes (CNT). The linear as well as the nonlinear detection capabilities of the device are explored by computing the shifts of the frequency response peaks caused by the mass deposition onto one or more microcantilever tips. The frequency response curves of the device are obtained by a pathfollowing algorithm applied to the reduced-order model of the system. The microcantilevers are described by a nonlinear Euler-Bernoulli inextensible beam theory, which is enriched by a meso-scale constitutive law of the nanocomposite. In particular, the microcantilever constitutive law depends on the CNT volume fraction suitably used for each cantilever to tune the frequency bandwidth of the whole device. Through an extensive numerical campaign, the mass sensor sensitivity estimated in the linear and nonlinear dynamic range shows that, for relatively large displacements, the accuracy of the added mass detectability can be improved due to the larger nonlinear frequency shifts at resonance (up to 12%).

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Munguia Cevantes, Jacobo Esteban, Juan Vicente Méndez Méndez, Hector Francisco Mendoza León, Miguel Ángel Alemán Arce, Salvador Mendoza Acevedo i Horacio Estrada Vázquez. "Si3N4 Young’s modulus measurement from microcantilever beams using a calibrated stylus profiler". Superficies y Vacío 30, nr 1 (25.03.2017): 10–13. http://dx.doi.org/10.47566/2017_syv30_1-010010.

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Stylus surface profiler has been widely used in order to measure Young’s modulus of silicon nitride (Si3N4) from microcantilever beams. Until now, several Si3N4 Young’s modulus values have been reported. It may be due to incomplete assessment of the microcantilever beams bending over its entire length or a lack of calibration of the stylus force system used in those works. We presented in this work an alternative method to measure the elastic modulus of MEMS thin layers in a rather accurate manner. A stylus force calibration is reported from a calibrated silicon microcantilever beam in order to measure the Si3N4 Young’s modulus. We reported Si3N4 Young´s modulus from three microcantilever beams, with values of 219.4 ± 0.6 GPa, 230.1 ± 3.4 GPa and 222 ± 11 GPa for 50 µm, 100 µm and 200 µm wide respectively, which are in good agreement with respect to the Si3N4 Young´s modulus which have been determined by other methods.

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Mojahedi, M., i M. Rahaeifard. "Static Deflection and Pull-In Instability of the Electrostatically Actuated Bilayer Microcantilever Beams". International Journal of Applied Mechanics 07, nr 06 (grudzień 2015): 1550090. http://dx.doi.org/10.1142/s1758825115500908.

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This paper deals with the static behavior of an electrostatically actuated bilayered microswitch on the basis of the modified couple stress theory. The beam is modeled using Euler–Bernoulli beam theory and equivalent elastic modulus and length scale parameter are presented for the bilayer beam. Static deflection and pull-in voltage of the beam is calculated using numerical and analytical methods. The numerical method is based on an iterative approach while the homotopy perturbation method (HPM) is utilized for the analytical simulation. Results show that there is a very good agreement between these methods even in the vicinity of the pull-in instability. Moreover, the effects of different parameters such as thicknesses of layers and length scale parameter on the static deflection and instability of the microcantilever are studied. Results show that for the cases with the equivalent length scale parameter comparable to the thickness of beam, the size-dependency plays significant roles in the static behavior of the bilayer microcantilevers.

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Nsubuga, Lawrence, Lars Duggen, Tatiana Lisboa Marcondes, Simon Høegh, Fabian Lofink, Jana Meyer, Horst-Günter Rubahn i Roana de Oliveira Hansen. "Gas Adsorption Response of Piezoelectrically Driven Microcantilever Beam Gas Sensors: Analytical, Numerical, and Experimental Characterizations". Sensors 23, nr 3 (17.01.2023): 1093. http://dx.doi.org/10.3390/s23031093.

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This work presents an approach for the estimation of the adsorbed mass of 1,5-diaminopentane (cadaverine) on a functionalized piezoelectrically driven microcantilever (PD-MC) sensor, using a polynomial developed from the characterization of the resonance frequency response to the known added mass. This work supplements the previous studies we carried out on the development of an electronic nose for the measurement of cadaverine in meat and fish, as a determinant of its freshness. An analytical transverse vibration analysis of a chosen microcantilever beam with given dimensions and desired resonance frequency (> 10 kHz) was conducted. Since the beam is considered stepped with both geometrical and material non-uniformity, a modal solution for stepped beams, extendable to clamped-free beams of any shape and structure, is derived and used for free and forced vibration analyses of the beam. The forced vibration analysis is then used for transformation to an equivalent electrical model, to address the fact that the microcantilever is both electronically actuated and read. An analytical resonance frequency response to the mass added is obtained by adding simulated masses to the free end of the beam. Experimental verification of the resonance frequency response is carried out, by applying known masses to the microcantilever while measuring the resonance frequency response using an impedance analyzer. The obtained response is then transformed into a resonance frequency to the added mass response polynomial using a polynomial fit. The resulting polynomial is then verified for performance using different masses of cantilever functionalization solution. The functionalized cantilever is then exposed to different concentrations of cadaverine while measuring the resonance frequency and mass of cadaverine adsorbed estimated using the previously obtained polynomial. The result is that there is the possibility of using this approach to estimate the mass of cadaverine gas adsorbed on a functionalized microcantilever, but the effectiveness of this approach is highly dependent on the known masses used for the development of the response polynomial model.

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Wong, WaiChi, HingWah Lee, Ishak A. Azid i K. N. Seetharamu. "Creep analysis of bimaterial microcantilever beam for sensing device using artificial neural network (ANN)". ASEAN Journal on Science and Technology for Development 23, nr 1&2 (30.10.2017): 89. http://dx.doi.org/10.29037/ajstd.95.

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In this study, a feed-forward back-propagation Artificial Neural Network (ANN) is used to predict the stress relaxation and behavior of creep for bimaterial microcantilever beam for sensing device. Results obtained from ANSYS® 8.1 finite element (FE) simulations, which show good agreement with experimental work [1], is used to train the neural network. Parametric studies are carried out to analyze the effects of creep on the microcantilever beam in term of curvature and stress deve loped with time. It is shown that ANN accurately predicts the stress level for the microcantilever beam using the trained ANSYS® simulation results due to the fact that there is no scattered data in the FE simulation results. ANN takes a small fraction of time and effort compar ed to FE prediction.

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Liu, Xiaochen, Lihao Wang, Junyuan Zhao, Yinfang Zhu, Jinling Yang i Fuhua Yang. "Enhanced Binding Efficiency of Microcantilever Biosensor for the Detection of Yersinia". Sensors 19, nr 15 (29.07.2019): 3326. http://dx.doi.org/10.3390/s19153326.

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A novel microcantilever sensor was batch fabricated for Yersinia detection. The microcantilever surface modification method was optimized by introducing a secondary antibody to increase the number of binding sites. A novel microfluidic platform was designed and fabricated successfully. A 30 μL solution could fully react with the microcantilever surface. Those routines enhanced the binding efficiency between the target and receptor on the microcantilever. With this novel designed microfluidic platform, the specific adsorption of 107 Yersinia on the beam surface with modified F1 antibody was significantly enhanced.

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SADER, JOHN E., THOMAS P. BURG i SCOTT R. MANALIS. "Energy dissipation in microfluidic beam resonators". Journal of Fluid Mechanics 650 (22.03.2010): 215–50. http://dx.doi.org/10.1017/s0022112009993521.

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The fluid–structure interaction of resonating microcantilevers immersed in fluid has been widely studied and is a cornerstone in nanomechanical sensor development. In many applications, fluid damping imposes severe limitations by strongly degrading the signal-to-noise ratio of measurements. Recently, Burg et al. (Nature, vol. 446, 2007, pp. 1066–1069) proposed an alternative type of microcantilever device whereby a microfluidic channel was embedded inside the cantilever with vacuum outside. Remarkably, it was observed that energy dissipation in these systems was almost identical when air or liquid was passed through the channel and was 4 orders of magnitude lower than that in conventional microcantilever systems. Here, we study the fluid dynamics of these devices and present a rigorous theoretical model corroborated by experimental measurements to explain these observations. In so doing, we elucidate the dominant physical mechanisms giving rise to the unique features of these devices. Significantly, it is found that energy dissipation is not a monotonic function of fluid viscosity, but exhibits oscillatory behaviour, as fluid viscosity is increased/decreased. In the regime of low viscosity, inertia dominates the fluid motion inside the cantilever, resulting in thin viscous boundary layers – this leads to an increase in energy dissipation with increasing viscosity. In the high-viscosity regime, the boundary layers on all surfaces merge, leading to a decrease in dissipation with increasing viscosity. Effects of fluid compressibility also become significant in this latter regime and lead to rich flow behaviour. A direct consequence of these findings is that miniaturization does not necessarily result in degradation in the quality factor, which may indeed be enhanced. This highly desirable feature is unprecedented in current nanomechanical devices and permits direct miniaturization to enhance sensitivity to environmental changes, such as mass variations, in liquid.

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Majumdar, Arun. "Bioassays Based on Molecular Nanomechanics". Disease Markers 18, nr 4 (2002): 167–74. http://dx.doi.org/10.1155/2002/856032.

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Recent experiments have shown that when specific biomolecular interactions are confined to one surface of a microcantilever beam, changes in intermolecular nanomechanical forces provide sufficient differential torque to bend the cantilever beam. This has been used to detect single base pair mismatches during DNA hybridization, as well as prostate specific antigen (PSA) at concentrations and conditions that are clinically relevant for prostate cancer diagnosis. Since cantilever motion originates from free energy change induced by specific biomolecular binding, this technique is now offering a common platform for label-free quantitative analysis of protein-protein binding, DNA hybridization DNA-protein interactions, and in general receptor-ligand interactions. Current work is focused on developing “universal microarrays” of microcantilever beams for high-throughput multiplexed bioassays.

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Hosaka, Hiroshi, i Kiyoshi Itao. "Coupled Vibration of Microcantilever Array Induced by Airflow Force". Journal of Vibration and Acoustics 124, nr 1 (1.07.2001): 26–32. http://dx.doi.org/10.1115/1.1421054.

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The coupled vibrations of microcantilevers induced by airflow were analyzed to facilitate the development of high-speed information and sensing devices that use microactuator arrays. Simple formulas, from which the vibrational coupling amplitude and damping ratio can be obtained, are derived by replacing the cantilevers with strings of spheres, solving Stokes equation, and combining this with an ordinary beam equation. The coupling amplitude was found to increase as the beam size, beam gap, internal friction, and the difference in the resonant frequencies of the beams decreased and the damping ratio increased as the beam size was reduced. The validity of the theory is verified with actual-size and enlarged model experiments.

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Chen, Yongzhang, Yiwen Zheng, Haibing Xiao, Dezhi Liang, Yufeng Zhang, Yongqin Yu, Chenlin Du i Shuangchen Ruan. "Optical Fiber Probe Microcantilever Sensor Based on Fabry–Perot Interferometer". Sensors 22, nr 15 (1.08.2022): 5748. http://dx.doi.org/10.3390/s22155748.

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Optical fiber Fabry–Perot sensors have long been the focus of researchers in sensing applications because of their unique advantages, including highly effective, simple light path, low cost, compact size, and easy fabrication. Microcantilever-based devices have been extensively explored in chemical and biological fields while the interrogation methods are still a challenge. The optical fiber probe microcantilever sensor is constructed with a microcantilever beam on an optical fiber, which opens the door for highly sensitive, as well as convenient readout. In this review, we summarize a wide variety of optical fiber probe microcantilever sensors based on Fabry–Perot interferometer. The operation principle of the optical fiber probe microcantilever sensor is introduced. The fabrication methods, materials, and sensing applications of an optical fiber probe microcantilever sensor with different structures are discussed in detail. The performances of different kinds of fiber probe microcantilever sensors are compared. We also prospect the possible development direction of optical fiber microcantilever sensors.

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Hull, Katherine L., Younane N. Abousleiman, Yanhui Han, Ghaithan A. Al-Muntasheri, Peter Hosemann, S. Scott Parker i Cameron B. Howard. "Nanomechanical Characterization of the Tensile Modulus of Rupture for Kerogen-Rich Shale". SPE Journal 22, nr 04 (13.02.2017): 1024–33. http://dx.doi.org/10.2118/177628-pa.

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Summary In the past decade, chemical, physical, and mechanical characterization of source-rock reservoirs has moved toward micro- and nanoscale testing and analyses. Nanoindentation is now widely used in many industrial and university laboratories to measure stiffness and strength as well as other mechanical properties of shales. However, to date, tensile failures of shales have not been studied at the micro- or nanoscale. In this work, a scanning electron microscope (SEM) coupled with a focused ion beam (FIB) and a special nanoindenter (NI) testing configuration (SEM-FIB-NI) is used to bring organic-rich shale samples (preserved Woodford shale from a wellsite in Ada, Oklahoma, USA) to failure in tension. Microcantilever beam geometries were milled and loaded to failure in tension while monitoring in situ with SEM. The force-displacement curves were generated while videos recording in-situ real-time displacements and failures were collected simultaneously. The microcantilever beam tests of this composite natural material demonstrate linear elastic behavior followed by elastic/plastic yield before complete failure. This behavior was clearly observed to correlate with the amount of organic matter (OM) at the fractured surface of the microcantilever beam supports. Energy-dispersive X-ray spectroscopy (EDS) analyses were conducted along the prepared microbeam samples before loading. In addition, post-failure EDS analysis was performed on the resulting fractured faces of the failed microbeams, and the correlation between tensile behavior and shale OM content was shown. Large tensile moduli of rupture, or moduli of toughness, were associated with high OM, or kerogen, present at the failed supports of the kerogen-rich-shale (KRS) microcantilever beams. The moduli of toughness as a measure of work or energy needed to bring these samples into tensile failure were ten times less when OM was missing or barely present at the support, in terms of shale microbeam volume.

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Abbasi, Mohammad, i Seyed E. Afkhami. "Resonant Frequency and Sensitivity of a Caliper Formed With Assembled Cantilever Probes Based on the Modified Strain Gradient Theory". Microscopy and Microanalysis 20, nr 6 (10.09.2014): 1672–81. http://dx.doi.org/10.1017/s1431927614013117.

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AbstractThe resonant frequency and sensitivity of an atomic force microscope (AFM) with an assembled cantilever probe (ACP) is analyzed utilizing strain gradient theory, and then the governing equation and boundary conditions are derived by a combination of the basic equations of strain gradient theory and Hamilton’s principle. The resonant frequency and sensitivity of the proposed AFM microcantilever are then obtained numerically. The proposed ACP includes a horizontal cantilever, two vertical extensions, and two tips located at the free ends of the extensions that form a caliper. As one of the extensions is located between the clamped and free ends of the AFM microcantilever, the cantilever is modeled as two beams. The results of the current model are compared with those evaluated by both modified couple stress and classical beam theories. The difference in results evaluated by the strain gradient theory and those predicted by the couple stress and classical beam theories is significant, especially when the microcantilever thickness is approximately the same as the material length-scale parameters. The results also indicate that at the low values of contact stiffness, scanning in the higher cantilever modes decrease the accuracy of the proposed AFM ACP.

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Zhang, Tong-Yi, Ming-Hao Zhao i Cai-Fu Qian. "Effect of substrate deformation on the microcantilever beam-bending test". Journal of Materials Research 15, nr 9 (wrzesień 2000): 1868–71. http://dx.doi.org/10.1557/jmr.2000.0270.

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With regard to substrate deformation, this work analyzed the microcantilever beam-bending test and provided a closed formula of deflection versus load. The substrate deformation was formulated using two coupled springs; the spring compliances were related to the elastic compliances of the substrate, the support angle between the substrate and the microcantilever beam, and the beam thickness. Finite element analysis was conducted to calculate the spring compliances and verify the analytic formula. The results showed that the proportionality factor of the load to the deflection was a third-order polynomial of the length from the loading point to the fixed beam end. Examples are also given to indicate the relative error of Young's modulus when evaluated with the beam-bending theory without considering the substrate deformation.

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Arscott, Steve, Bernard Legrand, Lionel Buchaillot i Alison E. Ashcroft. "A silicon beam-based microcantilever nanoelectrosprayer". Sensors and Actuators B: Chemical 125, nr 1 (lipiec 2007): 72–78. http://dx.doi.org/10.1016/j.snb.2007.01.040.

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Abbasi, Mohammad, i Ardeshir Karami Mohammadi. "Study of the sensitivity and resonant frequency of the flexural modes of an atomic force microscopy microcantilever modeled by strain gradient elasticity theory". Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science 228, nr 8 (10.10.2013): 1299–310. http://dx.doi.org/10.1177/0954406213507918.

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In this study, the resonant frequency and sensitivity of an atomic force microscopy microcantilever are analyzed utilizing the strain gradient theory, and then the governing equation and boundary conditions are derived by a combination of the basic equations of the modified strain gradient theory and the Hamilton principle. Afterward, the resonant frequency and sensitivity of the proposed atomic force microscopy microcantilever are obtained numerically. The results of the current model are compared to those evaluated by both modified couple stress and classic beam theories. Results show that utilizing the strain gradient theory in the analysis of atomic force microscopy microcantilever dynamic behavior is necessary especially when the contact stiffness is high and the thickness of the microcantilever approaches the internal material length scale parameter.

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Preethi, A. Angelin Peace, i P. Karthigaikumar. "Micro-machined silicon accelerometer with piezoresistive SCR implementation for glucolysis". International Journal of Wavelets, Multiresolution and Information Processing 18, nr 01 (31.05.2019): 1941013. http://dx.doi.org/10.1142/s0219691319410133.

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Micro-Electro-Mechanical Systems (MEMS) noted as micro generation have grown to advance greater than in previous decades. This venture reports approximately the silicon-based piezoresistive (PZR) microcantilever for glucose sensing. Elevated sensitivity, highest operation collection, extensive frequency reaction, excessive resolution, proper linearity are the majority preferred residences of the sensor. The displacement strain at specific limits, sensitivity and deformation is analyzed by means of finite element method for two exclusive structures. 3D structural modeling of three layers in micromechanical sensors may be achieved at ANSYS 14.5. In bio-medical request, adsorption of glucose on a functionalized exterior of the micro-fabricated cantilever will gather an exterior strain and therefore meander the cantilever beam. The cantilever meandering enhances the sensitivity of the microcantilevers sensor. Instead of capacitive accelerometer which produces changes in the seismic mass, the best method is PZR accelerometer that takes advantage of change in resistance and produces electrical output signal. The argument of the resolution problem in the study of a system for PZR detection technique with requirement of devices like Low pressure chemical vapor deposition (LPCVD) etc. is easily done by introducing stress concentrated region (SCR) which is considered as slot in the structure so that it enhances sensitivity of the device further higher. This technique is used for a sample, to detect and monitor glucose level and it produces simulation wrapping up in the microcantilever beam such as twist, pressure, injure and displacement.

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Silveira, B. M., J. H. Belo, R. Pinto, J. A. Silva, T. D. Ferreira, A. L. Pires, V. Chu, J. P. Conde, O. Frazão i A. M. Pereira. "Magnetostriction in Amorphous Co66Fe34 Microcantilevers Fabricated with Hydrogenated Amorphous Silicon". EPJ Web of Conferences 233 (2020): 05003. http://dx.doi.org/10.1051/epjconf/202023305003.

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To study the magnetostriction of Co66Fe34 thin films, amorphous silicon microcantilevers were prepared by surface micromachining, and the 136 nm-thick magnetostrictive film was deposited by electron beam physical vapor deposition and patterned on top of the microcantilever structure. The magnetostriction of the Co66Fe34 films was confirmed by measuring the deflection of the cantilevers under a varying magnetic field, reaching displacements up to 8 nm. The configuration was simulated using COMSOL software, yielding a similar deflection behavior as a function of the magnetic field, with a film with a magneto strictive coefficient of λ S ~ 55 p.p.m. The experimental configuration uses a laser and a position sensitive detector to measure the displacement, based on an optical lever configuration, and a piezoelectric stage to calibrate the system.

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Hocheng, H., K. S. Kao i W. Fang. "Fatigue life of a microcantilever beam in bending". Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 22, nr 6 (2004): 3143. http://dx.doi.org/10.1116/1.1821502.

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Kim, Seunghyun, Tim Gustafson, Danny C. Richards, Weisheng Hu i Gregory P. Nordin. "Microcantilever deflection compensation with focused ion beam exposure". Journal of Micromechanics and Microengineering 21, nr 8 (30.06.2011): 085007. http://dx.doi.org/10.1088/0960-1317/21/8/085007.

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Lee, Jung A., Jae Young Yun, Seung Seob Lee i Kwang Cheol Lee. "A Novel Microcantilever Device with Nano-Interdigitated Electrodes (Nano-IDEs) for Biosensing Applications". Key Engineering Materials 326-328 (grudzień 2006): 1359–62. http://dx.doi.org/10.4028/www.scientific.net/kem.326-328.1359.

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We present a novel microcantilever device with nano-interdigitated electrodes (nano-IDEs) and selective functionalization of nano-IDEs for biosensing applications. The nano-IDEs play a role in precisely addressing capture molecules to a specific region on a microcantilever. This leads to a detectable surface stress due to the binding of target molecules. 70~500 nm-wide gold (Au) nano- IDEs are fabricated on a low-stress SiNx microcantilever with dimensions of 100~600 μm in length, and 15~60 μm in width, with a 0.5 μm thickness using electron beam lithography and bulk micromachining. 32~96 nm-thick streptavidin is selectively deposited on one side of nano-IDEs using cyclic voltammetry at a scan rate of 0.1 V/s with a range of -0.2~0.7 V during 1~5 cycles. The selective deposition of streptavidin is confirmed by fluorescence microscopy and atomic force microscopy (AFM).

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Wu, M. C., J. S. Chang, K. C. Wu, C. H. Lin i C. Y. Wu. "The Effect of Flow Velocity on Microcantilever-Based Biosensors". Journal of Mechanics 23, nr 4 (grudzień 2007): 353–58. http://dx.doi.org/10.1017/s1727719100001404.

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ABSTRACTThis work focuses on studying the effect of flow velocity on microcantilever-based biosensor by numerical simulation. The microcantilever sensors used in detecting biomolecules have attractive advantages like cost efficiency, real-time and ability of fabricating in array. Both rectangular and triangular shapes of a general model of microcantilever beam are considered. Several important physical phenomena are obtained. Comparing with the first order Langmuir theory, we have calculated the effect on the reactive rate, produced concentration, the distribution of concentration and deflection in the z axis by solving these physical coupled problem involving flow field, concentration field and chemical reaction on the reaction surface. It is found numerically that the transportation of analyte, reactive rate, the distribution of concentration and deflection in the z axis are all effected by changing the flow velocity. The result has shown that flow velocity is an important factor for this biosensor.

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Qi, Chenkun, Feng Gao, Han-Xiong Li, Xianchao Zhao i Liming Deng. "A neural network-based distributed parameter model identification approach for microcantilever". Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science 230, nr 20 (9.08.2016): 3663–76. http://dx.doi.org/10.1177/0954406215615626.

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The microcantilever used in micro–nanomanipulator is a spatially distributed and flexible mechanical system. An accurate model of the microcantilever is essential for the accurate tip positioning and force sensing. Traditional lumped parameter model will lose the spatial dynamics. Though the nominal Euler–Bernoulli model is a distributed parameter model, in practice there are still some unknown nonlinear dynamics. In this study, a neural network-based distributed parameter model identification approach is proposed for modelling the microcantilever. First, a nominal Euler–Bernoulli beam model is derived. To compensate unknown nonlinear dynamics, a nonlinear term that needs to be estimated is added in the nominal model. For finite-dimensional implementation, the infinite-dimensional partial differential equation model is reduced into a finite-dimensional ordinary differential equation model using the Galerkin method. Next, a neural network-based intelligent learning approach is developed to learn the unknown nonlinearities from the input–output data. A radial basis function recurrent neural network observer is designed to estimate the finite-dimensional states from a few sensors of measurements. After that, a general regression neural network model is identified to establish the nonlinear spatiotemporal dynamic model between the inputs and outputs. The effectiveness of the proposed neural network-based distributed parameter modelling approach is verified by the simulations on a typical microcantilever.

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Anthony, C. J., G. Torricelli, P. D. Prewett, D. Cheneler, C. Binns i A. Sabouri. "Effect of focused ion beam milling on microcantilever loss". Journal of Micromechanics and Microengineering 21, nr 4 (24.03.2011): 045031. http://dx.doi.org/10.1088/0960-1317/21/4/045031.

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Liu, Yun, i Yin Zhang. "Stiction of Flexural MEMS Structures". Applied Mechanics and Materials 190-191 (lipiec 2012): 794–800. http://dx.doi.org/10.4028/www.scientific.net/amm.190-191.794.

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A variational method using the principle of virtual work (PVW) is presented to formulate the problem of the microcantilever stiction. Compared with the Rayleigh–Ritz method using the arc-shaped or S-shaped deflection, which prescribes the boundary conditions and thus the deflection shape of a stuck cantilever beam, the new method uses the matching conditions and constraint condition derived from PVW and minimization of the system free energy to describe the boundary conditions at the contact separation point. The transition of the beam deflection from an arc-shape-like one to an S-shape-like one with the increase of the beam length is shown by the new model. The (real) beam deflection given by this new model deviates more or less from either an arc-shape or an S-shape, which has significant impact on the interpretation of experimental data. The arc-shaped or S-shaped deflection assumption ignores the beam bending energy inside the contact area and the elastic energy due to the beam/substrate contact, which is inappropriate as shown by this study. Furthermore, the arc-shaped or S-shaped deflection only approximately describes the deflection shape of a stuck beam with zero external load and obviously, the external load changes the beam deflection. The Rayleigh–Ritz method using the arc-shaped or S-shaped deflection assumption in essence can only be used to tell approximately whether stiction occurs or not. Rather than assuming a certain deflection shape and by incorporating the external load, the new method offers a more general and accurate study not only on the microcantilever beam stiction but also on its de-adherence.

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30

Voiculescu, I. R., M. E. Zaghloul, R. A. McGill i J. F. Vignola. "Modelling and measurements of a composite microcantilever beam for chemical sensing applications". Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science 220, nr 10 (1.10.2006): 1601–8. http://dx.doi.org/10.1243/09544062jmes150.

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A resonant microcantilever beam gas sensor was designed and fabricated in Carnegie Mellon University using complementary metal oxide semiconductor (CMU-CMOS) technology. The cantilever beam modified with a suitable sorbent coating was demonstrated as a chemical transducer for monitoring hazardous vapours and gases at trace concentrations. The design of the cantilever beam included interdigitated fingers to allow electrostatic actuation of the device and a piezoresistive Wheatstone bridge design to read out the deflection signal. The cantilever beam resonant frequency was modelled using the Euler-Bernoulli beam theory and ANSYS. The beam resonant frequency was measured with an optical laser Doppler vibrometer. Good agreement was obtained among the measured, simulated, and modelled resonant frequencies. A custom sorbent polymer layer was coated on the surface of the cantilever beam to allow its operation as a gas-sensing device. The frequency response as a function of exposure to the nerve agent simulant dimethylmethylphosphonate (DMMP) at different concentrations was measured, which allowed a demonstrated detection at a concentration of 20 ppb or 0.1 mg/m3. The air-polymer partition coefficient K, for DMMP was estimated and compared favourably with the known values for related polymers.

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Armstrong, David E. J., Angus J. Wilkinson i Steve G. Roberts. "Measuring anisotropy in Young’s modulus of copper using microcantilever testing". Journal of Materials Research 24, nr 11 (listopad 2009): 3268–76. http://dx.doi.org/10.1557/jmr.2009.0396.

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Focused ion beam machining was used to manufacture microcantilevers 30 μm by 3 μm by 4 μm with a triangular cross section in single crystal copper at a range of orientations between. These were imaged and tested using AFM/nanoindentation. Each cantilever was indented multiple times at a decreasing distance away from the fixed end. Variation of the beam’s behavior with loading position allowed a critical aspect ratio (loaded length:beam width) of 6 to be identified above which simple beam approximations could be used to calculate Young’s modulus. Microcantilevers were also milled within a single grain in a polycrystalline copper sample and electron backscattered diffraction was used to identify the direction of the long axis of the cantilever. The experimentally measured values of Young’s modulus and their variation with orientation were found to be in good agreement with the values calculated from the literature data for bulk copper.

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Guo, Kai, Bo Jiang, Bingrui Liu, Xingeng Li, Yaping Wu, Shuang Tian, Zhiyue Gao i in. "Study on the progress of piezoelectric microcantilever beam micromass sensor". IOP Conference Series: Earth and Environmental Science 651 (10.02.2021): 022091. http://dx.doi.org/10.1088/1755-1315/651/2/022091.

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Lin, Y. C., H. Hocheng, W. L. Fang i R. Chen. "Fabrication and Fatigue Testing of an Electrostatically Driven Microcantilever Beam". Materials and Manufacturing Processes 21, nr 1 (styczeń 2006): 75–80. http://dx.doi.org/10.1080/amp-20006597.

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Manoubi, I., F. Najar, S. Choura i A. H. Nayfeh. "Nonlinear Dynamical analysis of an AFM tapping mode microcantilever beam". MATEC Web of Conferences 1 (2012): 04002. http://dx.doi.org/10.1051/matecconf/20120104002.

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Hong, Hocheng, Jeng-Nan Hung i Yunn-Horng Guu. "Various Fatigue Testing of Polycrystalline Silicon Microcantilever Beam in Bending". Japanese Journal of Applied Physics 47, nr 6 (20.06.2008): 5256–61. http://dx.doi.org/10.1143/jjap.47.5256.

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Schultz, Joshua A., Stephen M. Heinrich, Fabien Josse, Nicholas J. Nigro, Isabelle Dufour, Luke A. Beardslee i Oliver Brand. "Timoshenko beam effects in lateral‐mode microcantilever‐based sensors in liquids". Micro & Nano Letters 8, nr 11 (listopad 2013): 762–65. http://dx.doi.org/10.1049/mnl.2013.0395.

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Muto, Shogo, Wataru Hirata, Shinji Fujita, Kazuya Akashi, Yasuhiro Iijima i Masanori Daibo. "Micromechanical Property Evaluation Of REBCO Coated Conductors Using Microcantilever Beam Method". IEEE Transactions on Applied Superconductivity 30, nr 4 (czerwiec 2020): 1–4. http://dx.doi.org/10.1109/tasc.2020.2975755.

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Subhashini, S., i A. Vimala Juliet. "Micro Cantilever CO₂ Gas Sensor Based on Mass". Applied Mechanics and Materials 766-767 (czerwiec 2015): 528–33. http://dx.doi.org/10.4028/www.scientific.net/amm.766-767.528.

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Sensors had gained importance in all fields of science and technology and development of real time small devices with high sensitivity for in situ measurements at low cost has gained momentum. Micromachined cantilever provides a solution to this hunt. MEMS cantilever are the simplest of all the other mechanical structures and hence is considered for the ease of fabrication. Here a chemical CO2 sensor is considered with the metal oxide layer as receptor to adsorb the CO2 molecules leading to an increase in mass and microcantilever as the transducer part converting the change in mass to change in natural frequency. The sensitive SnO2 layer increases the mass and hence decreases the resonant frequency. The inherent natural frequency of the cantilever is altered by the sensitive coating on top of the beam and the residual stresses present on the structure. In this paper, we investigate the SiO2 cantilever with SnO2 deposited on the top surface. Initially the microcantilever is analytically modelled and then is fabricated and characterized experimentally. Finally the error % is analysed between the analytical model and experimental results.

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Nagase, Masao, Hiroshi Takahashi, Yoshiharu Shirakawabe i Hideo Namatsu. "Nano-Four-Point Probes on Microcantilever System Fabricated by Focused Ion Beam". Japanese Journal of Applied Physics 42, Part 1, No. 7B (30.07.2003): 4856–60. http://dx.doi.org/10.1143/jjap.42.4856.

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Nguyen, Quoc Chi, i Slava Krylov. "Nonlinear tracking control of vibration amplitude for a parametrically excited microcantilever beam". Journal of Sound and Vibration 338 (marzec 2015): 91–104. http://dx.doi.org/10.1016/j.jsv.2014.10.029.

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Bourouina, Hicham, Réda Yahiaoui, Elmar Yusifli, Mohammed El Amine Benamar, Kamal Ghoumid i Guillaume Herlem. "Shear effect on dynamic behavior of microcantilever beam with manufacturing process defects". Microsystem Technologies 23, nr 7 (19.07.2016): 2537–42. http://dx.doi.org/10.1007/s00542-016-3078-x.

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MOJAHEDI, M., M. T. AHMADIAN i K. FIROOZBAKHSH. "OSCILLATORY BEHAVIOR OF AN ELECTROSTATICALLY ACTUATED MICROCANTILEVER GYROSCOPE". International Journal of Structural Stability and Dynamics 13, nr 06 (2.07.2013): 1350030. http://dx.doi.org/10.1142/s0219455413500302.

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This paper is concerned with the study of the oscillatory behavior of an electrostatically actuated microcantilever gyroscope with a proof mass attached to its free end. In mathematical modeling, the effects of different nonlinearities such as electrostatic forces, fringing field, inertial terms and geometric nonlinearities are considered. The microgyroscope is subjected to bending oscillations around the static deflection coupled with base rotation. The primary oscillation is generated in drive direction of the microgyroscope by a pair of DC and AC voltages on the tip mass. The secondary oscillation occurring in the sense direction is induced by the Coriolis coupling caused by the input angular rate of the beam along its axis. The input angular rotation can be measured by sensing the oscillation tuned to another DC voltage of the proof mass. First, a system of nonlinear equations governing the flexural–flexural motion of electrostatically actuated microbeam gyroscopes subjected to input rotations is derived by the extended Hamilton principle. The oscillatory behavior of the microgyroscopes subjected to DC voltages in both directions is then analytically investigated. Finally, the effects of the geometric parameters, base rotation and fringing field on the natural frequencies of the system are assessed.

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Lin, Chiao-Chi, Weileun Fang, Hung-Yi Lin, Chun-Hway Hsueh i Sanboh Lee. "Measurements of residual stresses in Al film/silicon nitride substrate microcantilever beam systems". Journal of Materials Research 26, nr 10 (19.05.2011): 1279–84. http://dx.doi.org/10.1557/jmr.2011.111.

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Abbasi, Mohammad. "Size Dependent Vibration Behavior of an AFM with Sidewall and Top-Surface Probes Based on the Strain Gradient Elasticity Theory". International Journal of Applied Mechanics 07, nr 03 (czerwiec 2015): 1550046. http://dx.doi.org/10.1142/s1758825115500465.

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In this paper, the size-dependent vibration behavior of an atomic force microscope with assembled cantilever probe (ACP) is analyzed utilizing the modified strain gradient elasticity theory. The proposed ACP comprises a horizontal cantilever, a vertical extension and two tips located at the free ends of the cantilever and extension. Because the vertical extension is located between the clamped and free ends of the microcantilever, the cantilever is modeled as two beams. The results of the current model are compared to those evaluated by both modified couple stress and classical beam theories. The results indicate that the resonant frequency and sensitivity of the proposed ACP is strongly size-dependent especially when the contact stiffness is very low or it is very high. The results also declare that utilizing the strain gradient theory is essential in the analysis of the vibration behavior of the proposed ACP.

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Heidari, Mohammad, Yaghoub Tadi Beni i Hadi Homaei. "Estimation of Static Pull-In Instability Voltage of Geometrically Nonlinear Euler-Bernoulli Microbeam Based on Modified Couple Stress Theory by Artificial Neural Network Model". Advances in Artificial Neural Systems 2013 (26.12.2013): 1–10. http://dx.doi.org/10.1155/2013/741896.

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In this study, the static pull-in instability of beam-type micro-electromechanical system (MEMS) is theoretically investigated. Considering the mid-plane stretching as the source of the nonlinearity in the beam behavior, a nonlinear size dependent Euler-Bernoulli beam model is used based on a modified couple stress theory, capable of capturing the size effect. Two supervised neural networks, namely, back propagation (BP) and radial basis function (RBF), have been used for modeling the static pull-in instability of microcantilever beam. These networks have four inputs of length, width, gap, and the ratio of height to scale parameter of beam as the independent process variables, and the output is static pull-in voltage of microbeam. Numerical data employed for training the networks and capabilities of the models in predicting the pull-in instability behavior has been verified. Based on verification errors, it is shown that the radial basis function of neural network is superior in this particular case and has the average errors of 4.55% in predicting pull-in voltage of cantilever microbeam. Further analysis of pull-in instability of beam under different input conditions has been investigated and comparison results of modeling with numerical considerations show a good agreement, which also proves the feasibility and effectiveness of the adopted approach.

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Mishra, Rohit, Wilfried Grange i Martin Hegner. "Rapid and Reliable Calibration of Laser Beam Deflection System for Microcantilever-Based Sensor Setups". Journal of Sensors 2012 (2012): 1–6. http://dx.doi.org/10.1155/2012/617386.

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Cantilever array-based sensor devices widely utilise the laser-based optical deflection method for measuring static cantilever deflections mostly with home-built devices with individual geometries. In contrast to scanning probe microscopes, cantilever array devices have no additional positioning device like a piezo stage. As the cantilevers are used in more and more sensitive measurements, it is important to have a simple, rapid, and reliable calibration relating the deflection of the cantilever to the change in position measured by the position-sensitive detector. We present here a simple method for calibrating such systems utilising commercially available AFM cantilevers and the equipartition theorem.

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Voiculescu, I., M. E. Zaghloul, R. A. McGill, E. J. Houser i G. K. Fedder. "Electrostatically actuated resonant microcantilever beam in CMOS technology for the detection of chemical weapons". IEEE Sensors Journal 5, nr 4 (sierpień 2005): 641–47. http://dx.doi.org/10.1109/jsen.2005.851016.

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Schultz, Joshua A., Stephen M. Heinrich, Fabien Josse, Isabelle Dufour, Nicholas J. Nigro, Luke A. Beardslee i Oliver Brand. "Lateral-Mode Vibration of Microcantilever-Based Sensors in Viscous Fluids Using Timoshenko Beam Theory". Journal of Microelectromechanical Systems 24, nr 4 (sierpień 2015): 848–60. http://dx.doi.org/10.1109/jmems.2014.2354596.

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GHADERI, R., i M. H. KORAYEM. "SENSITIVITY ANALYSIS OF VIBRATING MOTION OF NONUNIFORM AFM PIEZOELECTRIC MICROCANTILEVER". Latin American Applied Research - An international journal 45, nr 4 (30.10.2015): 271–77. http://dx.doi.org/10.52292/j.laar.2015.408.

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Piezoelectric MCs (MCs) are a special type of MCs. Having self-actuating and selfsensing abilities, they can be used as micro-robots in AFM, sensors and actuators. This paper analyzes sensitivity of vibrating motion of a piezoelectric MC with the presence of geometrical discontinuities. As resonance amplitude and natural frequency are of paramount importance in vibrating motions and they are considered in most engineering applications such as AFM and MEMS, sensitivity analysis of these two parameters is conducted. Vibrating analysis is performed based on the nonuniform beam model and the Euler-Bernoulli theory. The Sobol method is used to conduct sensitivity analysis of MC’s vibrating motion into the geometrical dimensions of layers and tip in order to specify the sensitive and insensitive parameters and their effects on vibrating motion of piezoelectric cantilever. The simulation results show that to achieve actuation ability, it is better to select a piezoelectric layer, which is thin, wide and long, and a tip, which is thin and short. The results also show that the piezoelectric layer has a different effect on natural frequency, as Lp/L becomes 0.66; natural frequency reaches its maximum amount, while the effect of other parameters on frequency is either absolutely ascending or absolutely descending.

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Tamayo, Javier, Valerio Pini, Prisicila Kosaka, Nicolas F. Martinez, Oscar Ahumada i Montserrat Calleja. "Imaging the surface stress and vibration modes of a microcantilever by laser beam deflection microscopy". Nanotechnology 23, nr 31 (13.07.2012): 315501. http://dx.doi.org/10.1088/0957-4484/23/31/315501.

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