Gotowa bibliografia na temat „Fragile structure cleaning”

Particle removal from BEOL low-k structures is studied using a novel particle removal technique, called Nanolift which removes particles from the substrate by forming a thin polymer film on the surface and removing the polymer film together with the particles. It was confirmed that Nanolift is capable to remove TiFx particles successfully which are generated during the low-k dry etch process for dual damascene structure formation for BEOL interconnect fabrication. Pattern collapse of the fragile low-k structure was confirmed to be prevented by Nanolift in comparison with conventional dual fluid spray cleaning method. FTIR results show that Nanolift leaves no residual polymer remain in low-k films and K-value shift by the Nanolift process was negligible and comparable with the conventional formulated chemistry cleaning process. From these results, Nanolift can be concluded as a suitable cleaning process for advanced BEOL fabrication process.

The removal of particle contamination is key to maximize yield. Some common particle removal techniques are not relevant anymore when complex and fragile structures are present on the surface. This led to the development of new cleaning processes based on innovative concepts to improve particle removal efficiency without any pattern damage. Some of these processes rely on a resist film lift off. One of these particle removal processes is studied in this paper. The process consists in some resist spin-coating followed by a diluted ammonia dispense to remove this film, which results in particle removal. This specific resist film is made of two immiscible organic polymers. A study was conducted to understand how the organization of these two polymers in the film is key for the film lift-off and the cleaning efficiency. This organization was shown to depend on the substrate contact angle and the resist formulation. A surface preparation is required on hydrophobic surface to reduce their water contact angle and ensure the efficiency of the process. As a result, compared to a high velocity aerosol cleaning technique, this resist peeling process requires multiple steps and a significant process time. A Particle Removal Efficiency study was then performed on blanket wafers to determine and understand how the different process parameters impacted on the cleaning efficiency. It led to the optimization of this process efficiency on blanket wafers. A comparison between an optimized process and a high velocity aerosol cleaning technique underlined the potential of such a process. Compared to high velocity aerosol cleaning, it demonstrated higher efficiency on blanket wafers, without causing any pattern damage on patterned wafers. These results lead to promising perspectives for using this process in the cleaning of fragile structure or targeting small particles with high adhesion.

The cleaning of textile artefacts and in particular historical tapestries is generally carried out using standard methods. Different cleaning procedures, including a new method based on a hydro-aspiration mechanism, recently developed by restorers with the aim of improving the efficiency of the cleaning system, were applied to a historical tapestry belonging to the lower edge of one of the tapestries of the “Ulysses Stories” series exhibited at the Quirinale Palace (Rome). The tapestry was made of wool and silk and has precious decorations made of metal yarns, which are particularly fragile. The new cleaning system was compared with the traditional methods commonly used by restorers for tapestry cleaning. For this purpose, the quantity and chemical composition of the particles removed and collected on quartz fibre filters by applying the different cleaning systems, were estimated by means of analytical techniques, such as IC (Ion Chromatography) for the quantification of the ionic species collected into the rinsing water, the TOT (Thermal Optical Transmittance) method for the quantification of the carbonaceous particles and SEM-EDX (Scanning Electron Microscopy coupled to Energy Dispersive X-ray Spectroscopy) for yarn morphological characterization and elemental analysis of the deposited particles. The objective of this study is to identify the correct cleaning method to apply to the polymaterial tapestry and, in particular, to the gilded silver and gold metallic yarns, whose conservation state requires the preservation of the “self-protection” patina necessary for the future exhibition inside the Quirinale Palace. The new hydro-aspiration method was found to be more efficient in removing dirt and preserving the structure of the metallic threads being in this way less invasive in detaching the fragile surface patina and at the same time more effective in removing dirt.

The cleaning and consolidation of egg white tempera were evaluated to help conserve a polychrome sculpture, the funeral coat of arms of Pehr Stålhammar, dated 1701. This coat of arms was a wooden structure of carved pine and lime wood, grounded with a chalk and rabbit skin glue ground layer, and polychromed with egg white tempera in combination with smalt blue, lamp black, and red pigments. Due to the difficulties of preserving the physical properties of egg white tempera, it was necessary to evaluate the consolidation effects in terms of color, gloss, and cohesion. Four consolidants were chosen: JunFunori, sturgeon glue, Aquazol 200, and Lascaux’s Medium for Consolidation. Among these, Aquazol 200 and JunFunori performed more efficiently. Another type of difficulty occurred during the conservation cleaning treatment process, especially with the blue paint, which is more fragile and has hydrophobic qualities. To conceive a safe cleaning method, various cleaning techniques and materials were tested with a microscope, scanning electron microscopy, and an artificial aging chamber. The investigation showed that the dry cleaning method and use of hydrogels could work together and target different tasks.

Abstract The practical application of superhydrophobic coatings has been greatly restricted due to the complicated preparation and fragile hierarchical structures on the surface. In this study, we prepared a robust superhydrophobic coating with a double-layer structure via a low-cost and facile method, adhering the non-wettability layer composed of silica nanoparticles and fluorine-modified epoxy resin to a binder resin layer on aluminum. The fluorine-modified epoxy resin with low surface energy can fix the silica nanoparticles after curing and cross-link with the adhesive layer. When the SiO2 content in the surface layer is 40%, the water contact angle (WCA) of the coating is 162°, and the sliding angle (SA) is 2°. In the mechanical performance test, the durable coating can remain superhydrophobic even after 260 cycles of friction or 160 cycles of tape peeling. In addition, the superhydrophobic coating with self-cleaning and anti-fouling properties also has the performance of acid-base solution resistance. Hence, the combination of the rough layer and the adhesive layer makes the practical application of artificial superhydrophobic coatings possible.

Thorough description of an exceptionally well-preserved fossil sturgeon required nearly complete disarticulation of much of the skull, as well as preparation of fins and other very delicate structures. Preparation took place in distinct stages in order to allow for detailed photographic documentation of the structure and relationship of individual bones before they were disassociated from the skeleton. Prior preparation and application of materials presented challenges to cleaning of surfaces that were overcome using a combination of chemical and gentle mechanical preparation methods. Combinations of consolidants were experimented with until a method for stabilization for fragile parts of the skeleton was decided upon. Extreme care was required during disarticulation of the very delicate elements, and a storage method was devised to maintain relationships of individual bones after removal from the skull. Justification was made based on research needs to sacrifice certain aspects of conservation principles in selection of non-reversible adhesives and consolidants for stabilization, repair, and reconstruction.

Abstract This paper introduces the formation of a clay-free biodiesel-based drilling fluid system. The system uses the biodiesel derived from the transesterification between soybean oil and methanol as the continuous phase, which is environmentally friendly and has an appropriate flow state. In order to inhibit the hydrolysis of the base oil under high temperatures, a small amount of methanol is retained and Lime addition is minimized. Besides, the system also contains a special polyamine-typed rheological modifier instead of organoclay to provide a fragile gel-structure with lower plastic viscosity and higher yield point, thus good for hole cleaning and solid suspension while keeping a higher rate of penetration (ROP). In order to strengthen the plugging and fluid loss control abilities, superfine calcium carbonate and oxidized asphalt are added and obtain a good outcome. Evaluation results showed that the clay-free biodiesel-based drilling fluid exhibits good properties of rheology, filtration, and emulsion stability, with temperature resistance over 200°C, which is suitable for the exploration of unconventional oil/gas restores.

Rare and precious window elements from the Paleochristian Basilica of Saint Sabina in Rome, made of plaster gypsum with translucent selenite used as glass for light transmission, were discovered by Antonio Muñoz during the restoration of the building at the beginning of the 20th c. Originally standing within the stone window frame, were then mounted on wood planks with screws for holding together the scattered fragments. The surfaces were covered with grime and the selenite elements were blinded by the wooden supports. <br><br> During the recent conservation treatment at ISCR, traces of Egyptian blue on the internal surfaces were detected. Cleaning with laser allowed their conservation and the removal of gypsum deposits from the fragile selenite. <br><br> 3-D scanning was performed for milling, out of polystyrene blocks, the counterforms that were needed for turning the artifacts upside down. After cleaning and re-assembling of the fragments, a new 3-D scan was performed to obtain a complete model of the artifacts that was used to define the best orientation of the windows, both for exhibition purposes and for the distribution of the weight-related stresses. <br><br> Following a project based on 3-D modeling, exhibition stands were produced with a core material milled out of PET foam, reinforced with outer skins made with carbon fiber adhered under vacuum to the core material with epoxy resin. The new exhibition stands, very light and rigid, permit all-round appreciation of the artifacts and allow the light to shine through the selenite elements.

Cleaning of nanoparticles (< 50nm ) is becoming a major challenge in semiconductor manufacturing and the future use of traditional methods, such as megasonic cleaning, is questioned. In this paper the capability of megasonic cleaning to remove nanoparticles without inflicting damage to fragile structures is investigated. The role of dissolved gas in cleaning efficiency indicates that cavitation is the main cleaning mechanism. Consequently gas mass-balance analyses are needed to optimize the performance of cleaning tools. When gas is dissolved in the cleaning present tools can remove nanoparticles down to about 30 nm using dilute chemistries at low temperature. Ultimate performance is limited by cleaning uniformity, which depends on tool design and operation. However no tool reached the target of high particle removal efficiency andlow damage. Significantly lower damage could only be obtained by decreasing the power, at the cost of a lower cleaning efficiency for nanoparticles. The development of damage-free megasonic is discussed.

Les étapes de retrait de la contamination particulaire sont cruciales pour l’industrie de la microélectronique afin de maximiser le pourcentage de circuit intégré fonctionnel en fin de fabrication. Cependant, les techniques conventionnelles de retrait particulaire peuvent s’avérer incompatibles avec des structures complexes et fragiles car leur application peut potentiellement causer des dommages physiques. Un procédé innovant basé sur l’étalement temporaire d’un film de résine est étudié dans ce manuscrit. Le principe est fondé sur le décollement du film de résine qui entraine le retrait de la particule en raison des liaisons de surface les reliant. Dans notre cas, la résine utilisée est composée de deux polymères organiques immiscibles. Le procédé consiste en l’étalement de la résine par centrifugation puis en son décollement par une distribution d’ammoniaque dilué à température ambiante. Cette distribution a pour but de dissoudre l’un des deux polymères ce qui provoque la délamination puis le soulèvement du film de résine grâce aux forces de trainée et de portance.Ce manuscrit souligne le rôle de l’organisation des deux polymères non miscibles dans le décollement du film de résine. Cette organisation dépend notamment de l’énergie de surface du substrat. Par exemple il a été montré par des analyses Tof SIMS que le polymère soluble présente une forte affinité avec une surface hydrophile. Une telle organisation sur une surface hydrophile réduit la zone interfaciale devant être délaminée lors de la dispense d’ammoniaque. Par conséquent, le décollement dépend de l’énergie de surface du substrat et n’est réalisable que si elle est supérieure à 66mN/m.Cette organisation spécifique des deux polymères immiscibles peut être ajustée par des paramètres tels que le ratio de mélange ou l’épaisseur de la résine. L’influence de l’ajout d’une étape de recuit après l’étalement a aussi été étudiée. Il a été démontré que ces trois paramètres modifiaient la limite en énergie de surface du décollement du film de résine. Ces paramètres influencent aussi l’efficacité du procédé dans le retrait particulaire. Les mécanismes à l’origine de ces modifications ont été compris permettant l’optimisation du procédé. Ce procédé optimisé a été évalué sur des surfaces structurées. Les résultats ont démontré sa capacité à retirer efficacement des particules tout en préservant l’intégrité des structures.Ces travaux de thèse ont permis de comprendre les mécanismes à l’origine du retrait particulaire à l’aide d’un procédé utilisant le décollement d’une résine et de démontrer la pertinence de cette technique dans un contexte industriel
Efficient particle contamination removal is crucial in maximizing yield within the microelectronics industry. However, conventional particle removal techniques may become impractical when dealing with complex and fragile surface structures, as their application can potentially cause physical damage. This challenge has led to the development of new cleaning processes based on innovative concepts, such as a resist film lift off approach. The resist film lift-off leads to the particle removal due to the particle surface bonded to the resist. One of these particle removal processes is studied in this manuscript. In this process, the resist film is composed of two immiscible organic polymers. The process consists of the resist spin-coating followed by a diluted ammonia dispense at room temperature. Thanks to the latter chemical step, one of the polymers is dissolved inducing the delamination and lift-off of the remaining polymer with drag and lift forces.This manuscript sheds light on the critical role of the organization of two immiscible polymers within the resist film in the context of film lift-off. The organization of these polymers was shown to depend on the substrate surface energy through Tof SIMS analysis. For instance, on a hydrophilic substrate, the soluble polymer exhibits a pronounced affinity for the interface. Such an organization on hydrophilic surface minimizes the interfacial area that needs to be delaminated during the resist removal step. Consequently, the effectiveness of ammonia-based film removal relies on the substrate’s surface energy and is only achievable if the substrate surface energy is below 66mN/m.This manuscript provides valuable insights into the modification of the polymers’ organization. The tuning of some parameters from the resist formulation as the blend ratio or the resist thickness and the addition of a bake after the coating are shown to modify this surface energy peeling limit. Additionally, a Particle Removal Efficiency study was conducted on blanket wafers to determine and understand how these three parameters influence cleaning efficiency. It has led to the optimization of process efficiency. This optimized process efficiency was evaluated on structured surfaces. The results showcased its capability to efficiently remove particles while preserving the integrity of delicate structures.This PhD project has contributed to broadening the comprehension of particle removal using a resist peeling process. Moreover, it has demonstrated the potential application of this method in an industrial context

The rapid progress in the development of new devices for minimal invasive surgery leads to more complex and fragile instruments including a mixture of different materials most of them thermo labile. In consequence these instruments become more and more expensive which increases the demand for reuse. By now, the manufacturers are obligated to specify the reprocessing procedure which may be a restriction in the development of new products. Therefore, there is a real need for new reprocessing procedures. Especially, plasma processes are commonly discussed as a promising alternative although only few plasma based techniques are currently commercial available. Three examples for plasma based reprocessing are discussed in detail: 1. Classical gas sterilization device: Based on commercial steam sterilizers of low temperature and formaldehyde (LTSF). The formaldehyde unit is replaced by plasma gas generator based on the PLexc® technology developed at INP. This plasma based decontamination technique was tested on long tubes similar to biopsy channels of endoscopes. 2. Atmospheric pressure plasma coating with nanoparticles in order to generate antimicrobial acting surfaces. With a special treatment unit based on the principle of a dielectric barrier discharge the inner surfaces of tubes are coated with nanoparticles. 3. “Plasmoscope”: using special plastic tubes, which include a helical electrode structure it is possible to manufacture endoscopes which allow plasma operation in their biopsy channel. This plasma can either used for decontamination, a reprocessing or under modified operation condition also for therapeutically applications. To simulate the complete reprocessing procedure the “plasmoscope” can be integrated in a reprocessing demonstrator allowing the combination of cleaning and decontamination steps.