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Artykuły w czasopismach na temat „FD-SOI (transistors)”

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Autor: Grafiati

Data publikacji: 25 maja 2024

Data aktualizacji: 31 sierpnia 2024

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1

Angelov, George V., Dimitar N. Nikolov i Marin H. Hristov. "Technology and Modeling of Nonclassical Transistor Devices". Journal of Electrical and Computer Engineering 2019 (3.11.2019): 1–18. http://dx.doi.org/10.1155/2019/4792461.

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This paper presents a comprehensive outlook for the current technology status and the prospective upcoming advancements. VLSI scaling trends and technology advancements in the context of sub-10-nm technologies are reviewed as well as the associated device modeling approaches and compact models of transistor structures are considered. As technology goes into the nanometer regime, semiconductor devices are confronting numerous short-channel effects. Bulk CMOS technology is developing and innovating to overcome these constraints by introduction of (i) new technologies and new materials and (ii) new transistor architectures. Technology boosters such as high-k/metal-gate technologies, ultra-thin-body SOI, Ge-on-insulator (GOI), AIII–BV semiconductors, and band-engineered transistor (SiGe or Strained Si-channel) with high-carrier-mobility channels are examined. Nonclassical device structures such as novel multiple-gate transistor structures including multiple-gate field-effect transistors, FD-SOI MOSFETs, CNTFETs, and SETs are examined as possible successors of conventional CMOS devices and FinFETs. Special attention is devoted to gate-all-around FETs and, respectively, nanowire and nanosheet FETs as forthcoming mainstream replacements of FinFET. In view of that, compact modeling of bulk CMOS transistors and multiple-gate transistors are considered as well as BSIM and PSP multiple-gate models, FD-SOI MOSFETs, CNTFET, and SET modeling are reviewed.

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2

Lagaev, Dmitriy A., Aleksey S. Klyuchnikov i Nikolay A. Shelepin. "Prospects for applying FD-SOI technology to space applications". Journal of Physics: Conference Series 2388, nr 1 (1.12.2022): 012135. http://dx.doi.org/10.1088/1742-6596/2388/1/012135.

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Abstract In this work, using numerical simulation, the reasons for the occurrence of increased values of leakage currents in NMOS fully depleted SOI (FD-SOI) transistors during interaction with ionizing radiation. It has shown that the main reason for the formation of leakage currents is the charge accumulated in the latent oxide upon interaction with ionizing radiation. The effectiveness of applying a bias on the substrate and the formation of a well under the buried oxide (BOX) to reduce the leakage currents is investigated. Based on the obtained results, it was concluded that it is promising to use transistors made using FD-SOI technology for space applications.

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3

Taher Abuelma’atti, Muhammad. "Harmonic and intermodulation distortion in SOI FD transistors". Solid-State Electronics 47, nr 5 (maj 2003): 797–800. http://dx.doi.org/10.1016/s0038-1101(02)00453-7.

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4

Assalti, Rafael, Denis Flandre i Michelly De Souza. "Influence of Geometrical Parameters on the DC Analog Behavior of the Asymmetric Self-Cascode FD SOI nMOSFETs". Journal of Integrated Circuits and Systems 13, nr 2 (5.10.2018): 1–7. http://dx.doi.org/10.29292/jics.v13i2.15.

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This paper assesses the DC analog performance of a composite transistor named Asymmetric Self-Cascode structure, which is formed by two Fully Depleted SOI nMOSFETs connected in series with shortened gates. The influence of geometrical parameters, such as different channel widths and lengths on the transistors at source and drain sides is evaluated through three-dimensional numerical simulations, which have been firstly adjusted to the experimental measurements. The transconductance, output conductance, Early voltage and intrinsic voltage gain have been used as figure of merit to explore the advantages of the composite transistor. From the obtained results, the largest intrinsic voltage gain has been obtained by using longer channel lengths for both transistors, with narrower device close to the source and wider transistor near to the drain.

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5

Schmidt, Alexander, Holger Kappert i Rainer Kokozinski. "Enhanced High Temperature Performance of PD-SOI MOSFETs in Analog Circuits Using Reverse Body Biasing". Journal of Microelectronics and Electronic Packaging 10, nr 4 (1.10.2013): 171–82. http://dx.doi.org/10.4071/imaps.389.

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Analog circuits realized in a PD-SOI (partially-depleted silicon-on-insulator) CMOS technology for a wide temperature range up to 400°C are significantly affected by the transistor characteristics at high temperatures. As leakage currents increase with temperature, the analog device performance, for example, intrinsic gain and bandwidth, tend to decrease. Both effects influence the precision of analog circuits and lead to malfunction of the circuitry at high temperatures. Enhancement of the MOSFET device performance and improved design techniques are required to handle these issues. In this paper, we demonstrate that RBB (reverse body biasing) is a useful method to improve the analog performance of PD-SOI transistors and also to push the limit of analog circuit design in SOI technology beyond 300°C. It allows beneficial FD (fully depleted) device characteristics in a 1.0 μm PD-SOI CMOS technology by manipulating the depletion condition of the silicon film. Due to reduced leakage currents, operation in the moderate inversion region of the SOI transistor device up to 400°C is feasible. The method is verified by experimental results of transistors with an H-shaped gate (HGATE), an analog switch, current mirrors, a two-stage operational amplifier, and a bandgap voltage reference. The normalized leakage current of HGATE devices at high temperatures can be reduced by more than one order of magnitude. Thereby, the gm/Id factor is improved significantly especially in the moderate inversion region, which has been inaccessible due to leakage currents. As a result, the intrinsic gain of HGATE transistors is improved. As the method has also been applied to essential analog circuits, it has been found that RBB significantly reduces the errors related to leakage currents and enables the operation of analog circuits in PD-SOI technology up to 400°C.

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6

Mota Barbosa da Silva, Lucas, Bruna Cardoso Paz i Michelly De Souza. "Analysis of Mobility in Graded-Channel SOI Transistors Aiming at Circuit Simulation". Journal of Integrated Circuits and Systems 15, nr 2 (31.07.2020): 1–5. http://dx.doi.org/10.29292/jics.v15i2.188.

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This work presents an analysis of the behavior of the effective mobility of graded-channel FD SOI transistors using an Y-Function-based technique. Low field mobility, linear and quadratic attenuation factors were extracted from two-dimensional numerical simulations. The influence of the length of both channel regions over these parameters was analyzed. The parameters extracted from experimental data were used in a SPICE simulator, showing that it is possible to simulated GC SOI MOSFET using a regular SOI MOSFET model, by adjusting its parameters.

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7

Schmidt, Alexander, Holger Kappert i Rainer Kokozinski. "Enhanced High Temperature Performance of PD-SOI MOSFETs in Analog Circuits Using Reverse Body Biasing". Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2013, HITEN (1.01.2013): 000122–33. http://dx.doi.org/10.4071/hiten-ta14.

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Analog circuit realized in a PD-SOI (Partially-Depleted Silicon-on-Insulator) CMOS process for a wide temperature range up to 400 °C are significantly affected by the MOSFET device characteristics at high temperatures. As leakage currents increase with temperature, the analog device performance, e.g. intrinsic gain and bandwidth tend to decrease. Both effects influence the precision of analog circuits and lead to malfunction of the circuitry at high temperatures. Enhancement of the MOSFET device performance and improved design techniques are required to handle these issues. In this paper, we demonstrate that reverse body biasing (RBB) is a useful method to improve the analog performance of PD-SOI transistors and also to push the limit of analog circuit design in SOI technology beyond 300 °C. It allows beneficial FD (fully depleted) device characteristics in a 1.0 μm PD-SOI CMOS process by manipulating the depletion condition of the silicon film. Due to reduced leakage currents, operation in the moderate inversion region of the SOI transistor device up to 400 °C is feasible. The method is verified by experimental results of transistors with an H-shaped gate (HGATE), an analog switch, basic current mirrors, a two-stage operational amplifier and a bandgap voltage reference. The normalized leakage current of HGATE devices at high temperatures can be reduced by more than one order of magnitude. Thereby the gm/Id factor is improved significantly especially in the moderate inversion region, which has been inaccessible due to leakage currents. As a result, the intrinsic gain of HGATE transistors is improved. The method has also been applied to basic analog circuits. It has been found that RBB significantly reduces the errors related to leakage currents and enables the operation of analog circuits in PD-SOI technology up to 400 °C.

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8

Cerdeira, A., M. Estrada, R. Quintero, D. Flandre, A. Ortiz-Conde i F. J. Garcı́a Sánchez. "New method for determination of harmonic distortion in SOI FD transistors". Solid-State Electronics 46, nr 1 (styczeń 2002): 103–8. http://dx.doi.org/10.1016/s0038-1101(01)00258-1.

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9

Gaillardin, Marc, Philippe Paillet, Veronique Ferlet-Cavrois, Jacques Baggio, Dale McMorrow, Olivier Faynot, Carine Jahan, Lucie Tosti i Sorin Cristoloveanu. "Transient Radiation Response of Single- and Multiple-Gate FD SOI Transistors". IEEE Transactions on Nuclear Science 54, nr 6 (grudzień 2007): 2355–62. http://dx.doi.org/10.1109/tns.2007.910860.

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10

Lee, Noriyuki, Ryuta Tsuchiya, Yusuke Kanno, Toshiyuki Mine, Yoshitaka Sasago, Go Shinkai, Raisei Mizokuchi i in. "16 x 8 quantum dot array operation at cryogenic temperatures". Japanese Journal of Applied Physics 61, SC (16.02.2022): SC1040. http://dx.doi.org/10.35848/1347-4065/ac4c07.

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Abstract We developed a 16 x 8 quantum dot array and CMOS circuit hybrid chip (Q-CMOS). By optimizing the transistor design of Q-CMOS formed by fully depleted (FD)-SOI, it is possible to selectively control each of 16 x 8 quantum dots, and obtained characteristics of quantum dot variation for the first time. Due to the mesoscopic effect, the variation in the characteristics of the quantum dots is larger than the threshold voltage variation of the transistors. Thus, we have obtained an important finding that it is necessary to suppress the variability in order to realize a large-scale quantum computer. We have also confirmed that the characteristics of the quantum dots change depending on the applied gate voltages.

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11

Vasileska, D., K. Raleva, A. Hossain i S. M. Goodnick. "Current progress in modeling self-heating effects in FD SOI devices and nanowire transistors". Journal of Computational Electronics 11, nr 3 (18.05.2012): 238–48. http://dx.doi.org/10.1007/s10825-012-0404-0.

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12

Bhoir, Mandar S., i Nihar R. Mohapatra. "Effects of Scaling on Analog FoMs of UTBB FD-SOI MOS Transistors: A Detailed Analysis". IEEE Transactions on Electron Devices 67, nr 8 (sierpień 2020): 3035–41. http://dx.doi.org/10.1109/ted.2020.3002878.

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13

Nocera, Claudio, Giuseppe Papotto i Giuseppe Palmisano. "Two-Path 77-GHz PA in 28-nm FD-SOI CMOS for Automotive Radar Applications". Electronics 11, nr 8 (18.04.2022): 1289. http://dx.doi.org/10.3390/electronics11081289.

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This paper presents a 77 GHz two path power amplifier (PA) for automotive radar applications. It was fabricated in 28-nm fully depleted silicon-on-insulator CMOS technology, which provides transistors with a transition frequency of about 270 GHz and a general-purpose low cost back-end-of-line. The proposed PA consists of a 50 Ω input buffer followed by two power units, which are made up of a current-reuse common source driver for improved efficiency and a stacked cascode power stage for enhanced output power. A peak detector was also embedded into the PA for output power monitoring. The designed PA achieved a saturated output power as high as 17.4 dBm at 77 GHz with an excellent power added efficiency of 19%, while drawing 150 mA from a 2 V power supply. The core die size was 500 μm × 300 μm.

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14

Barboni, Leonardo. "Evidence of Limitations of the Transconductance-to-Drain-Current Method (gm/Id) for Transistor Sizing in 28 nm UTBB FD-SOI Transistors". Journal of Low Power Electronics and Applications 10, nr 2 (15.05.2020): 17. http://dx.doi.org/10.3390/jlpea10020017.

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The transconductance-to-drain-current method is a transistor sizing methodology that is commonly used in CMOS technology. In this study, we explored by means of simulations, a case of study and three figures of merit used for the method, and we conclude for the first time that the method should be reformulated. The study has been performed on Ultra-Thin Body and Buried Fully Depleted Silicon-On-Insulator 28 nm low-voltage-threshold NFET commercial technology (UTBB FD-SOI), and the simulations were performed via Spectre Circuit Simulator, by using the device model-card. To our knowledge, no previous attempts have been made to assess the method capability, and we collected very important results that infer that the method should be reformulated or considered incomplete for use with this technology, which has an impact and ramifications on the field of process modeling, simulation and circuit design.

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15

Al Mamun, Fahad, Sarma Vrudhula, Dragica Vasileska, Hugh Barnaby i Ivan Sanchez Esqueda. "Evidence of Transport Degradation in 22 nm FD-SOI Charge Trapping Transistors for Neural Network Applications". Solid-State Electronics 209 (listopad 2023): 108783. http://dx.doi.org/10.1016/j.sse.2023.108783.

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16

Favre, Luc, Mohammed Bouabdellaoui, Elie Assaf, Imene Guelil, Antoine Ronda i Isabelle Berbezier. "(Invited) SiGe/SOI System: Mechanisms of Condensation and Strain Relaxation". ECS Meeting Abstracts MA2022-01, nr 20 (7.07.2022): 1088. http://dx.doi.org/10.1149/ma2022-01201088mtgabs.

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Silicon-Germanium strain engineering has been used for more than two decades in silicon based devices and has contributed to the scaling down of a transistor’s size and to significant improvements in device performance. However, while conventional silicon-germanium based electronics has experienced rapid and steady growth, thanks to this continuous miniaturization of transistors, this trend cannot continue indefinitely. Industry has already moved to alternate methods such as FinFET devices, in which a thin silicon channel is placed vertically, and the FD-SOI (FD-SGOI) design consisting of a thin film Si(SiGe) channel placed horizontally. For nodes scaled down below 28 nm, low power operation will be inherently hindered by both the imperfect interface, non-uniformity of ultra-thin films and quantum confinement effects, which increase the effective bandgap. In these devices, despite the intense research activity on the strained SiGe ultra-thin body, which accounts for a large portion of such microelectronic devices (below the 45 nm node), we still fail to properly understand the mechanisms that limit hole and electron mobilities in SGOI layers. In addition, one of the main challenges for Si based devices remains the fabrication of efficient group-IV photon sources / photon detectors compatible with the microelectronic industry, which would usefully replace the integration of III-V heterostructures on Si. The major bottleneck is that group-IV semiconductor elements have indirect bandgaps, but with possibilities of being transformed to direct bandgaps using strain engineering strategies. In this presentation, we will review the formation mechanism of Ge-rich layers on SOI by condensation at different temperatures. TEM cross-section and GPA analysis of the heterostructures will be presented. We will also report the physical and optical properties of these heterostructures. Special attention is devoted to the influence of the SiGe thickness reduction (up to few MLs), where quantum confinement is prominent in the optical properties of the layers. Raman and PL results will be presented to better explain such confinement behavior. We show that novel SGOI substrates could represent a key strategy for the fabrication of future photonic devices.

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17

Bertrand, Isabelle, Philippe Flatresse, Guillaume Besnard, Jean-Marc Bethoux, Zdenek Chalupa, Christophe Plantier, Martin Rack, Massinissa Nabet, Jean-Pierre Raskin i Frederic Allibert. "(G02 Best Paper Award Winner) Development Of High Resistivity FD-SOI Substrates for mmWave Applications". ECS Meeting Abstracts MA2022-01, nr 29 (7.07.2022): 1273. http://dx.doi.org/10.1149/ma2022-01291273mtgabs.

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The mmWave era opens up the door to revolutionary applications in the fields of communication, radar, imager, security, etc. FD-SOI CMOS technology is entering the mmW realm providing undeniable benefits in terms of data-rates, bandwidth, latency and power consumption improvements. The high resistivity substrate option is seen as a major booster to reach ultimate mmW performances. The engineering challenges related to this new wafer generation are addressed in this paper. In the different options for highly resistive silicon, low and high interstitial oxygen (Oi) materials are the most common ones, typically used to reach resistivity performance on SOI handles. Those materials are less compatible with FD-SOI technology, as they can be very sensitive to slip-line issues or wafer deformation, in specific SOI processing and customer’s line, possibly leading to overlay error. In addition, we can encounter inspectability and co-integration issues due to Crystal Originated Particules (COPs) presence for high Oi substrates. For the targeted technologies with FD-SOI, equal or below 28 nm, the handle properties will be key, as deformation and inspectability considerations are even more critical. One of the main challenges was to develop specific materials and processes to get both good resistivity and stability towards fabrication processes (SOI line and customer processing), and good mechanical behavior towards slip-line and potential deformation leading to error, together with low COPs handle material. In this paper, we will show how substrates were engineered specifically, to reach the appropriate resistivity targets around 1000 Ω.cm, and to be stable in depth with different additional anneals, in order to control compatibility with customer processes. In addition, we managed to achieve good performances in terms of mechanical behavior, such as slip-line generation during fabrication processes. We also had no overlay issues usually linked with slip-lines or excessive Bulk Micro Defects (BMD) presence in depth, generating dislocations and plastic deformation. We will review the material and process steps requirements to reach the best performances. The initial material requirements will be the oxygen content, together with the resistivity. The process requirements will be the final oxygen precipitation status, affected by specific thermal treatments and presence of sites for BMD nucleation and growth. A specific precipitation range will lead to good robustness towards both slip-lines sensitivity and overlay risks, by creating enough BMDs but not in excess. Besides, this specific precipitation state also helps to decrease the amount of residual interstitial oxygen left inside the High Resistivity substrate, and then decreases the oxygen thermal donor generation during back-end treatments in the 375-425°C range, improving resistivity stability. We will present all the characterizations performed on final SOI wafers, and after additional treatments, to highlight both handle substrate resistivity stability and mechanical robustness. Specific measurements were carried out to ensure that going from standard to high resistivity substrates did not adversely impact the behavior of logic devices. Test structures were implemented with 28 nm design rules on FD-SOI substrates with either 10 Ω.cm or 5 kΩ.cm handle resistivity. Compared figures of merit included transistors’ VTH and minimum gate length devices Ion/Ioff tradeoff as well as several devices built in the bulk of the wafer such as bipolar devices, diodes and capacitors. Obtained results will be shown to be within the natural process dispersion. Those substrates being destined to RF and mmWave applications, their performance was measured in terms of linearity and attenuation using coplanar waveguides built directly on top of the 20 nm buried oxide. Second harmonics measurements up to 28 GHz of fundamental frequency will be shown. The small signal measurements results will be compared to simulations including a thicker dielectric mimicking the very thick back-end of line available in advanced nodes. In conclusion, we will summarize how specific material for eSoC.1-HR handle was developed, showing performances in agreement with expectations on resistivity stability and mechanical robustness. Those substrates are leading to improved RF parameters compared to standard FD-SOI substrates, without degrading logic devices parameters.

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18

Gao, Shaochen, Duc-Tung Vu, Thibauld Cazimajou, Patrick Pittet, Martine Le Berre, Mohammadreza Dolatpoor Lakeh, Fabien Mandorlo i in. "Shallow Trench Isolation Patterning to Improve Photon Detection Probability of Single-Photon Avalanche Diodes Integrated in FD-SOI CMOS Technology". Photonics 11, nr 6 (1.06.2024): 526. http://dx.doi.org/10.3390/photonics11060526.

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The integration of Single-Photon Avalanche Diodes (SPADs) in CMOS Fully Depleted Silicon-On-Insulator (FD-SOI) technology under a buried oxide (BOX) layer and a silicon film containing transistors makes it possible to realize a 3D SPAD at the chip level. In our study, a nanostructurated layer created by an optimized arrangement of Shallow Trench Isolation (STI) above the photosensitive zone generates constructive interferences and consequently an increase in the light sensitivity in the frontside illumination. A simulation methodology is presented that couples electrical and optical data in order to optimize the STI trenches (size and period) and to estimate the Photon Detection Probability (PDP) gain. Then, a test chip was designed, manufactured, and characterized, demonstrating the PDP improvement due to the STI nanostructuring while maintaining a comparable Dark Count Rate (DCR).

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19

Zheng, Qiwen, Jiangwei Cui, Liewei Xu, Bingxu Ning, Kai Zhao, Mingjie Shen, Xuefeng Yu i in. "Total Ionizing Dose Responses of Forward Body Bias Ultra-Thin Body and Buried Oxide FD-SOI Transistors". IEEE Transactions on Nuclear Science 66, nr 4 (kwiecień 2019): 702–9. http://dx.doi.org/10.1109/tns.2019.2901755.

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20

de Souza, Michelly, Denis Flandre, Rodrigo Trevisoli Doria, Renan Trevisoli i Marcelo Antonio Pavanello. "On the improvement of DC analog characteristics of FD SOI transistors by using asymmetric self-cascode configuration". Solid-State Electronics 117 (marzec 2016): 152–60. http://dx.doi.org/10.1016/j.sse.2015.11.018.

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21

Zhang, Guohe, Junhua Lai, Yali Su, Binhong Li, Bo Li, Jianhui Bu i Cheng-Fu Yang. "Study on the Thermal Conductivity Characteristics for Ultra-Thin Body FD SOI MOSFETs Based on Phonon Scattering Mechanisms". Materials 12, nr 16 (15.08.2019): 2601. http://dx.doi.org/10.3390/ma12162601.

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The silicon-on-insulator (SOI) metal-oxide-semiconductor field-effect transistors (MOSFETs) suffer intensive self-heating effects due to the reduced thermal conductivity of the silicon layer while the feature sizes of devices scale down to the nanometer regime. In this work, analytical models of thermal conductivity considering the self-heating effect (SHE) in ultra-thin body fully depleted (UTB-FD) SOI MOSFETs are presented to investigate the influences of impurity, free and bound electrons, and boundary reflection effects on heat diffusion mechanisms. The thermal conductivities of thin silicon films with different parameters, including temperature, depth, thickness and doping concentration, are discussed in detail. The results show that the thermal dissipation associated with the impurity, the free and bound electrons, and especially the boundary reflection effects varying with position due to phonon scattering, greatly suppressed the heat loss ability of the nanoscale ultra-thin silicon film. The predictive power of the thermal conductivity model is enhanced for devices with sub-10-nm thickness and a heavily doped silicon layer while considering the boundary scattering contribution. The absence of the impurity, the electron or the boundary scattering leads to the unreliability in the model prediction with a small coefficient of determination.

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22

Watkins, A. C., S. T. Vibbert, J. V. D'Amico, J. S. Kauppila, T. D. Haeffner, D. R. Ball, E. X. Zhang, K. M. Warren, M. L. Alles i L. W. Massengill. "Mitigating Total-Ionizing-Dose-Induced Threshold-Voltage Shifts Using Back-Gate Biasing in 22-nm FD-SOI Transistors". IEEE Transactions on Nuclear Science 69, nr 3 (marzec 2022): 374–80. http://dx.doi.org/10.1109/tns.2022.3146318.

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23

Yamaoka, M., R. Tsuchiya i T. Kawahara. "SRAM Circuit With Expanded Operating Margin and Reduced Stand-By Leakage Current Using Thin-BOX FD-SOI Transistors". IEEE Journal of Solid-State Circuits 41, nr 11 (listopad 2006): 2366–72. http://dx.doi.org/10.1109/jssc.2006.882891.

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24

Maiellaro, Giorgio, Giovanni Caruso, Salvatore Scaccianoce, Mauro Giacomini i Angelo Scuderi. "40 GHz VCO and Frequency Divider in 28 nm FD-SOI CMOS Technology for Automotive Radar Sensors". Electronics 10, nr 17 (31.08.2021): 2114. http://dx.doi.org/10.3390/electronics10172114.

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This paper presents a 40 GHz voltage-controlled oscillator (VCO) and frequency divider chain fabricated in STMicroelectronics 28 nm ultrathin body and box (UTBB) fully depleted silicon-on-insulator (FD-SOI) complementary metal-oxide–semiconductor (CMOS) process with eight metal layers back-end-of-line (BEOL) option. VCOs architecture is based on an LC-tank with p-type metal-oxide–semiconductor (PMOS) cross-coupled transistors. VCOs exhibit a tuning range (TR) of 3.5 GHz by exploiting two continuous frequency tuning bands selectable via a single control bit. The measured phase noise (PN) at 38 GHz carrier frequency is −94.3 and −118 dBc/Hz at 1 and 10 MHz frequency offset, respectively. The high-frequency dividers, from 40 to 5 GHz, are made using three static CMOS current-mode logic (CML) Master-Slave D-type Flip-Flop stages. The whole divider factor is 2048. A CMOS toggle flip-flop architecture working at 5 GHz was adopted for low frequency dividers. The power dissipation of the VCO core and frequency divider chain are 18 and 27.8 mW from 1.8 and 1 V supply voltages, respectively. Circuit functionality and performance were proved at three junction temperatures (i.e., −40, 25, and 125 °C) using a thermal chamber.

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Bhoir, Mandar S., Yogesh Singh Chauhan i Nihar R. Mohapatra. "Back-Gate Bias and Substrate Doping Influenced Substrate Effect in UTBB FD-SOI MOS Transistors: Analysis and Optimization Guidelines". IEEE Transactions on Electron Devices 66, nr 2 (luty 2019): 861–67. http://dx.doi.org/10.1109/ted.2018.2888799.

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Kochiyama, M., T. Sega, K. Hara, Y. Arai, T. Miyoshi, Y. Ikegami, S. Terada, Y. Unno, K. Fukuda i M. Okihara. "Radiation effects in silicon-on-insulator transistors with back-gate control method fabricated with OKI Semiconductor 0.20μm FD-SOI technology". Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 636, nr 1 (kwiecień 2011): S62—S67. http://dx.doi.org/10.1016/j.nima.2010.04.086.

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27

Goffioul, Michael, Gilles Dambrine, Danielle Vanhoenacker i Jean-Pierre Raskin. "Comparison of microwave performances for sub-quarter micron fully- and partially-depleted SOI MOSFETs". Journal of Telecommunications and Information Technology, nr 3-4 (30.12.2000): 72–80. http://dx.doi.org/10.26636/jtit.2000.3-4.25.

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The high frequency performances including microwave noise parameters for sub-quarter micron fully- (FD) and partially-depleted (PD) silicon-on-insulator (SOI) n-MOSFETs are described and compared. Direct extraction techniques based on the physical meaning of each small-signal and noise model element are used to extract the microwave characteristics of various FD and PD SOI n-MOSFETs with different channel lengths and widths. TiSi2 silicidation process has been demonstrated very efficient to reduce the sheet and contact resistances of gate, source and drain transistor regions. 0.25 um FD SOI n-MOSFETs with a total gate width of 100 um present a state-of-the-art minimum noise figure of 0.8 dB and high associated gain of 13 dB at 6 GHz for Vds=0.75

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Carvalho, Henrique Lanfredi, Ricardo Cardoso Rangel, Katia Sasaki, Leonardo Yojo, Paula Agopian i Joao Martino. "Improved RFET Performance Using Dual-Aluminum-Contact (DAC)". ECS Meeting Abstracts MA2023-01, nr 33 (28.08.2023): 1855. http://dx.doi.org/10.1149/ma2023-01331855mtgabs.

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The reconfigurable field effect transistors (RFET) enable the integration of MOS-type transistors (N-type and P-type) in a single device. The programming gate voltage (VPG) controls the transistor type [1]. A greater area efficiency in logic circuits can be obtained, due to the possible different logic operation, such as NAND to NOR in a single circuit [2 - 3]. Others application include the use of RFET in circuits for security reason in order to avoid the reverse engineering [4]. Figure 1 (A) and (B) show a special type of RFET called BESOI MOSFET that will be one of the devices used in this work. Many conventional RFETs contain NiSi source/drain (S/D) contacts, or other contacts with mid-gap S/D material, providing a symmetrical current between holes and electrons. However such contacts decrease injection of current [5 - 7]. Devices based on dual-doping (DD), provided a significant improvement in the current level, in addition to the ease fabrication due to the absence of the silicidation process, such technology cannot act in doping-free CMOS processes [6] [8]. Figure 2 shows the drain current as a function of the control gate voltage (IDS -VCG) for the BESOI MOSFET. This work presents a new proposal for a dual-contact S/D (DC) RFET, without the presence of DD regions and doping process, enabling dopants-free CMOS processes, using only S/D aluminum contacts, performed through Sentaurus TCAD simulations [9]. Recently in the Integrable Systems Laboratory of the University of São Paulo (LSI-USP), two RFET with aluminum S/D contacts were reported. Both presented a high current for only one type of carrier (holes or electrons) [10 - 13]. The BESOI MOSFET conducts current through its back interface, where the channel between S/D contacts is formed by the bias of the programming gate (VPG), thus its operating mode is divided into P-type (VPG < 0 ) and N-type (VPG > 0). The transistor drain current is controlled by control gate voltage (VCG) [5] [10 - 11]. The Figure 3 shows the drain current balanced as a function of the control gate voltage (ID -VCG), for aluminum BESOI MOSFET’s with and without annealing process (W/A, Wo/A) after the metal deposition [10 - 11]. Using both BE SOI MOSFET with S/D aluminum contact, without process doping, a new RFET Dual Aluminum Contact (DAC) is shown Figure 4. The challenge the design is to flow of current (holes) through the outer contact (W/A contact), due to the influence of the inner schottky low-barrier aluminum contact (Wo/A contact) near to the back interface. Figure 5 shows the carrier density as a function of the depth of the silicon under the inner contact, for different silicon thicknesses (tSi) and fixed programming gate voltage (VPG). The high concentration of electrons near to the inner contact, provided an ohmic contact for electrons [11], however near the back interface, an increasing concentration of holes, due to VPG. Increasing the tSi reduces the influence of charges near the back interface, for tSi=30nm the current flow between the outer contact is possible. However, increasing the tSi decreases the efficiency of the control gate, added to the high electric field in back interface increases IOFF (similar effect described for FD SOI [14]). The Figure 6 shows the drain current as a function of the control gate voltage of BESOI nMOSFET with tSi = 30nm. Such effect can be mitigated, optimizing the coupling the gates. Figure 7 shows the final proposal of the BESOI MOSFET DAC. Figure 8 shows the IDS-VCG for different thicknesses in the S/D contacts (tsi cont). As shown in Figure 5, a greater thickness in the contacts makes possible a smaller influence of the inner contact near the back interface, allowing greater concentrations of gaps, so consequently there is an increase in the p-mode current. However, increasing the thickness of the contacts promotes a reduction in the electron current, due to the increase in the series resistance in inner contact in n-mode. Figure 9 presents the ID-VCG for different VPG bias for the DAC BESOI MOSFET (A) and NiSi BESOI MOSFET (B). Using the DAC BESOI MOSFET, an increase in current was obtained in relation to the NiSi contact (900% in n-type and 300% in p-type), without the addition of doping regions (dual-doping) and using a single contact metal (Aluminum). Figure 1

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Kanyandekwe, Joël, Matthias Bauer, Tanguy Marion, Lazhar Saidi, Jean-Baptiste Pin, Jeremie Bisserier, Jérôme Richy i in. "Very Low Temperature Tensile and Selective Si:P Epitaxy for Advanced CMOS Devices". ECS Meeting Abstracts MA2022-02, nr 32 (9.10.2022): 1190. http://dx.doi.org/10.1149/ma2022-02321190mtgabs.

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Nowadays, “more Moore” and “more than Moore” device architectures are becoming more and more complex. In CEA-Leti, we work on the “CoolCubeTM” 3D sequential integration which is based on the stacking of FDSOI devices [1]. We present solutions, at T<500°C, for the integration of SiP Raised Sources & Drains (RSD) in the upper devices without degrading the electrical performances of the bottom ones. We also target a lowering of the RSD resistance and an increase of the electron mobility in the channel of NMOS devices thanks to tensile strain [2]. Such a know-how will be useful to minimize the contact resistance and fabricate other types of devices such as FINFETs or h-GAA (e.g. nano-sheet devices) with Si (110) surfaces. Experiments were carried out in an Applied Materials epitaxy reactor featuring (i) liquid precursor delivery, together with H2, N2 or He carrier gas capability, enabling the use of Cl2; (ii) “High Precision Temperature Control (HPTC)”, allowing excellent LT control and enabling flexible rotation speeds; (iii) “precision flow distribution PFD-III”, enhancing uniformity performances. Selective Epitaxial Growth (SEG) is usually obtained with “co-flow” processes at rather high temperatures (>600°C). Chlorinated precursors (SiH2Cl2 (+ GeH4) + HCl, typically) are then sent simultaneously into the growth chamber. At LT (<500C°C), HCl cannot decompose, however. To overcome those limitations, we used a Cyclic Deposition Etch (CDE) strategy, with non-selective depositions followed by selective chemical vapor etches, to obtain SiP SEG. This strategy allowed us to obtain high quality films, as shown in Fig.1. The Omega-2Theta scans around the (004) X-Ray Diffraction order for tensile SiP (t-SiP) layers grown at T < 500°C with different Phosphorus concentrations were indeed typical of monocrystalline layers, with well-defined and intense peaks together with numerous thickness fringes. The substitutional P contents in those ~ 60 nm thick t-SiP layers were in the 1.02% - 5.42% range. The good layer uniformity in terms of thickness and P content, over a 300mm wafer radius, is shown in figure Fig.2. These layers grown at T <500°C were smooth, as shown in Fig.3, with a 0.21 nm Root Mean Square (RMS) roughness for a 60nm thick Si:P layer, i.e. a value close to the typical RMS roughness for t-SiP layers grown at high temperature with a chlorinated chemistry. The electrical resistivity in various t-SiP layers is plotted in Fig.4 as function of the substitutional phosphorus concentration and for various growth temperatures in the 450°C – 525°C range. Reducing the temperature by 75°C halved the electrical resistivity. We were able to achieve a resistivity as low as 0.21 mOhm.cm for a t-SiP layer with 5.8% of P grown at 450°C. We then evaluated, at first on tests structures without gates, our process selectivity. A top view Scanning Electron Microscopy image of a t-SiP layer grown non-selectively, with numerous amorphous SiP nuclei on SiO2, is shown in Fig 5.a. After some careful optimization, we succeeded in having fully selective processes versus SiO2, as shown in Fig 5.b. We then tested such optimized processes on low density FD-SOI devices with 28 nm design rules. A top-view SEM image of transistors after such a growth is shown in Fig.6. The growth selectivity was excellent, with nitride spacers and hard masks as well as isolations free of a-SiP nuclei for 31 nm of t-SiP with 4.5% of P deposited in the Sources/Drains. The surface was smooth, with a RMS roughness as low as 0.30nm on active areas, as shown in Fig.7. Thanks to High Resolution Reciprocal Space Maps (HR-RSM), we measured a Phosphorus concentration of 4.5% for that SiP layer grown on SOI. The very high quality of that epitaxy layer, with well-defined thickness fringes, is obvious in Fig.8. Cross-sectional Transmission Electron Microscopy (TEM) images such as the one shown in Fig. 9 enabled us to confirm, at the nanoscale, the excellent quality of such layers in RSDs. To sum up, we were able to develop a tensile Si:P process which was shown to be selective, at a temperature lower than 500°C, against SiO2 and SiN. Such t-SiP layers were successfully integrated in the Sources/Drains regions of FD-SOI 28nm devices. The very low material resistivity and the high phosphorus content should yield, notably because of tensile strain, performant NMOS devices in the near future. [1] C. Fenouillet-Beranger et al., IEEE TED 68, 3142-3148 (2021) [2] V. Chan et al., IEEE 2005 Custom Integrated Circuits Conference 2005, pp. 667-674 Figure 1

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Karsenty, Avi, i Avraham Chelly. "Anomalous DIBL Effect in Fully Depleted SOI MOSFETs Using Nanoscale Gate-Recessed Channel Process". Active and Passive Electronic Components 2015 (2015): 1–5. http://dx.doi.org/10.1155/2015/609828.

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Nanoscale Gate-Recessed Channel (GRC) Fully Depleted- (FD-) SOI MOSFET device with a silicon channel thickness (tSi) as low as 2.2 nm was first tested at room temperature for functionality check and then tested at low temperature (77 K) forI-Vcharacterizations. In spite of its FD-SOI nanoscale thickness and long channel feature, the device has surprisingly exhibited a Drain-Induced Barrier Lowering (DIBL) effect at RT. However, this effect was suppressed at 77 K. If the apparition of such anomalous effect can be explained by a parasitic short channel transistor located at the edges of the channel, its suppression is explained by the decrease of the potential barrier between the drain and the channel when lowering the temperature.

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Bédécarrats, Thomas, Philippe Galy, Claire Fenouillet-Béranger i Sorin Cristoloveanu. "Investigation of built-in bipolar junction transistor in FD-SOI BIMOS". Solid-State Electronics 159 (wrzesień 2019): 177–83. http://dx.doi.org/10.1016/j.sse.2019.03.057.

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Harame, David L. "Perspectives on How the "Sige, Ge, & Related Compounds: Materials, Processing, and Devices" Field Has Changed over the Last 20 Years". ECS Meeting Abstracts MA2022-02, nr 32 (9.10.2022): 1181. http://dx.doi.org/10.1149/ma2022-02321181mtgabs.

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The field of electronic devices and materials has seen major changes over the last ~20 years. The SiGe, Ge, & Related Compounds: Material Processing, and Devices symposium has documented much of this change. In 2004 the meeting grew out of a desire for the ECS to have a special ongoing symposium on SiGe & Ge as a materials system with increasing importance in silicon semiconductor technology. In 2008 the symposium was expanded to include Ge and Related compounds including SiC and III-Vs on Silicon to recognize the important work in these areas. In 2010 the symposium was expanded to include work in nano-wires, nano-membranes, and light emitting structures with SiGe and/or Ge. In 2012 the symposium explored finfet devices and expanded to include the area of GeSn. In 2014 the symposium explored the use SiGe and related compounds in more complex and advanced structures. In 2016 the conference had a theme around SOI and the FDSOI technology in particular. In 2018 the themes were the ever expanding device structures and role epitaxy has played in it. Each year the plenary talks were selected to give a view of the industry and the conference. These talks give us insight into the symposium and how the field has changed over time. In 2004 the first symposium “SiGe 1: Materials, Processing, and Devices” focused on the SiGe HBT transistor performance and SiGe epitaxial technology. But CMOS scaling was also presented. These trends were reflected in the plenary talks were given by John Cressler on “Using SiGe HBTs for Mixed-Signal Circuits and Systems: Opportunities and Challenges” and Judy Hoyt on “Enhanced Mobility CMOS.” This was the first symposium and we set the conference organization with multiple topical committees and published the first proceedings. In 2006 the “SiGe and Ge 2” symposium continued the themes of SiGe and Ge Epitaxy, SiGe HBT, CMOS scalling, and added silicon photonics. The Plenary talks were given by Dimitris Antoniadis on “Channel Material Innovations for Continuing the Historical MOSFET Performance Increase with Scaling” and Cary Gunn on “CMOS Photonics for High Speed Interconnects.” In 2008 the “SiGe, Ge, & Related Compounds 3” symposium changed in composition bringing IIIV and other compounds into the symposium. The Plenary papers were by Krishna Saraswat on “Germanium for High-Performance MOSFETS and Optical Interconnects,” and Wiebe B. de Boer on “Si and SiGe Epitaxy in Perspective.” Krishna focused on the role of Ge in modern devices and Wiebe focused on the history of SiGe epitaxy at ASM. In 2010 the “SiGe, Ge, & Related Compounds 4” greatly expanded topics while maintaining the core of SiGe HBT and CMOS scaling. The plenary papers were given by K. Kuhn on “Past, Present, and Future: SiGe and CMOS Transistor Scaling” and L. Kimmerling on “Scaling Energy and Form Factor with Germanium Microphotonics.” The conference emphasis continued on SiGe epitaxy, CMOS scaling, and HBT performance with a new optoelectronics focus area. In 2012 the “SiGe, Ge, & Related Compounds 5” focused on the finfet and GeSn. The plenary papers were given by E. Nowak “Advanced CMOS scaling and FinFET Technology” and C. Hu on “FinFET and UTB – How to make very short channel MOSFETs.” There were 4 sessions containing papers with GeSn. In 2014 the “SiGe, Ge, & Related Compounds 6” returned to CMOS scaling and the SiGe HBT. The plenary papers were given by K. Uchida and T. Takahashi on “Extending the FETs: Challenges and Opportunities for New Materials and Structures” and L. Zimmermann (IHP) on “High-Performance Photonic BiCMOS – Next Generation More-than-Moore Technology for the Large Bandwidth Era.” In 2016 the “SiGe, Ge, & Related Compounds 7” focused on FDSOI. The plenary papers were given by Bruce Doris “FDSOI Past, Present and Future” and Carlos Mazure and S. Cristoloveanu “ FD-SOI: The History from Early Transistors to Today.” In 2018 the “SiGe, Ge, & Related Compounds 8” focused on CMOS scaling and SiGe as an enabling material. The plenary papers were given by Maszara, Witold on “Contemporary and Future Logic Devices” and by Tsu-Jae Liu on “ Silicon-Germanium: Enabler of Moore's Law.” In 2020 the “SiGe, Ge, & Related Compounds 9” symposium focused on III-Vs and Silicon Photonic Sensors. The plenary papers were given by N. Collaert on “The revival of compound semiconductors and how they will change the world in the 5G/6G era,” and Ben Miller on “Creating the Interface Universe between the Universe and Data with Integrated Photonic Sensors." Highlights from these plenary talks and symposium topics will be presented.

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Galy, Philippe, S. Athanasiou i S. Cristoloveanu. "BIMOS transistor solutions for ESD protection in FD-SOI UTBB CMOS technology". Solid-State Electronics 115 (styczeń 2016): 192–200. http://dx.doi.org/10.1016/j.sse.2015.09.001.

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Kevkić, Tijana S., Vojkan R. Nikolić, Vladica S. Stojanović, Dragana D. Milosavljević i Slavica J. Jovanović. "Modeling electrostatic potential in FDSOI MOSFETS: An approach based on homotopy perturbations". Open Physics 20, nr 1 (1.01.2022): 106–16. http://dx.doi.org/10.1515/phys-2022-0012.

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Abstract Modeling of the electrostatic potential for fully depleted (FD) silicon-on-insulator (SOI) metal-oxide-semiconductor field effect transistor (MOSFET) is presented in this article. The modeling is based on the analytical solution of two-dimensional Poisson’s equation obtained by using the homotopy perturbation method (HPM). The HPM with suitable boundary conditions results in the so-called HPM solution in general and closed-form, independent of the surface potential. The HPM solution has been applied in modeling the output characteristics of the FDSOI MOSFET, which show good agreement compared with the numerical results.

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Sharma, Rajneesh, Rituraj S. Rathore i Ashwani K. Rana. "Impact of High-k Spacer on Device Performance of Nanoscale Underlap Fully Depleted SOI MOSFET". Journal of Circuits, Systems and Computers 27, nr 04 (6.12.2017): 1850063. http://dx.doi.org/10.1142/s0218126618500639.

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The fully depleted Silicon-On-Insulator MOSFETs (FD-SOI) have shown high immunity to short channel effects compared to conventional bulk MOSFETs. The inclusion of gate underlap in SOI structure further improves the device performance in nanoscale regime by reducing drain induced barrier lowering and leakage current ([Formula: see text]). However, the gate underlap also results in reduced ON current ([Formula: see text]) due to increased effective channel length. The use of high-[Formula: see text] material as a spacer region helps to achieve the higher [Formula: see text] but at the cost of increased effective gate capacitance ([Formula: see text]) which degrades the device performance. Thus, the impact of high-[Formula: see text] spacer on the performance of underlap SOI MOSFET (underlap-SOI) is studied in this paper. To fulfil this objective, we have analyzed the performance parameters such as [Formula: see text], [Formula: see text], [Formula: see text], [Formula: see text]/[Formula: see text] ratio and intrinsic transistor delay (CV/I) with respect to the variation of device parameters. Various dielectric materials are compared to optimize the [Formula: see text]/[Formula: see text] ratio and CV/I for nanoscale underlap-SOI device. Results suggest that the HfO2 of 10[Formula: see text]nm length is optimum value to enhance device performance. Further, the higher underlap length is needed to offset the exponential increase in [Formula: see text] especially below 20[Formula: see text]nm gate length.

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Cao, Yong-Feng, M. Arsalan, J. Liu, Yu-Long Jiang i J. Wan. "A Novel One-Transistor Active Pixel Sensor With In-Situ Photoelectron Sensing in 22 nm FD-SOI Technology". IEEE Electron Device Letters 40, nr 5 (maj 2019): 738–41. http://dx.doi.org/10.1109/led.2019.2908632.

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Artemio Schoulten, Felipe, Rémy Vauche, Jean Gaubert, Sylvain Bourdel i André Augusto Mariano. "Design of a multi-standard IR-UWB emitter in a 28 nm FD-SOI technology based on the frequency transposition pulse synthesis". Journal of Integrated Circuits and Systems 18, nr 3 (28.12.2023): 1–11. http://dx.doi.org/10.29292/jics.v18i3.793.

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Ultra-WideBand Impulse Radio (IR-UWB) is a wireless communication technology well-suited for short range communications (about 10 meters) and has the advantage to allow real-time location with a precision of 5 cm. However, its use has been standardized in some standards and especially in the IEEE 802.15.4 dedicated to Wireless Personnal Area Network (WPAN) and in the IEEE 802.15.6 dedicated to Wireless Body Area Network (WBAN). After presenting requirements of each standard and a literature survey on the IR-UWB emitter, the design of a multi-standard IR-emitter based on the frequency transposition pulse synthesis is proposed in a 28 nm FD-SOI technology. The proposed design has been validated at the transistor level using electrical simulations which take into account the parasitic capacitance at each critical node of the circuit. Moreover, results show that the proposed circuit has the potential to be the first multi-standard IR-UWB emitter which covers every channel of the IEEE 802.15.4 and 802.15.6 standards.

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Duan, F. L., S. P. Sinha, D. E. Ioannou i F. T. Brady. "LDD design tradeoffs for single transistor latch-up and hot carrier degradation control in accumulation mode FD SOI MOSFET's". IEEE Transactions on Electron Devices 44, nr 6 (czerwiec 1997): 972–77. http://dx.doi.org/10.1109/16.585553.

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Mayeda, Jill, Donald Y. C. Lie i Jerry Lopez. "Broadband Millimeter-Wave 5G Power Amplifier Design in 22 nm CMOS FD-SOI and 40 nm GaN HEMT". Electronics 11, nr 5 (23.02.2022): 683. http://dx.doi.org/10.3390/electronics11050683.

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Three millimeter-wave (mm-Wave) power amplifiers (PAs) that cover the key 5G FR2 band of 24.25 to 43.5 GHz are designed in two different state-of-the-art device technologies and are presented in this work. First, a single-ended broadband PA that employs a third-order input matching network is designed in a 40 nm GaN/SiC HEMT (High Electron Mobility Transistor) technology. Good agreement between the measurement and post-layout parasitic extracted (PEX) electromagnetic (EM) simulation data is observed, and it achieves a measured 3-dB BW (bandwidth) of 18.0–40.3 GHz and >20% maximum PAE (power-added-efficiency) across the entire 20–44 GHz band. Expanding upon this measured design, a differential broadband GaN PA that utilizes neutralization capacitors is designed, laid out, and EM simulated. Simulation results indicate that this PA achieves 3-dB BW 20.1–44.3 GHz and maximum PAE > 23% across this range. Finally, a broadband mm-Wave differential CMOS PA using a cascode topology with RC feedback and neutralization capacitors is designed in a 22 nm FD-SOI (fully depleted silicon-on-insulator) CMOS technology. This PA achieves an outstanding measured 3-dB BW of 19.1–46.5 GHz and >12.5% maximum PAE across the entire frequency band. This CMOS PA as well as the single-ended GaN PA are tested with 256-QAM-modulated 5G NR signals with an instantaneous signal BW of 50/100/400/9 × 100 MHz at a PAPR (peak-to-average-power ratio) of 8 dB. The data exhibit impressive linearity vs. POUT trade-off and useful insights on CMOS vs. GaN PA linearity degradation against an increasing BW for potential mm-Wave 5G applications.

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Golman, Roman, Robert Giterman i Adam Teman. "Multi-Ported GC-eDRAM Bitcell with Dynamic Port Configuration and Refresh Mechanism". Journal of Low Power Electronics and Applications 14, nr 1 (4.01.2024): 2. http://dx.doi.org/10.3390/jlpea14010002.

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Embedded memories occupy an increasingly dominant part of the area and power budgets of modern systems-on-chips (SoCs). Multi-ported embedded memories, commonly used by media SoCs and graphical processing units, occupy even more area and consume higher power due to larger memory bitcells. Gain-cell eDRAM is a high-density alternative for multi-ported operation with a small silicon footprint. However, conventional gain-cell memories have limited data availability, as they require periodic refresh operations to maintain their data. In this paper, we propose a novel multi-ported gain-cell design, which provides up-to N read ports and M independent write ports (NRMW). In addition, the proposed design features a configurable mode of operation, supporting a hidden refresh mechanism for improved memory availability, as well as a novel opportunistic refresh port approach. An 8kbit memory macro was implemented using a four-transistor bitcell with four ports (2R2W) in a 28 nm FD-SOI technology, offering up-to a 3× reduction in bitcell area compared to other dual-ported SRAM memory options, while also providing 100% memory availability, as opposed to conventional dynamic memories, which are hindered by limited availability.

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Giterman, Robert, Alexander Fish, Andreas Burg i Adam Teman. "A 4-Transistor nMOS-Only Logic-Compatible Gain-Cell Embedded DRAM With Over 1.6-ms Retention Time at 700 mV in 28-nm FD-SOI". IEEE Transactions on Circuits and Systems I: Regular Papers 65, nr 4 (kwiecień 2018): 1245–56. http://dx.doi.org/10.1109/tcsi.2017.2747087.

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"(Keynote) FD-SOI: The History from Early Transistors to Today". ECS Meeting Abstracts, 2016. http://dx.doi.org/10.1149/ma2016-02/30/1952.

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Valdivieso, C., R. Rodriguez, A. Crespo-Yepes, J. Martin-Martinez i M. Nafria. "Resistive Switching like-behavior in FD-SOI Ω-gate transistors". Solid-State Electronics, wrzesień 2023, 108759. http://dx.doi.org/10.1016/j.sse.2023.108759.

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YEH, Wenchang, i Masato Ohya. "Characteristics and deviation of low temperature FD-SOI-MOSFETs using sputtering SiO₂ gate insulator". Japanese Journal of Applied Physics, 13.01.2023. http://dx.doi.org/10.35848/1347-4065/acb2d3.

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Abstract Fully depleted silicon on insulator (FD-SOI) MOSFET using low temperature sputtering SiO2 gate insulator (GI) was fabricated with resistless process without cleanroom and showed a characteristic comparable to that using plasma enhanced CVD. Resultant average characteristics with standard deviations were, field effect mobility µn of 612±37 cm2/Vs and subthreshold swing ss of 135±18 mV/dec. These were compared with our previous single crystal thin-film transistors (TFTs) on glass substrate with µn of 339±116 cm2/Vs and ss of 255±24 mV/dec, and it was cleared that inferior ss in TFTs was originated from bad bottom Si/SiO2 interface quality with a trap density of 1×1012 cm-2V-1. It was also shown that to achieve TFT characteristics the same as the FD-SOI-MOSFET, top interface trap density and bottom interface quality had better lower than 1×1011 cm-2V-1.

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Zhang, Ruiqin, Qiwen Zheng, Jiangwei Cui, Yudong Li, Xuefeng Yu, Wu Lu i Qi Guo. "Bias Dependence of Total Ionizing Dose Response in UTBB FD-SOI transistors". IEEE Transactions on Nuclear Science, 2022, 1. http://dx.doi.org/10.1109/tns.2022.3219432.

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Bhardwaj, Anuj, Sujit K. Singh i Abhisek Dixit. "Narrow-Width Effects in 28-nm FD-SOI Transistors Operating at Cryogenic Temperatures". IEEE Journal of the Electron Devices Society, 2022, 1. http://dx.doi.org/10.1109/jeds.2022.3233302.

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Shin, Hyun-Jin, Sunil Babu Eadi, Yeong-Jin An, Tae-Gyu Ryu, Do-woo Kim, Hi-Deok Lee i Hyuk-Min Kwon. "Effect of high-pressure D2 and H2 annealing on LFN properties in FD-SOI pTFET". Scientific Reports 12, nr 1 (2.11.2022). http://dx.doi.org/10.1038/s41598-022-22575-5.

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AbstractTunneling field-effect transistors (TFETs) are a promising candidate for the next generation of low-power devices, but their performance is very sensitive to traps near the tunneling junction. This study investigated the effects of high-pressure deuterium (D2) annealing and hydrogen (H2) annealing on the electrical performance and low-frequency noise (LFN) of a fully depleted silicon-on-insulator p-type TFET. Without high-pressure annealing, the typical noise power spectral density exhibited two Lorentzian spectra that were affected by fast and slow trap sites. With high-pressure annealing, the interface trap density related to fast trap sites was reduced. The passivation of traps near the tunneling junction indicates that high-pressure H2 and D2 annealing improves the electrical performance and LFN properties, and it may become a significant and necessary step for realizing integrated TFET technology in the future.

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Bergamaschi, Flávio Enrico, Tadeu Mota Frutuoso, Bruna Cardoso Paz, Gérard Billiot, Aloysius G. M. Jansen, Phillipe Galy, Emmanuel Vincent, Fred Gaillard, Blandine Duriez i Mikaël Cassé. "Experimental Analysis and Modeling of Self-Heating and Thermal Coupling in 28 nm FD-SOI CMOS Transistors Down to Cryogenic Temperatures". IEEE Transactions on Electron Devices, 2024, 1–7. http://dx.doi.org/10.1109/ted.2024.3367316.

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"Ультратонкие скрытые стеки оксидов гафния и алюминия в полевых структурах кремний-на-изоляторе / Попов В.П., Антонов В.А., Ильницкий М.А., Мяконьких А.В., Руденко К.В." Тезисы докладов XIV РОССИЙСКОЙ КОНФЕРЕНЦИИ ПО ФИЗИКЕ ПОЛУПРОВОДНИКОВ «ПОЛУПРОВОДНИКИ-2019», 20.08.2019, 174. http://dx.doi.org/10.34077/semicond2019-174.

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Ультратонкие слои кремния и скрытого окисла (Ultra Thin Body and Buried oxide - UTBB) в структурах кремний-на-изоляторе (КНИ) с эквивалентной толщиной встроенного оксида (Equivalent Oxide Thickness - EOT) менее 10 нм являются перспективными для энергоэффективных высокопроизводительных микросхем на основе полностью обедняемых двухзатворных КНИ полевых транзисторов (two gate fully depleted silicon-on-insulator field effect transistors - 2G FD SOI FETs), работающих в симметричном или асимметричном режиме и для снижения напряжения питания встроенной энергонезависимой памяти (embedded non-volatile memory - е-NVM). Однако снижение толщины диоксида кремния до ЕОТ < 10 нм приводит к появлению разнообразных дефектов в КНИ слое после высокотемпературной обработки за счет перенасыщения оксида атомами водорода и их накопления в газовых блистерах на гетерограницах Si/SiO2, а также растворения сверхтонкого диоксида кремния при высокотемпературном отжиге [1]. Чтобы избежать подобных дефектов в структурах типа UTBB SOI было предложено использовать вместо диоксида кремния более толстый диэлектрик с высокими теплопроводностью и диэлектрической постоянной (high-k) [2]. Минимальное значение EOT = 7.9 нм было получено для стека с аморфным Al2O3 из-за относительно толстых слоев SiO2, нанесенных для достижения низкой плотности состояний (interface states – IFS) на гетерогранице Si/SiO2~ 5x1011eV−1 cm−2 . Кроме того, высокая эффективная плотность отрицательного заряда 3x1012 см−2 сохранялась даже после отжига при 1200o C. Ранее был предложен подход к уменьшению собственного заряда в high- k стеке с помощью диполей на гетерогранице между разнородными диэлектриками [3]. Нам не удалось обнаружить публикаций о поведении стеков из high- k диэлектриков в случае использования их в качестве встроенного окисла в КНИ структурах при высокотемпературных термообработках. Такие КНИ структуры с EOT < 5 нм впервые сформированы нами водородным переносом слоя кремния на пластины кремния со стеками HfO2/Al2O3. Быстрыми термообработками (БТО) при Т > 900о С встроенный заряд снижен до < 1012 см−2 , а подвижность увеличена до 100 см2 /(Вс). Утечки в подложку наблюдаются при полях > 106 В/см. Заметный гистерезис сток-затворных характеристик может быть связан с перезарядкой IFS или диполей на границах раздела и формированием сегнетоэлектрической фазы оксида гафния. С целью разделения этих эффектов проведены эксперименты с различными толщинами и порядком high-k слоев в диэлектрических стеках КНИ структур. Подтверждено присутствие электрических диполей на гетерограницах оксидов металла и кремния, центров захвата и переноса носителей заряда, а также присутствие сегнетоэлектрической фазы в изолирующих слоях [4].

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Xueyin, Su, Xu Binbin, Bo Tang, Jing Xu, Jinbiao Liu, Cui Yan, Yang Meiyin i in. "Comparative Cryogenic Investigation of FD-SOI Devices with Doped Epitaxial and Metallic Source/Drain". ECS Journal of Solid State Science and Technology, 20.05.2024. http://dx.doi.org/10.1149/2162-8777/ad4de0.

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Abstract Defects induced by the source/drain process have a significant impact on the scattering mechanism of PMOS at cryogenic temperatures. Here, the cryogenic characteristics of FD-SOI devices with heavily doped epitaxial source/drain (Epi FD-SOI devices) and metallic Schottky barrier source/drain (SB FD-SOI devices) were investigated from 300 K down to 6 K. The doping profile along the channel was analyzed by TCAD simulation analysis. Experimental comparison of transistor performance at cryogenic temperatures was carried out for these devices with gate lengths (LG) of 100 nm and 40 nm. The I-V characteristics of the FD-SOI devices were measured with a liquid helium cooling environment. The cryogenic effect of the two types of devices on Key parameters including transconductance (Gm), field effect mobility (μFE), threshold voltage (Vth) and subthreshold slope (SS) were systematically analyzed. The doping distribution of the heavily doped epitaxial SiGe source/drain structure were subjected to more Coulomb scattering at cryogenic temperatures, whereas the doping distribution of the Schottky-barrier source/drain structure dictates that the device is mainly subjected to phonon scattering at cryogenic temperatures.

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