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Artykuły w czasopismach na temat "Dual-beam FIB-SEM"
Gu, Lixin, Nian Wang, Xu Tang i H. G. Changela. "Application of FIB-SEM Techniques for the Advanced Characterization of Earth and Planetary Materials". Scanning 2020 (25.07.2020): 1–15. http://dx.doi.org/10.1155/2020/8406917.
Pełny tekst źródłaGiannuzzi, Lucille A. "FIB/SEM Dual Beam Instrumentation: Slicing, Dicing, Imaging, and More". Microscopy and Microanalysis 7, S2 (sierpień 2001): 796–97. http://dx.doi.org/10.1017/s1431927600030051.
Pełny tekst źródłaLee, E., R. Williams, G. B. Viswanathan, R. Banerjee i H. L. Fraser. "3D Materials Characterization using Dual-Beam FIB/SEM Techniques". Microscopy and Microanalysis 10, S02 (sierpień 2004): 1128–29. http://dx.doi.org/10.1017/s1431927604884204.
Pełny tekst źródłaSIVEL, V. G. M., J. VAN DEN BRAND, W. R. WANG, H. MOHDADI, F. D. TICHELAAR, P. F. A. ALKEMADE i H. W. ZANDBERGEN. "Application of the dual-beam FIB/SEM to metals research". Journal of Microscopy 214, nr 3 (czerwiec 2004): 237–45. http://dx.doi.org/10.1111/j.0022-2720.2004.01329.x.
Pełny tekst źródłaCarl, Matthew, Chris A. Smith i Marcus L. Young. "Dual-Beam Scanning Electron Microscope (SEM) and Focused Ion Beam (FIB): A Practical Method for Characterization of Small Cultural Heritage Objects". MRS Proceedings 1656 (15.09.2014): 355–69. http://dx.doi.org/10.1557/opl.2014.873.
Pełny tekst źródłaMahmoud, Morsi M. "Characterization of the Native Oxide Shell of Copper Metal Powder Spherical Particles". Materials 15, nr 20 (17.10.2022): 7236. http://dx.doi.org/10.3390/ma15207236.
Pełny tekst źródłaGrandfield, Kathryn, i Håkan Engqvist. "Focused Ion Beam in the Study of Biomaterials and Biological Matter". Advances in Materials Science and Engineering 2012 (2012): 1–6. http://dx.doi.org/10.1155/2012/841961.
Pełny tekst źródłaLin, Jui-Ching, William Heeschen, John Reffner i John Hook. "Three-Dimensional Characterization of Pigment Dispersion in Dried Paint Films Using Focused Ion Beam–Scanning Electron Microscopy". Microscopy and Microanalysis 18, nr 2 (1.02.2012): 266–71. http://dx.doi.org/10.1017/s143192761101244x.
Pełny tekst źródłaRepetto, Luca, Renato Buzio, Carlo Denurchis, Giuseppe Firpo, Emanuele Piano i Ugo Valbusa. "Fast three-dimensional nanoscale metrology in dual-beam FIB–SEM instrumentation". Ultramicroscopy 109, nr 11 (październik 2009): 1338–42. http://dx.doi.org/10.1016/j.ultramic.2009.06.009.
Pełny tekst źródłaKotula, Paul G., Michael R. Keenan i Joseph R. Michael. "Tomographic Spectral Imaging with a Dual-Beam FIB/SEM: 3D Microanalysis". Microscopy and Microanalysis 10, S02 (sierpień 2004): 1132–33. http://dx.doi.org/10.1017/s1431927604880619.
Pełny tekst źródłaRozprawy doktorskie na temat "Dual-beam FIB-SEM"
Guellil, Imene. "Nano-fonctionnalisation par FIB haute résolution de silicium". Electronic Thesis or Diss., Aix-Marseille, 2022. http://www.theses.fr/2022AIXM0361.
Pełny tekst źródłaThe goal of this work is to develop a process for the elaboration of silicon-germanium (SiGe) quantum dots (QDs) with compositions ranging from Si to pure Ge, and allowing to obtain semiconducting QDs with sufficiently small sizes to obtain quantum confinement. For this purpose, we have used a combination of different techniques: molecular beam epitaxy, focused ion beam lithography (FIBL) and heterogeneous solid state dewetting. In this context, the aim of this research is on the one hand to develop a new FIB that can be coupled to the ultra-high vacuum molecular beam epitaxy growth chamber, and on the other hand to realize two applications: (i) nanopatterns for the self-organisation of Si and Ge QDs and (ii) nano-implantations of Si and Ge. We used FIBL with energy-filtered liquid metal alloy ion sources (LMAIS) using non-polluting ions (Si and Ge) for the milling of conventional microelectronic substrates such as SiGe on silicon-on-insulator (SGOI). The nanopatterns must be totally free of pollution and with variable and perfectly controlled characteristics (size, density, depth). The morphology of the nanopatterns is then characterized in-situ by scanning electron microscopy (SEM), and the depth is determined ex-situ by atomic force microscopy (AFM). The nanopatterns made by FIBL were compared on the one hand to plasma etchings with He and Ne and on the other hand to the etchings obtained by electronic lithography (EBL). Nanoimplantations of Si and Ge ions were realised in diamond and in ultra-thin SGOI for the fabrication of local defects
Części książek na temat "Dual-beam FIB-SEM"
Young, Richard J., i Mary V. Moore. "Dual-Beam (FIB-SEM) Systems". W Introduction to Focused Ion Beams, 247–68. Boston, MA: Springer US, 2005. http://dx.doi.org/10.1007/0-387-23313-x_12.
Pełny tekst źródłaMeng-Burany, Xianying. "Analysis of Electroplated Films Using Dual-Beam FIB/SEM and TEM Techniques". W Modern Electroplating, 637–63. Hoboken, NJ, USA: John Wiley & Sons, Inc., 2011. http://dx.doi.org/10.1002/9780470602638.ch29.
Pełny tekst źródłaCroxall, S. A., M. C. Hardy, H. J. Stone i P. A. Midgley. "The Microstructure of RR1000 Nickel-Base Superalloy: The FIB-SEM Dual-Beam Approach". W Proceedings of the 1st International Conference on 3D Materials Science, 215–20. Cham: Springer International Publishing, 2012. http://dx.doi.org/10.1007/978-3-319-48762-5_33.
Pełny tekst źródłaCroxall, S. A., M. C. Hardy, H. J. Stone i P. A. Midgley. "The Microstructure of RR1000 Nickel-Base Superalloy: The FIB-SEM Dual-Beam Approach". W 1stInternational Conference on 3D Materials Science, 215–20. Hoboken, NJ, USA: John Wiley & Sons, Inc., 2013. http://dx.doi.org/10.1002/9781118686768.ch33.
Pełny tekst źródłaStreszczenia konferencji na temat "Dual-beam FIB-SEM"
Zandiatashbar, Ardavan, i Chester Chien. "A hybrid total measurement uncertainty methodology for dual beam FIB/SEM metrology". W Metrology, Inspection, and Process Control for Microlithography XXXIV, redaktorzy Ofer Adan i John C. Robinson. SPIE, 2020. http://dx.doi.org/10.1117/12.2552115.
Pełny tekst źródłaWang, C. H., S. P. Chang, C. F. Chang i J. Y. Chiou. "Ion Beam Imaging Methodology of Invisible Metal under Insulator Using High Energy Electron Beam Charging". W ISTFA 2007. ASM International, 2007. http://dx.doi.org/10.31399/asm.cp.istfa2007p0168.
Pełny tekst źródłaWeiland, Rainer, Christian Boit, Nick Dawes, Andreas Dziesiaty, Ernst Demm, Bernd Ebersberger, Lothar Frey i in. "In-line failure analysis on productive wafers with dual-beam SEM/FIB systems". W Microelectronic and MEMS Technologies, redaktorzy Gudrun Kissinger i Larg H. Weiland. SPIE, 2001. http://dx.doi.org/10.1117/12.425274.
Pełny tekst źródłaVan Leer, Brandon, Cedric Bouchet-Marquis i Huikai Cheng. "Three-dimensional characterization of Gd nanoparticles using STEM-in-SEM tomography in a dual-beam FIB-SEM". W SPIE Scanning Microscopies, redaktorzy Michael T. Postek, Dale E. Newbury, S. Frank Platek i Tim K. Maugel. SPIE, 2015. http://dx.doi.org/10.1117/12.2195530.
Pełny tekst źródłaYoung, R. J., A. Buxbaum, B. Peterson i R. Schampers. "Applications of In-situ Sample Preparation and Modeling of SEM-STEM Imaging". W ISTFA 2008. ASM International, 2008. http://dx.doi.org/10.31399/asm.cp.istfa2008p0320.
Pełny tekst źródłaYoung, Richard J., Michael P. Bernas, Mary V. Moore, Young-Chung Wang, Jay P. Jordan, Ruud Schampers i Ian van Hees. "In-Situ Sample Preparation and High-Resolution SEM-STEM Analysis". W ISTFA 2004. ASM International, 2004. http://dx.doi.org/10.31399/asm.cp.istfa2004p0331.
Pełny tekst źródłaZandiatashbar, Ardavan, Anhhuy Ngo, Chester Chien, Julien Baderot, Sergio Martinez, Bertrand Darbon i Johann Foucher. "Introducing machine learning-based application for writer main pole CD metrology by dual beam FIB/SEM". W Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV, redaktorzy Ofer Adan i John C. Robinson. SPIE, 2021. http://dx.doi.org/10.1117/12.2583746.
Pełny tekst źródłaSenowitz, Corey, Hieu Nguyen, Ruby Vollrath, Caiwen Yuan, Fati Rassolzadeh, Theresa Graupera, Don Lyons i Michael DiBattista. "Application of Passive Voltage Contrast (PVC) to Dual Beam Focused Ion Beam (FIB) Based Sample Preparation for the Scanning/Transmission Electron Microscope (S/TEM)". W ISTFA 2014. ASM International, 2014. http://dx.doi.org/10.31399/asm.cp.istfa2014p0474.
Pełny tekst źródłaLevenson, Jacob, Swaminathan Subramanian, Khiem Ly i Tony Chrastecky. "Techniques for Preparation of Damage-Free Ultrathin Cross-Section TEM Samples from Planar TEM Samples". W ISTFA 2023. ASM International, 2023. http://dx.doi.org/10.31399/asm.cp.istfa2023p0317.
Pełny tekst źródłaChen, Yixin, Emmanuel Simon, Bing Sheng Khoo, Esther Lee, Meailing Chooi, Meng Hao, Jingjing Shao, Younan Hua i Xiaomin Li. "A Comprehensive Investigation of the Galvanic Corrosion Induced Ag-Al Bond Degradation in Microelectronic Packaging Using Argon Ion Milling, SEM, Dual Beam FIB-SEM, STEM-EDS, and TOF-SIMS". W ISTFA 2014. ASM International, 2014. http://dx.doi.org/10.31399/asm.cp.istfa2014p0166.
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