Bibliografie tematiche / Piezoresistive transducer

Letteratura scientifica selezionata sul tema "Piezoresistive transducer"

Autore: Grafiati
Pubblicato: 20 luglio 2024

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Articoli di riviste sul tema "Piezoresistive transducer"

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Pereira, Ricardo dos Santos, e Carlos Alberto Cima. "Thermal Compensation Method for Piezoresistive Pressure Transducer". IEEE Transactions on Instrumentation and Measurement 70 (2021): 1–7. http://dx.doi.org/10.1109/tim.2021.3092789.

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Stiefvater, Jason, Yuhong Kang, Albrey de Clerck, Shuo Mao, Noah Jones, Josh Deem, Alfred Wicks, Hang Ruan e Wing Ng. "Dual-Use Strain Sensors for Acoustic Emission and Quasi-Static Bending Measurements". Sensors 24, n. 5 (2 marzo 2024): 1637. http://dx.doi.org/10.3390/s24051637.

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Abstract (sommario):
In this paper, a MEMS piezoresistive ultrathin silicon membrane-based strain sensor is presented. The sensor’s ability to capture an acoustic emission signal is demonstrated using a Hsu–Nielsen source, and shows comparable frequency content to a commercial piezoceramic ultrasonic transducer. To the authors’ knowledge, this makes the developed sensor the first known piezoresistive strain sensor which is capable of recording low-energy acoustic emissions. The improvements to the nondestructive evaluation and structural health monitoring arise from the sensor’s low minimum detectable strain and wide-frequency bandwidth, which are generated from the improved fabrication process that permits crystalline semiconductor membranes and advanced polymers to be co-processed, thus enabling a dual-use application of both acoustic emission and static strain sensing. The sensor’s ability to document quasi-static bending is also demonstrated and compared with an ultrasonic transducer, which provides no significant response. This dual-use application is proposed to effectively combine the uses of both strain and ultrasonic transducer sensor types within one sensor, making it a novel and useful method for nondestructive evaluations. The potential benefits include an enhanced sensitivity, a reduced sensor size, a lower cost, and a reduced instrumentation complexity.
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Rollins, Kyle M., J. Dusty Lane, Emily Dibb, Scott A. Ashford e A. Gray Mullins. "Pore Pressure Measurement in Blast-Induced Liquefaction Experiments". Transportation Research Record: Journal of the Transportation Research Board 1936, n. 1 (gennaio 2005): 210–20. http://dx.doi.org/10.1177/0361198105193600124.

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Blast-induced liquefaction experiments have been conducted at a number of test sites to evaluate lateral foundation resistance and soil improvement techniques. Tests can be constructed at full scale without waiting for an earthquake. In this extreme environment, pore pressure transducers must survive transient blast pressures of 41.4 MPa (6,000 psi) yet have enough resolution to measure residual pore pressures of ±0.69 kPa (0.1 psi). Three transducer types were evaluated under these demanding conditions, and the piezoresistive transducer was found to be the most robust. These sensors were repeatedly subjected to extreme blast pressures and vibration, but they still provided accurate time histories of residual pore pressure. Although these piezometers are more expensive than other types, installation techniques allowed them to be recovered and reused in subsequent tests and thus reduced overall costs. These pore pressure sensors make it possible to define the extent of the liquefied zone during blast liquefaction experiments and to understand the soil behavior during cyclic loading of deep foundations.
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Bayram, Ferhat, Durga Gajula, Digangana Khan e Goutam Koley. "Investigation of AlGaN/GaN HFET and VO2 Thin Film Based Deflection Transducers Embedded in GaN Microcantilevers". Micromachines 11, n. 9 (20 settembre 2020): 875. http://dx.doi.org/10.3390/mi11090875.

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The static and dynamic deflection transducing performances of piezotransistive AlGaN/GaN heterojunction field effect transistors (HFET) and piezoresistive VO2 thin films, fabricated on GaN microcantilevers of similar dimensions, were investigated. Deflection sensitivities were tuned with the gate bias and operating temperature for embedded AlGaN/GaN HFET and VO2 thin film transducers, respectively. The GaN microcantilevers were excited with a piezoactuator in their linear and nonlinear oscillation regions of the fundamental oscillatory mode. In the linear regime, the maximum deflection sensitivity of piezotransistive AlGaN/GaN HFET reached up to a 0.5% change in applied drain voltage, while the responsivity of the piezoresistive VO2 thin film based deflection transducer reached a maximum value of 0.36% change in applied drain current. The effects of the gate bias and the operation temperature on nonlinear behaviors of the microcantilevers were also experimentally examined. Static deflection sensitivity measurements demonstrated a large change of 16% in drain-source resistance of the AlGaN/GaN HFET, and a similarly high 11% change in drain-source resistance in the VO2 thin film, corresponding to a 10 μm downward step bending of the cantilever free end.
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Almassri, Ahmed M., W. Z. Wan Hasan, S. A. Ahmad, A. J. Ishak, A. M. Ghazali, D. N. Talib e Chikamune Wada. "Pressure Sensor: State of the Art, Design, and Application for Robotic Hand". Journal of Sensors 2015 (2015): 1–12. http://dx.doi.org/10.1155/2015/846487.

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We survey the state of the art in a variety of force sensors for designing and application of robotic hand. Most of the force sensors are examined based on tactile sensing. For a decade, many papers have widely discussed various sensor technologies and transducer methods which are based on microelectromechanical system (MEMS) and silicon used for improving the accuracy and performance measurement of tactile sensing capabilities especially for robotic hand applications. We found that transducers and materials such as piezoresistive and polymer, respectively, are used in order to improve the sensing sensitivity for grasping mechanisms in future. This predicted growth in such applications will explode into high risk tasks which requires very precise purposes. It shows considerable potential and significant levels of research attention.
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Søndergård, Ole, e Peter Gravesen. "A new piezoresistive pressure transducer principle with improvements in media compatibility". Journal of Micromechanics and Microengineering 6, n. 1 (1 marzo 1996): 105–7. http://dx.doi.org/10.1088/0960-1317/6/1/025.

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Aparna, Dr K. Durga, K. L. V. Nagasree e G. Lalitha Devi. "Design and Fabrication of Mems U-Shaped Cantilever". International Journal of Recent Technology and Engineering (IJRTE) 11, n. 6 (30 marzo 2023): 80–83. http://dx.doi.org/10.35940/ijrte.f7496.0311623.

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MEMS are used in acceleration, flow, pressure and force sensing applications on the micro and macro levels. The fundamental part of every sensor is the transducer which converts the measurend of intrest into and interpretable output signal. The most prominent transducer is the piezoresistive cantilever which translates any signal into an electrical signal.This paper presents the deisgn and fabrication of U shaped cantilever with enhanced sensitivity and stiffness which gives better results than other cantilevers. The simulation results of the cantilevers are designed using COMSOL software. MEMS technology becomes more affordable better and easier to fabricate in increasing quantities. Each layer of fabrication process is quite complex and final fabricated product will tested and used for high end applications.
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Tong, Zhao Jing, Xiu Hua Shi, Xiang Dang Du, Sheng Wu Wang e Tian Peng He. "Temperature Compensation System of Diesel Engine Piezoresistive Pressure Transducer Based on Neural Networks and LabVIEW". Applied Mechanics and Materials 241-244 (dicembre 2012): 833–36. http://dx.doi.org/10.4028/www.scientific.net/amm.241-244.833.

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The work presented in this paper focuses on the output of temperature compensation system of diesel engine piezoresistive pressure transducer, it is nonlinear and influenced easily by environmental temperature. The paper studied the method of using improved neural network algorithm based on LabVIEW and MATLAB to increase the precision and efficiency of pressure detection. In order to eliminate the temperature influence, this paper proposed the method of using improved back propagation neural network on LabVIEW platform, which realized the communication between LabVIEW and MATLAB. The experimental results show that, with the using of Matlab Script node, the system benefits from the huge computing power of MATLAB to train the network based on the static calibration data of transducer, and makes temperature compensation more efficient and accurate.
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Froemel, Joerg, Gildas Diguet e Masanori Muroyama. "Micromechanical Force Sensor Using the Stress–Impedance Effect of Soft Magnetic FeCuNbSiB". Sensors 21, n. 22 (15 novembre 2021): 7578. http://dx.doi.org/10.3390/s21227578.

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By using the stress–impedance (SI) effect of a soft magnetic amorphous FeCuNbSiB alloy, a micromachined force sensor was fabricated and characterized. The alloy was used as a sputtered thin film of 500 nm thickness. To clarify the SI effect in the used material as a thin film, its magnetic and mechanical properties were first investigated. The stress dependence of the magnetic permeability was shown to be caused by the used transducer effect. The sputtered thin film also exhibited a large yield strength of 983 GPa. Even though the fabrication technology for the device is very simple, characterization revealed a gauge factor (GF) of 756, which is several times larger than that achieved with conventional transducer effects, such as the piezoresistive effect. The fabricated device shows great application potential as a tactile sensor.
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Chartrand, D. A., T. H. Ye, J. M. Maarek e H. K. Chang. "Measurement of pleural pressure at low and high frequencies in normal rabbits". Journal of Applied Physiology 63, n. 3 (1 settembre 1987): 1142–46. http://dx.doi.org/10.1152/jappl.1987.63.3.1142.

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In eight tracheotomized adult rabbits placed in the supine position, we employed a catheter-tip piezoresistive pressure transducer to measure esophageal pressure (Pes) and assessed the validity of taking the changes in Pes to be the changes in pleural pressure (Ppl). We applied an occlusion test in which the tracheal cannula was occluded during either spontaneous inspiratory efforts or body surface oscillations ranging from 3 to 50 Hz. The relationship between Pes and airway opening pressure (Pao) was recorded. In all instances, the changes in Pes and Pao were virtually identical in both amplitude and phase. We conclude that, as evaluated by the occlusion test, a catheter-tip pressure transducer placed in the esophagus of rabbits can give adequate estimation of local pleural changes up to at least 50 Hz.
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Più fonti

Tesi sul tema "Piezoresistive transducer"

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Wu, Hankai. "Développement de transducteurs piézo-résistifs sur substrat textile pour caractérisation de flux d'air". Electronic Thesis or Diss., Ecole nationale supérieure Mines-Télécom Atlantique Bretagne Pays de la Loire, 2024. http://www.theses.fr/2024IMTA0405.

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L’objectif de ce travail est le développement de solution de détection de perte de charge d’un filtre à air qui doit être intégré à celui-ci pour un fonctionnement dans une centrale de traitement d’air (CTA). En effet, la perte de charge des filtres augmente avec la durée d’utilisation, et cette évolution a un impact non négligeable sur la consommation énergétique des ventilateurs de la CTA. Un système de mesure a été développé à partir de capteurs commerciaux connectés à un microcontrôleur, cependant ce système n’est pas perméable au flux d’air. Une solution de détection textile, basée sur le phénomène de la piézo-résistivité a été donc proposée et développée. Le substrat de base textile qui a été choisi est l’élasthanne pour ses propriétés d’élasticité, et sa capacité à se déformer sous faible contrainte. Ce matériau a été fonctionnalisé par deux techniques avec un polymère π conjugué, le poly(3,4-éthylènedioxythiophène), possédant des propriétés semi-conductrices et apportant une conductivité exploitable à un fil textile unitaire sur des longueurs de l’ordre du mètre. Ces fils textiles fonctionnalisés ont été caractérisés mécaniquement, morphologiquement, électriquement et électro-mécaniquement. Les résultats ont montré une affinité de la couche conductrice sur le substrat textile, et des procédés d’entraînement ont été établis afin d’améliorer les réponses électromécaniques pour une élongation de 5%. Pour finir, des tests préliminaires de détection sur une gaine de ventilation à l’échelle du laboratoire et sur une CTA à l’échelle industrielle ont permis de conclure que ces fils pouvaient discriminer des vitesses d’air allant de 1 à 3 m/s
The aim of this work is to develop a pressure drop detecting system, which is to be integrated onto an air filter in an air handling unit (AHU). Indeed, filter pressure drop increases with the duration of use, and theevolution has a significant impact on the energy consumption of AHU. A measurement system has been developed using commercial sensors connected to a microcontroller. But this system is not permeable to airflow. A textile sensing solution, based on the piezoresistive phenomenon, was therefore proposed and developed. The textile substrate chosen was elastane, because of its elasticity and ability to deform under low stress. This material was functionalized by two techniques with a π conjugated polymer, poly(3,4-ethylenedioxythiophene), possessing semiconducting properties and bringing exploitable conductivity to a unitary textile yarn over lengths of the order of a meter. These functionalized textile yarns were characterized mechanically, morphologically, electrically and electromechanically. The results demonstrated the affinity of the conductive layer to the textile substrate, and training procedures were established to improve electromechanical responses at 5% elongation. Finally, preliminary detection tests on a laboratory-scale ventilation duct and on an industrial-scale AHU concluded that these yarns could discriminate air velocities ranging from 1 to 3 m/s
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Rafael, Rémi. "Étude des propriétés piézorésistives de jonctions tunnel MIM pour la réalisation de jauges de déformations". Thesis, Lyon, 2018. http://www.theses.fr/2018LYSEI105/document.

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De nouvelles applications émergent avec le développement de l’électronique souple comme des panneaux tactiles pliables, ou des capteurs de mouvement humain portables (wearable). Les technologies bien maîtrisées des jauges silicium sont mal adaptées à ces usages (faible élongation maximale, hautes températures de fabrication). Dans ce contexte, il est nécessaire de développer de nouveaux types de jauges. De nombreuses alternatives sont étudiées, qu’on peut diviser en deux catégories principales : les transducteurs nanoscopiques et les transducteurs composites. Dans ce travail, on étudie la possibilité d’utiliser une jonction tunnel MIM (Métal Isolant Métal) comme jauge de contrainte. Ce genre de dispositif est très peu étudié dans la littérature et la structure utilisée est généralement de type MIS (Métal Isolant Semi-conducteur). À chaque fois, la sensibilité du dispositif est expliquée par les propriétés du semi-conducteur (silicium). Les objectifs de cette thèse sont donc la compréhension des propriétés piézorésistives des jonctions MIM, l’optimisation de leur sensibilité et la fabrication d’un démonstrateur exploitant les technologies de la plastronique. Des jonctions de différentes natures (électrodes de différents métaux) sont fabriquées par évaporation et par ALD (Atomic Layer Deposition). La variation du courant en fonction de la contrainte est mesurée grâce à un banc de flexion. Le facteur de jauge associé est indépendant de la nature des électrodes mais varie fortement (de 40 à 75) en fonction du sens de polarisation de la jonction. Le facteur de jauge associé à la variation sous contrainte des paramètres géométriques (épaisseur et surface) est calculé mais reste inférieur à 13. Les phénomènes géométriques ne peuvent donc pas expliquer la sensibilité observée. L’étude de l’équation du courant Fowler Nordheim (identifié comme courant dominant dans nos jonctions) montre que cette sensibilité doit être associée à la variation sous contrainte de la hauteur de barrière aux interfaces métal/isolant, et/ou de la masse effective des électrons dans l’alumine. Des mesures de photoémission sont réalisées pour mesurer la hauteur de barrière des jonctions. À terme, cette méthode pourrait permettre de mesurer la variation sous contrainte, et donc de comprendre pleinement l’origine de la sensibilité des jonctions MIM. Pour finir, un démonstrateur intégrant des jauges MIM à effet tunnel (capteur de pression) est réalisé avec un substrat souple en polyimide rigidifié par une structure imprimée en 3D. Ce dispositif démontre la compatibilité des méthodes de fabrication des MIM avec les technologies souples et plastiques
New applications are emerging with de development of flexible electronic like flexible touch panels and wearable movement sensors. The well mastered silicon technologies are ill adapted to these uses (low maximal elongation, high fabrication temperatures). In this context, it is necessary to develop new types of strain gauges. Numerous possibilities have been studied that can be divided in two main categories: nanosomic transducers and composite transducers. In this work, we study the possibility to use a MIM (Metal Insulator Metal) tunnel junction as strain gauge. This kind of structure is very unusual in the literature were the only similar article are based on MIS (Metal Insulator Semiconductor) junctions. The objectives of this thesis are thus the understanding of the piezorisistive properties of MIM structures, the optimisation of their sensitivity, and the realisation of a sensor prototype exploiting plastonic technologies
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Law, Jesse Townsend. "Application of the van der Pauw structure as a piezoresistive pressure sensor a numerical study /". Thesis, Montana State University, 2007. http://etd.lib.montana.edu/etd/2007/law/LawJ0807.pdf.

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Naeli, Kianoush. "Optimization of piezoresistive cantilevers for static and dynamic sensing applications". Diss., Atlanta, Ga. : Georgia Institute of Technology, 2009. http://hdl.handle.net/1853/28247.

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Thesis (M. S.)--Electrical and Computer Engineering, Georgia Institute of Technology, 2009.
Committee Chair: Brand, Oliver; Committee Member: Adibi, Ali; Committee Member: Allen, Mark G.; Committee Member: Bottomley, Lawrence A.; Committee Member: Degertekin, F. Levent.
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White, N. M. "A study of the piezoresistive effect in thick-film resistors and its application to load transduction". Thesis, University of Southampton, 1988. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.384433.

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Coraucci, Guilherme de Oliveira. "Sensor de pressão microeletronico baseado no efeito piezoresistivo transversal em silicio". [s.n.], 2008. http://repositorio.unicamp.br/jspui/handle/REPOSIP/259037.

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Orientador: Fabiano Fruett
Dissertação (mestrado) - Universidade Estadual de Campinas, Faculdade de Engenharia Eletrica e de Computação
Made available in DSpace on 2018-08-12T17:39:52Z (GMT). No. of bitstreams: 1 Coraucci_GuilhermedeOliveira_M.pdf: 8439243 bytes, checksum: d062ad2bf9b0e8eaae04ac2443802dab (MD5) Previous issue date: 2008
Resumo: Apresentamos neste trabalho um sensor de pressão piezorresistivo de multiterminais totalmente compatível com o processo de fabricação CMOS, constituído de um piezoelemento sensível ao estresse mecânico disposto sobre uma membrana microfabricada. O layout deste piezoelemento permite maximizar o efeito do estresse mecânico sobre a deflexão das equipotenciais distribuídas sobre sua região ativa. Utilizamos a análise baseada no Método de Elementos Finitos no projeto da membrana, bem como na definição da disposição dos piezoelementos sobre a mesma. O sensor foi fabricado em duas tecnologias diferentes: CMOS 0,3 ?m MAS (Austria Mikro Systeme International) - disponibilizado pelo Projeto Multi-Usuário PMU-FAPESP - e CCS/Unicamp (Centro de Componentes Semicondutores da Unicamp). Realizamos a membrana, no sensor fabricado na tecnologia AMS, através de um processo de desbaste mecânico da pastilha de silício. Já para o sensor fabricado na tecnologia do CCS/Unicamp, utilizamos um aparato de corrosão química (solução de KOH) para corrosão anisotrópica do silício monocristalino e, desta forma, obtivemos uma membrana com maior qualidade. Realizamos o estudo, analítico e numérico, da dependência da tensão de saída do piezoelemento de multiterminais com relação ao estresse mecânico. Os sensores fabricados apresentaram sensibilidade proporcional ao número de contatoscorrente de entrada e pouca dependência desta sensibilidade com sua geometria para uma grande faixa de variação de suas dimensões. Na tecnologia AMS, o sensor apresentou uma sensibilidade de 0,24 mV/psi e na tecnologia CCS/Unicamp 4,8 mV/psi com linearidade máxima de aproximadamente 5,6% FSO
Abstract: This work describes a CMOS-Compatible multiterminal piezoresistive pressure sensor based on the transversal piezoresistive effect, which consists of a piezotransducer fabricated on a membrane. The layout of this piezoelement is designed in such a way that its sensitivity is improved by maximizing the effect of the mechanical stress over the equipotential lines distribution in its active region. We performed Element Finite analyses in both membrane and piezoelement designs. The sensor was fabricated using two different technologies: CMOS 0,35 ?m AMS process (Austria Mikro Systeme International) - supported by the Fapesp Multi-User Project - and CCS/Unicamp process (Center for Semiconductor Components). In the AMS process, we realized a diaphragm by reducing the thickness of the die through a mechanical polishing process. In the sensor fabricated at CCS/Unicamp process, a backside bulk micro-machining was performed by using an automated KOH chemical etching apparatus, which provides a well-controlled anisotropic etching process. The sensor sensitivity is proportional to the number of input current terminals. The sensor sensitivity dependence related to its geometry is minimized even for a wide range of the sensor layout's aspect-ratio. In the AMS process, sensor's sensitivity amounted to 0.24 mV/psi and in the CCS/Unicamp process the sensitivity amounted to 4,8 mV/psi with a maximum linearity of about 5,6% FSO
Mestrado
Eletrônica, Microeletrônica e Optoeletrônica
Mestre em Engenharia Elétrica
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Cassel, Robert Douglas. "Design, fabrication, and testing of the van der Paw piezoresistive structure for pressure sensing". 2008. http://etd.lib.montana.edu/etd/2008/cassel/CasselR0508.pdf.

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Libri sul tema "Piezoresistive transducer"

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Total Dose Effects of Ionizing and Non-Ionizing Radiation on Piezoresistive Pressure Transducer Chips. Storming Media, 2003.

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Fluctuating pressures measured beneath a high-temperature, turbulent boundary layer on a flat plate at a Mach number of 5. [Washington, D.C.]: National Aeronautics and Space Administration, Office of Management, Scientific and Technical Information Division, 1989.

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Capitoli di libri sul tema "Piezoresistive transducer"

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Adams, Thomas M., e Richard A. Layton. "Piezoresistive transducers". In Introductory MEMS, 211–30. Boston, MA: Springer US, 2009. http://dx.doi.org/10.1007/978-0-387-09511-0_8.

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Lenk, Claudia, Kalpan Ved, Steve Durstewitz, Tzvetan Ivanov, Martin Ziegler e Philipp Hövel. "Bio-inspired, Neuromorphic Acoustic Sensing". In Springer Series on Bio- and Neurosystems, 287–315. Cham: Springer International Publishing, 2023. http://dx.doi.org/10.1007/978-3-031-36705-2_12.

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AbstractWe present an overview of recent developments in the area of acoustic sensing that is inspired by biology and realized by micro-electromechanical systems (MEMS). To support understanding, an overview of the principles of human hearing is presented first. After the review of bio-inspired sensing systems, we continue with an outline of an adaptable acoustic MEMS-based sensor that offers adaptable sensing properties due to a simple, real-time feedback. The transducer itself is based on an active cantilever, which offers the advantage of an integrated deflection sensing based on piezoresistive elements and an integrated actuation using thermomechanical effects. We use a feedback loop, which is realized via a field-programmable gate array or analog circuits, to tune the dynamics of the sensor system. Thereby, the transfer characteristics can be switched between active, linear mode, for which the sensitivity and minimal detectable sound pressure level can be set by the feedback strength (similar to control of the quality factor), and an active nonlinear mode with compressive characteristics. The presented sensing system, which is discussed both from an experimental and theoretical point of view, offers real-time control for adaptation to different environments and application-specific sound detection with either linear or nonlinear characteristics.
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Whittier, Robert M. "High Performance Miniaturized Piezoresistive Pressure Transducers". In Micro System Technologies 90, 587–92. Berlin, Heidelberg: Springer Berlin Heidelberg, 1990. http://dx.doi.org/10.1007/978-3-642-45678-7_83.

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Liang, Yiching A., Su-Wen Ueng e Thomas W. Kenny. "Performance Characterization of Ultra-Thin N-Type Piezoresistive Cantilevers". In Transducers ’01 Eurosensors XV, 970–73. Berlin, Heidelberg: Springer Berlin Heidelberg, 2001. http://dx.doi.org/10.1007/978-3-642-59497-7_229.

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Schwizer, Jürg, Michael Mayer, Oliver Brand e Henry Baltes. "Analysis of Ultrasonic Wire Bonding by In-situ Piezoresistive Microsensors". In Transducers ’01 Eurosensors XV, 1398–401. Berlin, Heidelberg: Springer Berlin Heidelberg, 2001. http://dx.doi.org/10.1007/978-3-642-59497-7_330.

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Wu, C. H., S. Stefanescu, H. I. Kuo, C. A. Zorman e M. Mehregany. "Fabrication and Testing of Single Crystalline 3C-SiC Piezoresistive Pressure Sensors". In Transducers ’01 Eurosensors XV, 514–17. Berlin, Heidelberg: Springer Berlin Heidelberg, 2001. http://dx.doi.org/10.1007/978-3-642-59497-7_122.

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Pruitt, Beth, Dae-Han Choi, Jeff Florando, Rod Martens, Stuart Wenzel, Carl Reynolds, William Nix e Thomas Kenny. "Low Force Electrical Contact Measurements Using Piezoresistive MEMS Cantilevers to Characterize Thin-Film Metallization". In Transducers ’01 Eurosensors XV, 1004–7. Berlin, Heidelberg: Springer Berlin Heidelberg, 2001. http://dx.doi.org/10.1007/978-3-642-59497-7_237.

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von Berg, Jochen, Marco Gnielka, Claudio Cavalloni, Thomas Boltshauser, Thomas Diepold, Biswajit Mukhopadhyay e Ernst Obermeier. "A Piezoresistive Low-Pressure Sensor Fabricated Using Silicon-on-Insulator (SOI) for Harsh Environment Applications". In Transducers ’01 Eurosensors XV, 482–85. Berlin, Heidelberg: Springer Berlin Heidelberg, 2001. http://dx.doi.org/10.1007/978-3-642-59497-7_114.

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Bourouina, Tarik, Eric Lebrasseur, Gilbert Reyne, Hiroyuki Fujita, Takahisa Masuzawa, Alfred Ludwig, Eckhard Quandt, Hideo Muro, Takahiko Oki e Akira Asaoka. "A Novel Optical Scanner with Integrated Two-Dimensional Magnetostrictive Actuation and Two-Dimensional Piezoresistive Detection". In Transducers ’01 Eurosensors XV, 1300–1303. Berlin, Heidelberg: Springer Berlin Heidelberg, 2001. http://dx.doi.org/10.1007/978-3-642-59497-7_306.

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10

Clark, D. L. "Temperature Compensation for Piezoresistive Pressure Transducers at Cryogenic Temperatures". In Advances in Cryogenic Engineering, 1447–52. Boston, MA: Springer US, 1992. http://dx.doi.org/10.1007/978-1-4615-3368-9_80.

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Atti di convegni sul tema "Piezoresistive transducer"

1

Chen, Steven, e J. Albert Chiou. "Hall Sensors Using Piezoresistive Transducer Fabrication Process". In ASME 2006 International Mechanical Engineering Congress and Exposition. ASMEDC, 2006. http://dx.doi.org/10.1115/imece2006-13592.

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A piezoresistive transducer (PRT) pressure sensor would be able to sense a magnetic field and provide an adequate Hall effect output. In this study, two different types of boron-doped transducers, X-ducer and picture-frame transducer (also called micro Wheatstone-bridge transducer) were tested for the Hall effect. It is found that the currently used fabrication process and packaging for PRT pressure sensors do not need to be altered for Hall sensors. However, a slight mask modification is necessary to use an X-ducer instead of a picture-frame transducer for the Hall effect sensing because the X-ducer is at least 50 times more sensitive than the picture-frame transducer. The sensitivity calculated using the Hall theory and estimated hole mobility velocity is in reasonably good agreement with experimental results.
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2

Davaji, Benyamin, Shrinidhi Kulkarni, Visarute Pinrod, Alexander Ruyack e Amit Lal. "Piezoresistive Graphene SAW Transducer". In 2018 IEEE International Ultrasonics Symposium (IUS). IEEE, 2018. http://dx.doi.org/10.1109/ultsym.2018.8579639.

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3

Nishida, Toshikazu, Robert Dieme, Mark Sheplak e Gijs Bosman. "Noise Modeling and Characterization of Piezoresistive Transducers". In ASME 2006 International Mechanical Engineering Congress and Exposition. ASMEDC, 2006. http://dx.doi.org/10.1115/imece2006-15392.

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This paper presents detailed results on noise modeling and experimental characterization applicable to piezoresistive MEMS transducers using a piezoresistive MEMS microphone as an example. To accurately model the lower limit of the dynamic range of piezoresistive MEMS transducers, a detailed noise equivalent circuit, piezoresistor noise model, and experimental noise measurements are needed. From the sensitivity and the total root-mean-square output noise, the minimum detectable signal (MDS) may be computed. Key experimental results include comparison of the DC bridge and AC bridge noise measurement techniques and use of the AC measurement technique when the piezoresistive transducer output noise is less than the low frequency DC setup noise.
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4

Hurst, Adam M., Timothy R. Olsen, Scott Goodman, Joe VanDeWeert e Tonghuo Shang. "An Experimental Frequency Response Characterization of MEMS Piezoresistive Pressure Transducers". In ASME Turbo Expo 2014: Turbine Technical Conference and Exposition. American Society of Mechanical Engineers, 2014. http://dx.doi.org/10.1115/gt2014-27159.

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Silicon micro-machined piezoresistive based pressure transducers are often used to make high frequency dynamic pressure measurements. The spectral or frequency response of these microelectromechanical systems (MEMS) is a function of the natural resonance of the sensor structure, sensor size, sensor packaging, signal conditioning and transducer mounting in the desired measurement location. The advancement of MEMS micro-fabrication, which has reduced sensor size dramatically, and the high elastic modulus of silicon have allowed the natural resonance of these devices to range from 100kHz to several MHz [1]. As a result, packaging and mounting at the point of measurement are the major factors that determine the flat (0dB) frequency response envelope of the transducer, which is typically quantified by a transfer function. The transfer function quantifies the difference both in magnitude and phase between an input signal and a measured signal in the frequency domain. The dynamic response of pressure transducers has historically been estimated via a unit step input in pressure created through a shock tube test that excites the high natural resonance of the chip. Unfortunately, these tests are less effective at accurately quantifying the frequency response of the transducer in the domain of greatest interest (DC-20kHz), specifically the bandwidth over which the response is flat (0dB). In this work, we present a test methodology using a speaker-driven dynamic pressure calibration setup for experimentally determining the transfer function of a pressure transducer from 1–50kHz. The test setup is validated using capacitive-based microphones with claimed flat spectral characteristics well beyond 50kHz. Using this test setup, we present experimental spectral response results for low-pressure miniature MEMS piezoresistive pressure transducers over the frequency range of 1–50kHz and qualitatively compare these results to traditional shock tube tests. The transducers characterized have been manufactured with several different standard sizes and front-end configurations.
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5

"Four-terminal piezoresistive transducer: Theory and perspectives". In 2009 International Student School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies (INTERNANO). IEEE, 2009. http://dx.doi.org/10.1109/internano.2009.5335610.

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6

Talukdar, Abdul, e Goutam Koley. "Gated piezoresistive GaN microcantilever as an acoustic transducer". In 2014 72nd Annual Device Research Conference (DRC). IEEE, 2014. http://dx.doi.org/10.1109/drc.2014.6872292.

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7

Sangtong, Suttisak, e Apinunt Thanachayanont. "Low-voltage CMOS instrumentation amplifier for piezoresistive transducer". In TENCON 2005 - 2005 IEEE Region 10 Conference. IEEE, 2005. http://dx.doi.org/10.1109/tencon.2005.301274.

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8

Dempsey, Adam B., Patrick J. Seiler e Simon Johnson. "Comparison of Cylinder Pressure Measurements on a Heavy-Duty Diesel Engine Using a Switching Adapter". In ASME 2018 Internal Combustion Engine Division Fall Technical Conference. American Society of Mechanical Engineers, 2018. http://dx.doi.org/10.1115/icef2018-9776.

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In this study, a variety of piezoelectric pressure transducer designs and mounting configurations were compared for measuring in-cylinder pressure on a heavy-duty single-cylinder diesel engine. A unique cylinder head design was used which allowed cylinder pressure to be measured simultaneously in two locations. In one location, various piezoelectric pressure transducers and mounting configurations were studied. In the other location, a Kistler water-cooled switching adapter with a piezoresistive pressure sensor was used. The switching adapter measured in-cylinder pressure during the low pressure portion of the cycle. During the high pressure portion of the cycle the sensor is protected from the high pressure and high temperature gases in the cylinder. Therefore, the piezoresistive sensor measured in-cylinder pressure highly accurately, without the impacts of short term thermal drift, otherwise known as thermal shock. Additionally, the piezoresistive sensor is an absolute pressure sensor which does not require a baseline or “pegging” on every engine cycle. With this measurement setup, the amount of thermal shock and induced measurement variability was accurately assessed for the piezoelectric sensors. Data analysis techniques for quantifying the accuracy of a piezoelectric cylinder pressure measurements are also presented and discussed. It was observed that all the piezoelectric transducers investigated yielded very similar results regarding compression pressure, start of combustion, peak cylinder pressure, and the overall heat release rate shape. Differences emerged when studying the impact of the transducer mounting (e.g., recessed vs. flush-mount). Recessed-mount transducers tended to yield a more accurate measurement of the cycle-to-cycle variability when compared to the baseline piezoresistive sensor. This is thought to be due to reduced levels of thermal shock, which can vary from cycle-to-cycle.
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9

Hurst, Adam M., Anthony D. Kurtz e Boaz Kochman. "High Temperature Static and Dynamic Pressure Transducer for Combustion Instability Control Using Acoustic Low-Pass Filter Structures". In ASME Turbo Expo 2008: Power for Land, Sea, and Air. ASMEDC, 2008. http://dx.doi.org/10.1115/gt2008-51522.

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There is a need to measure static and dynamic conditions in many gas turbine applications, in particular for combustion instabilities, such as those in the afterburner. The DC and low frequency components are typically used for conventional engine control, while the high frequency data is essential for acoustic screech and rumble diagnostics and control. This paper presents a static-dynamic piezoresistive pressure transducer that measures low amplitude, dynamic pressure perturbations superimposed on top of a high pressure through the implementation of low pass mechanical structures. The transducer, which is capable of operating at ultra-high temperatures and in harsh environments, consists of a static piezoresistive pressure transducer, which measures the large pressures on the order of 200psi and greater, and an ultrasensitive, dynamic piezoresistive pressure transducer which captures small, high frequency pressure oscillations on the order of a few psi. The heightened sensitivity in high pressure environments is achieved by filtering the measured pressure of high frequency content through an innovative low pass mechanical filter structure. The large static pressures passed by the low-pass mechanical filter structures are routed to the backside of the dynamic pressure sensor, which results in both the front and the back of the dynamic sensor being exposed to the large pressures within the environment. Therefore, the large static pressures cancel out, and the dynamic sensor only senses the low magnitude, high frequency pressure perturbations. This dual sensor, static-dynamic pressure transducer reproduces pressure signals with sensitivity far higher than any single high pressure transducer available today. The dual sensor, static-dynamic transducer meets the pressure sensing specification of numerous applications including, but not limited to, the following: the optimization of turbine operation, turbine design and testing, the detection of the onset of rotating stall and surge in turbine compressors, and combustion instabilities. This paper describes a six element model of the static-dynamic transducer’s low-pass mechanical filtering structures. The paradigm is derived from first-principles of fluid motion in acoustic ducts with viscous dissipation. A dynamic pressure source is used to verify the model and its operation. Finally, a transfer function characterization of a fully operational static-dynamic pressure transducer over a wide bandwidth is presented. Based upon the analytical and experimental results, the static-dynamic pressure transducer will make it possible for turbine users and manufacturers to implement ultra-sensitive pressure monitoring to reduce compressor and combustion instabilities [1] [2].
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10

Xu Song e Sheng Liu. "A performance prediction model for a piezoresistive transducer pressure sensor". In ICEPT 2003. Fifth International Conference on Electronic Packaging Technology. Proceedings. IEEE, 2003. http://dx.doi.org/10.1109/eptc.2003.1298688.

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