Bibliographies thématiques / Transparent MEMS

Littérature scientifique sur le sujet « Transparent MEMS »

Auteur : Grafiati
Publié le 11 mars 2023

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Articles de revues sur le sujet "Transparent MEMS"

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Taii, Yusuke, Akio Higo, Hiroyuki Fujita et Hiroshi Toshiyoshi. « A transparent sheet display by plastic MEMS ». Journal of the Society for Information Display 14, no 8 (2006) : 735. http://dx.doi.org/10.1889/1.2336101.

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Williams, John D., C. Schmidt et D. Serkland. « Processing advances in transparent Foturan® MEMS ». Applied Physics A 99, no 4 (14 mai 2010) : 777–82. http://dx.doi.org/10.1007/s00339-010-5721-1.

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Tunes, Matheus A., Cameron R. Quick, Lukas Stemper, Diego S. R. Coradini, Jakob Grasserbauer, Phillip Dumitraschkewitz, Thomas M. Kremmer et Stefan Pogatscher. « A Fast and Implantation-Free Sample Production Method for Large Scale Electron-Transparent Metallic Samples Destined for MEMS-Based In Situ S/TEM Experiments ». Materials 14, no 5 (26 février 2021) : 1085. http://dx.doi.org/10.3390/ma14051085.

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Microelectromechanical systems (MEMS) are currently supporting ground-breaking basic research in materials science and metallurgy as they allow in situ experiments on materials at the nanoscale within electron microscopes in a wide variety of different conditions such as extreme materials dynamics under ultrafast heating and quenching rates as well as in complex electro-chemical environments. Electron-transparent sample preparation for MEMS e-chips remains a challenge for this technology as the existing methodologies can introduce contaminants, thus disrupting the experiments and the analysis of results. Herein we introduce a methodology for simple and fast electron-transparent sample preparation for MEMS e-chips without significant contamination. The quality of the samples as well as their performance during a MEMS e-chip experiment in situ within an electron microscope are evaluated during a heat treatment of a crossover AlMgZn(Cu) alloy.
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Xu, Xiang-Yuan, Hao Ge, Jing Zhao, Zhi-Fei Chen, Jun Zhang, Ming-Hui Lu, Ming Bao, Yan-Feng Chen et Xiao-Dong Li. « A monolithic three-dimensional thermal convective acoustic vector sensor with acoustic-transparent heat sink ». JASA Express Letters 2, no 4 (avril 2022) : 044001. http://dx.doi.org/10.1121/10.0010275.

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An acoustic vector sensor can directly detect acoustic particle velocity based on the measured temperature difference between closely spaced heated wires. For the detection of velocity in three dimensions, an integrated three-dimensional (3 D) sensor is desired, but it remains challenging in MEMS (Micro-Electro-Mechanical System) manufacturing. Here, a novel monolithic 3 D acoustic vector sensor is proposed, which is constructed using in-plane distributed wires assembled with acoustically transparent heat sink. The planar MEMS structure of the proposed sensor makes it easy to be fabricated and packaged. This work offers a new method for the design of acoustic vector sensors and other thermal convection-based MEMS sensors.
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Huang, Qinwen, Xianshan Dong, Wei Cui, Yun Huang, Ping Lai, Shaohua Yang et Yunhui Wang. « Hermeticity evaluation of MEMS wafer packages by Raman spectroscopy ». International Journal of Modern Physics B 34, no 11 (30 avril 2020) : 2050107. http://dx.doi.org/10.1142/s0217979220501076.

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Hermeticity of MEMS wafer packaging has a major impact on the performance and reliability of MEMS devices. The test for hermeticity is usually based on the test method from MIL-STD-883. However, both theory and experiment have shown that this test standard has great limitations for MEMS wafer cavities. Raman spectroscopy has also been used to obtain the quantitative and qualitative information about the molecular composition in the small cavity of MEMS packages and then determine the leak rate of MEMS packages. However, this method is reliant on the package cap being transparent to the probing light and requires a reflective surface. In this paper, the Raman spectroscopy is used to obtain the stress of the surface of the package cap and from the information of stress change to infer the change of the gas pressure in the vacuum encapsulation cavity. The results have shown that the lower the gas pressure in the cavity, the larger the tensile stress; When packaged in the atmosphere, the sample cap has shown a compressive stress (corresponding to the reference), which may result from fabrication process. Based on this method, there is no need to use a transparent package cap, and there is no special requirement for the roughness of the cap surface. Compared with the optical deformation test, this method can directly obtain the surface stress information of the cover without knowing the relevant geometric parameters of the MEMS structure.
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Krauter, Johann, Jonas Stark et Wolfgang Osten. « Topografiemessung an verkapselten mikroelektromechanischen Systemen mittels Kurzkohärenz-Interferometrie ». tm - Technisches Messen 86, no 6 (26 mai 2019) : 309–18. http://dx.doi.org/10.1515/teme-2019-0018.

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ZusammenfassungMikroelektromechanische Systeme (MEMS) werden heute in einer Vielzahl von Anwendungen eingesetzt. Zur Herstellung von MEMS werden üblicherweise fotolithografische Verfahren eingesetzt. Insbesondere bei sicherheitsrelevanten MEMS, wie z. B. Airbag- oder ESP-Sensoren, ist eine 100 % Inspektion erforderlich. Nach einer optischen Inspektion der MEMS-Strukturen werden diese durch das Bonden eines Silizium-Kappenwafers geschützt. Dieses Bonding oder das anschließende Packaging kann zu einer zusätzlichen Spannung im Waferstapel führen, die die MEMS-Funktion negativ beeinflussen kann. Im Falle eines fehlgeschlagenen elektronischen Tests kann das Problem nicht lokalisiert werden, da der Kappenwafer für die gängigen optischen Oberflächensensoren undurchsichtig ist. In dieser Publikation wird die Herausforderung der optischen Topografiemessung von verkapselten MEMS-Strukturen diskutiert. Dabei werden Defekte wie Verbiegung oder Festklemmen einzelner MEMS-Finger betrachtet. Für diese Messaufgabe wird ein kurzkohärentes Interferenzmikroskop implementiert. Die Wellenlänge liegt im Short-Wave Infrarot (SWIR), da Silizium im Infraroten transparent wird. Die interferometrische Oberflächenmessung der MEMS-Strukturen wird durch den Kappenwafer stark beeinflusst. Hierfür wurden Simulationen durchgeführt, die die systematischen Messabweichungen aufgrund der Kappe zeigen. Eine Möglichkeit zur Korrektur und Reduzierung der systematischen Abweichungen wird ebenfalls beschrieben.
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Middelburg, Luke M., Mohammadamir Ghaderi, David Bilby, Jaco H. Visser, Guo Qi Zhang, Per Lundgren, Peter Enoksson et Reinoud F. Wolffenbuttel. « Maintaining Transparency of a Heated MEMS Membrane for Enabling Long-Term Optical Measurements on Soot-Containing Exhaust Gas ». Sensors 20, no 1 (18 décembre 2019) : 3. http://dx.doi.org/10.3390/s20010003.

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Ensuring optical transparency over a wide spectral range of a window with a view into the tailpipe of the combustion engine, while it is exposed to the harsh environment of soot-containing exhaust gas, is an essential pre-requisite for introducing optical techniques for long-term monitoring of automotive emissions. Therefore, a regenerable window composed of an optically transparent polysilicon-carbide membrane with a diameter ranging from 100 µm up to 2000 µm has been fabricated in microelectromechanical systems (MEMS) technology. In the first operating mode, window transparency is periodically restored by pulsed heating of the membrane using an integrated resistor for heating to temperatures that result in oxidation of deposited soot (600–700 °C). In the second mode, the membrane is kept transparent by repelling soot particles using thermophoresis. The same integrated resistor is used to yield a temperature gradient by continuous moderate-temperature heating. Realized devices have been subjected to laboratory soot exposure experiments. Membrane temperatures exceeding 500 °C have been achieved without damage to the membrane. Moreover, heating of membranes to ΔT = 40 °C above gas temperature provides sufficient thermophoretic repulsion to prevent particle deposition and maintain transparency at high soot exposure, while non-heated identical membranes on the same die and at the same exposure are heavily contaminated.
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Liu, Mengran, Ze ming Jian, Guojun Zhang, Nan Guo et Wendong Zhang. « Design of MEMS bionic vector hydrophone based on NBR sound-transparent cap ». Sensor Review 35, no 3 (15 juin 2015) : 303–9. http://dx.doi.org/10.1108/sr-11-2014-0744.

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Purpose – The purpose of this paper is to present a novel nitrile butadiene rubber (NBR) packaging structure, which can solve the problems of the low sensitivity, narrow frequency band and fluctuating frequency response curve of the MEMS bionic vector hydrophone. Design/methodology/approach – A 0.05-mm-thick NBR sound-transparent cap was designed by theoretical analysis and simulation to reduce the signal attenuation caused by the packaging structure, and the frequency band of the hydrophone has been extended to 4 kHz. In this work, the vector hydrophone was fabricated by the MEMS technology and packaged with the NBR sound-transparent cap. The performance indicators were calibrated in the National Defence Underwater Acoustics Calibration Laboratory of China. Findings – The results show that the sensitivity of NBR-packaged hydrophone reaches −170 dB (±2 dB), and the difference is less than 1 dB compared to bare chip. And the frequency band is 50 Hz-4 kHz. The hydrophone also has good directional pattern in the form of an 8-shape, and the pressure-resisting ability is more than 2 MPa. Originality/value – The packaging structure significantly increases the sensitivity of the hydrophone and broadens the frequency band, providing a new method in the packaging design for MEMS hydrophone.
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Taii, Y., A. Higo, H. Fujita et H. Toshiyoshi. « Transparent color pixels using plastic MEMS technology for electronic papers ». IEICE Electronics Express 3, no 6 (2006) : 97–101. http://dx.doi.org/10.1587/elex.3.97.

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Kleimanov, R., I. Komarevtsev, Y. Enns, Y. Akulshin, A. Korshunov, A. Shashkin, D. Arefiev et A. Kazakin. « Lithium aluminosilicate glass-ceramics for low-temperature anodic sealing of MEMS sensors ». Journal of Physics : Conference Series 2086, no 1 (1 décembre 2021) : 012184. http://dx.doi.org/10.1088/1742-6596/2086/1/012184.

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Abstract The results of a study of the anodic bonding parameters of transparent glass-ceramics based on lithium aluminosilicates which are promising as structural materials of MEMS and MOEMS sensors are presented. A comparison of the optical transmittance of these materials and classical for MEMS industry glasses has been carried out. The glass-ceramics electrical conductivity in a wide temperature range has been measured. The procedure of hermetic sealing of glass-ceramics by the anodic bonding at temperatures of 150 – 250 °C has been worked out. A prototype of glass-ceramic atomic cell has been fabricated.
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Thèses sur le sujet "Transparent MEMS"

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Fior, Raffaella. « Development of micro electro mechanical devices for the study of mechanosensitive ion channels and mechanical cell properties ». Doctoral thesis, Università degli studi di Trieste, 2012. http://hdl.handle.net/10077/7363.

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2010/2011
The objectives of this doctoral research involve the development of tools, in particular micro-nano devices for the study of mechanical properties of single living cells and for the analyses of mechanosensitive ionic channels (MSCs). BioMEMS (Biological Micro Electro Mechanical Systems) have been devised and used to investigate MSCs and the cell mechanics in a completely innovative way. Living cells in adhesion can be studied in a physiological condition; the mechanical stretch can be controlled and measured; the MSCs activity can be evaluate using different techniques from patch clamp to AFM (atomic force microscope) or fluorescence essays. Silicon BioMEMS have been designed and tested to evaluate morphological modifications of the stretched cells, and hysteretic behavior has been assessed. However, since they are not transparent, the use of this devices has been limited. Also completely transparent devices have been designed and microfabricated. These BioMEMS will allow testing cells and combining measurements of the mechanical properties, the cell’s morphology (with optical systems and atomic force microscopy), and MSCs activity (with patch clamp and/or conductive AFM). In this doctoral research, BioMEMS have been devised and realized, the measurement set-up optimized and a surface treatment protocol developed.
XXIV Ciclo
1980
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Wiese, Jürgen [Verfasser]. « Transparente Prozessüberwachung von Biogasanlagen und Kläranlagen durch Einsatz moderner Mess- und Automationstechnik / Jürgen Wiese ». Hamburg : Helmut-Schmidt-Universität, Bibliothek, 2016. http://d-nb.info/1090804784/34.

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Liu, Hao-juin, et 劉浩君. « Development of transparent protein microarray based on SAMs technique and MEMS processes ». Thesis, 2007. http://ndltd.ncl.edu.tw/handle/02617453799661872383.

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碩士
國立成功大學
電機工程學系碩博士班
95
Silicon has been extensively used as the primary material in the MEMS manufacturing process. However, it is not suitable for biomedical applications because of its long-term bio-toxicity and lack of opacity, which cause adverse effects and impair the analytical accuracy in a biological system. Therefore, there is an emerging need to develop fabrication techniques using proper materials for bio-analysis applications. The goal of the study is to fabricate protein chips by combining the techniques of MEMS and Self-Assemble monolayer. This work presents a fabrication process of protein chips based on glass substrate using APTES and protein A. The immobilization of APTES on glass substrate is demonstrated using fluorescein isothiocyanate (FITC). The effects of reaction temperature and time on silanization of APTES are investigated to elucidate the mechanism of APTES. The normalized fluorescent intensity indicates that a short period (4 min) of silanization at 25 ℃ suffices to form an APTES thin film. Additionally, a subsequent experiment on the immobilization of FITC-labeled antimouse IgG reveals favorable activation of the protein A. Moreover, rabbit anti-bovine albumin–BSA–sheep anti-bovine albumin that is conjugated with FITC, is used to establish a model for clinical medicine applications. The results demonstrate that APTES can be used to fabricate protein chips as a monolayer under silanization conditions of 4 min at 25 ℃.
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Chapitres de livres sur le sujet "Transparent MEMS"

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Tom, Sparks, et Peters Anne. « Part VIII Compliance, Implementation, and Effectiveness, Ch.52 Transparency Procedures ». Dans The Oxford Handbook of International Environmental Law. Oxford University Press, 2021. http://dx.doi.org/10.1093/law/9780198849155.003.0052.

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This chapter explores how information obligations on states—to collect, report, or publish—are an important aspect of most modern multilateral environmental agreements (MEAs). These have developed both alongside and as part of a wider ‘turn to transparency’ in international law, resulting in traditional forms of reporting, monitoring, and verification being incorporated into a more extensive set of transparency relationships. The chapter examines transparency as an increasingly important aspect of international environmental law, both as an end in itself and as a means of achieving other substantive goals. It frames transparency in international environmental law within the wider transparency turn. The chapter then looks at the techniques that are employed in customary and conventional environmental law to realize transparency, focusing on the compliance-centred, emancipatory, and advocative functions it performs.
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Shirk, Susan L. « The Rise and Fall of Collective Leadership ». Dans Overreach, 81—C4.P116. Oxford University PressNew York, 2022. http://dx.doi.org/10.1093/oso/9780190068516.003.0005.

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Abstract This chapter describes the collective leadership led by Hu Jintao and how it degenerated. During Hu’s first term of office, his administration adopted a series of moderate measures to attempt to modernize CCP rule. He expanded the size of CCP’s top decision-making body to balance power and broaden representation within the Party-state, adopted a lighter and more transparent approach in dealing with the media, and supported more redistributive policies to improve people’s livelihood. However, Hu’s collective leadership model began to show its inherent flaws during his second term in office. Being hamstrung by his predecessor Jiang Zeming, Hu lacked the centralized authority to contain the bureaucratic overreach of the stovepiped interest groups in his control coalition and industrial bureaucracies that log-rolled by supporting one another’s programs. The collective leadership at the top, which is supposed to be the embodiment of intraparty democracy, morphed into an unchecked oligarchic rule that brewed corruption, inequality, and even open leadership splits. The urgency to clean up the mess of the oligarchic rule later leads to the Party acceptance of a strong leader, enabling the rise of Xi.
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Mergel, Inez. « Measuring the Impact of Social Media use in the Public Sector ». Dans Public Service, Governance and Web 2.0 Technologies, 48–64. IGI Global, 2012. http://dx.doi.org/10.4018/978-1-4666-0071-3.ch004.

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Existing research on eGovernment performance has provided limited proof for the impact the use of technology has on citizen participation, engagement or generally satisfaction with government activities. Social media applications have the potential to improve responsiveness, reach, and efficiency, and even cost savings in government. The current Government 2.0 initiatives launched by all executive departments and agencies of the U.S. Federal Government as a response to President Obama’s Transparency and Open Government memo show that government agencies are implementing social media applications as additional information and communication channels. This chapter provides a comparison between traditional eGovernment measurement techniques and the current practices, highlighting the current practices of measuring social media impact in the public sector. The insights are based on data collected in 2010 from interviews with social media directors in the most innovative executive departments and agencies. The results show that the current standard practices mostly include quantitative impact measures instead of the qualitative measures needed to better understand the sentiments of citizens.
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Green, Sarah. « Wage Theft as a Legal Concept ». Dans Criminality at Work, 134–50. Oxford University Press, 2020. http://dx.doi.org/10.1093/oso/9780198836995.003.0007.

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This chapter analyses the fraud offence from the perspective of ‘wage theft’. The social concept of a ‘wage theft’ encompasses a wide range of dishonest or ‘sharp’ practices: false labelling of individuals as ‘self-employed’ and hence outside the scope of the National Minimum Wage framework, failure to pay holiday pay, unlawful deductions, and an absence of transparency in relation to wage entitlements. It is linked to wider public concerns about the effective enforcement of the statutory minimum wage regime. The chapter then examines whether the social concept of ‘wage theft’ maps onto the legal definition of ‘theft’ in section 1 of the Theft Act 1968. It argues the legal label of theft is ill-suited to the constellation of practices associated with the social label of ‘wage theft’. This is because of the disjunction between the proprietary status of ‘wages’ and the offence elements of theft in English law. In short, unpaid wages will often not count as ‘property belonging to another’ at the time of the dishonest appropriation by the employer, hence there is a difficulty with identifying a complete and coincident mens rea and actus reus.
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Actes de conférences sur le sujet "Transparent MEMS"

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Liu, Bing, Zhendong Hu et Yong Che. « Ultrafast pulsed laser micro-deposition printing on transparent media ». Dans MOEMS-MEMS, sous la direction de Mary Ann Maher, Jung-Chih Chiao et Paul J. Resnick. SPIE, 2010. http://dx.doi.org/10.1117/12.842806.

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Ronny, Rahima Afrose, George K. Knopf, Evgueni Bordatchev, Mohammed Tauhiduzzaman et Suwas Nikumb. « Micromachined edge illuminated optically transparent automotive light guide panels ». Dans SPIE MOEMS-MEMS, sous la direction de Mary Ann Maher et Paul J. Resnick. SPIE, 2012. http://dx.doi.org/10.1117/12.908202.

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Liew, Li-Anne, Tsali Cross, Victor M. Bright et Rishi Raj. « Fabrication of Novel Polysilazane MEMS Structures by Microcasting ». Dans ASME 2001 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2001. http://dx.doi.org/10.1115/imece2001/mems-23920.

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Abstract This paper presents a technique to fabricate MEMS from a novel, optically transparent polysilazane material. Polysilazane is a hybrid organic/inorganic polymeric glass that is highly transparent in the infrared to ultraviolet range and exhibits thermal stability superior to that of organic glasses such as polycarbonate and PMMA at temperatures up to 230 °C without losing optical transparency. In addition, the UV absorption of the polysilazane is closer to that of silicate glass than to pure organic polymeric glasses. This paper is the first reported work on fabricating MEMS out of this novel material, which has many potential applications in optical MEMS. The fabrication process based on casting in micro molds made photolithographically from SU8 photoresist is described, and a fundamental study of the cure depth of the polysilazane is reported. A polysilazane phase transmission grating is fabricated and demonstrated as a proof of concept optical device.
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Kurczynski, Peter L., Harold M. Dyson, Bernard Sadoulet, J. Eric Bower, Warren Y. Lai, William M. Mansfield et J. Ashley Taylor. « A membrane mirror with transparent electrode for adaptive optics ». Dans MOEMS-MEMS Micro & Nanofabrication, sous la direction de Ayman El-Fatatry. SPIE, 2005. http://dx.doi.org/10.1117/12.593234.

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Yan, John. « Optically transparent, flexible pressure sensor array micromachined utilizing plasma assisted bonding ». Dans SPIE MOEMS-MEMS, sous la direction de Mary Ann Maher et Paul J. Resnick. SPIE, 2012. http://dx.doi.org/10.1117/12.899493.

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Loeschner, U., J. Schille, R. Ebert et H. Exner. « Laser processing inside transparent materials : dependence on pulse length and wavelength ». Dans SPIE MOEMS-MEMS, sous la direction de Mary Ann Maher, Jung-Chih Chiao et Paul J. Resnick. SPIE, 2011. http://dx.doi.org/10.1117/12.874725.

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Lee, Byung-Kee, Yong-Ha Song et Jun-Bo Yoon. « Indium Tin Oxide (ITO) Transparent MEMS Switches ». Dans 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2009. http://dx.doi.org/10.1109/memsys.2009.4805340.

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Kadan, Viktor M., Ivan V. Blonsky, Vadim O. Salnikov et Evgen V. Orieshko. « Effects of laser-induced plasma in machining of transparent materials ». Dans MOEMS-MEMS Micro & Nanofabrication, sous la direction de Mary-Ann Maher et Harold D. Stewart. SPIE, 2005. http://dx.doi.org/10.1117/12.589607.

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Campo, E. M., M. J. Lopez-Martinez, E. Fernández, E. Ibañez, L. Barros, C. Nogues, J. Esteve et J. A. Plaza. « Sharpened transparent micronozzle fabrication for cell membrane piercing ». Dans SPIE MOEMS-MEMS : Micro- and Nanofabrication, sous la direction de Mary-Ann Maher, Jung-Chih Chiao et Paul J. Resnick. SPIE, 2009. http://dx.doi.org/10.1117/12.809427.

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Fior, R., S. Maggiolino, M. Lazzarino et O. Sbaizero. « A completely transparent MEMS for mechanical properties evaluation of a single living cell ». Dans SPIE MOEMS-MEMS, sous la direction de Holger Becker et Bonnie L. Gray. SPIE, 2011. http://dx.doi.org/10.1117/12.874445.

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