Literatura académica sobre el tema "Microelectromechanical systems"
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Artículos de revistas sobre el tema "Microelectromechanical systems"
Gabriel, K. J. "Microelectromechanical systems". Proceedings of the IEEE 86, n.º 8 (1998): 1534–35. http://dx.doi.org/10.1109/5.704257.
Texto completoMehregany, M. "Microelectromechanical systems". IEEE Circuits and Devices Magazine 9, n.º 4 (julio de 1993): 14–22. http://dx.doi.org/10.1109/101.250229.
Texto completoMacDonald, Noel C. "SCREAM MicroElectroMechanical Systems". Microelectronic Engineering 32, n.º 1-4 (septiembre de 1996): 49–73. http://dx.doi.org/10.1016/0167-9317(96)00007-x.
Texto completoVasylenko, Mykola y Maksym Mahas. "Microelectromechanical Gyrovertical". Electronics and Control Systems 1, n.º 71 (27 de junio de 2022): 16–21. http://dx.doi.org/10.18372/1990-5548.71.16818.
Texto completoBhat, K. N. "Micromachining for Microelectromechanical Systems". Defence Science Journal 48, n.º 1 (1 de enero de 1998): 5–19. http://dx.doi.org/10.14429/dsj.48.3863.
Texto completoKal, Santiram. "Microelectromechanical Systems and Microsensors". Defence Science Journal 57, n.º 3 (23 de mayo de 2007): 209–24. http://dx.doi.org/10.14429/dsj.57.1762.
Texto completoGupta, Amita. "Advances in Microelectromechanical Systems". Defence Science Journal 59, n.º 6 (24 de noviembre de 2009): 555–56. http://dx.doi.org/10.14429/dsj.59.1579.
Texto completoLouizos, Louizos-Alexandros, Panagiotis G. Athanasopoulos y Kevin Varty. "Microelectromechanical Systems and Nanotechnology". Vascular and Endovascular Surgery 46, n.º 8 (8 de octubre de 2012): 605–9. http://dx.doi.org/10.1177/1538574412462637.
Texto completoKristo, Blaine, Joseph C. Liao, Hercules P. Neves, Bernard M. Churchill, Carlo D. Montemagno y Peter G. Schulam. "Microelectromechanical systems in urology". Urology 61, n.º 5 (mayo de 2003): 883–87. http://dx.doi.org/10.1016/s0090-4295(03)00032-3.
Texto completo(Rich) Pryputniewicz, R. J. "Progress in Microelectromechanical Systems". Strain 43, n.º 1 (febrero de 2007): 13–25. http://dx.doi.org/10.1111/j.1475-1305.2007.00303.x.
Texto completoTesis sobre el tema "Microelectromechanical systems"
Murarka, Apoorva. "Contact-printed microelectromechanical systems". Thesis, Massachusetts Institute of Technology, 2012. http://hdl.handle.net/1721.1/77080.
Texto completoCataloged from PDF version of thesis.
Includes bibliographical references (p. 105-107).
Microelectromechanical systems (MEMS) are ubiquitous. Scalable large-area arrays of MEMS on a variety of substrates, including flexible substrates, have many potential applications. Novel methods for additive fabrication of thin (125±15 nm thick) suspended gold membranes on a variety of rigid and flexible cavity-patterned substrates for MEMS applications are reported. The deflection of these membranes, suspended over cavities in a dielectric layer atop a conducting electrode, can be used to produce sounds or monitor pressure. The reported fabrication methods employ contact-printing, and avoid fabrication of MEMS diaphragms via wet or deep reactive-ion etching, which in turn removes the need for etch-stops and wafer bonding. Elevated temperature processing is also avoided to enable MEMS fabrication on flexible polymeric substrates. Thin films up to 12.5 mm2 in area are fabricated. The MEMS devices are electrically actuated and the resulting membrane deflection is characterized using optical interferometry. Preliminary sound production is demonstrated, and further applications of this technology are discussed.
by Apoorva Murarka.
M.Eng.
Latif, Rhonira. "Microelectromechanical systems for biomimetical application". Thesis, University of Edinburgh, 2013. http://hdl.handle.net/1842/7955.
Texto completoLemay, Scott A. "Microelectromechanical propulsion systems for spacecraft". Thesis, Monterey, California. Naval Postgraduate School, 2002. http://hdl.handle.net/10945/5883.
Texto completoRamaswamy, Deepak 1974. "Simulation tools for microelectromechanical systems". Thesis, Massachusetts Institute of Technology, 2001. http://hdl.handle.net/1721.1/8625.
Texto completoIncludes bibliographical references (p. 101-104).
In this thesis efficient techniques to solve complex 3-D electromechanical problems are developed. Finite element discretization of complex structures such as the micromirror lead to thousands of internal degrees of freedom. Their mostly rigid motion is exploited leading to a mixed rigid-elastic formulation. This formulation's advantage is apparent when it is incorporated in an efficient coupled domain simulation technique and examples are presented exploring geometry effects on device behavior. Then for system level simulation where full device simulation costs add up we need models with much reduced order with little degradation in accuracy. We describe a model reduction formulation for the electromechanical problem based on implicit techniques which accurately capture the original model behavior.
by Deepak Ramaswamy.
Ph.D.
Then, Alan M. (Alan Michael) 1965. "Commercialization of microelectromechanical systems (MEMS)". Thesis, Massachusetts Institute of Technology, 2001. http://hdl.handle.net/1721.1/8920.
Texto completoIncludes bibliographical references (leaves 69-72).
Microelectromechanical systems (MEMS), at their core are a set of technologies that employ the processes developed in the integrated circuit (IC) and semiconductor industries to construct electro- mechanical devices. In the case of Microopticelectromechanical systems (MOEMS), optical elements are also integrated into these devices. MEMS technology holds the promise of significantly miniaturizing, reducing the cost of, and enhancing the performance of many sensors and actuators, evidence its widespread use in the manufacture of accelerometers, ink jet printer heads and various chemical gas sensors. Despite its stellar success in these "killer-applications," MEMS technology has failed to realize the widespread success many had predicted for it. Nonetheless, this technology has recently been explored extensively for new electro-optics applications, specifically in telecommunications for dense wavelength division multiplexing (DWDM) and optical switching. This thesis examines various models of dynamic technology adoption and explores how they apply to MEMS technology. Furthermore, by way of historical comparison to the development of application specific integrated circuit (ASIC), it will identify various developmental similarities. Finally, a unique model outlining the critical driving forces behind the adoption of MEMS technology will be constructed.
by Alan M. Then.
S.M.M.O.T.
Cragun, Rebecca. "Thermal microactuators for microelectromechanical systems /". Diss., CLICK HERE for online access, 1999. http://contentdm.lib.byu.edu/ETD/image/etd170.pdf.
Texto completoWilson, Aubrey Marie Mueller. "Transgene Delivery via Microelectromechanical Systems". BYU ScholarsArchive, 2012. https://scholarsarchive.byu.edu/etd/3936.
Texto completoRuzziconi, Laura. "Nonlinear dynamics in microelectromechanical systems". Doctoral thesis, Università Politecnica delle Marche, 2011. http://hdl.handle.net/11566/242133.
Texto completoThis dissertation deals with the nonlinear dynamics in MEMS devices. The nonlinear dynamic topics currently addressed in the literature are essential to investigate their response. The accuracy of the nonlinear dynamic modeling is important to guarantee the reliability of the results and current nonlinear dynamic tools succeed in carefully interpreting the experimental data of the response of these devices. The dissertation considers two different case-studies. The first case-study is a MEMS device with axial load, very shallow arched initial shape and electrostatic and electrodynamic actuation. It is analyzed in the neighborhood of the bifurcation from a single potential well to a twin well. Both the nonlinear static configurations and the linear dynamic analysis cannot be solved in closed form and they are approximated by the Galerkin technique. They are used to derive an accurate single degree of freedom reduced order model of the nonlinear dynamics. In this model the fifth order term (connected to the Taylor expansion in the equation of motion) is removed to obtain a good approximation of the potential wells and of the global behavior. Other reduced order models are considered and compared. The nonlinear dynamic analysis is performed, with the combined use of frequency response curves, attractor-basins phase portraits and behavior charts. In a neighborhood of each natural frequency, the response of the device has the typical characteristics of a softening oscillator. The cases of the single and the double potential well are compared. The second case-study analyzes the experimental dynamic pull-in data at primary resonance for a MEMS device (a capacitive accelerometer). Starting from this particular case, the issue of the dynamical integrity in a mechanical system is addressed. Its qualitative evaluation is performed, choosing the most suitable tools according to the considered experimental conditions. The effectiveness of this analysis is highlighted, showing the accuracy of the curves of constant percentage of integrity factor in interpreting the existence of disturbances in experiments and practice. Also, their use in a design is proposed.
Lusk, Craig P. "Ortho-Planar Mechanisms for Microelectromechanical Systems". Diss., CLICK HERE for online access, 2005. http://contentdm.lib.byu.edu/ETD/image/etd902.pdf.
Texto completoZeng, Yang. "Finite Element Methods for Microelectromechanical Systems". Thesis, Uppsala University, Department of Information Technology, 2009. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-110896.
Texto completoThe stationary Joule heating problem is a crucial multiphysical problem for many microelectromechanical (MEMS) applications. In our paper, we derive a finite element method for this problem and introduce iterative solution-techniques to compute the numerical simulation. Further we construct an adaptive algorithm for mesh refinement based on a posteriori error estimation.Finally, we present two numerical tests: convergences analysis of different iterative methods for distinct materials which are classified by electrical conductivities, and a test of the new adaptive refinement algorithm. All the numerical implementations have been done in MATLAB.
Libros sobre el tema "Microelectromechanical systems"
Lobontiu, Nicolae. Dynamics of Microelectromechanical Systems. Boston, MA: Springer US, 2007. http://dx.doi.org/10.1007/978-0-387-68195-5.
Texto completoLee, Ki Bang. Principles of Microelectromechanical Systems. Hoboken, NJ, USA: John Wiley & Sons, Inc., 2011. http://dx.doi.org/10.1002/9780470649671.
Texto completoE, Garcia, ed. Mechanics of microelectromechanical systems. New York: Kluwer Academic, 2005.
Buscar texto completoBrendley, Keith W. Military applications of microelectromechanical systems. Santa Monica, CA: Rand, 1993.
Buscar texto completoKirt, Williams, ed. Introduction to microelectromechanical systems engineering. 2a ed. Boston: Artech House, 2004.
Buscar texto completoG, DeAnna Russell, Reshotko Eli y United States. National Aeronautics and Space Administration., eds. Microelectromechanical systems for aerodynamics applications. [Washington, D.C: National Aeronautics and Space Administration, 1996.
Buscar texto completoHéctor J. de los Santos. Introduction to microelectromechanical (MEM) microwave systems. Boston: Artech House, 1999.
Buscar texto completoHéctor J. de los Santos. Introduction to microelectromechanical (MEM) microwave systems. Boston: Artech House, 1999.
Buscar texto completoNational Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems. Microelectromechanical systems: Advanced materials and fabrication methods. Washington, DC: National Academy Press, 1997.
Buscar texto completoSimons, Rainee. Microelectromechanical systems (MEMS) actuators for antenna reconfigurability. [Cleveland, Ohio]: National Aeronautics and Space Administration, Glenn Research Center, 2001.
Buscar texto completoCapítulos de libros sobre el tema "Microelectromechanical systems"
Taklo, Maaike M. V. "Microelectromechanical Systems". En Handbook of Wafer Bonding, 279–99. Weinheim, Germany: Wiley-VCH Verlag GmbH & Co. KGaA, 2012. http://dx.doi.org/10.1002/9783527644223.ch14.
Texto completoZangari, Giovanni. "Microelectromechanical Systems". En Modern Electroplating, 617–36. Hoboken, NJ, USA: John Wiley & Sons, Inc., 2011. http://dx.doi.org/10.1002/9780470602638.ch28.
Texto completoElwenspoek, M. y R. Wiegerink. "Microelectromechanical Systems". En Smart Structures, 221–31. Vienna: Springer Vienna, 2001. http://dx.doi.org/10.1007/978-3-7091-2686-8_17.
Texto completoJuarez-Martinez, Gabriela, Alessandro Chiolerio, Paolo Allia, Martino Poggio, Christian L. Degen, Li Zhang, Bradley J. Nelson et al. "MicroElectroMechanical Systems". En Encyclopedia of Nanotechnology, 1404. Dordrecht: Springer Netherlands, 2012. http://dx.doi.org/10.1007/978-90-481-9751-4_100428.
Texto completoGómez-Carmona, Carlos D., José Pino-Ortega y Markel Rico-González. "Microelectromechanical Systems". En The Use of Applied Technology in Team Sport, 52–73. New York: Routledge, 2021. http://dx.doi.org/10.4324/9781003157007-6.
Texto completoYunjia, Li. "Microelectromechanical Systems (MEMS)". En Material-Integrated Intelligent Systems - Technology and Applications, 81–106. Weinheim, Germany: Wiley-VCH Verlag GmbH & Co. KGaA, 2017. http://dx.doi.org/10.1002/9783527679249.ch4.
Texto completoYoung, Darrin J. y Hanseup Kim. "Microelectromechanical Systems (MEMS)". En Guide to State-of-the-Art Electron Devices, 239–50. Chichester, UK: John Wiley & Sons, Ltd, 2013. http://dx.doi.org/10.1002/9781118517543.ch18.
Texto completoJuarez-Martinez, Gabriela, Alessandro Chiolerio, Paolo Allia, Martino Poggio, Christian L. Degen, Li Zhang, Bradley J. Nelson et al. "MEMS = Microelectromechanical Systems". En Encyclopedia of Nanotechnology, 1305. Dordrecht: Springer Netherlands, 2012. http://dx.doi.org/10.1007/978-90-481-9751-4_100394.
Texto completode Silva, Clarence W. "Microelectromechanical Systems and Multisensor Systems". En Sensor Systems, 599–668. Boca Raton : Taylor & Francis, CRC Press, 2017.: CRC Press, 2016. http://dx.doi.org/10.1201/9781315371160-12.
Texto completoLee, Y. C., Ming Kong y Yadong Zhang. "Microelectromechanical Systems and Packaging". En Materials for Advanced Packaging, 697–731. Cham: Springer International Publishing, 2016. http://dx.doi.org/10.1007/978-3-319-45098-8_16.
Texto completoActas de conferencias sobre el tema "Microelectromechanical systems"
"Microelectromechanical systems (MEMS)". En IECON 2011 - 37th Annual Conference of IEEE Industrial Electronics. IEEE, 2011. http://dx.doi.org/10.1109/iecon.2011.6119970.
Texto completo"Microelectromechanical systems (MEMS)". En 2011 IEEE 43rd Southeastern Symposium on System Theory (SSST 2011). IEEE, 2011. http://dx.doi.org/10.1109/ssst.2011.5753816.
Texto completo"2001 Microelectromechanical Systems Conference (Cat. No. 01EX521)". En 2001 Microelectromechanical Systems Conference. IEEE, 2001. http://dx.doi.org/10.1109/memsc.2001.992726.
Texto completo"Author index". En 2001 Microelectromechanical Systems Conference. IEEE, 2001. http://dx.doi.org/10.1109/memsc.2001.992753.
Texto completoMehregany, Mehran. "Overview of microelectromechanical systems". En Fibers '92, editado por Massood Tabib-Azar y Dennis L. Polla. SPIE, 1993. http://dx.doi.org/10.1117/12.141207.
Texto completoMaspero, Federico, Simone Cuccurullo, Giulia Pavese, Maria Cocconcelli, Andrea Del Giacco, Alejandro Plaza, Oksana Koplak y Riccardo Bertacco. "Magnetism meet microelectromechanical systems". En 2023 IEEE International Magnetic Conference - Short Papers (INTERMAG Short Papers). IEEE, 2023. http://dx.doi.org/10.1109/intermagshortpapers58606.2023.10305034.
Texto completo"Microelectromechanical systems (MEMS) devices and systems". En IECON 2010 - 36th Annual Conference of IEEE Industrial Electronics. IEEE, 2010. http://dx.doi.org/10.1109/iecon.2010.5675098.
Texto completo"Microelectromechanical systems (MEMS) devices and systems". En IECON 2009 - 35th Annual Conference of IEEE Industrial Electronics (IECON). IEEE, 2009. http://dx.doi.org/10.1109/iecon.2009.5415325.
Texto completoMukherjee, Tamal y Gary K. Fedder. "Structured design of microelectromechanical systems". En the 34th annual conference. New York, New York, USA: ACM Press, 1997. http://dx.doi.org/10.1145/266021.266320.
Texto completoLee, Y. C. "Packaging and Microelectromechanical Systems (MEMS)". En 2007 8th International Conference on Electronic Packaging Technology. IEEE, 2007. http://dx.doi.org/10.1109/icept.2007.4441562.
Texto completoInformes sobre el tema "Microelectromechanical systems"
Timpe, Shannon J., Kyriakos Komvopoulos, Bonnie R. Antoun y Michael Thomas Dugger. Tribological Studies of Microelectromechanical Systems. Office of Scientific and Technical Information (OSTI), enero de 2008. http://dx.doi.org/10.2172/1324748.
Texto completoDyck, Christopher, Cody M. Washburn, Michael N. Rector, Patrick Sean Finnegan, Kent B. Pfeifer, Beechem, Thomas Edwin,, Jill Blecke, Michael Randolph Satches, Lee Taylor Massey y Christopher Dyck. Carbon Composite Microelectromechanical Systems (CMEMS). Office of Scientific and Technical Information (OSTI), febrero de 2016. http://dx.doi.org/10.2172/1560994.
Texto completoFreeman, Dennis M. Computer Microvision for Microelectromechanical Systems (MEMS). Fort Belvoir, VA: Defense Technical Information Center, noviembre de 2003. http://dx.doi.org/10.21236/ada419775.
Texto completoYee, Steven C. Tunable Patch Antennas Using Microelectromechanical Systems. Fort Belvoir, VA: Defense Technical Information Center, mayo de 2011. http://dx.doi.org/10.21236/ada554674.
Texto completoBaudry, Michel, Theodore W. Berger, Eun Sok Kim, Charles E. McKenna y Mark E. Thompson. Sensing of Neuron Signals Using Microelectromechanical Systems. Fort Belvoir, VA: Defense Technical Information Center, marzo de 2003. http://dx.doi.org/10.21236/ada414552.
Texto completoMastrangelo, C. H. Microfabrication Techniques for Plastic Microelectromechanical Systems (MEMS). Fort Belvoir, VA: Defense Technical Information Center, julio de 2003. http://dx.doi.org/10.21236/ada420836.
Texto completoChan, H. B. y J. Yelton. Collective behaviors of the Casimir force in microelectromechanical systems. Office of Scientific and Technical Information (OSTI), enero de 2013. http://dx.doi.org/10.2172/1060378.
Texto completoGluck, Natalie S. y Howard R. Last. Military and Potential Homeland Security Applications for Microelectromechanical Systems (MEMS). Fort Belvoir, VA: Defense Technical Information Center, noviembre de 2004. http://dx.doi.org/10.21236/ada430286.
Texto completoGoldsmith, Charles L. Robust, Reliable, Radio Frequency (RF) Microelectromechanical Systems (MEMS) Capacitive Switches. Fort Belvoir, VA: Defense Technical Information Center, enero de 2005. http://dx.doi.org/10.21236/ada432262.
Texto completoKirshberg, Jeffrey A. Microelectromechanical Systems (MEMS)-Based Microcapillary Pumped Loop for Chip-Level Temperature Control. Fort Belvoir, VA: Defense Technical Information Center, enero de 2002. http://dx.doi.org/10.21236/ada405777.
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