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1

Huang, Qing-An, ed. Micro Electro Mechanical Systems. Singapore: Springer Singapore, 2018. http://dx.doi.org/10.1007/978-981-10-5945-2.

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2

Huang, Qing-An, ed. Micro Electro Mechanical Systems. Singapore: Springer Singapore, 2018. http://dx.doi.org/10.1007/978-981-10-2798-7.

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3

Micro electro mechanical system design. Boca Raton: Taylor & Francis, 2005.

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4

Micro electro mechanical system design. Boca Raton: Taylor & Francis, 2005.

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5

Bang, Lee Ki, ed. Principles of micro electro mechanical systems (MEMS). Hoboken, N.J: WILEY, 2010.

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6

Ekwall, Britt y Mikkel Cronquist. Micro electro mechanical systems (MEMS): Technology, fabrication processes, and applications. Editado por Ekwall Britt y Cronquist Mikkel. Hauppauge, N.Y: Nova Science Publishers, 2009.

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7

International, Conference on Micro Electro Opto Mechanical Systems and Components (5th 1996 Potsdam Germany). Micro systems technologies '96: 5th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Potsdam, September 17-19, 1996. Berlin: VDE-Verlag, 1996.

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8

International, Conference on Micro Electro Opto Mechanic Systems and Components (6th 1998 Potsdam Germany). Micro system technologies 98: 6th International Conference on Micro, Electro, Opto, Mechanical Systems and Components, Potsdam, December 1-3, 1998. Berlin: VDE-Verlag, 1998.

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9

International Conference on Micro Electro, Opto, Mechanical Systems and Components (4th 1994 Berlin, Germany). Micro system technologies '94: 4th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Berlin, October 19-21, 1994. Editado por Reichl H, Heuberger A, Ausstellungs-Messe-Kongress-GmbH, MESAGO Messe & Kongress GmbH. y Fraunhofer-Einrichtung für Zuverlässigkeit und Mikrointegration. Berlin: vde-Verlag, 1994.

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10

IEEE Robotics and Automation Society., American Society of Mechanical Engineers. Dynamic Systems and Control Division. y IEEE Workshop on Micro Electro Mechanical Systems (1995 : Amsterdam, the Netherlands), eds. IEEE micro electro mechanical systems: Proceedings, Amsterdam, the Netherlands, January 29-February 2, 1995. [New York]: Institute of Electrical and Electronics Engineers, 1995.

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11

IEEE Robotics and Automation Council. IEEE Micro Electro Mechanical Systems: An investigation of micro structures, sensors, actuators, machines and robots, Salt Lake City, Utah, February 20-22, 1989 ; proceedings. Piscataway, NJ: Institute of Electrical Electronics Engineers, 1989.

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12

1973-, Turner Kimberly Lynn, American Society of Mechanical Engineers. MEMS Subdivision. y International Mechanical Engineering Congress and Exposition (2003 : Washington, D.C.), eds. Micro-electro-mechanical systems (MEMS)--2003: Presented at the 2003 ASME International Mechanical Engineering Congress : November 15-21, 2003, Washington, D.C. New York, N.Y: American Society of Mechanical Engineers, 2003.

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13

International Mechanical Engineering Congress and Exposition (2004 : Anaheim, Calif.), ed. Micro-electro-mechanical systems--2004: Presented at 2004 ASME International Mechanical Engineering Congress and Exposition : November 13-19, 2004, Anaheim, California. New York, N.Y: ASME, 2004.

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14

IEEE Workshop on Micro Electro Mechanical Systems (6th 1993 Fort Lauderdale, Fla.). Proceedings: IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems, Fort Lauderdale, Florida, February 7-10, 1993. Piscataway, NJ: IEEE, 1993.

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15

IEEE Workshop on Micro Electro Mechanical Systems (7th 1994 Oiso, Japan). Proceedings: IEEE Micro Electro Mechanical Systems, an investigations of micro structures, sensors, actuators, machines and robotic systems, Oiso, Japan, January 25-28, 1994. Piscataway, NJ: IEEE Service Center, 1994.

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16

American Society of Mechanical Engineers. Micro-Electro-Mechanical Systems Division. y International Mechanical Engineering Congress and Exposition (2005 : Orlando, Fla.), eds. Micro-electro-mechanical systems--2005: Presented at 2005 ASME International Mechanical Engineering Congress and Exposition : November 5-11, 2005, Orlando, Florida, USA. New York, N.Y: ASME, 2005.

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17

Liwei, Lin, American Society of Mechanical Engineers. Dynamic Systems and Control Division. y International Mechanical Engineering Congress and Exposition (1998 : Anaheim, Calif.), eds. Micro-electro-mechanical systems (MEMS) 1998: Presented at the 1998 International Mechanical Engineering Congress and Exposition : November 15-20, 1998, Anaheim, California. New York, N.Y: American Society of Mechanical Engineers, 1998.

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18

IEEE, International Conference on Micro Electro Mechanical Systems (17th 2004 Maastricht Netherlands). 17th IEEE International Conference on Micro Electro Mechanical Systems: Maastricht : MEMS 2004 technical digest : January 25-29, 2004. Piscataway, N.J: IEEE, 2004.

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19

IEEE, International Conference on Micro Electro Mechanical Systems (14th 2001 Interlaken Switzerland). The 14th IEEE International Conference on Micro Electro Mechanical Systems: MEMS 2001 : Interlaken, Switzerland, January 21-25, 2001. Piscataway N.J: Institute of Electrical and Electronics Engineers, 2001.

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20

Taiwan) IEEE International Conference on Micro Electro Mechanical Systems (26th 2013 Taipei. 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013): Taipei, Taiwan, 20-24 January 2013. Piscataway, NJ: IEEE, 2013.

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21

IEEE International Conference on Micro Electro Mechanical Systems (20th 2007 Hyogo, Japan). Proceedings IEEE the twentieth annual International Conference on Micro Electro Mechanical Systems: Hyogo, Japan, 21-25 January 2007. Piscataway, NJ: IEEE, 2007.

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22

IEEE Robotics and Automation Society., American Society of Mechanical Engineers. Dynamic Systems and Control Division., Micromachine Center (Japan) y IEEE Workshop on Micro Electro Mechanical Systems (1994 : Ōiso-machi, Japan), eds. IEEE micro electro mechanical systems: An investigations [sic] of micro structures, sensors, actuators, machines, and robotic systems : proceedings, Oiso, Japan, January 25-28, 1994. [New York: Institute of Electrical and Electronics Engineers], 1994.

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23

Paris, France) IEEE International Conference on Micro Electro Mechanical Systems (25th 2012. 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS 2012): Paris, France, 29 January - 2 February 2012. Piscataway, N.J: IEEE, 2012.

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24

Institute of Electrical and Electronics Engineers. y IEEE Robotics and Automation Society., eds. MEMS 2003: IEEE the Sixteenth Annual International Conference on Micro Electro Mechanical Systems : Kyoto, Japan, January 19-23, 2003. Piscataway, N.J: IEEE, 2003.

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25

P, Lee Abraham, American Society of Mechanical Engineers. Fluids Engineering Division. y International Mechanical Engineering Congress and Exposition (2000 : Orlando, Fla.), eds. Micro-electro-mechanical systems (MEMS), 2000: Presented at the 2000 ASME International Mechanical Engineering Congress and Exposition : November 5-10, 2000, Orlando, Florida. New York, N.Y: American Society of Mechanical Engineers, 2000.

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26

IEEE Robotics and Automation Society., Denki Gakkai (1888), American Society of Mechanical Engineers. Dynamic Systems and Control Division. y IEEE Workshop on Micro Electro Mechanical Systems (4th : 1991 : Nara-shi, Japan), eds. IEEE micro electro mechanical systems: An investigation of micro structures, sensors, actuators, machines, and robots : proceedings, Nara, Japan, 30 January-2 February 1991. New York: Institute of Electrical and Electronics Engineers, 1991.

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27

IEEE Workshop on Micro Electro Mechanical Systems (4th 1991 Nara, Japan.). Proceedings: IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and robots : Nara, Japan, 30 January-2 February 1991. Piscataway, NJ: Institute of Electrical and Electronics Engineers, 1991.

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28

IEEE International Conference on Micro Electro Mechanical Systems (13th 2000 Miyazaki, Japan). Proceedings, IEEE, the thirteenth annual International Conference on Micro Electro Mechanical Systems: MEMS 2000 : Miyazaki, Japan, January 23-27, 2000. Piscataway N.J: Institute of Electrical and Electronics Engineers, 2000.

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29

Calif.) IEEE International Conference on Micro Electro Mechanical Systems (27th 2014 San Francisco. 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS 2014): San Francisco, California, USA, 26-30 January 2014. Piscataway, NJ: IEEE, 2014.

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30

IEEE Workshop on Micro Electro Mechanical Systems (5th 1992 Travemünde, Germany). Proceedings: IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and robots : Travemünde, Germany, 4 February - 7 February 1992. Piscataway, NJ: IEEE, 1992.

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31

IEEE Robotics and Automation Society., ed. MEMS '99 : Twelfth IEEE International Conference on Micro Electro Mechanical Systems: Technical digest : Orlando, Florida, USA, January 17-21, 1999. Piscataway, NJ: IEEE, 1999.

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32

IEEE Workshop on Micro Electro Mechanical Systems (3rd 1990 Napa Valley, Calif.). Proceedings: IEEE micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines and robots : Napa Valley, California, 11-14 February 1990. [New York?]: Institute of Electrical and Electronics Engineers, 1990.

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33

IEEE Workshop on Micro Electro Mechanical Systems (11th 1998 Heidelberg, Germany). The Eleventh Annual International Workshop on Micro Electro Mechanical Systems: An investigation of micro structures, sensors, actuators, machines and systems : proceedings, January 25-29, 1998, Heidelberg, Germany. [New York]: Institute of Electrical and Electronics Engineers, 1998.

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34

P, Lee Abraham, American Society of Mechanical Engineers. MEMS Subdivision. y International Mechanical Engineering Congress and Exposition (2001 : New York, N.Y.), eds. Micro-electro-mechanical systems (MEMS)--2001: Presented at the 2001 ASME International Mechanical Engineering Congress and Exposition : November 11-16, 2001, New York, New York. New York, N.Y: American Society of Mechanical Engineers, 2001.

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35

IEEE Workshop on Micro Electro Mechanical Systems (10th 1997 Nagoya, Japan). The Tenth Annual International Workshop on Micro Electro Mechanical Systems: An investigation of micro structures, sensors, actuators, machines and robots : proceedings, Nagoya, Japan, January 26-30, 1997. [New York]: Institute of Electrical and Electronics Engineers, 1997.

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36

Institute of Electrical and Electronics Engineers. y IEEE Robotics and Automation Society., eds. MEMS 2002: The Fifteenth IEEE International Conference on Micro Electro Mechanical Systems : technical digest : Las Vegas, Nevada, USA, January 20-24, 2002. Piscataway, N.J: IEEE, 2002.

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37

IEEE Workshop on Micro Electro Mechanical Systems (9th 1996 San Diego, Calif.). The Ninth Annual International Workshop on Micro Electro Mechanical Systems: An investigation of micro structures, sensors, actuators, machines and systems : San Diego, California, USA, February 11-15, 1996. Piscataway, NJ: IEEE Service Center, 1996.

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38

IEEE Workshop on Micro Electro Mechanical Systems (11th 1998 Heidelberg, Germany). IEEE, the Eleventh Annual International Workshop on Micro Electro Mechanical Systems: Proceedings : an investigation of micro structures, sensors, actuators, machines and systems, January 25-29, 1998, Heidelberg, Germany. [New York, N.Y.]: Institute of Electrical and Electronics Engineers, 1998.

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39

IEEE International Conference on Micro Electro Mechanical Systems (18th 2005 Miami Beach, Fla.). MEMS 2005 Miami: 18th IEEE International Conference on Micro Electro Mechanical Systems : technical digest : Miami Beach, Florida, USA, January 30-February 3, 2005. Piscataway, N.J: IEEE, 2005.

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40

ASME International Mechanical Engineering Congress and Exposition (2001 New York, N.Y.). Micro-electro-mechanical systems: MEMS -- 2001 : presented at the 2000 [i.e. 2001] ASME International Mechanical Engineering Congress and Exposition, November 11-16, 2001, New York, New York. New York, N.Y: American Society of Mechanical Engineers, 2001.

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41

T, Avedisian C., American Society of Mechanical Engineers. Dynamic Systems and Control Division. y International Mechanical Engineering Congress and Exposition (1996 : Atlanta, Ga.), eds. Microelectromechanical systems (MEMS): Microscale thermal phenomena in electronic systems, applications of miocrofabrication to fluid mechanics, mechanics in micro-electro-mechanical systems (MEMS), micromechanical systems : presented at the 1996 International Mechanical Engineering Congress and Exposition, November 17-22, 1996, Atlanta, Georgia. New York, N.Y: American Society of Mechanical Engineers, 1996.

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42

Huang, Qing-An. Micro Electro Mechanical Systems. Springer, 2018.

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43

Huang, Qing-An. Micro Electro Mechanical Systems. Springer, 2018.

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44

Elamurugan, P. Micro Electro Mechanical Systems. Notion Press, 2020.

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45

MEMS/NEMS: Micro electro mechanical systems/nano electro mechanical systems. New York: Springer, 2005.

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46

Mems: Micro-Electro-Mechanical Systems. Independently Published, 2021.

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47

Motamedi, Manouchehr E., ed. MOEMS: Micro-Opto-Electro-Mechanical Systems. SPIE, 2005. http://dx.doi.org/10.1117/3.2265061.

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48

MOEMS: Micro-opto-electro-mechanical systems. Bellingham, WA: SPIE Press, 2005.

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49

IEEE International Conference on Micro Electro Mechanical Systems. 2000 IEEE Micro Electro Mechanical Systems. Institute of Electrical & Electronics Enginee, 2000.

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50

Allen, James J. Micro Electro Mechanical System Design (Mechanical Engineering). CRC, 2005.

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