Literatura académica sobre el tema "Grazing incidence X-ray diffraction (GIXD)"

L'introduction d'une contrainte mécanique dans le canal de MOSFETs sur SOI est indispensable pour les noeuds technologiques sub-22 nm. Son efficacité dépend de la géométrie et des règles de dessin du dispositif. L'impact des étapes du procédé de fabrication des transistors (gravure des zones actives, formation de la grille métallique, implantation des Source/Drain (S/D)) sur la contrainte du silicium contraint sur isolant (sSOI) a été mesuré par diffraction des rayons X en incidence rasante (GIXRD). Parallèlement, le gain en performances de MOSFETs sur sSOI a été quantifié par rapport au SOI (100% de gain en mobilité pour des nMOS longs et larges (L=W=10 μm), 35% de gain en courant de drain à saturation (IDsat) pour des nMOS courts et étroits (L=25 nm, W=77 nm)). Des structures contraintes innovantes ont aussi été étudiées. Un gain en IDsat de 37% (18%) pour des pMOS sur SOI (sSOI) avec des S/D en SiGe est démontré par rapport au sSOI avec des S/D en Si, pour une longueur de grille de 60 nm et des films de 15 nm d'épaisseur. Des mesures GIXRD, couplées à des simulations mécaniques, ont permis d'étudier et d'optimiser des structures originales avec transfert de contrainte d'une couche enterrée précontrainte (en SiGe ou en nitrure) vers le canal.

L'introduction d'une contrainte mécanique dans le canal de MOSFETs sur SOI est indispensable pour les noeuds technologiques sub-22 nm. Son efficacité dépend de la géométrie et des règles de dessin du dispositif. L'impact des étapes du procédé de fabrication des transistors (gravure des zones actives, formation de la grille métallique, implantation des Source/Drain (S/D)) sur la contrainte du silicium contraint sur isolant (sSOI) a été mesuré par diffraction des rayons X en incidence rasante (GIXRD). Parallèlement, le gain en performances de MOSFETs sur sSOI a été quantifié par rapport au SOI (100% de gain en mobilité pour des nMOS longs et larges (L=W=10 μm), 35% de gain en courant de drain à saturation (IDsat) pour des nMOS courts et étroits (L=25 nm, W=77 nm)). Des structures contraintes innovantes ont aussi été étudiées. Un gain en IDsat de 37% (18%) pour des pMOS sur SOI (sSOI) avec des S/D en SiGe est démontré par rapport au sSOI avec des S/D en Si, pour une longueur de grille de 60 nm et des films de 15 nm d'épaisseur. Des mesures GIXRD, couplées à des simulations mécaniques, ont permis d'étudier et d'optimiser des structures originales avec transfert de contrainte d'une couche enterrée précontrainte (en SiGe ou en nitrure) vers le canal<br>The use of mechanical stress in the channel of MOSFETs on SOI is mandatory for sub-22 nm technological nodes. Its efficiency depends on the device geometry and design. The impact of different steps of the transistor fabrication process (active area patterning, metal gate formation, Source/Drain (S/D) implantation) on the strain in strained Silicon-On-Insulator (sSOI) materials has been measured by Grazing Incidence X-Ray Diffraction (GIXRD). The electrical performance enhancement of MOSFETs on sSOI has also been estimated with respect to SOI (100% mobility enhancement for long and wide nMOS (L=W=10 μm), 35% saturation drive current (IDsat) enhancement for short and narrow nMOS (L=25 nm, W=77 nm)). Innovative strained structures have then been studied. We demonstrate a 37% (18%) IDsat enhancement for pMOS on SOI (sSOI) with SiGe S/D compared to sSOI with Si S/D, for a 60 nm gate length and a 15 nm film thickness. GIXRD measurements, together with mechanical simulations, enabled the study and optimization of new structures using the stress transfer from an embedded and stressed layer (SiGe or nitride) toward the channel

Diese Arbeit behandelt das Wachstum des ferromagnetischen Metalls MnAs auf halbleitendem GaAs. Die MnAs-Filme werden auf GaAs mittels der Molekularstrahlepitaxie (MBE) abgeschieden. Nukleation, Entwicklung von Gitterverzerrungen, Morphologie und Grenzflächenstruktur werden in-situ während des MBE Wachstums mit Hilfe von Beugung unter streifendem Einfall (GID) und der Beugung hochenergetischer Elektronen (RHEED) untersucht. Mit azimuthalen RHEED Messungen wurden vier Abschnitte des Nukleationsprozesses von MnAs auf GaAs(001) bestimmt. GID Messungen zeigen, dass das weitere Wachstum des MnAs Films bei einer nominellen Bedeckung von 2.5 ML über die Bildung relaxierter Inseln erfolgt, welche an Größe zunehmen und schließlich einen durchgängigen Film bilden. In einem Frühstadium bildet sich ein geordnetes Versetzungsnetzwerk an der Grenzfläche, welches die Verzerrungen aufgrund der Fehlanpassung bereits vor der vollständigen Ausbildung des durchgängigen Films abbauen. Der faszinierend komplexe Nukleationsprozess von MnAs auf GaAs(0 0 1) beinhaltet sowohl Elemente von Volmer-Weber, als auch von Stranski-Krastanov Wachstum. Die nicht einheitliche Gitterfehlanpassung beträgt 0.66% entlang der [1 -1 0] Richtung und 0.54% entlang der [1 1 0] Richtung, wie sich aus den Röntgenbeugungsmessungen ergibt. Entlang der [1 1 0] Richtung wird eine hohe Korrelation der Defekte beobachtet. Ein hochgradig periodisches Versetzungsnetzwerk mit einer Periode von 4.95 +- 0.05 nm entlang der [1 1 0] Richtung wird an der Grenzfläche gebildet und relaxiert 7.5% der Fehlanpassung. Die inhomogenen Verzerrungen aufgrund dieser periodischen Versetzungen an der Grenzfläche sind auf eine Schicht von 1.6nm Dicke beschränkt. Die Fehlanpassung entlang der [1 -1 0] Richtung wird durch die Bildung eines Koinzidenzgitters abgebaut.<br>The present work is devoted to the growth of the ferromagnetic metal MnAs on the semiconductor GaAs by molecular-beam epitaxy (MBE). The MnAs thin films are deposited on GaAs by molecular-beam epitaxy (MBE). Grazing incidence diffraction (GID) and reflection high-energy electron diffraction (RHEED) are used in situ to investigate the nucleation, evolution of strain, morphology and interfacial structure during the MBE growth. Four stages of the nucleation process during growth of MnAs on GaAs(001) are revealed by RHEED azimuthal scans. GID shows that further growth of MnAs films proceed via the formation of relaxed islands at a nominal thickness of 2.5 ML which increase in size and finally coalesce to form a continuous film. Early on, an ordered array of misfit dislocations forms at the interface releasing the misfit strain even before complete coalescence occurs. The fascinatingly complex nucleation process of MnAs on GaAs(0 0 1) contains elements of both Volmer-Weber and Stranski-Krastanov growth. A nonuniform strain amounting to 0.66%, along the [1 -1 0] direction and 0.54%, along the [1 1 0] direction is demonstrated from x-ray line profile analysis. A high correlation between the defects is found along the GaAs[1 1 0] direction. An extremely periodic array of misfit dislocations with a period of 4.95 +- 0.05 nm is formed at the interface along the [1 1 0] direction which releases the 7.5% of misfit. The inhomogeneous strain due to the periodic dislocations is confined at the interface within a layer of 1.6 nm thickness. The misfit along the [1 -1 0] direction is released by the formation of a coincidence site lattice.

The objective of this thesis is to improve understanding of the development of corrosion products (scales) that form on the inner walls of carbon steel pipelines in CO2-rich (sweet) oilfield environments. If well adherent to the carbon steel surface, such scales can significantly reduce the metal’s rate of corrosion. Typically, the open literature labels sweet corrosion scale as ferrous (II) carbonate (FeCO3) or siderite, although this may not always be the case. For example, Fe2(OH)2CO3 (chukanovite) and Fe3O4 (magnetite) are known to modify the protective character of a sweet corrosion product scale. Practical electrochemical methods for the assessment of substrate corrosion, and electron/photon-based characterisation techniques for investigating scale structure and composition, have revealed interesting aspects of the nature of sweet corrosion scale development on model high purity Fe and real-world pipeline steel surfaces. Concerning scale development on model Fe substrates immersed in CO2-saturated deionised water (buffered to pH = 6.8, T = 80°C, Ptotal = 1 bar), electrochemical data supplemented by grazing incidence x-ray diffraction (GIXRD) and scanning electron microscopy (SEM) show that a semi-protective mixed corrosion scale comprising siderite and chukanovite becomes a highly protective siderite scale with longer exposure time. The introduction of sodium chloride to the CO2-saturated solution (T = 80°C, pH = 6.8, Ptotal = 1 bar) impedes the rate of scale formation. Increasing [NaCl] from the start of experiment is suspected to limit the precipitation kinetics of sweet corrosion scale crystals, since chukanovite is no longer observed, and siderite formation is somewhat slowed as well. SEM imaging, using an electronic workfunction-sensitive detector (in lens), reveals nanoscale deposits on the corroded Fe surface in regions that are devoid of µm-scale crystals. With the Raman spectra from these regions considered, it is interpreted that the nanoscale deposits are likely amorphous iron carbonate, albeit oxidised to a significant extent. Moving to real-world carbon steel immersion in sweet solutions, a scale comprising predominantly chukanovite is observed (using GIXRD and SEM) on the 1% Ni weld zone (WZ) surface of a pipeline weld-joint, but not on adjacent, distinct regions (heat affected zones (HAZ) and base metal (BM)). This selective scaling is suggested to be due to some initial corrosion of the weld-joint, which generates sufficient [Fe2+(aq)], and a macro-galvanic effect across the weld, i.e. WZ is cathodic to HAZ and BM. Further, to gain mechanistic insight into compositional changes during sweet corrosion scale growth, an electrochemical cell for in situ GIXRD (named E-cell) has been developed and commissioned. Diffraction patterns acquired using synchrotron radiation, from a pipeline steel surface, reveal the formation and temporal evolution of a multicomponent corrosion scale. Accompanying electrochemical data suggest that the scale is quite protective.

Orientadores: Gustavo de Medeiros Azevedo, Ângelo Malachias de Souza, Eduardo Granado Monteiro da Silva<br>Tese (doutorado) - Universidade Estadual de Campinas, Instituto de Fisica Gleb Wataghin<br>Made available in DSpace on 2018-08-19T08:06:03Z (GMT). No. of bitstreams: 1 Gasperini_AntonioAugustoMalfatti_D.pdf: 9911404 bytes, checksum: e5b4150f5a1f5f42c4d0e24b92e46c65 (MD5) Previous issue date: 2011<br>Resumo: Neste trabalho estudamos a formação e estrutura de nanopartículas (NPs) de GeSi encapsuladas em sílica, utilizando técnicas baseadas em luz síncrotron, complementadas com imagens de microscopia eletrônica de transmissão. Obtivemos a forma, o diâmetro médio e a dispersão de tamanhos usando espalhamento de raios X a baixos ângulos em incidência rasante (GISAXS). A partir dos dados de difração de raios X (XRD) foi possível obter a fase cristalina, o parâmetro de rede e o tamanho médio dos cristalitos. Estes resultados serviram como dados de entrada em um modelo para análise através da técnica de estrutura fina de absorção de raios X (EXAFS), a qual forneceu informações sobre a estrutura local na vizinhança dos átomos de Ge. Apesar dos resultados de cada uma das técnicas acima serem comumente analisados de forma separada, a combinação destas técnicas leva a uma melhor compreensão das propriedades estruturais das NPs. Através da combinação dos resultados tivemos acesso a informações tais como a deformação da rede cristalina (strain), a fração de átomos cm ambientes cristalino e amorfo, a fração de átomos de Ge diluída na matriz e a possibilidade de formação de estruturas do tipo core-shell cristalino-amorfo. Resultados adicionais como a origem do strain e a temperatura de solidificação das NPs, dentre outros, foram obtidos através de um experimento in situ de absorção de raios X em energia dispersiva (DXAS), inédito na análise deste sistema. Por fim, utilizamos as técnicas acima citadas para acompanhar a evolução dos parâmetros estruturais em amostras tratadas termicamente durante diferentes intervalos de tempo<br>Abstract: In this work we study the formation and structure of GeSi nanoparticles embedded in silica matrix using synchrotron-based techniques complemented by TEM images. Shape, average diameter and size dispersion were obtained from grazing incidence small angle X-ray scattering. X-ray diffraction measurements were used to obtain crystalline phase, lattice parameter and crystallite mean sizes. By using these techniques as input for extended X-ray absorption fine structure analysis, the local structure surrounding Ge atoms is investigated. Although the results for each of the methods mentioned above are usually analyzed separately, the combination of such techniques leads to an improved understanding of nanoparticle structural properties. Crucial indirect parameters that cannot be quantified by other means are accessed in our work, such as local strain, possibility of forming core-shell crystalline-amorphous structures, fraction of Ge atoms diluted in the matrix and amorphous and crystalline Ge fraction. Additional results as the origin of the strain and temperature of solidification of NPs, among others, were obtained through an in situ energy dispersive X-ray absorption experiment (DXAS), unheard in this system. Finally, we use the techniques mentioned above to monitor the evolution of the structural parameters of samples annealed during different time intervals<br>Doutorado<br>Física<br>Doutor em Ciências

Un nouvel instrument est presente, qui permet l'elaboration d'interfaces dans une chambre ultra-vide et l'etude in situ de leur structure et de leur morphologie par diffusion des rayons x en incidence rasante (dxir). Il est installe sur la ligne de lumiere crg/if d32 de l'esrf. Une nouvelle description du mode de croissance de l'ag sur le mgo est proposee, dans laquelle, des 0. 2 monocouches (mc) d'ag deposees, le depot est sous forme d'ilots et la majorite de l'ag est relaxee. La signification physique de la fraction en site de l'ag est discutee, ainsi que les possibilites de calcul des positions atomiques dans un ilot d'ag deforme par les contraintes d'epitaxie dues au mgo. La preparation de surfaces de mgo bien adaptees aux etudes par dxir est decrite. Les phases presentes dans differents depots de ni sur ag (001) ont ete identifiees et caracterisees. A tous les montants de depots de 1 a 20 mc, trois phases coexistent : du ni en site, du ni (001) relaxe et du ni (011) 4h, qui forment des colonnes s'etendant jusqu'a la surface du depot. Une rugosification de l'ag liee au depot de ni a ete mise en evidence, ainsi que de fortes deformations de l'ag. La nitruration a l'aide d'une source d'azote a resonance cyclotron electronique (ecr) des surfaces (001) et (-1-1-1)b du gaas a ete etudiee. Pour former une couche de gan d'epaisseur bien definie il est preferable de separer la phase d'implantation des atomes d'azote dans le gaas de la phase de recuit declenchant la formation du gan. Des developpements de la technique d'analyse sont presentes, qui concernent en particulier les calculs de resolution instrumentale et l'analyse des donnees de diffusion aux petits angles en incidence rasante.