Literatura académica sobre el tema "Epitaxial Deposition"
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Artículos de revistas sobre el tema "Epitaxial Deposition"
Wang, Wenliang, Yulin Zheng, Yuan Li, Xiaochan Li, Liegen Huang, Zhuoran Li, Zhenya Lu y Guoqiang Li. "Control of interfacial reactions for the growth of high-quality AlN epitaxial films on Cu(111) substrates". CrystEngComm 19, n.º 48 (2017): 7307–15. http://dx.doi.org/10.1039/c7ce01803g.
Texto completoMiller, Dean J., Jeffrey D. Hettinger, Ronald P. Chiarello y Hyung K. Kim. "Epitaxial growth of Cu2O films on MgO by sputtering". Journal of Materials Research 7, n.º 10 (octubre de 1992): 2828–32. http://dx.doi.org/10.1557/jmr.1992.2828.
Texto completoDuan, Chun Yan, Bin Ai, Jian Jun Lai, Chao Liu, You Jun Deng y Hui Shen. "APCVD Deposition of Si Film on SiO2 Patterned Si (111) Substrates for Solar Cells". Advanced Materials Research 295-297 (julio de 2011): 1211–16. http://dx.doi.org/10.4028/www.scientific.net/amr.295-297.1211.
Texto completoM C Ávila, Renan, Roney C da Silva y Rogério J Prado. "Preparation of epitaxial BiFeO3 thin films on Si(001) substrates by pulsed electron deposition". Physics & Astronomy International Journal 7, n.º 2 (3 de abril de 2023): 77–81. http://dx.doi.org/10.15406/paij.202307.00288.
Texto completoWijaranakula, W., P. M. Burke, L. Forbes y J. H. Matlock. "Effect of pre- and postepitaxial deposition annealing on oxygen precipitation in silicon". Journal of Materials Research 1, n.º 5 (octubre de 1986): 698–704. http://dx.doi.org/10.1557/jmr.1986.0698.
Texto completoChung, Jun Ki, Won Jeong Kim, Sung Gap Lee y Cheol Jin Kim. "Growth and Characterization of BaZrO3 Buffer Layer for Textured YBCO Thin Films Growth on MgO (00l) Substrate". Key Engineering Materials 336-338 (abril de 2007): 715–18. http://dx.doi.org/10.4028/www.scientific.net/kem.336-338.715.
Texto completoZhang, Jiming, Gregory T. Stauf, Robin Gardiner, Peter Van Buskirk y John Steinbeck. "Single molecular precursor metal-organic chemical vapor deposition of MgAl2O4 thin films". Journal of Materials Research 9, n.º 6 (junio de 1994): 1333–36. http://dx.doi.org/10.1557/jmr.1994.1333.
Texto completoDuan, Ying Wen. "Epitaxial Pd-Doped LaFeO3 Films Grown on (100) SrTiO3 by Pulsed Laser Deposition". Advanced Materials Research 936 (junio de 2014): 282–86. http://dx.doi.org/10.4028/www.scientific.net/amr.936.282.
Texto completoLin, Yunhao, Meijuan Yang, Wenliang Wang, Zhiting Lin y Guoqiang Li. "Quality-enhanced GaN epitaxial films on Si(111) substrates by in situ deposition of SiN on a three-dimensional GaN template". RSC Advances 6, n.º 88 (2016): 84794–800. http://dx.doi.org/10.1039/c6ra16842f.
Texto completoLi, Chunling, Yanwei Liu, Yueliang Zhou, Zhenghao Chen, Hong Chen y Yong Zhu. "Heteroepitaxial Growth of c-Axis-Oriented BaTiO3:Ce/YBa2Cu3O7-x Bilayer Structure on SrTiO3(100) by Pulsed Laser Deposition". Modern Physics Letters B 11, n.º 02n03 (30 de enero de 1997): 73–79. http://dx.doi.org/10.1142/s0217984997000116.
Texto completoTesis sobre el tema "Epitaxial Deposition"
Thelander, Erik. "Epitaxial Ge-Sb-Te Thin Films by Pulsed Laser Deposition". Doctoral thesis, Universitätsbibliothek Leipzig, 2015. http://nbn-resolving.de/urn:nbn:de:bsz:15-qucosa-164106.
Texto completoRyu, Yung-ryel. "Study of epitaxial ZnSe films synthesized by pulsed deposition /". free to MU campus, to others for purchase, 1998. http://wwwlib.umi.com/cr/mo/fullcit?p9901275.
Texto completoYe, Liang. "Rapid thermal CVD of epitaxial silicon from dichlorosilane source". Thesis, Queen's University Belfast, 1993. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.333849.
Texto completoWoo, Juhyun. "Growth of epitaxial zirconium carbide layers using pulsed laser deposition". [Gainesville, Fla.] : University of Florida, 2005. http://purl.fcla.edu/fcla/etd/UFE0013064.
Texto completoVasilic, Rastko. "Epitaxial growth by monolayer restricted galvanic displacement". Diss., Online access via UMI:, 2006.
Buscar texto completoStallcup, Richard E. "Scanning Tunneling Microscopy of Homo-Epitaxial Chemical Vapor Deposited Diamond (100) Films". Thesis, University of North Texas, 2000. https://digital.library.unt.edu/ark:/67531/metadc2446/.
Texto completoZaia, Gilberto Vitor. "Epitaxial growth of Si and 3C-SiC by chemical vapor deposition". [S.l. : s.n.], 2002. http://deposit.ddb.de/cgi-bin/dokserv?idn=966630424.
Texto completoNutariya, Jeerapat. "Epitaxial thin film growth of Pt assisted by underpotential deposition phenomena". Thesis, University of Bristol, 2013. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.616569.
Texto completoGower, Aaron E. (Aaron Elwood). "Integrated model-based run-to-run uniformity control for epitaxial silicon deposition". Thesis, Massachusetts Institute of Technology, 2001. http://hdl.handle.net/1721.1/16787.
Texto completoAlso available online at the MIT Theses Online homepage
Includes bibliographical references (p. 241-247).
This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections.
Semiconductor fabrication facilities require an increasingly expensive and integrated set of processes. The bounds on efficiency and repeatability for each process step continue to tighten under the pressure of economic forces and product performance requirements. This thesis addresses these issues and describes the concept of an "Equipment Cell," which integrates sensors and data processing software around an individual piece of semiconductor equipment. Distributed object technology based on open standards is specified and utilized for software modules that analyze and improve semiconductor equipment processing capabilities. A testbed system for integrated, model-based, run-to-run control of epitaxial silicon (epi) film deposition is developed, incorporating a cluster tool with a single-wafer epi deposition chamber, an in-line epi film thickness measurement tool, and off-line thickness and resistivity measurement systems. Automated single-input-single-output, run-to-run control of epi thickness is first demonstrated. An advanced, multi-objective controller is then developed (using distributed object technology) to provide simultaneous epi thickness control on a run-to-run basis using the in-line sensor, as well as combined thickness and resistivity uniformity control on a lot-to-lot basis using off-line thickness and resistivity sensors.
(cont.) Control strategies are introduced for performing combined run-to-run and lot-to-lot control, based on the availability of measurements. Also discussed are issues involved with using multiple site measurements of multiple film characteristics, as well as the use of time-based inputs and rate-based models. Such techniques are widely applicable for many semiconductor processing steps.
by Aaron Elwood Gower-Hall.
Ph.D.
Yamaguchi, Iwao. "Preparation of epitaxial oxide films on sapphire substrates by metal organic deposition". 京都大学 (Kyoto University), 2009. http://hdl.handle.net/2433/124565.
Texto completoLibros sobre el tema "Epitaxial Deposition"
J, Bachmann Klaus y United States. National Aeronautics and Space Administration., eds. P-polarized reflectance spectroscopy: A high sensitive real-time monitoring technique to study surface kinetics under steady state epitaxial deposition conditions. [Washington, D.C: National Aeronautics and Space Administration, 1995.
Buscar texto completoJ, Bachmann Klaus y United States. National Aeronautics and Space Administration., eds. P-polarized reflectance spectroscopy: A high sensitive real-time monitoring technique to study surface kinetics under steady state epitaxial deposition conditions. [Washington, D.C: National Aeronautics and Space Administration, 1995.
Buscar texto completoJ, Bachmann Klaus y United States. National Aeronautics and Space Administration., eds. P-polarized reflectance spectroscopy: A high sensitive real-time monitoring technique to study surface kinetics under steady state epitaxial deposition conditions. [Washington, D.C: National Aeronautics and Space Administration, 1995.
Buscar texto completoIonized-cluster beam deposition and epitaxy. Park Ridge, N.J., U.S.A: Noyes Publications, 1988.
Buscar texto completoThin-film deposition: Principles and practice. New York: McGraw-Hill, 1995.
Buscar texto completoFischer, Roland A. Precursor chemistry of advanced materials: CVD, ALD and nanoparticles. Berlin: Springer, 2010.
Buscar texto completoTexas Engineering Extension Service StaffTEEX. Epitaxial Deposition. TEEX/Technology and Economic Development, 2001.
Buscar texto completoThe 2006-2011 World Outlook for Thin-Layer Epitaxial Growth Deposition Semiconductor Wafer Processing Equipment. Icon Group International, Inc., 2005.
Buscar texto completoParker, Philip M. The 2007-2012 World Outlook for Thin-Layer Epitaxial Growth Deposition Semiconductor Wafer Processing Equipment. ICON Group International, Inc., 2006.
Buscar texto completoHogberg, Hans. Low-Temperature Deposition of Epitaxial Transition Metal Carbide Films and Superlattices Using C60 As Carbon Source. Uppsala Universitet, 1999.
Buscar texto completoCapítulos de libros sobre el tema "Epitaxial Deposition"
Lange, Fred. "Epitaxial Films". En Chemical Solution Deposition of Functional Oxide Thin Films, 383–405. Vienna: Springer Vienna, 2013. http://dx.doi.org/10.1007/978-3-211-99311-8_16.
Texto completoCraciun, V. y R. K. Singh. "Ultraviolet-Assisted Pulsed Laser Deposition of Thin Oxide Films". En Atomistic Aspects of Epitaxial Growth, 511–24. Dordrecht: Springer Netherlands, 2002. http://dx.doi.org/10.1007/978-94-010-0391-9_40.
Texto completoSammelselg, V., J. Karlis, A. Kikas, J. Aarik, H. Mändar y T. Uustare. "Nanoscopic Study of Zirconia Films Grown by Atomic Layer Deposition". En Atomistic Aspects of Epitaxial Growth, 583–91. Dordrecht: Springer Netherlands, 2002. http://dx.doi.org/10.1007/978-94-010-0391-9_46.
Texto completoNishino, S., K. Takahashi, Y. Kojima y J. Saraie. "Epitaxial Growth of 6H-SiC by Chemical Vapor Deposition". En Springer Proceedings in Physics, 363–69. Berlin, Heidelberg: Springer Berlin Heidelberg, 1992. http://dx.doi.org/10.1007/978-3-642-84402-7_54.
Texto completoBhat, Ishwara B. "Epitaxial Growth of Silicon Carbide by Chemical Vapor Deposition". En Springer Handbook of Crystal Growth, 939–66. Berlin, Heidelberg: Springer Berlin Heidelberg, 2010. http://dx.doi.org/10.1007/978-3-540-74761-1_28.
Texto completoBoer, W. B. "Rapid Thermal Chemical Vapour Deposition of Epitaxial Si and SiGe". En Advances in Rapid Thermal and Integrated Processing, 443–63. Dordrecht: Springer Netherlands, 1996. http://dx.doi.org/10.1007/978-94-015-8711-2_16.
Texto completoPardo, J. A., J. Santiso, C. Solis, G. Garcia y A. Figueras. "Pulsed Lased Deposition of MIEC Sr4Fe6O13±δ Epitaxial Thin Films". En Mixed Ionic Electronic Conducting Perovskites for Advanced Energy Systems, 265–72. Dordrecht: Springer Netherlands, 2004. http://dx.doi.org/10.1007/978-1-4020-2349-1_25.
Texto completoArthur, John R. "Physical and Chemical Methods for Thin-Film Deposition and Epitaxial Growth". En Specimen Handling, Preparation, and Treatments in Surface Characterization, 239–93. Boston, MA: Springer US, 2002. http://dx.doi.org/10.1007/0-306-46913-8_8.
Texto completoPonczak, Brian H., James D. Oliver, Soon Cho y Gary W. Rubloff. "In Situ Mass Spectrometry for Chemical Identification in SiC Epitaxial Deposition". En Materials Science Forum, 121–24. Stafa: Trans Tech Publications Ltd., 2007. http://dx.doi.org/10.4028/0-87849-442-1.121.
Texto completoYamada, Isao. "Film Deposition with Cluster Beams: An Alternate Path to Epitaxial, Crystalline Films". En Physics and Chemistry of Finite Systems: From Clusters to Crystals, 1193–202. Dordrecht: Springer Netherlands, 1992. http://dx.doi.org/10.1007/978-94-017-2645-0_164.
Texto completoActas de conferencias sobre el tema "Epitaxial Deposition"
Wang, Zhan Jie, Li Jun Yan, Hiroyuki Kokawa y Ryutaro Maeda. "In situ deposition of epitaxial PZT films by pulsed laser deposition". En Smart Materials, Nano-, and Micro-Smart Systems, editado por Alan R. Wilson. SPIE, 2004. http://dx.doi.org/10.1117/12.581399.
Texto completoMuenchausen, Ross E. "Pulsed laser deposition: prospects for commercial deposition of epitaxial thin films". En High-Power Laser Ablation, editado por Claude R. Phipps. SPIE, 1998. http://dx.doi.org/10.1117/12.321616.
Texto completoSusto, Gian Antonio, Alessandro Beghi y Cristina De Luca. "A Predictive Maintenance System for Silicon Epitaxial Deposition". En 2011 IEEE International Conference on Automation Science and Engineering (CASE 2011). IEEE, 2011. http://dx.doi.org/10.1109/case.2011.6042421.
Texto completoYuehu Wang, Yuming Zhang, Yimen Zhang, Renxu Jia y Da Chen. "SiC epitaxial layers grown by chemical vapor deposition". En 2008 8th International Workshop on Junction Technology (IWJT '08). IEEE, 2008. http://dx.doi.org/10.1109/iwjt.2008.4540053.
Texto completoYihwan Kim, Yi-Chiau Huang, Errol Sanchez y Schubert Chu. "Thermal chemical vapor deposition of epitaxial germanium tin alloys". En 2014 7th International Silicon-Germanium Technology and Device Meeting (ISTDM). IEEE, 2014. http://dx.doi.org/10.1109/istdm.2014.6874699.
Texto completoDarwish, Abdalla, Simeon Wilson y Brent Koplitz. "Pulsed laser deposition of epitaxial BaFeO 3 thin films". En SPIE Photonic Devices + Applications, editado por Shizhuo Yin y Ruyan Guo. SPIE, 2011. http://dx.doi.org/10.1117/12.914083.
Texto completoEden, J. G., V. Tavitian y C. J. Kiely. "Epitaxial Semiconductor Films Grown By Laser Photochemical Vapor Deposition". En 1988 Los Angeles Symposium--O-E/LASE '88, editado por Peter P. Chenausky, Roland A. Sauerbrey y James H. Tillotson. SPIE, 1988. http://dx.doi.org/10.1117/12.944386.
Texto completoAlexandrov, Dimiter, Jonny Tot, Robert Dubreuil, Francisco Miguel Morales, Jose Manuel Manuel, Juan Jesus Jimenez, Bertrand Lacroix et al. "Low temperature epitaxial deposition of GaN on LTCC substrates". En 2017 IEEE 5th Workshop on Wide-Bandgap Power Devices and Applications (WiPDA). IEEE, 2017. http://dx.doi.org/10.1109/wipda.2017.8170501.
Texto completoSorokin, Michael V., Ishaq Ahmad, Anatole N. Khodan y Samson O. Aisida. "Pulsed laser deposition of epitaxial films: : phase-field description". En 2022 19th International Bhurban Conference on Applied Sciences and Technology (IBCAST). IEEE, 2022. http://dx.doi.org/10.1109/ibcast54850.2022.9990074.
Texto completoWu, Sudong, Makoto Kambara y Toyonobu Yoshida. "Enhanced Deposition Efficiency of Epitaxial Si Film from SiHCl3 by Mesoplasma Chemical Vapor Deposition". En Proceedings of the 12th Asia Pacific Physics Conference (APPC12). Journal of the Physical Society of Japan, 2014. http://dx.doi.org/10.7566/jpscp.1.015068.
Texto completoInformes sobre el tema "Epitaxial Deposition"
Hamblen, David G., David B. Fenner, Peter A. Rosenthal, Joseph Cosgrove y Pang-Jen Kung. Epitaxial Growth of High Quality SiC of Pulsed Laser Deposition. Fort Belvoir, VA: Defense Technical Information Center, febrero de 1995. http://dx.doi.org/10.21236/ada360082.
Texto completoTaga, N., M. Maekawa, Y. Shigesato, I. Yasui y T. E. Haynes. Deposition of hetero-epitaxial In{sub 2}O{sub 3} thin films by molecular beam epitaxy. Office of Scientific and Technical Information (OSTI), mayo de 1996. http://dx.doi.org/10.2172/257414.
Texto completoDavis, R. F., H. H. Lamb, I. S. Tsong, E. Bauer y E. Chen. Selected Energy Epitaxial Deposition and Low Energy Electron Microscopy of AlN, GaN, and SiC Thin Films. Fort Belvoir, VA: Defense Technical Information Center, diciembre de 1997. http://dx.doi.org/10.21236/ada338206.
Texto completoDavis, R. F., H. H. Lamb y S. T. Tsong. Selected Energy Epitaxial Deposition and Low Energy Electron Microscopy of AIN, GaN and SiC Thin Films. Fort Belvoir, VA: Defense Technical Information Center, junio de 1998. http://dx.doi.org/10.21236/ada353949.
Texto completoBailey, William. MBE Deposition of Epitaxial Fe1-xVx Films for Low-Loss Ghz Devices; Atomic-Scale Engineering of Magnetic Dynamics. Fort Belvoir, VA: Defense Technical Information Center, agosto de 2006. http://dx.doi.org/10.21236/ada459301.
Texto completoNewman, A., P. S. Krishnaprasad, S. Ponczak y P. Brabant. Modeling and Model Reduction for Control and Optimization of Epitaxial Growth in a Commercial Rapid Thermal Chemical Vapor Deposition Reactor. Fort Belvoir, VA: Defense Technical Information Center, enero de 1998. http://dx.doi.org/10.21236/ada441006.
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