Journal articles: 'Vacuum Sensor'

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Rapa, Charnia Iradat, Erick Dephtios, Chrisna Mariangga, and Naomi Patiung. "A Design And Build A Robot Vacuum Cleaner." Journal of Physics: Conference Series 2394, no. 1 (December 1, 2022): 012024. http://dx.doi.org/10.1088/1742-6596/2394/1/012024.

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Abstract In this paper design of the robot Vacum Cleaner, based on the Arduino Mega 2560 is the can walk and vacuum the floor. In this study, a microcontroller is used to regulate the work of the robot based on data obtained by six sensors, and the robot’s movement is driven by motor driver to the left and right, forward and backward, where the input is given through the keypad in the form of dust and garbage thisness, provided that if the dust thickness is (30mg)/(mm)3 then the LCD will display binary logic “1”, and if the Dust thickness is ≥0,30 mg/mm3then the data will be displayed on the LCD is binary logic “0”. In designing this robot, four ultrasonic sensors are needed as proximity sensors, also needed a sensor to detect the thickness of the dust, as well as an infrared sensor as a sensor to detect thick garbage. In testing the vacuum cleaner robot, the four ultrasonic sensors, S1, S2, S3, S4 are designed as the cardinal directions, north south, east west, as input data on the microcontroller, and two motor drivers as microcontroller outputs that can move forward and backward, forward turn left, forward turn right, backward turn left, backward turn right as an output to move the robot vacuum cleaner. When the vacuum cleaner robot moves, the dust sensor will detect dust, if the dust thickness is 0,30 mgmm3, the LCD is logic “1”, the sensor will. Work and the vacuum cleaner will sweep the flour while sucking, if the dust thickness ≥30mgmm3, infra red sensor will work with a logic LCD display logic “0”, then the motor driver will stop. The vacuum cleaner does not suck up dust or thick garbage.

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Du, Guizhen, Xianshan Dong, Xinglong Huang, Wei Su, and Peng Zhang. "Reliability Evaluation Based on Mathematical Degradation Model for Vacuum Packaged MEMS Sensor." Micromachines 13, no. 10 (October 11, 2022): 1713. http://dx.doi.org/10.3390/mi13101713.

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Vacuum packaging is used extensively in MEMS sensors for improving performance. However, the vacuum in the MEMS chamber gradually degenerates over time, which adversely affects the long-term performance of the MEMS sensor. A mathematical model for vacuum degradation is presented in this article for evaluating the degradation of vacuum packaged MEMS sensors, and a temperature-accelerated test of MEMS gyroscope with different vacuums is performed. A mathematical degradation model is developed to fit the parameters of the degradation of Q-factor over time at three different temperatures. The results indicate that the outgassing rate at 85 °C is the highest, which is 0.0531 cm2/s; the outgassing rate at 105 °C is the lowest, which is 0.0109 cm2/s; and the outgassing rate at 125 °C is in the middle, which is 0.0373 cm2/s. Due to the different mechanisms by which gas was released, the rate of degradation did not follow this rule. It will also be possible to predict the long-term reliability of vacuum packaged MEMS sensors at room temperature based on this model.

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Van Herwaarden, A. W., P. M. Sarro, and H. C. Meijer. "Integrated vacuum sensor." Sensors and Actuators 8, no. 3 (November 1985): 187–96. http://dx.doi.org/10.1016/0250-6874(85)85002-2.

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Wei, Debo, Jianyu Fu, Ruiwen Liu, Ying Hou, Chao Liu, Weibing Wang, and Dapeng Chen. "Highly Sensitive Diode-Based Micro-Pirani Vacuum Sensor with Low Power Consumption." Sensors 19, no. 1 (January 7, 2019): 188. http://dx.doi.org/10.3390/s19010188.

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Micro-Pirani vacuum sensors usually operate at hundreds of microwatts, which limits their application in battery-powered sensor systems. This paper reports a diode-based, low power consumption micro-Pirani vacuum sensor that has high sensitivity. Optimizations to the micro-Pirani vacuum sensor were made regarding two aspects. On the one hand, a greater temperature coefficient was obtained without increasing power consumption by taking advantage of series diodes; on the other hand, the sensor structure and geometries were redesigned to enlarge temperature variation. After that, the sensor was fabricated and tested. Test results indicated that the dynamic vacuum pressure range of the sensor was from 10−1 to 104 Pa when the forward bias current was as low as 10 μA with a power consumption of 50 μW. Average sensitivity was up to 90 μV/Pa and the sensitivity of unit power consumption increased to 1.8 V/W/Pa. In addition, the sensor could also work at a greater forward bias current for better sensor performance.

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Zhang, Lan, Jian Lu, Hideki Takagi, Sohei Matsumoto, and Eiji Higurashi. "An Ultra-Compact MEMS Pirani Sensor for In-Situ Pressure Distribution Monitoring." Micromachines 13, no. 10 (October 7, 2022): 1686. http://dx.doi.org/10.3390/mi13101686.

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In this study, we designed a microelectromechanical system (MEMS) Pirani vacuum sensor with a compact size. Specifically, the sensor was successfully fabricated based on the Pirani principle and using a commercial eight-inch MEMS foundry process. The sensor fabrication process was carried out using only four photomasks and the proposed sensor had an ultra-compact fabricated size (<2.2 × 2.2 mm2). A vacuum measurement system was set up to comprehensively evaluate the fabricated sensors. The results demonstrated that the MEMS Pirani vacuum sensor has a high responsivity in the low-pressure domain from 100 Pa. The proposed sensor with a 953.0-Ω heater exhibited an average responsivity of 11.9 mV/Pa in the preferred range of 100 to 7 Pa and 96.0 mV/Pa in the range of 7 to 1 Pa. The sensor may be potentially suitable in many applications, such as vacuum indicators for processing equipment, health monitoring systems for social infrastructure, and medical and health applications.

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Giebel, Friederike Julia, Marcel Köhle, Till Stramm, Klaus T. Kallis, and Horst L. Fiedler. "Concept for a MEMS-type vacuum sensor based on electrical conductivity measurements." Journal of Sensors and Sensor Systems 6, no. 2 (November 16, 2017): 367–74. http://dx.doi.org/10.5194/jsss-6-367-2017.

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Abstract. The concept of the micro-structured vacuum sensor presented in this article is the measurement of the electrical conductivity of thinned gases in order to develop a small, economical and quite a simple type of vacuum sensor. There are already some approaches for small vacuum sensors. Most of them are based on conservative measurement principles similar to those used in macroscopic vacuum gauges. Ionization gauges use additional sources of energy, like hot cathodes, ultraviolet radiation or high voltage for example, for ionizing gas molecules and thereby increasing the number of charge carriers for measuring low pressures. In contrast, the concept discussed here cannot be found in macroscopic sensor systems because it depends on the microscopic dimension of a gas volume defined by two electrodes. Here we present the concept and the production of a micro-structured vacuum sensor chip, followed by the electrical characterization. Reference measurements with electrodes at a distance of about 1 mm showed currents in the size of picoampere and a conductivity depending on ambient pressure. In comparison with these preliminary measurements, fundamental differences regarding pressure dependence of the conductivity are monitored in the electrical characterization of the micro-structured sensor chip. Finally the future perspectives of this sensor concept are discussed.

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Berlicki, T. M. "Convection–conductive vacuum sensor." Vacuum 57, no. 4 (June 2000): 413–19. http://dx.doi.org/10.1016/s0042-207x(00)00153-6.

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ISKANDARANI, MAHMOUD Z., and NIDAL F. SHILBAYEH. "DESIGN, MODELING AND IMPLEMENTATION OF PbPc SENSOR ARRAY FOR THE DETECTION OF GASES." International Journal of Information Acquisition 02, no. 03 (September 2005): 191–201. http://dx.doi.org/10.1142/s021987890500057x.

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In this paper the voltage/current characteristics and the effect of NO 2 gas on the electrical conductivity of a PbPc gas sensor array is studied. The gas sensor is manufactured using vacuum deposition of gold electrodes on sapphire substrate with the lead-phathalocyanine vacuum sublimed on the top of the gold electrodes. In a comparison between two versions of the PbPc gas sensor array, it was found that they differ in gap sizes between the deposited gold electrodes. The sensors are tested at different temperatures to account for conductivity changes as the molecular adsorption/desorption rate is affected by heat. The obtained results are found to be encouraging as the sensors showed stability and sensitivity towards low concentrations of applied NO 2 gas.

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Novikov, S., Yu N. Makarov, Heikki Helava, S. Lebedev, Andrey Lebedev, and Valeri Davydov. "Highly Sensitive NO₂ Graphene Sensor Made on SiC Grown in Ta Crucible." Materials Science Forum 858 (May 2016): 1149–52. http://dx.doi.org/10.4028/www.scientific.net/msf.858.1149.

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Graphene films were grown on SiC substrates by annealing in vacuum or in Ar flow. Gas sensors based on graphene films were made and tested on response to nitrogen dioxide. Graphene film is used in the sensor. The graphene film grown by annealing in Ar flow shows superior sensitivity compared to that annealed in vacuum. Both sensors exhibit good potential for environmental research and monitoring

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10

Musri, Tengku, and Muhamad Nasir. "Remote Control Pada Robot Mobile Pembersih Lantai Menggunakan Smartphone Dengan Kendali Sensor Accelerometer." Jurnal Teknologi Informasi dan Terapan 5, no. 2 (April 3, 2019): 97–104. http://dx.doi.org/10.25047/jtit.v5i2.87.

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Technological developments are needed in the completion of a job both working automatically and manually with good results. In this need, a technology is used which has certain advantages in a matter. For example, a room cleaning device that is a vacuum cleaner that is often used by housewives to clean dirt and dust is used because it can ease the work, the vacuum cleaner that is currently in use by manual and automatic. This study proposes a controlling mobile vacuum cleaner by utilizing an accelerometer sensor found on a smartphone with Bluetooth communication media between robots and smartphones. An accelerometer is used to control the motion of a robot by taking changes in values from the slope angles X, Y and Z. With the vaccum cleaner robot, it is hoped that it can provide better work results in cleaning the room from dirt and dust, as well as providing convenience in controlling the vaccum cleaner robot for ordinary people. From the results of manual control trials on the robot, the accuracy of the control accuracy is 95%. The maximum range of Bluetooth signals reaches 30 meters without obstacles and there are obstacles. This vacuum cleaner robot can suck up dirt in the form of torn paper, sugar and coffee.

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11

Huang, J. B., and Q. Y. Tong. "Constant-temperature integrated vacuum sensor." Electronics Letters 24, no. 23 (1988): 1429. http://dx.doi.org/10.1049/el:19880976.

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12

Randjelović, D., M. Frantlović, B. Miljković, B. Rosandić, Z. Jakšić, and B. Popović. "Intelligent Thermopile-Based Vacuum Sensor." Procedia Engineering 25 (2011): 575–78. http://dx.doi.org/10.1016/j.proeng.2011.12.143.

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13

Grzebyk, T., and A. Górecka-Drzazga. "MEMS type ionization vacuum sensor." Sensors and Actuators A: Physical 246 (August 2016): 148–55. http://dx.doi.org/10.1016/j.sna.2016.05.021.

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14

Klaassen, Erno H., and Gregory T. A. Kovacs. "Integrated thermal-conductivity vacuum sensor." Sensors and Actuators A: Physical 58, no. 1 (January 1997): 37–42. http://dx.doi.org/10.1016/s0924-4247(97)80222-1.

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15

van Herwaarden, A. W., and P. M. Sarro. "Floating-membrane thermal vacuum sensor." Sensors and Actuators 14, no. 3 (July 1988): 259–68. http://dx.doi.org/10.1016/0250-6874(88)80073-8.

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16

Chen, Shu-Jung, and Yung-Chuan Wu. "A New Macro-Model of Gas Flow and Parameter Extraction for a CMOS-MEMS Vacuum Sensor." Symmetry 12, no. 10 (September 26, 2020): 1604. http://dx.doi.org/10.3390/sym12101604.

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When using a MEMS sensor to measure the vacuum of a medium, the transition flow between the viscous flow and molar flow is usually used to describe the gas convection due to the physical principle, which is difficult to study through analysis and simulation. In this study, the description of gas flow under different pressures in a CMOS-MEMS vacuum sensors has been incorporated into a new behavioral ANSYS model. The proposed model was built and the characteristic parameters in the model were obtained based on a CMOS-MEMS thermopile patterned with circular symmetry and an embedded heater as a heat source. It contains a characteristic length to describe the effective distance of heat dissipation to the silicon substrate, and the corresponding transition pressure to describe the symmetrical phenomenon of gas heat conduction. The macro-model is based on the description of the physical characteristics of heat transfer and the characteristic parameters of the CMOS-MEMS vacuum sensor. The characteristic length of 49 μm and the corresponding transition pressure of 2396 mTorr for the thermoelectric-type vacuum sensor were extracted and verified successfully. The results show that the average error for the prediction of vacuum sensing by the macro-model we proposed is about 1.11%. This approach provides more applications for vacuum analysis. It can reduce the complexity of simulation and analysis and provide better simulation effects, including gas conduction mechanisms.

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17

Titus, J. B., M. E. Griswold, E. M. Granstedt, R. M. Magee, N. Charkhesht, J. H. Schroeder, M. Meekins, and I. Allfrey. "Fiber Bragg grating sensor array for detecting heat flux in vacuum." Review of Scientific Instruments 93, no. 8 (August 1, 2022): 083504. http://dx.doi.org/10.1063/5.0100498.

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In TAE Technologies’ current experimental device, C-2W (also called “Norman”), record-breaking, advanced beam-driven field-reversed configuration plasmas are produced and sustained in steady state utilizing variable energy neutral beams, advanced divertors, edge-biasing electrodes, and an active plasma control system [Gota et al., Nucl. Fusion 61, 106039 (2021)]. A novel diagnostic has been developed by TAE Technologies to leverage an industrial fiber Bragg grating (FBG) sensor array to detect heat flux along the wall of the vacuum vessel from a plasma discharge. The system consists of an optical fiber with FBG sensors distributed along its length, housed in a pressurized steel sheath. Each FBG sensor is constructed to reflect a different wavelength, the exact value of which is sensitive to the strain and temperature at the location of the grating in the fiber. The fiber is illuminated with broadband light, and the data acquisition system analyzes the spectrum of reflected light to determine the temperature at the location of each FBG. We have installed four of these vacuum-rated FBG sensor arrays on the C-2W experiment, each with 30 individual FBG sensors spaced at 0.15 m intervals along the 5 m fiber, with a 100 Hz acquisition rate. The measurement of temperature change due to a plasma discharge provides a single data point at each sensor location, creating a 120-point heat map of the vacuum vessel.

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Fedorov L. Yu., Ushakov A. V., and Karpov I. V. "Synthesis and chemoresistive sensitivity to hydrogen of nanostructured CuO films." Technical Physics Letters 48, no. 7 (2022): 58. http://dx.doi.org/10.21883/tpl.2022.07.54041.19197.

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Highly porous CuO films up to 1 μm thick consisting of vertically oriented nanowires ~ 50 nm in diameter were synthesized by copper evaporation in a vacuum arc discharge in an argon/oxygen atmosphere followed by deposition on heated substrates. The phase composition and polycrystalline nature of the films were confirmed by X-ray diffraction. On the example of gaseous hydrogen H2 at a sensor operating temperature of 300oC, sensory characteristics of CuO films were studied. The qualitative mechanism of the effect of gas on the electrical characteristics of the nanostructured CuO film is described. Keywords: copper oxide, vacuum arc, nanowires, gas sensor.

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Wang, Tao, Zhengjie Tang, Huamao Lin, Kun Zhan, Jiang Wan, Shihao Wu, Yuandong Gu, Wenbo Luo, and Wanli Zhang. "A Low Temperature Drifting Acoustic Wave Pressure Sensor with an Integrated Vacuum Cavity for Absolute Pressure Sensing." Sensors 20, no. 6 (March 24, 2020): 1788. http://dx.doi.org/10.3390/s20061788.

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In this paper we demonstrate a novel acoustic wave pressure sensor, based on an aluminum nitride (AlN) piezoelectric thin film. It contains an integrated vacuum cavity, which is micro-fabricated using a cavity silicon-on-insulator (SOI) wafer. This sensor can directly measure the absolute pressure without the help of an external package, and the vacuum cavity gives the sensor a very accurate reference pressure. Meanwhile, the presented pressure sensor is superior to previously reported acoustic wave pressure sensors in terms of the temperature drift. With the carefully designed dual temperature compensation structure, a very low temperature coefficient of frequency (TCF) is achieved. Experimental results show the sensor can measure the absolute pressure in the range of 0 to 0.4 MPa, while the temperature range is from 20 °C to 220 °C with a TCF of −14.4 ppm/°C. Such a TCF is only about half of that of previously reported works.

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Toto, Sofia, Pascal Nicolay, Gian Luca Morini, Michael Rapp, Jan G. Korvink, and Juergen J. Brandner. "Design and Simulation of a Wireless SAW–Pirani Sensor with Extended Range and Sensitivity." Sensors 19, no. 10 (May 27, 2019): 2421. http://dx.doi.org/10.3390/s19102421.

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Pressure is a critical parameter for a large number of industrial processes. The vacuum industry relies on accurate pressure measurement and control. A new compact wireless vacuum sensor was designed and simulated and is presented in this publication. The sensor combines the Pirani principle and Surface Acoustic Waves, and it extends the vacuum sensed range to between 10−4 Pa and 105 Pa all along a complete wireless operation. A thermal analysis was performed based on gas kinetic theory, aiming to optimize the thermal conductivity and the Knudsen regime of the device. Theoretical analysis and simulation allowed designing the structure of the sensor and its dimensions to ensure the highest sensitivity through the whole sensing range and to build a model that simulates the behavior of the sensor under vacuum. A completely new design and a model simulating the behavior of the sensor from high vacuum to atmospheric pressure were established.

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Kumar, Sumit, and Teny Theresa John. "In₂S₃ vacuum pressure sensor through a simple two-step process." Applied Physics Letters 121, no. 8 (August 22, 2022): 082101. http://dx.doi.org/10.1063/5.0112017.

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We demonstrate here an In2S3 based vacuum pressure sensor that can operate over a vacuum range, 103–10−3 mbar at room temperature. It is shown that vacuum pressure has a significant electrical impact on the sensitivity and the sensor response of the device. The sensor response of the device in terms of the rate of resistance change is 183 with a quick rise/fall time of 3.3/1.7 s. Even after being exposed to ambient conditions for 8 weeks, the device displays a consistent and periodic sensor response for 100 consecutive vacuum on/off cycles, demonstrating its durability. X-ray photoelectron spectroscopy was used to identify the surface adsorbed/chemisorbed groups, which are responsible for vacuum sensing properties. These surface effects were further confirmed by exposing the device to different environments such as humidity, high temperature, and high purity oxygen. Though In2S3 is known for its properties as a buffer layer in solar cells, this study reveals another potential application of In2S3 thin films as a vacuum pressure sensor.

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Zhang, S. W., Z. J. Zhang, Z. Wang, C. H. Xu, and W. H. Zhang. "Pressure Monitor of Vacuum Glazing with Micro-Pirani Vacuum Sensor." Sensor Letters 11, no. 5 (May 1, 2013): 780–86. http://dx.doi.org/10.1166/sl.2013.2674.

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Yu, Jie, Yulan Lu, Deyong Chen, Junbo Wang, Jian Chen, and Bo Xie. "A resonant high-pressure sensor based on dual cavities." Journal of Micromechanics and Microengineering 31, no. 12 (November 9, 2021): 124002. http://dx.doi.org/10.1088/1361-6439/ac333d.

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Abstract High-pressure sensors enable expansive demands in ocean sciences, industrial controls, and oil explorations. Successful sensor realized in piezoresistive high-pressure sensors which suffer from the key issue of compromised accuracies due to serious temperature drifts. Herein, this paper presents a high accuracy resonant high-pressure sensor with the pressure range of 70 MPa. Different from conventional resonant high-pressure sensor, the developed sensor utilized a dual-resonator-cavity design to minimize temperature disturbances and improve the pressure sensitivities. Besides, four circle cavities were used to maintain a high vacuum level for resonators after anodic bonding process. In details, Dual resonators, which is parallelly placed in the tensile and compressive stresses areas of a rectangular pressure sensitive diaphragm, are separated vacuum-packaged in the parallel dual cavities. Thus, pressure under measurement bends the pressure sensitive diaphragm, producing an increased pressure sensitivity and a decreased temperature sensitivity by the differential outputs of the dual resonators. Parameterized mathematical models of the sensor were established and the parameters of the models were optimized to adjust the pressure sensitivities and the temperature sensitivities of the sensor. Simplified deep reactive ion etching was used to form the sensing structure of the sensor and only once anodic bonding was used to form vacuum packaging for the dual resonators. Experimental results confirmed that the Q values of the resonators were higher than 32 000. Besides, the temperature sensitivity of the sensor was reduced from 44 Hz °C−1 (494 ppm °C−1) to 1 Hz °C−1 (11 ppm °C−1) by the differential outputs of the dual resonators in the temperature range of −10 °C–60 °C under the pressure of 1000 kPa. In addition, the accuracy of the sensor was better than 0.02% FS within the pressure range of 110–6500 kPa and the temperature range of −10 °C–60 °C by using a polynomial algorithm.

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Chang, Shoou-Jinn, Ting-Jen Hsueh, Cheng-Liang Hsu, Yan-Ru Lin, I.-Cherng Chen, and Bohr-Ran Huang. "A ZnO nanowire vacuum pressure sensor." Nanotechnology 19, no. 9 (February 11, 2008): 095505. http://dx.doi.org/10.1088/0957-4484/19/9/095505.

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25

van Herwaarden, A. W., and P. M. Sarro. "Double‐beam integrated thermal vacuum sensor." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 5, no. 4 (July 1987): 2454–57. http://dx.doi.org/10.1116/1.574870.

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26

Alvesteffer, W. J., D. C. Jacobs, and D. H. Baker. "Miniaturized thin film thermal vacuum sensor." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 13, no. 6 (November 1995): 2980–85. http://dx.doi.org/10.1116/1.579624.

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Paul, Oliver, and Henry Baltes. "Novel fully CMOS-compatible vacuum sensor." Sensors and Actuators A: Physical 46, no. 1-3 (January 1995): 143–46. http://dx.doi.org/10.1016/0924-4247(94)00878-l.

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Berlicki, T. M., S. J. Osadnik, and E. L. Prociów. "Vacuum pressure thermal thin-film sensor." Vacuum 53, no. 3-4 (June 1999): 373–76. http://dx.doi.org/10.1016/s0042-207x(98)00343-1.

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Sarcan, Fahrettin. "ZnO nanoparticles-based vacuum pressure sensor." Nanotechnology 31, no. 43 (August 6, 2020): 435502. http://dx.doi.org/10.1088/1361-6528/aba39d.

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Williams, Kirt R., Dirk P. H. De Bruyker, Scott J. Limb, Eric M. Amendt, and Doug A. Overland. "Vacuum Steered-Electron Electric-Field Sensor." Journal of Microelectromechanical Systems 23, no. 1 (February 2014): 157–67. http://dx.doi.org/10.1109/jmems.2013.2262924.

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Fan, Wei Jun, Lang Bin Jin, Yi Lu, and Bin Guo. "Disquisition of Performance Testing Equipment for Vacuum Booster." Applied Mechanics and Materials 103 (September 2011): 422–26. http://dx.doi.org/10.4028/www.scientific.net/amm.103.422.

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Focusing on the present situation that the domestic research of vacuum booster performance testing is still at the starting stage, combined with vacuum booster performance testing requirements, a vacuum booster performance testing equipment based on VC++ was designed and realized. It consists of two independent modules, including pneumatic control module and software module. Motion control card was used to control load deflection by pulse output. Dates of displacement sensor, force sensor and pressure sensor were real-timely collected by high-speed data acquistion card. After the analysis of industrial control computer, the vacuum booster input-output characteristic, vacuum leak-proofness are contained. Experimental data shows that the equipment can accurately and truly detect the performance of the vacuum booster. Displacement accuracy can be achieved 0.1mm, force accuracy can be achieved 1N, pressure accuracy can be achieved 0.1kPa.

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Mamat, Mohamad Hafiz, Mohd Izzudin Che Khalin, Nik Noor Hafizah Nik Mohammad, Zuraida Khusaimi, Nor Diyana Md Sin, Shafinaz Sobihana Shariffudin, Musa Mohamed Zahidi, and Mohamad Rusop Mahmood. "Effects of Annealing Environments on the Solution-Grown, Aligned Aluminium-Doped Zinc Oxide Nanorod-Array-Based Ultraviolet Photoconductive Sensor." Journal of Nanomaterials 2012 (2012): 1–15. http://dx.doi.org/10.1155/2012/189279.

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We have fabricated metal-semiconductor-metal- (MSM-) type ultraviolet (UV) photoconductive sensors using aluminium- (Al-) doped zinc oxide (ZnO) nanorod arrays that were annealed in different environments: air, oxygen, or a vacuum. The Al-doped ZnO nanorods had an average diameter of 60 nm with a thickness of approximately 600 nm that included the seed layer (with thickness~200 nm). Our results show that the vacuum-annealed nanorod-array-based UV photoconductive sensor has the highest photocurrent value of 2.43 × 10-4 A. The high photocurrent is due to the high concentration of zinc (Zn) interstitials in the vacuum-annealed nanorod arrays. In contrast, the oxygen-annealing process applied to the Al-doped ZnO nanorod arrays produced highly sensitive UV photoconductive sensors, in which the sensitivity reached 55.6, due to the surface properties of the oxygen-annealed nanorods, which have a higher affinity for oxygen adsorption than the other samples and were thereby capable of reducing the sensor’s dark current. In addition, the sensor fabricated using the oxygen-annealed nanorod arrays had the lowest rise and decay time constants. Our result shows that the annealing environment greatly affects the surface condition and properties of the Al-doped ZnO nanorod arrays, which influences the performance of the UV photoconductive sensors.

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Leitzke, Juliana Padilha, Tobias Mitterer, and Hubert Zangl. "Capacitive Sensing of Icing under Vacuum and Cryogenic Temperatures." Sensors 19, no. 16 (August 16, 2019): 3574. http://dx.doi.org/10.3390/s19163574.

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In certain industrial processes, ice aggregations on surfaces can occur under almost vacuum conditions and at very low to cryogenic temperatures due to residual water molecules. This aggregation can affect the performance of the process and it is therefore of interest to monitor such surfaces. In this paper, we present a capacitive ice measurement system capable to operate in vacuum and temperatures of about - 120 ∘ C and below. We present a capacitive sensor setup with a separation of sensor element and sensor electronics, such that the sensor electronics can reside outside the cold environment. It is demonstrated that the permittivity of such ice formations at vacuum and low temperatures is sufficient for measurement using the proposed sensor configuration. Results from a long-term study using a prototype further demonstrate the stability of the system and thus the feasibility of the proposed system for long term condition monitoring of surfaces in vacuum that are e.g., cooled by cryogenic liquids. The developed system uses wireless communication in order to allow for simple retrofitting of existing infrastructure even in remote locations.

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Zhang, Feng Tian, Ying Bin Zheng, Bin Tang, Wei Su, and Zhen’an Tang. "Design and Fabrication of High Vacuum Gauge Based on Micro Hotplate." Key Engineering Materials 645-646 (May 2015): 698–705. http://dx.doi.org/10.4028/www.scientific.net/kem.645-646.698.

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Vacuum gauge based on micro hotplate (MHP) is a kind of promising MEMS vacuum gauge due to its advantages including high sensitivity, wide measurement range, fast response speed and comparably easy fabrication, etc. In this paper, through analyzing various of heat dissipation approaches including solid heat conduction, gas heat conduction, heat radiation, and convection, the sensor output expression of MHP-based vacuum gauge is obtained when keeping electric current of heating resistor constant. With the structure size and material properties, the relationship curve between vacuum gauge output and gas pressure can be obtained. By wet etching silicon under the compound dielectric films with embedded metal film resistor, MHP suspended over silicon substrate is fabricated. Then the sensor chip is assembled and put into vacuum system, and test is conducted when keeping the heating resistor at constant heating current of 5mA. The measurement results show that the sensor measurement range is 5×10-3Pa~103Pa, which is basically consistent with the theoretical analyzing results.

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Liang, Cai, Jing Hu, Barton C. Prorok, Chinthaka Gooneratne, and Jürgen Kosel. "Annealing Effect on the Performance of Sputtering Deposited Metglas Thin Films." Materials Science Forum 667-669 (December 2010): 1207–12. http://dx.doi.org/10.4028/www.scientific.net/msf.667-669.1207.

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Magnetostrictive sensors based on ferromagnetic materials have been widely used in detecting chemicals and biological species. The MetglasTM 2826MB is one of the bulk strip materials that is employed as the sensor platform. However, the sensitivity is limited by the large size of the sensors itself. In order to improve the sensitivity, we have developed a process to fabricate microscale sensors of 500 x 100 m in size using conventional MEMS technology. As-deposited, the sensors suffered from internal stress, which was released by a annealing the sensors at 215 °C for two hours under vacuum condition. The annealing process improved the magnetic properties of the thin films and increased the resonant frequency of the sensor by 214 kHz.

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Liu, Rui, Hong Yuan, Li Lin, Chang Liu, and Kaisheng Huang. "Vacuum booster control system design and fault self-check strategies." Journal of Physics: Conference Series 2491, no. 1 (April 1, 2023): 012034. http://dx.doi.org/10.1088/1742-6596/2491/1/012034.

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Abstract In this paper, the software and hardware design of the vehicle vacuum pump control system was carried out based on single-chip microcomputer technology. Combined with the vacuum pump structure and control principle, the hardware design of the power supply, barometric pressure sensor, vacuum pressure sensor, current detection, and motor drive is carried out with the HS08 series single-chip microcomputer as the core. The software strategy design for barometric pressure signal acquisition, vacuum pressure signal acquisition, and vacuum pump driving has been completed, and the dual pressure vacuum pump control system for electric vehicles has been developed. The system can diagnose the common faults of the vacuum power system. Finally, the functional test of the control system is carried out. The results show that the system can work normally and that the design meets the expected requirements.

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Cherniak, Gil, Moshe Avraham, Sharon Bar-Lev, Gady Golan, and Yael Nemirovsky. "Study of the Absorption of Electromagnetic Radiation by 3D, Vacuum-Packaged, Nano-Machined CMOS Transistors for Uncooled IR Sensing." Micromachines 12, no. 5 (May 16, 2021): 563. http://dx.doi.org/10.3390/mi12050563.

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There is an ongoing effort to fabricate miniature, low-cost, and sensitive thermal sensors for domestic and industrial uses. This paper presents a miniature thermal sensor (dubbed TMOS) that is fabricated in advanced CMOS FABs, where the micromachined CMOS-SOI transistor, implemented with a 130-nm technology node, acts as a sensing element. This study puts emphasis on the study of electromagnetic absorption via the vacuum-packaged TMOS and how to optimize it. The regular CMOS transistor is transformed to a high-performance sensor by the micro- or nano-machining process that releases it from the silicon substrate by wafer-level processing and vacuum packaging. Since the TMOS is processed in a CMOS-SOI FAB and is comprised of multiple thin layers that follow strict FAB design rules, the absorbed electromagnetic radiation cannot be modeled accurately and a simulation tool is required. This paper presents modeling and simulations based on the LUMERICAL software package of the vacuum-packaged TMOS. A very high absorption coefficient may be achieved by understanding the physics, as well as the role of each layer.

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Chauhan, Shivanku, and Mohd Zahid Ansari. "Vacuum-assisted piezoelectric cantilever mass sensor performance." Journal of Mechanical Science and Technology 35, no. 12 (December 2021): 5489–94. http://dx.doi.org/10.1007/s12206-021-1120-0.

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Haschenburger, Anja, Niklas Menke, and Jan Stüve. "Sensor-based leakage detection in vacuum bagging." International Journal of Advanced Manufacturing Technology 116, no. 7-8 (July 9, 2021): 2413–24. http://dx.doi.org/10.1007/s00170-021-07505-5.

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AbstractA majority of aircraft components are nowadays manufactured using autoclave processing. Essential for the quality of the component is the realization of an airtight vacuum bag on top of the component to be cured. Several ways of leakage detection methods are actually used in industrial processes. They will be dealt with in this paper. A special focus is put on a new approach using flow meters for monitoring the air flow during evacuation and curing. This approach has been successfully validated in different trials, which are presented and discussed. The main benefit of the method is that in case of a leakage, a defined limit is exceeded by the volumetric flow rate whose magnitude can be directly correlated to the leakage’s size and position. In addition, the potential of this method for the localization of leakages has been investigated and is discussed.

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Avramescu, Viorel V. "Vacuum sealed surface acoustic wave pressure sensor." Journal of the Acoustical Society of America 122, no. 3 (2007): 1311. http://dx.doi.org/10.1121/1.2781405.

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Grzebyk, Tomasz, Anna Górecka-Drzazga, and Jan A. Dziuban. "Vacuum and Residual Gas Composition MEMS Sensor." Procedia Engineering 120 (2015): 671–74. http://dx.doi.org/10.1016/j.proeng.2015.08.707.

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van Herwaarden, AW, and PM Sarro. "Integrated thermal vacuum sensor with extended range." Vacuum 38, no. 6 (January 1988): 449–53. http://dx.doi.org/10.1016/0042-207x(88)90586-6.

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Berlicki, T. M. "Heat dissipation in thin-film vacuum sensor." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 19, no. 1 (January 2001): 325–28. http://dx.doi.org/10.1116/1.1326938.

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Kimata, Masafumi, Takayuki Tokuda, Akinobu Tsuchinaga, Takeshi Matsumura, Hideyuki Abe, and Naotaka Tokashiki. "Vacuum Packaging Technology for Uncooled Infrared Sensor." IEEJ Transactions on Electrical and Electronic Engineering 5, no. 2 (March 2010): 175–80. http://dx.doi.org/10.1002/tee.20514.

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Santovito, Elisa, Sophia Elisseeva, Malco C. Cruz-Romero, Geraldine Duffy, Joseph P. Kerry, and Dmitri B. Papkovsky. "A Simple Sensor System for Onsite Monitoring of O2 in Vacuum-Packed Meats during the Shelf Life." Sensors 21, no. 13 (June 22, 2021): 4256. http://dx.doi.org/10.3390/s21134256.

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Vacuum packaging (VP) is used to reduce exposure of retail meat samples to ambient oxygen (O2) and preserve their quality. A simple sensor system produced from commercial components is described, which allows for non-destructive monitoring of the O2 concentration in VP raw meat samples. Disposable O2 sensor inserts were produced by spotting small aliquots of the cocktail of the Pt–benzoporphyrin dye and polystyrene in ethyl acetate onto pieces of a PVDF membrane and allowing them to air-dry. These sensor dots were placed on top of the beef cuts and vacuum-packed. A handheld reader, FirestinGO2, was used to read nondestructively the sensor phase shift signals (dphi°) and relate them to the O2 levels in packs (kPa or %). The system was validated under industrial settings at a meat processing plant to monitor O2 in VP meat over nine weeks of shelf life storage. The dphi° readings from individual batch-calibrated sensors were converted into the O2 concentration by applying the following calibration equation: O2 (%) = 0.034 * dphi°2 − 3.413 * dphi° + 85.02. In the VP meat samples, the O2 levels were seen to range between 0.12% and 0.27%, with the sensor dphi signals ranging from 44.03° to 56.02°. The DIY sensor system demonstrated ease of use on-site, fast measurement time, high sample throughput, low cost and flexibility.

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Coburn, Kendrick A., Nicholas S. DeGrasse, Joseph C. Mertens, Katheryn J. Allyn, Nicholas K. McCarthy, Daniel Ballesteros, Joseph L. Garbini, and Joan E. Sanders. "An Instrumented Printed Insert for Continuous Monitoring of Distal Limb Motion in Suction and Elevated Vacuum Sockets." Prosthesis 4, no. 4 (December 2, 2022): 710–29. http://dx.doi.org/10.3390/prosthesis4040056.

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A suction or elevated vacuum prosthetic socket that loses vacuum pressure may cause excessive limb motion, putting the user at risk of skin irritation, gait instability and injury. The purpose of this research was to develop a method to monitor distal limb motion and then test a small group of participants wearing suction sockets to identify variables that strongly influenced motion. A thin plastic insert holding two inductive sensor antennae was designed and printed. Inserts were placed in suction sockets made for four participants who regularly used suction or elevated vacuum suspension. Participants wore a liner with a trace amount of iron powder in the elastomer that served as a distance target for the sensors. In-lab testing demonstrated that the sensed distance increased when participants added socks and decreased when they removed socks, demonstrating proper sensor performance. Results from take-home testing (3–5 days) suggest that research investigation into cyclic limb motion for sock presence v. absence should be pursued, as should the influence of bodily position between bouts of walking. These variables may have an important influence on suspension. Long-term monitoring may provide clinical insight to improve fit and to enhance suction and elevated vacuum technology.

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Li, Ting, Qinghe Song, Guangjun He, Haiting Xia, Haoxiang Li, Jinbin Gui, and Haining Dang. "A Method for Detecting the Vacuum Degree of Vacuum Glass Based on Digital Holography." Sensors 23, no. 5 (February 23, 2023): 2468. http://dx.doi.org/10.3390/s23052468.

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The vacuum degree is the key parameter reflecting the quality and performance of vacuum glass. This investigation proposed a novel method, based on digital holography, to detect the vacuum degree of vacuum glass. The detection system was composed of an optical pressure sensor, a Mach–Zehnder interferometer and software. The results showed that the deformation of monocrystalline silicon film in an optical pressure sensor could respond to the attenuation of the vacuum degree of vacuum glass. Using 239 groups of experimental data, pressure differences were shown to have a good linear relationship with the optical pressure sensor’s deformations; pressure differences were linearly fitted to obtain the numerical relationship between pressure difference and deformation and to calculate the vacuum degree of the vacuum glass. Measuring the vacuum degree of vacuum glass under three different conditions proved that the digital holographic detection system could measure the vacuum degree of vacuum glass quickly and accurately. The optical pressure sensor’s deformation measuring range was less than 4.5 μm, the measuring range of the corresponding pressure difference was less than 2600 pa, and the measuring accuracy’s order of magnitude was 10 pa. This method has potential market applications.

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Affandi, Faisol, Ahmad Izzuddin, and Ira Apriia. "Implementasi Sensor Kompas Sebagai Sistem Navigasi Pada Robot vacuum cleaner." Energy - Jurnal Ilmiah Ilmu-Ilmu Teknik 11, no. 1 (May 20, 2021): 21–25. http://dx.doi.org/10.51747/energy.v11i1.1235.

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Perkembangan teknologi pada saat ini telah mengalami peningkatan sedemikian pesatnya hingga mengantarkan pada suatu era teknologi robotika. Salah satunya dibidang alat bantu rumah tangga seperti robot vacuum cleaner yang telah mampu bernavigasi otomatis. Permasalahan pada robot vacuum cleaner tersebut kecepatan roda kanan dan kiri belum seimbang. Berdasarkan permasalahan mendorong peneliti untuk mengembangkan robot vacuum cleaner dengan menambahkan sensor kompas HMC5883L dan menerapkan metode fuzzy tsukamoto. Pada penelitian ini Metode fuzzy tsukamoto telah mampu menyeimbangkan kecepatan roda kanan dan kiri sehinggga robot dapat bergerak maju lurus, dan penerapan sensor kompas HMC5883L sebagai penunjuk arah gerak robot sehinggga robot mengetahui kearah mana akan bergerak. Pergerakan robot juga di pengaruhi sensor ultrasonic sebagai pendeteksi jarak halangan sehingga robot dapat menghindari tabrakan dengan dinding. Hasil penerapan optimasi gerak robot dengan mengembangkan metode fuzzy tsukamoto 80% berhasil menyeimbangkan kecepatan roda kanan dan kiri . Penerapan sensor kompas HMC5883L 85% berhasil memberikan penunjuk arah berdasarkan heading degrees yang terbaca oleh sensor yaitu 0˚/3600, 90˚, 180˚, 270˚.

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Kurnyta, Artur, Krzysztof Dragan, and Michal Dziendzikowski. "Assessment of Sensor Technologies for Aircraft SHM Systems." Fatigue of Aircraft Structures 2013, no. 5 (August 21, 2014): 53–59. http://dx.doi.org/10.2478/fas-2013-0005.

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Abstract SHM is a monitoring system which uses sensors, actuators and data transmission, acquisition and analysis, permanently integrated with the inspected object. The objective of SHM is to detect, localize, identify and predict development of fatigue fractures, increasing safety and reliability. This paper presents an assessment of sensor technologies used in aircraft SHM system. Due to the fact that most of these measurement methods are relatively new and still under development the present appraisal focuses on a number of parameters with reference to each method, including a sensor’s installation issues, reliability, power consumption, sensor infrastructure, sensitivity and cost and availability. The work is predominantly focused on the assessment ofpermanently bonded sensors, such as foil strain gages, Comparative Vacuum Monitoring (CVM), Piezo sensors (PZT), Eddy-Current Transducers (ECT). Finally, all these methods are briefly discussed.

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HURME, EERO U., and RAIJA AHVENAINEN. "A Nondestructive Leak Detection Method for Flexible Food Packages Using Hydrogen as a Tracer Gas." Journal of Food Protection 61, no. 9 (September 1, 1998): 1165–69. http://dx.doi.org/10.4315/0362-028x-61.9.1165.

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A nondestructive leak detection method developed at Technical Research Centre of Finland (VTT) was tested for both gas-flushed and vacuum flexible packages. In the method, a gas package containing 0.5 to 5.0% (vol/vol) hydrogen in nitrogen was positioned in a test chamber, a controlled vacuum was pulled in the chamber through a pipe connected to a hydrogen sensor, and leaking packages were detected by the sensor as increased H2 concentration. The H2 tracer gas (0.5 to 5.0%) was introduced into leaking finished vacuum packages at 200 kPa pressure. Within 1 to 4 s the developed test method was able to detect leaks down to 10 to 15 pm and 20 to 30 pm in diameter in commercially manufactured gas-flushed packages filled with roasted meat balls and vacuum packages filled with ground coffee, respectively. Before leak testing, the vacuum packages were charged with H2 for 30 s. The sensitivity and leak detection time of the test method were improved when the H2 concentration in the package was increased and when the free space in the test chamber was decreased. The evaluated H2 concentrations did not affect the sensory or microbiological quality of the roasted meat balls. This study clearly demonstrated that the hydrogen tracer gas leak detection method has potential to be further developed as a fast, nondestructive, on-line leak testing apparatus for flexible packages with or without a headspace.

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Journal articles on the topic 'Vacuum Sensor'

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