Relevant bibliographies by topics / Vacuum optical thin-film coating

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  1. Journal articles
  2. Dissertations / Theses
  3. Books
  4. Book chapters
  5. Conference papers

Academic literature on the topic 'Vacuum optical thin-film coating'

Author: Grafiati
Published: 30 May 2022
Last updated: 31 May 2022

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Journal articles on the topic "Vacuum optical thin-film coating"

1

SHI, X., Y. H. HU, and L. HU. "TETRAHEDRAL AMORPHOUS CARBON (Ta-C) ULTRA THIN FILMS FOR SLIDER OVERCOAT APPLICATION." International Journal of Modern Physics B 16, no. 06n07 (March 20, 2002): 963–67. http://dx.doi.org/10.1142/s0217979202010683.

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Tetrahedral Amorphous Carbon (ta-C) thin film by using Filtered Cathodic Vacuum Arc (FCVA) technique has proven to be wear-resistive and corrosion resistant for a wide range of electrical, optical, and mechanical applications. Many investigations have shown that the ta-C film prepared by the FCVA technique can provide a superior ultra thin overcoat for the sliders and media compared to ECR-CVD and IBD coating technology. The ta-C film excels in terms of the film density, hardness, surface roughness and corrosion resistance. Nanofilm Technology International (NTI) has successfully developed and commercialized the FCVA coating system (FS series) for the slider overcoat application, which provides a good quality film with a high hardness (~50 GPa), low stress (2~3 GPa), low macro-particle density (~1/cm2 for particles > 0.3 μm), good uniformity (< 4%$ in 8 inch coating area) and high production repeatability (< 5%).
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D'Alessandro, Carmine, Davide de Maio, Daniela de Luca, Emiliano di Gennaro, Mariano Gioffrè, Mario Iodice, Marilena Musto, Giuseppe Rotondo, Davide Dalena, and Roberto Russo. "Solar Selective Coating for Thermal Applications." Key Engineering Materials 813 (July 2019): 316–21. http://dx.doi.org/10.4028/www.scientific.net/kem.813.316.

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We present the results obtained using Cr2O3 as selective absorbing layer on aluminium film substrate. The thin films were deposited by electron beam evaporation using a multiple crucible e-gun able to deposit 4 materials in sequence without breaking the vacuum. Optical characterization of the multilayer films is based on ellipsometry and hemispherical reflectivity. The complex refractive index has been determinate and it has been used to design a selective solar absorber with high absorptance.
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SHARMA, SUDHIR KUMAR, V. K. SHARMA, and K. N. TRIPATHI. "FABRICATION AND CHARACTERIZATION OF MULTILAYER WAVEGUIDE FOR INTEGRATED OPTICS." Journal of Nonlinear Optical Physics & Materials 11, no. 02 (June 2002): 173–78. http://dx.doi.org/10.1142/s0218863502000936.

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We report on our systematic and detailed study of fabrication and characterization of polyaniline (PA) prepared by vacuum deposition and polystyrene (PS) prepared by dip coating method thin film optical waveguides. The four-layer consisting of substrate (glass)/PA/PS/air has been used for demonstrating polarization filter action.
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Şenay, Volkan, Soner Özen, Suat Pat, Birol Geçici, and Şadan Korkmaz. "A new method for titania thin film production." Journal of Thermoplastic Composite Materials 30, no. 6 (November 5, 2015): 808–15. http://dx.doi.org/10.1177/0892705715614060.

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In this research, transparent titania (TiO2) thin films were deposited on a glass microscope slide and on a flexible polyethylene terephthalate (PET) substrate under a high vacuum condition by means of the thermionic vacuum arc (TVA) method in a very short period of time (60 s). Optical properties and surface properties of the coated TiO2 surfaces are related to the structural changes of the coated layers due to ion energies and substrate effect. But obtained results are closely linked to literature values. Our analysis showed that the TVA method is an alternative method for low-temperature coatings and the produced films present important advantages for optical and industrial applications.
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Dang, Jun-Po, Xiu-Juan Jiang, and Zhen-Hua Tang. "Technique of TiNi-based shape memory alloy thin film coating on optical fibers." Acta Physica Sinica 71, no. 3 (2022): 030701. http://dx.doi.org/10.7498/aps.71.20211437.

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<sec>Intelligent, integrated and cost-effective micro-electro-mechanical system (MEMS) and micro sensors can be developed with TiNi-based memory alloy thin film and optical fibers. Such devices can work in harsh environment, like in deep sea, in space with flammable or explosive objects, or with strong electromagnetic interference; and examples of their possible applications include gas concentration detection in underground mines, dynamic detection of production parameters in oil or gas mining, etc. As TiNi-based memory alloy thin film possesses good biocompatibility, such devices can also be used in intracranial/endocardial pressure test, surgical resection, early cancer assessment, etc. The successful development of the above MEMS and micro sensors involve optical fibers coated with memory alloy films. However, unlike the common planar substrates, optical fiber is of a cylinder with a small diameter, and how to grow good-quality memory alloy film on its surface remains to be explored.</sec><sec>In this work, the silica fibers are coated with TiNi memory alloy films by magnetron sputtering. How to choose the proper operating parameters in the sputtering process, and also the effects of subsequent annealing treatment on the films, are discussed in detail. Uniform thin films are grown on the 125-μm-diameter cylindrical surfaces of optical fibers with our built coating mask device specially designed for fibers. The experiments show that when target-substrate distance, background vacuum degree, Ar gas flow and sputtering time are fixed in the sputtering process, the sputtering power can be optimized, while a higher sputtering pressure results in lower film deposition rate but better surface roughness. The thin film is well crystallized under annealing, and the major martensite B19′ phase and minor austenite B2 phase coexist in the Ti<sub>49.09</sub>Ni<sub>50.91</sub> film. In the experiments, with the optimal operating parameters (sputtering power of 150 W and sputtering pressure of 0.23 Pa), TiNi memory alloy film about 852.2 nm in thickness is grown on the fiber at a deposition rate of 0.118 nm/s, and surface root mean square roughness of the unannealed film is 15.1 nm. Annealing at temperatures of 500, 550 and 600 ℃ are respectively tried, and such a thermal treatment evidently refines the crystalline grains inside the film. Surface root mean square roughness of the film annealed at 600 ℃ is reduced to 6.32 nm.</sec><sec>This work indicates that a glass fiber can be coated with high-quality TiNi-based memory alloy film, and it thus forms a part of the bases of further development of relevant MEMS and micro sensors.</sec>
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Zhang, Yu, Jiancang Su, Xudong Qiu, Rui Li, Liang Zhao, Binxiong Yu, Jie Cheng, Bo Zeng, and Xiudong Xu. "The effects of cathode electrodeposited polymer film on the long vacuum gap breakdown." European Physical Journal Applied Physics 81, no. 2 (February 2018): 21301. http://dx.doi.org/10.1051/epjap/2018170306.

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Vacuum surface discharge is one of the most important issues for vacuum insulation. In this paper, a method for breakdown field strength enhancement of long vacuum gap is put forward, through depositing polymer dielectric coating on the electrode surface. The physical mechanism that the polymer film changes the electrode surface state is analyzed. After a layer of polymer film is deposited on the electrode surface, the decreased surface field strength and improved micro-surface state both help to suppress the field electron emission from the cathode. The technique of cathode electrodeposition for high polymers such as epoxy resin (ER), epoxy acrylate (EA), polyimide (PI) and poly(ether-ether-ketone) (PEEK) was explored, and the thickness of the electrodeposited coating can reach 20–50 µm. The effects of the electrodeposited polymer coatings of electrodes on the 2.5 cm vacuum gap breakdown were studied under a high-voltage vacuum experiment platform. Experimental results showed that when ER, EA and PEEK coatings with thickness of 25–45 µm were respectively electrodeposited on the 95 cm2 plate cathode, the initial-breakdown field strengths of the 2.5 cm vacuum gap were enhanced by 20.7%–22.4%. The enhancement of the initial-breakdown field strength was restricted by the coating defects, grain boundary defects on the cathode surface, and the micro-triple-point emission after the fusing of some local coating points due to the electron bombardments.
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Venugopal, N., and Anirban Mitra. "Plasmonics Properties of ZnO/Ag/ZnO Multilayer Thin Films." Advanced Materials Research 585 (November 2012): 214–18. http://dx.doi.org/10.4028/www.scientific.net/amr.585.214.

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The optical properties of ZnO (Zinc Oxide)/Ag (silver)/ZnO (Zinc Oxide)/glass multilayer structure have been investigated. These properties could be tuned using the plasmonic properties of the intermediate Ag layer. ZnO thin film of 80 nm thickness has been deposited using Spray Pyrolysis on Glass Substrate. Prior to the deposition of approximately same thickness of ZnO like the previous one, a thin layer of Ag with thicknesses varying from 0.5 nm to 10 nm have been deposited using Vacuum Deposition. We have correlated the properties of multilayer thin film with thickness and morphology of the intermediate silver layer. Crystallographic properties of thin films have been characterized using XRD (X-ray Diffraction). Surface Morphology of Ag layer on ZnO has been studied using AFM (Atomic Force Microscopy). UV-VIS Spectrometer has been used to measure the optical transparency of these multilayer thin films. It has been observed that optical transparency of ZnO/Ag/ZnO/Glass thin film on glass substrate slightly enhanced compared to ZnO/ZnO/Glass. We interpret these experimental results with Maxwell-Garnett theory. The simulated and experimental SPR (Surface Plasmon Resonance) positions of ZnO/Ag/ZnO thin films are well matched. We expect that MG Theory interpretation of these kind Dielectric/Metal/Dielectric multilayer thin films were applicable only for Metallic Island thin films deposited using Vacuum coating method. We also describe the influence of Ag thickness on optical properties of the ZnO/Ag/ZnO composite and suggest a mechanism of tunability influenced by surface plasmons.
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Durisch, W., F. von Roth, and W. J. Tobler. "Advances in Gas-Fired Thermophotovoltaic Systems." Journal of Solar Energy Engineering 129, no. 4 (May 16, 2007): 416–22. http://dx.doi.org/10.1115/1.2770749.

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In a first and completely new approach, a vacuum plasma-spray coating technique was used to deposit selective emitting rare-earth oxide films of ytterbia (Yb2O3) on porous silicon-infiltrated silicon carbide foams (Si–SiC). The plasma-spray coating technique offers a new and promising way to produce selective emitting coatings on different refractory substrates with complex geometries. The adhesion and thermal shock stability were tested until a film thickness of 130μm was achieved; the selective emittance of the oxide coating has been found to be dependent on the film thickness. The material combination Si–SiC and Yb2O3, however, needs some major improvement regarding high-temperature stability and high thermal cycling loads. In a different approach, the advantage of low emitting Al2O3 fibers and good thermal matching was combined with Yb2O3 slurry coating of flexible alumina (Al2O3) fiber bundles, formed into a cylindrical shape. The thin fiber structure tried to imitate the famous incandescent mantle emitters of Auer von Welsbach, but with a more rugged structure. Even though the fibers of the woven emitter were thin, the low thermal conductivity of Al2O3 led to a distinct reduction of the surface temperature and emittance, and a shielding effect of the radiation emanating from the hot inner walls by the cooler outer grid structure was inevitable. Optical filters consisting of a water film and of transparent conducting oxides (TCO) have been developed and tested to protect the photocells against overheating and to reflect nonconvertible off-band radiation back to the emitter. The water film led to a significant reduction of the cell temperature and increased cell performance, whereas with the TCO filters only a reduction of the cell temperature was observed.
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Lv, Qinghua, Jiachen Cui, Hasila Jarimi, Hui Lv, Zhongsheng Zhai, Yuehong Su, Saffa Riffat, and Shijie Dong. "Theoretic analysis and experimental evaluation of the spectrum transmission coefficient of a multilayer photovoltaic vacuum glazing." International Journal of Low-Carbon Technologies 15, no. 4 (September 15, 2020): 574–82. http://dx.doi.org/10.1093/ijlct/ctaa026.

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Abstract This paper introduces an innovative thin film PV vacuum glazing (PV-VG) technology. In addition to electricity generation, the PV-VG glazing can also reduce heat loss from the building in winter and reduce heat gain in summer. In building integrated photovoltaics application, optical characterization of the PV glazing is important in determining the solar ray transmission and thermal transfer process of the glazing. This paper discusses the optical properties of the PV-VG glazing by considering the different layers of the glazing unit that includes a self-cleaning glass, a thin film PV glass and a low-e vacuum glazing. Based on the optical transfer matrix, the transmission coefficients of different film layers were deduced. The theoretical calculations were then validated against the transmission coefficient experiment of the PV-VG using an EDTM SS2450 Solar Spectrum Meter. The calculation error of the transmission coefficient of the single-layer glazing is generally within 5%, the calculation error of the transmission coefficient of the integrated PV-VG glazing is about 6%. The results show that the average visible light transmission coefficient, the average infrared light transmission coefficient and the overall transmission coefficient of PV-VG glazing are 19%, 16% and 12%, respectively. The study is important to optimize the visible light transmission of the PV-VG glazing; the optical model obtained above lays a solid foundation for further study of transmission coefficient analysis of different functional coating of PV-VG glazing.
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Dahan, Nathaniel, Nick Donaldson, Stephen Taylor, and Nuno Sereno. "Prolonging the Lifetime of PEEK Packages for Implantable Electronic Devices Using Commercially Available Vacuum Thin Film Coatings." Journal of Microelectronics and Electronic Packaging 11, no. 3 (July 1, 2014): 128–36. http://dx.doi.org/10.4071/imaps.417.

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For short term applications (less than three years), it may be possible to replace traditional long term packaging materials such as titanium with a biocompatible polymer such as PEEK. This paper investigates the use of commercially available thin films to decrease the water vapor permeation rate through the walls of a PEEK package. It was found that most physical vapor deposition (PVD) and plasma assisted chemical vapor deposition (PaCVD) coatings tested did not provide a significant improvement in lifetime, due to the porosity of the films produced. This is mostly linked to the morphology of the films (i.e., growth in columns which are poorly bonded together, creating a porous structure) and is exacerbated by the high surface roughness of the machined substrates. Applying a lacquer before coating reduces this effect significantly, and we found that the time constant of our coated packages was improved by a factor of 2.3. Based on the findings of our group's previous work and this paper, the maximum achievable lifetime of PEEK packages with a thin film coating and desiccant is presented. As an example, a coated cylindrical PEEK package (using atomic layer deposition, ALD) with a uniform wall thickness of 2 mm, an internal cavity size of 1.5 cm3, filled with 20% of desiccant, has a lifetime of 18.8 mo (27.2 mo with 30% of desiccant). This would be sufficient for a range of applications and provide a cheaper and more versatile packaging alternative to traditional packages.
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Dissertations / Theses on the topic "Vacuum optical thin-film coating"

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Петров, Дмитро Вікторович. "Технологія оптичних кольорових стекол інфрачервоного діапазону спеціального призначення." Thesis, Національний технічний університет "Харківський політехнічний інститут", 2019. http://repository.kpi.kharkov.ua/handle/KhPI-Press/41528.

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Дисертація на здобуття наукового ступеня кандидата технічних наук (Ph.D) за спеціальністю 05.17.11 – технологія тугоплавких неметалічних матеріалів. – Національний технічний університет "Харківський політехнічний інститут", Харків, 2019. Дисертація присвячена створенню оптичних кольорових стекол зі спектральними параметрами – коефіцієнтом пропускання на довжині хвилі 1060 τ(λ₁₀₆₀) >65 %, поглинанням у спектральному діапазоні до 950 нм та технологіям їх отримання. На цей час існуючі стекла лише частково виконують ці умови, або технології їх отримання є нерентабельними для масового виробництва, тому було поставлена задача про створення стекол, які б могли задовольняти ці умови з фактором технологічності у виробництві. Вирішення досягнуто завдяки дослідженням поглинальної дії системи барвників Cr₂O₃-Mn₂O₃ у системі R₂O-PbO-SiO₂ та додатковому нанесенню оптичного покриття. Завдяки дослідженням було встановлено механізми забарвлення з урахуванням впливу домішок-барвників (Fe₂O₃/FeO), а також знайдені оптимальні концентрації барвників у склі. При розробці технології отримання оптичного кольорового скла були дослідженні основні технічні операції та методи контролю якості скла, що дозволяє отримувати дане скло у виробничому масштабі. Розроблені параметри контролю протікання процесів гомогенізації та освітлення розплаву скла з метою підвищення якості продукції. Також були розроблені методики обробки деталей зі скла та нанесення оптичних покриттів. Для автоматизації виробництва даної продукції та зменшення впливу людського фактору було розроблено програмне забезпечення автоматичної системи керування технологічними процесами (АСК ТП).
Dissertation for the Ph.D. degree in specialty 05.17.11 – "Technology of refractory nonmetallic materials". – National Technical University "Kharkiv Polytechnic Institute", Kharkiv, 2019. The dissertation is devoted to the development of infrared optical glasses with next spectral characteristics, as well as the creation of technologies for their production. The spectral characteristics are transmittance at a wavelength of 1060 nm 1060 τ (λ₁₀₆₀)>65% and absorption in the spectral range up to 950 nm. The solution to this problem was achieved due to the addition of the Cr₂O₃-Mn₂O₃ colorant system to the glass matrix of the R₂O-PbO-SiO₂ system, as well as the additional optical thin-film coatings. For production implementation optical color glass a pot regenerator furnace was used. The ceramic vessel with a volume of 500 liters was chosen. The temperature of the production was 1420 ± 20 °С. To improve the quality of optical glass practical studies were carried out. These studies devote to the modes of batch filling, mixing and temperature parameters. Fundamental researches were conducted on the mode of cooling of colored optical glass. For the first time for such glasses the stage of cooling made by inertia cooling of the furnace construction without gas. Due to introduction of the results and improving of the spectral parameters the volume of quality glass yield has increased. The software was developed to control the technological processes of the furnace in automatic mode.
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2

Петров, Дмитро Вікторович. "Технологія оптичних кольорових стекол інфрачервоного діапазону спеціального призначення." Thesis, Національний технічний університет "Харківський політехнічний інститут", 2019. http://repository.kpi.kharkov.ua/handle/KhPI-Press/41488.

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Дисертація на здобуття наукового ступеня кандидата технічних наук (Ph.D) за спеціальністю 05.17.11 – технологія тугоплавких неметалічних матеріалів. – Національний технічний університет "Харківський політехнічний інститут", Харків, 2019. Дисертація присвячена створенню оптичних кольорових стекол зі спектральними параметрами – коефіцієнтом пропускання на довжині хвилі 1060 τ(λ₁₀₆₀) >65 %, поглинанням у спектральному діапазоні до 950 нм та технологіям їх отримання. На цей час існуючі стекла лише частково виконують ці умови, або технології їх отримання є нерентабельними для масового виробництва, тому було поставлена задача про створення стекол, які б могли задовольняти ці умови з фактором технологічності у виробництві. Вирішення досягнуто завдяки дослідженням поглинальної дії системи барвників Cr₂O₃-Mn₂O₃ у системі R₂O-PbO-SiO₂ та додатковому нанесенню оптичного покриття. Завдяки дослідженням було встановлено механізми забарвлення з урахуванням впливу домішок-барвників (Fe₂O₃/FeO), а також знайдені оптимальні концентрації барвників у склі. При розробці технології отримання оптичного кольорового скла були дослідженні основні технічні операції та методи контролю якості скла, що дозволяє отримувати дане скло у виробничому масштабі. Розроблені параметри контролю протікання процесів гомогенізації та освітлення розплаву скла з метою підвищення якості продукції. Також були розроблені методики обробки деталей зі скла та нанесення оптичних покриттів. Для автоматизації виробництва даної продукції та зменшення впливу людського фактору було розроблено програмне забезпечення автоматичної системи керування технологічними процесами (АСК ТП).
Dissertation for the Ph.D. degree in specialty 05.17.11 – "Technology of refractory nonmetallic materials". – National Technical University "Kharkiv Polytechnic Institute", Kharkiv, 2019. The dissertation is devoted to the development of infrared optical glasses with next spectral characteristics, as well as the creation of technologies for their production. The spectral characteristics are transmittance at a wavelength of 1060 nm 1060 τ (λ₁₀₆₀)>65% and absorption in the spectral range up to 950 nm. The solution to this problem was achieved due to the addition of the Cr₂O₃-Mn₂O₃ colorant system to the glass matrix of the R₂O-PbO-SiO₂ system, as well as the additional optical thin-film coatings. For production implementation optical color glass a pot regenerator furnace was used. The ceramic vessel with a volume of 500 liters was chosen. The temperature of the production was 1420 ± 20 °С. To improve the quality of optical glass practical studies were carried out. These studies devote to the modes of batch filling, mixing and temperature parameters. Fundamental researches were conducted on the mode of cooling of colored optical glass. For the first time for such glasses the stage of cooling made by inertia cooling of the furnace construction without gas. Due to introduction of the results and improving of the spectral parameters the volume of quality glass yield has increased. The software was developed to control the technological processes of the furnace in automatic mode.
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3

Edström, Curt. "Wet etching of optical thin films." Thesis, Tekniska Högskolan, Högskolan i Jönköping, JTH, Kemiteknik, 2010. http://urn.kb.se/resolve?urn=urn:nbn:se:hj:diva-13988.

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Evaluation of the wet etching properties of several different thin film oxidesgrown by physical vapour deposition was performed in this work. MgO, Al2O3,SiO2, TiO2, HfO2 ZrO2 and Y2O3 were coated on two types of substrates; Si andborosilicate glass and etching tests were performed in different etchingsolutions. MgF2 thin films have also been evaluated. Important aspects of the choice of the thin films was taken into account in orderto match to good optical properties such as refractive index (n), extinction coefficient (k) and optical thickness (TP) as well as good chemical properties in the wet etching process. A description is made of the physics of optical filters and how a combination of different oxides stacked onto each other can create interference filters. A description of the manufacturing process of the thin films where physical vapour deposition (PVD) was used is presented. Thermal shift of the optical spectra caused by porous coatings was investigated and analyses of the thin films by ellipsometry, surface profilometry and transmission spectrophotometry have been performed. The wet etching properties were evaluated by monitoring the transmission insituon transparent borosilicate glass substrates. A method of how to measure the wet etching rate for different thin films is described. A computer software was used to calculate the Pourbaix diagrams in order to understand the chemical behaviour of the etching solutions. The pH can have a significant impact on the etching behaviour. In case of TiO2, it can be dissolved in an alkaline solution of H2O2. The catalytically process behind this is evaluated. Etching rate for both Y2O3 andSiO2 were matched by adjusting the etchant concentration as a case example. The group IVB oxides are difficult to etch. The catalytic etching of TiO2 with peroxide is slow but detectable. Al2O3, Y2O3 and MgO are reasonably easy to etch but have too low refractive indices to be useful in multilayer optical filters. The In-situ etching instrument was found to be very useful for measuring etching rates.
Utvärdering av våtkemiska egenskaper för flera olika oxidtunnfilmer utfördes idetta arbete på tunnfilmer av MgO, Al2O3, SiO2, TiO2, HfO2 ZrO2 and Y2O3 vakuumdeponerade på både kiselwafers och borosilikatglas. Etstester gjordes med ett flertal etslösningar. Även MgF2-tunnfilmer utvärderades. Både optiska och kemiska egenskaper togs i beaktande vid utvärderingen av tunnfilmerna. De optiska lagar som gäller för tunnfilmer redovisas, bl a hur kombinationer av olika oxider kan skapa interferrensfilter. En beskrivning av tillverkningsprocessen varvid PVD användes presenteras. Termiskt skift av det optiska transmissionsspektrat orsakat av porositet undersöktes. Analyser av tunnfilmerna med ellipsometri, profilometri och transmissions spektroskopi utfördes. Våtetsningsegenskaperna utvärderades genom att mäta in-situ vid etsprocessen på transparenta borosilikatglassubstrat. Metoden för att mäta etshastigheten för olika oxider är beskriven. Datorberäkningar av pourbaixdiagram användes för att skapa en förståelse av de kemiska egenskaperna för etslösningarna. Etsegenskaperna påverkas till stordel av lösningens pH. TiO2 kan etsas i basisk lösning av peroxid. Denna process utvärderades, likaså utvärderades etshasigheten för Y2O3 och SiO2 för att erhålla matchande par avoxider som en fallstudie. Grupp IVB oxiderna är mycket svåra att etsa. Katalytisk etsning av TiO2 med peroxid är detekterbar men långsam. Al2O3, Y2O3 och MgO är förhållandevis enkla att etsa men har för låga brytningsindex för att var praktiskt använbara i optiska multilagerfilter. In-situ etsinstrumentet befanns vara ett utmärkt verktyg för att mäta etshastigheten för tunnfilmer.
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Antelius, Mikael. "Wafer-scale Vacuum and Liquid Packaging Concepts for an Optical Thin-film Gas Sensor." Doctoral thesis, KTH, Mikro- och nanosystemteknik, 2013. http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-119839.

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This thesis treats the development of packaging and integration methods for the cost-efficient encapsulation and packaging of microelectromechanical (MEMS) devices. The packaging of MEMS devices is often more costly than the device itself, partly because the packaging can be crucial for the performance of the device. For devices which contain liquids or needs to be enclosed in a vacuum, the packaging can account for up to 80% of the total cost of the device. The first part of this thesis presents the integration scheme for an optical dye thin film NO2-gas sensor, designed using cost-efficient implementations of wafer-scale methods. This work includes design and fabrication of photonic subcomponents in addition to the main effort of integration and packaging of the dye-film. A specific proof of concept target was for NO2 monitoring in a car tunnel. The second part of this thesis deals with the wafer-scale packaging methods developed for the sensing device. The developed packaging method, based on low-temperature plastic deformation of gold sealing structures, is further demonstrated as a generic method for other hermetic liquid and vacuum packaging applications. In the developed packaging methods, the mechanically squeezed gold sealing material is both electroplated microstruc- tures and wire bonded stud bumps. The electroplated rings act like a more hermetic version of rubber sealing rings while compressed in conjunction with a cavity forming wafer bonding process. The stud bump sealing processes is on the other hand applied on completed cavities with narrow access ports, to seal either a vacuum or liquid inside the cavities at room temperature. Additionally, the resulting hermeticity of primarily the vacuum sealing methods is thoroughly investigated. Two of the sealing methods presented require permanent mechanical fixation in order to complete the packaging process. Two solutions to this problem are presented in this thesis. First, a more traditional wafer bonding method using tin-soldering is demonstrated. Second, a novel full-wafer epoxy underfill-process using a microfluidic distribution network is demonstrated using a room temperature process.

QC 20130325

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Simon, Darren, and s3027589@student rmit edu au. "Chemistry and Morphology of Polymer Thin Films for Electro-Optical Application." RMIT University. Applied Sciences, 2006. http://adt.lib.rmit.edu.au/adt/public/adt-VIT20070123.122707.

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Thin polymer films and their properties have been investigated. The characteristics of crystalline polymers according to film thickness have been improved using polycaprolactone (PCL). The melting enthalpy of PCL has increased when the film thickness decreased and the peak melting temperature showed no significant changes with film thickness. Film thickness variation influenced surface roughness and crystal size. Optical microscope images showed the rougher surface of thicker films. The spinning time has shown no influence on film thickness and no significant changes to surface roughness. Thin films of block copolymers were used in the surface modification study; films studied included poly(styrene-b-butadiene-b-styrene) (SBS) and poly(styrene-b-isoprene-b-styrene) (SIS) and their surface modifications have been controlled using different methods of treatment. Films of SIS heated at different temperatures have shown different surface texture and roughness. Films treated at low temperature (45 °C) had smooth surfaces when compared with films heated at high temperature (120 °C and 160 °C). Phase separation of SIS heated at (120 °C and 160 °C) caused bulges of different sizes to cover the surface. The height and width of the bulges showed variation with film thickness and heating. Substrate interaction with SBS and SIS block copolymer films showed different surface texture when using the same type of substrate and different texture were obtained when SBS solutions were spun onto different substrates. It has been demonstrated that using different solvents in copolymer preparation caused different texture. Thermal and surface property variations with film thickness have been improved using amorphous polymers. Surface roughness of poly(methyl methacrylate) PMMA and disperse red 1-poly(methyl methacrylate) DR1-PMMA, PMMA has improved using thickness variation. Glass transition temperature measurement has increased when film thickness was increased. The glass transition temperature (Tg) and surface roughness of UV15 UV - curable coating polymer has been modified using UV curing and heating methods. Tg variation was observed when curing time and curing intensity were changed causing the optical properties of the polymer to be more variable. A plasma etcher caused wrinkles to occur on the surface of unheated UV15. Tg of UV15 increased when curing time increased. The Fourier Transform Infrared Spectroscopy (FTIR) spectra of cured UV15 film have shown peak variations of the ester and carbon double bond regions over the range of 1850-1700 cm-1. Urethane-Urea (UU) Polymer thin films were used to investigate optical properties and develop an optical waveguide. Absorption and transmission properties of light using non-linear optical (NLO) polymer was investigated and used in optical waveguide fabrication. Refractive indices were measured to examine UU films at two different wavelengths. A UU film of 1 µm thickness caused a maximum absorption at max = 471 nm also obtained at 810 nm wavelength. Many methods of fabrication were used; photolithography, plasma etching in a barrel reactor and thin film deposition using sputtering and evaporation. Etched depths from 1 μm to 100 μm were obtained. An optical waveguide has been prepared using plasma etching of a cured UV15 as a cladding layer on a silicon substrate.
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Singh, Harpal. "An Investigation of Material Properties and Tribological Performance of Magnetron Sputtered Thin Film Coatings." University of Akron / OhioLINK, 2015. http://rave.ohiolink.edu/etdc/view?acc_num=akron1449850005.

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Azunre, Paul. "A parallel branch-and-bound algorithm for thin-film optical systems, with application to realizing a broadband omnidirectional antireflection coating for silicon solar cells." Thesis, Massachusetts Institute of Technology, 2014. http://hdl.handle.net/1721.1/96436.

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Thesis: Ph. D., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2014.
This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections.
Cataloged from student-submitted PDF version of thesis.
Includes bibliographical references (pages 124-129).
For the class of nondispersive, nonabsorbing, multilayer thin-film optical systems, this thesis work develops a parallel branch-and-bound computational system on Amazon's EC2 platform, using the Taylor model mathematical/computational system due to Berz and Makino to construct tight rigorous bounds on the merit function on subsets of the search space (as required by a branch-and-bound algorithm). This represents the first, to the best of our knowledge, deterministic global optimization algorithm for this important class of problems, i.e., the first algorithm that can guarantee that a global solution to an optimization problem in this class has been found. For the particular problem of reducing reflection using multilayer systems, it is shown that a gradient index constraint on the solution can be exploited to significantly reduce the search space and thereby make the algorithm more practical. This optimization system is then used to design a broadband omnidirectional antireflection coating for silicon solar energy. The design is experimentally validated using RF sputtering, and shows performance that is competitive with existing solutions based on impractical sophisticated nano-deposition techniques, as well as the more practical but also more narrowly applicable solutions based on texturing. This makes it arguably the best practical solution to this important problem to date. In addition, this thesis develops a mathematical theory for cheaply (in the computational sense) and tightly bounding solutions to parametric weakly-coupled semilinear parabolic (reaction-diffusion) partial differential equation systems, as motivated by the design of tandem organic solar cell structures (which are governed by the drift-diffusion-Poisson system of equations). This represents the first theoretical foundation, to the best of our knowledge, to enable guaranteed global optimization of this important class of problems, which includes, but is broader, than many semiconductor design problems. A serial branch-and-bound algorithm implementation illustrates the applicability of the bounds on a pair of simple examples.
by Paul Azunre.
Ph. D.
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Shah, Dhruv. "Thin Film Deposition on Powder Substrates using ALD and its Characterization using XPS, TEM, and SE." BYU ScholarsArchive, 2020. https://scholarsarchive.byu.edu/etd/8990.

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The major part of my dissertation consists of thin films deposited using atomic layer deposition on flat and powder substrates. It details the various optimization experiments for process parameters like dose time, purge time, temperature, and pressure on silicon shards and powder substrates. Spectroscopic ellipsometry (SE) was used to characterize these films over a wide wavelength range (191-1688 nm). An optical model with a BEMA (Bruggeman effective medium approximation) layer was used to fit the ellipsometric data to investigate the optical properties of the alumina surface. The optimized process parameters on the flat surfaces were used for coating powder substrates. I propose a set of experiments to optimize the conditions for coating of powders and high aspect ratio structures by atomic layer deposition (ALD). The coated powders were analyzed by surface analytical techniques like X-ray photoelectron spectroscopy, spectroscopic ellipsometry, transmission electron microscopy, energy X-ray dispersive spectroscopy (EDAX), and BET. The first chapter introduces the technique of atomic layer deposition, and details its advantages and limitations over conventional thin film deposition techniques like chemical vapor deposition and physical vapor deposition. The second chapter details the initial deposition experiments performed on flat surfaces and characterization of thin films using surface analytical tools. I conducted multi-sample analysis on eleven different thin films for calculation of optical constants of alumina. The third chapter introduces thin film deposition experiments performed on powder substrates, several challenges associated with achieving conformal thin films and characterization. The fourth chapter details the experiments to achieve unilateral ALD achieved on one side of the substrates. The fifth chapter details various unconventional materials including liquid water, Coca-Cola, a coffee bean, nitrogen gas, human tooth, and printed office paper, which were analyzed by near ambient pressure XPS (NAP-XPS). This dissertation contains appendices of other tutorial articles I wrote on obtaining optical constants liquid samples using spectroscopic ellipsometry, and good experimental techniques for maintenance of vacuum equipment.
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Laine, Guy C. "CHARACTERIZATION OF AND CONTROLLING MORPHOLOGY OF ULTRA-THIN NANOCOMPOSITES." UKnowledge, 2013. http://uknowledge.uky.edu/cme_etds/23.

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Ultrathin film nanocomposites are becoming increasingly important for specialized performance of commercial coatings. Critical challenges for ultrathin film nanocomposites include their synthesis and characterization as well as their performance properties, including surface roughness, optical properties (haze, refractive index as examples), and mechanical properties. The objective of this work is to control the surface roughness of ultrathin film nanocomposites by changing the average particle size and the particle volume fraction (loading) of monomodal particle size distributions. This work evaluated one-layer and two-layer films for their surface properties. Monodispersed colloidal silica nanoparticles were incorporated into an acrylate-based monomer system as the model system. Ultrathin nanocomposites were prepared with three different size colloidal silica (13, 45, and 120 nm nominal diameters) at three different particle loadings (20, 40, and 50 vol. % inorganic solids). Silica particles were characterized using DLS and TEM. AFM was used to measure the root mean square roughness (Rq), ΔZ, and location-to-location uniformity of one-layer and two-layer nanocomposite coatings. Developing an understanding about the properties affected by the type and amount of particles used in a nanocomposite can be used as a tool with nanocharacterization techniques to quickly modify and synthesize desired ultrathin film coatings.
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Barutcu, Burcu. "The Design And Production Of Interference Edge Filters With Plasma Ion Assisted Deposition Technique For A Space Camera." Master's thesis, METU, 2012. http://etd.lib.metu.edu.tr/upload/12614574/index.pdf.

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Interference filters are multilayer thin film devices. They use interference effects between the incident and reflected radiation waves at each layer interface to select wavelengths. The production of interference filters depend on the precise deposition of thin material layers on substrates which have suitable optical properties. In this thesis, the main target is to design and produce two optical filters (short-pass filter and long-pass filter) for the CCDs that will be used in the electronics of a space camera. By means of these filters, it is possible to take image in different bands (RGB and NIR) by identical two CCDs. The filters will be fabricated by plasma ion-assisted deposition technique.
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Books on the topic "Vacuum optical thin-film coating"

1

Development of multilayer optical thin film coatings and devices with vacuum coating unit "VERA-902". Mumbai: Bhabha Atomic Research Centre, 1999.

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K, Sahoo N., and Bhabha Atomic Research Centre, eds. ION assisted deposition of refractory oxide thin film coatings for improved optical and structural properties. Mumbai: Bhabha Atomic Research Centre, 1999.

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1941-, Boulos Edward N., Platts Dennis R, and International Conference on Processing Materials for Properties (1st : 1993 : Honolulu, Hawaii), eds. Glass and optical materials II: Optoelectronics, thin film coating, sol-gel processing. Westerville, Ohio: American Ceramic Society, 1994.

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International Conference on Processing Materials for Properties 1993 (Corporate Author), Edward N. Boulos (Editor), and Dennis R. Platts (Editor), eds. Glass and Optical Materials II: Optoelectronics, Thin Film Coating Sol-Gel Processing. American Ceramic Society, 1997.

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1930-, Bach Hans, and Krause Dieter 1933-, eds. Thin films on glass. 2nd ed. Berlin: Springer, 2003.

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1930-, Bach Hans, and Krause Dieter 1933-, eds. Thin films on glass. Berlin: Springer, 1997.

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Bach, Hans, and Dieter Krause. Thin Films on Glass. Springer, 2012.

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Thin Films on Glass (Schott Series on Glass and Glass Ceramics). Springer, 2003.

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Book chapters on the topic "Vacuum optical thin-film coating"

1

Grunwald, R., S. Woggon, and R. Ehlert. "Fabrication of Thin-Film Microlens Arrays by Mask-Shaded Vacuum Deposition." In Diffractive Optics and Optical Microsystems, 169–77. Boston, MA: Springer US, 1997. http://dx.doi.org/10.1007/978-1-4899-1474-3_16.

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Bera, Amalendu, and Sourav Chattopadhyay. "Optical Properties of Fe-Doped ZnO Thin Film on p-Si by Spin Coating." In Computational Advancement in Communication Circuits and Systems, 387–95. Singapore: Springer Singapore, 2019. http://dx.doi.org/10.1007/978-981-13-8687-9_35.

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Rana, Paramjit, S. K. Mishra, Jaya Mukherjee, and V. S. Rawat. "Multilayer Dielectric Thin Film Optical Coating Design for Single Wavelength Operation of Inherently Dual Wavelength Copper Vapor Laser." In Springer Proceedings in Physics, 849–53. Singapore: Springer Singapore, 2021. http://dx.doi.org/10.1007/978-981-15-9259-1_196.

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Saurdi, I., M. H. Mamat, A. Ishak, and M. Rusop. "Structural, Optical and Electrical Properties of Nano-structured Sn-doped ZnO Thin Film via Sol Gel Spin Coating Technique." In InCIEC 2014, 937–47. Singapore: Springer Singapore, 2015. http://dx.doi.org/10.1007/978-981-287-290-6_82.

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Symmons, Alan, and Mark Lifshotz. "Thin Film Coating." In Field Guide to Infrared Optical Materials. SPIE, 2021. http://dx.doi.org/10.1117/3.2589608.ch87.

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"Factors affecting layer and coating properties." In Thin-Film Optical Filters, 488–513. CRC Press, 2001. http://dx.doi.org/10.1201/9781420033236-15.

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"Factors affecting layer and coating properties." In Thin-Film Optical Filters, Third Edition, 462–87. Taylor & Francis, 2001. http://dx.doi.org/10.1201/9781420033236.ch10.

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"Factors Affecting Layer and Coating Properties." In Thin-Film Optical Filters, Fourth Edition, 569–94. CRC Press, 2010. http://dx.doi.org/10.1201/9781420073034-c12.

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Acosta, Edwin. "Thin Films/Properties and Applications." In Thin Films. IntechOpen, 2021. http://dx.doi.org/10.5772/intechopen.95527.

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Since its discovery in early times, thin films rapidly found industrial applications such as in decorative and optics purposes. With the evolution of thin film technology, supported by the development of vacuum technology and electric power facilities, the range of applications has increased at a level that nowadays almost every industrial sector make use of them to provide specific physical and chemical properties to the surface of bulk materials. The possibility to tailor the film properties through the variation of the microstructure via the deposition parameters adopted in a specific deposition technique has permitted their entrance from the simplest like protective coatings against wear and corrosion to the most technological advanced applications such as microelectronics and biomedicine, recently. In spite of such impressive progress, the connection among all steps of the thin film production, namely deposition parameters-morphology and properties, is not fully accurate. Among other reasons, the lack of characterization techniques suitable for probing films with thickness less than a single atomic layer, along with a lack of understanding of the physics have impeded the elaboration of sophisticated models for a precise prediction of film properties. Furthermore, there remain some difficulties related to the large scale production and a relative high cost for the deposition of advanced structures, i.e. quantum wells and wires. Once these barriers are overcome, thin film technology will become more competitive for advanced technological applications.
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Tufail Chaudhary, Kashif. "Thin Film Deposition: Solution Based Approach." In Thin Films [Working Title]. IntechOpen, 2021. http://dx.doi.org/10.5772/intechopen.94455.

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The wet chemical processing opens the way to deposit thin film with the versatility and ease for a variety of materials. Liquid film deposition involves the application of a liquid precursor on a substrate which is then converted to the required coating material in a subsequent post-treatment step. Different non-vacuum solution based deposition techniques have been developed to grow thin films with high efficiency and functionality. Spin coating is one of an effective technique for thin film fabrication due to low cost, uniformity, less hazardous, and capability of easy scaling up. The typical process involves depositing a small amount of a fluid onto the center of a substrate and then spinning the substrate at high speed. Dip coating is another simple, cost effective route with feasibility to scale-up for commercial production. The dip coating process can be divided into three important technical stages, immersion, withdrawal and evaporation. The coating may be subjected to further heat treatment in order to burn out residual compounds and induce crystallization of the functional oxides. Spray coating is a promising technique to grow thin film in research and industry to prepare thin and thick films. It is an easy approach to fabricate thin film with uniform distribution at small scale from a few nanometers to micrometers in thickness. Inkjet printing is the emerging promising technique to develop large-scale, and flexible thin films. The inkjet printing process allow easy customization to grow variety of complex structures.
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Conference papers on the topic "Vacuum optical thin-film coating"

1

Tajima, Naoya, Hiroshi Murotani, Shigeharu Matumoto, and Hiromitu Honda. "Stress Control of an Optical Thin Film by Sputtering and Vacuum Deposition." In Optical Interference Coatings. Washington, D.C.: OSA, 2016. http://dx.doi.org/10.1364/oic.2016.wb.9.

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kaite, takashi. "The mechanical properties of the SiO2 optical thin film produced by compound film formation of sputtering and vacuum deposition." In Optical Interference Coatings. Washington, D.C.: OSA, 2013. http://dx.doi.org/10.1364/oic.2013.wa.6.

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Davis, John. "Particle Monitoring and Control Prior to Coating Optical Thin Films." In 61st Society of Vacuum Coaters Annual Technical Conference. Society of Vacuum Coaters, 2018. http://dx.doi.org/10.14332/svc18.proc.0008.

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Drobotun, Valery, and Andrei Rozov. "Bias-Corrected Optical Measurement of Film Thickness for Vacuum Evaporation Coating." In 2020 International Russian Automation Conference (RusAutoCon). IEEE, 2020. http://dx.doi.org/10.1109/rusautocon49822.2020.9208188.

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Prosovskiy, Yuriy, Dmitriy Denisov, Oleg Prosovskiy, and Aleksandr Budnev. "Direct monochromatic optic control system of the thickness of thin-film interference coatings applied in vacuum." In Optical Measurement Systems for Industrial Inspection XI, edited by Peter Lehmann, Wolfgang Osten, and Armando Albertazzi Gonçalves. SPIE, 2019. http://dx.doi.org/10.1117/12.2525853.

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Oh, Sang Hyun, Sung Il Kim, Ki Ho Park, and Byeong Hyeok Yu. "A Numerical Study on Improvement of Coating Uniformity by Controlling the Pressure at the Exit of the Slot Die Nozzle." In ASME-JSME-KSME 2019 8th Joint Fluids Engineering Conference. American Society of Mechanical Engineers, 2019. http://dx.doi.org/10.1115/ajkfluids2019-5139.

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Abstract In this study, numerical analysis was carried out to investigate the effects of slot die nozzle exit rear pressure on coating uniformity improvement in coating nozzles which are widely used in industry. Coating uniformity in coatings of viscosity materials such as inks and surface coating solutions is closely related to the quality of the product. Especially, coating uniformity is an important performance indicator for slot die coatings, which are used primarily in the production of optical or chemical products such as displays, touch screens, solar panels, and batteries. In general, the average thickness of a thin film in a slot die coating is determined by the supply flow rate and the moving speed of the plate. However, due to various parameters, thickness irregularities and coating defects due to pores occur locally. Therefore, many studies have recently been performed to solve the local defect of the slot die coating. In order to improve the coating uniformity, this study applied the vacuum pressure condition to the slot die nozzle rear end and numerical study on the coating uniformity according to the vacuum pressure was carried out. The numerical analysis proceeded to 2-D, unsteady condition and the VOF method. A commercial numerical simulation software (STAR-CCM+ V.12.06) was used. It was simulated that the coating liquid was supplied onto the moving plate surface. The moving plate speed was fixed 0.01m/s. The nozzle geometry simulates a slot die nozzle. And the coating raw material supply flow rate was considered for two conditions (0.005, 0.006m/s). Two vacuum pressure conditions (−3, −300Pa) were applied to the rear end of the nozzle. The viscosity of the viscous material was fixed at 2 Pa.s. The analysis results were analyzed through the uniformity of the material supplied to the surface. As a result of analysis, uniformity of coating was lowered regardless of the velocity when the vacuum pressure condition was −3.0 Pa, and uniformity was lowered as the velocity increased. However, it was confirmed that uniformity of the coating was increased at all velocity condition when the vacuum pressure condition was −300 Pa. This is because as the flat plate moves, the reverse pressure is applied to the downstream of the coating solution, thereby improving the uniformity of the coating liquid flowing through the flat plate and preventing the inflow of air or the like. Through this study, it was confirmed that the coating uniformity can be improved by controlling the vacuum pressure at the rear end of the nozzle.
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Willey, Ronald R. "Generating Index versus Thickness Data for Modern Coating Chambers and Designing Optical Thin Films with the Data Thus Generated." In 62nd Society of Vacuum Coaters Annual Technical Conference. Society of Vacuum Coaters, 2019. http://dx.doi.org/10.14332/svc19.proc.0056.

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Smilgys, Russell V., Steven P. Wallace, and Cheryl E. Kennedy. "Progress Toward Roll Processing of Solar Reflective Material." In ASME 2001 Solar Engineering: International Solar Energy Conference (FORUM 2001: Solar Energy — The Power to Choose). American Society of Mechanical Engineers, 2001. http://dx.doi.org/10.1115/sed2001-101.

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Abstract The goal of this work is to demonstrate that high performance solar reflective material can be produced in a roll format using vacuum deposition techniques. The material consists of a multilayer thin film stack on a substrate. The essential feature of the film stack is an alumina film several microns thick deposited over a silver film. The alumina film is deposited under high vacuum using a physical vapor deposition technique called ion beam assisted deposition (IBAD). The alumina film is optically transparent, scratch resistant, and durable. Its purpose is to protect the silver film and maintain high optical reflectance. Work on this reflective material began five years ago. Samples were produced on polyester substrates by batch coating. Those samples showed excellent durability in accelerated testing at the National Renewable Energy Laboratory (NREL) in Golden Colorado. The principal limitation to commercialization of the process was a low alumina deposition rate. Over the past three years the alumina deposition rate has been increased from 1 nm/s to 20 nm/s. The next step is to produce material in a roll format. A roll coater has been built to process 30.48-cm wide rolls of solar reflective material. A steel strip with a highly specular surface finish will be used as the web material. The advantage of this material compared to polyester is that it withstands a higher process temperature and lowers final product installation costs. A major technical challenge will be to reproduce high reflector durability in a continuous, high rate process.
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Wada, Tatsuo, Masahiro Hosoda, Anthony F. Garito, Hiroyuki Sasabe, A. Terasaki, Takayoshi Kobayashi, Hiroaki Tada, and Atsushi Koma. "Third-order optical nonlinearities and femtosecond responses in metallophthalocyanine thin films made by vacuum deposition, molecular beam epitaxy, and spin coating." In San Diego, '91, San Diego, CA, edited by Kenneth D. Singer. SPIE, 1991. http://dx.doi.org/10.1117/12.50715.

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10

Macleod, H. Angus. "Optical thin film coating design." In Optical Instrumentation & Systems Design. SPIE, 1996. http://dx.doi.org/10.1117/12.246804.

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