Journal articles: 'Transparent MEMS'

1

Taii, Yusuke, Akio Higo, Hiroyuki Fujita, and Hiroshi Toshiyoshi. "A transparent sheet display by plastic MEMS." Journal of the Society for Information Display 14, no. 8 (2006): 735. http://dx.doi.org/10.1889/1.2336101.

Full text

APA, Harvard, Vancouver, ISO, and other styles

2

Williams, John D., C. Schmidt, and D. Serkland. "Processing advances in transparent Foturan® MEMS." Applied Physics A 99, no. 4 (May 14, 2010): 777–82. http://dx.doi.org/10.1007/s00339-010-5721-1.

Full text

APA, Harvard, Vancouver, ISO, and other styles

3

Tunes, Matheus A., Cameron R. Quick, Lukas Stemper, Diego S. R. Coradini, Jakob Grasserbauer, Phillip Dumitraschkewitz, Thomas M. Kremmer, and Stefan Pogatscher. "A Fast and Implantation-Free Sample Production Method for Large Scale Electron-Transparent Metallic Samples Destined for MEMS-Based In Situ S/TEM Experiments." Materials 14, no. 5 (February 26, 2021): 1085. http://dx.doi.org/10.3390/ma14051085.

Full text

Abstract:

Microelectromechanical systems (MEMS) are currently supporting ground-breaking basic research in materials science and metallurgy as they allow in situ experiments on materials at the nanoscale within electron microscopes in a wide variety of different conditions such as extreme materials dynamics under ultrafast heating and quenching rates as well as in complex electro-chemical environments. Electron-transparent sample preparation for MEMS e-chips remains a challenge for this technology as the existing methodologies can introduce contaminants, thus disrupting the experiments and the analysis of results. Herein we introduce a methodology for simple and fast electron-transparent sample preparation for MEMS e-chips without significant contamination. The quality of the samples as well as their performance during a MEMS e-chip experiment in situ within an electron microscope are evaluated during a heat treatment of a crossover AlMgZn(Cu) alloy.

APA, Harvard, Vancouver, ISO, and other styles

4

Xu, Xiang-Yuan, Hao Ge, Jing Zhao, Zhi-Fei Chen, Jun Zhang, Ming-Hui Lu, Ming Bao, Yan-Feng Chen, and Xiao-Dong Li. "A monolithic three-dimensional thermal convective acoustic vector sensor with acoustic-transparent heat sink." JASA Express Letters 2, no. 4 (April 2022): 044001. http://dx.doi.org/10.1121/10.0010275.

Full text

Abstract:

An acoustic vector sensor can directly detect acoustic particle velocity based on the measured temperature difference between closely spaced heated wires. For the detection of velocity in three dimensions, an integrated three-dimensional (3 D) sensor is desired, but it remains challenging in MEMS (Micro-Electro-Mechanical System) manufacturing. Here, a novel monolithic 3 D acoustic vector sensor is proposed, which is constructed using in-plane distributed wires assembled with acoustically transparent heat sink. The planar MEMS structure of the proposed sensor makes it easy to be fabricated and packaged. This work offers a new method for the design of acoustic vector sensors and other thermal convection-based MEMS sensors.

APA, Harvard, Vancouver, ISO, and other styles

5

Huang, Qinwen, Xianshan Dong, Wei Cui, Yun Huang, Ping Lai, Shaohua Yang, and Yunhui Wang. "Hermeticity evaluation of MEMS wafer packages by Raman spectroscopy." International Journal of Modern Physics B 34, no. 11 (April 30, 2020): 2050107. http://dx.doi.org/10.1142/s0217979220501076.

Full text

Abstract:

Hermeticity of MEMS wafer packaging has a major impact on the performance and reliability of MEMS devices. The test for hermeticity is usually based on the test method from MIL-STD-883. However, both theory and experiment have shown that this test standard has great limitations for MEMS wafer cavities. Raman spectroscopy has also been used to obtain the quantitative and qualitative information about the molecular composition in the small cavity of MEMS packages and then determine the leak rate of MEMS packages. However, this method is reliant on the package cap being transparent to the probing light and requires a reflective surface. In this paper, the Raman spectroscopy is used to obtain the stress of the surface of the package cap and from the information of stress change to infer the change of the gas pressure in the vacuum encapsulation cavity. The results have shown that the lower the gas pressure in the cavity, the larger the tensile stress; When packaged in the atmosphere, the sample cap has shown a compressive stress (corresponding to the reference), which may result from fabrication process. Based on this method, there is no need to use a transparent package cap, and there is no special requirement for the roughness of the cap surface. Compared with the optical deformation test, this method can directly obtain the surface stress information of the cover without knowing the relevant geometric parameters of the MEMS structure.

APA, Harvard, Vancouver, ISO, and other styles

6

Krauter, Johann, Jonas Stark, and Wolfgang Osten. "Topografiemessung an verkapselten mikroelektromechanischen Systemen mittels Kurzkohärenz-Interferometrie." tm - Technisches Messen 86, no. 6 (May 26, 2019): 309–18. http://dx.doi.org/10.1515/teme-2019-0018.

Full text

Abstract:

ZusammenfassungMikroelektromechanische Systeme (MEMS) werden heute in einer Vielzahl von Anwendungen eingesetzt. Zur Herstellung von MEMS werden üblicherweise fotolithografische Verfahren eingesetzt. Insbesondere bei sicherheitsrelevanten MEMS, wie z. B. Airbag- oder ESP-Sensoren, ist eine 100 % Inspektion erforderlich. Nach einer optischen Inspektion der MEMS-Strukturen werden diese durch das Bonden eines Silizium-Kappenwafers geschützt. Dieses Bonding oder das anschließende Packaging kann zu einer zusätzlichen Spannung im Waferstapel führen, die die MEMS-Funktion negativ beeinflussen kann. Im Falle eines fehlgeschlagenen elektronischen Tests kann das Problem nicht lokalisiert werden, da der Kappenwafer für die gängigen optischen Oberflächensensoren undurchsichtig ist. In dieser Publikation wird die Herausforderung der optischen Topografiemessung von verkapselten MEMS-Strukturen diskutiert. Dabei werden Defekte wie Verbiegung oder Festklemmen einzelner MEMS-Finger betrachtet. Für diese Messaufgabe wird ein kurzkohärentes Interferenzmikroskop implementiert. Die Wellenlänge liegt im Short-Wave Infrarot (SWIR), da Silizium im Infraroten transparent wird. Die interferometrische Oberflächenmessung der MEMS-Strukturen wird durch den Kappenwafer stark beeinflusst. Hierfür wurden Simulationen durchgeführt, die die systematischen Messabweichungen aufgrund der Kappe zeigen. Eine Möglichkeit zur Korrektur und Reduzierung der systematischen Abweichungen wird ebenfalls beschrieben.

APA, Harvard, Vancouver, ISO, and other styles

7

Middelburg, Luke M., Mohammadamir Ghaderi, David Bilby, Jaco H. Visser, Guo Qi Zhang, Per Lundgren, Peter Enoksson, and Reinoud F. Wolffenbuttel. "Maintaining Transparency of a Heated MEMS Membrane for Enabling Long-Term Optical Measurements on Soot-Containing Exhaust Gas." Sensors 20, no. 1 (December 18, 2019): 3. http://dx.doi.org/10.3390/s20010003.

Full text

Abstract:

Ensuring optical transparency over a wide spectral range of a window with a view into the tailpipe of the combustion engine, while it is exposed to the harsh environment of soot-containing exhaust gas, is an essential pre-requisite for introducing optical techniques for long-term monitoring of automotive emissions. Therefore, a regenerable window composed of an optically transparent polysilicon-carbide membrane with a diameter ranging from 100 µm up to 2000 µm has been fabricated in microelectromechanical systems (MEMS) technology. In the first operating mode, window transparency is periodically restored by pulsed heating of the membrane using an integrated resistor for heating to temperatures that result in oxidation of deposited soot (600–700 °C). In the second mode, the membrane is kept transparent by repelling soot particles using thermophoresis. The same integrated resistor is used to yield a temperature gradient by continuous moderate-temperature heating. Realized devices have been subjected to laboratory soot exposure experiments. Membrane temperatures exceeding 500 °C have been achieved without damage to the membrane. Moreover, heating of membranes to ΔT = 40 °C above gas temperature provides sufficient thermophoretic repulsion to prevent particle deposition and maintain transparency at high soot exposure, while non-heated identical membranes on the same die and at the same exposure are heavily contaminated.

APA, Harvard, Vancouver, ISO, and other styles

8

Liu, Mengran, Ze ming Jian, Guojun Zhang, Nan Guo, and Wendong Zhang. "Design of MEMS bionic vector hydrophone based on NBR sound-transparent cap." Sensor Review 35, no. 3 (June 15, 2015): 303–9. http://dx.doi.org/10.1108/sr-11-2014-0744.

Full text

Abstract:

Purpose – The purpose of this paper is to present a novel nitrile butadiene rubber (NBR) packaging structure, which can solve the problems of the low sensitivity, narrow frequency band and fluctuating frequency response curve of the MEMS bionic vector hydrophone. Design/methodology/approach – A 0.05-mm-thick NBR sound-transparent cap was designed by theoretical analysis and simulation to reduce the signal attenuation caused by the packaging structure, and the frequency band of the hydrophone has been extended to 4 kHz. In this work, the vector hydrophone was fabricated by the MEMS technology and packaged with the NBR sound-transparent cap. The performance indicators were calibrated in the National Defence Underwater Acoustics Calibration Laboratory of China. Findings – The results show that the sensitivity of NBR-packaged hydrophone reaches −170 dB (±2 dB), and the difference is less than 1 dB compared to bare chip. And the frequency band is 50 Hz-4 kHz. The hydrophone also has good directional pattern in the form of an 8-shape, and the pressure-resisting ability is more than 2 MPa. Originality/value – The packaging structure significantly increases the sensitivity of the hydrophone and broadens the frequency band, providing a new method in the packaging design for MEMS hydrophone.

APA, Harvard, Vancouver, ISO, and other styles

9

Taii, Y., A. Higo, H. Fujita, and H. Toshiyoshi. "Transparent color pixels using plastic MEMS technology for electronic papers." IEICE Electronics Express 3, no. 6 (2006): 97–101. http://dx.doi.org/10.1587/elex.3.97.

Full text

APA, Harvard, Vancouver, ISO, and other styles

10

Kleimanov, R., I. Komarevtsev, Y. Enns, Y. Akulshin, A. Korshunov, A. Shashkin, D. Arefiev, and A. Kazakin. "Lithium aluminosilicate glass-ceramics for low-temperature anodic sealing of MEMS sensors." Journal of Physics: Conference Series 2086, no. 1 (December 1, 2021): 012184. http://dx.doi.org/10.1088/1742-6596/2086/1/012184.

Full text

Abstract:

Abstract The results of a study of the anodic bonding parameters of transparent glass-ceramics based on lithium aluminosilicates which are promising as structural materials of MEMS and MOEMS sensors are presented. A comparison of the optical transmittance of these materials and classical for MEMS industry glasses has been carried out. The glass-ceramics electrical conductivity in a wide temperature range has been measured. The procedure of hermetic sealing of glass-ceramics by the anodic bonding at temperatures of 150 – 250 °C has been worked out. A prototype of glass-ceramic atomic cell has been fabricated.

APA, Harvard, Vancouver, ISO, and other styles

11

Schmidt, M., S. Zinober, R. Müller-Fiedler, C. Müller, and H. Reinecke. "Gas diffusion barrier layers for transparent polymer packages for optical MEMS." Procedia Chemistry 1, no. 1 (September 2009): 1523–26. http://dx.doi.org/10.1016/j.proche.2009.07.380.

Full text

APA, Harvard, Vancouver, ISO, and other styles

12

Fior, R., S. Maggiolino, M. Lazzarino, and O. Sbaizero. "A new transparent Bio-MEMS for uni-axial single cell stretching." Microsystem Technologies 17, no. 10-11 (August 23, 2011): 1581–87. http://dx.doi.org/10.1007/s00542-011-1325-8.

Full text

APA, Harvard, Vancouver, ISO, and other styles

13

TONOMURA, Wataru, Hitoshi OKAMURA, and Satoshi KONISHI. "2A2-O07 Transparent MEMS Device for Optical and Electrophysiological Cell Signal Detection." Proceedings of JSME annual Conference on Robotics and Mechatronics (Robomec) 2007 (2007): _2A2—O07_1—_2A2—O07_4. http://dx.doi.org/10.1299/jsmermd.2007._2a2-o07_1.

Full text

APA, Harvard, Vancouver, ISO, and other styles

14

Bedon, Chiara, Marco Fasan, and Salvatore Noè. "Body Motion Sensor Analysis of Human-Induced Dynamic Load Factor (DLF) for Normal Walks on Slender Transparent Floors." Journal of Sensor and Actuator Networks 11, no. 4 (November 28, 2022): 81. http://dx.doi.org/10.3390/jsan11040081.

Full text

Abstract:

Modern constructions are often characterized by the presence of slender and aesthetically fascinating components and assemblies. For pedestrian systems in particular, such constructions are notoriously associated with possible vibration issues, and thus require special calculations. When these slender systems are made of structural glass, additional effects due to transparency may also affect human behaviours and motions. In this paper, based on a single body motion, a microelectromechanical system (MEMS) sensor in the body’s centre of mass (CoM) is introduced, an extended, original experimental investigation is presented, and human-induced effects on slender transparent floors are discussed. Major attention is given to the well-known dynamic load factor (DLF) induced by a single pedestrian’s normal walk; a fixed walking rate is assigned, and different substructures (with major variations in their structural dynamic parameters) are taken into account. A discussion of experimental results is proposed for rigid reinforced concrete (RC), and a laboratory contrast system (SLAB#1), which is used as a reference for the analysis of DLF trends on relatively light and flexible transparent glass flooring systems (SLAB#2 and SLAB#3). It is shown that structural frequency and mass, but also possibly transparency, can affect human motion and result in a quantitative modification of measured DLF values, especially for the first and second harmonics of vertical force components.

APA, Harvard, Vancouver, ISO, and other styles

15

Vijayan, Sriram, Joerg R. Jinschek, Stephan Kujawa, Jens Greiser, and Mark Aindow. "Focused Ion Beam Preparation of Specimens for Micro-Electro-Mechanical System-based Transmission Electron Microscopy Heating Experiments." Microscopy and Microanalysis 23, no. 4 (June 5, 2017): 708–16. http://dx.doi.org/10.1017/s1431927617000605.

Full text

Abstract:

AbstractMicro-electro-mechanical systems (MEMS)-based heating holders offer exceptional control of temperature and heating/cooling rates for transmission electron microscopy experiments. The use of such devices is relatively straightforward for nano-particulate samples, but the preparation of specimens from bulk samples by focused ion beam (FIB) milling presents significant challenges. These include: poor mechanical integrity and site selectivity of the specimen, ion beam damage to the specimen and/or MEMS device during thinning, and difficulties in transferring the specimen onto the MEMS device. Here, we describe a novel FIB protocol for the preparation and transfer of specimens from bulk samples, which involves a specimen geometry that provides mechanical support to the electron-transparent region, while maximizing the area of that region and the contact area with the heater plate on the MEMS chip. The method utilizes an inclined stage block that minimizes exposure of the chip to the ion beam during milling. This block also allows for accurate and gentle placement of the FIB-cut specimen onto the chip by using simultaneous electron and ion beam imaging during transfer. Preliminary data from Si and Ag on Si samples are presented to demonstrate the quality of the specimens that can be obtained and their stability during in situ heating experiments.

APA, Harvard, Vancouver, ISO, and other styles

16

Hung, Chen-Chun, Jin-Chern Chiou, and Chih-Wei Chang. "Transparent microprobe array fabricated by MEMS hot embossing technology for photodynamic therapy application." IEICE Electronics Express 7, no. 9 (2010): 569–76. http://dx.doi.org/10.1587/elex.7.569.

Full text

APA, Harvard, Vancouver, ISO, and other styles

17

Agarwal, Rahul, Scott Samson, Sunny Kedia, and Shekhar Bhansali. "Fabrication of Integrated Vertical Mirror Surfaces and Transparent Window for Packaging MEMS Devices." Journal of Microelectromechanical Systems 16, no. 1 (February 2007): 122–29. http://dx.doi.org/10.1109/jmems.2006.886010.

Full text

APA, Harvard, Vancouver, ISO, and other styles

18

Hsueh, Ting-Jen, Chien-Hua Peng, and Wei-Shou Chen. "A transparent ZnO nanowire MEMS gas sensor prepared by an ITO micro-heater." Sensors and Actuators B: Chemical 304 (February 2020): 127319. http://dx.doi.org/10.1016/j.snb.2019.127319.

Full text

APA, Harvard, Vancouver, ISO, and other styles

19

Fior, Raffaella, Jeanie Kwok, Francesca Malfatti, Orfeo Sbaizero, and Ratnesh Lal. "Biocompatible Optically Transparent MEMS for Micromechanical Stimulation and Multimodal Imaging of Living Cells." Annals of Biomedical Engineering 43, no. 8 (December 31, 2014): 1841–50. http://dx.doi.org/10.1007/s10439-014-1229-8.

Full text

APA, Harvard, Vancouver, ISO, and other styles

20

Haque, M. A., and M. T. A. Saif. "In situ Tensile Testing of Nanoscale Freestanding Thin Films Inside a Transmission Electron Microscope." Journal of Materials Research 20, no. 7 (July 1, 2005): 1769–77. http://dx.doi.org/10.1557/jmr.2005.0220.

Full text

Abstract:

The unique capability of rendering opaque specimens transparent with atomic resolution makes transmission electron microscopy (TEM) an indispensable toolfor microstructural and crystallographic analysis of materials. Conventional TEM specimens are placed on grids about 3 mm in diameter and 10–100 μm thick. Such stringent size restriction has precluded mechanical testing inside the TEM chamber.So far, in situ testing of nanoscale thin foils has been mostly qualitative. Micro-electro-mechanical systems (MEMS) offer an unprecedented level of miniaturization to realize sensors and actuators that can add TEM visualization to nano-mechanical characterization. We present a MEMS-based uniaxial tensile experiment setup that integrates nanoscale freestanding specimens with force and displacement sensors, which can be accommodated by a conventional TEM straining stage. In situ TEM testing on 100-nm-thick freestanding aluminum specimens (with simultaneous stress measurement) show limited dislocation activity in the grain interior and consequent brittle mode of fracture. Plasticity at this size scale is contributed by grain boundary dislocations and partial dislocations.

APA, Harvard, Vancouver, ISO, and other styles

21

Zhou, Xiaodong, Daniel Puiu Poenar, Kai Yu Liu, Man Siu Tse, Chew-Kiat Heng, and Swee Ngin Tan. "Design of MEMS devices with optical apertures for the detection of transparent biological cells." Biomedical Microdevices 10, no. 5 (April 29, 2008): 639–52. http://dx.doi.org/10.1007/s10544-008-9175-6.

Full text

APA, Harvard, Vancouver, ISO, and other styles

22

Horade, M., K. Yamada, T. Yamawaki, and M. Yashima. "Research on fabrication method for floating structures using general photolithography with high versatility." Journal of Micromechanics and Microengineering 31, no. 12 (October 25, 2021): 125004. http://dx.doi.org/10.1088/1361-6439/ac2d9b.

Full text

Abstract:

Abstract This research reports a micro-fabrication method for plastic microscale structures. Although a stepped shape, such as a cantilever, can be fabricated by micro electro mechanical systems (MEMS) deep etching technology, its disadvantages include the complicated fabrication process and its limited utilization with silicon only. Therefore, in this study, with an aim to address the aforementioned problems, we have realized the fabrication of a multi-stage structure using just a general photolithography process with high versatility. Specifically, it can be manufactured using only SU-8 resist and AZ resist, which are often used in the MEMS process. The AZ resist has the advantage of dissolving in the developer of the SU-8 resist, whether exposed or non-exposed. Thus, the sacrificial layer of AZ resist can be implemented with the SU-8 developer, thereby eliminating the need for dangerous chemicals such as hydrofluoric acid, which is used to etch silicon oxide. Herein, we have derived the optimum conditions by considering in advance the thickness of the AZ resist, the time taken to be etched in SU-8, and the desired features. Based on these optimum processing conditions, the structure could be suspended only in the region where the hole array was patterned. Although methods of using AZ resist as a sacrificial layer and floating SU-8 have been reported, in this study, both floating and fixed structures could be simultaneously fabricated by photolithography only. Accordingly, we successfully manufactured a gear structure and a MEMS sensor, both of which have floating and fixed structures. The above structures are made of highly transparent SU-8 on a glass substrate; hence, they are easily observable with a microscope. The reason for the widespread use of polydimethylsiloxane micro-channels is that they are transparent materials that can be observed under a microscope and fabricated by simple photolithography of the SU-8 resist, enabling non-microfabrication specialists to enter this field. These findings have the potential to form the foundation for developing new biochemical tests, such as actuators and sensors driven under a microscope.

APA, Harvard, Vancouver, ISO, and other styles

23

Son, Dong Il, Jong Jin Kim, and Dong Il Kwon. "Fracture Behavior of Single- and Polycrystalline Silicon Films for MEMS Applications." Key Engineering Materials 297-300 (November 2005): 551–56. http://dx.doi.org/10.4028/www.scientific.net/kem.297-300.551.

Full text

Abstract:

Fracture behaviors of silicon films were evaluated by microtensile methods. We fabricated two types of specimens using surface micromachining, one for a test device for microtensile testing only and the other for a microtensile-compatible resonating device driven by alternating electrostatic force. The piezoelectric-driven uniaxial stress-strain measurement system was designed to evaluate the mechanical properties of thin films. We used UV adhesive to grip the device to the microtensile system, and the grip was made of UV-transparent glass in order to cure the underlying UV adhesive layer. To assess fracture toughness, we used newly proposed methods combining resonance frequency and microtensile methods. The fracture strength of single- and polycrystalline silicon showed dependence on geometry and doping condition. By varying the geometry, we analyzed the effect of the CMP side and the dry-etched side on changes in the mean fracture strength. Atomic force microscopy observation showed that the larger flaws of the dry-etched side were significant in decreasing the mean fracture strength. Fracture toughness based on fracture mechanics with a precrack was evaluated by newly proposed methods combining resonance frequency and microtensile techniques. The measured toughness was independent of specimen geometry but dependent on doping condition. The measured fracture toughness of notched specimens was 33% higher than that of pre-cracked specimens, even though the notch radius was as small as 1.4µm. The effects of notch-tip radius and doping on fracture toughness of silicon film were also analyzed.

APA, Harvard, Vancouver, ISO, and other styles

24

Rezadad, Imen, Javaneh Boroumand, Evan Smith, Pedro Figueiredo, and Robert E. Peale. "Stress Analysis of Free-Standing Silicon Oxide Films Using Optical Interference." MRS Proceedings 1536 (2013): 155–60. http://dx.doi.org/10.1557/opl.2013.910.

Full text

Abstract:

ABSTRACTWe report a method for stress measurement and analysis in silicon oxide thin films using optical interference. Effects of design and fabrication on stress have been studied by fabricating submicron-thick slabs of oxide anchored at one end and extending over a reflective surface. Optical interference occurs between reflections from the surface and the oxide slab, giving rise to light and dark fringes that may be imaged with a microscope. Analysis of the interference pattern at different wavelengths gives the radius of curvature and means of stress mapping. The accuracy exceeds non-interferometric profilometry using optical or confocal microscopes, and it can be more quantitative than scanning electron microscopy. This nondestructive profilometry method can aid the stress optimization of silicon oxide or other transparent thin films to achieve specific mechanical characteristics in MEMS devices.

APA, Harvard, Vancouver, ISO, and other styles

25

Fang, Yu Ming, and Jun Jian Qie. "A Model for the Pull-In Parameters of Magnetostatic Actuators with Fringing Effect." Applied Mechanics and Materials 432 (September 2013): 229–34. http://dx.doi.org/10.4028/www.scientific.net/amm.432.229.

Full text

Abstract:

Predicting Pull-In parameters is crucial in the design of MEMS actuators. In the past, the Pull-In parameters of magnetostatic actuators with the fringing field effect are often estimated using finite element method (FEM). However, FEM is cumbersome, time consuming and non-transparent, which is not convenient for the design optimization. Usually, there are a simple analytical model without leakage reluctance and a detailed analytical model with leakage reluctance respectively. This paper used the two models to derive the Pull-In model of magnetostatic actuators respectively. The accuracy of the two Pull-In models is examined by comparing their results with the FEM results. Simulation results show that the Pull-In model without leakage reluctance is unsuitable to predict Pull-In parameters. The Pull-In model with leakage reluctance has shown a good agreement with the FEM results for a wide range of gap spacing.

APA, Harvard, Vancouver, ISO, and other styles

26

Pilloni, Oscar, Marc Madou, Doroteo Mendoza, Stephen Muhl, and Laura Oropeza-Ramos. "Methodology and fabrication of adherent and crack-free SU-8 photoresist-derived carbon MEMS on fused silica transparent substrates." Journal of Micromechanics and Microengineering 29, no. 2 (January 11, 2019): 027002. http://dx.doi.org/10.1088/1361-6439/aaf70f.

Full text

APA, Harvard, Vancouver, ISO, and other styles

27

Wang, Ke, Jianhua Chen, Jiao Li, Enyi Chu, Peng Zhu, and Ruiqi Shen. "Strategy for driving high velocity flyer by coupling laser and electric explosion." Journal of Applied Physics 133, no. 5 (February 7, 2023): 053302. http://dx.doi.org/10.1063/5.0132564.

Full text

Abstract:

In this study, a novel high-speed flyer launching strategy based on electric explosion and laser coupling was proposed to improve the launching ability of electro-explosively actuators and expand the dynamic high-pressure loading method. First, an electro-explosively actuated flyer launcher with a transparent glass substrate was fabricated by microelectromechanical system (MEMS) scale methods, which acted as a carrier to verify the idea of electric explosion and laser coupling. Then, a device of electric explosion combined with laser driving high-speed flyers was established to study the influence of nanosecond pulsed laser on the flyer launching ability of electro-explosively actuators. Finally, the velocity characteristics of the flyer and the plasma characteristics under coupled conditions are studied. The test results indicated that the introduction of laser had a positive effect on increasing the speed of the flyer. In addition, it was found that the acceleration history of the flyer is affected by the energy of electric explosion, laser energy, and the introduction time of laser.

APA, Harvard, Vancouver, ISO, and other styles

28

Saeidi, Parviz, Bernhard Jakoby, Gerald Pühringer, Andreas Tortschanoff, Gerald Stocker, Jasmin Spettel, Thomas Grille, and Reyhaneh Jannesari. "Numerical analysis of an infrared gas sensor utilizing an indium-tin-oxide-based plasmonic slot waveguide." Journal of Sensors and Sensor Systems 11, no. 1 (January 14, 2022): 15–20. http://dx.doi.org/10.5194/jsss-11-15-2022.

Full text

Abstract:

Abstract. Plasmonic waveguides have attracted much attention owing to the associated high field intensity at the metal–dielectric interface and their ability to confine the modes at the nanometer scale. At the same time, they suffer from relatively high propagation loss, which is due to the presence of metal. Several alternative materials have been introduced to replace noble metals, such as transparent conductive oxides (TCOs). A particularly popular TCO is indium tin oxide (ITO), which is compatible with standard microelectromechanical systems (MEMS) technology. In this work, the feasibility of ITO as an alternative plasmonic material is investigated for infrared absorption sensing applications: we numerically design and optimize an ITO-based plasmonic slot waveguide for a wavelength of 4.26 µm, which is the absorption line of CO2. Our optimization is based on a figure of merit (FOM), which is defined as the confinement factor divided by the imaginary part of the effective mode index (i.e., the intrinsic damping of the mode). The obtained optimal FOM is 3.2, which corresponds to 9 µm and 49 % for the propagation length (characterizing the intrinsic damping) and the confinement factor, respectively.

APA, Harvard, Vancouver, ISO, and other styles

29

TAKAGI, Nobuyuki, Shuichi WAKAYAMA, Akihiro MIZUTANI, Takenobu SAKAI, Tsutomu MIYASAKA, and Masashi IKEGAMI. "220304 Evaluation of the Mechanical Damage Accumulation in Transparent Conductive Oxide Film using Acoustic Emission." Proceedings of Conference of Kanto Branch 2011.17 (2011): 567–68. http://dx.doi.org/10.1299/jsmekanto.2011.17.567.

Full text

APA, Harvard, Vancouver, ISO, and other styles

30

Roozeboom, F., M. Smets, B. Kniknie, M. Hoppenbrouwers, G. Dingemans, W. Keuning, W. M. M. Kessels, R. Pohl, and A. J. Huis in't Veld. "Alternative technology concepts for low-cost and high-speed 2D and 3D interconnect manufacturing." International Symposium on Microelectronics 2013, no. 1 (January 1, 2013): 000001–6. http://dx.doi.org/10.4071/isom-2013-ta11.

Full text

Abstract:

The current industrial process of choice for Deep Reactive Ion Etching (DRIE) of 3D features, e.g. Through-Silicon Vias (TSVs), Microelectromechanical Systems (MEMS), etc., is the Bosch process, which uses alternative SF6 etch cycles and C4F8-based sidewall passivation cycles in a time-sequenced mode. An alternative, potentially faster and more accurate process is to have wafers pass under spatially-divided reaction zones, which are individually separated by so-called N2-gas bearings ‘curtains’ of heights down to 10–20 μm. In addition, the feature sidewalls can be protected by replacing the C4F8-based sidewall passivation cycles by cycles forming chemisorbed and highly uniform passivation layers of Al2O3 or SiO2 deposited by Atomic Layer Deposition (ALD), also in a spatially-divided mode. ALD is performed either in thermal mode, or plasma-assisted mode in order to achieve near room-temperature processing. For metal filling of 3D-etched TSVs, or for deposition of 2D metal conductor lines one can use Laser-Induced Forward Transfer (LIFT) of metals. LIFT is a maskless, ‘solvent’-free deposition method, utilizing different types of pulsed lasers to deposit thin material (e.g. Cu, Au, Al, Cr) layers with μm-range resolution from a transparent carrier (ribbon) onto a close-by acceptor substrate. It is a dry, single-step, room temperature process in air, suitable for different types of interconnect fabrication, e.g. TSV filling and redistribution layers (RDL), without the use of wet chemistry.

APA, Harvard, Vancouver, ISO, and other styles

31

Ryynänen, Tomi, Ropafadzo Mzezewa, Ella Meriläinen, Tanja Hyvärinen, Jukka Lekkala, Susanna Narkilahti, and Pasi Kallio. "Transparent Microelectrode Arrays Fabricated by Ion Beam Assisted Deposition for Neuronal Cell In Vitro Recordings." Micromachines 11, no. 5 (May 14, 2020): 497. http://dx.doi.org/10.3390/mi11050497.

Full text

Abstract:

Microelectrode array (MEA) is a tool used for recording bioelectric signals from electrically active cells in vitro. In this paper, ion beam assisted electron beam deposition (IBAD) has been used for depositing indium tin oxide (ITO) and titanium nitride (TiN) thin films which are applied as transparent track and electrode materials in MEAs. In the first version, both tracks and electrodes were made of ITO to guarantee full transparency and thus optimal imaging capability. In the second version, very thin (20 nm) ITO electrodes were coated with a thin (40 nm) TiN layer to decrease the impedance of Ø30 µm electrodes to one third (1200 kΩ → 320 kΩ) while maintaining (partial) transparency. The third version was also composed of transparent ITO tracks, but the measurement properties were optimized by using thick (200 nm) opaque TiN electrodes. In addition to the impedance, the optical transmission and electric noise levels of all three versions were characterized and the functionality of the MEAs was successfully demonstrated using human pluripotent stem cell-derived neuronal cells. To understand more thoroughly the factors contributing to the impedance, MEAs with higher IBAD ITO thickness as well as commercial sputter-deposited and highly conductive ITO were fabricated for comparison. Even if the sheet-resistance of our IBAD ITO thin films is very high compared to the sputtered one, the impedances of the MEAs of each ITO grade were found to be practically equal (e.g., 300–370 kΩ for Ø30 µm electrodes with 40 nm TiN coating). This implies that the increased resistance of the tracks, either caused by lower thickness or lower conductivity, has hardly any contribution to the impedance of the MEA electrodes. The impedance is almost completely defined by the double-layer interface between the electrode top layer and the medium including cells.

APA, Harvard, Vancouver, ISO, and other styles

32

Tian, Jinbi, Zexu Lin, Zhiyuan Chen, Sofian N. Obaid, Igor R. Efimov, and Luyao Lu. "Stretchable and Transparent Metal Nanowire Microelectrodes for Simultaneous Electrophysiology and Optogenetics Applications." Photonics 8, no. 6 (June 15, 2021): 220. http://dx.doi.org/10.3390/photonics8060220.

Full text

Abstract:

Recently developed optically transparent microelectrode technology provides a promising approach for simultaneous high-resolution electrical and optical biointerfacing with tissues in vivo and in vitro. A critically unmet need is designing high-performance stretchable platforms for conformal biointerfacing with mechanically active organs. Here, we report silver nanowire (Ag NW) stretchable transparent microelectrodes and interconnects that exhibit excellent electrical and electrochemical performance, high optical transparency, superior mechanical robustness and durability by a simple selective-patterning process. The fabrication method allows the direct integration of Ag NW networks on elastomeric substrates. The resulting Ag NW interface exhibits a low sheet resistance (Rsh) of 1.52–4.35 Ω sq−1, an advantageous normalized electrochemical impedance of 3.78–6.04 Ω cm2, a high optical transparency of 61.3–80.5% at 550 nm and a stretchability of 40%. The microelectrode arrays (MEAs) fabricated with this approach exhibit uniform electrochemical performance across all channels. Studies on mice demonstrate that both pristine and stretched Ag NW microelectrodes can achieve high-fidelity electrophysiological monitoring of cardiac activity with/without co-localized optogenetic pacing. Together, these results pave the way for developing stretchable and transparent metal nanowire networks for high-resolution opto-electric biointerfacing with mechanically active organs, such as the heart.

APA, Harvard, Vancouver, ISO, and other styles

33

Ferrara, Emilio, Onur Varol, Filippo Menczer, and Alessandro Flammini. "Detection of Promoted Social Media Campaigns." Proceedings of the International AAAI Conference on Web and Social Media 10, no. 1 (August 4, 2021): 563–66. http://dx.doi.org/10.1609/icwsm.v10i1.14772.

Full text

Abstract:

Information spreading on social media contributes to the formation of collective opinions. Millions of social media users are exposed every day to popular memes — some generated organically by grassroots activity, others sustained by advertising, information campaigns or more or less transparent coordinated efforts. While most information campaigns are benign, some may have nefarious purposes, including terrorist propaganda, political astroturf, and financial market manipulation. This poses a crucial technological challenge with deep social implications: can we detect whether the spreading of a viral meme is being sustained by a promotional campaign? Here we study trending memes that attract attention either organically, or by means of advertisement. We designed a machine learning framework capable to detect promoted campaigns and separate them from organic ones in their early stages. Using a dataset of millions of posts associated with trending Twitter hashtags, we prove that remarkably accurate early detection is possible, achieving 95% AUC score. Feature selection analysis reveals that network diffusion patterns and content cues are powerful early detection signals.

APA, Harvard, Vancouver, ISO, and other styles

34

Weaver, Isaac A., Austin W. Li, Brenda C. Shields, and Michael R. Tadross. "An open-source transparent microelectrode array." Journal of Neural Engineering 19, no. 2 (April 1, 2022): 024001. http://dx.doi.org/10.1088/1741-2552/ac620d.

Full text

Abstract:

Abstract Objective. The micro-electrode array (MEA) is a cell-culture surface with integrated electrodes used for assays of electrically excitable cells and tissues. MEAs have been a workhorse in the study of neurons and myocytes, owing to the scalability and millisecond temporal resolution of the technology. However, traditional MEAs are opaque, precluding inverted microscope access to modern genetically encoded optical sensors and effectors. Approach. To address this gap, transparent MEAs have been developed. However, for many labs, transparent MEAs remain out of reach due to the cost of commercially available products, and the complexity of custom fabrication. Here, we describe an open-source transparent MEA based on the OpenEphys platform (Siegle et al 2017 J. Neural Eng. 14 045003). Main results. We demonstrate the performance of this transparent MEA in a multiplexed electrical and optogenetic assay of primary rat hippocampal neurons. Significance. This open-source transparent MEA and recording platform is designed to be accessible, requiring minimal microelectrode fabrication or circuit design experience. We include low-noise connectors for seamless integration with the Intan Technologies headstage, and a mechanically stable adaptor conforming to the 24-well plate footprint for compatibility with most inverted microscopes.

APA, Harvard, Vancouver, ISO, and other styles

35

Fan, C. H., J. Sun, and J. P. Longtin. "Plasma Absorption of Femtosecond Laser Pulses in Dielectrics." Journal of Heat Transfer 124, no. 2 (October 22, 2001): 275–83. http://dx.doi.org/10.1115/1.1445135.

Full text

Abstract:

Dielectric (high bandgap) materials represent an important and diverse class of materials in micro and nanotechnology, including MEMS devices, biomedical and bioengineering systems, multilayer thin film coatings, fiber optics, etc. Micromachining dielectrics using ultrafast lasers is an exciting and promising new research area with many significant advantages, including precision material removal, negligible heating of the workpiece, micron and sub-micron-size feature fabrication, and high aspect ratio features. During ultrafast laser processing of dielectrics, the intense laser pulse ionizes the irradiated material and produces an optical breakdown region, or plasma, that is characterized by a high density of free electrons. These high-density electrons can efficiently absorb a large fraction of the laser irradiance energy, part of which will then be coupled into the bulk material, resulting in material removal through direct vaporization. The energy deposited into the material depends on the time and space-dependent breakdown region, the plasma rise time, and the plasma absorption coefficient. Higher coupling efficiency results in higher material removal rate; thus energy deposition is one of the most important issues for ultrafast laser materials processing, particularly for micron and sub-micron-scale laser materials processing. In the present work, a femtosecond breakdown model is developed to investigate energy deposition during ultrafast laser material interactions. One substantial contribution of the current work is that pulse propagation effects have been taken into account, which have been shown to become significant for pulse durations less than 10 ps. By accounting for the pulse propagation, the time and space-resolved plasma evolution can be characterized and used to determine the energy deposition through plasma absorption. With knowledge of the plasma absorption, changes in the pulse profile as it propagates in the focal region can be determined as well. Absorption of the laser pulse by plasma in water is compared with experimental data to validate the model, as water is a well characterized dielectric. The model, however, is also applicable to other transparent or moderately absorbing solid and liquid dielectric media during ultrafast laser-materials interactions.

APA, Harvard, Vancouver, ISO, and other styles

36

He, Xun J., Qi X. Ma, Peng Jia, Lei Wang, Teng Y. Li, Feng M. Wu, and Jiu X. Jiang. "Dynamic Manipulation of Electromagnetically Induced Transparency with MEMS Metamaterials." Integrated Ferroelectrics 161, no. 1 (March 24, 2015): 85–91. http://dx.doi.org/10.1080/10584587.2015.1036636.

Full text

APA, Harvard, Vancouver, ISO, and other styles

37

Wang Wei and Li Jiang. "LASER ASSEMBLY AND PACKAGING OF A MEMS DEVICE." EPH - International Journal of Science And Engineering 4, no. 1 (March 27, 2018): 27–31. http://dx.doi.org/10.53555/eijse.v4i1.153.

Full text

Abstract:

Integration of 3-D devices, IC or MEMS, often requires a handle wafer which is removed before final packaging of the devices. This process usually uses lapping, chemical etch or high temperature heating to de-bond the handle wafer. A new technique to release a Pyrex handle wafer using laser ablation is presented. Pulsed energy, from a 248nm excimer laser is delivered transparently through the Pyrex handle wafer. This causes delamination of the bonded silicon structures from the handle wafer. This technique offers fast throughput at chip and wafer levels and protects the fragile and delicate active devices from harsh physical, chemicals and potential thermal stresses. We present a method wherein the handle wafer used in 3-D assembly of a MEMS device was released using laser micromachining. A Pyrex handle wafer rigidly supports anisotropically etched, through-silicon wafer, vertical mirrors during thermo-compression bonding to active MEMS parts. After this first thermo-compression bond, the Pyrex handle wafer was lifted off using laser ablation, leaving clearance for additional bond steps, which includes additional components and a package frame. Multiple Au-Au thermo-compression bonds of vertical surfaces onto a single MEMS chip were performed, to assemble and package 3-D MEMS devices.

APA, Harvard, Vancouver, ISO, and other styles

38

Pitchappa, Prakash, Manukumara Manjappa, Chong Pei Ho, Ranjan Singh, Navab Singh, and Chengkuo Lee. "Active Control of Electromagnetically Induced Transparency Analog in Terahertz MEMS Metamaterial." Advanced Optical Materials 4, no. 4 (January 12, 2016): 541–47. http://dx.doi.org/10.1002/adom.201500676.

Full text

APA, Harvard, Vancouver, ISO, and other styles

39

Pasquarelli, Alberto, and Xuemei Wang. "Enhancing the Transparency of Highly Electroactive BNCD-MEAs." physica status solidi (a) 215, no. 22 (October 18, 2018): 1800211. http://dx.doi.org/10.1002/pssa.201800211.

Full text

APA, Harvard, Vancouver, ISO, and other styles

40

Stuckey, Heather. "The second step in data analysis: Coding qualitative research data." Journal of Social Health and Diabetes 03, no. 01 (June 2015): 007–10. http://dx.doi.org/10.4103/2321-0656.140875.

Full text

Abstract:

AbstractCoding is a process used in the analysis of qualitative research, which takes time and creativity. Three steps will help facilitate this process:1. Reading through the data and creating a storyline;2. Categorizing the data into codes; and3. Using memos for clarification and interpretation.Remembering the research question or storyline, while coding will help keep the qualitative researcher focused on relevant codes. A data dictionary can be used to define the meaning of the codes and keep the process transparent. Coding is done using either predetermined (a priori) or emergent codes, and most often, a combination of the two. By using memos to help clarify how the researcher is constructing the codes and his/her interpretations, the analysis will be easier to write in the end and have more consistency. This paper describes the process of coding and writing memos in the analysis of qualitative data related to diabetes research.

APA, Harvard, Vancouver, ISO, and other styles

41

Khatatneh, Ahmad Hamad. "Modal Existential Constructions in Modern Standard Arabic." Education and Linguistics Research 6, no. 1 (May 2, 2020): 151. http://dx.doi.org/10.5296/elr.v6i1.16787.

Full text

Abstract:

Modal existential wh-constructions can be associated with three different types of structures, namely, wh-constructions, existential constructions, and modal constructions, but also have their own unique features. Idiosyncratic though it may look, the structure is characterized cross-linguistically by several shared properties. In this paper, we aim to examine in detail the properties of these constructions in Modern Standard Arabic. We show that MECs in Modern Standard Arabic share the defining and universal properties found in MECs cross-linguistically. Furthermore, we find that MSA’s MECs differ in three tendencies, namely; the relative nature of the wh-word in MSA, syntactic transparency and sluicing confirming the assumption that a relativization strategy, as opposed to the interrogative strategy found in plenty of other languages, is the one available for MECs in Modern Standard Arabic. We argue that these differences are also related to the [Spec, FP] position occupied by the wh-word.

APA, Harvard, Vancouver, ISO, and other styles

42

Pharmer, Rebecca L., Christopher D. Wickens, and Benjamin A. Clegg. "When Transparency Fails: Compliance with Decision Support in Nautical Collision Avoidance." Proceedings of the Human Factors and Ergonomics Society Annual Meeting 66, no. 1 (September 2022): 397–401. http://dx.doi.org/10.1177/1071181322661321.

Full text

Abstract:

To attempt to counter uncalibrated compliance with an automated decision aid, the current study sought to introduce some level of transparency into the system’s recommendations. An experiment was conducted using a simple, simulated maritime collision avoidance task featuring an imperfect, but highly reliable, de-cision aid. Specifically, the aid’s recommendations were sometimes paired with a single confidence meas-ure associated with the actual level of difficulty of the trial. Compliance with the aid produced safer out-comes in terms of miss distance at closest point of approach. However, transparency in the form of confi-dence measures did not increase overall compliance with the aid, nor affect the safety of maneuvers. Im-plications for transparency and compliance are discussed.

APA, Harvard, Vancouver, ISO, and other styles

43

Álvarez-Mingote, Cristina, and Paul E. McNamara. "Evaluating Agricultural Extension and Advisory Services through a Governance Lens." Journal of International Agricultural and Extension Education 25, no. 2 (August 15, 2018): 71–86. http://dx.doi.org/10.5191/jiaee.2018.25206.

Full text

Abstract:

Demand-driven extension services have been promoted as a potential mechanism to improve governance quality and lead to better-served farmers. In this paper, we evaluate i) the extent to which demand-driven elements are present in extension services in developing countries, and ii) whether governance problems persist and why. We accomplish so by performing a qualitative analysis of the Modernizing Extension and Advisory Services (MEAS) country assessments, and find that, despite the adoption of demand-driven features, extension services are not fully participatory, transparent, accountable, equitable and responsive to needed farmers.

APA, Harvard, Vancouver, ISO, and other styles

44

Małecka-Ziembińska, Edyta. "Fiscal transparency in recovery from the COVID-19 pandemic crisis." Research Papers in Economics and Finance 5, no. 1 (2021): 38–48. http://dx.doi.org/10.18559/ref.2021.1.3.

Full text

Abstract:

The aim of the article is to present the impact of unprecedented fiscal meas- ures taken in the context of the COVID-19 pandemic on fiscal transparency and to identify the role and importance of fiscal transparency in the process of recovering from the crisis. The conducted analysis proved that in the vast majority of countries around the world, the condition of public finances, measured by the deficit and pub- lic debt, has declined significantly as a result of measures taken to reduce the effects of the COVID-19 pandemic. These activities and strategies contribute to the lack of fiscal transparency. Meanwhile, fiscal transparency is an ally in recovering from the crisis. Strong fiscal frameworks (including numerical rules which promote fiscal pru- dence), backed by clear communication of policy priorities and fiscal transparency can meaningfully contribute to strengthening the credibility of public finances and reduce borrowing costs. These conclusions may be particularly important for emerging mar- ket economies and low-income developing countries, which find it more difficult and more expensive to obtain return sources of financing public investments.

APA, Harvard, Vancouver, ISO, and other styles

45

Almeida, João Paulo Martins de. "Argumentação, gênero e memes no discurso político." Revista Eletrônica de Estudos Integrados em Discurso e Argumentação 22, no. 3 (December 28, 2022): 1–21. http://dx.doi.org/10.47369/eidea-22-3-3451.

Full text

Abstract:

O presente artigo discute a lingua(gem) sob o ponto de vista argumentativo-discursivo para tratar de questões de gênero, tendo como ponto de partida e contexto de fundo o discurso político brasileiro no governo Bolsonaro. A partir da análise do gênero textual “meme”, vislumbra-se o projeto de sequência argumentativa prototípica mínima de Adam (2008). A análise da sequência mostrará que, do ponto de vista textual, a crítica ao governo reproduzida pelo “meme” é fundamentada; porém, do ponto de vista discursivo, há deslizes do sentido, que tendem a mostrar uma identificação do sujeito crítico com o próprio objeto de sua crítica. Argumenta-se, deste modo, que os sujeitos constroem seus enunciados argumentativos para reforçar ou refutar determinado projeto político sem controlar completamente seus dizeres, dado que a formação discursiva, assim como a lingua(gem), não é de todo transparente.

APA, Harvard, Vancouver, ISO, and other styles

46

Triki, Mounir. "Published White House Internal Memos: Legal Transparency or Subtle Electoral Canvassing?1." Revue LISA / LISA e-journal, Vol. IV - n°3 (September 1, 2006): 260–79. http://dx.doi.org/10.4000/lisa.2085.

Full text

APA, Harvard, Vancouver, ISO, and other styles

47

Pitchappa, Prakash, Manukumara Manjappa, Chong Pei Ho, Ranjan Singh, Navab Singh, and Chengkuo Lee. "Metamaterials: Active Control of Electromagnetically Induced Transparency Analog in Terahertz MEMS Metamaterial (Advanced Optical Materials 4/2016)." Advanced Optical Materials 4, no. 4 (April 2016): 540. http://dx.doi.org/10.1002/adom.201670021.

Full text

APA, Harvard, Vancouver, ISO, and other styles

48

Lee, Hong Joo, Jun Hong Park, Perumal Jayakumar, Tae Ho Yoon, Lan Young Hong, Sang Hee Park, and Dong Pyo Kim. "Characterization and Fabrication of Nano-Sized Patterns and Microfluidic Channels Derived from Polyvinylsilazane via Soft Lithographic Technique." Materials Science Forum 544-545 (May 2007): 677–80. http://dx.doi.org/10.4028/www.scientific.net/msf.544-545.677.

Full text

Abstract:

Interests on the fabrication of microfluidic devices have increased in the fields of micro total analysis system (μ-TAS) and MEMS (Microelectromechanical systems) due to their chemical inertness and high thermal stability. The thermal characterization of the SiCN preceramic polymer, polyvinylsilazane, showed that the cured polymer has ceramic properties at heat treatment temperature of 600 oC or above. In the characterization of the mechanical properties, the characteristic values of the elastic modulus and hardness notably increased for the heat-treated SiCN. The present study describes the preparation of nano-sized patterns and microfluidic channels using a soft lithographic technique. The study shows that the fabrication of microchannels using the cured inorganic polymers holds tremendous potential in the field of microfluidics, where materials with high optical transparency, thermal stability and chemical inertness are in demand as niche between conventional microfluidics using glass and polymeric materials.

APA, Harvard, Vancouver, ISO, and other styles

49

Jambor, John L., Andrew C. Roberts, and Joel D. Grice. "Armstrongite from the Strange Lake Alkalic Complex, on the Quebec – Labrador Boundary, Canada." Powder Diffraction 2, no. 1 (March 1987): 2–4. http://dx.doi.org/10.1017/s0885715600012148.

Full text

Abstract:

AbstractTabular untwinned crystals of colorless transparent armstrongite from the Strange Lake Alkalic Complex, on the Quebec – Labrador boundary, Canada are monoclinic, space group choices I2/m, I2, Im (diffraction aspect I*/*), with refined unit-cell parameters a = 13.599 (9), b = 14.114(9), c = 7.833 (4) Å, β = 103.41 (5)°, V = 1462.4 (±3.0) Å3. a:b:c = 0.9635:1:0.5550, Z = 4 and D(x) = 2.696 g/cm3. A fully indexed X-ray powder pattern is presented. Averaged electron-microprobe analyses suggest a theoretical formula of CaZrSi6O15 · 3 H2O. The Strange Lake armstrongite is biaxial negative, α = 1.567 (1), β = 1.576 (1), γ = 1.577 (1), 2V (meas.) = 39 (1)°, 2V (calc.) = 37°, Z∥b, X Λc = +4°, with no absorption and weak dispersion r < v.

APA, Harvard, Vancouver, ISO, and other styles

50

Pitchappa, Prakash, Manukumara Manjappa, Chong Pei Ho, Ranjan Singh, Navab Singh, and Chengkuo Lee. "Active control of electromagnetically induced transparency with dual dark mode excitation pathways using MEMS based tri-atomic metamolecules." Applied Physics Letters 109, no. 21 (November 21, 2016): 211103. http://dx.doi.org/10.1063/1.4969061.

Full text

APA, Harvard, Vancouver, ISO, and other styles

Journal articles on the topic 'Transparent MEMS'

Create a spot-on reference in APA, MLA, Chicago, Harvard, and other styles