Journal articles: 'TiO2 Thin Film Gas Sensors'

1

Mohammadi, M. R., Mohammad Ghorbani, and Derek J. Fray. "Influence of Secondary Oxide Phases on Microstructural and Gas Sensitive Properties of Nanostructured Titanium Dioxide Thin Films." Advanced Materials Research 47-50 (June 2008): 41–44. http://dx.doi.org/10.4028/www.scientific.net/amr.47-50.41.

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A systematic comparison of single and binary metal oxide TiO2, TiO2-Ga2O3, TiO2-Er2O3 and TiO2-Ta2O5 gas sensors with nanocrystalline and mesoporous microstructure, prepared by solgel route, was conducted. The gas sensitivity was increased by secondary phase introduction into TiO2 film via two mechanisms, firstly through the inhibition of anatase-to-rutile transformation, since the anatase phase accommodates larger amounts of adsorbed oxygen, and secondly through the retardation of grain growth, since the higher surface area provides more active sites for gas molecule adsorption. The binary metal oxides exhibited a remarkable response towards low concentrations of CO and NO2 gases at low operating temperature of 200°C, resulting in increasing thermal stability of sensing films as well as decreasing their power consumption. The calibration curves revealed that all sensors followed the power law ( B gas A S ] [ = ) (where S is sensor response, coefficients A and B are constants and [gas] is gas concentration). The response magnitude of the sensors obtained in this work is superior to TiO2-based sensors reported in previous studies.

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Almaev, Aleksei V., Nikita N. Yakovlev, Bogdan O. Kushnarev, Viktor V. Kopyev, Vadim A. Novikov, Mikhail M. Zinoviev, Nikolay N. Yudin, et al. "Gas Sensitivity of IBSD Deposited TiO2 Thin Films." Coatings 12, no. 10 (October 17, 2022): 1565. http://dx.doi.org/10.3390/coatings12101565.

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TiO2 films of 130 nm and 463 nm in thickness were deposited by ion beam sputter deposition (IBSD), followed by annealing at temperatures of 800 °C and 1000 °C. The effect of H2, CO, CO2, NO2, NO, CH4 and O2 on the electrically conductive properties of annealed TiO2 thin films in the operating temperature range of 200–750 °C were studied. The prospects of IBSD deposited TiO2 thin films in the development of high operating temperature and high stability O2 sensors were investigated. TiO2 films with a thickness of 130 nm and annealed at 800 °C demonstrated the highest response to O2, of 7.5 arb.un. when exposed to 40 vol. %. An increase in the annealing temperature of up to 1000 °C at the same film thickness made it possible to reduce the response and recovery by 2 times, due to changes in the microstructure of the film surface. The films demonstrated high sensitivity to H2 and nitrogen oxides at an operating temperature of 600 °C. The possibility of controlling the responses to different gases by varying the conditions of their annealing and thicknesses was shown. A feasible mechanism for the sensory effect in the IBSD TiO2 thin films was proposed and discussed.

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Galatsis, K., Y. X. Li, W. Wlodarski, E. Comini, G. Faglia, and G. Sberveglieri. "Semiconductor MoO3–TiO2 thin film gas sensors." Sensors and Actuators B: Chemical 77, no. 1-2 (June 2001): 472–77. http://dx.doi.org/10.1016/s0925-4005(01)00737-7.

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Samransuksamer, Benjarong, Mati Horprathum, Pitak Eiamchai, Viyapol Patthanasettakul, Anurat Wisitsoraat, Chanunthorn Chananonnawathorn, Ditsayut Phokharatkul, et al. "Decoration of Gold Nanoparticles on TiO₂ Thin Films for Enhanced Response of Ethanol Gas Sensors." Advanced Materials Research 979 (June 2014): 251–54. http://dx.doi.org/10.4028/www.scientific.net/amr.979.251.

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This work investigated the decoration of the gold (Au) nanoparticles (NPs) on the TiO2 thin films for the applications in ethanol gas sensors. The Au-decorated TiO2 thin films (Au-TiO2) were prepared by the DC magnetron sputtering on the silicon (100) wafers and alumina substrates, interdigitated with Au electrodes. The distribution and size of Au nanoparticles were controlled by varying the sputtering time. Morphologies and element composition of the Au-TiO2 films were examined by field-emission scanning electron microscopy (FE-SEM) and energy-dispersive X-ray spectroscopy (EDX) respectively. The FE-SEM micrographs when the sputtering time was increased, the average size of the Au NPs was also increased. On the other hand, the distribution of the Au NPs was decreased. The change in size and distribution of the Au NPs consequently improved the response of ethanol gas sensors. The prepared Au-TiO2 was tested, in comparison with TiO2 reference films, as the ethanol sensors at 250-350oC in 50-1,000 ppm gas concentration. The results showed that the TiO2 thin film with Au-decorated at 6 sec sputtering time yielded the highest response of 514 at 350oC operating temperature and 1,000 ppm gas concentration.

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Raza, Muhammad Akram, Anam Habib, Zakia Kanwal, Syed Sajjad Hussain, Muhammad Javaid Iqbal, Murtaza Saleem, Saira Riaz, and Shahzad Naseem. "Optical CO2 Gas Sensing Based on TiO2 Thin Films of Diverse Thickness Decorated with Silver Nanoparticles." Advances in Materials Science and Engineering 2018 (July 19, 2018): 1–12. http://dx.doi.org/10.1155/2018/2780203.

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The fabrication, characterization, and CO2 gas detection performance of single component-based and hetero-nanostructure-based optical gas sensors are reported in the present work. Single component-based structures include (i) TiO2 thin films with varied film thickness (37.45 nm, 51.92 nm, and 99.55 nm) fabricated via the RF sputtering system for different deposition times and (ii) silver nanoparticles (AgNPs) deposited on the glass substrate by the wet chemical method. Hetero-nanostructures were achieved by decorating the AgNPs on the predeposited TiO2 thin films. The structural, morphological, and optical characteristics of prepared samples were studied by X-ray diffraction (XRD), scanning electron microscopy (SEM), and ellipsometry, respectively. XRD analysis of AgNPs confirmed the crystalline nature of prepared particles with average crystallite size of 21 nm, however, in the case of TiO2 films XRD results suggested amorphous structure of all as-deposited films. size 21 nm. The SEM micrographs confirmed the deposition of AgNPs on the TiO2 thin films. With increasing sputtering time, TiO2 films were found to be denser and more compact, indicating a reduced porosity and higher film thickness. CO2 gas-sensing properties were investigated by measuring the optical transmission spectra in alone air and in CO2 gaseous atmosphere at room temperature. It was observed that neither TiO2 thin films even with higher thickness nor alone AgNPs could demonstrate any substantial gas-sensing activity. Nevertheless, TiO2/AgNP hetero-nanostructured substrates exhibited excellent CO2 gas-sensing performance as indicated by a huge change in the transmission spectra. The enhanced sensing efficiency of TiO2/AgNP nanostructures owing to synergistic effects suggests a promising role of our manufactured sensors in practical applications.

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Vishwakarma, Ankit Kumar, Nitish Kumar Yadav, and Lallan Yadava. "Detection of Toluene Using CdS–TiO2 Thin Film Gas Sensor." Sensor Letters 17, no. 10 (October 1, 2019): 804–6. http://dx.doi.org/10.1166/sl.2019.4149.

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In recent years, significant interest has been shown in the design and development of sensing devices which can be used to identify toxic, combustible gases and organic vapors. The detection of air pollutants such as hydrocarbons, which often has to face in everyday life, is the necessity of mankind. In the present study, undoped and the CdS-doped titanium dioxide (CdS–TiO2) thin film has been fabricated on the glass substrate by the thermal evaporation method using High Hind Vacuum coating unit model number 12 A4D. The several samples of different thickness lie in rang (450 μm to 500 μm) were fabricated. The sensing properties of fabricated CdS-doped TiO2 thin film were examined for toluene gas at room temperature (300 K). The response and recovery time of the sensor were measured varying the concentration of toluene (0–5000 ppm) in air ambient and it is 22 for undoped TiO2 and 38 for CdS–TiO2 thin film. The response and recovery time of the sensors is the 70 s and 125 s for exposed toluene gas at room temperature. We observed that the fabricated CdS–TiO2 thin film is a suitable detector for detection of toluene gas at room temperature.

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Pozos, Heberto Gómez, Karthik Tangirala Venkata Krishna, María de la Luz Olvera Amador, Yuriy Kudriavtsev, and Arturo Maldonado Alvarez. "TiO2 thin film based gas sensors for CO-detection." Journal of Materials Science: Materials in Electronics 29, no. 18 (June 21, 2018): 15829–37. http://dx.doi.org/10.1007/s10854-018-9477-2.

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Khalil, Souad G., and Mahdi M. Mutter. "Synthesis and Characterization of Semiconductor Composites Gas Sensors Based on ZnO Doped TiO₂ Thin Films by Laser-Induced Plasma." Key Engineering Materials 900 (September 20, 2021): 112–20. http://dx.doi.org/10.4028/www.scientific.net/kem.900.112.

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This work presents the development of n-type (TiO2) and p-type (ZnO) gas-sensitive materials from ZnO doped TiO2 thin films prepared by pulsed laser deposition technique (PLD) on a glass substrate as a gas sensor of CO2 gas. TiO2 gas-sensing layers have been deposited over a range of ZnO content (0, 20, and 40) wt %. The obtained thin films analysis by atomic force microscopy (AFM), and X-ray diffraction (XRD). Electrical characterization shows that TiO2:ZnO thin films were p-type conductivity and ZnO added was unable to change the composition to the n-type conductivity. There are notable gas-sensing response differences between n-type and p-type ZnO doped TiO2 thin film. The responses toward all tested oxidizing gases tend to increase with operating temperature for the n-type TiO2 films. Besides, the p-type ZnO doping results in a significant response improvement toward tested oxidizing gases such as CO2 gas at the low operating temperature of 60 °C.

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Maziarz, Wojciech. "TiO2/SnO2 and TiO2/CuO thin film nano-heterostructures as gas sensors." Applied Surface Science 480 (June 2019): 361–70. http://dx.doi.org/10.1016/j.apsusc.2019.02.139.

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Lo, Tzu-Hsuan, Pen-Yuan Shih, and Chiu-Hsien Wu. "The Response of UV/Blue Light and Ozone Sensing Using Ag-TiO2 Planar Nanocomposite Thin Film." Sensors 19, no. 23 (November 20, 2019): 5061. http://dx.doi.org/10.3390/s19235061.

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We successfully fabricated a planar nanocomposite film that uses a composite of silver nanoparticles and titanium dioxide film (Ag-TiO2) for ultraviolet (UV) and blue light detection and application in ozone gas sensor. Ultraviolet-visible spectra revealed that silver nanoparticles have a strong surface plasmon resonance (SPR) effect. A strong redshift of the plasmonic peak when the silver nanoparticles covered the TiO2 thin film was observed. The value of conductivity change for the Ag-TiO2 composite is 4–8 times greater than that of TiO2 film under UV and blue light irradiation. The Ag-TiO2 nanocomposite film successfully sensed 100 ppb ozone. The gas response of the composite film increased by roughly six and four times under UV and blue light irradiation, respectively. We demonstrated that a Ag-TiO2 composite gas sensor can be used with visible light (blue). The planar composite significantly enhances photo catalysis. The composite films have practical application potential for wearable devices.

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KIM, I., A. ROTHSCHILD, D. YANG, and H. TULLER. "Macroporous TiO2 thin film gas sensors obtained using colloidal templates." Sensors and Actuators B: Chemical 130, no. 1 (March 14, 2008): 9–13. http://dx.doi.org/10.1016/j.snb.2007.07.092.

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12

Qin, Song, Lu Qu, Dong Wei, Bao Cai Zhang, and Nan Wan Qiu. "Research and Practice of New Gas Sensors Based Materials on Internet of Things." Advanced Materials Research 301-303 (July 2011): 497–502. http://dx.doi.org/10.4028/www.scientific.net/amr.301-303.497.

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The development of Internet of Things has led to a sharp rise in demand for sensors. Users require that sensors can collect information from the Internet of Things in a timely and accurate way. In response to the present situation that there are only a few varieties of gas components-based materials in the application of Internet of Things. According to the new viewpoint that energy gap Eg> 2ev materials are likely to be used to develop thin film gas sensors, we have succeeded in preparing quality thin film gas sensors Fe2O3/2%CeO2and TiO2/2%CeO2by using the method of powder sputtering. Based on the concept of metal oxide Eg chemical bonds, we have successfully prepared ZnSnO3and other composite gas sensor-based materials. All these are significant in guiding the development of new gas sensor-based materials for Internet of Things sensors. This paper focuses on what we have done and how we have down in new gas sensors based materials research and practice of Internet of Things

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13

Tang, H., K. Prasad, R. Sanjinés, and F. Lévy. "TiO2 anatase thin films as gas sensors." Sensors and Actuators B: Chemical 26, no. 1-3 (January 1995): 71–75. http://dx.doi.org/10.1016/0925-4005(94)01559-z.

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14

Dewi, Rahmi, Krisman Krisman, Zuhdi Zuhdi, Ari Sulistyo Rini, and Tengkusaidluqman Hussains. "Characteristic Making of Ba0.4Sr0.6TiO3 Thin Film Nanoparticles." Trends in Sciences 19, no. 19 (October 3, 2022): 6178. http://dx.doi.org/10.48048/tis.2022.6178.

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Presently, the research on thin films is essentially useful in the world of science and technology. Therefore, this study aims to explore Barium Strontium Titanate (BST) as the basis in the making of dynamic random access memory (DRAM). This DRAM technology produces small cells that have faster operations, lower energy, longer data storage period, and are found to havemade up of Barium Strontium Titanate nanoparticles (Ba0.4Sr0.6TiO3; BST). BST applications in the form of capacitors can be used as gas sensors, temperature sensors, microwave phase shifters, tunable filters, oscillators, infrared sensors, etc.The main component of BST was showed by the sol-gel method, and the device structure constituted of Si/SiO2/RuO2/TiO2 /Ba0.4Sr0.6TiO3/Al. All the samples were annealed at 400, 450, 500, 550, 600, 650 and 700 ℃ for 60 min. The sample was annealed to see the crystalline structure of the sample.The sol gel method was chosen in the process of making thin films of Ba0.4Sr0.6TiO3 (BST) because this method was easier and cheaper than other techniques. The thin film was characterized by optical and electrical properties. The results showed that a rise in the annealing temperature increased the crystalline, grain size, thickness and surface roughness of the sample. The characterization was carried out on the device structure (Si/SiO2/RuO2/TiO2/Ba0.4Sr0.6TiO3/Al) in order to examine the optical and electrical properties, including the current density and the dielectric features. At the annealing temperature of 700 ℃, the device showed the best value, with the absorption peak at the wavelength of 688 nm. And also, with the dielectric constant (εr) of 2,500, capacitance (C) of 22.10 nF, dense alternating current (ρau) of 2.54×104 Ω.m, conductance (σau) of 1.20×10-2 1/Ω.m, and current density of 9.85×10 -5 A.cm-2 at 0.5 V. The results of characterization of this capacitor are very good to be used as an infrared sensor. HIGHLIGHTS The explore Barium Strontium Titanate (BST) as the basis in the making of dynamic random access memory (DRAM) BST applications in the form of capacitors can be used as gas sensors, temperature sensors, microwave phase shifters, tunable filters, oscillators, infrared sensors, etc. The results showed that a rise in the annealing temperature increased the crystalline, grain size, thickness and surface roughness of the sample GRAPHICAL ABSTRACT

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Hussin, Rosniza, Kwang Leong Choy, and Xiang Hui Hou. "Growth of TiO₂ Thin Films by Atomic Layer Deposition (ALD)." Advanced Materials Research 1133 (January 2016): 352–56. http://dx.doi.org/10.4028/www.scientific.net/amr.1133.352.

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Ceramic oxide thin films are an important material, with applications in many areas of science and technology. Titanium oxide (TiO2) is also a well-known and important material for applications such as gas sensors [1], photocatalysis materials [3], and electrochemicals [1], due to its self-cleaning [2], good corrosion resistance and biocompatibility. Atomic Layer Deposition (ALD) is a nanotechnology tool that is used for the deposition of nanostructured thin films. The unique advantage of ALD is the self-limiting film growth mechanism, which offers attractive properties, simple and accurate film thickness control, sharp interfaces, uniformity over large areas, excellent conformality, good reproducibility, a multilayer processing capability, and high quality films at low temperatures [3, 4]. TiO2 thin films were grown using TTIP (Titanium isopropoxide) ALD on silicon wafers, glass slides, and stainless steel plates in order to study the effect of substrates on the growth of TiO2. In order to achieve the desired advantages of using TTIP, a series of experiments were performed to study the growth mechanism of TiO2 thin films using TTIP and H2O by ALD.

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Shanef, Alaa A., Waleed Hameed Abed, and Ahmed R. Mathloom. "Surface Enhanced Raman Scattering of Defective TiO2 with Gold Au NPs by Green Method." NeuroQuantology 19, no. 7 (August 11, 2021): 25–34. http://dx.doi.org/10.14704/nq.2021.19.7.nq21080.

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This works strong the embossing as regards riches (Au) nanoparticles (NPs) regarding attenuate TiO2 films. Au (Au-TiO2) patterned flabby film TiO2. The morphology, cleanly structure, issue administration then optical homes concerning the films hold been studied. Gold nanoparticles (Au-NPs) are synthesized along the useful resource on lowering hydrated gold steel ions of touch together along aqueous sow dermis extract. The alternate among the elevation or assignment about Au NPs elevated the reply above the ethanol gas sensors. The organized Au-TiO2 was once tested, of assessment together with allusion TiO2 membranes, such then ethanol sensors at 250-350 ° C at a fuel attention of 50-1000 ppm. In addition, the SERS deep concerning the excised Au/ TiO2 emaciated movie is about iii cases that above the deposited Au/ TiO2 gaunt film. The results proven in imitation of so much aggregation Au-coated TiO2 at 6 s spray epoch gave the beneficial file on 514 at 350 ° C deed useless heat since 1000 ppm fuel concentration.

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Tang, Guan Rong, and Jing Chen. "Characterization of Nanostructured Titania Thin Film and its Application in Gas Sensor." Applied Mechanics and Materials 289 (February 2013): 45–51. http://dx.doi.org/10.4028/www.scientific.net/amm.289.45.

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In this paper, Nanostructured Titania (NST) was fabricated by aging titanium film in hydrogen peroxide solution. NST was analyzed and characterized using scanning electron microscope (SEM), X-ray photoelectron spectroscopy (XPS), energy-dispersive X-ray spectroscopy (EDX), X-ray diffraction (XRD), nano-indentation method and the BET method. Results showed that NST was porous TiO2 with pore diameter of 90-133 nm, hardness of 1.35Gpa, and specific surface area of 37.26 m2/g. Gas sensors using NST film as sensitive material were presented in this paper too. Electrodes were deposited upon NST patterns to create electrical connections. Gas sensors with a simple package were successfully fabricated.

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Mallikarjuna Reddy, Avula, Akepati Sivasankar Reddy, and Pamanji Sreedhara Reddy. "Sputtered Nickel Oxide Films for NO₂Gas Sensors." Advanced Materials Research 678 (March 2013): 361–64. http://dx.doi.org/10.4028/www.scientific.net/amr.678.361.

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In recent years, lot of efforts was made to develop many types of nitrogen oxide gas sensors. Among them, most interesting are WO3, V2O5, TiO2, SnO2 and NiO thin films as gas sensing layers. Relatively small effort has been done to examine nickel oxide. But reasonably good electrical properties and stability in air make it feasible for the fabrication of nickel oxide thin film based gas sensors. Hence, in the present study NiO thin films were deposited by dc reactive magnetron sputtering technique from a nickel metal target in argon and oxygen mixed atmosphere and studied its gas sensing properties towards NO2 gas. The effect of process parameters on the morphological and electrical properties of NiO was studied by scanning electron microscopy (SEM), atomic force microscopy (AFM) and Hall effect studies respectively. The films prepared at optimum conditions showed superior electrical properties and exhibited fine and uniform grains with RMS roughness 9.4 nm. These films were tested for gas sensing characteristics of NO2 gas. The sensitivity of NiO thin film was investigated in the temperature range 373 to 573 K. The dynamic response for the NiO films was observed at an operating temperature of 473 K and gas concentration of 50 ppm for NO2 gas.

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19

Schröder, Stefan, Nicolai Ababii, Mihai Brînză, Nicolae Magariu, Lukas Zimoch, Mani Teja Bodduluri, Thomas Strunskus, Rainer Adelung, Franz Faupel, and Oleg Lupan. "Tuning the Selectivity of Metal Oxide Gas Sensors with Vapor Phase Deposited Ultrathin Polymer Thin Films." Polymers 15, no. 3 (January 19, 2023): 524. http://dx.doi.org/10.3390/polym15030524.

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Metal oxide gas sensors are of great interest for applications ranging from lambda sensors to early hazard detection in explosive media and leakage detection due to their superior properties with regard to sensitivity and lifetime, as well as their low cost and portability. However, the influence of ambient gases on the gas response, energy consumption and selectivity still needs to be improved and they are thus the subject of intensive research. In this work, a simple approach is presented to modify and increase the selectivity of gas sensing structures with an ultrathin polymer thin film. The different gas sensing surfaces, CuO, Al2O3/CuO and TiO2 are coated with a conformal < 30 nm Poly(1,3,5,7-tetramethyl-tetravinyl cyclotetrasiloxane) (PV4D4) thin film via solvent-free initiated chemical vapor deposition (iCVD). The obtained structures demonstrate a change in selectivity from ethanol vapor to 2-propanol vapor and an increase in selectivity compared to other vapors of volatile organic compounds. In the case of TiO2 structures coated with a PV4D4 thin film, the increase in selectivity to 2-propanol vapors is observed even at relatively low operating temperatures, starting from >200 °C. The present study demonstrates possibilities for improving the properties of metal oxide gas sensors, which is very important in applications in fields such as medicine, security and food safety.

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Karunagaran, B., Periyayya Uthirakumar, S. J. Chung, S. Velumani, and E. K. Suh. "TiO2 thin film gas sensor for monitoring ammonia." Materials Characterization 58, no. 8-9 (August 2007): 680–84. http://dx.doi.org/10.1016/j.matchar.2006.11.007.

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Topalian, Z., J. M. Smulko, G. A. Niklasson, and C. G. Granqvist. "Resistance noise in TiO2-based thin film gas sensors under ultraviolet irradiation." Journal of Physics: Conference Series 76 (July 1, 2007): 012056. http://dx.doi.org/10.1088/1742-6596/76/1/012056.

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Yusoff, Nurul Huda, Muhamad Mat Salleh, and Muhammad Yahaya. "Enhanced the Performance of Fluorescence Gas Sensor of Porphyrin Dye by Using TiO₂ Nanoparticles." Advanced Materials Research 55-57 (August 2008): 269–72. http://dx.doi.org/10.4028/www.scientific.net/amr.55-57.269.

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Fluorescence gas sensor was developed to identify the presence of volatile organic compounds by using porphyrin dye thin film. The porphyrin dye used was iron (III) meso-tetraphenylporphine chloride. The porphyrin thin film was deposited on quartz substrate using self-assembly through dip coating technique. The sensing properties of the thin films toward volatile organic compounds; ethanol, acetone and 2-propanol were studied using luminescence spectrometer. In presence of air and volatile organic compounds, thin films produced different emission spectra and ease for chemical identification process. To improved the sensing performance, TiO2 nanoparticles colloid were prepared, coated with porphyrin dye and deposited as thin film. It was found that the thin film of TiO2 nanoparticles coated with porphyrin dye has more intensive interaction toward volatile organic compounds than porphyrin thin film, and improved the selective property. This may be due to the nanostructured thin film provided more surface area for dye molecules to react with VOCs.

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Kamau, Joseph Kamau. "TiO2–CU Thin Film Material for Optical Hydrogen Gas Sensor Applications." Natural Science Journal 3, no. 1 (September 1, 2022): 12–29. http://dx.doi.org/10.47941/nsj.1011.

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Purpose: Several scientific researches are underway to investigate the possibility of using various green energies. Hydrogen gas is a candidate of such research, since its use as a fuel in automobiles releases pure water, a recyclable biproduct. But, the leakages of the gas are detrimental to its application due to its low auto ignition energy of 20 μj, wider air flame limit of 4-75 % and high flame velocity of 3.46 ms-1. This study involved fabrication of an optical gas sensor for sensing the leakage levels of hydrogen gas to a surrounding. Methodology: Titanium dioxide thin films of thicknesses 47.7, 56.2, 82.3, 100.4 and 120.5 nm were deposited on both microscope and FTO glass slides using DC magnetron sputtering technique and characterized as primate and annealed at 400 and 500oC. Copper (Cu) catalytic layers of 5.6, 10.2, 17.3 and 21.0 nm were deposited using EDWARDS AUTO 306 Magnetron sputtering system on an optimized 100.4 nm TiO2 sample, annealed at 400oC. Optical properties were deduced from transmittance and absorbance spectra measured using 1800 Shimadzu spectrophotometer in the optimum range of 280-800 nm through simulation. The optical behavior of the films was generated using SCOUT software and analyzed using ORIGIN 9.1 64-bit software. Results: The energy band gap decreased with material thickness from 4.2±0.05 eV for 47.7 nm film to 3.9±0.05 eV for 100.4 nm films. 120.5 nm films showed higher energy gap of 4.0±0.05 eV. Transmittance decreased with increase in thickness probably due to agglomeration of film particles. The energy gap of the 100.4 nm, TiO2 thin films annealed at 400oC was 3.9±0.05 eV. This is a material quality of the anatase phase. The copper surface layer increased absorption in the higher wavelength region. The energy band gaps were reduced from 3.9 to 3.8±0.05 eV with increased coverage. Self-limiting at 17.3 nm copper overlayer realized increased energy gap to 4.1±0.05 eV. A lower energy band gap range of 3.9-3.8±0.05 eV was realized when FTO substrates were used. The transmittance decreased with increased H2 gas concentration. The optical energy gap reduced from 4.1±0.05 eV in 0 ccm to 3.9±0.05 eV in 50 ccm of hydrogen gas concentration. The sensitivity increased from 0.3 % in 0ccm to 3.9 % in 50 ccm hydrogen gas concentration. An average sensitivity of 2.0 % was realized for films fabricated on FTO substrate. This is higher than 1.7 % reported earlier. The material gas sensing potential was done at room temperature. The fabricated sensor material showed higher sensitivity and lower temperature operation and is furthermore, expected to be cheaper and safer Unique Contribution to Theory, Policy and Practices: Though, in order to realize a more portable stand-alone gas sensor, an investigation on an ideal photon type source that incorporates the material is recommended. Further, extension of this study on structure and morphology of the film is essential to understand its sensing behavior.

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Gao, Lei, Changqing Yin, Yuanyuan Luo, and Guotao Duan. "Facile Synthesis of the Composites of Polyaniline and TiO2 Nanoparticles Using Self-Assembly Method and Their Application in Gas Sensing." Nanomaterials 9, no. 4 (March 30, 2019): 493. http://dx.doi.org/10.3390/nano9040493.

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The composites of polyaniline and TiO2 nanoparticles with different contents were prepared in the aqueous solution of phosphoric acid, in which the phosphoric acid was selected as the protonic acid to improve the conductivity of polyaniline. In the composites, the TiO2 nanoparticles with the size of about 20 nm were coated by a layer of polyaniline film with a thickness of about 5 nm. Then, the gas sensors were constructed by a liquid–gas interfacial self-assembly method. The gas-sensing properties of the composites-based gas sensors obviously improved after doping with TiO2 nanoparticles, and the sensor response of the composites increased several times to NH3 from 10 ppm to 50 ppm than that of pure polyaniline. Especially when the mass ratio of TiO2 to aniline monomer was 2, it exhibited the best gas response (about 11.2–50 ppm NH3), repeatability and good selectivity to NH3 at room temperature. The p–n junction structure consisting of the polyaniline and TiO2 nanoparticles played an important role in improving gas-sensing properties. This paper will provide a method to improve the gas-sensing properties of polyaniline and optimum doping proportion of TiO2 nanoparticles.

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Alessandri, Ivano, Elisabetta Comini, Elza Bontempi, Guido Faglia, Laura E. Depero, and Giorgio Sberveglieri. "Cr-inserted TiO2 thin films for chemical gas sensors." Sensors and Actuators B: Chemical 128, no. 1 (December 2007): 312–19. http://dx.doi.org/10.1016/j.snb.2007.06.020.

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Yusoff, Nurul Huda, Muhamad Mat Salleh, and Muhammad Yahaya. "Room Temperature Fluorescence Gas Sensor Based on Coated TiO₂Nanoparticles." Key Engineering Materials 543 (March 2013): 373–76. http://dx.doi.org/10.4028/www.scientific.net/kem.543.373.

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Room temperature fluorescence gas sensor was developed based on TiO2 nanoparticles coated with porphyrin dye thin films. The porphyrin dye used for this experiment were Iron (III) meso-tetraphenylporphine chloride (IMTPPCl) and Manganase (III) 5,10,15,20 tetra (4-pyridyl)-21H, 23H porphine chloride tetrakis (metachloride). The sensing sensitivity was due to the changes of the emission spectra produce by the thin film when expose to the organic vapors from volatile organic compounds; ethanol, acetone and 2-propanol. Both thin films show good response toward volatile organic vapors. However, TiO2 nanoparticles with porphyrin; IMTPPCl thin film shows pronounced interaction, marked fluorescence spectra and more selective property, hence useful for chemical identification purpose.

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Mohammadi, M. R., and D. J. Fray. "Semiconductor TiO2–Ga2O3 thin film gas sensors derived from particulate sol–gel route." Acta Materialia 55, no. 13 (August 2007): 4455–66. http://dx.doi.org/10.1016/j.actamat.2007.04.011.

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Hussain, Jareena Begam Jakir, Sarathbavan Murugan, Gabriele Magna, Venkatramaiah Nutalapati, Surya Velappa Jayaraman, Corrado Di Natale, and Yuvaraj Sivalingam. "Development of Gas Sensor Array based on Phthalocyanines Functionalized TiO2/ZnO Heterojunction Thin Films." Proceedings 2, no. 13 (November 20, 2018): 1042. http://dx.doi.org/10.3390/proceedings2131042.

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Gas sensing properties of diverse phthalocyanines functionalized TiO2/ZnO heterojunction thin films were investigated respect to a number of volatile organic compounds (VOCs) in both dark and light conditions. These studies showed that influence of heterojunction along with functionalization alter the optical properties and gas sensing of sensors. Results show that each sensor exhibits a different pattern of relative sensitivity, and this feature can be used to discriminate among a wide range of VOCs.

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Jiao, Mingzhi, Xiaohu Zhao, Xinjian He, Gang Wang, Wei Zhang, Qian Rong, and DucHoa Nguyen. "High-Performance MEMS Oxygen Sensors Based on Au/TiO2 Films." Chemosensors 11, no. 9 (August 28, 2023): 476. http://dx.doi.org/10.3390/chemosensors11090476.

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High-performance microelectromechanical system (MEMS) oxygen sensors were realized by successful preparation of Au nanofilms over TiO2 thin films through successive sputtering on commercial MEMS microhotplates. Oxygen sensing performance of 3 and 6 nm thick Au over TiO2 thin films were compared with that of pure TiO2 thin films. It was shown that 6 nm thick Au over TiO2 thin films have the best sensitivity toward oxygen. The prepared TiO2 thin films were characterized using SEM, EDS, XPS, and a gas testing instrument. The results show that Au decoration has little influence on the surface morphologies of TiO2 thin films. However, Au decoration has a strong influence on the surface properties of the composite films. The favorable performance of 6 nm Au-doped TiO2 thin films is attributed to factors such as catalytical performance, height of Schottky contact, and number of oxygen vacancies. This work makes contributions to low power consumption and high-performance oxygen sensors for Internet of Things applications.

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Shao, Shaofeng, Yunyun Chen, Shenbei Huang, Fan Jiang, Yunfei Wang, and Ralf Koehn. "A tunable volatile organic compound sensor by using PtOx/GQDs/TiO2 nanocomposite thin films at room temperature under visible-light activation." RSC Advances 7, no. 63 (2017): 39859–68. http://dx.doi.org/10.1039/c7ra07478f.

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Samransuksamer, Benjarong, Tula Jutarosaga, Mati Horprathum, Anurat Wisitsoraat, Pitak Eiamchai, Saksorn Limwichean, Viyapol Patthanasettakul, Chanunthorn Chananonnawathorn, and Pongpan Chindaudom. "Highly Sensitive H₂ Sensors Based on Pd- and PdO-Decorated TiO₂ Thin Films at Low-Temperature Operation." Key Engineering Materials 675-676 (January 2016): 277–80. http://dx.doi.org/10.4028/www.scientific.net/kem.675-676.277.

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Abstract In this work, the low-temperature H2-sensing properties of palladium (Pd) and palladium oxide (PdO) nanoparticles decorated titanium dioxide (TiO2) thin film were studied. The TiO2 thin films were prepared by the dc reactive magnetron sputtering. The Pd and PdO nanoparticles were sputtered on the top surface of TiO2 surface in order to enhance the sensitivity to the H2 gas. Morphologies, crystal structures, and chemical element of the examiner samples were investigated by the field-emission scanning electron microscopy (FE-SEM), grazing-incident X-ray diffraction (GIXRD), and X-ray photoelectron spectroscopy (XPS), respectively. The effects of the Pd and PdO nanoparticles on H2-sensing performance of TiO2 were investigated over a low concentration range of 150-3,000 ppm H2 at 50-250°C-operating temperatures. This result exhibited that the PdO decorated on TiO2 surface showed very high response to H2 at a low operating temperature of 150°C.

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Raj, V. Bhasker, Harpreet Singh, A. Theodore Nimal, M. U. Sharma, Monika Tomar, and Vinay Gupta. "Utilization of Mass and Elastic Loading in Oxide Materials Based SAW Devices for the Detection of Mustard Gas Simulant." Advanced Materials Research 488-489 (March 2012): 1558–62. http://dx.doi.org/10.4028/www.scientific.net/amr.488-489.1558.

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The properties (mass loading and elastic changes) of different oxide materials (ZnO, TeO2, SnO2, TiO2) in thin film form has been explored for the enhanced detection of DBS (di butyl sulphide), a simulant of sulphur mustard gas. All the four oxide materials are deposited on to the surface of SAW (Surface Acoustic Wave) devices to impart sensitivity and selectivity. ZnO and SnO2 films are crystalline whereas TiO2 and TeO2 films are amorphous in nature. All the films are transparent with transparency greater than 75 % in the visible region. The SAW devices coated with different oxide materials were placed in the feedback loop of colpitt oscillator. With the exposure of DBS vapors, differential frequency increases for TiO2 thin films whereas for other oxide coatings (ZnO, TeO2 and SnO2) it decreases. ZnO coated SAW sensor is found to be maximum sensitive to DBS vapors. Investigation of sensing mechanism revealed that mass loading effect is pronounced in TiO2 thin film whereas for other films change in elasticity is dominant. The oxide coatings are very less sensitive to the other interferants.

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Hamagami, Junichi, Ryo Araki, Hiroyuki Oda, Mototsugu Sakai, and Atsunori Matsuda. "Preparation and Characterization of Pd-Based Optical Hydrogen Sensor Operated at Room Temperature by Using Photodeposition Process." Key Engineering Materials 445 (July 2010): 100–104. http://dx.doi.org/10.4028/www.scientific.net/kem.445.100.

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Palladium (Pd) nanoparticles were prepared on photocatalytic TiO2-coated glass substrate by a photodeposition process and the optical hydrogen sensing properties were examined at room temperature. The TiO2 coatings were prepared on a non-alkaline glass substrate by a sol-gel process and hot water treatment. Pd nanoparticles were deposited on the TiO2 film by photodeposition using UV light. The obtained Pd/TiO2 thin film showed remarkable optical transmittance response to hydrogen gas at room temperature. The normalized transmittance of the Pd/TiO2 thin film at a wavelength of 640 nm decreased to 0.9 on exposing the film to hydrogen gas for only 5 s. This transmittance decrease is considered to be due to a gaschromic effect of the TiO2 photocatalytic coating.

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Kim, Jin-Ho, Jong-Hee Hwang, Mi-Jai Lee, Sei-Ki Kim, and Tae-Young Lim. "Fabrication of TiO2/polyelectrolyte thin film for a methyl mercaptan gas sensor." Journal of the Korean Crystal Growth and Crystal Technology 20, no. 5 (October 31, 2010): 221–26. http://dx.doi.org/10.6111/jkcgct.2010.20.5.221.

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Chomkitichai, Weerasak, Hathaithip Ninsonthi, Chaikarn Liewhiran, Anurat Wisitsoraat, Saengrawee Sriwichai, and Sukon Phanichphant. "Flame-Made Pt-Loaded TiO2Thin Films and Their Application as H2Gas Sensors." Journal of Nanomaterials 2013 (2013): 1–8. http://dx.doi.org/10.1155/2013/497318.

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The hydrogen gas sensors were developed successfully using flame-made platinum-loaded titanium dioxide (Pt-loaded TiO2) nanoparticles as the sensing materials. Pt-loaded TiO2thin films were prepared by spin-coating technique onto Al2O3substrates interdigitated with Au electrodes. Structural and gas-sensing characteristics were examined by using scanning electron microscopy (SEM) and showed surface morphology of the deposited film. X-ray diffraction (XRD) patterns can be confirmed to be the anatase and rutile phases of TiO2. High-resolution transmission electron microscopy (HRTEM) showed that Pt nanoparticles deposited on larger TiO2nanoparticles. TiO2films loaded with Pt nanoparticles were used as conductometric sensors for the detection of H2. The gas sensing of H2was studied at the operating temperatures of 300, 350, and 400°C in dry air. It was found that 2.00 mol% Pt-loaded TiO2sensing films showed higher response towards H2gas than the unloaded film. In addition, the responses of Pt-loaded TiO2films at all operating temperatures were higher than that of unloaded TiO2film. The response increased and the response time decreased with increasing of H2concentrations.

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Durina, Pavol, Tomas Plecenik, Martin Mosko, Azhar Ali Haidry, Martin Truchly, Marian Mikula, Branislav Grancic, et al. "Properties of Metal Oxide Gas Sensors with Electrodes Placed below the Sensing Layer." Key Engineering Materials 605 (April 2014): 527–30. http://dx.doi.org/10.4028/www.scientific.net/kem.605.527.

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In this work, we investigate the influence of position of electrodes on the sensitivity of hydrogen gas sensors based on TiO2 thin films. We have prepared two types of sensors with platinum comb-like electrodes deposited on top and under the TiO2 layer. Response of these sensors to hydrogen gas in the concentration range of 0 10 000 ppm at temperature of 350 °C has been studied. The sensors with electrodes placed under the TiO2 layer showed two orders of magnitude lower sensitivity for 10 000 ppm compared to sensors with electrodes on top of the layer, but it was considerably increased when thickness of the TiO2 layer was lowered. This gives a possibility to improve the sensitivity of gas sensors in which the electrodes must be placed below the sensing layer for their protection from harsh environment.

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Maziarz, Wojciech, Anna Kusior, and Anita Trenczek-Zajac. "Nanostructured TiO2-based gas sensors with enhanced sensitivity to reducing gases." Beilstein Journal of Nanotechnology 7 (November 15, 2016): 1718–26. http://dx.doi.org/10.3762/bjnano.7.164.

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2D TiO2 thin films and 3D flower-like TiO2-based nanostructures, also decorated with SnO2, were prepared by chemical and thermal oxidation of Ti substrates, respectively. The crystal structure, morphology and gas sensing properties of the TiO2-based sensing materials were investigated. 2D TiO2 thin films crystallized mainly in the form of rutile, while the flower-like 3D nanostructures as anatase. The sensor based on the 2D TiO2 showed the best performance for H2 detection, while the flower-like 3D nanostructures exhibited enhanced selectivity to CO(CH3)2 after sensitization by SnO2 nanoparticles. The sensor response time was of the order of several seconds. Their fast response, high sensitivity to selected gas species, improved selectivity and stability suggest that the SnO2-decorated flower-like 3D nanostructures are a promising material for application as an acetone sensor.

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Mohammadi, M. R. "Semiconductor TiO2–Al2O3 thin film gas sensors derived from aqueous particulate sol–gel process." Materials Science in Semiconductor Processing 27 (November 2014): 711–18. http://dx.doi.org/10.1016/j.mssp.2014.07.051.

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Moon, J., M. Kemell, J. Kukkola, R. Punkkinen, H.-P. Hedman, A. Suominen, E. Mäkilä, M. Tenho, A. Tuominen, and H. Kim. "Gas Sensor using Anodic TiO2 Thin Film for Monitoring Hydrogen." Procedia Engineering 47 (2012): 791–94. http://dx.doi.org/10.1016/j.proeng.2012.09.266.

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Shubham, Kumar, R. U. Khan, and P. Chakrabarti. "Investigation of Pd/TiO2/Si MIS capacitor as hydrogen sensor." Sensor Review 35, no. 1 (January 19, 2015): 62–67. http://dx.doi.org/10.1108/sr-12-2013-759.

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Purpose – This paper aims to investigate the gas-sensing capability of Pd/TiO2/Si MIS capacitor using capacitance versus gate voltage (C-V) response as a function of hydrogen gas concentration varying from 0.1 to 2 ppm at 300 kHz frequency. Design/methodology/approach – The objective is to fabricate a metal–insulator–semiconductor (MIS) capacitor sensor based on TiO2-thin-film insulator deposited by sol-gel spin-coating process. Gas-sensing signal derived on exposure to hydrogen with concentration varying from 0.1 to 2 ppm at different operating temperatures (room temperature to 1,500°C) was measured as variation in flat-band voltage in C-V characteristics of the MIS capacitor. Findings – High sensitivity of the sensor is attributed to the large change of interface state charges because of the large surface-to-volume ratio of the nano-structured TiO2. The values of response time as well as the recovery time have also been estimated and are found to be comparable to that observed in the case of conventional Metal Oxide Semiconductor (MOS) structure. Research limitations/implications – The use of Si substrate restricts the performance of gas sensors to 200°C, as the Si substrate begins to show conductive nature. Originality/value – This paper deals with an MIS capacitor gas sensor which replaces conventional insulating material by TiO2 and uses a high-quality fabrication procedure for controlled growth of novel surface structure.

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Rydosz, Artur, Andrzej Brudnik, and Kamil Staszek. "Metal Oxide Thin Films Prepared by Magnetron Sputtering Technology for Volatile Organic Compound Detection in the Microwave Frequency Range." Materials 12, no. 6 (March 15, 2019): 877. http://dx.doi.org/10.3390/ma12060877.

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Metal oxide thin films such as copper oxide, titanium dioxide, and tin dioxide deposited by magnetron sputtering technology were verified as a gas-sensitive layer in microwave-based gas sensors operated at 2.4 GHz. The developed gas sensors were tested at room temperature (23 °C) and 50% relative humidity (RH) under exposure to 0–200 ppm of selected volatile organic compounds (acetone, ethanol, and methanol) that are of high interest in industry and biomedical applications. The highest responses to acetone were obtained for CuO-based gas sensors, to ethanol for SnO2-based gas sensors, while for methanol detection both dioxides, SnO2 and TiO2, exhibited good sensitivity.

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42

Mohammadi, M. R., and D. J. Fray. "Development of nanocrystalline TiO2–Er2O3 and TiO2–Ta2O5 thin film gas sensors: Controlling the physical and sensing properties." Sensors and Actuators B: Chemical 141, no. 1 (August 2009): 76–84. http://dx.doi.org/10.1016/j.snb.2009.05.026.

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43

Kareem et al., Saadoon M. "Cr2O3:TiO2 Nanostructure Thin Film Prepared by Pulsed Laser Deposition Technique as NO2 Gas Sensor." Baghdad Science Journal 17, no. 1(Suppl.) (March 18, 2020): 0329. http://dx.doi.org/10.21123/bsj.2020.17.1(suppl.).0329.

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Pulsed laser deposition (PLD) technique was applied to prepared Chromium oxide (Cr2O3) nanostructure doped with Titanium oxide (TiO2) thin films at different concentration ratios 3,5,7 and 9 wt % of TiO2. The effect of TiO2 dopant on the average size of crystallite of the synthesized nanostructures was examined by X-ray diffraction. The morphological properties were discussed using atomic force microscopy(AFM). Observed optical band gap value ranged from 2.68 eV to 2.55 eV by ultraviolet visible(UV-Vis.) absorption spectroscopy with longer wave length shifted in comparison with that of the bulk Cr2O3 ~3eV. This indicated that the synthesized samples are attributed to the enhancement of the quantum conﬁnement effect. Gas response sensitivity, and recovery times of the sensor in the presence of NO2 gas were studied and discussed. In this work it is found that, the sensitivity increases when doping ratio increases from 3wt% to 5wt% of TiO2 and return to decrease over that. The optimum concentrations ratio for NO2 gas sensitivity is 5wt% of TiO2 and sensitivity is 168.75% at 200oC.

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Ponce, M. A., R. Parra, R. Savu, E. Joanni, P. R. Bueno, M. Cilense, J. A. Varela, and M. S. Castro. "Impedance spectroscopy analysis of TiO2 thin film gas sensors obtained from water-based anatase colloids." Sensors and Actuators B: Chemical 139, no. 2 (June 2009): 447–52. http://dx.doi.org/10.1016/j.snb.2009.03.066.

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Ibrahim, Isam M., and Shahad Issam Sharhan. "Organic/Inorganic Nanocomposite for Enhancement of H₂S Gas Sensor." Nano Hybrids and Composites 25 (April 2019): 12–21. http://dx.doi.org/10.4028/www.scientific.net/nhc.25.12.

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This work presents improvement of H2S gas sensing capability by introducing TiO2 in conductive polymer namely “MEH-PPV”. Firstly, the organic conjugated polymer poly ( 2-methoxy-5- ( 2'-ethythexyloxy) - 1,4-phenlenevinylene) and TiO2 was dissolved in chloroform solvent. The two solutions “MEH-PPV” and TiO2 were mixed in a volume ratio of (0.002 and 0.008) respectively and spin-coated on Si substrate for realizing facile and low-cost sensors. The X-Ray diffraction spectrum of (MEH-PPV/TiO2) nanocomposite thin films was studied, all the pattern showed that the structure is amorphous. The morphology was demonstrated by Field Emission Scanning Electron Microscope (FESEM) images for MEH-PPV and MEH-PPV/TiO2 films which shows formed anano flower like structure with introduces of TiO2All films were examined by Atomic Force Microscope (AFM) which revealed the average roughness increment from 0.204 to 1.25 nm with increase the mixed rate of TiO2. The “MEH-PPV/TiO2” based sensors also shown noticeable responses when the sensors exposure to H2S gas at the concentration of 25ppm. The maximum sensitivity for MEH-PPV/(0.008) TiO2 was 528.1 at operating temperature at 100°C, whereas the response and recovery time was ~ 21.5 s and ~3.8 s, respectively.

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Malallah Rzaij, Jamal, and Amina Mohsen Abass. "Review on: TiO2 Thin Film as a Metal Oxide Gas Sensor." Journal of Chemical Reviews 2, no. 2 (March 1, 2020): 114–21. http://dx.doi.org/10.33945/sami/jcr.2020.2.4.

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Lee, Seung-Woo, Naoki Takahara, Sergiy Korposh, Do-Hyeon Yang, Kiyoshi Toko, and Toyoki Kunitake. "Nanoassembled Thin Film Gas Sensors. III. Sensitive Detection of Amine Odors Using TiO2/Poly(acrylic acid) Ultrathin Film Quartz Crystal Microbalance Sensors." Analytical Chemistry 82, no. 6 (March 15, 2010): 2228–36. http://dx.doi.org/10.1021/ac901813q.

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Chen, Rong, Guilian Lan, Ning Wang, Wenjing Yan, Jueming Yi, and Wei Wei. "Highly sensitive fiber-optic SPR sensor with surface coated TiO₂/MWCNT composite film for hydrogen sulfide gas detection." Journal of Physics D: Applied Physics 55, no. 10 (December 8, 2021): 105108. http://dx.doi.org/10.1088/1361-6463/ac378f.

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Abstract Hydrogen sulfide (H2S) gas has a severe effect on the respiratory system of the human body and ambient environment, necessitating development of on-line H2S gas sensors with high performance for safety and health concerns. Here, we proposed a fiber-optic surface plasmon resonance sensor for H2S detection employing TiO2 nanoparticles and multilayer carbon nanotubes composite (TiO2/MWCNT) as sensing film, featuring desirable advantages of high sensitivity, selectivity, and real-time detection. Benefiting from special structure and large specific surface area of MWCNTs, the adsorption capacity of sensing surface to gas molecules can be significantly enhanced. Moreover, the high carrier mobility of MWCNTs can further promote the charge transfer between TiO2 and H2S. These unique features of TiO2/MWCNT composite film result in an obvious improvement of sensitivity for H2S detection. Experimental results show that the maximum sensitivity of 21.76 pm ppm−1 (picometer/part-per-million) and detection limit of 0.2 ppm can be obtained by appropriately optimizing the componential constitutions of TiO2/MWCNT composite. Such detection limit is strikingly lower than the threshold concentrations in workplace set by Federal Institute for Occupational Safety (10 ppm). In addition, the favorable selectivity, response/recovery times, repeatability and stability were demonstrated as well. This facile and cost-effective work provides a novel strategy for constructing high performance H2S gas sensor with fast response and real-time detection, which has prospective application in the fields of human health and environmental conservation.

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Shukla, Gaurav, and Alika K. Khare. "Effect of Annealing on Structural and Optical Properties of Pulsed Laser Deposited Titanium Dioxide Thin Films." Advanced Materials Research 67 (April 2009): 65–70. http://dx.doi.org/10.4028/www.scientific.net/amr.67.65.

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TiO2 is a widely studied material for many important applications in areas such as environmental purification, photocatalyst, gas sensors, cancer therapy and high effect solar cell. However, investigations demonstrated that the properties and applications of titanium oxide films depend upon the nature of the crystalline phases present in the films, i.e. anatase and rutile phases. We report on the pulsed laser deposition of high quality TiO2 thin films. Pulsed Laser deposition of TiO2 thin films were performed in different ambient viz. oxygen, argon and vacuum, using a second harmonic of Nd:YAG laser of 6 ns pulse width. These deposited films of TiO2 were further annealed for 5hrs in air at different temperatures. TiO2 thin films were characterized using x-ray diffraction, SEM, photoluminescence, transmittance and reflectance. We observed effect of annealing over structural, morphological and optical properties of TiO2 thin films. The anatase phase of as-deposited TiO2 thin films is found to change into rutile phase with increased annealing temperature. Increase in crystalline behaviour of thin films with post-annealing temperature is also observed. Surface morphology of TiO2 thin films is dependent upon ambient pressure and post- annealing temperature. TiO2 thin films are found to be optically transparent with very low reflectivity hence will be suitable for antireflection coating applications.

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Wang, Yongqi, and Yawen Dai. "Synthesis and gas sensing properties of La and V Co-doped TiO2 thick film." Functional Materials Letters 11, no. 01 (February 2018): 1850019. http://dx.doi.org/10.1142/s1793604718500194.

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In this paper, we fabricated a new material based on the lanthanum (La) and vanadium (V) co-doped TiO2 by the sol–gel method, then used La and V codopant TiO2 power materials to fabricate the thin film type gas sensor by the screen-printing technology. Finally, we tested gas sensing response properties for different gases. We found La and V co-doped TiO2 simultaneously possess the La and V doping double characterization. In particular, the La and V co-doped samples showed a good response to formaldehyde, only slightly influenced by presence of benzene.

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Journal articles on the topic 'TiO2 Thin Film Gas Sensors'

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