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Journal articles on the topic 'Thin films; Elastic properties'

Author: Grafiati

Published: 4 June 2021

Last updated: 10 February 2022

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1

Serizawa, Kazufumi, Keisuke Tanaka, Yoshiaki Akiniwa, and Hirohisa Kimachi. "OS06W0448 Finite element analysis of elastic properties of textured thin films." Abstracts of ATEM : International Conference on Advanced Technology in Experimental Mechanics : Asian Conference on Experimental Mechanics 2003.2 (2003): _OS06W0448. http://dx.doi.org/10.1299/jsmeatem.2003.2._os06w0448.

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2

Streitz, F. H., K. Sieradzki, and R. C. Cammarata. "Elastic properties of thin fcc films." Physical Review B 41, no. 17 (June 15, 1990): 12285–87. http://dx.doi.org/10.1103/physrevb.41.12285.

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3

Hurley, D. C., R. H. Geiss, M. Kopycinska-Müller, J. Müller, D. T. Read, J. E. Wright, N. M. Jennett, and A. S. Maxwell. "Anisotropic elastic properties of nanocrystalline nickel thin films." Journal of Materials Research 20, no. 5 (May 2005): 1186–93. http://dx.doi.org/10.1557/jmr.2005.0146.

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The elastic properties of a nickel film approximately 800 nm thick were measured with nanoindentation, microtensile testing, atomic force acoustic microscopy (AFAM), and surface acoustic wave (SAW) spectroscopy. Values for the indentation modulus (220–223 GPa) and Young’s modulus (177–204 GPa) were lower than predicted for randomly oriented polycrystalline nickel. The observed behavior was attributed to grain-boundary effects in the nanocrystalline film. In addition, the different measurement results were not self-consistent when interpreted assuming elastic isotropy. Agreement was improved by adopting a transversely isotropic model corresponding to the film’s 〈111〉 preferred orientation and reducing the elastic moduli by 10–15%. The SAW spectroscopy results indicated that the film density was 1–2% lower than expected for bulk nickel, consistent with models for nanocrystalline materials. Similar reductions in modulus and density were observed for two additional films approximately 200 and 50 nm thick using AFAM and SAW spectroscopy. These results illustrate how complementary methods can provide a more complete picture of film properties.

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4

Marques, Francisco C. "Thermal and Elastic Properties of Thin Films." International Journal of Advanced Engineering Research and Science 3, no. 11 (2016): 89–92. http://dx.doi.org/10.22161/ijaers/3.11.15.

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5

Werner, M., S. Hein, and E. Obermeier. "Elastic properties of thin polycrystalline diamond films." Diamond and Related Materials 2, no. 5-7 (April 1993): 939–42. http://dx.doi.org/10.1016/0925-9635(93)90254-y.

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6

Lee, Dong Nyung. "Elastic properties of thin films of cubic system." Thin Solid Films 434, no. 1-2 (June 2003): 183–89. http://dx.doi.org/10.1016/s0040-6090(03)00538-8.

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7

Mizubayashi, H. "Elastic and Anelastic Properties of Amorphous Thin Films." Le Journal de Physique IV 06, no. C8 (December 1996): C8–769—C8–778. http://dx.doi.org/10.1051/jp4:19968165.

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8

Carlotti, G., G. Socino, and L. Doucet. "Elastic properties of spin‐on glass thin films." Applied Physics Letters 66, no. 20 (May 15, 1995): 2682–84. http://dx.doi.org/10.1063/1.113124.

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9

Bandhu, R. S., R. Sooryakumar, R. F. C. Farrow, D. Weller, M. F. Toney, and T. A. Rabedeau. "Elastic properties of chemically ordered Co3Pt thin films." Journal of Applied Physics 91, no. 5 (March 2002): 2737–41. http://dx.doi.org/10.1063/1.1433924.

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10

Pagliaro, Mario, Giovanni Palmisano, Eric Le Bourhis, Rosaria Ciriminna, Laura M. Ilharco, and Alexandra Fidalgo. "Enhanced Mechanical Properties in Organofluorosilica Thin Films." Journal of Nanomaterials 2008 (2008): 1–5. http://dx.doi.org/10.1155/2008/964046.

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Fluorinated hybrid organic-inorganic silicates (ORMOSIL) thin films display exceptional mechanical properties in terms of both hardness and elastic modulus that can be finely tuned by varying the angular velocity of the spin coating process. Hence, as traditional alkyl-modified silica xerogels generally show poor mechanical behavior, these materials offer a solution to a major limitation to applicability of ORMOSIL-based films.

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11

Xiang, Y., T. Y. Tsui, and J. J. Vlassak. "The mechanical properties of freestanding electroplated Cu thin films." Journal of Materials Research 21, no. 6 (June 1, 2006): 1607–18. http://dx.doi.org/10.1557/jmr.2006.0195.

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The plane-strain bulge test is used to investigate the mechanical behavior of freestanding electroplated Cu thin films as a function of film thickness and microstructure. The stiffness of the films increases slightly with decreasing film thickness because of changes in the crystallographic texture and the elastic anisotropy of Cu. Experimental stiffness values agree well with values derived from single-crystal elastic constants and the appropriate orientation distribution functions. No modulus deficit is observed. The yield stress of the films varies with film thickness and heat treatment as a result of changes in the grain size of the films. The yield stress follows typical Hall-Petch behavior if twins are counted as distinct grains, indicating that twin boundaries are effective barriers to dislocation motion. The Hall-Petch coefficient is in good agreement with values reported for bulk Cu. Film thickness and crystallographic texture have a negligible effect on the yield stress of the films.

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12

Beghi, M. G., C. E. Bottani, L. Guzman, T. Lafford, N. Laidani, P. M. Ossi, and B. K. Tanner. "Structure and elastic properties of thin alloyed gold films." Thin Solid Films 317, no. 1-2 (April 1998): 198–201. http://dx.doi.org/10.1016/s0040-6090(97)00619-6.

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13

Abadias, G., J. J. Colin, D. Tingaud, Ph Djemia, L. Belliard, and C. Tromas. "Elastic properties of α- and β-tantalum thin films." Thin Solid Films 688 (October 2019): 137403. http://dx.doi.org/10.1016/j.tsf.2019.06.053.

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14

Rubio-Zuazo, J., M. Vila, A. Muñoz-Martı́n, A. de Bernabé, and C. Prieto. "Gd thin films: relationship between elastic properties and microstructure." Journal of Alloys and Compounds 323-324 (July 2001): 107–10. http://dx.doi.org/10.1016/s0925-8388(01)00984-7.

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15

Barnett, S. A., and M. Shinn. "Plastic and Elastic Properties of Compositionally Modulated Thin Films." Annual Review of Materials Science 24, no. 1 (August 1994): 481–511. http://dx.doi.org/10.1146/annurev.ms.24.080194.002405.

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16

Chirita, M., H. Xia, R. Sooryakumar, J. B. Tolle, V. M. Torres, B. J. Wilkens, D. J. Smith, J. Kouvetakis, and I. S. T. Tsong. "Elastic properties of nanocrystalline zirconium–silicon–boron thin films." Journal of Applied Physics 89, no. 8 (April 15, 2001): 4349–53. http://dx.doi.org/10.1063/1.1354632.

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17

Wei, Zhongxin, Guoping Zhang, Hao Chen, Jian Luo, Ranran Liu, and Shengmin Guo. "A simple method for evaluating elastic modulus of thin films by nanoindentation." Journal of Materials Research 24, no. 3 (March 2009): 801–15. http://dx.doi.org/10.1557/jmr.2009.0126.

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A simple empirical method that extracts the elastic moduli of both thin films and the underlying substrates is proposed and validated by both new nanoindentation experiments and published data. Deconvolution of thin film’s elastic properties from the substrate is achieved by statistical estimation, where a simple function relating the elastic moduli of the thin film and substrate to the film-substrate composite modulus is used to fit the experimental data plotted against the logarithmic indentation depth normalized by film thickness. Experimental data from a wide range of soft and hard films on substrate were used to demonstrate the deconvolution and validate the method. The estimated elastic moduli of thin films and substrates agree well with their corresponding standard values or values obtained by other methods. The advantages of this method are discussed, and recommendations are made on how to design experiments to obtain reliable data for this method.

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18

Fernando, S. P., A. L. Elias, and M. J. Brett. "Mechanical properties of helically perforated thin films." Journal of Materials Research 21, no. 5 (May 1, 2006): 1101–5. http://dx.doi.org/10.1557/jmr.2006.0160.

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The mechanical behavior of a helically perforated thin film structure was simulated by finite element analysis. The validity of the results was confirmed by comparison to a nanoindentation measurement performed on a nickel helically perforated thin film sample. It was found that variation of the helical pitch angle from 35° to 70° resulted in a change of 1.5 times in the elastic modulus. Since the fabrication process used to create the actual samples allows for variation of the pitch angle, this result may enable the tailoring of materials for use in micro- and nanoscale devices.

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19

Li, Haoqi, Jiaxin Xi, Yao Zhao, and Fei Ren. "Mechanical properties of polydopamine (PDA) thin films." MRS Advances 4, no. 07 (2019): 405–12. http://dx.doi.org/10.1557/adv.2019.52.

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ABSTRACTPolydopamine (PDA) is a biopolymer, which can form uniform thin films on almost all solid substrates as well as at the liquid/air interface. Carbonized polydopamine possesses graphite-like structure and exhibits high electrical conductivity, which makes it a potential carbon-based thin film conductor. However, studies on mechanical behavior of PDA and its derived materials are very limited. In this study, PDA samples were synthesized through self-assembly of dopamine in aqueous solution. Elastic modulus of thin films was measured using the nanoindentation technique. It is shown that the Young’s modulus of PDA thin film increased with increasing heat treatment temperature (up to 600°C). Doping with Cu ions also increased the Young’s modulus of PDA. Furthermore, all PDA thin films, with and without Cu, exhibited creep behavior.

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20

Dahm, K. L. "Thin coatings with graded elastic properties." Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology 222, no. 3 (March 2008): 249–59. http://dx.doi.org/10.1243/13506501jet376.

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21

Cheng, W., R. Sainidou, P. Burgardt, N. Stefanou, A. Kiyanova, M. Efremov, G. Fytas, and P. F. Nealey. "Elastic Properties and Glass Transition of Supported Polymer Thin Films." Macromolecules 40, no. 20 (October 2007): 7283–90. http://dx.doi.org/10.1021/ma071227i.

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22

Streitz, F. H., R. C. Cammarata, and K. Sieradzki. "Surface-stress effects on elastic properties. I. Thin metal films." Physical Review B 49, no. 15 (April 15, 1994): 10699–706. http://dx.doi.org/10.1103/physrevb.49.10699.

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23

Maier-Schneider, D., J. Maibach, and E. Obermeier. "Computer-aided characterization of the elastic properties of thin films." Journal of Micromechanics and Microengineering 2, no. 3 (September 1, 1992): 173–75. http://dx.doi.org/10.1088/0960-1317/2/3/011.

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24

Schwarz, R. B., and J. B. Rubin. "Elastic properties of amorphous thin films studied using Rayleigh waves." Materials Science and Engineering: A 179-180 (May 1994): 137–41. http://dx.doi.org/10.1016/0921-5093(94)90180-5.

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25

Wolf, D. "Computer simulation of elastic and structural properties of thin films." Surface Science 225, no. 1-2 (January 1990): 117–29. http://dx.doi.org/10.1016/0039-6028(90)90430-g.

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26

Mwendwa, G., D. Wamwangi, B. Mathe, R. Erasmus, D. Billing, A. Shnier, and M. Madhuku. "Elastic and magnetic properties of Tb-MnO based thin films." Journal of Magnetism and Magnetic Materials 537 (November 2021): 168199. http://dx.doi.org/10.1016/j.jmmm.2021.168199.

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27

Jung, Yeon-Gil, Brian R. Lawn, Mariusz Martyniuk, Han Huang, and Xiao Zhi Hu. "Evaluation of elastic modulus and hardness of thin films by nanoindentation." Journal of Materials Research 19, no. 10 (October 1, 2004): 3076–80. http://dx.doi.org/10.1557/jmr.2004.0380.

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Simple equations are proposed for determining elastic modulus and hardness properties of thin films on substrates from nanoindentation experiments. An empirical formulation relates the modulus E and hardness H of the film/substrate bilayer to corresponding material properties of the constituent materials via a power-law relation. Geometrical dependence of E and H is wholly contained in the power-law exponents, expressed here as sigmoidal functions of indenter penetration relative to film thickness. The formulation may be inverted to enable deconvolution of film properties from data on the film/substrate bilayers. Berkovich nanoindentation data for dense oxide and nitride films on silicon substrates are used to validate the equations and to demonstrate the film property deconvolution. Additional data for less dense nitride films are used to illustrate the extent to which film properties may depend on the method of fabrication.

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28

Šimůrka, Lukáš, Selen Erkan, and Tuncay Turutoglu. "Characterization of Silicon Nitride Thin Films on Glass." Defect and Diffusion Forum 368 (July 2016): 86–90. http://dx.doi.org/10.4028/www.scientific.net/ddf.368.86.

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The influence of process parameters on amorphous reactively sputtered silicon nitride thin films is reported in this study. The films were prepared with various argon and nitrogen flows, and sputter power in in-line horizontal coater by DC magnetron reactive sputtering from Si (10% Al) target. Refractive index and mechanical properties like residual stress, hardness and elastic modulus were studied. We show that process pressure has an important influence on mechanical properties of the sputtered film. On the other hand, the nitrogen content is the key factor for the optical properties of the films.

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29

Zhi, Zheng, and T. A. Venkatesh. "Determination of the Elastic and Plastic Properties of Transversely Isotropic Thin Films on Substrates by Sharp Indentation." MRS Advances 3, no. 8-9 (2018): 445–50. http://dx.doi.org/10.1557/adv.2018.79.

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ABSTRACTA combination of dimensional analysis and finite element modeling was invoked to characterize the indentation behavior of transversely isotropic thin films on substrate materials. Through indentation simulations of over 13,500 combinations of properties for the thin film system, functional relationships that connect the indentation responses of the thin films with the elastic and plastic properties of the thin films were obtained. The forward algorithms that predict the indentation response characteristics from known material properties and the reverse algorithms that predict the material properties from known indentation responses were verified to be very accurate. Thus, the viability of using the indentation method to determine the elastic and plastic properties of transversely isotropic thin films on substrate materials was demonstrated.

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30

Liao, Yanguo, Yichun Zhou, Yongli Huang, and Limei Jiang. "Measuring elastic–plastic properties of thin films on elastic–plastic substrates by sharp indentation." Mechanics of Materials 41, no. 3 (March 2009): 308–18. http://dx.doi.org/10.1016/j.mechmat.2008.10.008.

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31

Vella, J. B., A. B. Mann, H. Kung, C. L. Chien, T. P. Weihs, and R. C. Cammarata. "Mechanical properties of nanostructured amorphous metal multilayer thin films." Journal of Materials Research 19, no. 6 (June 2004): 1840–48. http://dx.doi.org/10.1557/jmr.2004.0248.

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The hardness of amorphous metal multilayered films was investigated by nanoindenation. Bilayer material systems of amorphous CuNb, FeB, and FeTi were produced by dc sputtering on 〈112￣0〉 sapphire substrates to a total thickness of 1 μm. The bilayer periods (Λ) ranged from 2 to 50 nm. The films’ noncrystallinity was verified by x-ray diffraction (XRD) and electron diffraction. The layer structure was verified by transmission electron microscopy and grazing angle XRD. The hardness and elastic modulus properties of the films, measured by nanoindentation, were shown to be statistically equivalent to the rule mixtures predictions. The hardness behavior is in contrast with the behavior of crystalline multilayered films, which generally display significant enhancements as the bilayer period is decreased below 10 nm. The lack of a significant hardness variation in the amorphous films strongly suggests that dislocation-mediated mechanisms do not govern inhomogeneous flow in amorphous metals.

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32

Zhang, Jianming, Zehra Parlak, Carleen M. Bowers, Terrence Oas, and Stefan Zauscher. "Mapping mechanical properties of organic thin films by force-modulation microscopy in aqueous media." Beilstein Journal of Nanotechnology 3 (June 26, 2012): 464–74. http://dx.doi.org/10.3762/bjnano.3.53.

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The mechanical properties of organic and biomolecular thin films on surfaces play an important role in a broad range of applications. Although force-modulation microscopy (FMM) is used to map the apparent elastic properties of such films with high lateral resolution in air, it has rarely been applied in aqueous media. In this letter we describe the use of FMM to map the apparent elastic properties of self-assembled monolayers and end-tethered protein thin films in aqueous media. Furthermore, we describe a simple analysis of the contact mechanics that enables the selection of FMM imaging parameters and thus yields a reliable interpretation of the FMM image contrast.

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33

Lee, Dong Nyung. "Corrigendum to “Elastic properties of thin films of cubic system” [Thin Solid Films 434 (2003) 183-189]." Thin Solid Films 520, no. 9 (February 2012): 3708. http://dx.doi.org/10.1016/j.tsf.2011.12.057.

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34

LEROY, S., and E. CHARLAIX. "Hydrodynamic interactions for the measurement of thin film elastic properties." Journal of Fluid Mechanics 674 (March 17, 2011): 389–407. http://dx.doi.org/10.1017/s0022112010006555.

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We study the elasto-hydrodynamic (EHD) interaction of a sphere with a flat elastic surface in the prospect of measuring the elastic moduli of soft supported thin films, with non-contact dynamic surface forces or atomic force microscopy measurements. When the sphere is oscillated at a very small amplitude close to the surface, the linear force response undergoes a dynamic transition from a viscous-dominated behaviour at large distance to an elastic-dominated behaviour at short distance. In the limit of very thin or very thick supported layers, we show that the force response obeys simple scaling laws which allow to unambiguously determine the absolute elastic modulus of the layer. In the general case, we establish the very rich phase diagram of the EHD interaction and discuss its application for optimizing experimental parameters.

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35

D. Nix, William. "Elastic and plastic properties of thin films on substrates: nanoindentation techniques." Materials Science and Engineering: A 234-236 (August 1997): 37–44. http://dx.doi.org/10.1016/s0921-5093(97)00176-7.

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36

Braeckman, B. R., P. Djemia, F. Tétard, L. Belliard, and D. Depla. "Impurity-controlled film growth and elastic properties of CoCrCuFeNi thin films." Surface and Coatings Technology 315 (April 2017): 475–83. http://dx.doi.org/10.1016/j.surfcoat.2017.03.014.

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37

Schneider, Jochen M., Karin Larsson, Jun Lu, Eva Olsson, and Björgvin Hjörvarsson. "Role of hydrogen for the elastic properties of alumina thin films." Applied Physics Letters 80, no. 7 (February 18, 2002): 1144–46. http://dx.doi.org/10.1063/1.1448389.

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38

Richter, Asta, Hubert Gojżewski, and Joseph J. Belbruno. "Visco-elastic properties of thin nylon films using multi-cycling nanoindentation." International Journal of Materials Research 98, no. 5 (May 2007): 414–23. http://dx.doi.org/10.3139/146.101487.

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39

Scanlon, M. R., R. C. Cammarata, D. J. Keavney, J. W. Freeland, J. C. Walker, and C. Hayzelden. "Elastic and hardness properties of Fe–Ag (001) multilayered thin films." Applied Physics Letters 66, no. 1 (January 2, 1995): 46–48. http://dx.doi.org/10.1063/1.114177.

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40

Geandier, G., P. O. Renault, Ph Goudeau, E. Le Bourhis, and O. Castelnau. "Characterization of elastic properties of nanostructured thin films by X-rays." Acta Crystallographica Section A Foundations of Crystallography 63, a1 (August 22, 2007): s283. http://dx.doi.org/10.1107/s0108767307093580.

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41

Gueye, M., F. Zighem, M. Belmeguenai, M. S. Gabor, C. Tiusan, and D. Faurie. "Spectroscopic investigation of elastic and magnetoelastic properties of CoFeB thin films." Journal of Physics D: Applied Physics 49, no. 14 (March 10, 2016): 145003. http://dx.doi.org/10.1088/0022-3727/49/14/145003.

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42

Manoharan, M. P., H. Lee, R. Rajagopalan, H. C. Foley, and M. A. Haque. "Elastic Properties of 4–6 nm-thick Glassy Carbon Thin Films." Nanoscale Research Letters 5, no. 1 (September 23, 2009): 14–19. http://dx.doi.org/10.1007/s11671-009-9435-2.

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43

Yate, Luis, L. Emerson Coy, Guocheng Wang, Mikel Beltrán, Enrique Díaz-Barriga, Esmeralda M. Saucedo, Mónica A. Ceniceros, et al. "Tailoring mechanical properties and electrical conductivity of flexible niobium carbide nanocomposite thin films." RSC Adv. 4, no. 106 (2014): 61355–62. http://dx.doi.org/10.1039/c4ra11292j.

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44

Jarausch, K. F., J. D. Kiely, J. E. Houston, and P. E. Russell. "Defect-dependent Elasticity: Nanoindentation as a Probe of Stress State." Journal of Materials Research 15, no. 8 (August 2000): 1693–701. http://dx.doi.org/10.1557/jmr.2000.0244.

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Using an interfacial force microscope, the measured elastic response of 100-nm-thick Au films was found to be strongly correlated with the films' stress state and thermal history. Large, reversible variations (2×) of indentation modulus were recorded as a function of applied stress. Low-temperature annealing caused permanent changes in the films' measured elastic properties. The measured elastic response was also found to vary in close proximity to grain boundaries in thin films and near surface steps on single-crystal surfaces. These results demonstrate a complex interdependence of stress state, defect structure, and elastic properties in thin metallic films.

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45

Lai, Lei, Xiao Jia Wang, and Jun Jie Hao. "The Study of SiC Thin Films Produced by Magnetron Sputtering." Key Engineering Materials 609-610 (April 2014): 82–87. http://dx.doi.org/10.4028/www.scientific.net/kem.609-610.82.

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In this paper, SiC films were deposited on the surface of 316L stainless steel by magnetron sputtering with sintering SiC target to improve its wear resistance. The structure and morphologies of the SiC films were characterized by XRD and SEM. The impacts of sputtering way, deposition time, and substrate temperature on the deposition rate and mechanical properties of SiC films were further investigated by the performance parameters of hardness, elastic modulus, friction and wear properties, coating adhesion, etc. The results show that coating adhesion is higher when the films are deposited by mid-frequency magnetron sputtering than that of which by direct current sputtering; Hardness and elastic modulus of the films increased gradually with the deposition time changing from 1 to 5h or the substrate temperature changing from room temperature to 200°C; However, the friction coefficient initially decreases, but turns to increase with the deposition time prolonging or the substrate temperature rising. The wear resistance of the films is the best when deposition time is 2h and substrate temperature is 100°C.

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46

Tichy, J. "Rheological Behavior of Confined Fluids in Thin Lubricated Contacts." Journal of Applied Mechanics 68, no. 2 (May 3, 1999): 278–83. http://dx.doi.org/10.1115/1.1354204.

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Continuum based methods are traditionally thought to be of little value in describing boundary lubrication, or the mode of lubrication in molecular scale films that may occur at asperity interactions during the sliding of nominally flat surfaces. There is considerable experimental evidence, which suggests that the classical theory may be valid with modification to films as thin as several nanometers. In addition, lubricants, which exhibit viscous liquid properties in bulk, may form attached solid-like elastic layers when confined between solid surfaces. In the present paper, the simple “elastic foundation” concept is used to model the elastic layers, in contact with a viscous fluid film. Several typical bearing contact flow problems are solved, giving hope that boundary lubrication may eventually be modeled in the same manner as hydrodynamic lubrication in thicker films.

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47

Evans, A. G., M. D. Drory, and M. S. Hu. "The cracking and decohesion of thin films." Journal of Materials Research 3, no. 5 (October 1988): 1043–49. http://dx.doi.org/10.1557/jmr.1988.1043.

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The cracking and decohesion of thin films can be characterized by critical values of a nondimensional parameter governed by the residual stress, the film thickness, and a fracture resistance. This article reviews the status of understanding concerning the magnitude of this number for various types of adherent film on either brittle or ductile substrates. Important effects of elastic properties, substrate thickness, and yield strength are described.

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48

Yoon, Han Ki, and Yun Sik Yu. "Hardness and Elastic Modulus of ZnO Thin Films Fabricated by PLD Method." Key Engineering Materials 353-358 (September 2007): 2966–69. http://dx.doi.org/10.4028/www.scientific.net/kem.353-358.2966.

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ZnO is an n-type semiconductor having a hexagonal wurzite structure. ZnO exhibits good piezoelectric and optical properties, and might be a good candidate for an electroluminescence device like an UV laser diode. Then, these devices are very small, their films are very thin and they are prepared in the limited size and shape, so they are unsuitable for the extensive mechanical testing. In this present work, ZnO thin films are prepared on the glass, GaAs(100), Si(100) and Si(111) substrates at various temperatures by the pulsed laser deposition (PLD) method. ZnO thin films were evaluated by X-ray diffraction (XRD) and mechanical properties such as hardness and elastic modulus were measured through the nano-indenter.

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49

Xiang, Dao Hui, Ming Chen, Y. P. Ma, and Fang Hong Sun. "Measurement of Elastic Modulus and Residual Stress of Diamond Thin Films." Key Engineering Materials 329 (January 2007): 545–50. http://dx.doi.org/10.4028/www.scientific.net/kem.329.545.

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Despite great advancements in diamond thin film growth and deposition techniques, determination of the residual stress and Young’s modulus for diamond films has continued to be a challenge. The bulge test is a potentially powerful tool for characterizing the mechanical properties of diamond film. In a bulge tester, pressure is applied on a thin membrane and the out-of-plane deflection of the membrane center is measured. The Young’s Modulus and the residual stress are simultaneously determined by using the load-deflection behavior of a membrane. By means of electron-enhanced hot filament chemical vapor deposition (HFCVD), a diamond film was deposited on silicon slice (100), and the free-standing window sample of diamond thin films was fabricated by means of photolithography and anisotropic wet etching. The deflection of the membranes is measured using a laser interferometry system. The elastic modulus and residual stress were measured using a self-designed bulge equipment. In addition, the distortion of diamond thin films under different pressure was simulated using finite element analysis and the contrast was made with experimental data. The research indicated that the Young’s Modulus of diamond thin films is 937.8GPa and the residual stress is -10.53MPa. The elastic modulus and the residual stress coincide with the report in the literature and the value tested by X-ray diffraction, respectively. This method uses a simple apparatus, and the fabrication of samples is very easy, and it has provided an effective means for precise measure the mechanical properties of other thin films.

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Teplykh, Andrey, Boris Zaitsev, Irina Borodina, Alexander Semyonov, Mayya Ziangirova, Nailya Almyasheva, Alexander Golyshkin, Larissa Krasnopolskaya, and Iren Kuznetsova. "The study of the mechanical properties of thin films using piezoceramic acoustic resonators." ITM Web of Conferences 30 (2019): 07002. http://dx.doi.org/10.1051/itmconf/20193007002.

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Abstract:

The paper describes a method for determining the properties of thin films: elastic constants, viscosity and density. The method is based on the analysis of changing the characteristics of the acoustic resonator, on the surface of which the film under study is deposited, in comparison with a free resonator. Using the described method, the properties of two organic films based on the mycelium of basidiomycete Hericium erinaceus (Bull.) Persoon were determined.

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