Journal articles: 'Thin film transducers'

1

Anderson, J. C. "Thin film transducers and sensors." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 4, no. 3 (May 1986): 610–16. http://dx.doi.org/10.1116/1.573843.

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Kazaryan, A. A. "Thin-film capacitance pressure transducers." Measurement Techniques 33, no. 10 (October 1990): 1008–11. http://dx.doi.org/10.1007/bf00990519.

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Fiaccabrino, Giovanni Carlo, and Milena Koudelka-Hep. "Thin-Film Microfabrication of Electrochemical Transducers." Electroanalysis 10, no. 4 (April 1998): 217–22. http://dx.doi.org/10.1002/(sici)1521-4109(199804)10:4<217::aid-elan217>3.0.co;2-w.

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Trase, Ian, Zhe Xu, Zi Chen, Hong Tan, and John X. J. Zhang. "Thin-film bidirectional transducers for haptic wearables." Sensors and Actuators A: Physical 303 (March 2020): 111655. http://dx.doi.org/10.1016/j.sna.2019.111655.

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Gatzen, H. H., and Christine Ruffert. "Advances in Magnetic Micro Thin-Film Transducers." ECS Transactions 3, no. 25 (December 21, 2019): 203–21. http://dx.doi.org/10.1149/1.2753254.

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Hunter, Joe S. "Multifunction sensor using thin film transistor transducers." Journal of the Acoustical Society of America 77, no. 5 (May 1985): 1978. http://dx.doi.org/10.1121/1.391784.

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Jen, C. K., C. Neron, G. Yi, M. Sayer, M. Castonguay, and J. D. N. Cheeke. "Acoustic lenses employing PZT thin film transducers." Materials Science and Engineering: A 122, no. 1 (December 1989): 21–25. http://dx.doi.org/10.1016/0921-5093(89)90765-x.

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Davis, G. T. "Piezoelectric Polymer Transducers." Advances in Dental Research 1, no. 1 (December 1987): 45–49. http://dx.doi.org/10.1177/08959374870010011101.

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Poly(vinylidene fluoride) (CH2-CF2)n is a tough, flexible polymer readily available in the form of thin film which can be made piezoelectric by the temporary application of a high electric field. The areas of the film which become piezoelectric can be controlled to be the areas where metal electrodes are evaporated onto the film. The same electrodes and associated leads are subsequently used to detect the electric charge generated by the application of pressure to the active area. Such films may have applications in the measurement of occlusal forces. Many of the problems that might be encountered in an occlusal gauge have been addressed separately in other applications. For example, polymer transducers less than 100 μm thick have been developed and tested for measuring the nip pressure on an intaglio printing press. Piezoelectric polymer gauges have been successfully encased in a protective layer of another polymer to prevent the sharp edges of sand particles from breaking through the piezoelectric film. Transducer films with an array of active areas have been produced with electrical leads from each area so that the source of the signal can be traced. Electrode patterns have usually been established by evaporation of metal through a mask, but silk-screening a conductive ink has also been shown to be an effective means of defining which areas of the film are to be made piezoelectric. Finally, poly(vinylidene fluoride) has been shown to retain 80% of its initial activity after 1000 hours at 100°C, and it is unaffected by moisture. Therefore, if necessary, gauges to be used in dentistry could be subjected to steam sterilization for repeated use. The physical properties of such polymer films and examples of their use in pressure transducers are reviewed with the intent of stimulating interest in development of a system useful for measuring occlusal forces.

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Liu, Tianning, Ajay Dangi, Jeong Nyeon Kim, Sri-Rajasekhar Kothapalli, Kyusun Choi, Susan Trolier-McKinstry, and Thomas Jackson. "Flexible Thin-Film PZT Ultrasonic Transducers on Polyimide Substrates." Sensors 21, no. 3 (February 2, 2021): 1014. http://dx.doi.org/10.3390/s21031014.

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We report flexible thin-film lead zirconate titanate (PZT)-based ultrasonic transducers on polyimide substrates. The transducers are bar resonators designed to operate in the width extension mode. The active elements are 1 µm thick PZT films that were crystallized on Si substrates at 700 °C and transferred to 5 µm thick solution-cast polyimide via dissolution of an underlying release layer. Underwater pitch–catch testing between two neighboring 100 µm × 1000 µm elements showed a 0.2 mV signal at a 1.5 cm distance for a driving voltage of 5 V peak at 9.5 MHz. With the same excitation, a 33 kPa sound pressure output at a 6 mm distance and a 32% bandwidth at −6 dB were measured by hydrophone.

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Kirk, K. J., C. K. Lee, and S. Cochran. "Ultrasonic thin film transducers for high-temperature NDT." Insight - Non-Destructive Testing and Condition Monitoring 47, no. 2 (February 1, 2005): 85–87. http://dx.doi.org/10.1784/insi.47.2.85.58980.

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Osmani, Bekim, Saman Seifi, Harold S. Park, Vanessa Leung, Tino Töpper, and Bert Müller. "Nanomechanical probing of thin-film dielectric elastomer transducers." Applied Physics Letters 111, no. 9 (August 28, 2017): 093104. http://dx.doi.org/10.1063/1.5000736.

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Mathis, Maximilian, Dennis Vollberg, Matthäus Langosch, Dirk Göttel, Angela Lellig, and Günter Schultes. "Creep adjustment of strain gauges based on granular NiCr-carbon thin films." Journal of Sensors and Sensor Systems 10, no. 1 (March 12, 2021): 53–61. http://dx.doi.org/10.5194/jsss-10-53-2021.

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Abstract. An important property of high-precision mechanical sensors such as force transducers or torque sensors is the so-called creep error. It is defined as the signal deviation over time at a constant load. Since this signal deviation results in a reduced accuracy of the sensor, it is beneficial to minimize the creep error. Many of these sensors consist of a metallic spring element and strain gauges. In order to realize a sensor with a creep error of almost zero, it is necessary to compensate for the creep behavior of the metallic spring element. This can be achieved by creep adjustment of the used strain gauges. Unlike standard metal foil strain gauges with a gauge factor of 2, a type of strain gauges based on sputter-deposited NiCr-carbon thin films on polymer substrates offers the advantage of an improved gauge factor of about 10. However, for this type of strain gauge, creep adjustment by customary methods is not possible. In order to remedy this disadvantage, a thorough creep analysis is carried out. Five major influences on the creep error of force transducers equipped with NiCr-carbon thin-film strain gauges are examined, namely, the material creep of the metallic spring element (1), the creep (relaxation) of the polymer substrate (2), the composition of the thin film (3), the strain transfer to the thin film (4), and the kind of strain field on the surface of the transducer (5). Consequently, we present two applicable methods for creep adjustment of NiCr-carbon thin- film strain gauges. The first method addresses the intrinsic creep behavior of the thin film by a modification of the film composition. With increasing Cr content (at the expense of Ni, the intrinsic negative creep error can be shifted towards zero. The second method is not based on the thin film itself but rather on a modification of the strain transfer from the polyimide carrier to the thin film. This is achieved by controlled cutting of well-defined deep trenches into the polymer substrate via a picosecond laser.

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13

Bayram, Ferhat, Durga Gajula, Digangana Khan, and Goutam Koley. "Investigation of AlGaN/GaN HFET and VO2 Thin Film Based Deflection Transducers Embedded in GaN Microcantilevers." Micromachines 11, no. 9 (September 20, 2020): 875. http://dx.doi.org/10.3390/mi11090875.

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The static and dynamic deflection transducing performances of piezotransistive AlGaN/GaN heterojunction field effect transistors (HFET) and piezoresistive VO2 thin films, fabricated on GaN microcantilevers of similar dimensions, were investigated. Deflection sensitivities were tuned with the gate bias and operating temperature for embedded AlGaN/GaN HFET and VO2 thin film transducers, respectively. The GaN microcantilevers were excited with a piezoactuator in their linear and nonlinear oscillation regions of the fundamental oscillatory mode. In the linear regime, the maximum deflection sensitivity of piezotransistive AlGaN/GaN HFET reached up to a 0.5% change in applied drain voltage, while the responsivity of the piezoresistive VO2 thin film based deflection transducer reached a maximum value of 0.36% change in applied drain current. The effects of the gate bias and the operation temperature on nonlinear behaviors of the microcantilevers were also experimentally examined. Static deflection sensitivity measurements demonstrated a large change of 16% in drain-source resistance of the AlGaN/GaN HFET, and a similarly high 11% change in drain-source resistance in the VO2 thin film, corresponding to a 10 μm downward step bending of the cantilever free end.

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14

Zaitsev, Roman, Liliia Zaitsev, and Olga Vodoriz. "Capacitive transducers based ITO/polyimide/Al2O3 thin film structure." Bulletin of the National Technical University «KhPI» Series: New solutions in modern technologies, no. 4(6) (December 30, 2020): 144–49. http://dx.doi.org/10.20998/2413-4295.2020.04.21.

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15

Hongye, Wang, Liu Kun, An Zhichou, Wu Xu, and Huang Xun. "Ion-beam sputtered thin-film strain-gage pressure transducers." Sensors and Actuators A: Physical 35, no. 3 (February 1993): 265–68. http://dx.doi.org/10.1016/0924-4247(93)80166-e.

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16

Freire, R. C. S., G. S. Deep, P. C. Lobo, A. M. N. Lima, J. S. Rocha Neto, and A. Oliveira. "Dynamic Response of a Feedback Thermoresistive Electrical Substitution Pyranometer." Journal of Solar Energy Engineering 120, no. 2 (May 1, 1998): 126–30. http://dx.doi.org/10.1115/1.2888055.

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Calorimetric pyranometers use plane black thermal sensors which absorb solar radiation. If a thermoresistive transducer (sensor-detector combination) is used, the temperature measured is nearer the true value than for thermoelectric transducers. More importantly, the measurement of electrical power is much more accurate than the measurement of temperature. In commercial platinum (thermoresistive), thin film thermometers, the substrate produces transducer time constants an order of magnitude larger than for the best thermoelectric transducers. Use of an electronic amplifier with the thermoresistive sensor, forming one arm of a Wheatstone bridge and arranged in a negative feedback configuration, can reduce the overall response time considerably. Theoretical formulations of instrument response, taking into account the amplifier input offset voltage, are presented and the response time is estimated.

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Sukhanov, V. I., and A. B. Grabov. "Thin-film magnetoresistive sensors and measuring transducers of magnetic induction." Informacionno-technologicheskij vestnik, no. 2 (July 30, 2018): 35–44. http://dx.doi.org/10.21499/2409-1650-2018-2-35-44.

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The article presents some features of thin-film magnetoresistive magnetic induction sensors ММКК247, ММКК247-01, МЧЭ033 and the digital measurement gauge МРД009 that was developed in JSC NPO IT for aviation and cosmic apparatus navigation systems.

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Hou, Ruozhou, D. Hutson, and K. J. Kirk. "Investigation of thin-film ultrasonic transducers for high-temperature applications." Insight - Non-Destructive Testing and Condition Monitoring 54, no. 2 (February 1, 2012): 68–71. http://dx.doi.org/10.1784/insi.2012.54.2.68.

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Bartic, Carmen, and Gustaaf Borghs. "Organic thin-film transistors as transducers for (bio) analytical applications." Analytical and Bioanalytical Chemistry 384, no. 2 (September 28, 2005): 354–65. http://dx.doi.org/10.1007/s00216-005-0031-8.

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20

Astashenkova, Olga N., Andrej V. Korlyakov, and Victor V. Luchinin. "Micromechanics Based on Silicon Carbide." Materials Science Forum 740-742 (January 2013): 998–1001. http://dx.doi.org/10.4028/www.scientific.net/msf.740-742.998.

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This paper describes using of silicon carbide for micromechanical systems. Low stressed sensitive membrane signal converters, thin film transducers and piezoresistive sensors were formed based on silicon carbide films. The mechanical properties of silicon carbide films were determined.

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21

B, Chandar Shekar, Sulana Sundari, Sunnitha S, and Sharmila C. "ARATION AND CHARACTERIZATION POLY (VINYLIDENE FLUORIDE-TRIFLUOROETHYLENE) COPOLYMER THIN FILMS FOR ORGANIC FERROELECTRIC FIELD EFFECT THIN FILM TRANSISTORS." Kongunadu Research Journal 2, no. 1 (June 30, 2015): 7–10. http://dx.doi.org/10.26524/krj56.

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Polyvinylidene fluoride (PVDF) and Trifluoroethylene ((TrFE) are potential polymers which are used in acoustic transducers and electromechanical actuators because of their inherent piezoelectric response, as heat sensors because of their inherent pyroelectric response and as dielectric layer in organic thin filmtransistors. In the present study thin films of copolymer Poly(vinylidene fluoride-trifluoroethylene) were prepared by spin coating method for two different concentrations 2% to 8% and for various spin speeds from 2000 RPM to 5000 RPM. A P-type Si wafer was used as a substrate to deposit P(VDF-TrFE) thin films. 2-butanone was used as a solvent to prepare P(VDF-TrFE) solution. To study the annealing effect, the films were annealed for three different temperatures 50°C, 100° C and 175° C. Ellipsometry was used to measure the thickness of the films. The identification of the films prepared was done by using FTIR spectrophotometer. The structure of the films was studied by using small angle XRD. The morphology of the coated surface was investigated using SEM. It is observed that the thickness of the film coated depends on concentration, spin speed and annealing temperature. The XRD spectrum indicated the amorphous nature with crystallites of very low dimension. SEM micrographs also conforms the predominantly amorphous nature of the film surface. The observed smooth surface with amorphous structure indicated that these films could be used as dielectric layer in organic ferroelectric field effect thin film transistors.

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Hou, Ruozhou, David Hutson, Katherine J. Kirk, and Yong Qing Fu. "AlN thin film transducers for high temperature non-destructive testing applications." Journal of Applied Physics 111, no. 7 (April 2012): 074510. http://dx.doi.org/10.1063/1.3700345.

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23

Nakazawa, Marie, Tsutomu Kosugi, Hiromi Nagatsuka, Akihiro Maezawa, Kentaro Nakamura, and Sadayuki Ueha. "Polyurea Thin Film Ultrasonic Transducers for Nondestructive Testing and Medical Imaging." IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 54, no. 10 (October 2007): 2165–74. http://dx.doi.org/10.1109/tuffc.2007.513.

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Mastronardi, V. M., L. Ceseracciu, F. Guido, F. Rizzi, A. Athanassiou, M. De Vittorio, and S. Petroni. "Low stiffness tactile transducers based on AlN thin film and polyimide." Applied Physics Letters 106, no. 16 (April 20, 2015): 162901. http://dx.doi.org/10.1063/1.4918749.

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25

Mathis, Maximilian, Dennis Vollberg, Matthäus Langosch, Dirk Göttel, Angela Lellig, and Günter Schultes. "Novel method to reduce the transverse sensitivity of granular thin film strain gauges by modification of strain transfer." Journal of Sensors and Sensor Systems 9, no. 2 (July 17, 2020): 219–26. http://dx.doi.org/10.5194/jsss-9-219-2020.

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Abstract. Strain gauges based on polyimide carrier foils and piezoresistive granular thin films are highly sensitive to strain. Unlike conventional metal foil, granular film strain gauges also have a pronounced sensitivity to strain acting in the transverse direction. A novel method that allows for the modification of the strain transfer is proposed and proven experimentally. The method is based on the creation of stand-alone polyimide paths, on top of which the piezoresistive thin film is located. In this way, the granular film hardly receives any transverse strain; hence, the transverse sensitivity is drastically reduced. A picosecond laser system can be used for both patterning of the thin film and for controlled ablation of polyimide in order to generate well-defined high path structures. The working principle of the method is demonstrated by simulation, followed by an experimental verification using measurements of the transverse gauge factor. Furthermore, the output signal of force transducers may be increased using granular thin film strain gauges of reduced transverse sensitivity.

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Auciello, Orlando, and Ramamoorthy Ramesh. "Electroceramic Thin Films Part II: Device Applications." MRS Bulletin 21, no. 7 (July 1996): 29–32. http://dx.doi.org/10.1557/s0883769400035879.

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Ferroelectric thin films have experienced tremendous development in recent years due to the advent of sophisticated film-synthesis techniques and an increase in the understanding of the related materials science and integration of films into various novel devices. Major advances in ferroelectric thin-film synthesis and characterization were addressed last month in the June MRS Bulletin. This volume is dedicated to selective device issues and applications.Ferroelectric materials can be used to fabricate capacitors for integration into nonvolatile ferroelectric random-access memories (NVFRAMs) and as high di-electric layers for capacitors with high capacitance for manufacturing planar dynamic random-access memories (DRAMs). Ceramic conductors can be applied to ohmic, voltage-dependent, and thermally sensitive resistors; fast-ion conductors; and humidity and gas sensors. Piezoelectricity is being exploited in micromachines such as accelerometers, displacement transducers, and actuators such as those required for inkjet printers, for video-recording head positioning, and for micromachining. Pyroelectricity can be utilized in the fabrication of high-sensitivity room-temperature infrared detectors while electro-optic activity can be used in color-filter devices, displays, image-storage systems, and optical switches for integrated optical systems. These applications of electroceramic thin films are only part of a more extensive list.

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Campos Montiel, S., S. Jiménez-Sandoval, L. Lira, and R. Carranza Lopez-Padilla. "Design of a 1 ampere high-precision thin-film resistive current transducer with negligible frequency dependence from DC to 100 KHz." Revista Mexicana de Física 66, no. 5 Sept-Oct (September 1, 2020): 589. http://dx.doi.org/10.31349/revmexfis.66.589.

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Currently, non-linear loads are found virtually anywhere with the promise of high electrical efficiency. Examples of this type of non-linear loads are compact fluorescent lamps and light-emitting diode lamps which can now be found in any home. However, they produce highly distorted currents that pollute the power grid and cause stability problems, and making the measurement of the distorted electrical current a non-trivial issue. For the reliable measurement of distorted waveforms within a wide bandwidth, magnetic current transducers present disadvantages over resistive current transducers, such as those caused by the magnetic material which attenuates the high-frequency components while producing heating on the magnetic material. This research presents the design principles to develop a thin-film wideband current transducer. Principles such as the selection of high-purity materials, high-symmetry coaxial design, size, geometry, and aspect ratios were used to obtain a linear relationship between its input and output, i.e.: a flat frequency response from DC to 100 kHz, and the ability to operate continuously with a custom passive thermal system for heat dissipation and reliable measurement. An exhaustive effort has been made on the refinement of the design aimed at understanding the effects that govern the frequency behavior of the transducer and the ways to compensate them. The manufacturing feasibility of the proposed design is well confirmed by the results obtained from the simulation process.

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Abdul Hamid, Syamsul Bahrin. "FLAUT: A mutual sensitivity improvement through matched pipe, cavity and thin plate resonance." ELEKTRIKA- Journal of Electrical Engineering 20, no. 2 (August 28, 2021): 42–48. http://dx.doi.org/10.11113/elektrika.v20n2.254.

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Electrostatic transducers promises a great potential in alternative to piezoelectric transducer based on certain advantages such as inherently wide bandwidth and good acoustic matching to air due to the membrane’s low acoustics impedance. There are two basic designs that are popular among electrostatic ultrasonic transducer developer – rigid backplate and micromachine backplate. This paper presents a methodology for improving the sensitivity of an air-coupled ultrasonic transducer by coupling the resonating thin plate, cavity and pipe in a single cell. The proposed device is termed Fluidically Amplified Ultrasonic Transducer (FLAUT) for an air-coupled application. Investigation of the concept of matched thin plate, cavity and pipe, of which the individual geometry is expected to mutually enhance one another. Analytical modelling is utilized to the matched thin plate, cavity and pipe. The analytical modelling identifies the required geometry for the FLAUT based on the matched operating resonant frequency of 25 kHz. At the end of the paper the prototype of FLAUT is presented where the device was fabricated using additive manufacturing process (3-D printing) which consist of a 50 µm Kapton thin film over a micro stereolithography designed backplate. Here aluminum is coated as the electrode utilizing the thermal evaporation process for both the Kapton film and the backplate. A laser interferometer is utilized to measure FLAUT thin plate displacement which indicates the device is running at 25 kHz fundamental mode. A 30 dB difference is also observed between the deformation velocity of the cavity active region and its surrounding.

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29

Qian, Zheng Hua, Feng Jin, Zi Kun Wang, and Kikuo Kishimoto. "The Horizontally Polarized Shear Waves in Multilayered Piezo-Composites with 2-2 Connectivity." Key Engineering Materials 261-263 (April 2004): 465–70. http://dx.doi.org/10.4028/www.scientific.net/kem.261-263.465.

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Following the advances in structural applications, composite structures are being used commonly in transducer applications to improve acoustic, mechanical and electrical performance of piezoelectric devices. Functional composite transducers for sensors and actuators generally consist of ceramics and polymers, the disadvantage of the brittleness nature of the piezoelectric ceramics can be overcome and the structures especially good for sensing can be allowed for building up. Propagation behavior of horizontally polarized shear waves (SH-waves) in piezoelectric ceramic-polymer composites with 2-2 connectivity is taken into account. The multilayer structures are consisted of piezoelectric thin films bonded perfectly with polymeric thin films alternately. The phase velocity equations of SH-waves propagation in the piezoelectric ceramic-polymer composites with 2-2 connectivity are obtained for the cases of wave propagation in the direction perpendicular to the layering and along the layering, respectively. Filter effect of this kind of structure and the effect of volume fraction and shear modulus ratio of piezoelectric layer to polymer layer on the phase velocity are discussed in detail, respectively. One practical combination of piezoelectric thin film-polymer thin film multilayer system is chosen to carry out the numerical simulation, some basic properties of SH-waves propagation in above multilayered structures are revealed.

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30

Žura, Ivan, Dinko Babić, Matthew D. Steinberg, and Ivana Murković Steinberg. "Low-cost conductometric transducers for use in thin polymer film chemical sensors." Sensors and Actuators B: Chemical 193 (March 2014): 128–35. http://dx.doi.org/10.1016/j.snb.2013.11.093.

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31

Hayward, Gordon, Robin Hamilton, Behroos Kanani, and David A. Reilly. "A thin film technique for spatial apodization of disc-shaped piezoceramic transducers." Journal of the Acoustical Society of America 89, no. 4 (April 1991): 1808–15. http://dx.doi.org/10.1121/1.401020.

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Dorfmeister, M., B. Kössl, M. Schneider, G. Pfusterschmied, and U. Schmid. "Switching performance of bistable membranes activated with integrated piezoelectric thin film transducers." Journal of Micromechanics and Microengineering 29, no. 10 (August 1, 2019): 105008. http://dx.doi.org/10.1088/1361-6439/ab3185.

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33

Kazaryan, A. A. "Thin-film capacitive pressure transducers which operate during the deformation of products." Measurement Techniques 43, no. 1 (January 2000): 38–43. http://dx.doi.org/10.1007/bf02503615.

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Peng, Jue, Chen Chao, and Hu Tang. "Piezoelectric Micromachined Ultrasonic Transducer with a Dome-Shaped Single Layer Structure." Materials Science Forum 675-677 (February 2011): 1131–34. http://dx.doi.org/10.4028/www.scientific.net/msf.675-677.1131.

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Piezoelectric micromachined ultrasonic transducers (pMUTs) have been investigated as a promising new approach for ultrasound generation and reception. Most of the reported pMUTs employs a unimorph structure of a micromachined piezoelectric thin film on a silicon membrane. In this paper, a dome-shaped model for piezoelectric micromachined ultrasonic transducer (pMUT) was proposed to replace the conventional unimorph structure. A finite element analysis was carried out to study the elecro-mechanical behaviour of the dome-shaped model. The result showed that a considerable improvement of electro-mechanical coupling performance was achieved with the new model.

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Hou, R., D. Hutson, and K. J. Kirk. "Development of sputtered AlN thin-film ultrasonic transducers for durable high-temperature applications." Insight - Non-Destructive Testing and Condition Monitoring 55, no. 6 (June 1, 2013): 302–7. http://dx.doi.org/10.1784/insi.2012.55.6.302.

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Sturtevant, Bradford, and Bruce Hartenbaum. "Performance of an electrohydraulic shock wave lithotripter measured with thin film PVDF transducers." Journal of the Acoustical Society of America 90, no. 4 (October 1991): 2339. http://dx.doi.org/10.1121/1.402212.

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37

Pérez-Cota, Fernando, Richard J. Smith, Emilia Moradi, Leonel Marques, Kevin F. Webb, and Matt Clark. "Thin-film optoacoustic transducers for subcellular Brillouin oscillation imaging of individual biological cells." Applied Optics 54, no. 28 (September 28, 2015): 8388. http://dx.doi.org/10.1364/ao.54.008388.

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38

Sarin Kumar, A. K., P. Paruch, J. M. Triscone, W. Daniau, S. Ballandras, L. Pellegrino, D. Marré, and T. Tybell. "High-frequency surface acoustic wave device based on thin-film piezoelectric interdigital transducers." Applied Physics Letters 85, no. 10 (September 6, 2004): 1757–59. http://dx.doi.org/10.1063/1.1787897.

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39

Zhou, X. S., J. Zhang, R. Hou, C. Zhao, K. J. Kirk, D. Hutson, P. A. Hu, S. M. Peng, X. T. Zu, and Y. Q. Fu. "Electrode loading effect and high temperature performance of ZnO thin film ultrasonic transducers." Applied Surface Science 315 (October 2014): 307–13. http://dx.doi.org/10.1016/j.apsusc.2014.07.114.

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40

Wulfmeier, Hendrik, René Feder, Li Zhao, and Holger Fritze. "High-temperature stable piezoelectric transducers using epitaxially grown electrodes." Journal of Sensors and Sensor Systems 9, no. 1 (January 23, 2020): 15–26. http://dx.doi.org/10.5194/jsss-9-15-2020.

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Abstract. Piezoelectric resonators are of great importance for application in high-precision transducers. However, at elevated temperatures, the degradation of commonly used metal electrodes may affect the performance of oxide electrodes of piezoelectric transducers; with sufficiently high electrical conductivity they are expected to overcome this deficit. In the latter case, the stable operation of piezoelectric transducers could be further enhanced if the resonator and electrodes would consist of identical or at least very similar materials; thus, nearly monolithic resonators are created. The present work focuses on two major aspects: the growth of high-quality langasite (La3Ga5SiO14; LGS) and doped LGS thin-film electrode layers by pulsed laser ablation and the characterization of the developed resonator devices. To obtain epitaxial films of the correct stoichiometry, the deposition on heated substrates is performed in oxygen atmosphere in the range from 10−3 to 10 Pa. Another requirement for adjusting the stoichiometry is an increased Ga content in the sputter targets with respect to LGS to account for Ga evaporation during film deposition. Additional doping with Sr increases the electrode film conductivity; thus combined with the use of low-conductivity single-crystalline catangasite (Ca3TaGa3Si2O14; CTGS) substrates the ratio between the electrical conductivities of the substrate and the film is increased, enabling the preparation of nearly monolithic resonators. The properties of these nearly monolithic resonators are characterized in the temperature range of 600 to 1000 ∘C and compared to those of CTGS resonator blanks without electrodes. Particular attention is paid to the reproducibility of resonator properties, the electrode orientation and the quality factor. The created nearly monolithic resonator demonstrates stable operation in the temperature range from 600 to 1000 ∘C.

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41

Deol, Rajinder Singh, Meenal Mehra, Bhaskar Mitra, and Madhusudan Singh. "Low-temperature solution-processed sol-gel K-rich KNN thin films for flexible electronics." MRS Advances 3, no. 5 (2018): 269–75. http://dx.doi.org/10.1557/adv.2018.78.

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ABSTRACTSputtered lead-free piezoelectric materials like potassium sodium niobate (K1-xNaxNbO3 or KNN) have received significant technological interest in recent years in light of several reports of piezoelectric constants comparable to lead zirconium titanate (PZT). Potential applications include self-powered sensors, actuators, and low acoustic impedance transducers. For large area printed applications, it is vital to develop low-temperature solution processed deposition methods. In this work, sol-gel synthesis of K-rich (70:30) KNN was carried out under an argon atmosphere, using acetate precursors, followed by precipitation of white KNN powder upon careful drying. Powder X-ray diffraction (XRD) scans of the product with a Cu Kα source after calcination revealed a dominant (110) peak, accompanied by smaller (100) and (010) peaks, in agreement with published standard KNN data. The composition of K-rich phase was confirmed using energy dispersive X-ray spectroscopy (EDX). To produce thin films, the sol was spin coated on a surface-treated Au-coated Si substrate, followed by slow annealing to obtain low surface roughness films (RMS roughness ﹤∼10 nm) of thickness ∼200 nm after solvent removal. Atomic force microscopy (AFM) scans revealed an unremarkable amorphous film. However, deposition of the sol on the Au-coated backside of Si wafer under similar processing conditions revealed limited polycrystalline film formation observed using optical profilometry. Thin film XRD measurements of the deposited film reveal orthorhombic phase growth of KNN, though the unannealed film was more amorphous than the calcined KNN film. Preliminary piezoresponse force microscopy (PFM) scans were used to estimate a piezoelectric constant (d33) ∼ 2.7 pC/N, consistent with the general expectation of lower piezoelectric constants for thin sol-gel films. The highest processing temperature used at any step during the deposition process was 90°C, consistent with the applications involving flexible polyimide substrates. This low-temperature thin-film growth suggests a potential route towards integration of large area piezoelectric generators for environmentally-friendly autonomous flexible sensor applications, with better control of phase and composition during the solution-phase deposition of KNN.

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Oliveira, Eva, João Paulo Silva, Jorge Laranjeira, Francisco Macedo, Senentxu Lanceros-Mendez, Filipe Vaz, and Armando Ferreira. "Fabrication, Characterization and Implementation of Thermo Resistive TiCu(N,O) Thin Films in a Polymer Injection Mold." Materials 13, no. 6 (March 20, 2020): 1423. http://dx.doi.org/10.3390/ma13061423.

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This paper presents the development of metallic thermoresistive thin film, providing an innovative solution to dynamically control the temperature during the injection molding process of polymeric parts. The general idea was to tailor the signal response of the nitrogen- and oxygen-doped titanium-copper thin film (TiCu(N,O))-based transducers, in order to optimize their use in temperature sensor devices. The results reveal that the nitrogen or oxygen doping level has an evident effect on the thermoresistive response of TiCu(N,O) films. The temperature coefficient of resistance values reached 2.29 × 10−2 °C−1, which was almost six times higher than the traditional platinum-based sensors. In order to demonstrate the sensing capabilities of thin films, a proof-of-concept experiment was carried out, integrating the developed TiCu(N,O) films with the best response in an injection steel mold, connected to a data acquisition system. These novel sensor inserts proved to be sensitive to the temperature evolution during the injection process, directly in contact with the polymer melt in the mold, demonstrating their possible use in real operation devices where temperature profiles are a major parameter, such as the injection molding process of polymeric parts.

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Thomas, Senoy, Jinesh Mathew, P. Radhakrishnan, V. P. N. Nampoori, A. K. George, S. H. Al-Harthi, R. V. Ramanujan, and M. R. Anantharaman. "Metglas thin film based magnetostrictive transducers for use in long period fibre grating sensors." Sensors and Actuators A: Physical 161, no. 1-2 (June 2010): 83–90. http://dx.doi.org/10.1016/j.sna.2010.05.006.

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Kusano, Yuri, Itaru Ishii, Tatsuya Kamiya, Akihiko Teshigahara, Guo-Lun Luo, and David A. Horsley. "High-SPL Air-Coupled Piezoelectric Micromachined Ultrasonic Transducers Based on 36% ScAlN Thin-Film." IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 66, no. 9 (September 2019): 1488–96. http://dx.doi.org/10.1109/tuffc.2019.2921983.

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Ghouri, A. A., Y. Alajlani, N. A. Ahmadi, D. Hutson, and K. J. Kirk. "Investigation of Lamb wave modes using broadband thin-film transducers and finite element modelling." International Journal of Condition Monitoring 8, no. 4 (October 1, 2018): 95–99. http://dx.doi.org/10.1784/204764218824811543.

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Ramesh, Mohan, Hong-Cheu Lin, and Chih-Wei Chu. "Stable organic thin film transducers for biochemical and label-free sensing under physiological conditions." Journal of Materials Chemistry 22, no. 32 (2012): 16506. http://dx.doi.org/10.1039/c2jm32561f.

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Tzianaki, Eirini, Makis Bakarezos, George D. Tsibidis, Yannis Orphanos, Panagiotis A. Loukakos, Constantine Kosmidis, Panos Patsalas, Michael Tatarakis, and Nektarios A. Papadogiannis. "High acoustic strains in Si through ultrafast laser excitation of Ti thin-film transducers." Optics Express 23, no. 13 (June 23, 2015): 17191. http://dx.doi.org/10.1364/oe.23.017191.

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Haarindraprasad, R., U. Hashim, Subash C. B. Gopinath, Mohd Kashif, P. Veeradasan, S. R. Balakrishnan, K. L. Foo, and P. Poopalan. "Low Temperature Annealed Zinc Oxide Nanostructured Thin Film-Based Transducers: Characterization for Sensing Applications." PLOS ONE 10, no. 7 (July 13, 2015): e0132755. http://dx.doi.org/10.1371/journal.pone.0132755.

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Vasil'ev, E. V. "Copper thin-film temperature-sensitive elements, resistive thermal transducers, and thermometers based on them." Measurement Techniques 38, no. 8 (August 1995): 912–14. http://dx.doi.org/10.1007/bf00978395.

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Qi, Baoxin, Qingzhao Kong, Hui Qian, Devendra Patil, Ing Lim, Mo Li, Dong Liu, and Gangbing Song. "Study of Impact Damage in PVA-ECC Beam under Low-Velocity Impact Loading Using Piezoceramic Transducers and PVDF Thin-Film Transducers." Sensors 18, no. 3 (February 24, 2018): 671. http://dx.doi.org/10.3390/s18020671.

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Journal articles on the topic 'Thin film transducers'

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