Dissertations / Theses on the topic 'Thin film transducers'

In any given media, the speed of sound is considerably slower than speed of light, and the exploration of the acoustic regime in the GHz range gives access to very short acoustic wavelengths. Short acoustic wavelengths is an intriguing path for high resolution live-cell imaging. At low frequencies, ultrasound has proved to be a valuable tool for the mechanical characterisation and imaging of biological tissues. There is much interest in using high frequency ultrasound to investigate single cells due to its mechanical contrast mechanism. Mechanical characterisation of cells has been performed by a number of techniques, such as atomic force microscopy, acoustic microscopy or Brillouin microscopy. Recently, Brillouin oscillations measurements on vegetal and mammal cells have been demonstrated in the GHz range. In this thesis, a method to extend this technique, from the previously reported single point measurements and line scans, into a high resolution acoustic imaging tool is presented. A novel approach based around a three-layered metal-dielectric-metal film is used as a transducer to launch acoustic waves into the cell being studied. The design of this transducer and imaging system is optimised to overcome the vulnerability of a cell to the exposure of laser light and heat without sacrificing the signal to noise ratio. The transducer substrate shields the cell from the laser radiation by detecting in transmission rather than reflection. It also generates acoustic waves efficiently by a careful selection of materials and wavelengths. Facilitates optical detection in transmission due to simplicity of arrangement and aids to dissipate heat away from the cell. The design of the transducers and instrumentation is discussed and Brillouin frequency images (two and three dimensions) on phantom, fixed and living cells are presented.

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2012.<br>Cataloged from PDF version of thesis.<br>Includes bibliographical references (p. 149-156).<br>The design and modelling framework for a piezoelectric micromachined ultrasonic transducer (PMUT) based on the piezoelectric thin film deposition of lead zirconate titanate (PZT) is defined. Through high frequency vibration (1-16MHz) of a thin plate, the PMUT transmits and receives pressure pulses to construct medical ultrasound images as an alternative to bulk piezoelectric transducers currently in use. Existing transducers are difficult to fabricate and lack the small scale necessary for small form factor, high resolution 2D imaging arrays. From acoustic priniciples, the potential PMUT acoustic pressure output is determined and compared to a radiating rigid piston model. Acoustic pressure is shown to scale with the volumetric displacement rate, which is related to the plate deflection. A Green's function approach is then used to explicitly solve for the plate deflection of a bimorph and unimorph PMUT with an arbitrary number of circular or ring electrodes. The resulting solution is much simpler and more flexible than previously published solution techniques enabling the optimization of electrode configuration for large deflection and acoustic pressure. Additionally, the contribution of residual stress is examined; particularly its effects on bandwidth, sensitivity, and resonant frequency and an appropriate electrode coverage of the PMUT plate is suggested. Based on modelling, an initial PMUT design is proposed and is currently being fabricated.<br>by Katherine Marie Smyth.<br>S.M.

In this thesis, the author proposed and developed nanostructured materials based Surface Acoustic Wave (SAW) and conductometric transducers for gas sensing applications. The device fabrication, nanostructured materials synthesis and characterization, as well as their gas sensing performance have been undertaken. The investigated structures are based on two structures: lithium niobate (LiNbO3) and lithium tantalate (LiTaO3). These two substrates were chosen for their high electromechanical coupling coefficient. The conductometric structure is based on langasite (LGS) substrate. LGS was selected because it does not exhibit any phase transition up to its melting point (1470°C). Four types of nanostructured materials were investigated as gas sensing layers, they are: polyaniline, polyvinylpyrrolidone (PVP), graphene and antimony oxide (Sb2O3). The developed nanostructured materials based sensors have high surface to volume ratio, resulting in high sensitivity towards di¤erent gas species. Several synthesis methods were conducted to deposit nanostructured materials on the whole area of SAW based and conductometric transducers. Electropolymerization method was used to synthesize and deposit polyaniline nanofibers on 36° YX LiTaO3 and 64° YX LiNbO3 SAW substrates. By varying several parameters during electropolymerization, the effect on gas sensing properties were investigated. The author also extended her research to successfully develop polyaniline/inorganic nanocomposites based SAW structures for room temperature gas sensing applications. Via electrospinning method, PVP fibres and its composites were successfully deposited on 36° YX LiTaO3 SAW transducers. Again in this method, the author varied several parameters of electrospinning such as distance and concentration, and investigated the effect on gas sensing performance. Graphene-like nano-sheets were synthesized on 36° YX LiTaO3 SAW devices. This material was synthesized by spin-coating graphite oxide (GO) on the substrate and then exposin g the GO to hydrazine to reduce it to graphene. X-ray photoelectron spectroscopy (XPS) and Raman characterizations showed that the reduced GO was not an ideal graphene. This information was required to understand the properties of the deposited graphene and link its properties to the gas sensing properties. Thermal evaporation method was used to grow Sb2O3 nanostructures on LGS conductometric transducers. Using this method, different nanoscale structures such as nanorods and lobe-like shapes were found on the gold interdigitated transducers (IDTs) and LGS substrate. The gas sensing performance of the deposited nanostructured Sb2O3 based LGS conductometric sensors was investigated at elevated temperatures. The gas sensing performance of the investigated nanostructured materials/SAW and conductometric structures provide a way for further investigation to future commerciallization of these types of sensors.

The recent development of the commercially viable thin film electro-acoustic technology has triggered a growing interest in the research of plate guided wave or Lamb wave components owing to their unique characteristics. In the present thesis i) an experimental study of the thin film plate resonators (FPAR) performance operating on the lowest symmetrical Lamb wave (S0) propagating in highly textured AlN membranes versus a variety of design parameters has been performed. The S0 mode is excited through an Interdigital Transducer and confined within the structure by means of reflection from metal strip gratings. Devices operating in the vicinity of the stop-band center exhibiting a Q-value of up to 3000 at a frequency around 900MHz have been demonstrated. Temperature compensation of this type of devices has been studied theoretically and successfully realized experimentally for the first time. Further, integrated circuit-compatible S0 Lamb based two-port FPAR stabilized oscillators exhibiting phase noise of -92 dBc/Hz at 1 kHz frequency offset with feasible thermal noise floor below -180 dBc/Hz have been tested under high power for a couple of weeks. More specifically, the FPARs under test have been running without any performance degradation at up to 27 dBm loop power. Further, the S0 mode was experimentally demonstrated to be highly mass and pressure sensitive as well as suitable for in-liquid operation, which together with low phase noise and high Q makes it very suitable for sensor applications; ii) research in view of FPARs operating on other types of Lamb waves as well as novel operation principles has been initiated. In this work, first results on the design, fabrication and characterization of two novel type resonators: The Zero Group Velocity Resonators (ZGVR) and The Intermode-Coupled Thin Film Plate Acoustic Resonators (IC-FPAR), exploiting new principles of operation have been successfully demonstrated. The former exploits the intrinsic zero group velocity feature of the S1 Lamb mode for certain combination of design parameters while the latter takes advantage of the intermode interaction (involving scattering) between S0 and A1 Lamb modes through specially designed metal strip gratings (couplers). Thus both type of resonators operate on principles of confining energy under IDT other than reflection.

Les travaux de cette thèse se situent dans un contexte de miniaturisation des transducteurs ultrasonores micro-usinés (cMUTs). Ce type de dispositifs est utilisé depuis plusieurs décades dans le domaine de l'imagerie par échographie allant du contrôle non-destructif de structures jusqu'au domaine médical. La quête d'une imagerie hautement résolue nécessite l'utilisation de cMUTs de fréquence de résonance de l'ordre du GHz et de taille micrométrique. L'élément actif de ces cMUts est une membrane suspendue de surface micrométrique. Une étude analytique, basée sur le comportement mécanique des plaques minces, a permis de dimensionner les membranes suspendues et de souligner l'importance d'avoir une épaisseur nanométrique pour avoir un signal émis détectable électriquement. Plusieurs matériaux; à savoir des nanotubes de carbone, du graphène, du graphène oxydé, du DLC (diamond like carbon) et du silicium, ont été mis en œuvre dans la cadre de cette étude pour réaliser des membranes suspendues de taille micrométrique et d'épaisseur nanométrique. Des procédés technologiques propres à chacun de ces matériaux ont été conçus et des membranes d'épaisseurs variant de 2 à 15 nm et de largeurs variant de 1 à 2 µm ont été fabriquées. Une méthode de caractérisation innovante a été mise en place afin d'évaluer les propriétés mécaniques des différentes membranes réalisées. Un protocole de mesure a été développé pour mesurer l'amplitude de déplacement des membranes suspendues sous l'action d'une force électrostatique. Des amplitudes qui atteignent la dizaine de nanomètres ont été mesurées, amplitudes qui correspondent à des variations de capacités électriquement détectables. Plus généralement, ces travaux constituent une preuve solide de la faisabilité des nano-membranes suspendues de taille micrométrique avec un déplacement détectable.

Au cours de cette étude, nous mettons en évidence les différents problèmes qui se posent lorsque l'on désire mesurer la température d'une surface au moyen d'une sonde de contact. Nous proposons une étude théorique du comportement thermophysique d'une sonde active, thermorégulée destinée à la mesure fine, précise et instantanée des températures superficielles. Divers prototypes de transducteurs y sont décrits, aboutissant au modèle coplanaire retenu pour sa fonctionnalité. Nous exposons aussi les procédés qui ont permis la réalisation du transducteur en technologie couches minces. Nous décrivons enfin le système de gestion du transducteur ainsi que le logiciel associé permettant la régulation et la mesure en temps réel. Le mémoire s'achève par la présentation et l'analyse critique d'un ensemble de résultats de mesure sur diverses surfaces

abstract: ABSTRACT This work seeks to develop a practical solution for short range ultrasonic communications and produce an integrated array of acoustic transmitters on a flexible substrate. This is done using flexible thin film transistor (TFT) and micro electromechanical systems (MEMS). The goal is to develop a flexible system capable of communicating in the ultrasonic frequency range at a distance of 10 - 100 meters. This requires a great deal of innovation on the part of the FDC team developing the TFT driving circuitry and the MEMS team adapting the technology for fabrication on a flexible substrate. The technologies required for this research are independently developed. The TFT development is driven primarily by research into flexible displays. The MEMS development is driving by research in biosensors and micro actuators. This project involves the integration of TFT flexible circuit capabilities with MEMS micro actuators in the novel area of flexible acoustic transmitter arrays. This thesis focuses on the design, testing and analysis of the circuit components required for this project.<br>Dissertation/Thesis<br>M.S. Electrical Engineering 2012

博士<br>國立中山大學<br>電機工程學系研究所<br>100<br>The piezoelectric transducer for vibration-energy harvesting is constructed of a piezoelectric layer, bottom electrode and a top electrode. In order to obtain an appropriate transducer for the low-frequency operating; environmentally-friendly and long-term, the flexible substrate, the piezoelectric layer, and the additional mass-loading (tip mass) have been investigated thoroughly. This study investigates the feasibility of a high-performance ZnO and AlN based piezoelectric transducer for vibration-energy harvesting applications. Firstly, the piezoelectric transducer is constructed of a Cu/ZnO/ITO/PET structure. Both scanning electron microscopy and X-ray diffraction indicate that, among the favorable characteristic of the ZnO piezoelectric film include a rigid surface structure and a high c-axis preferred orientation. Hence, an open circuit voltage of 1.87 V for the ZnO piezoelectric transducer at a vibration frequency of 100 Hz is obtained by an oscilloscope. After rectifying and filtering, the output power of the generator exhibits an available benefit of 0.07 μW/cm2 with the load resistance of 5 MΩ. Secondly, this investigation introduces novel means of integrating high-performance piezoelectric transducers using single-sided ZnO and AlN films with a flexible stainless steel substrate (SUS304). Hence, the SUS304 substrate exhibits the long-term stability under vibration. The single-sided ZnO and AlN transducers are deposited on the SUS304 substrate at a temperature of 300 oC by an RF magnetron sputtering system. Scanning electron microscopy and X-ray diffraction of piezoelectric films reveal a rigid surface structure and a high c-axis-preferred orientation. A mass loading at the front-end of the cantilever is critical to increase the amplitude of vibration and the power generated by the piezoelectric transducer. The open circuit voltage of the single-sided ZnO power generator is 10.5 V. After rectification and filtering through a capacitor with a capacitance of 33 nF, the output power of the single-sided ZnO generators exhibited a specific power output of 1.0 μW/cm2 with a load resistance of 5 MΩ. Finally, this investigation fabricates double-sided piezoelectric transducers for harvesting vibration-power. The double-sided piezoelectric transducer is constructed by depositing piezoelectric thin films on both the front and the back sides of SUS304 substrate. The titanium (Ti) and platinum (Pt) layers were deposited using a dual-gun DC sputtering system between the piezoelectric thin film and the back side of the SUS304 substrate. Scanning electron microscopy and X-ray diffraction of piezoelectric films reveal a rigid surface structure and highly c-axis-preferring orientation. The maximum open circuit voltage of the double-sided ZnO power transducer is approximately 18 V. After rectification and filtering through a 33 nF capacitor, a specific power output of 1.3 μW/cm2 is obtained from the double-sided ZnO transducer with a load resistance of 6 MΩ. The variation of the power output of ±0.001% is obtained after 24-hour continuous test. The maximum open circuit voltage of the double-sided AlN power transducer is approximately 20 V. After rectification and filtering through a 33 nF capacitor, a specific power output of 1.462 μW/cm2 is obtained from the double-sided AlN transducer with a load resistance of 7 MΩ.

碩士<br>中原大學<br>電子工程研究所<br>99<br>Zinc oxide (ZnO), is popular in recent years in various fields of research material, the paper by RF reactive magnetron sputtering system, the growth conditions at room temperature, deposited on commercially available ITO / PET substrate deposition zinc oxide thin films, combined with easy processing and completion of the piezoelectric transducer element; by X-ray diffraction experiments that can be prepared zinc oxide with C-axis (002) prefer orientation in the FE-SEM measurements under that film thickness and deposition rate of the Calculate is about 150nm/HR, changing the thickness of the components of different process parameters under external pressure using a fixed frequency source, to observe its properties on the low-frequency components, to facilitate follow-up in the low-frequency environment collected for the use of pressure into electrical energy. Finished piezoelectric transducer element about 2.5cm2, the piezoelectric layer thickness 2.4μm or more components in the frequency of 1HZ, inlet pressure of 6kg / cm2, open-circuit piezoelectric voltage components on average more than 1.5V, already to commercially available LED lights up, the energy storage part of the piezoelectric layer thickness of 4μm or more components through the use of commercially available button-type Ni-MH rechargeable batteries, electric capacity 40mAH, the pulse charge method, already will produce the piezoelectric voltage electrical equipment were stored in the reservoir, to provide electrical energy saved.

碩士<br>國立中山大學<br>電機工程學系研究所<br>100<br>The purpose of this thesis is to study the c-axis inclined ZnO films to produce dual-mode thin-film piezoelectric transducer. The cantilever beam vibration theory as a power generation mode in adopted to verify that the transducer is in suitable for the application in the environment for low-frequency vibration. In order to develop dual-mode thin-film piezoelectric transducer, this study uses radio-frequency magnetron sputtering method with off-axis growth to deposit ZnO films on Pt/Ti/stainless steel substrate(SUS304), the effects of deposition parameters on the characteristict of ZnO films are studied. Because zinc oxide thin-film is grown with c-axis tilt, so the piezoelectric transducer exhibits longitudinal-mode and shear-mode characteristics. The physical characteristics of ZnO thin films were obtained by the analyses of the scanning electron microscopy (SEM) and X-ray diffraction (XRD) to discuss the surfaces, cross section and crystallization of ZnO thin films. Finally, the vibration test equipment in used for the measurement of electrical properties. The open and loaded voltages of the transducers were obtained by the measurement system. The optimal deposition parameters for ZnO thin films are sputtering pressure of 5 mTorr, RF power of 150W, substrate temperature of room temperature and oxygen concentration of 50%, which were determined by physical characteristics and voltage analysis. Under the optimal parameters, the ZnO thin-films are deposited with maximum shear-mode and tilting angles of 35°.The transducer was one-sid loaded with a piece of metal of 0.5 g load to enhance the cantilever vibration amplitude. As the input vibration of 65 Hz and vibration amplitude of 1mm were set, the maximum output power was obtained. The maximum open circuit voltage of 19.4 V was obtained. When the output of the transducers was recetified and filtered through a 1NN5711 Schottky diode bridge rectifier and a 33nF capacitor, the maximum power of 2.05μW/cm2 was achieved with the load resistance of 5MΩ.

碩士<br>中原大學<br>電子工程研究所<br>101<br>In this thesis, the zinc oxide (ZnO) films were deposited on ITO/PET substrate at room temperature by a magnetron reactive sputtering system. The effects of oxygen ratio on the structure of ZnO films were studied. X-ray diffraction (XRD) and Field-Emission Scanning electron microscopy (FE-SEM) were employed to characterize the crystallinity and film growth rate. All ZnO films exhibit columnar structure and preferred orientated with c-axis perpendicular to substrates. The optimal deposition parameters for ZnO films are sputtering pressure of 15mTorr, RF power of 90 W and oxygen concentration of 5 %. The optimized ZnO films were obtained to fabricate piezoelectric transducers. The vertical-pressure testing equipment was employed to measure the open-circuit voltage of the piezoelectric devices. Using the piezoelectric transducer with ZnO film thickness of 7μm, the device area was 10 cm2, the maximum open-circuit piezoelectric voltage of 0.52V can be obtained with the applied pressure of 6kg/cm2. The results can bring about the development of the piezoelectric transducers using ZnO films for low frequency vibration energy.

碩士<br>國立中山大學<br>電機工程學系研究所<br>98<br>This study presents a high-performance ZnO piezoelectric transducer integrated with the flexible stainless steel substrate. The ZnO piezoelectric film of 1.08nm was deposited on the flexible stainless steel substrate using a RF magnetron sputtering system. The cantilever length of 1cm and the vibration area of 1cm2 were designed for low-frequency environment according to the Cantilever Vibration Theory. The effects of various sputtering parameters such as substrate temperature, RF power and sputtering pressure were investigated to improve the piezoelectric characteristics of ZnO thin films. It was also discussed the unit thickness of open voltage values, and then the optimal sputtering parameters were determined. The physical characteristics of ZnO thin films were obtained by the analyses of the scanning electron microscopy (SEM) and X-ray diffraction (XRD) to discuss the surfaces, cross section and crystallization of ZnO thin films. The voltage analysis were measured the open and load voltage by the measurement system. The optimal deposition parameters for ZnO thin films are substrate temperature of 300℃, RF power of 75W, sputtering pressure of 9 mTorr and oxygen concentration of 60%, which were determined by physical characteristics and voltage analysis. The study employs a precise mass loading of 0.57g on the cantilever to increase the vibration amplitude. The vibration source from 1~150Hz was provided to the piezoelectric transducer, and then the experimental results were showed resonance frequency of 75Hz by oscilloscope. When the optimal thickness of ZnO films is 1.08μm and vibration amplitude is 1.19mm, the open circuit voltage of the power generator is 5.25V.After rectifying and flitting with a capacitor of 33nF,the maximum power of 1.0μW/cm2 was achieved with the load resistance of 5MΩ.

碩士<br>國立臺灣大學<br>應用力學研究所<br>92<br>Accurate monitoring of the thickness and elastic properties of thin films with thickness in the sub-micrometer range is very important in the area of N/MEMS fabrication. In this thesis, we utilize a RF surface acoustic wave (SAW) device to measure the dispersion of SAW in a thin film deposited layered substrate first, and then, determine the elastic properties of the thin film inversely through an optimization algorithm. Firstly, we analyze the dispersion of SAW in a SiO2/YZ-LiNbO3 layered specimen and serve as the forward solution of the inverse evaluation. Secondly, a novel design of interdigital transducer pairs was proposed to measure the dispersion of SAW in such a layered specimen. To increase the bandwidth of the SAW device, slanted finger interdigital transducer (SFIT) was employed to generate wide band SAW signals. The SFIT was designed by using the coupling of modes method to ensure the best frequency response. Sub-micrometer thickness SiO2 thin films were deposited on the piezoelectric YZ-LiNbO3 substrate via the PECVD process. Pairs of the SFITs were then fabricated on the substrate. A network analyzer was used to measure the frequency response of the SFIT. The frequency responses were then processed using the spectral analysis to obtain the dispersion of SAW in such a layered specimen. With the forward solution and measured dispersion of the thin film deposited layered specimen, the elastic properties of the SiO2 layer can be reconstructed through the using of the simplex algorithm. Result of the inversion shows that the elastic properties of the sub-micrometer thin SiO2 film can be determined successfully. It is worth noting that results of this study can be employed to design an in-situ thin film thickness monitoring SAW sensor.

With the proliferation of industries world-wide, there is a growing need and interest in sensing and monitoring environmental pollutants and monitoring the concentration of chemicals/gases in industrial process control. There is also an increasing demand for chemical sensors in other applications such as home security, breath analysis and food processing. Design and development of metal-oxide based gas sensor system is reported in this thesis. The system consists of three components viz. micro heater(which aids inheating the sensor film to required temperatures), CMOS ASIC (the sensor interface circuit) and the thin film transducer(a semiconducting metal oxide thin film whose resistance changes with the concentration of the target gas). Microheaters were realized through PolyMUMPs process. Thermal characterization of surface-micromachined microheaters is carried out from their dynamic response to electrothermal excitations. An electrical equivalent circuit model is developed for the thermo-mechanical system. The mechanical parameters are extracted from the frequency response obtained using a Laser Doppler Vibrometer. The resonant frequencies of the microheaters are measured and compared with FEM simulations. The thermal time constants are obtained from the electrical equivalent model by fitting the model response to the measured frequency response. Microheaters with an active area of140m × 140m have been realized on two different layers(poly-1 andpoly-2) with two different air-gaps (2m and 2.75m). The effective time constants, combining thermal and mechanical responses, are intherangeof0.13msto0.22msforheatersonpoly-1,and1.9s to0.15ms for microheaters on poly-2 layer. The thermal time constants of the best microheaters are in the range of a few s, thus making them suitable for sensor applications that need faster thermal response. The mechanical deformation of the microheaters subjected to an electrothermal excitation, due to thermal stress, is also analyzed using lensless in-line digital holographic microscopy (DHM). The numerically reconstructed holographic images of the micro-heaters clearly indicate the regions under high stress. Double exposure method has been used to obtain the quantitative measurements of the deformations, from the phase analysis of the hologram fringes. The measured deformations correlate well with the theoretical values predicted by a thermo-mechanical analytical model. The results show that lensless in-line DHM with Fourier analysis is an effective method for evaluating the thermo-mechanical characteristics of MEMS components. A sensor interface circuit comprising a resistance-to-time period converter as the front-end circuit and a proportional temperature controller to control the microheater temperature is designed and realized in 130nm UMC CMOS technology. The impact of biasing the transistors in subthreshold versus saturation conditions on analog circuit performance is systematically analyzed. A cascode current mirror, designed in 130nm CMOS technology, is biased in subthreshold and saturation regions and its performance has been analyzed through rigorous analytical modeling. The analytical results have been validated with SPICE simulations. It is demonstrated that the subthreshold operation provides better performance in terms of linearity, power, area, output impedance and tolerance to temperature variation, making it a preferable option for applications such as signal conditioning circuitry for environmental sensors. On the other hand, biasing the circuit in saturation is preferable for applications like transceivers and data converters where high bandwidth, SNR and low sensitivity to process variations are the key requirements. Based on this analysis, a sensor interface circuit has been prototyped for resistance measurement on 130nm CMOS technology, using subthreshold cascode current mirrors as the key building blocks. This current mirror results in 14X lower power compared to above-threshold operation. The interface circuit spans 5 orders of magnitude of resistance, and consumes an ultra low power of 326W. A proportional temperature controller with an integrated on-chip power MOSFET is also realized on the same chip for heating and temperature control of microheaters. The microheater is reused as temperature sensor. The entire circuit works with 1.2V supply, except the power MOSFET and the heater driver circuit, which operate with 3.3V supply. ZnO, a semiconducting metal-oxide, is used as the sensing material. Thin films of ZnO are spin-coated over insulating substrates using sol-gel processing technique. Gold pads deposited over the sensing film act as electrodes. The sensor film is characterized at different temperatures for its sensitivity to ethanol. A peak response of 14% change in resistance is observed for 5ppm ethanol, at a working temperature of 275◦C.

Structural Health Monitoring (SHM) systems for future structures and vehicles would involve a process of damage identification and prediction of certain quantities of interest that concerns the function and safety. This process provides SHM systems the ability to not only save cost but also enhance the service life, safety and reliability of the structures and vehicles. Integrated SHM system (ISHM) is an advancement of SHM system that has additional capability of predicting the component life/failure. ISHM system development involves detailed understanding of diagnostic waves, hardware components, signal processing paradigms and intelligent use of algorithms. Diagnostic waves like the guided waves are the elastic waves that propagate in a direction defined by the material boundaries. These waves have the capability of traveling large distance probing the entire thickness in plates/shells. Thus, they are widely used by SHM systems in monitoring the plate structures. Piezoelectric transducers are often employed in the interrogation using guided waves. Most SHM systems employing guided waves are designed for specific structures. Current paradigms of SHM systems are unable to enable the transition from simple or ideal structures to realistic and complicated structures. This is due to the challenges at the fundamental level involving transducer, wave propagation and phenomena of guided wave scattering with damages to evaluate the possible solutions through mathematical modeling and signal analysis capability required by ISHM systems. This thesis aims to develop understanding of these problems at a fundamental level. Complex system level understanding is still needed which is left out as open problem. A primary requirement in designing SHM system is the proper understanding of wave characteristics such as number of modes, wavelength and dispersiveness. Although three-dimensional elasticity solution and simplified theories are available to understand them, their applicability in SHM problem requires a much more detailed look. Effort toward this direction has led to the development of simpler models. However, mathematical models are not available for understanding the wave characteristics in complex structures involving stiffeners and adhesive joints. This problem is addressed in this thesis. There is a fair amount of understanding developed regarding transducer characteristics. This is accomplished by analytical and finite element models of transducers in the past. However, simplified transducer model that are computationally fast to suit SHM system requirements needs to be developed. The development of such model is presented in this thesis. Apart from modeling the transducers and wave scattering due to damage, signal correlation and calibration are needed for practical implementation in SHM. Characterization studies reported in published literature are limited to quasi-static and low frequencies applications. However, SHM of aerospace structures employ guided waves typically in the frequency range of 100-500 kHz. Methods to characterize the transducers at this frequency range needs to be developed, which is addressed in this thesis. Another major requirement of SHM system is the design and development of sensor-actuator network and appropriate algorithm. Techniques developed earlier involving transducer arrays in this regard have limitation due to complexity of geometry and signal interpretation that needs to be addressed. The network with suitable algorithm should ideally monitor large area including the critical areas of failure with minimum number of transducers. ISHM systems further require some capability to estimate the useful life of the damaged structure in order to take suitable decisions. Efficient techniques to achieve these are not developed. Overall, there is a need to improve highly interdisciplinary areas involving mathematical modeling, transducer design, fabrication and characterization, damage detection and monitoring strategies. In this thesis, various novel techniques to combine mathematical model with experimental signals to enhance the damage detection capability are presented. In this thesis, developments in the three main aspects of SHM systems are focused upon. They are (1) development of mathematical models of sensors/actuators, wave propagation and scattering due to damage (2) characterization and calibration of transducers and (3) development of technique to monitor wide variety of damages within the scope of ultrasonic guided wave based SHM. The thesis comprises of ten chapters. First chapter is devoted to the background and motivation for the problem addressed in this thesis. In second chapter, brief overview of available mathematical models and conventional damage monitoring strategy is presented. The significant contributions reported in the subsequent chapters in this thesis are outlined below In chapter 3, a reduced-order model of guided wave propagation in thick structures with reduced-order approximation of higher-order elasto-dynamic field is formulated. The surface normal and shear tractions of the thick structure are satisfied in a closed form. The time-frequency Fourier spectral finite element is developed and is validated using detailed and computationally intensive finite element simulations. Natural frequencies obtained from the developed spectral finite element and the detailed finite element simulations are compared. Transient response due to broad frequency band and narrow frequency band excitations given in the form of surface tractions are validated by comparing with the detailed finite element simulations. Using the developed spectral finite element, wave scattering from a free edge and a notch are simulated and validated by comparing with the detailed finite element simulations. In chapter 4, two-dimensional plane wave and flexural wave scattering models for more complicated features such as stiffener with delamination and stiffener with bolt failures in a stiffened panel are derived using ultrasonic ray tracing based approach combined with wave-field representation. Dispersion relations are reformulated for the base plate where it is bolted with the stiffener. Surface conditions due to contact stiffness and contact damping are modeled by introducing springs and dampers. Scattering coefficients for the bonded and bolted stiffeners are derived. The scattering coefficients are evaluated for various different frequencies. Results are compared for different stiffener parameters. In chapter 5, a simplified analytical model of a piezoelectric actuator with uniform electrodes is modeled. The problem is to determine the launched guided wave characteristics in the structure. The analytical model is derived considering two-dimensional elasticity based approach and Airy’s stress function. The actuator model is used to specify the displacement boundary conditions in the detailed finite element model. The radiated wave patterns in a plate due to actuation from transducers of different shapes are obtained and validated with experiments. Phased array actuators are modeled in the detailed finite element model using the displacements estimated from the actuator model. The radiated wave pattern from the detailed finite element simulations are validated with experiments. Chapter 6 is devoted to the design and characterization of transducers for ultrasonic guided wave applications. The characterization techniques involve the estimation of voltage response for the induced strain by the guided wave at various different frequencies. First, a novel removable bonding technique and a calibration technique are demonstrated and related advantages are discussed. Performance of the piezoelectric thin film under quasi-static, dynamic and transient impact loadings are analyzed first. Next, a guided wave technique is developed to characterize piezoelectric thin film sensors and actuators at ultrasonic frequencies. The transducers with inter digital electrodes are characterized for frequency tuning and directional sensitivity. This characterization study enables in the selection of optimal frequency bands for interrogation. Further, the characterization of transducers with thermal degradation is presented. In chapter 7, a novel guided wave technique to calibrate the thin film sensors for ultrasonic applications is presented. Calibration procedure involves the estimation of the piezoelectric coefficient at ultrasonic range of frequencies. Calibration is done by the measurement of voltage generated across thin films when guided waves are induced on them. With the proposed technique, piezoelectric coefficient can be estimated accurately at any frequency of the propagating wave. Similarly, the measurement of piezoelectric coefficient of thin films with inter digital electrodes is presented. The estimation of piezoelectric coefficient at various different directions using laser Doppler vibrometer is presented. Lastly, the degradation of piezoelectric coefficient is studied for increasing thermal fatigue. In chapter 8, toward SHM methodology development, a guided wave based technique to detect and monitor cracks in a structure is presented. To establish the methodology, a detailed study is carried out on the effect of crack and specimen size on the guided wave propagation characteristics. Using the wave characteristics, an analytical way of modeling Lamb wave propagation in the specimen with plastic zone is proposed. The feasibility to determine plastic zone and fatigue crack propagation with integrated piezoelectric transducers is demonstrated experimentally and the results are verified analytically. A method is further established to detect damage at initial stage and crack-tip plastic zone size along with crack length for a given stress amplitude or vice-versa. An approach to estimate fatigue life from the transducer signals is also proposed. In chapter 9, a compact circular array of sensor-actuator network and an algorithm is presented to monitor large plate structures. A method based on the wavelet transforms of transducer signals is established to localize and estimate the severity of damages. Experiments are conducted to demonstrate the capability of the circular array based method in the localization and quantification of various types of damages like debonding of stiffeners, failure of bolted joints, corrosion and hole-enlargement. A damage index is then computed from wavelet time-frequency map that indicates the severity of damage. Chapter 10 ends with the concluding remarks on the work done with simultaneous discussion on the future scope. The work reported in this thesis is interdisciplinary in nature and it aims to combine the modeling and simulation techniques with realistic data in SHM to impart higher confidence levels in the prediction of damages and its prognosis. The work also aims in incorporating various mathematical models of wave propagation and ray tracing based algorithm to optimize the detection scheme employed in SHM. The future direction based on this study could be aimed at developing intelligent SHM systems with high confidence levels so that statistical machine learning would be possible to deal with complex real-world SHM problems.