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Journal articles on the topic 'SU8'

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Author: Grafiati

Published: 4 June 2021

Last updated: 10 February 2022

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1

Jiguet, S., A. Bertsch, H. Hofmann, and P. Renaud. "SU8-Silver Photosensitive Nanocomposite." Advanced Engineering Materials 6, no. 9 (September 2004): 719–24. http://dx.doi.org/10.1002/adem.200400068.

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2

Mulligan, Riley P. M., Carolyn H. Eyles, and Andy F. Bajc. "Stratigraphic analysis of Late Wisconsin and Holocene glaciolacustrine deposits exposed along the Nottawasaga River, southern Ontario, Canada." Canadian Journal of Earth Sciences 55, no. 7 (July 2018): 863–85. http://dx.doi.org/10.1139/cjes-2017-0081.

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Analysis of 56 outcrop exposures in cut banks along the Nottawasaga River in southern Simcoe County, Ontario, Canada, has led to the identification of eight stratigraphic units (SU1–SU8) that represent a record of changing environmental conditions during deglaciation and exhibit strong controls on shallow groundwater flow in the region. The stratigraphic succession is floored by the Late Wisconsin Newmarket Till (SU1), which is locally overlain by ice-proximal debris flow deposits (SU2). These glacial sediments are overlain by glaciolacustrine silt rhythmites (SU3) that pass upwards into deltaic sand (SU4) and channelized fluviodeltaic sand and gravel (SU5). Lying above the fluvial deposits are widespread interbedded glaciolacustrine sands and silt (SU6), which coarsen up-section toward the ground surface. The succession is locally capped by fluviodeltaic (SU7) and younger fluvial (SU8) deposits. These SUs record sedimentary environments that existed during deglaciation of the region and provide insight into the evolution of glacial lakes Schomberg and Algonquin and the Nipissing phase of the upper Great Lakes. The environmental changes described from sediments along the Nottawasaga River provide insights into basin-scale events that occurred throughout the upper Great Lakes during deglaciation. Qualitative observations of groundwater discharge from sediments at outcrop faces are used to characterize the hydraulic function of the stratigraphic units as well as possible preferential groundwater flow pathways in the shallow subsurface.

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3

Rahiminejad, Sofia, Elena Pucci, Sjoerd Haasl, and Peter Enoksson. "SU8 ridge-gap waveguide resonator." International Journal of Microwave and Wireless Technologies 6, no. 5 (May 12, 2014): 459–65. http://dx.doi.org/10.1017/s1759078714000609.

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In this paper, we present the first ridge-gap waveguide resonator made with a polymer base. It is designed for the frequency range 220–325 GHz, and is fabricated solely using a Au coated two-layer SU8-based process. The design is based on previous work done with Si. The new process has advantages such as fewer and cheaper process steps. The SU8 ridge-gap waveguide resonator is made in order to obtain attenuation characteristics via the measured Q-factor of the resonator. The ridge-gap waveguide resonator has the same dimensions as the previous one fabricated in Si, and the same thickness of the Au coating. The SU8-based resonator shows an attenuation loss of 0.41 dB/mm at 282.2 GHz compared to the Si-based resonator with an attenuation loss of 0.043 dB/mm at 283.5 GHz. This makes the SU8 process a more cost-effective alternative to the Si process

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4

Ransley, J. H. T., M. Watari, D. Sukumaran, R. A. McKendry, and A. A. Seshia. "SU8 bio-chemical sensor microarrays." Microelectronic Engineering 83, no. 4-9 (April 2006): 1621–25. http://dx.doi.org/10.1016/j.mee.2006.01.175.

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5

Jiguet, S., A. Bertsch, H. Hofmann, and P. Renaud. "Conductive SU8 Photoresist for Microfabrication." Advanced Functional Materials 15, no. 9 (September 2005): 1511–16. http://dx.doi.org/10.1002/adfm.200400575.

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6

Rong, Hua, Jian Wei, and Xi Chen. "Study on Fabrication Process of SU8 Photoresist Microstructures and Evaluation of Stress Gradient." Key Engineering Materials 609-610 (April 2014): 740–44. http://dx.doi.org/10.4028/www.scientific.net/kem.609-610.740.

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A fabrication process to manufacture SU8 photoresist microstructures is presented in which BP212 positive photoresist was used as sacrifice layer and SU8 was used as structure layer. No crack has been observed in the obtained microstructures. The relation between PEB temperature and stress gradient in SU8 film has been studied by measuring radii of released SU8 cantilevers made at different PEB temperatures.

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7

Arana, N., D. Puente, I. Ayerdi, E. Castaño, and J. Berganzo. "SU8 protective layers in liquid operating SAWs." Sensors and Actuators B: Chemical 118, no. 1-2 (October 2006): 374–79. http://dx.doi.org/10.1016/j.snb.2006.04.083.

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8

Huang, Cheng-Sheng, and Wei-Chih Wang. "SU8 inverted-rib waveguide Bragg grating filter." Applied Optics 52, no. 22 (July 31, 2013): 5545. http://dx.doi.org/10.1364/ao.52.005545.

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9

Kumar, Vijay, and Niti Nipun Sharma. "Synthesis of hydrophilic to superhydrophobic SU8 surfaces." Journal of Applied Polymer Science 132, no. 18 (January 21, 2015): n/a. http://dx.doi.org/10.1002/app.41934.

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10

Hong, G., A. S. Holmes, and M. E. Heaton. "SU8 resist plasma etching and its optimisation." Microsystem Technologies 10, no. 5 (August 2004): 357–59. http://dx.doi.org/10.1007/s00542-004-0413-4.

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11

Antonio, Christian, and Piyachat Watanachai. "Variable Frequency Microwave Curing of SU8 Photoresist Films." Advanced Materials Research 931-932 (May 2014): 101–5. http://dx.doi.org/10.4028/www.scientific.net/amr.931-932.101.

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Photoresist used in the fabrication of Microelectrochemical Systems (MEMS) has traditionally been processed using conventional curing technology. This type of curing is often time intensive and results in non-uniform products. A uniform bake of the layer is not always possible due to the mechanisms of heat transfer conventional curing offers, leading to poor pattern resolution, formation of micro-cracks and severe outgassing occurring as a consequence. The Variable Frequency Microwave (VFM) Technique was successfully utilised in this study as an alternative method for the processing of negative tone SU8 photoresist. The VFM method was compared to the conventional processing method, which utilises a Hotplate, and a hybrid method utilizing both Hotplate and the VFM and found that an increase on the degree of cure was observed using the VFM at similar processing temperatures which means that SU8 curing at lower temperatures or rapid curing is possible. The increase in cure rates can be attributed to a combination of heat transfer and the unique capability of microwave to couple with the sample. Optical studies of the microstructures fabricated suggest that films that have a degree of cure of <60% resulted in poor quality microstructures. The VFM was found to achieve satisfactory microstructures at most of the temperatures tested as compared to the other two methods tested.

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12

Gassmann, Stefan, and Lienhard Pagel. "Microfluidic Technology using SU8 on top of PCBs." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2013, DPC (January 1, 2013): 000890–914. http://dx.doi.org/10.4071/2013dpc-tp31.

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The usage of standard PCBs (Printed Circuit Boards) for the creation of micro fluidic systems was already reported. The combination of a standard micro technology using photolithography and photo sensitive layers and the PCB technology leads to interesting low cost solutions for micro systems. The technology and some examples will be presented in this talk. Using PCBs as the substrate the integration of electronics is simple and the substrate is available at low cost. Putting the sophisticated SU8 based micro technology using photolithography on top, new systems can be created. Both technologies deliver their best, in the PCB technology integrated electrodes and electronics can be created while the SU8 technology adds high resolution high aspect-ratio micro systems which are not possible in a PCB implementation. Although this combination seems to be straight forward, several issues have to overcome for a successful realization. These are the surface roughness, adhesion problems and the uniform coating of rectangular substrates. In the talk these issues will be addressed. As successful examples an electro-osmotic pump and an electrochemical DNA sensor will be presented.

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13

Majidian, Maryam, Claudio Grimaldi, Andrea Pisoni, László Forró, and Arnaud Magrez. "Electrical conduction of photo-patternable SU8–graphene composites." Carbon 80 (December 2014): 364–72. http://dx.doi.org/10.1016/j.carbon.2014.08.075.

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14

Hamlett, C. A. E., G. McHale, and M. I. Newton. "Lithographically fabricated SU8 composite structures for wettability control." Surface and Coatings Technology 240 (February 2014): 179–83. http://dx.doi.org/10.1016/j.surfcoat.2013.12.038.

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15

Gut, Kazimierz. "Bimodal Layers of the Polymer SU8 as Refractometer." Procedia Engineering 47 (2012): 326–29. http://dx.doi.org/10.1016/j.proeng.2012.09.149.

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16

Partridge, J. G., T. Matthewson, and S. A. Brown. "Bi cluster-assembled interconnects produced using SU8 templates." Nanotechnology 18, no. 15 (March 16, 2007): 155607. http://dx.doi.org/10.1088/0957-4484/18/15/155607.

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17

Shang, Xiaobang, Yingtao Tian, Michael J. Lancaster, and Suren Singh. "A SU8 Micromachined WR-1.5 Band Waveguide Filter." IEEE Microwave and Wireless Components Letters 23, no. 6 (June 2013): 300–302. http://dx.doi.org/10.1109/lmwc.2013.2260733.

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18

Sharma, S., A. Khalajhedayati, T. J. Rupert, and M. J. Madou. "SU8 Derived Glassy Carbon for Lithium Ion Batteries." ECS Transactions 61, no. 7 (March 25, 2014): 75–84. http://dx.doi.org/10.1149/06107.0075ecst.

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19

Amone, StefaniaD, IlariaElena Palamà, Alessio Mezzi, Giuseppe Gigli, and Barbara Cortese. "EXTREME WATER CONFINEMENT AMIDST SUPERHYDROPHILIC SU8 MICROPATTERNED WALLS." International Journal of Advanced Research 6, no. 9 (August 31, 2018): 924–40. http://dx.doi.org/10.21474/ijar01/7753.

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20

Hervás, Javier, Isaac Suárez, Joaquín Pérez, Pedro J. Rodríguez Cantó, Rafael Abargues, Juan P. Martínez-Pastor, Salvador Sales, and José Capmany. "MWP phase shifters integrated in PbS-SU8 waveguides." Optics Express 23, no. 11 (May 22, 2015): 14351. http://dx.doi.org/10.1364/oe.23.014351.

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21

Taccola, S., F. Greco, B. Mazzolai, V. Mattoli, and E. W. H. Jager. "Thin film free-standing PEDOT:PSS/SU8 bilayer microactuators." Journal of Micromechanics and Microengineering 23, no. 11 (October 21, 2013): 117004. http://dx.doi.org/10.1088/0960-1317/23/11/117004.

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22

Mionić, Marijana, Sébastien Jiguet, Moshe Judelewicz, László Forró, and Arnaud Magrez. "Preparation and characterization of SU8-carbon nanotube composites." physica status solidi (b) 246, no. 11-12 (November 24, 2009): 2461–64. http://dx.doi.org/10.1002/pssb.200982274.

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23

Ghannam, Ayad, David Bourrier, Christophe Viallon, and Thierry Parra. "Low Cost SU8 Based Above IC Process for High-Q RF Power Inductors Integration." Advanced Materials Research 324 (August 2011): 431–33. http://dx.doi.org/10.4028/www.scientific.net/amr.324.431.

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This paper presents a new process for integration of high-Q RF power inductors above low resistivity silicon substrates. The process uses the SU8 resin as a dielectric layer. The aim of using the SU8 is to form thick dielectric layer that can enhance the performance of the inductors. The flexibility of the process enables the possibility to realize complex shaped planar inductors with various dielectric and metal thicknesses to meet the requirements of the application. Q values of 55 at 5 GHz has been demonstrated for an inductance value of 0.8 nH using a 60 µm thick SU8 layer and 30 µm thick copper ribbons.

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24

Bertsch, Arnaud, and Philippe Renaud. "Special Issue: 15 Years of SU8 as MEMS Material." Micromachines 6, no. 6 (June 19, 2015): 790–92. http://dx.doi.org/10.3390/mi6060790.

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25

Han Wei-Jing, Wei Qing-Quan, Li Yun-Tao, Zhou Xiao-Guang, and Yu Yu-De. "Fabrication of SU8-based chip suitable for genomic sequencing." Acta Physica Sinica 62, no. 14 (2013): 148701. http://dx.doi.org/10.7498/aps.62.148701.

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26

Key, M. J., A. Llobera, M. Lozano, I. Ramos-Lerate, and V. Seidemann. "Fabrication of gas amplification microstructures with SU8 photosensitive epoxy." Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 525, no. 1-2 (June 2004): 49–52. http://dx.doi.org/10.1016/j.nima.2004.03.023.

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27

Jung, Woonseop, Young Won Kim, Dongwook Yim, and Jung Yul Yoo. "Microscale surface thermometry using SU8/Rhodamine-B thin layer." Sensors and Actuators A: Physical 171, no. 2 (November 2011): 228–32. http://dx.doi.org/10.1016/j.sna.2011.06.025.

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28

Ezkerra, Aitor, Luis José Fernández, Kepa Mayora, and Jesús Miguel Ruano-López. "SU8 diaphragm micropump with monolithically integrated cantilever check valves." Lab on a Chip 11, no. 19 (2011): 3320. http://dx.doi.org/10.1039/c1lc20324j.

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29

Kumar, Vijay, Nidhi Maheshwari, and Niti Nipun Sharma. "Self Assembled Monolayer Modified SU8 Surface for Electrowetting Application." Macromolecular Symposia 357, no. 1 (November 2015): 18–22. http://dx.doi.org/10.1002/masy.201400179.

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30

Xu, Jianwen, and C. P. Wong. "High dielectric constant SU8 composite photoresist for embedded capacitors." Journal of Applied Polymer Science 103, no. 3 (2006): 1523–28. http://dx.doi.org/10.1002/app.24957.

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31

Viannie, Leema Rose, G. R. Jayanth, V. Radhakrishna, and K. Rajanna. "Fabrication and Nonlinear Thermomechanical Analysis of SU8 Thermal Actuator." Journal of Microelectromechanical Systems 25, no. 1 (February 2016): 125–33. http://dx.doi.org/10.1109/jmems.2015.2490485.

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32

Kuppireddi, Srinivasa Reddy, Sayanu Pamidighantam, and Oddvar Søråsen. "Influence of SU8 Photopolymer for Silicon RFMEMS Packaging Applications." International Journal of Materials Science and Engineering 1, no. 2 (2013): 79–81. http://dx.doi.org/10.12720/ijmse.1.2.79-81.

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33

Yasui, Manabu, Hitoshi Nakano, Masahito Kurouchi, Shin-ichi Kawano, and Satoru Kaneko. "Removal of SU8 with N-Methyl-2-Pyrrolidone doped." Proceedings of the Symposium on Micro-Nano Science and Technology 2017.8 (2017): PN—35. http://dx.doi.org/10.1299/jsmemnm.2017.8.pn-35.

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34

Verhaar, T. M., J. Wei, and P. M. Sarro. "Pattern transfer on a vertical cavity sidewall using SU8." Journal of Micromechanics and Microengineering 19, no. 7 (June 30, 2009): 074018. http://dx.doi.org/10.1088/0960-1317/19/7/074018.

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35

Gut, K., and Z. Opilski. "Spectropolarimetric analyses of optical single mode SU8 waveguide layers." Bulletin of the Polish Academy of Sciences Technical Sciences 63, no. 2 (June 1, 2015): 349–52. http://dx.doi.org/10.1515/bpasts-2015-0038.

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Abstract The paper presents the principle of the operation of a spectropolarimetric interferometer. In a planar waveguide orthogonal modes of the TE and TM types can be excited for the entire visible light. During the propagation the difference of the phases between the modes was determined, which is the function of the length of the path of propagation, the difference of the effective refractive index (NTM-NTE) and the wavelength. At the output of this system the spectral distribution of intensity was recorded, the shape of which depends on the value of the refractive index of the cover of the waveguides

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36

Seidemann, V., J. Rabe, M. Feldmann, and S. Büttgenbach. "SU8-micromechanical structures with in situ fabricated movable parts." Microsystem Technologies 8, no. 4-5 (August 1, 2002): 348–50. http://dx.doi.org/10.1007/s00542-002-0171-0.

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37

Liu, G., Y. Tian, and Y. Kan. "Fabrication of high-aspect-ratio microstructures using SU8 photoresist." Microsystem Technologies 11, no. 4-5 (April 2005): 343–46. http://dx.doi.org/10.1007/s00542-004-0452-x.

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38

Suraj and Mohd Zahid Ansari. "Modelling and analysis of SU8/CB nanocomposite polymer flow sensor." IOP Conference Series: Materials Science and Engineering 561 (November 12, 2019): 012108. http://dx.doi.org/10.1088/1757-899x/561/1/012108.

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39

Tenje, Maria, Stephan Keller, Søren Dohn, Zachary J. Davis, and Anja Boisen. "Drift study of SU8 cantilevers in liquid and gaseous environments." Ultramicroscopy 110, no. 6 (May 2010): 596–98. http://dx.doi.org/10.1016/j.ultramic.2010.02.017.

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40

Nathan, M., O. Levy, I. Goldfarb, and A. Ruzin. "Monolithic coupling of a SU8 waveguide to a silicon photodiode." Journal of Applied Physics 94, no. 12 (2003): 7932. http://dx.doi.org/10.1063/1.1625778.

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41

Hernandez-Romano, Ivan, Dimitrios Mandridis, Daniel A. May-Arrioja, Jose J. Sanchez-Mondragon, and Peter J. Delfyett. "Mode-locked fiber laser using an SU8/SWCNT saturable absorber." Optics Letters 36, no. 11 (June 1, 2011): 2122. http://dx.doi.org/10.1364/ol.36.002122.

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42

Ohlinger, Kris, Yuankun Lin, Zsolt Poole, and Kevin P. Chen. "Undistorted 3D microstructures in SU8 formed through two-photon polymerization." AIP Advances 1, no. 3 (September 2011): 032163. http://dx.doi.org/10.1063/1.3646148.

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43

Mionić, Marijana, Kristopher Pataky, Richard Gaal, Arnaud Magrez, Jürgen Brugger, and László Forró. "Carbon nanotubes–SU8 composite for flexible conductive inkjet printable applications." Journal of Materials Chemistry 22, no. 28 (2012): 14030. http://dx.doi.org/10.1039/c2jm16547c.

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44

Al‐Mumen, Haider, and Wen Li. "Complementary metal‐SU8‐graphene method for making integrated graphene nanocircuits." Micro & Nano Letters 13, no. 4 (April 2018): 465–68. http://dx.doi.org/10.1049/mnl.2017.0508.

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45

Grimaldi, Claudio, Marijana Mionić, Richard Gaal, László Forró, and Arnaud Magrez. "Electrical conductivity of multi-walled carbon nanotubes-SU8 epoxy composites." Applied Physics Letters 102, no. 22 (June 3, 2013): 223114. http://dx.doi.org/10.1063/1.4809923.

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46

Akdogan, N. G., Y. Odeh, H. A. Alshammari, O. Zirhli, and O. Akdogan. "Highly anisotropic magneto responsive SU8/Fe ink for additive manufacturing." Journal of Magnetism and Magnetic Materials 541 (January 2022): 168526. http://dx.doi.org/10.1016/j.jmmm.2021.168526.

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47

Huby, Nolwenn, John Bigeon, Gwennaël Danion, Jean-Luc Duvail, Françis Gouttefangeas, Loïc Joanny, and Bruno Bêche. "Transferable Integrated Optical SU8 Devices: From Micronic Waveguides to 1D-Nanostructures." Micromachines 6, no. 5 (April 23, 2015): 544–53. http://dx.doi.org/10.3390/mi6050544.

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48

Hamzah, I. H., Asrulnizam Abd Manaf, and O. Sidek. "Fabrication technique of a 3 dimensional SU8 mold on PMMA substrate." IEICE Electronics Express 6, no. 24 (2009): 1726–31. http://dx.doi.org/10.1587/elex.6.1726.

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49

Talebi, Mohammadmahdi, Keith Cobry, Ananya Sengupta, and Peter Woias. "Transparent Glass/SU8-Based Microfluidic Device with on-Channel Electrical Sensors." Proceedings 1, no. 4 (August 17, 2017): 336. http://dx.doi.org/10.3390/proceedings1040336.

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50

Bisen, Mahak, and Mohd Zahid Ansari. "Phenomenological Modelling Sensitivity of SU8/CB Nanocomposite Conducting Polymer Microcantilever Biosensor." Materials Today: Proceedings 4, no. 9 (2017): 10395–99. http://dx.doi.org/10.1016/j.matpr.2017.06.387.

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