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Journal articles on the topic 'SU8 Thermal Actuator'

Author: Grafiati

Published: 6 September 2023

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1

Solano, B., S. Rolt, and D. Wood. "Thermal and mechanical analysis of an SU8 polymeric actuator using infrared thermography." Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science 222, no. 1 (2008): 73–86. http://dx.doi.org/10.1243/09544062jmes676.

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In the current paper, report the detailed thermomechanical analysis of a polymeric thermal actuator integrated in a microelectromechanical systems microgripper, is reported. The inclusion of an actuator design which eliminates completely the parasitic resistance of the cold arm improves considerably the thermal efficiency of the system and enables large displacements at lower input voltages and operating temperatures than reported previously. Two different microgrippers built using a trilayer polymer/metal/polymer combination of SU8/gold/SU8 have been modelled, fabricated, and tested. As oppos

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2

Viannie, Leema Rose, G. R. Jayanth, V. Radhakrishna, and K. Rajanna. "Fabrication and Nonlinear Thermomechanical Analysis of SU8 Thermal Actuator." Journal of Microelectromechanical Systems 25, no. 1 (2016): 125–33. http://dx.doi.org/10.1109/jmems.2015.2490485.

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3

Sheikhbahaie, Reza, Aria Alasty, and Hassan Salarieh. "Design, Modeling and Optimization of a Novel Two DOF Polymeric Electro-Thermal Micro-Actuator." Applied Mechanics and Materials 307 (February 2013): 112–16. http://dx.doi.org/10.4028/www.scientific.net/amm.307.112.

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In this paper, design, simulation and optimization of a novel electrothermally-activated polymeric microactuator capable of generating combination of bidirectional lateral and rotational motions are presented. The composite structure of this actuator is consisted of a symmetric meandered shape silicon skeleton, a SU8 thermal expandable polymer and a thin film chrome layer heater. This actuator is controlled by applying appropriate voltages on its four terminals. With the purpose of dimension optimization, a numerical parametric study is executed. The modeled actuator which is 1560 μm long, 156

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4

Mitrev, Rosen, Todor Todorov, Andrei Fursov, and Borislav Ganev. "Theoretical and Experimental Study of a Thermo-Mechanical Model of a Shape Memory Alloy Actuator Considering Minor Hystereses." Crystals 11, no. 9 (2021): 1120. http://dx.doi.org/10.3390/cryst11091120.

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The paper presents a theoretical and experimental investigation of a thermo-mechanical model of an actuator composed of a shape memory alloy wire arranged in series with a bias spring. The developed mathematical model considers the dynamics of the actuator in the thermal and mechanical domains. The modelling accuracy is increased through the developed algorithm for modelling the minor and sub minor hystereses, thus removing the disadvantages of the classical model. The algorithm improves the accuracy, especially when using pulse-width modulation control, for which minor and sub minor hysterese

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5

Goteea, Bimal Jeet, Qianjun Zhang, and Wei Dong. "A Compact Electromagnetic Dual Actuation Positioning System with a 10 mm Range and Nanometer Resolution." Actuators 12, no. 3 (2023): 132. http://dx.doi.org/10.3390/act12030132.

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In this manuscript, a compact electromagnetic dual actuation positioning system (CEDAPS) based on the Lorentz force principle that features a 10 mm range and nanometer-scale resolution with flexure guides is presented. Firstly, the stiffness of the flexure mechanism is modelled. Secondly, based on it, the primary coil is designed, and from its performance, a suitable secondary coil is made to compensate for the deficiency of the primary actuation subsystem. The characteristics of the forces generated by these coils are also evaluated by an electromagnetic FEA simulation. Thirdly, a control sch

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6

Maré, Jean-Charles. "Practical Considerations in the Modelling and Simulation of Electromechanical Actuators." Actuators 9, no. 4 (2020): 94. http://dx.doi.org/10.3390/act9040094.

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The work reported here was aimed at improving the practical efficiency of the model-based development and integration of electromechanical actuators. Models are proposed to serve as preliminary design, virtual prototyping, and validation. The first part focuses on the early phases of a project in order to facilitate the identification of modelling needs and constraints, and to build a top-level electromechanical actuator model for preliminary studies and sub-specification. Detailed modelling and simulation are then addressed with a mixed view on the control, power capability, and thermal balan

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7

Torres, David, LaVern Starman, Harris Hall, Juan Pastrana, and Sarah Dooley. "Design, Simulation, Fabrication, and Characterization of an Electrothermal Tip-Tilt-Piston Large Angle Micromirror for High Fill Factor Segmented Optical Arrays." Micromachines 12, no. 4 (2021): 419. http://dx.doi.org/10.3390/mi12040419.

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Micro-electromechanical system (MEMS) micromirrors have been in development for many years, but the ability to steer beams to angles larger than 20° remains a challenging endeavor. This paper details a MEMS micromirror device capable of achieving large motion for both tip/tilt angles and piston motion. The device consists of an electrothermal actuation assembly fabricated from a carefully patterned multilayer thin-film stack (SiO2/Al/SiO2) that is epoxy bonded to a 1 mm2 Au coated micromirror fabricated from an SOI wafer. The actuation assembly consists of four identical actuators, each compri

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8

Acharya, Govatsa, Fredrik Dehlin, Sara Bortot, and Ignas Mickus. "INVESTIGATION OF A SELF-ACTUATED, GRAVITY-DRIVEN SHUTDOWN SYSTEM IN A SMALL LEAD-COOLED REACTOR." EPJ Web of Conferences 247 (2021): 07007. http://dx.doi.org/10.1051/epjconf/202124707007.

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Passive safety systems in a nuclear reactor allow to simplify the overall plant design, beside improving economics and reliability, which are considered to be among the salient goals of advanced Generation IV reactors. This work focuses on investigating the application of a self-actuated, gravity-driven shutdown system in a small lead-cooled fast reactor and its dynamic response to an initiating event. The reactor thermal-hydraulics and neutronics assessment were performed in advance. According to a first-order approximation approach, the passive insertion of shutdown assembly was assumed to b

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9

Naserbakht, Sepideh, Andreas Naesby, and Aurélien Dantan. "Stress-Controlled Frequency Tuning and Parametric Amplification of the Vibrations of Coupled Nanomembranes." Applied Sciences 9, no. 22 (2019): 4845. http://dx.doi.org/10.3390/app9224845.

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Noninvasive tuning of the mechanical resonance frequencies of suspended parallel nanomembranes in various monolithic arrays is achieved by piezoelectric control of their tensile stress. Parametric amplification of their thermal fluctuations is shown to be enhanced by the piezoelectric actuation and amplification factors of up to 20 dB in the sub-parametric oscillation threshold regime are observed.

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10

Arnesano, Marco, Andrea Calvaresi, Filippo Pietroni, et al. "A Sub-Zonal PMV-Based HVAC and Façade Control System for Curtain Wall Buildings." Proceedings 2, no. 15 (2018): 1138. http://dx.doi.org/10.3390/proceedings2151138.

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This paper presents an experimental test room in a curtain wall building where an innovative monitoring and control system was implemented and tested. The proposed solution is composed by an IR-based comfort sensor that measures the PMV (Predicted Mean Vote) index for 2 room’s sub-zones and provides the optimal air temperature set-points. The overall control system includes a distributed sensors and actuators network, also embedded into the façade modules, to measure indoor and outdoor parameters and to regulate fan-coils, windows opening and shadings with a sub-zonal approach. Initial results

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11

Arnesano, Marco, Andrea Calvaresi, Filippo Pietroni, et al. "A Sub-Zonal PMV-Based HVAC and Façade Control System for Curtain Wall Buildings." Proceedings 2, no. 15 (2018): 1596. http://dx.doi.org/10.3390/proceedings2151596.

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This paper presents an experimental test room in a curtain wall building where an innovative monitoring and control system was implemented and tested. The proposed solution is composed by an IR-based comfort sensor that measures the PMV (Predicted Mean Vote) index for 2 room’s sub-zones and provides the optimal air temperature set-points. The overall control system includes a distributed sensors and actuators network, also embedded into the façade modules, to measure indoor and outdoor parameters and to regulate fan-coils, windows opening and shadings with a sub-zonal approach. Initial results

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12

Warthmann, Alexander, Daniel Wölki, Henning Metzmacher, and Christoph van Treeck. "Personal Climatization Systems—A Review on Existing and Upcoming Concepts." Applied Sciences 9, no. 1 (2018): 35. http://dx.doi.org/10.3390/app9010035.

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To accomplish the current climate goals of the federal republic of Germany, energy efficiency within the building and automotive sector must improve considerably. One possible way to reduce the high amount of energy required for heating, ventilation, and air-conditioning (HVAC) is the introduction of personal climatization systems in combination with the extension of the standardized room air temperature range. Personal systems allow improvements of climatic conditions (heating, cooling, and air quality) within sub-areas of the room instead of conditioning an entire room air volume. In this re

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13

Kwac, Lee Ku, Jae Yeol Kim, and Young Tae Cho. "Motion and Environment Error Compensation for Ultra-Precision Lathe." Key Engineering Materials 297-300 (November 2005): 2339–44. http://dx.doi.org/10.4028/www.scientific.net/kem.297-300.2339.

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Recently, the demand for Ultra-precision products is rapidly increasing, especially in such industries as semi-conductors, computers, aerospace, and precision machinary. Ultra-precision processing is also extremely needed for NT in the field of mechanical engineering. Lately, together with drastic advancement of electronic and photonics industry, the need of Ultra-precision processing is increased in the manufacturing of various kernel parts, which are connected with these industrial fields. Especially, motion accuracy to nanometers is required in order in stroke of hundreds millimeters accord

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14

Qiao, Qifeng, Haoyang Sun, Xinmiao Liu, et al. "Suspended Silicon Waveguide with Sub-Wavelength Grating Cladding for Optical MEMS in Mid-Infrared." Micromachines 12, no. 11 (2021): 1311. http://dx.doi.org/10.3390/mi12111311.

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Mid-infrared (MIR) photonics are generating considerable interest because of the potential applications in spectroscopic sensing, thermal imaging, and remote sensing. Silicon photonics is believed to be a promising solution to realize MIR photonic integrated circuits (PICs). The past decade has seen a huge growth in MIR PIC building blocks. However, there is still a need for the development of MIR reconfigurable photonics to enable powerful on-chip optical systems and new functionalities. In this paper, we present an MIR (3.7~4.1 μm wavelength range) MEMS reconfiguration approach using the sus

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15

Verma, Kamlesh, Debashis Ghosh, Rajeev Marathe, and Avnish Kumar. "Efficient Embedded Hardware Architecture for Stabilised Tracking Sighting System of Armoured Fighting Vehicles." Defence Science Journal 69, no. 3 (2019): 208–16. http://dx.doi.org/10.14429/dsj.69.14414.

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A line-of-sight stabilised sighting system, capable of target tracking and video stabilisation is a prime requirement of any armoured fighting tank vehicle for military surveillance and weapon firing. Typically, such sighting systems have three prime electro-optical sensors i.e. day camera for viewing in day conditions, thermal camera for night viewing and eye-safe laser range finder for obtaining the target range. For laser guided missile firing, additional laser target designator may be a part of sighting system. This sighting system provides necessary parameters for the fire control compute

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16

Katta, Miranji, R. Sandanalakshmi, M. Narendra Kumar, and Ch Jaya Prakash. "Static and Dynamic Analysis of Carbon Nano Tube Cantilever for Nano Electro Mechanical Systems Based Applications." Journal of Computational and Theoretical Nanoscience 17, no. 5 (2020): 2151–56. http://dx.doi.org/10.1166/jctn.2020.8862.

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The cantilever is the most basic form of the MEMS and NEMS-based applications. It may include actuators and sensors in multiple domains for the detection of deflections due to change in mass and charge from atomic to sub-atomic levels. The main constraints in the real-time environment for sensing applications are good sensitivity and selectivity along with good response time and wide dynamic range. CNTs (Carbon Nano Tubes) possess excellent electrical characteristics with good mechanical strength like elasticity, flexibility, tensile strength and good thermal conductivity. These properties mak

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17

Kovaľ, Vladimír. "High aspect ratio lead zirconate titanate tube structures: I. Template assisted fabrication - vacuum infiltration method." Processing and Application of Ceramics 6, no. 1 (2012): 37–42. http://dx.doi.org/10.2298/pac1201037k.

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Polycrystalline Pb(Zr0.52Ti0.48 )O3 (PZT) microtubes are fabricated by a vacuum infiltration method. The method is based on repeated infiltration of precursor solution into macroporous silicon (Si) templates at a sub-atmospheric pressure. The pyrolyzed PZT tubes of a 2-?m outer diameter, extending to over 30 ?m in length were released from the template using a selective isotropic-pulsed XeF2 reactive ion etching of silicon. Free-standing microtubes, partially anchored at the bottom of the Si template, were then crystallized in pure oxygen atmosphere at 750 ?C for 2 min using a rapid thermal an

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18

Haub, Michael, Martin Bogner, Thomas Guenther, André Zimmermann, and Hermann Sandmaier. "Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling Accelerometer Based on PtC Tips by Focused Ion Beam 3D Nano-Patterning." Sensors 21, no. 11 (2021): 3795. http://dx.doi.org/10.3390/s21113795.

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Most accelerometers today are based on the capacitive principle. However, further miniaturization for micro integration of those sensors leads to a poorer signal-to-noise ratio due to a small total area of the capacitor plates. Thus, other transducer principles should be taken into account to develop smaller sensors. This paper presents the development and realization of a miniaturized accelerometer based on the tunneling effect, whereas its highly sensitive effect regarding the tunneling distance is used to detect small deflections in the range of sub-nm. The spring-mass-system is manufacture

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19

Vasiliev, A. A., A. S. Lipilin, A. M. Mozalev, et al. "Gas Sensors Based on Ceramic MEMS Structures Made of Anodic Alumina and Yttria Stabilized Zirconia Films." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2012, CICMT (2012): 000528–34. http://dx.doi.org/10.4071/cicmt-2012-wp33.

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The application of thin ceramic films for the fabrication of MEMS devices enables the extension of their working temperature range up to 600°C, a decrease in heating power consumption, and a very considerable decrease in production cost of sensors and actuators based on this technology. These advantages are very important for the application of gas sensors under harsh environmental conditions, in autonomous and wireless sensor networks. The methods of the fabrication of MEMS platforms for metal oxide semiconductor and thermocatalytic gas sensors, fast thermometers, and flowmeters based on yttr

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20

Lee, Sung-Chang, and Brian D. Strom. "Characterization of Thermally Actuated Pole Tip Protrusion for Head-Media Spacing Adjustment in Hard Disk Drives." Journal of Tribology 130, no. 2 (2008). http://dx.doi.org/10.1115/1.2842248.

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The effect of thermomechanically actuated pole tip protrusion on adhesive forces is characterized through model and experiment. The roughness of a thermomechanically actuated region is characterized by atomic force microscopy. Using the extracted roughness parameters and estimated apparent area associated with thermal actuation, the intermolecular forces at the head-disk interface (HDI) are calculated using the ISBL (improved sub-boundary lubrication) code. Both roughness and nominal area of contact are found to be significant factors determining adhesive forces. The adhesive forces for variou

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21

Goldberg, Kenneth A., and Kyle T. La Fleche. "Thickness dependence of piezo-bimorph adaptive mirror bending." Review of Scientific Instruments 94, no. 7 (2023). http://dx.doi.org/10.1063/5.0154575.

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A new generation of adaptive x-ray optics (AXO) is being installed on high-coherent-flux x-ray beamlines worldwide to correct and control the optical wavefront with sub-nm precision. These ultra-smooth mirrors achieve high reflectivities at glancing angles of incidence and can be hundreds of mm long. One type of adaptive x-ray mirror relies on piezoelectric ceramic strips which are segmented into channels and actuated to induce local, longitudinal bending, generating one-dimensional shape changes in the mirror substrate. A recently described mirror model uses a three-layer geometry with parall

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22

Chen, Sinuo, Zhiwei Shi, Xi Geng, Zijie Zhao, Zhen Chen, and Quanbing Sun. "Study of the transient flow structures generated by a pulsed nanosecond plasma actuator on a delta wing." Physics of Fluids, September 21, 2022. http://dx.doi.org/10.1063/5.0111858.

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The transient flow structures produced by a pulsed nanosecond plasma actuator and the mechanism by which they are generated are investigated experimentally and through simulations for the case of flow control on a non-slender delta wing. Phase-locked particle image velocimetry reveals a phenomenon in which, after each discharge pulse, two sub-vortices are generated in sequence and move along the shear layer regardless of the angle of attack, and this is confirmed by hot-wire anemometry. However, at high actuation frequencies ( F+ = fc/ U∞ {greater than or equal to} 6.435), this phenomenon of d

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23

Vyawahare, Saurabh, Suresh Sitaula, Sujitha Martin, Dvin Adalian, and Axel Scherer. "Combining Shape Memory Alloys and Microfluidic Chips on Printed Circuit boards." Journal of Medical Devices 2, no. 2 (2008). http://dx.doi.org/10.1115/1.2934387.

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Integrated multi-layer fluidic chips, with hundreds of elastomeric valves, are useful in immunoassays, protein crystallization, cell culture and several other applications. Although the devices are micro-scale, because valves are actuated pneumatically, each chip requires a relatively large pneumatic control system for operation. Fulfilling the great promise of microfluidics, for instance building throwaway, portable, massively parallel, point-of-care diagnostic systems is unlikely until there is a solution for actuating micro-valves electrically. We introduce a combination of materials—shape

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24

Wang, Xuefeng, and Chang Liu. "Development of Hybrid MEMS/FIB Processes and Applications of Three-pronged Active Nanotweezers For Manipulation of Nano Objects." MRS Proceedings 983 (2006). http://dx.doi.org/10.1557/proc-983-0983-ll08-09.

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AbstractWe report recent development of a three-probe micromachined nanomanipulator for manipulation and in-situ characterization of nanomaterials in scanning electron microscope (SEM). The nanomanipulator consists of three independent probes having thermal bimetallic actuators and nanoscopic end-effectors. Nanoscale end-effectors with sub-100-nm spacing are created using focused ion beam (FIB) milling to directly interface with nanoscopic objects (e.g., nanotubes, nanowires). Handling of individual carbon nanotubes (CNTs) was successfully realized with the nanomanipulator in an SEM.

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25

Di Bartolomeo, Marco, Davide Di Battista, and Roberto Cipollone. "Experimentally Based Methodology to Evaluate Fuel Saving and CO <sub>2</sub> Reduction of Electrical Engine Cooling Pump during Real Driving." SAE International Journal of Engines 16, no. 5 (2023). http://dx.doi.org/10.4271/03-16-05-0041.

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<div>Engine thermal management (ETM) is a promising technology that allows the reduction of harmful emissions and fuel consumption when the internal combustion engine (ICE) is started from a cold state. The key technology for ETM is the decoupling of the cooling pump from the crankshaft and the actuation of the pump independently. In this article, an electric engine cooling pump has been designed through a novel experimentally based procedure and operated on a vehicle equipped with an advanced turbocharged gasoline engine, particularly interesting for its hybridization potential. In the

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