Academic literature on the topic 'STM lithography'
Create a spot-on reference in APA, MLA, Chicago, Harvard, and other styles
Consult the lists of relevant articles, books, theses, conference reports, and other scholarly sources on the topic 'STM lithography.'
Next to every source in the list of references, there is an 'Add to bibliography' button. Press on it, and we will generate automatically the bibliographic reference to the chosen work in the citation style you need: APA, MLA, Harvard, Chicago, Vancouver, etc.
You can also download the full text of the academic publication as pdf and read online its abstract whenever available in the metadata.
Journal articles on the topic "STM lithography"
Dobrik, G., L. Tapasztó, P. Nemes-Incze, Ph Lambin, and L. P. Biró. "Crystallographically oriented high resolution lithography of graphene nanoribbons by STM lithography." physica status solidi (b) 247, no. 4 (January 15, 2010): 896–902. http://dx.doi.org/10.1002/pssb.200982953.
Full textMarrian, C. R. K., and E. A. Dobisz. "High-resolution lithography with a vacuum STM." Ultramicroscopy 42-44 (July 1992): 1309–16. http://dx.doi.org/10.1016/0304-3991(92)90440-u.
Full textZhang, L. B., J. X. Shi, Ju Long Yuan, Shi Ming Ji, and M. Chang. "The Advancement of SPM-Based Nanolithography." Materials Science Forum 471-472 (December 2004): 353–57. http://dx.doi.org/10.4028/www.scientific.net/msf.471-472.353.
Full textYang, Ye, and Wan Sheng Zhao. "Fabrication of the Nanoscale Flat-Bottomed and Lamellar Structures on HOPG Surface by STM-Based Electric Lithography." Key Engineering Materials 562-565 (July 2013): 45–51. http://dx.doi.org/10.4028/www.scientific.net/kem.562-565.45.
Full textKleineberg, U., A. Brechling, M. Sundermann, and U. Heinzmann. "STM Lithography in an Organic Self-Assembled Monolayer." Advanced Functional Materials 11, no. 3 (June 2001): 208–12. http://dx.doi.org/10.1002/1616-3028(200106)11:3<208::aid-adfm208>3.0.co;2-x.
Full textVetrone, J., and Y. W. Chung. "Changes in tip structure measured during STM lithography." Applied Surface Science 78, no. 3 (July 1994): 331–38. http://dx.doi.org/10.1016/0169-4332(94)90022-1.
Full textDobrik, Gergely, Levente Tapasztó, and László Biró. "Nanometer wide ribbons and triangles by STM lithography of graphene." Nanopages 7, no. 1 (June 2012): 1–7. http://dx.doi.org/10.1556/nano.2010.00001.
Full textTucker, J. R., and T. C. Shen. "Prospects for atomically ordered device structures based on STM lithography." Solid-State Electronics 42, no. 7-8 (July 1998): 1061–67. http://dx.doi.org/10.1016/s0038-1101(97)00302-x.
Full textKASU, Makoto, and Naoki KOBAYASHI. "Nanoscale Semiconductor Processes Using STM and AFM Lithographies. Nanometer-scale GaAs Selective Growth Using STM Lithography." Hyomen Kagaku 19, no. 11 (1998): 734–41. http://dx.doi.org/10.1380/jsssj.19.734.
Full textLeuschner, R., E. Günther, G. Falk, A. Hammerschmidt, K. Kragler, I. W. Rangelow, and J. Zimmermann. "Bilayer resist process for exposure with low-voltage electrons (STM-lithography)." Microelectronic Engineering 30, no. 1-4 (January 1996): 447–50. http://dx.doi.org/10.1016/0167-9317(95)00284-7.
Full textDissertations / Theses on the topic "STM lithography"
Ruess, Frank Joachim Physics Faculty of Science UNSW. "Atomically controlled device fabrication using STM." Awarded by:University of New South Wales. Physics, 2006. http://handle.unsw.edu.au/1959.4/24855.
Full textLakcher, Amine. "Nouvelles perspectives de métrologie dimensionnelle par imagerie de microscope électronique pour le contrôle de la variabilité des procédés de fabrication des circuits intégrés." Thesis, Université Grenoble Alpes (ComUE), 2018. http://www.theses.fr/2018GREAT052/document.
Full textIn advanced technological nodes as well as derived technologies, aggressive design rules are needed. This leads to a complexity of structures in the current integrated circuits. Such structures pose a significant challenge to chip manufacturing processes, in particular patterning steps of lithography and etching. In order to improve and optimize these structures, designers need to rely on the rules and knowledge that engineers have about their processes. These rules need to be fed by complex dimensional and structural information: corner rounding, tip to tip distances, line end shortening, etc. Metrology must evolve so that engineers are able to measure and quantify the dimensions of the most complex structures in order to assess the process variability. Currently the variability is mainly quantified using data from the inline monitoring of simple structures as they are the only ones to guarantee a robust and reproducible measurement. But, they can hardly be considered as representative of the process or the circuit. Using CD-SEM metrology to measure complex structures in a robust way is a technical challenge. The creation of measurement recipes is complex, time consuming and does not guarantee a stable measurement. However, a significant amount of information is contained in the SEM image. The analysis tools provided by the equipment manufacturers allow to extract the SEM contours of a structure present in the image. Thus, the CD-SEM takes images and the metrology part is performed offline to estimate the variability.This thesis offers engineers new possibilities of dimensional metrology in order to apply it for process control of complex structures. SEM contours are used as a source of information and used to generate new metrics
Konijn, Mark. "Multilevel Nanoengineering for Imprint Lithography." Thesis, University of Canterbury. Electrical and Computer Engineering, 2005. http://hdl.handle.net/10092/1071.
Full textPerring, Mathew Ian. "Functionalization and patterning of monolayers on silicon(111) and polydicyclopentadiene." Diss., University of Iowa, 2010. https://ir.uiowa.edu/etd/722.
Full textCosta, Juliano Nunes. "Projeto, fabricação e teste de uma microbomba sem valvulas." [s.n.], 2006. http://repositorio.unicamp.br/jspui/handle/REPOSIP/264091.
Full textDissertação (mestrado) - Universidade Estadual de Campinas, Faculdade de Engenharia Mecanica
Made available in DSpace on 2018-08-06T12:28:24Z (GMT). No. of bitstreams: 1 Costa_JulianoNunes_M.pdf: 1943364 bytes, checksum: 37bfdc87a8b3b47e435c8aadfe91806a (MD5) Previous issue date: 2006
Resumo: Hoje em dia, os microssistemas eletromecânicos (MEMS) constituem uma das áreas mais promissoras e de rápido crescimento entre as novas tecnologias. Uma área de destaque na utilização de MEMS é a microfluídica, onde diversos tipos de equipamentos miniaturizados são necessários. As microbombas têm um papel fundamental neste tipo de microdispositivos, devido a sua função de prover quantidades muito pequenas de fluidos de maneira segura e uniforme. O presente trabalho apresenta o processo de desenvolvimento de uma microbomba de diafragma oscilante sem válvulas e com atuação pneumática. Para se construir a microbomba sem válvulas, primeiramente foi feito um estudo sobre os elementos bocaljdifusor, que representam na microbomba o papel das válvulas. Com o objetivo de se analisar o comportamento da microbomba, foi feita uma simulação numérica utilizando-se a analogia por circuitos elétricos equivalentes, reconhecidamente um método simples e eficiente' de simulação de sistemas multidomínios, onde a grande maioria dos microdispositivos podem ser classificados. Por fim, foram projetados e montados protótipos da microbomba utilizahdo-se a tecnologia de microfabricação Litografia Profunda em polímeros flexográficos, onde se faz o uso de radiação ultravioleta. Tal opção se deve a que esta é uma tecnologia de baixo custo e de fácil utilização. Foi feito em seguida o levantamento de desempenho da microbomba, onde vários testes foram realizados para se conhecer a relação de pressão versus vazão
Abstract: Nowadays, Micro-Electromechanical systems (MEMS) constitute one of the most promising and fast expanding fields among the new technologies. Microfiuidic systems are a noteworthy sub-area of MEMS, demanding several types of microdevices to be developed. Micropumps have a fundamental role in thee systems, due to the need of supplying minimal amounts of fiuid in a guaranteed and uniform way. This work presents the process of development of. prototypes of aval veless micropump based upon reciprocating diaphragm and pneumatic actuation. To construct the valveless micropump, firstly it was made a study on the nozzlej diffuser elements, which represent in these micropumps the valve function. Aiming to analyse the behavior of the micropump, a numeric simulation was studied using electrical equivalent networks, known as a simple and eflicient method of simulation of multidomain systems, a classification most MEMS follow. Finally, it was designed and constructed prototypes of the micropumps using the Deep Lithography in fiexographics polymers micro-manufacture technology. This option is due to the low cost characteristic of this technology and also because it is very easy to learn how to produce the prototypes. ln the sequence, the nerformance of the micropump was studied through several experimental tests in order to know its pressure and fiow behavior
Mestrado
Mecanica dos Sólidos e Projeto Mecanico
Mestre em Engenharia Mecânica
Kim, Eun Jung. "Surface Microtopography Modulation of Biomaterials for Bone Tissue Engineering Applications." Cleveland State University / OhioLINK, 2010. http://rave.ohiolink.edu/etdc/view?acc_num=csu1273557062.
Full textCheng, Zhe Annie. "Biological multi-functionalization and surface nanopatterning of biomaterials." Thesis, Bordeaux 1, 2013. http://www.theses.fr/2013BOR15202/document.
Full textThe aim of biomaterials design is to create an artificial environment that mimics the in vivo extracellular matrix for optimized cell interactions. A precise synergy between the scaffolding material, bioactivity, and cell type must be maintained in an effective biomaterial. In this work, we present a technique of nanofabrication that creates chemically nanopatterned bioactive silicon surfaces for cell studies. Using nanoimprint lithography, RGD and mimetic BMP-2 peptides were covalently grafted onto silicon as nanodots of various dimensions, resulting in a nanodistribution of bioactivity. To study the effects of spatially distributed bioactivity on cell behavior, mesenchymal stem cells (MSCs) were cultured on these chemically modified surfaces, and their adhesion and differentiation were studied. MSCs are used in regenerative medicine due to their multipotent properties, and well-controlled biomaterial surface chemistries can be used to influence their fate. We observe that peptide nanodots induce differences in MSC behavior in terms of cytoskeletal organization, actin stress fiber arrangement, focal adhesion (FA) maturation, and MSC commitment in comparison with homogeneous control surfaces. In particular, FA area, distribution, and conformation were highly affected by the presence of peptide nanopatterns. Additionally, RGD and mimetic BMP-2 peptides influenced cellular behavior through different mechanisms that resulted in changes in cell spreading and FA maturation. These findings have remarkable implications that contribute to the understanding of cell-extracellular matrix interactions for clinical biomaterials applications
Scott, Kevin. "Fabrication and Characterization of Magnetic Nanostructures." Scholar Commons, 2014. https://scholarcommons.usf.edu/etd/5437.
Full textBlom, Tobias. "Fabrication and Applications of a Focused Ion Beam Based Nanocontact Platform for Electrical Characterization of Molecules and Particles." Doctoral thesis, Uppsala universitet, Experimentell fysik, 2010. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-122940.
Full textCheng, Zhe. "Biological multi-functionalization and surface nanopatterning of biomaterials." Phd thesis, Université Sciences et Technologies - Bordeaux I, 2013. http://tel.archives-ouvertes.fr/tel-01016695.
Full textBooks on the topic "STM lithography"
Sam, Francis. Sam Francis: Special proofs 1959-1990 : lithographs and screenprints from the estate of the artist. London: Alan Cristea Gallery in association with Jonathan Novak Contemporary Art, 2001.
Find full textBook chapters on the topic "STM lithography"
Koops, H. W. P., M. Rudolph, J. Kretz, and M. Weber. "Nano-Lithography in 3 Dimensions with Electron Beam Induced Deposition." In NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies, 87–93. Dordrecht: Springer Netherlands, 1994. http://dx.doi.org/10.1007/978-94-015-8261-2_10.
Full textMarrian, C. R. K., F. K. Perkins, S. L. Brandow, T. S. Koloski, E. A. Dobisz, and J. M. Calvert. "Low Voltage e-Beam Lithography with the Scanning Tunneling Microscope." In NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies, 175–88. Dordrecht: Springer Netherlands, 1994. http://dx.doi.org/10.1007/978-94-015-8261-2_18.
Full textHeyvaert, I., E. Osquiguil, C. Van Haesendonck, and Y. Bruynseraede. "Lithography of YBa2Cu3O7 Superconducting Thin Films with a Scanning Tunneling Microscope." In NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies, 207–12. Dordrecht: Springer Netherlands, 1994. http://dx.doi.org/10.1007/978-94-015-8261-2_21.
Full textLangheinrich, Wolfram, and Heinz Beneking. "Sub-10nm Electron Beam Lithography: -AIF3-Doped Lithium Fluoride as a Resist." In NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies, 53–66. Dordrecht: Springer Netherlands, 1994. http://dx.doi.org/10.1007/978-94-015-8261-2_5.
Full textIls, P., M. Michel, A. Forchel, I. Gyuro, P. Speier, and E. Zielinski. "Fabrication of Ultrasmall InGaAs/InP Nanostructures by High Voltage Electron Beam Lithography and Wet Chemical Etching." In NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies, 77–80. Dordrecht: Springer Netherlands, 1994. http://dx.doi.org/10.1007/978-94-015-8261-2_8.
Full textSchmidt, A., F. Faller, and A. Forchel. "Patterning of InGaAs/GaAs Quantum Dots Using E-Beam Lithography and Selective Removal of the Top Barrier." In NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies, 73–76. Dordrecht: Springer Netherlands, 1994. http://dx.doi.org/10.1007/978-94-015-8261-2_7.
Full textStockman, L., C. Haesendonck, G. Neuttiens, and Y. Bruynseraede. "SUB-20 nm Lithographic Patterning with the STM." In NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies, 197–205. Dordrecht: Springer Netherlands, 1994. http://dx.doi.org/10.1007/978-94-015-8261-2_20.
Full textLi, Ning, Siming Guo, and Michael A. Sutton. "Recent Progress in E-Beam Lithography for SEM Patterning." In MEMS and Nanotechnology, Volume 2, 163–66. New York, NY: Springer New York, 2011. http://dx.doi.org/10.1007/978-1-4419-8825-6_23.
Full textCheng, Z. A., O. F. Zouani, K. Glinel, A. M. Jonas, and M. C. Durrieu. "Bioactive Nanoimprint Lithography: A Study of Human Mesenchymal Stem Cell Behavior and Fate." In IFMBE Proceedings, 1817–20. Cham: Springer International Publishing, 2014. http://dx.doi.org/10.1007/978-3-319-00846-2_448.
Full textKrishnan, Kannan M. "Scanning Probe Microscopy." In Principles of Materials Characterization and Metrology, 745–802. Oxford University Press, 2021. http://dx.doi.org/10.1093/oso/9780198830252.003.0011.
Full textConference papers on the topic "STM lithography"
Marrian, C. R. K., E. A. Dobisz, and R. J. Colton. "Lithography with a Vacuum STM." In Scanned probe microscopy. AIP, 1991. http://dx.doi.org/10.1063/1.41387.
Full textLi, Nan, Tatsuo Yoshinobu, and Hiroshi Iwasaki. "STM Nano-Lithography with SiO2 Mask." In 1998 International Conference on Solid State Devices and Materials. The Japan Society of Applied Physics, 1998. http://dx.doi.org/10.7567/ssdm.1998.c-2-3.
Full textMcCord, Mark A., and Roger Fabian W. Pease. "Principles and techniques of STM lithography." In SPIE Institutes for Advanced Optical Technologies 10, edited by Christie R. K. Marrian. SPIE, 1993. http://dx.doi.org/10.1117/12.183194.
Full textChang, T. H. Philip, Lawrence P. Muray, Urs Staufer, Mark A. McCord, and Dieter P. Kern. "Arrayed lithography using STM-based microcolumns." In SPIE Institutes for Advanced Optical Technologies 10, edited by Christie R. K. Marrian. SPIE, 1993. http://dx.doi.org/10.1117/12.183200.
Full textMarrian, Christie R., Elizabeth A. Dobisz, and John A. Dagata. "Low voltage E-beam lithography with the STM." In SPIE Institutes for Advanced Optical Technologies 10, edited by Christie R. K. Marrian. SPIE, 1993. http://dx.doi.org/10.1117/12.183196.
Full textSob, Wilder, Atalar, and Quate. "Fabrication Of 100 nm pMOSFETS With Hybrid AFW / STM Lithography." In Symposium on VLSI Technology. IEEE, 1997. http://dx.doi.org/10.1109/vlsit.1997.623732.
Full textLott, Travis, and Russell J. Elias. "Sub-nanometer CD- SEM matching." In Advanced Lithography, edited by Chas N. Archie. SPIE, 2007. http://dx.doi.org/10.1117/12.712213.
Full textBunday, Benjamin, John Allgair, Bryan J. Rice, Jeff Byers, Yohanan Avitan, Ram Peltinov, Maayan Bar-zvi, Ofer Adan, John Swyers, and Roni Z. Shneck. "SEM metrology for advanced lithographies." In Advanced Lithography, edited by Chas N. Archie. SPIE, 2007. http://dx.doi.org/10.1117/12.714203.
Full textLawson, Richard A., and Clifford L. Henderson. "Investigating SEM metrology effects using a detailed SEM simulation and stochastic resist model." In SPIE Advanced Lithography, edited by Jason P. Cain and Martha I. Sanchez. SPIE, 2015. http://dx.doi.org/10.1117/12.2086051.
Full textLevitov, F., A. Karabekov, G. Eytan, and G. Golan. "Charging measurement using SEM embedded energy filter." In Advanced Lithography, edited by Chas N. Archie. SPIE, 2007. http://dx.doi.org/10.1117/12.711747.
Full text