Academic literature on the topic 'Spin coating'
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Journal articles on the topic "Spin coating"
Kelso, Meagan V., Naveen K. Mahenderkar, Qingzhi Chen, John Z. Tubbesing, and Jay A. Switzer. "Spin coating epitaxial films." Science 364, no. 6436 (April 12, 2019): 166–69. http://dx.doi.org/10.1126/science.aaw6184.
Full textShen, Shih-Jyun, Demei Lee, Yu-Chen Wu, and Shih-Jung Liu. "Binary Self-Assembly of Nanocolloidal Arrays using Concurrent and Sequential Spin Coating Techniques." Materials 14, no. 2 (January 7, 2021): 274. http://dx.doi.org/10.3390/ma14020274.
Full textShen, Shih-Jyun, Demei Lee, Yu-Chen Wu, and Shih-Jung Liu. "Binary Self-Assembly of Nanocolloidal Arrays using Concurrent and Sequential Spin Coating Techniques." Materials 14, no. 2 (January 7, 2021): 274. http://dx.doi.org/10.3390/ma14020274.
Full textPowojska, Anna, Arkadiusz Mystkowski, Edison Gundabattini, and Joanna Mystkowska. "Spin-Coating Fabrication Method of PDMS/NdFeB Composites Using Chitosan/PCL Coating." Materials 17, no. 9 (April 24, 2024): 1973. http://dx.doi.org/10.3390/ma17091973.
Full textAdamson, Steven J., James Klocke, and Gareth De Sanctis. "A Review of Wafer Coating Methods for 3D Packaging." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2010, DPC (January 1, 2010): 002153–88. http://dx.doi.org/10.4071/2010dpc-tha16.
Full textVillarreal, Iván, Miguel Aldás, Victor Hugo Guerrero-Barragan, Nelly María Rosas-Laverde, and Alexis Debut. "CaO stabilized ZrO2 coating intended to reduce corrosion on steel and aluminum substrates." Superficies y Vacío 30, no. 2 (June 15, 2017): 14–20. http://dx.doi.org/10.47566/2017_syv30_1-020014.
Full textKarel, M. F. A., T. P. Lemmens, B. M. E. Tullemans, S. J. H. Wielders, E. Gubbins, D. van Beurden, S. van Rijt, and J. M. E. M. Cosemans. "Characterization of Atherosclerotic Plaque Coating for Thrombosis Microfluidics Assays." Cellular and Molecular Bioengineering 15, no. 1 (October 27, 2021): 55–65. http://dx.doi.org/10.1007/s12195-021-00713-9.
Full textXiong, Chao, Min Gao, and Wei Gao. "Cu2ZnSnS4 (CZTS) thin films prepared by sol–gel spin-coating technique." International Journal of Modern Physics B 34, no. 01n03 (December 16, 2019): 2040019. http://dx.doi.org/10.1142/s0217979220400196.
Full textRatnawulan, Sisi Gusti Putri, Dian Septiana, Suchi Ramadhani Putri, and Ahmad Fauzi. "The Effect of SiMn/PS Composition on Hydrophobic Properties of Nanocomposite Thin Layer." Journal of Physics: Conference Series 2309, no. 1 (July 1, 2022): 012019. http://dx.doi.org/10.1088/1742-6596/2309/1/012019.
Full textNaghdi, Samira, and Vesna Mišković-Stanković. "Review—A Review of the Corrosion Behaviour of Graphene Coatings on Metal Surfaces Obtained by Chemical Vapour Deposition." Journal of The Electrochemical Society 169, no. 2 (February 1, 2022): 021505. http://dx.doi.org/10.1149/1945-7111/ac53cb.
Full textDissertations / Theses on the topic "Spin coating"
Carson, Emma. "Spin coating of passive electroactive ceramic devices." Thesis, University of Ulster, 2001. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.369951.
Full textHaas, Dylan. "Predicting the Uniformity of Two-Component, Spin Deposited Films." Diss., The University of Arizona, 2006. http://hdl.handle.net/10150/195952.
Full textHan, Sangjun 1972. "Optimization of process variables in extrusion-spin coating." Thesis, Massachusetts Institute of Technology, 1997. http://hdl.handle.net/1721.1/43576.
Full textLombe, Mubanga. "Spin coating of Newtonian and non-Newtonian fluids." Doctoral thesis, University of Cape Town, 2006. http://hdl.handle.net/11427/4904.
Full textDerksen, James Stephen. "A new coating method for semiconductor lithography : fluid layer overlap in extrusion-spin coating." Thesis, Massachusetts Institute of Technology, 1997. http://hdl.handle.net/1721.1/43575.
Full textGaneshamurugan, Subramaniam. "Synthesis and evaluation of novel buffer/hole-injecting oligo(9-aminoanthracene)(s) in aluminium quinolate organic electroluminescent devices (OELDs)." Thesis, London South Bank University, 2002. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.271761.
Full textHan, Sangjun 1972. "Modeling and analysis of extrusion-spin coating : an efficient and deterministic photoresist coating method in microlithography." Thesis, Massachusetts Institute of Technology, 2001. http://hdl.handle.net/1721.1/8694.
Full textIncludes bibliographical references (p. 173-178).
In the fabrication of microelectronic chips, microlithography is used to transfer a pattern of circuit geometry from mask to semiconductor wafer. An important step in this process is the deposition of a thin and uniform layer of photoresist (often called resist) on which the lithographic image is exposed. Typical photoresist layers are less than 1 pum thick with a variation of 5 [angstroms] for advanced chips. Spin coating is the prevalent coating method to produce the required thickness and uniformity, but it typically wastes over 90% of the photoresist applied. A more efficient method needs to be developed for two reasons. The first is that 80% of the photoresist is an environmentally hazardous solvent. The second is the cost increase of photoresist. As the target of semiconductor industry moves toward the fabrication of smaller devices with larger capacity, the trend in photoresist shifts from i-line to deep UV resists, which allow for narrower linewidths on a chip. The price of this new resist is four to ten times higher than that of i-line resists. Reducing photoresist waste is desirable for both environmental and economical reasons. The current spin coating method has another problem in addition to low coating efficiency. Results from spin coating are unpredictable. The relationships between the inputs (process variables) and outputs (coating thickness and uniformity) can only be obtained by trial and error. Thus, a number of experiments have to be conducted to attain a certain coating thickness and uniformity. A more effective method would yield the predictable coating thicknesses and uniformities for given inputs.
(cont.) Both the cost and time required for process development can be reduced this way. Extrusion-spin coating achieves high coating efficiency with predictable coating results. This new method uses an efficient extrusion coating technique to apply a thin film of resist to a wafer before spinning. spinning. This initial layer of photoresist eliminates the spreading phase, the most inefficient step of spin coating. The initial layer also provides the existing spin coating models with determined initial conditions and thereby renders its results predictable. A prototype extrusion-spin coater has been designed and fabricated. Initial experiments have been conducted to determine, test and optimize process variables. One variable, the solvent concentration degree in the environment, is most critical. As the initial coating layer deposited by extrusion coating is only 20-40 [mu]m, solvent contained in the photoresist evaporates rapidly at the absence of a solvent concentration in the environment. Evaporation causes the viscosity of photoresist to be nonuniform over the wafer. The outcome of the spin coating process becomes less uniform. Experimental results are compared with Emslie et al.'s predictive models of spin coating. A solvent concentration of 80% or higher in the environment was found to be necessary to attain a predictable coating thickness with 5 [angstrom] uniformity. With optimized process variables, mean coating thickness matches theoretical predictions with a variation of 0.01 [mu]m. Defect-free coating results with coating efficiencies as high as 40% were achieved.
by Sangjun Han.
Ph.D.
Hoggan, Erik Nebeker. "Spin Coating and Photolithography Using Liquid and Supercritical Carbon Dioxide." NCSU, 2002. http://www.lib.ncsu.edu/theses/available/etd-09232002-125551/.
Full textFARIAS, Bruno Veríssimo de Miranda. "Preparação por sol-gel de filmes granulados de CoCr2O4." Universidade Federal de Pernambuco, 2015. https://repositorio.ufpe.br/handle/123456789/20045.
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Neste trabalho foi feito um estudo das propriedades estruturais e magnéticas de filmes granulares de cromita de cobalto sobre substrato de silicio. Aqui os filmes foram fabricados a partir do método químico sol‐gel, técnica de centrifugação spincoating e Tratamento térmico apropriado. Toda família de filmes foi fabricada sobre substrato de silício (100) e submetida a tratamento termico. A diferença de um filme para outro esta na quantidade de material depositado. Isto possibilitou o estudo das propriedades supracitadas em função da quantidade de material depositado para fabricação do filme. A cristalinidade de todas as amostras obtidas foi confirmada por difração de raios-X (XRD). A microscopia eletrônica de varredura (MEV) mostrou filmes granulares com boa homogeneidade e que a espessura de todas as amostras aumenta com a quantidade de gotas depositadas durante o spin‐coating. As propriedades magnéticas foram medidas usando magnetometria de amostra vibrante (VSM). O campo aplicado durante a medicao foi orientado paralelo ao plano do filme e observou‐se uma alta coercividade e que esta diminui quase linearmente com o aumento de temperatura.
In this work we have made a study of the structural and magnetic properties of cobalt chromite granular films over silicon substrate. Here the films were fabricated by the chemical method sol‐gel, spin coating technique and ppropriate heat treatment. The entire Family was deposited over silicon substrate (100) and submitted to heat treatment. The difference between a film to another is the quantity of deposited Material. This allowed the study of the above properties as a function of the deposited material. The crystallinity of all samples obtained was confirmed by X‐ray diffraction (XRD). The scanning electron microscopy (SEM) showed granular films with good homogeneity and the thickness of all samples increases when the number of drops increases during spin‐coating. The magnetic properties were measured using vibrating sample magnetometry (VSM). The applied field during the measurement was Oriented parallel to the film plane and observed a high coercivity and that decreases pproximately linearly with increasing temperature.
Van, fraeyenhoven Paulien. "Comparing morphology in dip-coated and spin-coated polyfluorene:fullerene films." Thesis, Karlstads universitet, Institutionen för ingenjörs- och kemivetenskaper, 2016. http://urn.kb.se/resolve?urn=urn:nbn:se:kau:diva-42576.
Full textBooks on the topic "Spin coating"
Carson, Emma J. Spin coating of passive electroactive ceramic devices. [s.l: The Author], 2001.
Find full textFong, Chee Yong. Sol-gel spin coating growth of gallium nitride thin films: A simple, safe, and cheap approach. Pulau Pinang: Penerbit Universiti Sains Malaysia, 2018.
Find full textSICMAC, Summer School on Layered Functional Gradient Ceramics and Thermal Barrier Coatings (2006 Mahón Spain). Layered, functional gradient ceramics, and thermal barrier coatings: Design, fabrication and applications : proceedings of the SICMAC summer school on layered, functional gradient ceramics, and thermal barrier coatings held in Maó, Menorca Island (Spain) on June 11-16, 2006. Zuerich: Trans Tech Publications Ltd., 2007.
Find full textAlicante), European Topical Conference on Hard Coatings (1st 1993. Proceedings of the 1st European Topical Conference on Hard Coatings and the II Iberian Vacuum Meeting, 12-15 July 1993, Alicante, Spain. Oxford: Pergamon Press, 1994.
Find full textKarakterisasi film poly-paraphenilene terethalamide (PPTA) hasil sintesis metoda spin coating: Laporan penelitian. Bandung: Lembaga Penelitian, Universitas Padjadjaran, 2000.
Find full textPivec, Tanja, Tamilselvan Mohan, Rupert Kargl, Manja Kurečič, and Karin Stana Kleinschek. Design, Characterisation and Applications of Cellulose-Based Thin Films, Nanofibers and 3D Printed Structures: A Laboratory Manual. University of Maribor Press, 2021. http://dx.doi.org/10.18690/978-961-286-432-3.
Full textHultaker, Annette. Transparent Conductive Tin Doped Indium Oxide: Characterization of Thin Films Made by Sputter Deposition With Silver Additive & by Spin Coating from Nanoparticle ... the Faculty of Science & Technology, 37). Uppsala Universitet, 2002.
Find full textSankari, Hassan M. Application of the NMR spin-lattice relaxation method to the structure of pigment systems. 1994.
Find full textOptonet. Advances in Optical Thin Films II: 13-15 September 2005, Jena, Germany (SPIE Conference Proceedings). SPIE-International Society for Optical Engine, 2005.
Find full text(Editor), Michael Ray Jacobson, Society of Photo-Optical Instrumentation Engineers (Corporate Author), and New Mexico State University Applied Optics Laboratory (Corporate Author), eds. Modeling of Optical Thin Films: 20-21 August 1987, San Diego, California (Proceedings of Spie--the International Society for Optical Engineering, V. 821). Society of Photo Optical, 1988.
Find full textBook chapters on the topic "Spin coating"
Larson, Ronald G., and Timothy J. Rehg. "Spin Coating." In Liquid Film Coating, 709–34. Dordrecht: Springer Netherlands, 1997. http://dx.doi.org/10.1007/978-94-011-5342-3_20.
Full textLau, W. J. "Spin Coating." In Encyclopedia of Membranes, 1808–10. Berlin, Heidelberg: Springer Berlin Heidelberg, 2016. http://dx.doi.org/10.1007/978-3-662-44324-8_1727.
Full textWeik, Martin H. "spin coating." In Computer Science and Communications Dictionary, 1639. Boston, MA: Springer US, 2000. http://dx.doi.org/10.1007/1-4020-0613-6_17950.
Full textLau, W. J. "Spin Coating." In Encyclopedia of Membranes, 1–3. Berlin, Heidelberg: Springer Berlin Heidelberg, 2014. http://dx.doi.org/10.1007/978-3-642-40872-4_1727-1.
Full textBirnie, D. P. "Spin Coating Technique." In Sol-Gel Technologies for Glass Producers and Users, 49–55. Boston, MA: Springer US, 2004. http://dx.doi.org/10.1007/978-0-387-88953-5_4.
Full textWeill, A. "The Spin Coating Process Mechanism." In Springer Proceedings in Physics, 51–58. Berlin, Heidelberg: Springer Berlin Heidelberg, 1986. http://dx.doi.org/10.1007/978-3-642-71446-7_4.
Full textBirnie, Dunbar P. "Spin Coating: Art and Science." In Chemical Solution Deposition of Functional Oxide Thin Films, 263–74. Vienna: Springer Vienna, 2013. http://dx.doi.org/10.1007/978-3-211-99311-8_11.
Full textLau, W. J. "Spin Coating Interfacial Polymerization (IP) Techniques." In Encyclopedia of Membranes, 1810–12. Berlin, Heidelberg: Springer Berlin Heidelberg, 2016. http://dx.doi.org/10.1007/978-3-662-44324-8_1728.
Full textLau, W. J. "Spin Coating Interfacial Polymerization (IP) Techniques." In Encyclopedia of Membranes, 1–3. Berlin, Heidelberg: Springer Berlin Heidelberg, 2014. http://dx.doi.org/10.1007/978-3-642-40872-4_1728-1.
Full textKozuka, Hiromiutsu. "Radiative Striations in Spin-Coating Films." In Handbook of Sol-Gel Science and Technology, 1–19. Cham: Springer International Publishing, 2016. http://dx.doi.org/10.1007/978-3-319-19454-7_148-1.
Full textConference papers on the topic "Spin coating"
Stillwagon, Larry E., Ronald G. Larson, and Gary N. Taylor. "Spin Coating And Planarization." In Microlithography Conference, edited by Murrae J. Bowden. SPIE, 1987. http://dx.doi.org/10.1117/12.940325.
Full textLammers, J. H., M. N. M. Beerens, and S. B. G. M. O'Brien. "EFFECTS OF EVAPORATION DURING SPIN-COATING." In Proceedings of the First European Coating Symposium. WORLD SCIENTIFIC, 1996. http://dx.doi.org/10.1142/9789814503914_0033.
Full textKim, Sang-Kon, Ji-Yong Yoo, and Hye-Keun Oh. "Resist distribution effect of spin coating." In SPIE's 27th Annual International Symposium on Microlithography, edited by Anthony Yen. SPIE, 2002. http://dx.doi.org/10.1117/12.474627.
Full textCharpin, J. P. F., Theodore E. Simos, George Psihoyios, and Ch Tsitouras. "Spin Coating over a Varying Geometry." In NUMERICAL ANALYSIS AND APPLIED MATHEMATICS: International Conference on Numerical Analysis and Applied Mathematics 2009: Volume 1 and Volume 2. AIP, 2009. http://dx.doi.org/10.1063/1.3241371.
Full textKaddachi, Z., M. Belhi, M. Ben Karoui, and R. Gharbi. "Design and development of spin coating system." In 2016 17th International Conference on Sciences and Techniques of Automatic Control and Computer Engineering (STA). IEEE, 2016. http://dx.doi.org/10.1109/sta.2016.7952005.
Full textPratt, L. D. "Photoresist aerosol particle formation during spin coating." In Microlithography '90, 4-9 Mar, San Jose, edited by Michael P. C. Watts. SPIE, 1990. http://dx.doi.org/10.1117/12.20111.
Full textHonda, Hirotada. "Stochastic Control in the Spin Coating Systems." In 2006 SICE-ICASE International Joint Conference. IEEE, 2006. http://dx.doi.org/10.1109/sice.2006.315681.
Full textWimmers, O. J. "Spin coating of TiO2 and SiO2 layers on curved CRT screens to form antireflex coatings." In Optical Interference Coatings. Washington, D.C.: Optica Publishing Group, 1992. http://dx.doi.org/10.1364/oic.1992.otua10.
Full textÖzütok, F., S. Demiri, and E. Özbek. "Electrochromic NiO thin films prepared by spin coating." In TURKISH PHYSICAL SOCIETY 32ND INTERNATIONAL PHYSICS CONGRESS (TPS32). Author(s), 2017. http://dx.doi.org/10.1063/1.4976389.
Full textAnsari, A. A., and S. D. Sartale. "Spin coating of Ag nanoparticles: Effect of reduction." In SOLID STATE PHYSICS: Proceedings of the 58th DAE Solid State Physics Symposium 2013. AIP Publishing LLC, 2014. http://dx.doi.org/10.1063/1.4872596.
Full textReports on the topic "Spin coating"
Rehg, T. J., and B. G. Higgins. Analysis of solvent evaporation effects in spin coating of colloidal oxide suspensions. Office of Scientific and Technical Information (OSTI), July 1991. http://dx.doi.org/10.2172/5996455.
Full textRehg, T., and B. Higgins. Analysis of solvent evaporation effects in spin coating of colloidal oxide suspensions. Office of Scientific and Technical Information (OSTI), September 1989. http://dx.doi.org/10.2172/5302714.
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