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Journal articles on the topic 'Small force metrology'
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1
HU, GANG, LE SONG, FENG MENG, WEI ZHANG, ZHIMIN ZHANG, YUE ZHANG, and YELONG ZHENG. "RESEARCH AND DEVELOPMENT OF SMALL FORCE STANDARDS AT NIM." International Journal of Modern Physics: Conference Series 24 (January 2013): 1360020. http://dx.doi.org/10.1142/s2010194513600203.
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With the development and industrialization of micro- and nano- technology, small force measurements are widely applied in many fields such as advanced materials, bio-technology, aerospace and so on. For realizing traceable small forces and founding small force metrology hierarchy in China, NIM has launched a research project on small force metrology in 2011. 2 methods for small force realization at the scale of nano-Newton to micro-Newton are applied: electrical force based method and mass based method. The initial prototype of small force standard, which is based on the electrostatic force realization and adopts a coaxial cylindrical capacitor, has been developed and experimented. 2 kinds of micro force transmission mechanism are applied to the prototype: a parallelogram mechanism with 4 flexure hinges, and a lever-type force measurement system based on an elastic torsion bar. The structure and key units of 2 schemes are described in detail, the experiment results are demonstrated. The system stiffness of torsion bar scheme is smaller than that of flexure hinges scheme. In addition, structure of the initial prototype will be improved, and the environment conditions will be controlled strictly in our further experiments to minimize the creep of our system.
2
Cameron, Robert P., Duncan McArthur, and Alison M. Yao. "Strong chiral optical force for small chiral molecules based on electric-dipole interactions, inspired by the asymmetrical hydrozoan Velella velella." New Journal of Physics 25, no. 8 (August 1, 2023): 083006. http://dx.doi.org/10.1088/1367-2630/ace7ee.
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Abstract Drawing inspiration from a remarkable chiral force found in nature, we show that a static electric field combined with an optical lin ⊥ lin polarization standing wave can exert a chiral optical force on a small chiral molecule that is several orders of magnitude stronger than other chiral optical forces proposed to date, being based on leading electric-dipole interactions rather than relying on weak magnetic-dipole and electric-quadrupole interactions. Our chiral optical force applies to most small chiral molecules, including isotopically chiral molecules, and does not require a specific energy-level structure. Potential applications range from chiral molecular matter-wave interferometry for precision metrology and tests of fundamental physics to the resolution of enantiomers for use in chemistry and biology.
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Pratt, Jon R., Douglas T. Smith, David B. Newell, John A. Kramar, and Eric Whitenton. "Progress toward Système International d'Unités traceable force metrology for nanomechanics." Journal of Materials Research 19, no. 1 (January 2004): 366–79. http://dx.doi.org/10.1557/jmr.2004.19.1.366.
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Recent experiments with the National Institute of Standards and Technology (NIST) Electrostatic Force Balance (EFB) have achieved agreement between an electrostatic force and a gravitational force of 10−5 N to within a few hundred pN/μN. This result suggests that a force derived from measurements of length, capacitance, and voltage provides a viable small force standard consistent with the Système International d’Unités. In this paper, we have measured the force sensitivity of a piezoresistive microcantilever by directly probing the NIST EFB. These measurements were linear and repeatable at a relative standard uncertainty of 0.8%. We then used the calibrated cantilever as a secondary force standard to transfer the unit of force to an optical lever–based sensor mounted in an atomic force microscope. This experiment was perhaps the first ever force calibration of an atomic force microscope to preserve an unbroken traceability chain to appropriate national standards. We estimate the relative standard uncertainty of the force sensitivity at 5%, but caution that a simple model of the contact mechanics suggests errors may arise due to friction.
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NIKOLAEV, M. YU, E. V. NIKOLAEVA, and A. K. NIKITIN. "PROCESS MODELING AND METROLOGY IN ELECTRICAL IMPULSE SYSTEMS." Actual Issues Of Energy 4, no. 1 (2022): 070–74. http://dx.doi.org/10.25206/2686-6935-2022-4-1-70-74.
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Electromagnetic force pulses are forces of mutual repulsion between the inductor and the anchor. Under their action, the anchor is shifted towards the cleaned surface of the affected object and elastic vibrations are transmitted to it. In electro-pulse interaction systems, the duration of the energy accumulation process, and then its release in extremely small time intervals, allows to obtain the maximum possible values of mechanical impulse action on the surface of the affected object. The maximum operating voltage on a capacitive energy storage device can reach 5 kV or higher. Electro-pulse interaction systems are shock-type devices. Compared with other devices of similar purpose (vibrators, electromagnetic or pneumatic shock mechanisms), they have no competition in terms of cleaning efficiency.
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Pinto, Fabrizio. "Nanomechanical sensing of gravitational wave-induced Casimir force perturbations." International Journal of Modern Physics D 23, no. 12 (October 2014): 1442001. http://dx.doi.org/10.1142/s0218271814420012.
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It is shown by means of the optical medium analogy that the static Casimir force between two conducting plates is modulated by gravitational waves. The magnitude of the resulting force changes within the range of already existing small force metrology. It is suggested to enhance the effects on a Casimir force oscillator by mechanical parametric amplification driven by periodic illumination of interacting semiconducting boundaries. This represents a novel opportunity for the ground-based laboratory detection of gravitational waves on the nanoscale.
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Dai, Gao Liang, F. Pohlenz, H. U. Danzebrink, and L. Koenders. "Dimensional Measurements for Micro- and Nanotechnology." Key Engineering Materials 381-382 (June 2008): 7–10. http://dx.doi.org/10.4028/www.scientific.net/kem.381-382.7.
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Metrology plays an important role in the development and commercialisation of micro and nanotechnology. For calibrating versatile micro- and nanoscale standards, a dimensional metrology instrument coupled with multi sensor heads including atomic force microscope (AFM), tactile stylus, laser focus sensor and assembled cantilever probes (ACPs) has been developed. Two kinds of ACPs are highlighted in the paper. One is fabricated by gluing a vertical AFM cantilever to a horizontal AFM cantilever using micro assembling techniques. It is applicable for direct and non-destructive measurements of sidewall surfaces. The other is an ACP ball probe designed for true 3D measurements of micro structures. It is realised by gluing a tungsten wire with a probing sphere ball, 40 ... 120 µm in diameter, to a horizontal AFM cantilever. The ACP ball probe has advantages such as small probing forces (<1µN) and high probing sensitivity. Some typical calibrations on micro and nano structures such as step height, grating and sphere calotte artefact are introduced.
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Nikolaev, M. Yu, E. V. Nikolaeva, N. Yu Khokriakov, A. A. Kovalevsky, and К. I. Stolyarchuk. "SIMULATION OF ELECTRIC PULSES, THEIR PRACTICAL APPLICATION AND ISSUES OF METROLOGY." ACTUAL ISSUES OF ENERGY 5, no. 1 (2023): 67–75. http://dx.doi.org/10.25206/2686-6935-2023-5-1-67-75.
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electromagnetic force pulses are forces of mutual repulsion between the anchor and the inductor. Under their action, the anchor is shifted towards the cleaned surface of the affected object and elastic vibrations are transmitted to it. In electro-pulse interaction systems, the duration of the energy accumulation process, and then its release in extremely small time intervals, allows to obtain the maximum possible values of mechanical impulse action on the surface of the affected object. The maximum operating voltage on a capacitive energy storage is capable of reaching 5 kV and higher. Electro-pulse interaction systems are shock-type devices. Compared with other devices of similar purpose (vibrators, electromagnetic or pneumatic shock mechanisms), they have no competition in terms of cleaning efficiency.
8
Shaw, Gordon A. "Current state of the art in small mass and force metrology within the International System of Units." Measurement Science and Technology 29, no. 7 (May 22, 2018): 072001. http://dx.doi.org/10.1088/1361-6501/aaac51.
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Mooney, C. B., J. T. Thornton, and P. E. Russell. "Effects of deformation of electron-beam-grown microtips on measurements taken with the Atomic-Force Microscope." Proceedings, annual meeting, Electron Microscopy Society of America 52 (1994): 1072–73. http://dx.doi.org/10.1017/s0424820100173091.
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When imaging with an Atomic-Force Microscope (AFM), the image resolution is a complex function of the relative tip and sample geometries. When imaging or measuring high aspect ratio features, sharp and slender tips offer the possibility of probing down into extremely small topographical features. The most commonly used contact mode AFM tips are thin film cantilevers of Si3N4 with an integrated pyramidal structure used as the tip. It has been shown that microtips, which are fabricated by electron beam induced growth of carbonaceous material on the apex of the pyramid, can reduce the artifacts associated with integrated pyramidal AFM tips. A SEM micrograph of a microtip grown on the apex of an integrated pyramid is shown in Figure 1. Use of grown microtips in metrology demands an understanding of the dynamics of microtip deformation while scanning.
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ZHANG, ZHIMIN, YUE ZHANG, TAO LI, and HONGLEI JI. "THE DESIGN OF 1 N•M TORQUE STANDARD MACHINE AT NIM." International Journal of Modern Physics: Conference Series 24 (January 2013): 1360024. http://dx.doi.org/10.1142/s2010194513600240.
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A 1 N•m torque standard machine has been designed and developed at National Institute of Metrology (NIM) since 2011. The torque standard machine adopts the moment arm-deadweight type, the air bearing with low friction is adopted to support the moment-arm at the fulcrum, the invar with the low expansion coefficient is used as the material of the moment-arm, the weight suspension part and weight loading system are specially designed to ensure the applied force by small weights accurately and reliably. This paper introduces the mechanical structures of the machine, the electrical control system is described. 1 N•m torque standard machine is capable of realizing the torque from 1 mN•m to 1 N•m both in clockwise and anti-clockwise directions.
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Jiang, Jile, Gang Hu, and Zhimin Zhang. "Realization of an SI traceable small force of 10 to 100 micro-Newton using an electrostatic measuring system." ACTA IMEKO 6, no. 2 (July 21, 2017): 4. http://dx.doi.org/10.21014/acta_imeko.v6i2.336.
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<p><span lang="EN-US">A small force of (10</span><span lang="EN-US">–</span><span lang="EN-US">100) micro-Newton traceable to the International System of Units (SI) has been realized using</span><span lang="EN-US"> an</span><span lang="EN-US"> electrostatic </span><span lang="EN-US">measuring system</span><span lang="EN-US"> at the National Institute of Metrology, China. The key component of the measuring system is a pair of coaxial cylindrical electrodes. The inner electrode is suspended with the support of a self-balanced flexure hinge, while the outer electrode is attached to a piezoelectric moving stage. The stiffness of the self-balanced flexure hinge was also designed so as to be both sufficiently stable and sensitive to the small force applied to the inner electrode. Two sets of cameras were </span><span lang="EN-US">used</span><span lang="EN-US"> to capture the shape of the electrodes and to obtain a better coaxial arrangement of the inner and outer electrodes. With the help of a capacitance bridge and a piezoelectric moving stage, the relative standard uncertainty of the capacitance gradient does not exceed 0.04 %. Associated with a laser interferometer and a DC voltage power source, the feedback system that controls the position of the inner electrode is responsible for the generation of a force of 10–100 micro-Newton. The standard uncertainty associated with the force of 100 micro-Newton does not exceed 0.1 %.</span></p>
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Suh, Hyo Seon, Xuanxuan Chen, Paulina A. Rincon-Delgadillo, Zhang Jiang, Joseph Strzalka, Jin Wang, Wei Chen, et al. "Characterization of the shape and line-edge roughness of polymer gratings with grazing incidence small-angle X-ray scattering and atomic force microscopy." Journal of Applied Crystallography 49, no. 3 (April 22, 2016): 823–34. http://dx.doi.org/10.1107/s1600576716004453.
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Grazing-incidence small-angle X-ray scattering (GISAXS) is increasingly used for the metrology of substrate-supported nanoscale features and nanostructured films. In the case of line gratings, where long objects are arranged with a nanoscale periodicity perpendicular to the beam, a series of characteristic spots of high-intensity (grating truncation rods, GTRs) are recorded on a two-dimensional detector. The intensity of the GTRs is modulated by the three-dimensional shape and arrangement of the lines. Previous studies aimed to extract an average cross-sectional profile of the gratings, attributing intensity loss at GTRs to sample imperfections. Such imperfections are just as important as the average shape when employing soft polymer gratings which display significant line-edge roughness. Herein are reported a series of GISAXS measurements of polymer line gratings over a range of incident angles. Both an average shape and fluctuations contributing to the intensity in between the GTRs are extracted. The results are critically compared with atomic force microscopy (AFM) measurements, and it is found that the two methods are in good agreement if appropriate corrections for scattering from the substrate (GISAXS) and contributions from the probe shape (AFM) are accounted for.
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MURAKAMI, Hiroshi, Akio KATSUKI, Takao SAJIMA, and Mitsuyoshi FUKUDA. "S1320101 Development of a System for 3-D Micro Metrology Using an Ultra-Small Diameter Optical Fiber Probe : Influence of the surface force." Proceedings of Mechanical Engineering Congress, Japan 2015 (2015): _S1320101——_S1320101—. http://dx.doi.org/10.1299/jsmemecj.2015._s1320101-.
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Ayoubi, Mazen, and Martin Trautz. "Determination of the Stress Distribution in Timber Elements Reinforced with Self-Tapping Screws Using an Optical Metrology System." Advanced Materials Research 778 (September 2013): 432–39. http://dx.doi.org/10.4028/www.scientific.net/amr.778.432.
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The use of self-tapping screws with continuous threads to reinforce and join timbers in addition to glulam elements represents an effective, simple and economic method. The high withdrawal resistance of the screws as well as its continuous bond with the wood enables an effect similar to steel reinforcement in concrete structures. Within the framework of a research project, funded by the German Research Foundation (DFG) at the Chair of Structures and Structural Design in cooperation with the Institute for Building Material Research of the RWTH Aachen University, several tests have realized to investigate the bond behaviour, the force transfer and the anchorage length of the screws. Herewith the stress distribution will be determined with an optical 3D field measuring system, based on the digital image correlation (DIC) method, which measures the strain by observing the surface of the test specimens. To ensure the accuracy of the measurements for a wide measuring field of wood surface, a comparison study was conducted involving traditional electrical sensors (i.e. strain gauges and LVDTs). The results of this study, which confirm the accuracy regarding the determination of stress distribution for small deformations on the wood surface with optical 3D field measuring system, will be presented in this article.
15
Haitjema, Han. "The Calibration of Displacement Sensors." Sensors 20, no. 3 (January 21, 2020): 584. http://dx.doi.org/10.3390/s20030584.
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Displacement measuring sensors play an essential role in all aspects of dimensional metrology. They can be used for direct displacement measurements but more often they are part of a measurement system, such as an atomic force microscope, roughness tester or a coordinate measuring machine (CMM). In order to achieve traceable measurements that can be related to the meter, these sensors must be calibrated against a reference standard that is more noise- and error-free than the sensor under test. A description of the various methods to achieve the ultimate traceability, repeatability and accuracy of such a calibration system is the main part of this paper. Various interferometric methods will be reviewed including several methods that use directly a primary standard as a reference: either an iodine-stabilized laser or a frequency comb. It is shown that various methods exist to quantify or mitigate the periodic errors that are inherent to interferometric methods. Also it is shown that knowledge of this periodicity may lead to a separation of periodic and non-periodic non-linearity errors of both the calibration instrument as the sensor under test. This review is limited to small-range sensors, typically with a range <100 μm. It is concluded that today’s technology enables sound and traceable sensor calibration up to the sub-nano and even picometer level of uncertainties
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Zhimin, Zhang, Zhang Yue, Meng Feng, Zhang Wei, Hu Gang, Li Tao, and Ji Honglei. "The establishment of 1N·m torque standard machine at NIM." ACTA IMEKO 6, no. 2 (July 21, 2017): 50. http://dx.doi.org/10.21014/acta_imeko.v6i2.400.
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<p class="Abstract"><span lang="EN-US">1 N·m torque standard machine was established at National Institute of Metrology (NIM) in 2013. The torque standard machine adopts deadweight and moment-arm type. The static air bearing with low friction is used to support the moment-arm, the invar alloy with the low expansion coefficient as the material of the moment-arm, the specially designed weight suspension part and weight loading system may ensure the applied force by small weights accurately and reliably. The mechanical structure of the machine is introduced, the results of performance test and uncertainty assessment are described. The expanded uncertainty (<em>k </em>= 2) is smaller than </span><span lang="EN-US">5</span><span lang="EN-US"> × 10<sup>-5</sup> in the range of 100 mN·m - 1 N·m, </span><span lang="EN-US">smaller than 1</span><span lang="EN-US">× 10<sup>-</sup></span><sup><span lang="EN-US">4</span></sup><span lang="EN-US"> in the range of </span><span lang="EN-US">10</span><span lang="EN-US"> mN·m - 100 mN·m.</span></p>
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Celano, Umberto, Lennaert Wouters, Alexis Franquet, Valentina Spampinato, Paul van der Heide, Marc Schaekers, Abhijeet Joshi, and Bulent M. Basol. "Dopant Activation Depth Profiling for Highly Doped Si:P By Scanning Spreading Resistance Microscopy (SSRM) and Differential Hall Effect Metrology (DHEM)." ECS Meeting Abstracts MA2022-01, no. 29 (July 7, 2022): 1269. http://dx.doi.org/10.1149/ma2022-01291269mtgabs.
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Heavily n-doped epitaxially grown Si layers are of great importance for source/drain (S/D) application in advanced node nMOS devices. For contact resistivity reduction, the dopant activation level is very important. Various techniques are being used to evaluate dopant activation in Si:P layers. Among these two methods are Scanning Spreading Resistance Microscopy (SSRM) and Differential Hall Effect Metrology (DHEM). SSRM uses an atomic force microscope equipped with a hard conductive probe that is scanned in contact mode on the cross-sectioned sample’s surface and measures spreading resistance. Measured resistance values as a function of depth are converted into resistivity and carrier concentration depth profiles using calibration measurements and conversion relationships. DHEM provides depth profiles of mobility, resistivity and carrier concentration through a semiconductor layer by making successive sheet resistance (Rs) and Hall voltage measurements using Hall effect/Van der Pauw techniques, as the electrically active thickness of the layer is reduced through successive oxidation steps. Controlled oxidation is achieved by electrochemical anodization. Data collected can then be processed to yield the depth profiles. In this contribution we have carried out SSRM and DHEM measurements on Si:P epi layers subjected to different processing conditions including annealing and ohmic contact fabrication. Secondary Ion Mass Spectrometry (SIMS) was used to measure the total (active + inactive) dopant profiles through the films. Effects of these processes on dopant diffusion and activation were studied and the results from DHEM and SSRM were compared. In-situ phosphorus (P) doped Si epi-layers were grown over 300mm diameter boron doped monitor wafers. While one set was kept as the reference, a second set was treated by a spike-annealing process at 1000 °C. In a third set a Ti/TiN contact fabrication process was carried out and the contact was removed before analysis. In the fourth set contact process was applied to the spike annealed wafer before removal of the Ti/TiN layers. Bulk sheet resistance measurements were made using 4-point probe (4PP) for all the samples. SSRM measurements were carried out at IMEC. Cross-shaped Van der Pauw test-patterns were formed on 8mmx8mm areas on the samples and DHEM measurements were performed at ALP. Figure below shows the dopant depth profiles obtained by SIMS and the carrier concentration profiles from DHEM and SSRM techniques for samples D02 (as deposited Si:P) and D03 (spike annealed). One can make some general observations from the data in this figure. The total dopant concentration as measured by SIMS is ~ 1.4E21/cm3. There is only a small difference in the total dopant distribution profiles (SIMS) between the as deposited sample and the spike annealed sample. However, the spike annealed sample shows much higher dopant activation as measured by DHEM. Carrier concentration is ~2.5x higher in sample D03 (~5E20/cm3) compared to sample D02 (~2E20/cm3). Activation levels measured by SSRM, however, are lower for both samples, and the peak carrier concentration value increases only slightly upon spike annealing, going from ~2E20/cm3 in sample D02 to ~2.2E20/cm3 in sample D03. DHEM clearly indicates the sharp interface between the p-type substrate and the n-type epi-layer and its depth calibration agrees well with the expected thicknesses of the epi layers. The tail of the SSRM data is much more graded. Data from other samples will be presented and discussed in the final manuscript. Figure 1
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Vlachová, Jana, Rebekka König, and Diethelm Johannsmann. "Stiffness of sphere–plate contacts at MHz frequencies: dependence on normal load, oscillation amplitude, and ambient medium." Beilstein Journal of Nanotechnology 6 (March 30, 2015): 845–56. http://dx.doi.org/10.3762/bjnano.6.87.
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The stiffness of micron-sized sphere–plate contacts was studied by employing high frequency, tangential excitation of variable amplitude (0–20 nm). The contacts were established between glass spheres and the surface of a quartz crystal microbalance (QCM), where the resonator surface had been coated with either sputtered SiO2 or a spin-cast layer of poly(methyl methacrylate) (PMMA). The results from experiments undertaken in the dry state and in water are compared. Building on the shifts in the resonance frequency and resonance bandwidth, the instrument determines the real and the imaginary part of the contact stiffness, where the imaginary part quantifies dissipative processes. The method is closely analogous to related procedures in AFM-based metrology. The real part of the contact stiffness as a function of normal load can be fitted with the Johnson–Kendall–Roberts (JKR) model. The contact stiffness was found to increase in the presence of liquid water. This finding is tentatively explained by the rocking motion of the spheres, which couples to a squeeze flow of the water close to the contact. The loss tangent of the contact stiffness is on the order of 0.1, where the energy losses are associated with interfacial processes. At high amplitudes partial slip was found to occur. The apparent contact stiffness at large amplitude depends linearly on the amplitude, as predicted by the Cattaneo–Mindlin model. This finding is remarkable insofar, as the Cattaneo–Mindlin model assumes Coulomb friction inside the sliding region. Coulomb friction is typically viewed as a macroscopic concept, related to surface roughness. An alternative model (formulated by Savkoor), which assumes a constant frictional stress in the sliding zone independent of the normal pressure, is inconsistent with the experimental data. The apparent friction coefficients slightly increase with normal force, which can be explained by nanoroughness. In other words, contact splitting (i.e., a transport of shear stress across many small contacts, rather than a few large ones) can be exploited to reduce partial slip.
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Michihata, Masaki. "Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review." Metrology 2, no. 1 (January 20, 2022): 46–72. http://dx.doi.org/10.3390/metrology2010004.
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Micro-coordinate measuring machines (micro-CMMs) for measuring microcomponents require a probe system with a probe tip diameter of several tens to several hundreds of micrometers. Scale effects work for such a small probe tip, i.e., the probe tip tends to stick on the measurement surface via surface adhesion forces. These surface adhesion forces significantly deteriorate probing resolution or repeatability. Therefore, to realize micro-CMMs, many researchers have proposed microprobe systems that use various surface-sensing principles compared with conventional CMM probes. In this review, the surface-sensing principles of microprobe systems were the focus, and the characteristics were reviewed. First, the proposed microprobe systems were summarized, and the probe performance trends were identified. Then, the individual microprobe system with different sensing principles was described to clarify the performance of each sensing principle. By comprehensively summarizing multiple types of probe systems and discussing their characteristics, this study contributed to identifying the performance limitations of the proposed micro-probe system. Accordingly, the future development of micro-CMMs probes is discussed.
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Vasilyan, Suren, Thomas Fröhlich, and Norbert Rogge. "Deploying the high-power pulsed lasers in precision force metrology – Towards SI traceable and practical force quantization by photon momentum." tm - Technisches Messen, August 24, 2022. http://dx.doi.org/10.1515/teme-2022-0080.
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Abstract Design and operational performance of table-top measurement apparatus is presented towards direct Planck constant traceable high accuracy and high precision small forces and optical power measurements within the SI unit system. Electromagnetic force compensation weighing balances, highly reflective mirrors and high-energy pulsed laser unit (static average power 20 W) are tailored together with a specially developed opto-electro-mechanical measurement infrastructure for cross-mapping the scale-systems of two different precision small force measurement methods. One of these methods obtains the force measurements by a state-of-the-art classical kinematic system employing the partial use of Kibble balance principle in the range of 10 nN to 4000 nN to be compared with forces generated due to quantum-mechanical effect namely the transfer of the momentum of photons from a macroscopic object. Detailed overview of the adapted measurement methodology, the static and the limits of dynamic measurement, the metrological traceability routes of the measurement parameters, quantities and their measurement uncertainties, parametric estimation of up (down)-scaling perspectives of the measurements are presented with respect to the state-of-the-art measurement principles and standard procedures within the newly redefined International System of Units (SI).
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Bouche, Ian, Josh Javor, Abhishek Som, David K. Campbell, and David J. Bishop. "Zeptonewton and attotesla per centimeter metrology with coupled oscillators." Chaos: An Interdisciplinary Journal of Nonlinear Science 34, no. 7 (July 1, 2024). http://dx.doi.org/10.1063/5.0205643.
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We present the coupled oscillator: A new mechanism for signal amplification with widespread application in metrology. We introduce the mechanical theory of this framework and support it by way of simulations. We present a particular implementation of coupled oscillators: A microelectromechanical system (MEMS) that uses one large (∼100mm) N52 magnet coupled magnetically to a small (∼0.25mm), oscillating N52 magnet, providing a force resolution of 200zN measured over 1s in a noiseless environment. We show that the same system is able to resolve magnetic gradients of 130aT/cm at a single point (within 500μm). This technology, therefore, has the potential to revolutionize force and magnetic gradient sensing, including high-impact areas such cardiac and brain imaging.
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Fasano, C. R., F. Cruz Aguirre, C. T. DeRoo, K. Hoadley, and J. A. B. Termini. "Constant period line gratings as a metric for patterning fidelity in electron beam lithography." Journal of Vacuum Science & Technology B 42, no. 6 (October 8, 2024). http://dx.doi.org/10.1116/6.0003958.
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As smaller critical dimensions of devices fabricated via electron-beam lithography (EBL) are achieved over large areas, the need for new metrology techniques follows. Large (cm × cm) substrates have traditionally been both time and labor intensive to measure using traditional techniques such as scanning electron microscopy (SEM) or atomic force microscopy. When optimizing an EBL process over large areas, stitch error must be eliminated to maximize feature placement fidelity. Simultaneously, traditional EBL requirements, such as low line-edge roughness, proximity effect correction, and appropriate write times, must be maintained. With this plethora of requirements, we propose a technique to characterize placement errors over large areas using interferometric measurements. This method, when combined with traditional techniques like SEM and optical microscopy, assesses the full domain of potential errors over large areas in a time- and cost-efficient manner. As a proof of concept, a set of five small format (5 × 10 mm2) gratings with an 855 nm period were written twice, each set produced under two different tool error conditions. We report on the efficacy of interferometric metrology to accurately assess feature placement errors and report measured groove displacement across all ten gratings.
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Ketkar, Supriya, Manoj Kumar Ram, Ashok Kumar, Thomas Weller, and Andrew Hoff. "Electrical and Structural Diagnostics of Barium Strontium Titanate (BST) Thin Films." MRS Proceedings 1292 (2011). http://dx.doi.org/10.1557/opl.2011.620.
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ABSTRACTThe properties of radio frequency, rf magnetron sputtered Barium Strontium Titanate (Ba1-xSrxTiO3), BST, thin films were investigated and compared with BST thin films deposited by sol-gel method with the aim of determining relationships between the oxide deposition parameters, the film structure, and the electric field dependence. This work presents noncontact electrical characterization of BST films using Corona Kelvin metrology (C-KM) which has been employed earlier only in the silicon industry. The films were structurally characterized using thickness profilometer, X-ray diffraction (XRD) and atomic force microscopy (AFM) techniques. The use of sol-gel technique to fabricate small area metal-insulator-metal (MIM) structures is found to be beneficial from the point of saving fabrication time and production costs.
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Shaw, Gordon, Dennis McDaniel, John Elliott, Alessandro Tona, and Anne Plant. "Mechanical stability of collagen fibril networks." MRS Proceedings 898 (2005). http://dx.doi.org/10.1557/proc-0898-l15-02.
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AbstractThin films of type 1 collagen fibril networks fabricated on alkanethiol-functionalized surfaces have been previously shown to provide an excellent protein matrix for cultured cells in applications such as drug toxicity studies and studies of cell signaling pathways. Cell phenotypic parameters, including cell morphology and rate of proliferation, can depend on the processing conditions used for fabrication of the protein films. The mechanical characteristics of the collagen fibril network appear to be particularly important, and as such, understanding the mechanical properties of individual fibrils, as well as their interactions with each other and the underlying substrate is critical for assuring a predictable response from cells. In this study, scanning probe microscopy and instrumented indentation are used in conjunction with small force metrology to examine the mechanical properties of these collagen fibrils and fibril networks.
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Hüser, Dorothee, Rudolf Meeß, Gaoliang Dai, André Felgner, Kai Hahm, Stefan Verhülsdonk, Carsten Feist, and Sai Gao. "Precision of diamond turning sinusoidal structures as measurement standards used to assess topography fidelity." Surface Topography: Metrology and Properties, February 22, 2024. http://dx.doi.org/10.1088/2051-672x/ad2c33.
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Abstract In optical surface metrology, it is crucial to assess the fidelity of the topography measuring signals. One parameter to quantify this is the \textsl{small-scale fidelity limit} $T_\mathrm{FIL}$ defined in ISO 25178-600:2019. To determine this parameter, sinusoidal structures are generated, where the wavelengths are modulated according to a discrete chirp series.

The objects are produced by means of ultra-precision diamond face turning. Planar areas and regions with slopes below $4^\circ$ could be produced with form deviations of $\lesssim 10 \, \mathrm{n m}$.
An initial estimate of the cutting tool's nose radius resulted in a
deviation that caused the ridges of the structures to be too narrow by approximately $150 \, \mathrm{n m}$, while the trenches were too wide.
At the bottom of narrow trenches, deviations are observed in the form of elevations with heights of about $20$ to $100 \, \mathrm{n m}$.

The measurement standard investigated in this study has also been used to characterise optical instruments in a round-robin test within the European project TracOptic, which requires precise knowledge of the geometry of all structures. The geometry of the topography, cosine structures superimposed with form deviations, was measured using the Met.\ LR-AFM metrological long-range atomic force microscope of the German National Metrology Institute.
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Zielińska, A., B. Santos, M. Silva, C. Fernandes, A. R. Silva, A. Durazzo, M. Lucarini, P. Eder, A. Santini, and Eliana B. Souto. "Metrology and nanometrology at agricultur-al/food/nutraceutical interface: an updated shot." Current Bioactive Compounds 18 (May 24, 2022). http://dx.doi.org/10.2174/1573407218666220524114244.
Full textAbstract:
Abstract: Nanometrology has been considered as a key to the future of nanotechnology since recently. It is particularly important for nanoparticle market development that is commonly applied in dif-ferent areas of science. The adoption of nanotechnologies in food and agrochemical industries represents a new frontier, with particular regard to plant defence against pathogen agents. Na-nometrology deals with a broad range of measurements, as well as chemical and structural characterization, electronic, thermal, and mechanical properties, fabrication and monitoring of nanodevices, and theoretical modelling of nanomaterials properties. Besides the scientific and technological values of a global standard offered by nanometrology, there are also several in-dustry-related values. In this paper, the most common the areas of science emphasized on the most frequently applied methods by the example of techniques/tools that have been described from a metrological standpoint at a nano size scale. Therefore, at the microscopic scale may be widely applied: optical techniques, for example, X-ray Photoelectron Spectroscopy (XPS), or op-tical transmission. Moreover, Scanning Electron Microscopy (SEM) and Energy Dispersive X-ray Spectroscopy (EDX) can be used for microscopic characterization, while Scanning Probe Micros-copy (SPM), consisting of Scanning-Tunnelling Microscopy (STM) and Atomic Force Microscopy (AFM), as well as Transmission-Electron Microscopy (TEM), can be employed at the nanoscopic scale. The review has also mentioned about Secondary Ion Mass Spectroscopy (SIMS) to analyze secondary ions using a mass spectrometer. In addition, Electron Energy Loss Spectroscopy (EELS) using high-energy electrons from sample penetration or Fourier Transform Infrared Spectroscopy (FTIR) to obtain the infrared spectrum of a sample were also presented. Particle size analysis can be analyzed by performing Small-/Wide-Angle X-ray Scattering (SAXS/WAXS) and Dynamic Light Scattering (DLS) techniques. A specific metrology approach is required for most nanoparticle-based products, that is, the way nanometrology is significant for production quality control and for toxicology studies. This review wants to give an updated shot on the metrological approaches and applications, with particular attention to nanometrology for dif-ferent areas of scientific research, i.e., food, agricultural, nutraceutical, biological and medical ones. The novelty character of this paper is to discuss the application of nanotechnologies under metrological principles and approach at the interface of different integrated, multipurpose and multidisciplinary application fields. The following topics are here explored: i) metrology: defi-nitions, principles, and main features; ii) calibration methods and techniques; iii) measurement methods and systems; iv) proficiency testing; v) nanometrology. Particularly, nanometrology was highlighted in the following directions: significance of the nanodimension, nanometrology in chemical research, nanometrology for the characterization of nanoparticles, nanometrology in biological and medical sciences, mechanical nanometrology, electrical nanometrology and applications of nanometrology in agriculture and food industry.
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Abram, Ester, Nikolai Orlov, Erik C. Garnett, and Paul Planken. "Sub-ablation-threshold light-induced modification of thin ruthenium layers detected using optical reflectance." Journal of Applied Physics 136, no. 24 (December 27, 2024). https://doi.org/10.1063/5.0233239.
Full textAbstract:
In semiconductor device manufacturing, wafer materials may be exposed to intense light sources by optical metrology tools. The desired light fluence often needs to be maximized to levels just below the optical damage threshold of materials deposited on the wafer, such as ruthenium. We, therefore, investigate light-induced permanent structural changes to thin Ru films after exposure to single 400nm wavelength femtosecond pulses in the fluence regime before catastrophic damage. For fluences below that where full-ablation occurs, small optical increases in the reflectivity of up to 4% are observed in the aftermath with a weak probe beam. In this fluence regime, dark-field, scanning electron, and atomic force microscopy images reveal morphological changes such as top-level ablation, where only the top part of the ruthenium layer is ablated whereas the lower part still remains on the substrate, and nanovolcano formation. However, neither top-level ablation nor nanovolcano formation is responsible for the reflection increase. Instead, Electron Backscatter Diffraction reveals that in this low fluence regime where reflectivity increases, Ru grains melt and resolidify into larger grains, which is likely responsible for the observed reflectivity increases. This result is reminiscent of our earlier work on aluminum layers and it suggests that there may be more metals that display this behavior.
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Käseberg, Tim, Jana Grundmann, Thomas Siefke, Petr Klapetek, Miroslav Valtr, Stefanie Kroker, and Bernd Bodermann. "Mueller Matrix Ellipsometric Approach on the Imaging of Sub-Wavelength Nanostructures." Frontiers in Physics 9 (January 21, 2022). http://dx.doi.org/10.3389/fphy.2021.814559.
Full textAbstract:
Conventional spectroscopic ellipsometry is a powerful tool in optical metrology. However, when it comes to the characterization of non-periodic nanostructures or structured fields that are much smaller than the illumination spot size, it is not well suited as it integrates the results over the whole illuminated area. Instead, imaging ellipsometry can be applied. Especially imaging Mueller matrix ellipsometry is highly useful in nanostructure characterization and defect inspection, as it is capable to measure the complete Mueller matrix for each pixel in a microscope image of the sample. It has been shown that these so-called Mueller matrix images can help to distinguish geometrical features of nanostructures in the sub-wavelength regime due to visible differences in off-diagonal matrix elements. To further investigate the sensitivity of imaging Mueller matrix ellipsometry for sub-wavelength sized features, we designed and fabricated a sample containing geometrical nanostructures with lateral dimensions ranging from 50 to 5,000 nm. The structures consist of square and circular shapes with varying sizes and corner rounding. For the characterization of their Mueller matrix images, we constructed an in-house Mueller matrix microscope capable of measuring the full Mueller matrix for each pixel of a CCD camera, using an imaging system and a dual-rotating compensator configuration for the ellipsometric system. The samples are illuminated at 455 nm wavelength and the measurements can be performed in both transmission and reflection. Using this setup, we systematically examine the sensitivity of Mueller matrix images to small features of the designed nanostructures. Within this contribution, the results are compared with traceable atomic force microscopy measurements and the suitability of this measurement technique in optical nanometrology is discussed. AFM measurements confirm that the fabricated samples closely match their design and are suitable for nanometrological test measurements. Mueller matrix images of the structures show close resemblance to numerical simulations and significant influence of sub-wavelength features to off-diagonal matrix elements.
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Liu, Fengwei, Yu Kuang, Yongqian Wu, Xiaojun Chen, and Rongzhu Zhang. "Phase retrieval from single interferogram without carrier using Lissajous ellipse fitting technology." Scientific Reports 13, no. 1 (June 19, 2023). http://dx.doi.org/10.1038/s41598-023-36584-5.
Full textAbstract:
AbstractPhase extraction from single interferogram is of high significance and increasingly interest in optical metrology. In this contribute we propose an advanced Pixel-level Lissajous Ellipse Fitting (APLEF) method to extract the phase from single interferogram without carrier. At each pixel, a Lissajous figure is created by plotting N against D, where N and D are subtractions and additions of intensities of adjacent pixels in a small window. The so created Lissajous figure is already in phase quadrature because of the subtraction and addition process, and the Lissajous Figure is forced to be closed by taking the opposite values of N and D, i.e. –N and -D into account. The closed and in phase quadrature Lissajous Figure is the key point for APLEF to demodulate the single inteferogram without carrier in theoretically. The simulation shows its higher accuracy than existed SPT and Garbusi’s method and the experiments finally corroborate its effectiveness.
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Sofyan, Lesca Monica. "In dogs diagnosed with osteoarthritis, is meloxicam superior to carprofen for reducing patient discomfort?" Veterinary Evidence 5, no. 3 (July 29, 2020). http://dx.doi.org/10.18849/ve.v5i3.288.
Full textAbstract:
PICO question
In dogs diagnosed with osteoarthritis, is meloxicam superior to carprofen for reducing patient discomfort?
Clinical bottom line
Category of research question
Treatment
The number and type of study designs reviewed
Only two papers have compared the efficacy between meloxicam and carprofen in the treatment of dogs diagnosed with osteoarthritis. Both of the papers were clinical, prospective and randomised trials.
Strength of evidence
Weak
Outcomes reported
One randomised controlled clinical trial compared the level of efficacy between meloxicam and carprofen in reducing pain and discomfort in dogs diagnosed with osteoarthritis1. Orthopaedic surgeons found dogs treated with either meloxicam or carprofen showed significant improvement in ground reaction forces (GRF). The study emphasised that dogs treated with meloxicam had GRF values that returned to normal baseline values, with owners also commenting on gait improvement. This study however, had a low sample size, did not use a validated metrology instrument for assessment by owners and the data used to assess GRF was not conclusive on all parameters to favour meloxicam.
An additional study was evaluated but this also had very small case numbers, no control group and gave no detailed statistical analysis2. The paper descriptively suggests meloxicam to show a better response than carprofen but there was no scientific analysis or evidence to statistically support and validate this.
Conclusion
Both meloxicam and carprofen are validated as effective treatments for canine osteoarthritis but it cannot be suggested that meloxicam is superior to carprofen as the available evidence is weak. To accurately assess this, a future clinical study using validated metrology instruments, adequate sample sizes and proper statistical analysis is required.
How to apply this evidence in practice
The application of evidence into practice should take into account multiple factors, not limited to: individual clinical expertise, patient’s circumstances and owners’ values, country, location or clinic where you work, the individual case in front of you, the availability of therapies and resources.
Knowledge Summaries are a resource to help reinforce or inform decision-making. They do not override the responsibility or judgement of the practitioner to do what is best for the animal in their care.
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Povoroznyk, Mykola. "DIVERSIFIED FORMATS OF EXOGENE SCIENTIFIC AND TECHNOLOGICAL EXCHANGE OF MULTINATIONAL CORPORATIONS." Eastern Europe: economy, business and management, no. 2(39) (2023). http://dx.doi.org/10.32782/easterneurope.39-3.
Full textAbstract:
The exogenous transfer of BNP technologies under the conditions of technoglobalism plays a key role in the development of corporate ecosystems of open innovation. The main driving forces of its rapid structural dynamics in recent decades are the active development of international production by multinational firms and a significant increase in the level of its knowledge intensity. This makes it impossible for BNP to maintain its competitive leadership solely at the expense of internal company knowledge bases, sources and resources. Exogenous transfer of BNP technologies is the material basis of global processes of micro-integration of scientific and technological exchange, during which multinational firms are in the process of permanent modernization of organizational, economic and institutional forms of participation in global knowledge sharing. As the range of BNP partners involved in corporate knowledge creation chains expands, the effectiveness of functionally distinct structural components of global innovation networks increases significantly based on the diversification of sub-contractual relations of multinational firms with universities, research institutes, laboratories and centers, business schools, venture capital companies, business incubators, coworking centers, innovative companies of small and medium businesses, state institutions of standardization and metrology, etc. In the processes of exogenous technological transfer of BNP, the mechanisms of outsourcing part of corporate R&D to external independent firms, mergers and acquisitions of technological companies, their strategic alliances, venture financing, joint innovative entrepreneurship, financing of startups, etc. demonstrate the highest effectiveness. In their synergistic action, they ensure not only the systematic networking of scientific research activities of BNP and their development of global value chains in the field of research and development, but also the large-scale expansion of their innovative potential in conducting R&D in the most pioneering directions of fundamental and applied research as a guarantee of sustainable competitive leadership in techno-globalization conditions.