Academic literature on the topic 'SIMOX'
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Journal articles on the topic "SIMOX"
Hemment, PLF, KJ Reeson, JA Kilner, and SJ Krause. "Simox bibliography." Vacuum 42, no. 5-6 (January 1991): 393–453. http://dx.doi.org/10.1016/0042-207x(91)90062-n.
Full textScanlon, P. J., P. L. F. Hemment, K. J. Reeson, A. K. Robinson, J. A. Kilner, R. J. Chater, and G. Harbeke. "Oxygen rich SIMOX?" Semiconductor Science and Technology 6, no. 8 (August 1, 1991): 730–34. http://dx.doi.org/10.1088/0268-1242/6/8/002.
Full textMargail, J. "SIMOX material manufacturability." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 74, no. 1-2 (April 1993): 41–46. http://dx.doi.org/10.1016/0168-583x(93)95011-s.
Full textVisitserngtrakul, S. "Multiply faulted defects in high-current oxygen-implanted silicon-on-insulator." Proceedings, annual meeting, Electron Microscopy Society of America 47 (August 6, 1989): 606–7. http://dx.doi.org/10.1017/s0424820100155001.
Full textDavid Theodore, N., Peter Fejes, Mamoru Tomozane, and Ming Liaw. "TEM characterization of SiGe heterolayers grown on SIMOX." Proceedings, annual meeting, Electron Microscopy Society of America 49 (August 1991): 886–87. http://dx.doi.org/10.1017/s0424820100088749.
Full textXue Li, Ying, Xing Zhang, Yan Luo, and Yang Yuan Wang. "Photoluminescence spectroscopy of SIMOX." Journal of Non-Crystalline Solids 254, no. 1-3 (September 1999): 134–38. http://dx.doi.org/10.1016/s0022-3093(99)00438-x.
Full textIzumi, Katsutoshi. "History of SIMOX Material." MRS Bulletin 23, no. 12 (December 1998): 20–24. http://dx.doi.org/10.1557/s088376940002978x.
Full textBarklie, R. C. "Defects in SIMOX Structures." Solid State Phenomena 1-2 (January 1991): 203–9. http://dx.doi.org/10.4028/www.scientific.net/ssp.1-2.203.
Full textRavindra, N. M., S. Abedrabbo, O. H. Gokce, F. Tong, A. Patel, R. Velagapudi, G. D. Williamson, and W. P. Maszara. "Radiative properties of SIMOX." IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part A 21, no. 3 (1998): 441–49. http://dx.doi.org/10.1109/95.725208.
Full textGuerra, M., V. Benveniste, G. Ryding, D. H. Douglas-Hamilton, M. Reed, G. Gagne, A. Armstrong, and M. Mack. "Oxygen implanter for simox." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 6, no. 1-2 (January 1985): 63–69. http://dx.doi.org/10.1016/0168-583x(85)90611-1.
Full textDissertations / Theses on the topic "SIMOX"
Yang, Hong. "Microstructural development of simox and simox related materials." Thesis, University of North Texas, 1993. https://digital.library.unt.edu/ark:/67531/metadc798205/.
Full textKrska, Jee-Hoon Yap. "SIMOX buried-oxide conduction mechanisms." Thesis, Massachusetts Institute of Technology, 1997. http://hdl.handle.net/1721.1/10309.
Full textIncludes bibliographical references (leaves 141-149).
by Jee-Hoon Yap Krska.
Ph.D.
Dalponte, Mateus. "Junções rasas em Si e SIMOX." reponame:Biblioteca Digital de Teses e Dissertações da UFRGS, 2004. http://hdl.handle.net/10183/7638.
Full textOliveira, Roana Melina de. "Dopagem tipo-n em estruturas SIMOX." reponame:Biblioteca Digital de Teses e Dissertações da UFRGS, 2007. http://hdl.handle.net/10183/11793.
Full textThe re-crystallization and electrical activation of As (n-type dopant) implanted in SIMOX (Separation by IMplanted OXygen) were studied. Two SIMOX structures with different Si overlayers and buried oxide thicknesses were used. The As+ implantations were performed with energy of 20 keV to doses of 5x1014cm-2 or 2x1015cm-2 in both substrates. A plateau-like profile was achieved in an additional set of SOI samples by triple energy implantation. Rapid thermal and conventional furnace annealing were applied for dopant activation and recovery of the implantation damage. The physical and electrical characterizations were done by RBS (Rutherford Backscattering Spectrometry), TEM (Transmission Electron Microscopy), MEIS (Medium Energy Ion Scattering), sheet resistance measurements and Hall Effect measurements. The results are discussed considering the amorphization depth reached by dopant implantation and the crystal recovery process via thermal treatment and the influence in the electrical activation of the dopants. The completely amorphized samples presented higher values of sheet resistance and lower electrical activation percentage compared with the samples that did not have the complete top Si film amorphized. These results clearly show the need for avoiding total amorphization of the Si film during ion implantation in SIMOX, so that it is possible to achieve good crystal and electrical characteristics after thermal processing.
Yoon, Jung Uk 1971. "SIMOX BOX metrology : using physical and electrical characterization." Thesis, Massachusetts Institute of Technology, 1995. http://hdl.handle.net/1721.1/32682.
Full textLourenco, Manon d'Assuncao. "Evaluation of SIMOX substrates using photoconductive frequency resolved spectroscopy." Thesis, University of Surrey, 1991. http://epubs.surrey.ac.uk/776189/.
Full textYoon, Jung Uk 1971. "Metrology of SIMOX buried oxide and nitride/STI CMP." Thesis, Massachusetts Institute of Technology, 1998. http://hdl.handle.net/1721.1/50518.
Full textIncludes bibliographical references (leaves 149-154).
The increase in demand for faster and more powerful microprocessors in recent years has been the driving force to introduce new materials and processes into semiconductor fabrication facilities. As each fabrication facility tries to maximize its yield, it is mandatory that there exist metrology techniques to characterize both materials and processes. This mandate is the motivation behind this thesis. In this thesis, the metrology of two different systems used in VLSI technology are investigated. The first system is the material, Separation by IMplanted OXygen (SIMOX) buried oxide. SIMOX technology has been studied extensively as a viable alternative to bulk silicon technology in radiation-hard and low-power applications. However, there is still a lack of knowledge on the nature of the defects present in the SIMOX buried oxide and their impact on basic BOX electrical characteristics, such as BOX high-field conduction. In this thesis, greater understanding about the excess-silicon related defects in the buried oxide has been obtained concerning their nature, origin, and impact on the conduction characteristics. Further understanding about the silicon islands in the buried oxide has also been obtained concerning their formation and impact on the high-field conduction characteristics. Finally, a metrological application of the BOX high-field conduction model is demonstrated. The second system is the process, Nitride/Shallow Trench Isolation (STI) Chemical Mechanical Polishing (CMP). CMP processes have been heralded as a way to planarize films and structures on wafers to a degree which has not been possible before. However, recent studies have shown that the uniformity of CMP processes depends on the layout-pattern density. To address this issue, an oxide CMP model has been developed to show the relationship between layout-pattern density and the polish rate. However, there is an uncertainty as to how this single-material system model can be extended to other material systems and dual-materials systems. In this thesis, the metrology and modeling techniques for oxide CMP are extended to nitride CMP in order to understand the pattern-density and materials dependence for this particular CMP process. In addition, the planarization and uniformity of the two-material system for STI structures is investigated. A model explaining the relationship between a particular STI layout-pattern density and the resulting planarization is developed.
by Jung Uk Yoon.
Ph.D.
Jeoung, Jun Sik. "Structural and electrical characterization of low-dose low-energy SIMOX materials." Diss., The University of Arizona, 2004. http://hdl.handle.net/10150/280614.
Full textSeifouri, Mahmood. "Devices for integrated optics produced in GaAs/GaAlAs anf Simox materials." Thesis, Cardiff University, 1989. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.327938.
Full textNgwa, Chrisantus Soh. "Electrical characterisation of SIMOX SiOâ†2 for silicon-on-insulator technology." Thesis, University of Liverpool, 1996. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.263706.
Full textBooks on the topic "SIMOX"
Patel, Monica. Novel simox/soi device structure with body contact for reduction of floating body effects. Ottawa: National Library of Canada, 1990.
Find full textSand, George. Simon. Paris: Honoré Champion éditeur, 2010.
Find full textSand, George. Simon. Grenoble: Aurore, 1991.
Find full textHanson, Fred. Simon. Fond du Lac, Wis: Black Willow Press, 1990.
Find full text1993-, Bourget Maxime, ed. Simon. Varennes, Québec: AdA, 2010.
Find full textSeivers, Edna Wallace. Simcox. [Knoxville, Tenn: E.W. Seivers, 1989.
Find full textSutcliff, Rosemary. Simon. s.l: O. U. P, 1996.
Find full textScott, Hampton, Klein Todd, and Chuckry Chris, eds. Simon Dark: What Simon does. New York: DC Comics, 2008.
Find full textWinchester, Simon. Simon Winchester's Calcutta /Simon & Rupert Winchester. Footscray, Vic: Lonely Planet, 2004.
Find full textStarling, Simon. Simon Starling. Edited by Kirkpatrick Gail, Henatsch Martin, Städtische Ausstellungshalle am Hawerkamp, and Villa Arson (France). Münster: Städtische Ausstellungshalle am Hawerkamp, 2004.
Find full textBook chapters on the topic "SIMOX"
Anc, Maria J. "Perspectives of Simox Technology." In Progress in SOI Structures and Devices Operating at Extreme Conditions, 1–10. Dordrecht: Springer Netherlands, 2002. http://dx.doi.org/10.1007/978-94-010-0339-1_1.
Full textKögler, R., A. Mücklich, W. Anwand, F. Eichhorn, and Wolfgang Skorupa. "Defect Engineering for SIMOX Processing." In Solid State Phenomena, 339–44. Stafa: Trans Tech Publications Ltd., 2007. http://dx.doi.org/10.4028/3-908451-43-4.339.
Full textCristoloveanu, Sorin, and Thierry Ouisse. "Properties of Simox and Related Systems." In The Physics and Chemistry of SiO2 and the Si-SiO2 Interface 2, 309–18. Boston, MA: Springer US, 1993. http://dx.doi.org/10.1007/978-1-4899-1588-7_33.
Full textAuberton-Hervé, A. J., B. Aspar, and J. L. Pelloie. "Low dose SIMOX for ULSI applications." In Physical and Technical Problems of SOI Structures and Devices, 3–14. Dordrecht: Springer Netherlands, 1995. http://dx.doi.org/10.1007/978-94-011-0109-7_1.
Full textCristoloveanu, Sorin. "Electrical Properties of Simox Material and Devices." In The Physics and Technology of Amorphous SiO2, 517–30. Boston, MA: Springer US, 1988. http://dx.doi.org/10.1007/978-1-4613-1031-0_63.
Full textStesmans, A., and G. Van Gorp. "Low-Temperature ESR Study of SIMOX Structures." In The Physics and Technology of Amorphous SiO2, 539–45. Boston, MA: Springer US, 1988. http://dx.doi.org/10.1007/978-1-4613-1031-0_65.
Full textLysenko, V. S., I. P. Tyagulski, I. N. Osiyuk, and Y. V. Gomeniuk. "Cryogenic Investigations of SIMOX Buried Oxide Parameters." In Progress in SOI Structures and Devices Operating at Extreme Conditions, 159–66. Dordrecht: Springer Netherlands, 2002. http://dx.doi.org/10.1007/978-94-010-0339-1_11.
Full textElewa, T., H. Haddara, and S. Cristoloveanu. "Interface Properties and Recombination Mechanisms in Simox Structures." In The Physics and Technology of Amorphous SiO2, 553–59. Boston, MA: Springer US, 1988. http://dx.doi.org/10.1007/978-1-4613-1031-0_67.
Full textVoronin, G. G., L. V. Degtyarenko, I. G. Lukitsa, V. G. Malinin, V. V. Starkov, Y. V. Fedorovitch, and L. N. Frolov. "Fabrication of SIMOX Structures and IC’s Test Elements." In Physical and Technical Problems of SOI Structures and Devices, 241–46. Dordrecht: Springer Netherlands, 1995. http://dx.doi.org/10.1007/978-94-011-0109-7_21.
Full textNejim, Ahmed, and P. L. F. Hemment. "Preparation and Characterisation of Thin Film Simox Material." In Crucial Issues in Semiconductor Materials and Processing Technologies, 225–32. Dordrecht: Springer Netherlands, 1992. http://dx.doi.org/10.1007/978-94-011-2714-1_22.
Full textConference papers on the topic "SIMOX"
deSouza, J. P., S. W. Bedell, H. J. Hovel, K. Fogel, A. Reznicek, and D. K. Sadana. "Single Wafer sSOI by SIMOX." In 2006 International SiGe Technology and Device Meeting. IEEE, 2006. http://dx.doi.org/10.1109/istdm.2006.246532.
Full textLam, Hon W. "Epitaxial Growth On SIMOX Wafers." In O-E/LASE'86 Symp (January 1986, Los Angeles), edited by Devindra K. Sadana and Michael I. Current. SPIE, 1986. http://dx.doi.org/10.1117/12.961207.
Full textDouseki, Takakuni, and Junzo Yamada. "Sub 1-V MTCMOS/SIMOX Circuit Technology." In 1998 International Conference on Solid State Devices and Materials. The Japan Society of Applied Physics, 1998. http://dx.doi.org/10.7567/ssdm.1998.b-7-2.
Full textClark, Stewart A., Brian Culshaw, Emma J. Dawnay, and Ian E. Day. "Thermo-optic phase modulators in SIMOX material." In Symposium on Integrated Optoelectronics, edited by Giancarlo C. Righini and Seppo Honkanen. SPIE, 2000. http://dx.doi.org/10.1117/12.379940.
Full textNayak, Park, Woo, Wang, Yabiku, and MacWilliams. "High performance GeSi quantum-well PMOS on SIMOX." In Proceedings of IEEE International Electron Devices Meeting. IEEE, 1992. http://dx.doi.org/10.1109/iedm.1992.307473.
Full textWen, Huashun, David Borlaug, Hongxiang Wang, Yuefeng Ji, and Bahram Jalali. "Engineering Strain in Silicon Using SIMOX 3D Sculpting." In CLEO: Science and Innovations. Washington, D.C.: OSA, 2016. http://dx.doi.org/10.1364/cleo_si.2016.sm2r.5.
Full textZhang, Xing, Liqiong Wei, Yingxue Li, and Yangyuan Wang. "High Speed Fully Depleted CMOS/SIMOX Gate Array." In 1994 International Conference on Solid State Devices and Materials. The Japan Society of Applied Physics, 1994. http://dx.doi.org/10.7567/ssdm.1994.ld-16.
Full textINO, Masayuki, Toshiaki TSUCHIYA, Ken TAKEYA, and Tetsushi SAKAI. "LSI Applications of 0.25-μm CMOS/SIMOX Technology." In 1996 International Conference on Solid State Devices and Materials. The Japan Society of Applied Physics, 1996. http://dx.doi.org/10.7567/ssdm.1996.sympo.i-9.
Full textYakovlev, Victor A., Sylvie Bosch-Charpenay, Peter A. Rosenthal, Peter R. Solomon, and Jiazhan Xu. "FTIR reflectance characterization of SIMOX buried oxide layers." In SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, edited by Raju V. Datla and Leonard M. Hanssen. SPIE, 1998. http://dx.doi.org/10.1117/12.326654.
Full textIMAI, Masato, Tatsuhiko KATAYAMA, and Jaroslaw JABLONSKI. "The Status and Future of Low-Dose SIMOX Technology." In 1995 International Conference on Solid State Devices and Materials. The Japan Society of Applied Physics, 1995. http://dx.doi.org/10.7567/ssdm.1995.s-iii-6.
Full textReports on the topic "SIMOX"
Marshall, J. C., M. W. Cresswell, C. H. Ellenwood, L. W. Linholm, P. Roitman, and M. E. Zaghloul. The design guide for CMOS-on-SIMOX test chips NIST3 and NIST4. Gaithersburg, MD: National Institute of Standards and Technology, 1993. http://dx.doi.org/10.6028/nist.ir.4889.
Full textMarshall, J. C., M. W. Cresswell, C. H. Ellenwool, L. W. Linholm, P. Roitman, and M. E. Zaghloul. The test guide for CMOS-ON-SIMOX test chips NIST3 and NIST4. Gaithersburg, MD: National Institute of Standards and Technology, 1993. http://dx.doi.org/10.6028/nist.ir.4890.
Full textThoren, Roxi, and Andrew Louw. Simon and Helen Director Park. Landscape Architecture Foundation, 2013. http://dx.doi.org/10.31353/cs0630.
Full textHarpring, L. J. SIMON Host Computer System requirements and recommendations. Office of Scientific and Technical Information (OSTI), November 1990. http://dx.doi.org/10.2172/10130242.
Full textHarpring, L. J. SIMON Host Computer System requirements and recommendations. Office of Scientific and Technical Information (OSTI), November 1990. http://dx.doi.org/10.2172/5654697.
Full textFogel, Robert. Simon S. Kuznets: April 30, 1901-July 9, 1985. Cambridge, MA: National Bureau of Economic Research, July 2000. http://dx.doi.org/10.3386/w7787.
Full textFogel, Robert. Some Notes on the Scientific Methods of Simon Kuznets. Cambridge, MA: National Bureau of Economic Research, December 1987. http://dx.doi.org/10.3386/w2461.
Full textCarpenter, Terry L., Bruce J. Bernacky, and Eric E. Stabell. Human Envenomization by Plectreurys tristis Simon (Araneae: Plectreuridae): A Case Report. Fort Belvoir, VA: Defense Technical Information Center, July 1990. http://dx.doi.org/10.21236/ada225092.
Full textBerry, David A., and Tim Fogarty. Abstract - Cooperative Research and Development Agreement between SIOX and National Energy Technology Laboratory. Office of Scientific and Technical Information (OSTI), March 2018. http://dx.doi.org/10.2172/1433182.
Full textDavid G. Morse and Hannes E. Leetaru. RESERVOIR CHARACTERIZATION & 3D MODELS OF MT. SIMON GAS STORAGE FIELDS IN THE ILLINOIS BASIN. Office of Scientific and Technical Information (OSTI), September 2003. http://dx.doi.org/10.2172/825371.
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