Dissertations / Theses on the topic 'Silicon oxide'
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Mehonić, Adnan. "Resistive switching in silicon-rich silicon oxide." Thesis, University College London (University of London), 2014. http://discovery.ucl.ac.uk/1420436/.
Full textAnthony, Carl John. "Oxide interface studies on silicon and silicon carbide." Thesis, University of Newcastle Upon Tyne, 2005. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.424150.
Full textGold, Scott Alan. "Nitrogen incorporation in thin silicon oxide films for passivation of silicon solar cell surfaces." Thesis, Georgia Institute of Technology, 1999. http://hdl.handle.net/1853/11101.
Full textShah, M. "Excitation mechanisms in erbium-doped silicon-rich silicon oxide." Thesis, University College London (University of London), 2014. http://discovery.ucl.ac.uk/1420212/.
Full textJohnson, Robert Shawn. "Properties of Aluminum Oxide and Aluminum Oxide Alloys and their Interfaces with Silicon and Silicon Dioxide." NCSU, 2002. http://www.lib.ncsu.edu/theses/available/etd-20020122-104946.
Full textA remote plasma enhanced chemical vapor deposition method, RPECVD, was utilized to deposit thin films of aluminum oxide, tantalum oxide, tantalum aluminates, and hafnium aluminates. These films were analyzed using auger electron spectroscopy, AES, Fourier transform infrared spectroscopy, FTIR, X-ray diffraction, XRD, nuclear resonance profiling, NRP, capacitance versus voltage, C-V, and current versus voltage, J-V. FTIR indicated the alloys were homogeneous and pseudobinary in character. Combined with XRD the crystallization temperatures for films >100 nm were measured. The alloys displayed an increased temperature stability with the crystallization points being raise by >100ºC above the end point values.In-situ AES analysis provided a study of the initial formation of the films' interface with the silicon substrate. For Al2O3 these results were correlated to NRP results and indicated a thin, ~0.6 nm, interfacial layer formed during deposition.C-V characteristics indicated a layer of fixed negative charge associated with Al2O3. For Ta2O5 the C-V and J-V results displayed high levels of leakage current, due to a low conduction band offset with silicon. Both aluminates were dominated by electron trapping states. These states were determined to be due to (i) a network "break-up" component and (ii) localized atomic d-states of hafnium and tantalum atoms.
Kwa, Kelvin Sian Kiat. "Characterisation of strained silicon / silicon germanium metal-oxide-semiconductor devices." Thesis, University of Newcastle Upon Tyne, 2004. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.405358.
Full textWu, Kehuey. "Strain effects on the valence band of silicon piezoresistance in p-type silicon and mobility enhancement in strained silicon pMOSFET /." [Gainesville, Fla.] : University of Florida, 2005. http://purl.fcla.edu/fcla/etd/UFE0008390.
Full textBowes, Sarah-Jane. "The study of Si-O bonds in low temperature matrices and in the gas phase." Thesis, University of Southampton, 2001. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.342658.
Full textBae, Dohyun. "Sputtering fabrication of silicon nitride and silicon oxide based dichroic mirrors." Thesis, Massachusetts Institute of Technology, 2015. http://hdl.handle.net/1721.1/98645.
Full textCataloged from PDF version of thesis.
Includes bibliographical references (page 37).
Thin films in optical materials utilize the properties of multiple materials to obtain specific and fine-tuned transmission, absorption and reflectance at wavelengths. Dichroic mirrors exhibit very different reflectance and transmission rates at certain cut-off wavelengths, which can be adjusted using changes in layer materials and thickness. This is due to constructive optical interference between alternating layers of two thin films of different refractive indices. This study explored the sputtering methods of thin-film multilayers to form dichroic mirrors in the visible spectrum for future solar-cell applications. Silicon oxide and silicon nitride targets were selected as materials used in the sputtering process. The sputtered multilayers and films were then characterized and analyzed using spectrophotometry. The transmission spectrum of the initial multilayer depicted failure in transmission at wavelengths under 500nm. The components of the multilayer were then sputtered and analyzed to troubleshoot the problematic nitride films. Transmission spectra were utilized to select each following process, and both reactive sputtering and cosputtering were explored as means of creating nitride films with functional properties. Transmission spectra were analyzed using the Swanepoel method to quantify optical characteristics to assure reactive sputtering of the targets in a nitrogen environment as a viable direction of mirror construction. Possible further work include the use of other targets such as titanium oxide, and different chamber gas mixtures for finer control in the composition of the film layers.
by Dohyun Bae.
S.B.
Moskowitz, Steven. "Atomic force miscroscopy [sic] study of SiO₂/Si(111)--(7x7) grown via atomic oxygen plasma /." Thesis, Connect to this title online; UW restricted, 2005. http://hdl.handle.net/1773/11556.
Full textOwen, Michael Paul. "Electron tunnelling in metal-oxide-silicon structures." Thesis, University of Cambridge, 1991. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.386759.
Full textDragosavac, Marko. "Electron transport in ultrathin oxide silicon MOSFETs." Thesis, University of Cambridge, 2005. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.614808.
Full textHung, Kwok-kwong. "Electrical characterization of Si-SiO2 interface for thin oxides /." [Hong Kong : University of Hong Kong], 1987. http://sunzi.lib.hku.hk/hkuto/record.jsp?B12232580.
Full textRobertson, P. A. "The photo-enhanced deposition of amorphous silicon and silicon oxide thin films." Thesis, University of Cambridge, 1987. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.384563.
Full textLiu, Zhihong. "A study of thermally nitrided silicon dioxide thin films for metal-oxide-silicon VLSI techology /." [Hong Kong : University of Hong Kong], 1990. http://sunzi.lib.hku.hk/hkuto/record.jsp?B12718488.
Full textKim, Dong-Geun. "Experimental study and thermodynamic modelling of the calcium oxide - silicon oxide - aluminum oxide - calcium fluoride system." Thesis, McGill University, 2012. http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=106562.
Full textL'usage des poudres de coulée continue est une préoccupation majeure pour l'industrie sidérurgique. Actuellement, plus de 90% de l'acier est produit par le procédé de coulée continue, nécessitant impérativement l'emploi de poudres de coulée. Traditionnellement, le développement des poudres de coulée a été réalisé par la méthode d'essai et d'erreur depuis son introduction dans l'industrie dans les années 1960. Récemment, l'intérêt porté sur le fluor s'est accru car celui-ci présente d'importantes propriétés et fonctions pour le procédé de coulée continue, telles que son influence sur la cristallisation et la diminution du point de fusion et de la viscosité du laitier. Toutefois, la méthode conventionnelle de développement des poudres de coulée appropriées n'est pas efficace pour faire face aux exigences croissantes du procédé de coulée continue, telles qu'effectuer la coulée de brames minces et atteindre de plus grande vitesse de coulée. Par conséquent, l'étude fondamentale du diagramme de phase des systèmes de poudres de coulée est manifestement nécessaire, et la modélisation thermodynamique est le moyen le plus efficace pour concevoir de nouvelles poudres de coulée en termes d'économie de temps et d'argent. Les principaux composants des poudres de coulée, qui font partie du système CaO-SiO2-Al2O3-CaF2, sont examinés dans cette étude car ces quatre constituants affecteront le plus grand nombre de propriétés des poudres de coulée. Malheureusement, le fluor a une volatilité élevée à haute température et une réactivité élevée avec d'autres matériaux. Par conséquent, les résultats des expériences effectuées précédemment sur les systèmes contenant des fluorures sont caractérisés par des écarts importants en raison du changement de composition et de réactions inattendues lors des expériences. Comme les données disponibles dans la littérature rapportent des résultats contradictoires entre eux, des expériences ont été effectuées dans cette étude pour établir les diagrammes de phase. Ces expériences ont été menées avec la méthode de trempe dans des capsules de platine scellées pour empêcher la perte de fluor pendant les expériences. Les analyses ont été effectuées en utilisant un microscope électronique à balayage (MEB) équipé d'un système d'analyse dispersive en énergie de rayons X (EDS), et une technique nouvellement développée qui produit des résultats plus précis lors de la quantification de la composition des phases à l'équilibre. La courbe du liquidus du CaO du système binaire CaO-CaF2, dont les données dans la littérature diffèrent entre elles jusqu'à environ 50 % atomique, a été confirmée. La solubilité de CaO dans CaF2 à l'état solide a été trouvée pour la première fois et atteint environ 5 % atomique à la température eutectique. Les courbes de liquidus des systèmes CaO-Al2O3-CaF2 et CaO-SiO2-CaF2 ont été soigneusement étudiées et l'étendue de la lacune de miscibilité dans le système CaO-Al2O3-CaF2 a été prouvée être beaucoup plus petite que celle rapportée dans la littérature. En outre, une analyse thermique a été réalisée par calorimétrie différentielle à balayage (DSC) dans un creuset en platine. La température eutectique des systèmes CaO-CaF2 et CaAl2O4-CaF2 a été mesurée avec succès et la transition polymorphique de la forme α-CaF2 vers la forme β-CaF2 a été confirmée. Sur base des nouvelles données expérimentales et des données fiables de la littérature, la modélisation thermodynamique du système CaO-SiO2-Al2O3-CaF2 a également été réalisée. Les résultats de calcul thermodynamique peuvent être très bénéfiques pour la conception de nouvelles poudres de coulée.
Olsen, Sarah H. "Strained silicon/silicon germanium heterojunction n-chanel metal oxide semiconductor field effect transistors." Thesis, University of Newcastle Upon Tyne, 2002. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.246619.
Full textAli, Danish. "Coulomb blockade in silicon-on-insulator." Thesis, University of Cambridge, 1994. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.321368.
Full textShih, Jeanne-Louise. "Zinc oxide-silicon heterojunction solar cells by sputtering." Thesis, McGill University, 2007. http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=112583.
Full textHan, Lei. "IMPROVEMENT OF SILICON OXIDE QUALITY USING HEAT TREATMENT." UKnowledge, 2012. http://uknowledge.uky.edu/ece_etds/5.
Full textChin, Miao. "Complementary metal oxide silicon cyclic redundancy check generators." Thesis, Monterey, California. Naval Postgraduate School, 1991. http://hdl.handle.net/10945/28050.
Full textFoster, David. "Densification of silicon carbide with mixed oxide additives." Thesis, University of Newcastle Upon Tyne, 1996. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.295478.
Full textJun, Kimin. "Iron-oxide catalyzed silicon photoanode for water splitting." Thesis, Massachusetts Institute of Technology, 2011. http://hdl.handle.net/1721.1/69240.
Full textThis electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections.
Cataloged from student submitted PDF version of thesis.
Includes bibliographical references (p. 130-139).
This thesis presents an integrated study of high efficiency photoanodes for water splitting using silicon and iron-oxide. The fundamental limitations of silicon to water splitting applications were overcome by an ultrathin iron-oxide film stack and a pH-adjusted electrochemical environment. It was experimentally demonstrated that this functional photoanode has very strong photoactivity exceeding the performance of previously reported systems. A complete theoretical explanation is provided with experimental substantiations. Two major obstacles of the application of silicon to water splitting are its high valence band edge and the lack of catalytic functionality. The solution for band edge mismatch is to facilitate the unique pH response of silicon with respect to electrolyte pH. As opposed to the low pH, a high pH electrolyte allows the silicon valence band edge to be located below the oxygen evolution potential, providing physical platform for the water oxidation reaction. In this platform, the introduction of a thin iron-oxide layer was proved to effectively catalyze the anode reaction which is otherwise impossible. The very thin film enables the separation of the two key functions of the photoelectrode: photocarrier generation and catalysis. Since the iron-oxide film has a very low absorption of incident light, phorocarriers are generated in the silicon layer, while the surface still maintains catalytic functionality. By this functional separation, it was possible to overcome the loss incurred by poor electronic and photovoltaic properties of iron-oxide. The thin semiconducting film also allows a space charge region to span beyond the catalyst layer to silicon, inducing a large built-in potential to lower the required overpotential. Additional improvement was made by adopting silicon microfabrication techniques to maximize light harvesting and minimize potential losses in silicon layer. By vertical wires and ohmic contact formation, the onset potentials were decreased and the current-potential slopes were steepened, resulting in current density as high as 17 mA/cm² at zero overpotential. These results were obtained with two of the most abundant materials, and as such shows the prospect of an efficient solar-driven water splitting pathway. In addition, the comprehensive theoretical explanations will contribute to searching for further system improvements.
by Kimin Jun.
Ph.D.
Lopez, Mark Gerard. "Aspects of electroforming in silicon oxide thin films." Thesis, Keele University, 1994. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.385191.
Full textJensen, Sophia, Leonardo Montillo, and Yogesh Periwal. "Silicon Rich Oxide UV Sensor: A Feasibility Study." The University of Arizona, 2009. http://hdl.handle.net/10150/623979.
Full textOBJECTIVES: The purpose of the project was to identify two technologies from INAOE, Instituto Nacional de Astrofisica Optica y Electronica (INAOE) located in Puebla, Mexico, that were close to market and develop a feasibility study for those technologies in a 10 week time frame. METHODS: Open submission from INAOE researchers was allowed for two weeks. Following open submission a weighted criteria matrix was developed to identify the top eight technologies. Interviews were conducted with the top eight primary researchers and their laboratories over a one week period. Voting was conducted to determine the final two technologies. Research was conducted to analyze and identify the market, provide a business and financial model, and provide recommendations. RESULTS: Results are from the feasibility study of the silicon rich oxide UV sensor one of the two technologies selected. Market: Five markets were identified with combined annual production of approximately 3.5 million sensors per year and an annual expected growth rate of 9.1%. Average selling price of a commercially available UV sensor was approximately $35 per unit. Average selling price for the INOAE was estimated to be $18 per unit. Financial: A financial analysis for a start-up venture to sell and manufacture the sensor estimated gross sales in year 1 to be $2.7M, with a net profit $427K, and EBITDA $719K. The target market share of 2%, effective tax rate 40%, market risk premium 10%, discount rate (Wacc) 20.1%, and no debt was used. Start-up costs included a net investment of $279K. A licensing model $150K with 3% royalty fees from revenue was also considered. CONCLUSIONS: Research and information uncovered in the feasibility study supported a move to patent and license the UV sensor technology and move away from creating a new start-up. A thorough market analysis coupled with a conservative financial analysis allowed for the final decision. Five months from the start of the project, a licensing agreement was signed by INOAE and Impulsora Tack for a deal worth $500K, the first licensing agreement ever for the institute. Another first were patents for the technology, never before were any technologies patented by INOAE since its foundation in 1971. This project was made possible by a grant from the Brown Foundation.
Carroli, Marco. "Silicon oxide nitride (sion) films per applicazioni fotovoltaiche." Bachelor's thesis, Alma Mater Studiorum - Università di Bologna, 2013. http://amslaurea.unibo.it/6165/.
Full textZhan, Nian. "Fabrication and characterization of hafnium oxide films prepared by direct sputtering /." View Abstract or Full-Text, 2003. http://library.ust.hk/cgi/db/thesis.pl?ELEC%202003%20ZHAN.
Full textSong, Dengyuan Centre for Photovoltaic Engineering UNSW. "Zinc oxide TCOs (Transparent Conductive Oxides) and polycrystalline silicon thin-films for photovoltaic applications." Awarded by:University of New South Wales. Centre for Photovoltaic Engineering, 2005. http://handle.unsw.edu.au/1959.4/29371.
Full text劉志宏 and Zhihong Liu. "A study of thermally nitrided silicon dioxide thin films for metal-oxide-silicon VLSI techology." Thesis, The University of Hong Kong (Pokfulam, Hong Kong), 1990. http://hub.hku.hk/bib/B31231895.
Full textAl-Ahmadi, Ahmad Aziz. "COMPLEMENTARY ORTHOGONAL STACKED METAL OXIDE SEMICONDUCTOR: A NOVEL NANOSCALE COMPLEMENTRAY METAL OXIDE SEMICONDUCTOR ARCHTECTURE." Ohio University / OhioLINK, 2006. http://rave.ohiolink.edu/etdc/view?acc_num=ohiou1147134449.
Full textÖzdağ, Pınar Güneş Mehmet. "Capacitance-voltage spectroscopy in metal-tantalum pentoxide (Ta-O)-silicon mos capacitors/." [s.l.]: [s.n.], 2005. http://library.iyte.edu.tr/tezler/master/fizik/T000397.pdf.
Full textKeywords: Capacitance-voltage spectroscopy, high dielectric constant insulators, tantalum pentoxide. Includes bibliographical references (leaves 92-97)
Sun, Shan. "Power metal-oxide-semiconductor field-effect transistor with strained silicon and silicon germanium channel." Doctoral diss., University of Central Florida, 2010. http://digital.library.ucf.edu/cdm/ref/collection/ETD/id/4631.
Full textID: 030423174; System requirements: World Wide Web browser and PDF reader.; Mode of access: World Wide Web.; Thesis (Ph.D.)--University of Central Florida, 2010.; Includes bibliographical references (p. 85-91).
Ph.D.
Doctorate
Department of Electrical Engineering
Engineering and Computer Science
Richter, Alexei [Verfasser], Uwe [Akademischer Betreuer] Rau, and Joachim [Akademischer Betreuer] Knoch. "Nanocrystalline silicon oxide in silicon heterojunction solar cells / Alexei Richter ; Uwe Rau, Joachim Knoch." Aachen : Universitätsbibliothek der RWTH Aachen, 2018. http://nbn-resolving.de/urn:nbn:de:101:1-2019051406005972709643.
Full textRichter, Alexei Verfasser], Uwe [Akademischer Betreuer] [Rau, and Joachim [Akademischer Betreuer] Knoch. "Nanocrystalline silicon oxide in silicon heterojunction solar cells / Alexei Richter ; Uwe Rau, Joachim Knoch." Aachen : Universitätsbibliothek der RWTH Aachen, 2018. http://d-nb.info/1186069112/34.
Full text洪國光 and Kwok-kwong Hung. "Electrical characterization of Si-SiO2 interface for thin oxides." Thesis, The University of Hong Kong (Pokfulam, Hong Kong), 1987. http://hub.hku.hk/bib/B31230866.
Full textJan, Ying-Wei. "A switched-capacitor analysis metal-oxide-silicon circuit simulator." Ohio : Ohio University, 1999. http://www.ohiolink.edu/etd/view.cgi?ohiou1181163717.
Full textThornton, John M. C. "Some aspects of silicon surface modification and oxide removal." Thesis, Cardiff University, 1990. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.314790.
Full textMagden, Emir Salih. "Rare-earth doped aluminum oxide lasers for silicon photonics." Thesis, Massachusetts Institute of Technology, 2014. http://hdl.handle.net/1721.1/89860.
Full textThis electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections.
88
Cataloged from student-submitted PDF version of thesis.
Includes bibliographical references (pages 61-66).
A reliable and CMOS-compatible deposition process for amorphous Al2O3 based active photonic components has been developed. Al2O3 films were reactively sputtered, where process optimization was achieved at a temperature of 250°C, with a deposition rate of 8.5 nm/min. With a surface roughness of 0.3 nm over a 1 [mu]m2 area, background optical losses as low as 0.1 dB/cm were obtained for undoped films. The development of active photonics components has been realized by use of rare-earth metals as dopants. By co-sputtering aluminum and erbium targets, Er3+ dopants at concentrations on the order of 1.0x1020 cm-3 have been added to the Al2O3 host medium. Resulting Er3+:Al2O3 films have been characterized, and over 3 dB/cm absorption has been measured over a 20 nm bandwidth. Following the material development, distributed Bragg reflector lasers were designed and fabricated in a CMOS foundry. The laser cavity was created by introducing gratings on either side of a Si3N4 waveguide. Er3+:Al2O3 was deposited in SiO2 trenches on top of the Si3N4 layer, eliminating the need for any subsequent etching steps. On-chip laser output of 3.9 [mu]W has been recorded at a wavelength of 1533.4 nm, with a side mode suppression ratio over 38.9 dB.
by Emir Salih Magden.
S.M.
Lee, Grace W. (Grace Wang). "Optical absorption of bismuth silicon oxide (Bi₁₂SiO₂₀) crystals." Thesis, Massachusetts Institute of Technology, 2001. http://hdl.handle.net/1721.1/114089.
Full textCataloged from PDF version of thesis.
Includes bibliographical references (page 23).
The purpose of this work is to characterize the optical absorption in bismuth silicon oxide (Bi₁₂SiO₂₀) crystals grown using the Bridgman technique and to identify electronic transitions responsible for absorption. Optical measurements were taken in the range of 0.4 - 11 pm at 300 K and 77 K using a spectrometer. The results show that near the band edge, there is evidence of indirect transitions at 2.3 eV and excition transitions at 1.8 eV. Low temperature measurements revealed peaks of free carrier absorption in the visible light range at 1.7 eV and 2.1 eV. Illuminated samples at low temperature revealed empty donor levels in the visible range at 1.6-1.9 eV and 2.1 eV, indicating the presence of the photochromic effect and photorefractivity.
by Grace W. Lee.
S.B.
Mather, Sean. "Hafnium oxide based gate stacks on germanium and silicon." Thesis, University of Liverpool, 2017. http://livrepository.liverpool.ac.uk/3007146/.
Full textGonzález, Zalba Miguel Fernando. "Single donor detection in silicon nanostructures." Thesis, University of Cambridge, 2013. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.608181.
Full textTahhan, Abdulla. "Energy performance enhancement of crystalline silicon solar cells." Thesis, Brunel University, 2016. http://bura.brunel.ac.uk/handle/2438/14503.
Full textChinchani, Rameshwari. "Strained silicon/silicon-germanium heterostructure complimentary metal oxide semiconductor devices a simulation study of linearity /." Ohio : Ohio University, 2004. http://www.ohiolink.edu/etd/view.cgi?ohiou1176143999.
Full textHumad, Shweta. "Piezo-on-Silicon Microelectromechanical Resonators." Thesis, Georgia Institute of Technology, 2004. http://hdl.handle.net/1853/5069.
Full textKang, Laeugu. "Study of HFO₂ as a future gate dielectric and implementation of polysilicon electrodes for HFO₂ films /." Full text (PDF) from UMI/Dissertation Abstracts International, 2000. http://wwwlib.umi.com/cr/utexas/fullcit?p3004301.
Full textAkhtaruzzaman, Md. "Dielectric studies of some oxide materials, nitride ceramics and glasses." Thesis, Durham University, 1989. http://etheses.dur.ac.uk/6308/.
Full textLoStracco, Gregory 1960. "Furance and carbon dioxide laser densification of sol-gel derived silicon oxide-titanium oxide-aluminum oxide planar optical waveguides." Thesis, The University of Arizona, 1994. http://hdl.handle.net/10150/291388.
Full textBernard, Sheldon Ainsworth. "Influence of silicon dioxide, magnesium oxide and zinc oxide on resorbable tricalcium phosphate based bioceramics." Online access for everyone, 2005. http://www.dissertations.wsu.edu/Thesis/Fall2005/s%5Fbernard%5F083005.pdf.
Full textKang, Jingxuan. "Poly Silicon on Oxide Contact Silicon Solar Cells." Thesis, 2019. http://hdl.handle.net/10754/652926.
Full textChih, Cheng Wei, and 鄭惟之. "Formation of nano silicon channel with thin silicon-rich silicon oxide." Thesis, 2016. http://ndltd.ncl.edu.tw/handle/02847038318764954812.
Full text國立清華大學
材料科學工程學系
104
PECVD is used to deposit silicon-rich silicon dioxide thin film. After annealing process, it turns out to be silicon dioxide thin film containing nano-silicon channel. The experiment shows that silicon content increases when silane ratio was raised during deposited process. The average grain size of crystalline silicon is 5 nm. Nucleation phenomenon is observed inside the ultrathin silicon-rich silicon dioxide film and the interface. Furthermore, silicon nano channels through thin silicon-rich silicon dioxide are formed with sufficient anneal.