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Journal articles on the topic 'Scanning white light'

Author: Grafiati

Published: 4 June 2021

Last updated: 1 February 2022

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1

Olszak, Artur. "Lateral scanning white-light interferometer." Applied Optics 39, no. 22 (August 1, 2000): 3906. http://dx.doi.org/10.1364/ao.39.003906.

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2

Pavliček, Pavel, and Erik Mikeska. "White-light interferometer without mechanical scanning." Optics and Lasers in Engineering 124 (January 2020): 105800. http://dx.doi.org/10.1016/j.optlaseng.2019.105800.

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3

Sysoev, E. V. "White-light interferometer with partial correlogram scanning." Optoelectronics, Instrumentation and Data Processing 43, no. 1 (February 2007): 83–89. http://dx.doi.org/10.3103/s8756699007010128.

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4

Munteanu, Florin. "Self-calibrating lateral scanning white-light interferometer." Applied Optics 49, no. 12 (April 15, 2010): 2371. http://dx.doi.org/10.1364/ao.49.002371.

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5

Hell, S., S. Witting, M. Schickfus, R. W. Wijnaendts Resandt, S. Hunklinger, E. Smolka, and M. Neiger. "A confocal beam scanning white-light microscope." Journal of Microscopy 163, no. 2 (August 1991): 179–87. http://dx.doi.org/10.1111/j.1365-2818.1991.tb03170.x.

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6

Tereschenko, Stanislav, Peter Lehmann, Lisa Zellmer, and Angelika Brueckner-Foit. "Passive vibration compensation in scanning white-light interferometry." Applied Optics 55, no. 23 (August 2, 2016): 6172. http://dx.doi.org/10.1364/ao.55.006172.

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7

Kassamakov, Ivan, Kalle Hanhijärvi, Imad Abbadi, Juha Aaltonen, Hanne Ludvigsen, and Edward Hæggström. "Scanning white-light interferometry with a supercontinuum source." Optics Letters 34, no. 10 (May 14, 2009): 1582. http://dx.doi.org/10.1364/ol.34.001582.

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8

Vallance, R. Ryan, Chris J. Morgan, Shelby M. Shreve, and Eric R. Marsh. "Micro-tool characterization using scanning white light interferometry." Journal of Micromechanics and Microengineering 14, no. 8 (June 18, 2004): 1234–43. http://dx.doi.org/10.1088/0960-1317/14/8/017.

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9

Behrends, Gert, Dirk Stöbener, and Andreas Fischer. "Lateral scanning white-light interferometry on rotating objects." Surface Topography: Metrology and Properties 8, no. 3 (July 21, 2020): 035006. http://dx.doi.org/10.1088/2051-672x/aba484.

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10

Wang, Zhen, and Yi Jiang. "Wavenumber scanning-based Fourier transform white-light interferometry." Applied Optics 51, no. 22 (July 30, 2012): 5512. http://dx.doi.org/10.1364/ao.51.005512.

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11

Hayes, Alex, Katrina Easton, Pavan Teja Devanaboyina, Jian-Ping Wu, Thomas Brett Kirk, and David Lloyd. "Structured white light scanning of rabbit Achilles tendon." Journal of Biomechanics 49, no. 15 (November 2016): 3753–58. http://dx.doi.org/10.1016/j.jbiomech.2016.09.042.

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12

Algasham, Hawra, Hira Farooq, Ceren Uzun, Sueli Skinner-Ramos, Ayrton A. Bernussi, and Luis Grave de Peralta. "Scanning diffracted-light photography using white-light and thermal radiation sources." Applied Optics 57, no. 34 (November 28, 2018): 9997. http://dx.doi.org/10.1364/ao.57.009997.

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13

Maniscalco, B., P. M. Kaminski, and J. M. Walls. "Thin film thickness measurements using Scanning White Light Interferometry." Thin Solid Films 550 (January 2014): 10–16. http://dx.doi.org/10.1016/j.tsf.2013.10.005.

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14

Gao, F., R. K. Leach, J. Petzing, and J. M. Coupland. "Surface measurement errors using commercial scanning white light interferometers." Measurement Science and Technology 19, no. 1 (December 17, 2007): 015303. http://dx.doi.org/10.1088/0957-0233/19/1/015303.

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15

Kiyono, Satoshi. "Self-calibration of a scanning white light interference microscope." Optical Engineering 39, no. 10 (October 1, 2000): 2720. http://dx.doi.org/10.1117/1.1290471.

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16

Dai, Rong, Tie-bang Xie, and Su-ping Chang. "A micro-displacement stage for scanning white-light interferometry." Journal of Physics: Conference Series 13 (January 1, 2005): 94–97. http://dx.doi.org/10.1088/1742-6596/13/1/022.

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17

Lehmann, Peter. "Vertical scanning white-light interference microscopy on curved microstructures." Optics Letters 35, no. 11 (May 18, 2010): 1768. http://dx.doi.org/10.1364/ol.35.001768.

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18

Ramakrishnan, Vivek, and K. Ramesh. "Scanning schemes in white light photoelasticity – Part II: Novel fringe resolution guided scanning scheme." Optics and Lasers in Engineering 92 (May 2017): 141–49. http://dx.doi.org/10.1016/j.optlaseng.2016.05.010.

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19

Ma, S., C. Quan, R. Zhu, C. J. Tay, L. Chen, and Z. Gao. "Application of least-square estimation in white-light scanning interferometry." Optics and Lasers in Engineering 49, no. 7 (July 2011): 1012–18. http://dx.doi.org/10.1016/j.optlaseng.2011.01.013.

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20

Harasaki, Akiko, and James C. Wyant. "Fringe modulation skewing effect in white-light vertical scanning interferometry." Applied Optics 39, no. 13 (May 1, 2000): 2101. http://dx.doi.org/10.1364/ao.39.002101.

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21

Chang, S. P., T. B. Xie, and Y. L. Sun. "Measurement of Transparent Film Using Vertical Scanning White-Light Interferometry." Journal of Physics: Conference Series 48 (October 1, 2006): 1063–67. http://dx.doi.org/10.1088/1742-6596/48/1/198.

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22

Wang, Shuzhen, Tiebang Xie, and Suping Chang. "A white light interference-based atomic force probe scanning microscopy." Measurement Science and Technology 22, no. 4 (March 15, 2011): 045502. http://dx.doi.org/10.1088/0957-0233/22/4/045502.

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23

Deng, Qinyuan, Junbo Liu, Yan Tang, Yi Zhou, Yong Yang, Jinlong Li, and Song Hu. "Spatial Modulation-Assisted Scanning White-Light Interferometry for Noise Suppression." IEEE Photonics Technology Letters 30, no. 4 (February 15, 2018): 379–82. http://dx.doi.org/10.1109/lpt.2017.2787100.

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24

Wang, D. N., Y. N. Ning, A. W. Palmer, K. T. V. Grattan, and K. Weir. "An optical scanning technique in a white light interferometric system." IEEE Photonics Technology Letters 6, no. 7 (July 1994): 855–57. http://dx.doi.org/10.1109/68.311477.

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25

Kang, Min-Gu, Sang-Yoon Lee, and Seong-Woo Kim. "Self-Compensation of PZT Errors in White Light Scanning Interferometry." Journal of the Optical Society of Korea 3, no. 2 (September 1, 1999): 35–40. http://dx.doi.org/10.3807/josk.1999.3.2.035.

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26

Deck, Leslie, and Peter de Groot. "High-speed noncontact profiler based on scanning white-light interferometry." Applied Optics 33, no. 31 (November 1, 1994): 7334. http://dx.doi.org/10.1364/ao.33.007334.

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27

Troutman, J., C. J. Evans, V. Ganguly, and T. L. Schmitz. "Performance evaluation of a vibration desensitized scanning white light interferometer." Surface Topography: Metrology and Properties 2, no. 1 (December 30, 2013): 014011. http://dx.doi.org/10.1088/2051-672x/2/1/014011.

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28

Fleischer, Matthias, Robert Windecker, and Hans J. Tiziani. "Theoretical limits of scanning white-light interferometry signal evaluation algorithms." Applied Optics 40, no. 17 (June 10, 2001): 2815. http://dx.doi.org/10.1364/ao.40.002815.

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29

Cui, Kaihua, Qian Liu, Xiaojin Huang, Hui Zhang, and Lulu Li. "Scanning error detection and compensation algorithm for white-light interferometry." Optics and Lasers in Engineering 148 (January 2022): 106768. http://dx.doi.org/10.1016/j.optlaseng.2021.106768.

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30

Dai, Rong, Tie Bang Xie, and Su Ping Chang. "A Scanning White-Light Interferometric Profilometer for Smooth and Rough Surface." Key Engineering Materials 364-366 (December 2007): 364–70. http://dx.doi.org/10.4028/www.scientific.net/kem.364-366.364.

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Abstract:

A profilometer for micro-surface topography measurement is presented. The instrument is based on the scanning white-light microscopic interferometry (SWLMI). A Linnik type interference microscope is used and the interferograms which present changes of surface profile are recorded by a CCD camera. A developed nano-positioning work stage with integrated optical grating displacement measuring system realizes the precise vertical scanning motion during profile measurement. By white-light phase shifting algorism of arbitrary steps, frames of interferograms are processed by computer to rebuild and evaluate the measured profile. Because of the specialty of SWLMI, the profilometer is suitable for both smooth and rough surface measuring. It also can be used for the measurement of curved surface, dimension of MEMS etc. The vertical resolution of the profilometer is 0.5nm, lateral resolution 0.5+m.

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31

Rose, R. A., and T. B. Vander Wood. "Talc Aspect Ratios Measured by Scanning White Light Interference Microscopy (SWLIM)." Microscopy and Microanalysis 9, S02 (July 24, 2003): 1032–33. http://dx.doi.org/10.1017/s1431927603445169.

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32

Madani-Grasset, Frédéric, Nhan T. Pham, Emmanouil Glynos, and Vasileios Koutsos. "Imaging thin and ultrathin organic films by scanning white light interferometry." Materials Science and Engineering: B 152, no. 1-3 (August 2008): 125–31. http://dx.doi.org/10.1016/j.mseb.2008.06.004.

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33

Lehmann, Peter, Peter Kühnhold, and Weichang Xie. "Reduction of chromatic aberration influences in vertical scanning white-light interferometry." Measurement Science and Technology 25, no. 6 (April 16, 2014): 065203. http://dx.doi.org/10.1088/0957-0233/25/6/065203.

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34

Li, Tianchu, Anbo Wang, Kent Murphy, and Richard Claus. "White-light scanning fiber Michelson interferometer for absolute position–distance measurement." Optics Letters 20, no. 7 (April 1, 1995): 785. http://dx.doi.org/10.1364/ol.20.000785.

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35

Jiang, Yi, and Caijie Tang. "Effect of nonlinear wavelength scanning to Fourier transform white-light interferometry." Microwave and Optical Technology Letters 51, no. 2 (December 23, 2008): 426–32. http://dx.doi.org/10.1002/mop.24097.

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36

Mun, Jeong Il, Taeyong Jo, Taiwook Kim, and Heui Jae Pahk. "Residual vibration reduction of white-light scanning interferometry by input shaping." Optics Express 23, no. 1 (January 8, 2015): 464. http://dx.doi.org/10.1364/oe.23.000464.

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37

Xie, Weichang, Peter Lehmann, and Jan Niehues. "Lateral resolution and transfer characteristics of vertical scanning white-light interferometers." Applied Optics 51, no. 11 (April 10, 2012): 1795. http://dx.doi.org/10.1364/ao.51.001795.

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38

Li, Meng-Chi, Der-Shen Wan, and Cheng-Chung Lee. "Application of white-light scanning interferometer on transparent thin-film measurement." Applied Optics 51, no. 36 (December 14, 2012): 8579. http://dx.doi.org/10.1364/ao.51.008579.

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39

Xu, Zhiguang, Vijay Shilpiekandula, Kamal Youcef-toumi, and Soon Fatt Yoon. "White-light scanning interferometer for absolute nano-scale gap thickness measurement." Optics Express 17, no. 17 (August 11, 2009): 15104. http://dx.doi.org/10.1364/oe.17.015104.

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40

Deck, L., and P. de Groot. "High-speed non-contact profiler based on scanning white light interferometry." International Journal of Machine Tools and Manufacture 35, no. 2 (February 1995): 147–50. http://dx.doi.org/10.1016/0890-6955(94)p2365-m.

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41

Behrends, Gert, Dirk Stöbener, and Andreas Fischer. "Integrated, Speckle-Based Displacement Measurement for Lateral Scanning White Light Interferometry." Sensors 21, no. 7 (April 2, 2021): 2486. http://dx.doi.org/10.3390/s21072486.

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Abstract:

Lateral scanning white light interferometry (LSWLI) is a promising technique for high-resolution topography measurements on moving surfaces. To achieve resolutions typically associated with white light interferometry, accurate information on the lateral displacement of the measured surface is essential. Since the uncertainty requirement for a respective displacement measurement is currently not known, Monte Carlo simulations of LSWLI measurements are carried out at first to assess the impact of the displacement uncertainty on the topography measurement. The simulation shows that the uncertainty of the displacement measurement has a larger influence on the total height uncertainty than the uncertainty of the displacing motion itself. Secondly, a sufficiently precise displacement measurement by means of digital speckle correlation (DSC) is proposed that is fully integrated into the field of view of the interferometer. In contrast to externally applied displacement measurement systems, the integrated combination of DSC with LSWLI needs no synchronization and calibration, and it is applicable for translatory as well as rotatory scans. To demonstrate the findings, an LSWLI setup with integrated DSC measurements is realized and tested on a rotating cylindrical object with a surface made of a linear encoder strip.

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42

Wang Jun, 王军, 陈磊 Chen Lei, 吴泉英 Wu Quanying, and 臧涛成 Zang Taocheng. "Retardation Measurement of Wave Plates Using White-Light Interference Vertical Scanning Method." Laser & Optoelectronics Progress 50, no. 1 (2013): 011203. http://dx.doi.org/10.3788/lop50.011203.

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43

Schäfer, Robert, Henri Seppänen, Ivan Kassamakov, Edward Hæggström, and Peter Hautpmann. "Bonding quality monitoring applying statistical modeling of Scanning White Light Interferometry data." Microelectronic Engineering 84, no. 11 (November 2007): 2757–68. http://dx.doi.org/10.1016/j.mee.2007.06.002.

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44

Kassamakov, Ivan, Anca Tureanu, Ville Heikkinen, and Edward Hæggström. "Transfer standard for traceable dynamic calibration of stroboscopic scanning white light interferometer." Applied Optics 56, no. 9 (March 16, 2017): 2483. http://dx.doi.org/10.1364/ao.56.002483.

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45

Seppä, Jeremias, Ivan Kassamakov, Ville Heikkinen, Anton Nolvi, Tor Paulin, Antti Lassila, and Edward Hæggström. "Quasidynamic calibration of stroboscopic scanning white light interferometer with a transfer standard." Optical Engineering 52, no. 12 (December 16, 2013): 124104. http://dx.doi.org/10.1117/1.oe.52.12.124104.

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46

Boedecker, S., C. Rembe, H. Schmid, T. Hageney, and T. Köhnlein. "Calibration of the z-axis for large-scale scanning white-light interferometers." Journal of Physics: Conference Series 311 (August 19, 2011): 012027. http://dx.doi.org/10.1088/1742-6596/311/1/012027.

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47

Shekhawat, V. K., M. P. Laurent, C. Muehleman, and M. A. Wimmer. "Surface topography of viable articular cartilage measured with scanning white light interferometry." Osteoarthritis and Cartilage 17, no. 9 (September 2009): 1197–203. http://dx.doi.org/10.1016/j.joca.2009.03.013.

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48

Sang, Mei, Xiangyu Du, Shuang Wang, Tianhua Xu, Jie Dong, and Tiegen Liu. "Gap-matching algorithm with the impCEEMDAN in scanning white-light interference microscopy." Optics Express 28, no. 10 (May 4, 2020): 15101. http://dx.doi.org/10.1364/oe.391587.

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49

Ma Long, 马. 龙., 吕. 毅. Lü Yi, 裴. 昕. Pei Xin, 焦智超 Jiao Zhichao, 张鸿燕 Zhang Hongyan, and 胡艳敏 Hu Yanmin. "Adaptive Planning Method of Spatial Scanning Range for White Light Interferometric Profiler." Laser & Optoelectronics Progress 54, no. 6 (2017): 061202. http://dx.doi.org/10.3788/lop54.061202.

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50

Jiang, Yi. "Wavelength-scanning white-light interferometry with a 3×3 coupler-based interferometer." Optics Letters 33, no. 16 (August 11, 2008): 1869. http://dx.doi.org/10.1364/ol.33.001869.

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