Journal articles: 'Resonant Mass Sensors'

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Skinner, William S., Sunny Zhang, Robert E. Guldberg, and Keat Ghee Ong. "Magnetoelastic Sensor Optimization for Improving Mass Monitoring." Sensors 22, no. 3 (January 22, 2022): 827. http://dx.doi.org/10.3390/s22030827.

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Magnetoelastic sensors, typically made of magnetostrictive and magnetically-soft materials, can be fabricated from commercially available materials into a variety of shapes and sizes for their intended applications. Since these sensors are wirelessly interrogated via magnetic fields, they are good candidates for use in both research and industry, where detection of environmental parameters in closed and controlled systems is necessary. Common applications for these sensors include the investigation of physical, chemical, and biological parameters based on changes in mass loading at the sensor surface which affect the sensor’s behavior at resonance. To improve the performance of these sensors, optimization of sensor geometry, size, and detection conditions are critical to increasing their mass sensitivity and detectible range. This work focuses on investigating how the geometry of the sensor influences its resonance spectrum, including the sensor’s shape, size, and aspect ratio. In addition to these factors, heterogeneity in resonance magnitude was mapped for the sensor surface and the effect of the magnetic bias field strength on the resonance spectrum was investigated. Analysis of the results indicates that the shape of the sensor has a strong influence on the emergent resonant modes. Reducing the size of the sensor decreased the sensor’s magnitude of resonance. The aspect ratio of the sensor, along with the bias field strength, was also observed to affect the magnitude of the signal; over or under biasing and aspect ratio extremes were observed to decrease the magnitude of resonance, indicating that these parameters can be optimized for a given shape and size of magnetoelastic sensor.

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CHAI, YATING, SUIQIONG LI, SHIN HORIKAWA, MI-KYUNG PARK, VITALY VODYANOY, and BRYAN A. CHIN. "Rapid and Sensitive Detection of Salmonella Typhimurium on Eggshells by Using Wireless Biosensors." Journal of Food Protection 75, no. 4 (April 1, 2012): 631–36. http://dx.doi.org/10.4315/0362-028x.jfp-11-339.

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This article presents rapid, sensitive, direct detection of Salmonella Typhimurium on eggshells by using wireless magnetoelastic (ME) biosensors. The biosensor consists of a freestanding, strip-shaped ME resonator as the signal transducer and the E2 phage as the biomolecular recognition element that selectively binds with Salmonella Typhimurium. This ME biosensor is a type of mass-sensitive biosensor that can be wirelessly actuated into mechanical resonance by an externally applied time-varying magnetic field. When the biosensor binds with Salmonella Typhimurium, the mass of the sensor increases, resulting in a decrease in the sensor's resonant frequency. Multiple E2 phage–coated biosensors (measurement sensors) were placed on eggshells spiked with Salmonella Typhimurium of various concentrations (1.6 to 1.6 × 107 CFU/cm2). Control sensors without phage were also used to compensate for environmental effects and nonspecific binding. After 20 min in a humidity-controlled chamber (95%) to allow binding of the bacteria to the sensors to occur, the resonant frequency of the sensors was wirelessly measured and compared with their initial resonant frequency. The resonant frequency change of the measurement sensors was found to be statistically different from that of the control sensors down to 1.6 × 102 CFU/cm2, the detection limit for this work. In addition, scanning electron microscopy imaging verified that the measured resonant frequency changes were directly related to the number of bound cells on the sensor surface. The total assay time of the presented methodology was approximately 30 min, facilitating rapid detection of Salmonella Typhimurium without any preceding sampling procedures.

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Han, Jian Qiang, Xiao Fei Wang, and Ri Sheng Feng. "Dependence of the Resonance Frequency of Mircobridge Resonators on the Thermal Power and Vacuum." Advanced Materials Research 465 (February 2012): 14–22. http://dx.doi.org/10.4028/www.scientific.net/amr.465.14.

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Microbridge resonators have been widely used as sensing elements to measure various parameters, such as pressure, acceleration, biochemical adsorption and reactions, mass-flow, infrared ray et al. But no model has been built to calculate quantitatively the shift of resonance frequency due to heat convection, incident infrared ray, excited thermal power drift and ambient air pressure. In this paper, a theoretical analysis is given to calculate the resonance frequency shift due to the thermal power (static heating power and dynamic heating power) fluctuation and the added mass of the ambient air. The model can be used to design resonant sensors based on microbridge resonator, such as resonant mass-flow sensors, resonant IR detectors, resonant biochemical sensors and resonant vacuum gauge, et al.

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Ge, Chang, and Edmond Cretu. "Simple and Robust Microfabrication of Polymeric Piezoelectric Resonating MEMS Mass Sensors." Sensors 22, no. 8 (April 13, 2022): 2994. http://dx.doi.org/10.3390/s22082994.

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Resonating MEMS mass sensors are microdevices with broad applications in fields such as bioscience and biochemistry. Their advantageous surface-to-volume ratio makes their resonant frequency highly sensitive to variations in their mass induced by surface depositions. Recent global challenges, such as water quality monitoring or pandemic containment, have increased the need for low-cost (even disposable), rapidly fabricated microdevices as suitable detectors. Resonant MEMS mass sensors are among the best candidates. This paper introduces a simple and robust fabrication of polymeric piezoelectric resonating MEMS mass sensors. The microfabrication technology replaces the traditional layer-by-layer micromachining techniques with laser micromachining to gain extra simplicity. Membrane-based resonant sensors have been fabricated to test the technology. Their characterization results have proven that the technology is robust with good reproducibility (around 2% batch level variations in the resonant frequency). Initial tests for the MEMS mass sensors’ sensitivity have indicated a sensitivity of 340 Hz/ng. The concept could be a starting point for developing low-cost MEMS sensing solutions for pandemic control, health examination, and pollution monitoring.

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Siddaiah, Nalluri, D. V. Rama Koti Reddy, Y. Bhavani Sankar, R. Anil Kumar, and Hossein Pakdast. "Modeling and Simulation of Triple Coupled Cantilever Sensor for Mass Sensing Applications." International Journal of Electrical and Computer Engineering (IJECE) 5, no. 3 (June 1, 2015): 403. http://dx.doi.org/10.11591/ijece.v5i3.pp403-408.

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Cantilever sensors have been the growing attention in last decades and their use as a mass detector. This work presents design, modeling and analysis of Triple coupled cantilever(TCC) sensor using MEMS simulation software Comsol Multiphysics with critical dimensions of 100μm length,20μm width and 2μm thickness. Simulations were performed based on finite element modeling techniques, where different resonant frequencies were observed for different modes of operation. It is also observed that the resonant frequency of the sensor decreases as some mass is applied on one particular cantilever. The various parameters greatly affecting the performance of TCC such as resonant frequency, dimensions, material and pressure or force applied on it.we also observed that while adding some mass on any one lateral cantilever, the resonant frequency of that respective mode reduced.

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Körner, Julia, Christopher F. Reiche, Bernd Büchner, and Thomas Mühl. "Theory and application of a novel co-resonant cantilever sensor." tm - Technisches Messen 85, no. 6 (June 1, 2018): 410–19. http://dx.doi.org/10.1515/teme-2017-0139.

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Abstract Dynamic cantilever sensors have many applications, for example in material’s research, biology, as gas and magnetic field sensors. The sensing principle is based on the effect that a force gradient or mass change applied to the cantilever alter its oscillatory state which can be related to the parameter of interest. In order to detect very small interactions, the cantilever needs to have a low stiffness which is commonly achieved by a reduction of the beam’s dimensions, especially its thickness. However, this is limited by the commonly employed laser-based detection of the cantilever’s oscillatory state. In this paper, we describe a novel co-resonant cantilever sensor concept which is based on the coupling and eigenfrequency matching of a micro- and a nanocantilever. This approach allows to access a large fraction of the nanocantilever’s high sensitivity while ensuring a reliable oscillation detection with standard laser-based methods at the microcantilever. Experiments in cantilever magnetometry and magnetic force microscopy demonstrate the immense potential of the sensor concept. Furthermore, applications are not limited to material’s research, instead this concept creates a cantilever sensor platform with many potential applications, for example as gas, mass or pressure sensors.

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Li, Lei, Yin-ping Zhang, Chi-cheng Ma, Can-chang Liu, and Bo Peng. "Anti-Symmetric Mode Vibration of Electrostatically Actuated Clamped–Clamped Microbeams for Mass Sensing." Micromachines 11, no. 1 (December 19, 2019): 12. http://dx.doi.org/10.3390/mi11010012.

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This paper details study of the anti-symmetric response to the symmetrical electrostatic excitation of a Micro-electro-mechanical-systems (MEMS) resonant mass sensor. Under higher order mode excitation, two nonlinear coupled flexural modes to describe MEMS mass sensors are obtained by using Hamilton’s principle and Galerkin method. Static analysis is introduced to investigate the effect of added mass on the natural frequency of the resonant sensor. Then, the perturbation method is applied to determine the response and stability of the system for small amplitude vibration. Through bifurcation analysis, the physical conditions of the anti-symmetric mode vibration are obtained. The corresponding stability analysis is carried out. Results show that the added mass can change the bifurcation behaviors of the anti-symmetric mode and affect the voltage and frequency of the bifurcation jump point. Typically, we propose a mass parameter identification method based on the dynamic jump motion of the anti-symmetric mode. Numerical studies are introduced to verify the validity of mass detection method. Finally, the influence of physical parameters on the sensitivity of mass sensor is analyzed. It is found that the DC voltage and mass adsorption position are critical to the sensitivity of the sensor. The results of this paper can be potentially useful in nonlinear mass sensors.

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Jia, Hao, Pengcheng Xu, and Xinxin Li. "Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid." Micromachines 12, no. 6 (May 31, 2021): 645. http://dx.doi.org/10.3390/mi12060645.

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Resonant micro/nanoelectromechanical systems (MEMS/NEMS) with on-chip integrated excitation and readout components, exhibit exquisite gravimetric sensitivities which have greatly advanced the bio/chemical sensor technologies in the past two decades. This paper reviews the development of integrated MEMS/NEMS resonators for bio/chemical sensing applications mainly in air and liquid. Different vibrational modes (bending, torsional, in-plane, and extensional modes) have been exploited to enhance the quality (Q) factors and mass sensing performance in viscous media. Such resonant mass sensors have shown great potential in detecting many kinds of trace analytes in gas and liquid phases, such as chemical vapors, volatile organic compounds, pollutant gases, bacteria, biomarkers, and DNA. The integrated MEMS/NEMS mass sensors will continuously push the detection limit of trace bio/chemical molecules and bring a better understanding of gas/nanomaterial interaction and molecular binding mechanisms.

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Naeli, Kianoush, and Oliver Brand. "Cancellation of environmental effects in resonant mass sensors based on resonance mode and effective mass." Review of Scientific Instruments 80, no. 6 (June 2009): 063903. http://dx.doi.org/10.1063/1.3143567.

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10

Körner, Julia. "Effective sensor properties and sensitivity considerations of a dynamic co-resonantly coupled cantilever sensor." Beilstein Journal of Nanotechnology 9 (September 25, 2018): 2546–60. http://dx.doi.org/10.3762/bjnano.9.237.

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Background: Co-resonant coupling of a micro- and a nanocantilever can be introduced to significantly enhance the sensitivity of dynamic-mode cantilever sensors while maintaining the ease of detection. Experimentally, a low-stiffness nanocantilever is coupled to an easy to read out microcantilever and the eigenfrequencies of both beams are brought close to one another. This results in a strong interplay between both beams and, hence, any interaction applied at the nanocantilever alters the oscillatory state of the coupled system as a whole and can be detected at the microcantilever. The amplitude response curve of the microcantilever exhibits two resonance peaks and their response to an interaction applied to the sensor depends on the properties of the individual beams and the degree of frequency matching. Consequently, while an individual cantilever is characterized by its eigenfrequency, spring constant, effective mass and quality factor, the resonance peaks of the co-resonantly coupled system can be described by effective properties which are a mixture of both subsystem’s characteristics. These effective properties give insight into the amount of sensitivity of the nanocantilever that can be accessed and, consequently, into the sensitivity gain associated with the co-resonance. In order to design sensors based on the co-resonant principle and predict their behaviour it is crucial to derive a description for these effective sensor properties. Results: By modeling the co-resonantly coupled system as a coupled harmonic oscillator and using electromechanical analogies, analytical expressions for the effective sensor properties have been derived and discussed. To illustrate the findings, numerical values for an exemplary system based on experimental sensor realizations have been employed. The results give insight into the complex interplay between the individual subsystem’s properties and the frequency matching, leading to a rather large parameter space for the co-resonant system’s effective properties. While the effective spring constant and effective mass mainly define the sensitivity of the coupled cantilever sensor, the effective quality factor primarily influences the detectability. Hence, a balance has to be found in optimizing both parameters in sensor design which becomes possible with the derived analytic expressions. Besides the description of effective sensor properties, it was studied how the thermal noise and, consequently, minimal detectable frequency shift for the co-resonantly coupled sensor represented by a coupled harmonic oscillator could be derived. Due to the complex nature of the coupled system’s transfer function and the required analysis, it is beyond the scope of this publication to present a full solution. Instead, a simplified approach to estimate the minimal detectable frequency shift for the co-resonant system based on the effective sensor properties is given. Conclusion: By establishing a theoretical description for the effective sensor properties of a co-resonantly coupled system, the design of such systems is facilitated as sensor parameters can easily be predicted and adapted for a desired use case. It allows to study the potential sensitivity (gain) and detectability capabilities before sensor fabrication in a fast and easy way, even for large parameter spaces. So far, such an analysis of a co-resonantly coupled sensor was only possible with numerical methods and even then only with very limited capability to include and understand the complex interplay between all contributions. The outlined calculation steps regarding the noise considerations in a coupled harmonic oscillator system can provide the basis for a thorough study of that question. Furthermore, in a broader scope, the investigations presented within this work contribute towards extending and completing the already established theoretical basics of this novel co-resonant sensor concept and open up new ways of studying the coupled system’s behaviour.

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Demir, Alper. "Adaptive Time-Resolved Mass Spectrometry With Nanomechanical Resonant Sensors." IEEE Sensors Journal 21, no. 24 (December 15, 2021): 27582–89. http://dx.doi.org/10.1109/jsen.2021.3127244.

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Wingqvist, G., V. Yantchev, and I. Katardjiev. "Mass sensitivity of multilayer thin film resonant BAW sensors." Sensors and Actuators A: Physical 148, no. 1 (November 2008): 88–95. http://dx.doi.org/10.1016/j.sna.2008.07.023.

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Zhang, Wenhua, and Kimberly L. Turner. "Frequency-tuning for control of parametrically resonant mass sensors." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 23, no. 4 (July 2005): 841–45. http://dx.doi.org/10.1116/1.1924717.

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14

Park, Kidong, Namjung Kim, Dallas T. Morisette, N. R. Aluru, and Rashid Bashir. "Resonant MEMS Mass Sensors for Measurement of Microdroplet Evaporation." Journal of Microelectromechanical Systems 21, no. 3 (June 2012): 702–11. http://dx.doi.org/10.1109/jmems.2012.2189359.

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Andò, Bruno, Salvatore Baglio, Ruben Crispino, and Vincenzo Marletta. "A High-Resolution Fully Inkjet Printed Resonant Mass Sensor." Engineering Proceedings 6, no. 1 (May 12, 2021): 9. http://dx.doi.org/10.3390/i3s2021dresden-10087.

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The rapid prototyping of low-cost sensors is assuming strategic importance in several application fields. In this paper, a fully inkjet printed mass sensor is proposed. The device consists of a poly-ethylene terephthalate (PET) cantilever beam, which is driven to its resonant mode by an electromagnetic actuation mechanism, implemented through the interaction between a current impulse flowing through a planar coil (inkjet printed on the PET beam), and a permanent magnet, facing the actuation coil. Target masses are positioned close to the beam end. The sensing methodology, based on the relationship between the beam first natural frequency and the target mass, is implemented through a strain gauge (inkjet printed across the fixed end of the cantilever). The resonant operating mode of the sensor confers intrinsic robustness against instabilities of the strain sensor structure (e.g., the residual stress of the cantilever beam), the target mass material and the magnet–coil distance. The latter indeed changes as a function of the target mass values. The friction-less actuation mode is another shortcoming of the sensor, as well as the low-cost feature arising from the adopted technology. As far as we know, the solution proposed is the first example of a low-cost fully printed mass sensor. The operating range of the device is 0–0.36 g while its resolution is in the order of 1.0 mg, thus addressing crucial application fields. A Q factor around 35 has been estimated, which confirms the suitable performances of the sensor in term of selectivity and resolution.

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PANCHAL, MITESH B., S. H. UPADHYAY, and S. P. HARSHA. "AN EFFICIENT FINITE ELEMENT MODEL FOR ANALYSIS OF SINGLE WALLED BORON NITRIDE NANOTUBE-BASED RESONANT NANOMECHANICAL SENSORS." Nano 08, no. 01 (February 2013): 1350011. http://dx.doi.org/10.1142/s1793292013500112.

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In this paper, the dynamics analysis of single walled boron nitride nanotubes (SWBNNT) as a resonant nanomechanical sensor by using the finite element method has been reported. Molecular structural mechanics-based finite element model (FEM) has been developed by using three-dimensional elastic beams and point masses, such that the proximity of the model to the actual atomic structure of nanotube is significantly retained. Different types of armchair layups of SWBNNTs are considered with cantilevered and bridged end constraints. By implementing the finite element simulation approach, the resonant frequency shift-based mass sensitivity analysis is performed for both types of end constraints for considered armchair form of the SWBNNTs with different aspect ratios. For both types of end constraint, continuum mechanics-based analytical formulations, considering effective wall thickness of nanotubes are used to validate the present FEM-based simulation approach. The intermediate landing position of the added mass is analyzed, considering variations in resonant frequency shifts of the different fundamental modes of vibrations for both types of end constraints. The FEM-based simulation results for both types of end constraints found in good agreement with the continuum mechanics-based analytical results for the aspect ratio of range of 9–15. The mass sensitivity limit of 10-1 zg is achieved for SWBNNT-based resonant nanomechanical sensors. The resonant frequency shift for higher-order fundamental vibrational modes become stable as the attached mass moves away from the fixed ends for particular magnitude of attached mass. The present finite element-based approach is found to be effectual in terms of dealing different atomic structures, boundary conditions and consideration of added mass to analyze the dynamic behavior of the SWBNNT-based resonant nanomechanical sensors.

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Nazemi, Haleh, Jenitha Antony Balasingam, Siddharth Swaminathan, Kenson Ambrose, Muhammad Umair Nathani, Tara Ahmadi, Yameema Babu Lopez, and Arezoo Emadi. "Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers—CMUT and PMUT." Sensors 20, no. 7 (April 3, 2020): 2010. http://dx.doi.org/10.3390/s20072010.

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Microelectromechanical system (MEMS)-based mass sensors are proposed as potential candidates for highly sensitive chemical and gas detection applications owing to their miniaturized structure, low power consumption, and ease of integration with readout circuits. This paper presents a new approach in developing micromachined mass sensors based on capacitive and piezoelectric transducer configurations for use in low concentration level gas detection in a complex environment. These micromachined sensors operate based on a shift in their center resonant frequencies. This shift is caused by a change in the sensor’s effective mass when exposed to the target gas molecules, which is then correlated to the gas concentration level. In this work, capacitive and piezoelectric-based micromachined sensors are investigated and their principle of operation, device structures and configurations, critical design parameters and their candidate fabrication techniques are discussed in detail.

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Suhak, Yuriy, Michal Schulz, Hendrik Wulfmeier, Ward L. Johnson, Andrei Sotnikov, Hagen Schmidt, Steffen Ganschow, Detlef Klimm, and Holger Fritze. "Langasite-Type Resonant Sensors for Harsh Environments." MRS Advances 1, no. 21 (2016): 1513–18. http://dx.doi.org/10.1557/adv.2016.109.

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ABSTRACTOperation of single crystalline Ca3TaGa3Si2O14 (CTGS) and La3Ga5SiO14 (LGS) bulk acoustic wave resonators is demonstrated up to 1270 °C and 1470 °C, respectively. The mass sensitivity of such devices is about 35 cm2 Hz/μg at 800 °C. Therefore, they are sensitive transducers suited to monitoring, for example, mass deposition processes at high temperatures. The electromechanical loss in CTGS is found to be significantly lower than that in LGS. Platinum coated CTGS samples show a remarkable long-term stability at 1000 °C in air. After an initial period of 300 h, the conductivity is found to remain nearly constant for at least 2400 h. Measurements of resonance frequency of CTGS for 1000 h show a qualitatively similar sequence, with an initial systematic increase followed by nearly constant values. In contrast, measurements on platinum-coated LGS plates show a conductivity decreasing by 15 % over a period of 5000 h.

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Fan, Shang-Chun, Yang Lu, Peng-Cheng Zhao, Fu-Tao Shi, Zhan-She Guo, and Wei-Wei Xing. "Research Progress of Graphene Nano-Electromechanical Resonant Sensors—A Review." Micromachines 13, no. 2 (January 31, 2022): 241. http://dx.doi.org/10.3390/mi13020241.

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Graphene nano-electromechanical resonant sensors have wide application in areas such as seawater desalination, new energy, biotechnology, and aerospace due to their small size, light weight, and high sensitivity and resolution. This review first introduces the physical and chemical properties of graphene and the research progress of four preparation processes of graphene. Next, the principle prototype of graphene resonators is analyzed, and three main methods for analyzing the vibration characteristics of a graphene resonant sheet are described: molecular structural mechanics, non-local elastic theory and molecular dynamics. Then, this paper reviews research on graphene resonator preparation, discussing the working mechanism and research status of the development of graphene resonant mass sensors, pressure sensors and inertial sensors. Finally, the difficulties in developing graphene nano-electromechanical resonant sensors are outlined and the future trend of these sensors is described.

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Li, Lei, Hanbiao Liu, Mingyu Shao, and Chicheng Ma. "A Novel Frequency Stabilization Approach for Mass Detection in Nonlinear Mechanically Coupled Resonant Sensors." Micromachines 12, no. 2 (February 11, 2021): 178. http://dx.doi.org/10.3390/mi12020178.

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Frequency stabilization can overcome the dependence of resonance frequency on amplitude in nonlinear microelectromechanical systems, which is potentially useful in nonlinear mass sensor. In this paper, the physical conditions for frequency stabilization are presented theoretically, and the influence of system parameters on frequency stabilization is analyzed. Firstly, a nonlinear mechanically coupled resonant structure is designed with a nonlinear force composed of a pair of bias voltages and an alternating current (AC) harmonic load. We study coupled-mode vibration and derive the expression of resonance frequency in the nonlinear regime by utilizing perturbation and bifurcation analysis. It is found that improving the quality factor of the system is crucial to realize the frequency stabilization. Typically, stochastic dynamic equation is introduced to prove that the coupled resonant structure can overcome the influence of voltage fluctuation on resonance frequency and improve the robustness of the sensor. In addition, a novel parameter identification method is proposed by using frequency stabilization and bifurcation jumping, which effectively avoids resonance frequency shifts caused by driving voltage. Finally, numerical studies are introduced to verify the mass detection method. The results in this paper can be used to guide the design of a nonlinear sensor.

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Guo, Chuanrui, Liang Fan, and Genda Chen. "Corrosion-Induced Mass Loss Measurement under Strain Conditions through Gr/AgNW-Based, Fe-C Coated LPFG Sensors." Sensors 20, no. 6 (March 13, 2020): 1598. http://dx.doi.org/10.3390/s20061598.

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In this study, graphene/silver nanowire (Gr/AgNW)-based, Fe-C coated long period fiber gratings (LPFG) sensors were tested up to 72 hours in 3.5 w.t% NaCl solution for corrosion-induced mass loss measurement under four strain levels: 0, 500, 1000 and 1500 µε. The crack and interfacial bonding behaviors of laminate Fe-C and Gr/AgNW layer structures were characterized using Scanning Electron Microscopy (SEM) and electrical resistance measurement. Both optical transmission spectra and electrical impedance spectroscopy (EIS) data were simultaneously measured from each sensor. Under increasing strains, transverse cracks appeared first and were followed by longitudinal cracks on the laminate layer structures. The spacing of transverse cracks and the length of longitudinal cracks were determined by the bond strength at the weak Fe-C and Gr/AgNW interface. During corrosion tests, the shift in resonant wavelength of the Fe-C coated LPFG sensors resulted from the effects of the Fe-C layer thinning and the NaCl solution penetration through cracks on the evanescent field surrounding the LPFG sensors. Compared with the zero-strained sensor, the strain-induced cracks on the laminate layer structures initially increased and then decreased the shift in resonant wavelength in two main stages of the Fe-C corrosion process. In each corrosion stage, the Fe-C mass loss was linearly related to the shift in resonant wavelength under zero strain and with the applied strain taken into account in general cases. The general correlation equation was validated at 700 and 1200 µε to a maximum error of 2.5% in comparison with 46.5% from the zero-strain correlation equation.

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Zhao, Hong Yuan, Dai Hua Zhang, Wei Pang, and Hao Zhang. "Ultrahigh-Resolution MEMS Humidity Sensing Elements Based on Film Bulk Acoustic Wave Resonators." Key Engineering Materials 562-565 (July 2013): 1257–62. http://dx.doi.org/10.4028/www.scientific.net/kem.562-565.1257.

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A high-resolution humidity sensor based on MEMS FBAR with spin-coated PVA thin film is reported. The sensors exhibit very high sensitivity to water vapor and are able to detect down to 0.08 % change in relative humidity by monitoring the shift in series resonant frequency of the FBARs. The integration of these devices with CMOS oscillating circuits and RF front-end chips will create great potential of FBAR based mass sensors in a wide variety of applications in chemical and biological sensing.

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Voglhuber-Brunnmaier, Thomas, and Bernhard Jakoby. "Higher-Order Models for Resonant Viscosity and Mass-Density Sensors." Sensors 20, no. 15 (July 31, 2020): 4279. http://dx.doi.org/10.3390/s20154279.

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Advanced fluid models relating viscosity and density to resonance frequency and quality factor of vibrating structures immersed in fluids are presented. The numerous established models which are ultimately all based on the same approximation are refined, such that the measurement range for viscosity can be extended. Based on the simple case of a vibrating cylinder and dimensional analysis, general models for arbitrary order of approximation are derived. Furthermore, methods for model parameter calibration and the inversion of the models to determine viscosity and/or density from measured resonance parameters are shown. One of the two presented fluid models is a viscosity-only model, where the parameters of it can be calibrated without knowledge of the fluid density. The models are demonstrated for a tuning fork-based commercial instrument, where maximum deviations between measured and reference viscosities of approximately ±0.5% in the viscosity range from 1.3 to 243 mPas could be achieved. It is demonstrated that these results show a clear improvement over the existing models.

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Guan, Shenheng. "Frequency Encoding of Resonant Mass Sensors for Chemical Vapor Detection." Analytical Chemistry 75, no. 17 (September 2003): 4551–57. http://dx.doi.org/10.1021/ac034228r.

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Heinisch, M., T. Voglhuber-Brunnmaier, E. K. Reichel, I. Dufour, and B. Jakoby. "Reduced order models for resonant viscosity and mass density sensors." Sensors and Actuators A: Physical 220 (December 2014): 76–84. http://dx.doi.org/10.1016/j.sna.2014.09.006.

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Luschi, Luca, and Francesco Pieri. "Periodically Structured Lamé Resonators as High Sensitivity Resonant Mass Sensors." Procedia Engineering 87 (2014): 228–31. http://dx.doi.org/10.1016/j.proeng.2014.11.628.

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Stachiv and Gan. "Hybrid Shape Memory Alloy-Based Nanomechanical Resonators for Ultrathin Film Elastic Properties Determination and Heavy Mass Spectrometry." Materials 12, no. 21 (October 31, 2019): 3593. http://dx.doi.org/10.3390/ma12213593.

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Micro-/nanomechanical resonators are often used in material science to measure the elastic properties of ultrathin films or mass spectrometry to estimate the mass of various chemical and biological molecules. Measurements with these sensors utilize changes in the resonant frequency of the resonator exposed to an investigated quantity. Their sensitivities are, therefore, determined by the resonant frequency. The higher resonant frequency and, correspondingly, higher quality factor (Q-factor) yield higher sensitivity. In solution, the resonant frequency (Q-factor) decreases causing a significant lowering of the achievable sensitivity. Hence, the nanomechanical resonator-based sensors mainly operate in a vacuum. Identification by nanomechanical resonator also requires an additional reference measurement on the identical unloaded resonator making experiments, due to limiting achievable accuracies in current nanofabrication processes, yet challenging. In addition, the mass spectrometry by nanomechanical resonator can be routinely performed for light analytes (i.e., analyte is modelled as a point particle). For heavy analytes such as bacteria clumps neglecting their stiffness result in a significant underestimation of determined mass values. In this work, we demonstrate the extraordinary capability of hybrid shape memory alloy (SMA)-based nanomechanical resonators to i) notably tune the resonant frequencies and improve Q-factor of the resonator immersed in fluid, ii) determine the Young’s (shear) modulus of prepared ultrathin film only from frequency response of the resonator with sputtered film, and iii) perform heavy analyte mass spectrometry by monitoring shift in frequency of just a single vibrational mode. The procedures required to estimate the Young’s (shear) modulus of ultrathin film and the heavy analyte mass from observed changes in the resonant frequency caused by a phase transformation in SMA are developed and, afterward, validated using numerical simulations. The present results demonstrate the outstanding potential and capability of high frequency operating hybrid SMA-based nanomechanical resonators in sensing applications that can be rarely achieved by current nanomechanical resonator-based sensors.

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Cai, Xianfa, and Lizhong Xu. "A Piezoelectrically Excited ZnO Nanowire Mass Sensor with Closed-Loop Detection at Room Temperature." Micromachines 13, no. 12 (December 16, 2022): 2242. http://dx.doi.org/10.3390/mi13122242.

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One-dimensional nanobeam mass sensors offer an unprecedented ability to measure tiny masses or even the mass of individual molecules or atoms, enabling many interesting applications in the fields of mass spectrometry and atomic physics. However, current nano-beam mass sensors suffer from poor real-time test performance and high environment requirements. This paper proposes a piezoelectrically excited ZnO nanowire (NW) mass sensor with closed-loop detection at room temperature to break this limitation. It is detected that the designed piezo-excited ZnO NW could operate at room temperature with a resonant frequency of 417.35 MHz, a quality factor of 3010, a mass sensitivity of −8.1 Hz/zg, and a resolution of 192 zg. The multi-field coupling dynamic model of ZnO NW mass sensor under piezoelectric excitation was established and solved. The nonlinear amplitude-frequency characteristic formula, frequency formula, modal function, sensitivity curve, and linear operating interval were obtained. The ZnO NW mass sensor was fabricated by a top-down method and its response to ethanol gas molecules was tested at room temperature. Experiments show that the sensor has high sensitivity, good closed-loop tracking performance, and high linearity, which provides great potential for the detection of biochemical reaction process of biological particles based on mechanics.

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Fernández-Sáez, J., A. Morassi, L. Rubio, and R. Zaera. "Transverse free vibration of resonant nanoplate mass sensors: Identification of an attached point mass." International Journal of Mechanical Sciences 150 (January 2019): 217–25. http://dx.doi.org/10.1016/j.ijmecsci.2018.09.055.

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Krakover, Naftaly, B. Robert Ilic, and Slava Krylov. "Micromechanical resonant cantilever sensors actuated by fringing electrostatic fields." Journal of Micromechanics and Microengineering 32, no. 5 (March 17, 2022): 054001. http://dx.doi.org/10.1088/1361-6439/ac5a61.

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Abstract We report on the architecture and operational principle of a resonant cantilever-type displacement sensor. The device is actuated electrostatically by a side electrode that is coplanar with the cantilever and by a gap-closing electrode positioned underneath the beam. The unique electrode geometry combined with the appropriate actuating voltages allows positioning of the cantilever in close proximity to the bistability threshold, where the frequency sensitivity to the electrode displacement is enhanced. Using a reduced order model backed by numerical simulations, the dependencies of the device frequency on the beam’s deflections and the actuation voltages were mapped. We show wide-range tunability that spans a range between softening and hardening behavior. We demonstrate displacement sensing using fabricated single crystal silicon ≈2000 µm long, ≈5 µm thick cantilevers. When compared to a resonant cantilever sensor actuated solely by a gap-closing electrode, measurements from our fringing field actuated devices show a four times higher sensitivity of ≈98 Hz µm−1. The suggested approach may find applications in a broad range of micro and potentially nano-scale applications including resonant inertial, force, mass and bio-sensors.

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Heidari, Amir, Yong Jin Yoon, Woo Tae Park, and Ming Lin Julius Tsai. "Developing High Sensitivity Biomass Sensor Using Lamé Mode Square Resonator." Advanced Materials Research 254 (May 2011): 46–49. http://dx.doi.org/10.4028/www.scientific.net/amr.254.46.

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In this paper, a new cost-effective and reliable high performance biomass sensor is presented. Compared to previous biomass sensors, the developed sensor shows a potential to detect smaller biological agents by producing a high quality output signal at atmospheric pressure. The biomass sensor is a micro machined silicon squared plate that is excited in the Lamé bulk acoustic resonant mode at a frequency of 37.8 MHz, with quality factor of 10,000 and the mass sensitivity of -400 Hz/pg.

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Ma, Long Fei, Guo Yin Huang, Ming Yuan Guan, Yong Huang, Guo Wei Shi, Jin Tao Liang, and Gui Yin Li. "A Silicon Resonant Micro-Cantilever Biosensor with Closed-Loop Self-Excitation System for Biomacromolecular Detection." Advanced Materials Research 1030-1032 (September 2014): 2320–25. http://dx.doi.org/10.4028/www.scientific.net/amr.1030-1032.2320.

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A silicon resonant micro-cantilever biosensor was introduced to detect biomacromolecular based on the relationship between the cantilever resonant frequency and the cantilever equivalent mass. A closed-loop self-excitation system was designed to acquire the resonant frequency of micro-cantilever. Two groups of resonant micro-cantilever sensors with different resonant frequencies of 18.192 kHz and 17.688 kHz respectively were tested. The result showed that the detection system can automatically search the resonant frequency of micro-cantilever and locked quickly. To demonstrate the feasibility of this approach, human immunoglobulin G(IgG) as model target biomacromolecular was employed, different concentration of IgG was detected by the resonant micro-cantilever sensors, the mass effect of micro-cantilever was adept and the micro-cantilever was drive by closed-loop circuit. The linearity of micro-cantilever biosensor was very well and the experimental result of sensitivity of micro-cantilever biosensor was about 6.6×106. All the results showed that sensitivity of the presented immunoassay significantly increased by one-order of magnitude and offered great application promises in providing a sensitive, specific, and potent method for real-time detection of biological detection.

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Jiang, Chengming, Qikun Li, Jijie Huang, Sheng Bi, Ruonan Ji, and Qinglei Guo. "Single-Layer MoS2 Mechanical Resonant Piezo-Sensors with High Mass Sensitivity." ACS Applied Materials & Interfaces 12, no. 37 (August 19, 2020): 41991–98. http://dx.doi.org/10.1021/acsami.0c11913.

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Tu, Hongen, Qinglong Zheng, and Yong Xu. "Preliminary Study of Resonant Mass Sensors Based on Asymmetrically Gapped Cantilevers." IEEE Sensors Journal 11, no. 5 (May 2011): 1107–11. http://dx.doi.org/10.1109/jsen.2010.2083650.

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Xu, Feng, Yuliang Wei, Shiyuan Bian, Huanqin Wang, Da-Ren Chen, and Deyi Kong. "Simulation-Based Design and Optimization of Rectangular Micro-Cantilever-Based Aerosols Mass Sensor." Sensors 20, no. 3 (January 22, 2020): 626. http://dx.doi.org/10.3390/s20030626.

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Micro-Cantilever (MCL) is a thin film structure that is applied for aerosol particle mass sensing. Several modifications to the rectangular MCL (length-to-width ratio, slots at the anchor, serrations at its side edges) are made to deduce the role and influence of the shape of rectangular MCL-based aerosol mass sensors and reduce gas damping. A finite element fluid-structure interaction model was used to investigate the performance of MCL. It is found that (I) the mass sensitivity and quality factor decline with the increasing of length-to-width ratio which alters the resonant frequency of the MCL. The optimum conditions, including the length-to-width ratio (σlw = 5) and resonant frequency (f0 = 540.7 kHz) of the MCL, are obtained with the constant surface area (S = 45,000 μm2) in the frequency domain ranging from 0 to 600 kHz. (II) The slots can enhance the read-out signal and bring a small Q factor drop. (III) The edge serrations on MCL significantly reduce the gas damping. The results provide a reference for the design of aerosol mass sensor, which makes it possible to develop aerosol mass sensor with high frequency, sensitivity, and quality.

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Areejit, Suwilai, Anurak Jansri, and Pitikhate Sooraksa. "Force Sensor and its Application to Tuning Fork Response Measurement." Advanced Materials Research 804 (September 2013): 222–27. http://dx.doi.org/10.4028/www.scientific.net/amr.804.222.

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Generally, force measurement of nanoscale material widely employs a quartz tuning fork which is resonant mechanical sensors on 32.768 kHz resonance frequency and is powerful tools. But, this paper designs the sensor by using tuning fork on 3 kHz and modifies the tuning fork by a tiny pin adhesive into the end of prong. In experiment, measurements of electrical signal from piezoelectric are study of load-mass effect and pin position. 2 touching techniques are considered: a shear-force type and a tapping mode type with highly position movement system. Silicone rubber, vinyl eraser and hydrogel are elastic material for testing. Results show that both weight and position of pin is significant influencer for resonance frequency and quality factor of sensor. Finally, the tuning fork response experimentation shown this method can be applied to material classification.

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Mirza, Asif, Nor Hisham Hamid, Mohd Haris Md Khir, Khalid Ashraf, M. T. Jan, and Kashif Riaz. "Design, Modeling and Simulation of CMOS-MEMS Piezoresistive Cantilever Based Carbon Dioxide Gas Sensor for Capnometry." Advanced Materials Research 403-408 (November 2011): 3769–74. http://dx.doi.org/10.4028/www.scientific.net/amr.403-408.3769.

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This paper reports design, modeling and simulation of MEMS based sensor working in dynamic mode with fully differential piezoresistive sensing for monitoring the concentration of exhaled carbon dioxide (CO2) gas in human breath called capnometer. CO2 being a very important biomarker, it is desirable to extend the scope of its monitoring beyond clinical use to home and ambulatory services. Currently the scope of capnometers and its adaption is limited by high cost, large size and high power consumption of conventional capnometers . In recent years, MEMS based micro resonant sensors have received considerable attention due to their potential as a platform for the development of many novel physical, chemical, and biological sensors with small size, low cost and low power requirements. The sensor is designed using 0.35 micron CMOS technology. CoventorWare and MATLAB have been used as simulation software. According to the developed model and simulation results the resonator has resonant frequency 57393 Hz and mass sensitivity of 3.2 Hz/ng. The results show that the longitudinal relative change of resistance is 0.24%/µm while the transverse relative change of resistance is -0.03%/µm.

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Zhang, Hemin, Aojie Quan, Chen Wang, Chenxi Wang, Linlin Wang, and Michael Kraft. "On the Dynamic Range and Resolution of Thermal-Piezoresistive Resonant Mass Sensors." Journal of Microelectromechanical Systems 31, no. 2 (April 2022): 180–82. http://dx.doi.org/10.1109/jmems.2022.3141830.

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Zielinski, Arthur T., Nicole E. Weckman, Roderic L. Jones, Markus Kalberer, and Ashwin A. Seshia. "Extending the Lifetime of Resonant Atmospheric Particulate Mass Sensors With Solvent Rinses." IEEE Sensors Letters 1, no. 5 (October 2017): 1–4. http://dx.doi.org/10.1109/lsens.2017.2734569.

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Chao Zhang, S. Schranz, R. Lucklum, and P. Hauptmann. "Mass effects of quartz resonant sensors with different surface microstructures in liquids." IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 45, no. 5 (September 1998): 1204–10. http://dx.doi.org/10.1109/58.726444.

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Zhao, Jian, Xin Wen, Yu Huang, and Pengbo Liu. "Piezoelectric circuitry tailoring for resonant mass sensors providing ultra-high impedance sensitivity." Sensors and Actuators A: Physical 285 (January 2019): 275–82. http://dx.doi.org/10.1016/j.sna.2018.11.032.

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Wasisto, Hutomo Suryo, Stephan Merzsch, Andrej Stranz, Andreas Waag, Erik Uhde, Tunga Salthammer, and Erwin Peiner. "Silicon resonant nanopillar sensors for airborne titanium dioxide engineered nanoparticle mass detection." Sensors and Actuators B: Chemical 189 (December 2013): 146–56. http://dx.doi.org/10.1016/j.snb.2013.02.053.

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Zhao, Xueli, Zinan Zhao, Bin Wang, Zhenghua Qian, and Tingfeng Ma. "The Design of a Frame-Like ZnO FBAR Sensor for Achieving Uniform Mass Sensitivity Distributions." Sensors 20, no. 8 (April 23, 2020): 2408. http://dx.doi.org/10.3390/s20082408.

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In this paper, an infinite circular ZnO thin film bulk acoustic resonator (FBAR) with a frame-like electrode operating at the thickness-extensional (TE) mode is studied. Two-dimensional scalar differential equations established for the problem in the Cartesian coordinate system are successfully solved by transforming them into normal Bessel equations and modified Bessel equations in the cylindrical coordinate system. Resonant frequencies and vibration distributions are obtained for this frame-like FBAR sensor. A nearly uniform mass sensitivity distribution in the active area is achieved by designing proper electrode size and mass ratio of the driving electrode to the ZnO film. Numerical results show that compared with the reported ring electrode FBAR sensor, the novel frame-like electrode FBAR can achieve a maximum optimization ratio (up to 97.90%) on the uniformity of the mass sensitivity distribution in the active area under the same structural parameters, which is also higher than the optimization ratio 77.63% obtained by the reported double-ring electrode design. Moreover, the mechanism to achieve a very uniform mass sensitivity distribution in the active area by the frame-like electrode is explained in detail according to dispersion curves. Namely, when the resonant frequency of the FBAR sensor is close to the cut-off frequency of the active region in the dispersion curve, the mass sensitivity distribution is nearly uniform. These conclusions provide a theoretical guidance for the design and optimization of ZnO FBAR mass sensors with high performance.

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Yan, T., B. E. Jones, R. T. Rakowski, M. J. Tudor, S. P. Beeby, and Nicholas M. White. "Development of Metallic Digital Strain Gauges." Applied Mechanics and Materials 1-2 (September 2004): 179–84. http://dx.doi.org/10.4028/www.scientific.net/amm.1-2.179.

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A joint Brunel-Southampton Universities’ research team has developed digital strain gauges based on a metallic triple-beam resonator structure with thick-film piezoelectric sensor elements. The resonator, an oscillating structure vibrating at resonance, is designed such that its resonant frequency is a function of the measurand. The resonator substrate was fabricated by a double-sided photochemical etching technique and the thick-film piezoelectric elements were deposited by a standard screen-printing process. The new metallic digital strain gauges can be used on stiff structures, have high overload capacities, low power consumption, frequency output for digital processing, and offer prospects for wireless-batteryless operation. The device can be easily mass-produced at low cost for use in a wide range of measuring systems, e.g. load cells, weighing machines, torque transducers and pressure sensors.

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Kim, Sang-Jin, Takahito Ono, and Masayoshi Esashi. "Study on the noise of silicon capacitive resonant mass sensors in ambient atmosphere." Journal of Applied Physics 102, no. 10 (November 15, 2007): 104304. http://dx.doi.org/10.1063/1.2811911.

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Ferrari, M., M. Baù, E. Tonoli, and V. Ferrari. "Piezoelectric resonant sensors with contactless interrogation for mass-sensitive and acoustic-load detection." Sensors and Actuators A: Physical 202 (November 2013): 100–105. http://dx.doi.org/10.1016/j.sna.2013.04.029.

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Tonoli, E., M. Baù, M. Ferrari, and V. Ferrari. "Piezoelectric Resonant Sensors with Contactless Interrogation for Mass-Sensitive and Acoustic-Load Detection." Procedia Engineering 47 (2012): 442–45. http://dx.doi.org/10.1016/j.proeng.2012.09.179.

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Stachiv, Ivo, David Vokoun, and Yeau-Ren Jeng. "Measurement of Young's modulus and volumetric mass density/thickness of ultrathin films utilizing resonant based mass sensors." Applied Physics Letters 104, no. 8 (February 24, 2014): 083102. http://dx.doi.org/10.1063/1.4866417.

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Scheiner, Benedict, Florian Probst, Fabian Michler, Robert Weigel, Alexander Koelpin, and Fabian Lurz. "Miniaturized Hybrid Frequency Reader for Contactless Measurement Scenarios Using Resonant Surface Acoustic Wave Sensors." Sensors 21, no. 7 (March 29, 2021): 2367. http://dx.doi.org/10.3390/s21072367.

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Due to higher automation and predictive maintenance, it becomes more and more important to acquire as many data as possible during industrial processes. However, many scenarios require remote sensing since either moving parts would result in wear and tear of cables or harsh environments prevent a wired connection. In the last few years, resonant surface acoustic wave (SAW) sensors have promised the possibility to be interrogable wirelessly which showed very good results in first studies. Therefore, the sensor’s resonance frequency shifts due to a changed measurand and thus has to be determined. However, up to now frequency reader systems showed several drawbacks like high costs or insufficient accuracy that blocked the way for a widespread usage of this approach in the mass market. Hence, this article presents a miniaturized and low cost six-port based frequency reader for SAW resonators in the 2.45 GHz ISM band that does not require an external calculation unit. It is shown that it can be either used to evaluate the scenario or measure the frequency directly with an amplitude or phase measurement, respectively. The performance of the system, including the hardware and embedded software, is finally shown by wired and contactless torque measurements.

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Anwar Zainuddin, Ahmad, Anis Nurashikin Nordin, Rosminazuin Ab. Rahim, Aliza Aini Md. Ralib, Sheroz Khan, Cyril Guines, Matthieu Chatras, and Arnaud Pothier. "Verification of Quartz Crystal Microbalance Array using Vector Network Analyzer and OpenQCM." Indonesian Journal of Electrical Engineering and Computer Science 10, no. 1 (April 1, 2018): 84. http://dx.doi.org/10.11591/ijeecs.v10.i1.pp84-93.

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Quartz Crystal Microbalance (QCM) is a device that allows non-destructive measurements of r in situ reaction activities. In this article, an array comprising of six 3MHz QCM sensors in an array were characterized using a vector network analyzer and OpenQCM, a portable measuring instrument that measures change in resonance frequency. Measurements of S21 transmission characteristics using the vector network analyzer provides the resonance frequency and can also be used to derive the RLC equivalent electrical circuit values of a resonant two-port network based on the Butterworth-Van Dyke model. In this work, Rm, Lm, Cm and Co were obtained via curve-fitting of the measurement results to the simulated results. Measurements were done in triplicates to verify reproducibility for all 6 sensors. For comparison, measurements were also done using a portable, open-source instrument, OpenQCM. The OpenQCM instrument directly measures changes in resonance frequencies, making it ideal for biosensing experiments, which correlate changes in mass with changes in resonance frequencies. Comparison between resonance frequency measurements using VNA and OpenQCM exhibit low percentage difference 0.2%. This QCM sensor array has the potential of conducting real-time, point-of-care analyses for detection of biological molecules.

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Journal articles on the topic 'Resonant Mass Sensors'

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