Academic literature on the topic 'Resist film removal'
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Journal articles on the topic "Resist film removal"
Mercadier, Thomas, Philippe Garnier, Virginie Loup, Raluca Tiron, Song Zhang, Ayumi Higuchi, and Naser Belmiloud. "Evaluation and Optimization of Particle Removal with a Resist Peeling Method." Solid State Phenomena 346 (August 14, 2023): 268–74. http://dx.doi.org/10.4028/p-art4vs.
Full textSobhian, Mani. "The Role of Extreme Agitation in Accelerating the Removal Rate of Advanced Packaging Photoresists." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2013, DPC (January 1, 2013): 001389–416. http://dx.doi.org/10.4071/2013dpc-wp15.
Full textHollenbeck, J. L., and R. C. Buchanan. "Oxide thin films for nanometer scale electron beam lithography." Journal of Materials Research 5, no. 5 (May 1990): 1058–72. http://dx.doi.org/10.1557/jmr.1990.1058.
Full textLee, Jong Han, Sang Won Shin, Young Suk Kwon, In Hoon Choi, Chung Nam Whang, Tae Gon Kim, and Jong Han Song. "Magnetic Patterning of the Ni/Cu Thin Film by 40 keV O Ion Irradiation." Solid State Phenomena 124-126 (June 2007): 867–70. http://dx.doi.org/10.4028/www.scientific.net/ssp.124-126.867.
Full textJimbo, Sadayuki, Kouji Shimomura, Tokuhisa Ohiwa, Makoto Sekine, Haruki Mori, Keiji Horioka, and Haruo Okano. "Resist and Sidewall Film Removal after Al Reactive Ion Etching (RIE) Employing F+H2O Downstream Ashing." Japanese Journal of Applied Physics 32, Part 1, No. 6B (June 30, 1993): 3045–50. http://dx.doi.org/10.1143/jjap.32.3045.
Full textMikalsen Martinussen, Simen, Raimond N. Frentrop, Meindert Dijkstra, and Sonia Maria Garcia-Blanco. "Redeposition-Free Deep Etching in Small KY(WO4)2 Samples." Micromachines 11, no. 12 (November 24, 2020): 1033. http://dx.doi.org/10.3390/mi11121033.
Full textTomita, Hiroshi, Minako Inukai, Kaori Umezawa, and Li Nan Ji. "Direct Observation of Single Bubble Cavitation Damage for MHz Cleaning." Solid State Phenomena 145-146 (January 2009): 3–6. http://dx.doi.org/10.4028/www.scientific.net/ssp.145-146.3.
Full textMuangtong, Piyanut, Righdan Mohsen Namus, and Russell Goodall. "Improved Tribocorrosion Resistance by Addition of Sn to CrFeCoNi High Entropy Alloy." Metals 11, no. 1 (December 24, 2020): 13. http://dx.doi.org/10.3390/met11010013.
Full textFarahani, Emad, Andre C. Liberati, Amirhossein Mahdavi, Pantcho Stoyanov, Christian Moreau, and Ali Dolatabadi. "Ice Adhesion Evaluation of PTFE Solid Lubricant Film Applied on TiO2 Coatings." Coatings 13, no. 6 (June 6, 2023): 1049. http://dx.doi.org/10.3390/coatings13061049.
Full textLimcharoen, Alonggot, Pichet Limsuwan, Chupong Pakpum, and Krisda Siangchaew. "Characterisation of C–F Polymer Film Formation on the Air-Bearing Surface Etched Sidewall of Fluorine-Based Plasma Interacting with AL2O3–TiC Substrate." Journal of Nanomaterials 2013 (2013): 1–6. http://dx.doi.org/10.1155/2013/851489.
Full textDissertations / Theses on the topic "Resist film removal"
Mercadier, Thomas. "Retrait particulaire par étalement et retrait d’un film de résine." Electronic Thesis or Diss., Université Grenoble Alpes, 2023. http://www.theses.fr/2023GRALT095.
Full textEfficient particle contamination removal is crucial in maximizing yield within the microelectronics industry. However, conventional particle removal techniques may become impractical when dealing with complex and fragile surface structures, as their application can potentially cause physical damage. This challenge has led to the development of new cleaning processes based on innovative concepts, such as a resist film lift off approach. The resist film lift-off leads to the particle removal due to the particle surface bonded to the resist. One of these particle removal processes is studied in this manuscript. In this process, the resist film is composed of two immiscible organic polymers. The process consists of the resist spin-coating followed by a diluted ammonia dispense at room temperature. Thanks to the latter chemical step, one of the polymers is dissolved inducing the delamination and lift-off of the remaining polymer with drag and lift forces.This manuscript sheds light on the critical role of the organization of two immiscible polymers within the resist film in the context of film lift-off. The organization of these polymers was shown to depend on the substrate surface energy through Tof SIMS analysis. For instance, on a hydrophilic substrate, the soluble polymer exhibits a pronounced affinity for the interface. Such an organization on hydrophilic surface minimizes the interfacial area that needs to be delaminated during the resist removal step. Consequently, the effectiveness of ammonia-based film removal relies on the substrate’s surface energy and is only achievable if the substrate surface energy is below 66mN/m.This manuscript provides valuable insights into the modification of the polymers’ organization. The tuning of some parameters from the resist formulation as the blend ratio or the resist thickness and the addition of a bake after the coating are shown to modify this surface energy peeling limit. Additionally, a Particle Removal Efficiency study was conducted on blanket wafers to determine and understand how these three parameters influence cleaning efficiency. It has led to the optimization of process efficiency. This optimized process efficiency was evaluated on structured surfaces. The results showcased its capability to efficiently remove particles while preserving the integrity of delicate structures.This PhD project has contributed to broadening the comprehension of particle removal using a resist peeling process. Moreover, it has demonstrated the potential application of this method in an industrial context
Massa, Márcia Gomes. "Avaliação de restaurações adesivas bulk fill em molares decíduos após remoção seletiva de tecido cariado : ensaio clínico controlado randomizado." reponame:Biblioteca Digital de Teses e Dissertações da UFRGS, 2018. http://hdl.handle.net/10183/179728.
Full textThe purpose of this study was to evaluate the clinical performance of bulk-fill restorations in primary molars submitted to SCR (selective caries removal) at 12 months of follow-up. 62 (average age of 5.9 years ± 1.74) were included with at least one molar with active cavitated lesion in deep dentin.144 primary molars were randomly divided into 2 groups of restorative material: Filtek Bulk Fill Resin (test group = FBF) or Vitremer (control group = RMGIC). Restorative procedures were performed by 2 specialists in pediatric dentistry trained to perform the technique and calibrated to evaluate the diagnosis of lesion activity and restoration performance. A third examiner also trained, calibrated and contemplating the principle of blinding, evaluated the radiographs during the follow-up period. The criteria evaluated to determine the clinical and radiographic success of the SCR were: absence of spontaneous pain and / or sensitivity to pressure, absence of signs of irreversible pulpitis, abnormal mobility incompatible with the period of root resorption. Restoration performance was categorized in each group following the FDI criteria for marginal staining, anatomical form, fracture of material and retention, marginal adaptation and recurrence of caries, and the failure was recorded. The teeth were reassessed clinically and radiographically regarding the treatment and performance of the restoration at 6 and 12 months. Sociodemographic characteristics were recorded in the baseline and clinical characteristics such as DMFT index, visible plaque index and gingival bleeding index were recorded during the follow - up. The data were analyzed considering the type of restoration, symptoms, number of faces involved, tooth type, operator experience and success rate of the restorations. To determine the success rates of the restorations, survival curves were generated with the Kaplan-Meyer estimator for each group evaluated. The Cox regression model with shared failures was performed to assess differences in survival rates of restorations according to treatment and clinical and demographic characteristics of the sample. Results: Success rate of restorations was 83.9% (85.9% for FBF and 81.9% for RMGIC, p=0.675). There were no differences in the risk of failure according to the material restoration. Of the 23 failures, three failures were exclusive pulp and one pulp and restorative, and 100% of the failure were to due to fracture of material. Occlusoproximal restorations demonstrated the lowest success rate, increases 4.12 times the probability of having a restorative failure compared to occlusal restoration. Patients with "active caries" profile were associated with more failures than "controlled caries" patients. The degree of operator experience showed significant difference, and the less experienced operator had more restorative failures. Bulk Fill composite restorations performed in molar primary teeth after selective caries removal showed satisfactory survival of 85.9% after 12 months of follow-up.
Book chapters on the topic "Resist film removal"
Yokota, T., T. Hashimoto, M. Otsuka, M. Nobutoki, and T. Ueki. "Twist Compression Welding of Aluminum." In Encyclopedia of Aluminum and Its Alloys. Boca Raton: CRC Press, 2019. http://dx.doi.org/10.1201/9781351045636-140000446.
Full textSuslov, A. A. "Metallic Coatings for Brazing Aluminum Alloys." In Encyclopedia of Aluminum and Its Alloys. Boca Raton: CRC Press, 2019. http://dx.doi.org/10.1201/9781351045636-140000447.
Full textBroomfield-McHugh, Dominic. "“Hard to Replace”." In The Oxford Handbook of the Hollywood Musical, 368—C16.N43. Oxford University Press, 2022. http://dx.doi.org/10.1093/oxfordhb/9780197503423.013.22.
Full textJönsson, Alexander, Giacomo Carlo Ferdinando Aliboni, Christina Windmark, and Jan-Eric Ståhl. "Strategies for Effective Chip Management in Machining of Ductile Cast Iron." In Advances in Transdisciplinary Engineering. IOS Press, 2024. http://dx.doi.org/10.3233/atde240153.
Full textMee, Laura. "Genre and Themes." In The Shining, 57–80. Liverpool University Press, 2017. http://dx.doi.org/10.3828/liverpool/9781911325444.003.0004.
Full textSengupta, Atanu, and Anirban Hazra. "Growth Theory." In Strategic Infrastructure Development for Economic Growth and Social Change, 74–91. IGI Global, 2015. http://dx.doi.org/10.4018/978-1-4666-7470-7.ch007.
Full textBeck, Hermann. "Reactions of Hitler’s Conservative Coalition Partner." In Before the Holocaust, 420—C14.P50. Oxford University PressOxford, 2022. http://dx.doi.org/10.1093/oso/9780192865076.003.0015.
Full textHoskisson, Robert E., and Michael A. Hitt. "Corporate Governance and Diversification." In Downscoping, 40–57. Oxford University PressNew York, NY, 1994. http://dx.doi.org/10.1093/oso/9780195078435.003.0003.
Full textBaldwin, Peter. "Religion and Science." In The Narcissism of Minor Differences. Oxford University Press, 2010. http://dx.doi.org/10.1093/oso/9780195391206.003.0014.
Full textConference papers on the topic "Resist film removal"
Kawai, Akira, Atsushi Ishikawa, Takayoshi Niiyama, Masahiko Harumoto, Osamu Tamada, and Masakazu Sanada. "Adhesion and removal behavior of nanoscale bubble on resist film surface for immersion lithography." In Microlithography 2005, edited by John L. Sturtevant. SPIE, 2005. http://dx.doi.org/10.1117/12.599157.
Full textEres, Gyula, and Frank Y. C. Hui. "Advanced Lithography for Nanofabrication." In Chemistry and Physics of Small-Scale Structures. Washington, D.C.: Optica Publishing Group, 1997. http://dx.doi.org/10.1364/cps.1997.cma.4.
Full textLee, Timothy H., Dimitrios C. Kyritsis, and Chia-fon F. Lee. "Modeling of Film Boiling and Film Vaporization on Engine Piston Tops." In ASME 2012 Internal Combustion Engine Division Fall Technical Conference. American Society of Mechanical Engineers, 2012. http://dx.doi.org/10.1115/icef2012-92173.
Full textChen, Haosheng, Darong Chen, and Jiadao Wang. "Nano Particles’ Behavior in Chemical Mechanical Polishing With the Effect of Non-Newtonian Properties of Slurry." In World Tribology Congress III. ASMEDC, 2005. http://dx.doi.org/10.1115/wtc2005-63170.
Full textLinn, J. H., T. K. Thompson, and M. G. Shlepr. "Optimizing Contact Resistance at a Resistor/Conductor Interface via Thin Film Microanalysis and Process Design of Experiments." In ISTFA 1999. ASM International, 1999. http://dx.doi.org/10.31399/asm.cp.istfa1999p0161.
Full textKrulevitch, Peter, Kirk P. Seward, Harold D. Ackler, George C. Johnson, and Roger T. Howe. "Structure and Behavior of Materials for Micromechanical Devices." In ASME 1998 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 1998. http://dx.doi.org/10.1115/imece1998-1146.
Full textLutey, Adrian H. A. "Modelling of Thin-Film Single and Multi-Layer Nanosecond Pulsed Laser Processing." In ASME 2013 International Manufacturing Science and Engineering Conference collocated with the 41st North American Manufacturing Research Conference. American Society of Mechanical Engineers, 2013. http://dx.doi.org/10.1115/msec2013-1093.
Full textYabing, Li, Zhang Han, and Xiao Jianjun. "Validation of Film Evaporation Model in GASFLOW-MPI." In 2018 26th International Conference on Nuclear Engineering. American Society of Mechanical Engineers, 2018. http://dx.doi.org/10.1115/icone26-81249.
Full textFei, Likai, Bin Gao, Pucheng Fan, Haowei Yuan, Husheng Wang, Fuming Yang, Lianyue Du, and Lin Zheng. "Preliminary Investigations on the Effect of Cooling Water Boundary Conditions on PCS Performance." In 2022 29th International Conference on Nuclear Engineering. American Society of Mechanical Engineers, 2022. http://dx.doi.org/10.1115/icone29-93163.
Full textTsai, Li-Chih, Maysam Rezaee, Muhammad Istiaque Haider, Armin Yazdi, and Nathan P. Salowitz. "Quantitative Measurement of Thin Film Adhesion Force." In ASME 2019 Conference on Smart Materials, Adaptive Structures and Intelligent Systems. American Society of Mechanical Engineers, 2019. http://dx.doi.org/10.1115/smasis2019-5615.
Full textReports on the topic "Resist film removal"
Waisner, Scott, Victor Medina, Charles Ellison, Jose Mattei-Sosa, John Brasher, Jacob Lalley, and Christopher Griggs. Design, construction, and testing of the PFAS Effluent Treatment System (PETS), a mobile ion exchange–based system for the treatment of per-, poly-fluorinated alkyl substances (PFAS) contaminated water. Engineer Research and Development Center (U.S.), March 2022. http://dx.doi.org/10.21079/11681/43823.
Full textChristman. L51577 Prediction of SCC Susceptibility Based on Mechanical Properties of Line Pipe Steels. Chantilly, Virginia: Pipeline Research Council International, Inc. (PRCI), August 1988. http://dx.doi.org/10.55274/r0010278.
Full textDatta, Sandip, and Geeta Gandhi Kingdon. The Myth and Reality of Teacher Shortage in India: An Investigation Using 2019-20 Data. Research on Improving Systems of Education (RISE), December 2021. http://dx.doi.org/10.35489/bsg-rise-wp_2020/072.
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