Dissertations / Theses on the topic 'Printing arrays'

The goal of the proposed study is to understand the morphology, physical, and responsive properties of synthetic polymer and biopolymer layer-by-layer (LbL) arrays using the inkjet printing and stamping technique, in order to develop patterned encapsulated thin films for controlled release and biosensor applications. In this study, we propose facile fabrication processes of hydrogen-bonded and electrostatic LbL microscopic dot arrays with encapsulated target organic and cell compounds. We study encapsulation with the controllable release and diffusion properties ofpoly(vinylpyrrolidone) (PVPON), poly(methacrylic acid) (PMAA), silk-polylysine, silk-polyglutamic acid, pure silk films, and E-coli cells from the multi-printing process. Specifically, we investigate the effect of thickness, the number of bilayers, and the hydrophobicity of substrates on the properties of inkjet/stamping multilayer films such as structural stability, responsiveness, encapsulation efficiency, and biosensing properties. We suggest that a more thorough understanding of the LbL assembly using inkjet printing and stamping techniques can lead to the development of encapsulation technology with no limitations on either the concentration of loading, or the chemical and physical properties of the encapsulated materials. In addition, this study offers new encapsulation concepts with simple, cost effective, highly scalable, living cell-friendly, and controllable patterning properties.

Cell-surface engineering has been attracting increased interest in the field of biotechnology, tissue engineering, cell therapy, or biosensors/bioelectronics. Thin nanocoatings or sometimes referred as nanoshells allow for modifying and controlling variety of cell properties, specifically retardation of cell division or growth, masking immunological properties, providing chemical and mechanical resistance to external stressors, and ability to further functionalize shells in order to guide cells attachment, their proliferation and function in artificial environment. Bottom-up approach, utilizing layer-by-layer (LbL) assembly of wide variety of different components (synthetic and natural polyelectrolytes, nanoparticles, and other nano-structures) has been introduced and elaborated to modify cell surfaces. Despite successful examples of the LbL-based cell encapsulation with polyelectrolytes, cytotoxicity of their polycation components possesses severe limitations for this approach. Additionally, by constructing rigid non-permeable shells can suppress the essential properties of cells. In this view, the goal of this research is to explore the formation of cyto-compatible ultrathin coatings from synthetic and natural polymers through utilization of non-cationic counterparts, with possibility to actively control cell division, provide protection from external environment, and temper shell properties in order to elicit or change specific cell response.

International Telemetering Conference Proceedings / October 29-November 02, 1990 / Riviera Hotel and Convention Center, Las Vegas, Nevada
In the past 2 to 3 years, linear array recorders based on direct thermal printing technology have proven to be the recorders of choice for a large number of telemetry display stations. This technology initially developed for facsimile communications has evolved to meet speed and reliability required by the operation of recorders in the telemetry station environment. This paper discusses the performance of various direct thermal printing techniques employed. The focus is given to parameters that are critical to telemetry station operation such as quality of the chart output, maintenance and support, reliability and cost. The reliability issue is discussed at length as it is impacted by printhead thermal stress and mechanical wear. Other printing technologies available for chart recording are briefly reviewed as they may appear to be suitable alternatives in some telemetry applications.

Organic electronic biosensors are developed as suitable devices that can transform electrochemical processes within the cell membrane into an electronic signal and enable to measure electrical activity of excitable cells and tissues both in vitro and in vivo and thus represent valuable alternative to current cell monitoring methods. In this work we focus on the fabrication of electrophysiological sensors based on organic semiconductors printed by the material printing method. Microelectrode arrays (MEAs) are active components of the device, which can monitore cellular activity and above that stimulating cells with electrical pulses. The proposed platform should be used for cytotoxicity of potential drugs especially on cardiac cells (cardiomyocytes). The experimental part focus on specific production processes of platforms, which were prepared in the laboraty with emphasis on biocompatibility and conductivity of device.

The need for miniaturized, and high performance microwave devices has focused significant attention onto new fabrication technologies that can simultaneously achieve high performance and low manufacturing complexity. Additive manufacturing (AM) has proven its capability in fabricating high performance, compact and light weight microwave circuits and antennas, as well as the ability to achieve designs that are complicated to fabricate using other manufacturing approaches. Direct print additive manufacturing (DPAM) is an emerging AM process that combines the fused deposition modeling (FDM) of thermoplastics with micro-dispensing of conductive and insulating pastes. DPAM has the potential to jointly combine high performance and low manufacturing complexity, along with the possibility of real-time tuning. This dissertation aims to leverage the powerful capabilities of DPAM to come-up with new designs and solutions that meet the requirements of rapidly evolving wireless systems and applications. Furthermore, the work in this dissertation provides new techniques and approaches to alleviate the drawbacks and limitations of DPAM fabrication technology. Firstly, the development of 3D packaged antenna, and antenna array are presented along with an analysis of the inherent roughness of 3D printed structures to provide a deeper understanding of the antenna RF performance. The single element presents a new volumetric approach to realizing a 3D half-wave dipole in a packaged format, where it provides the ability to keep a signal distribution network in close proximity to the ground plane, facilitating the implementation of ground connections (e.g. for an active device), mitigating potential surface wave losses, as well as achieving a modest (10.6%) length reduction. In addition, a new approach of implementing conformal antennas using DPAM is presented by printing thin and flexible substrate that can be adhered to 3D structures to facilitate the fabrication and reduce the surface roughness. The array design leverages direct digital manufacturing (DDM) technology to realize a shaped substrate structure that is used to control the array beamwidth. The non-planar substrate allows the element spacing to be changed without affecting the length of the feed network or the distance to the underlying ground plane. The second part describes the first high-Q capacitively-loaded cavity resonator and filter that is compatible with direct print additive manufacturing. The presented design is a compromise between quality factor, cost and manufacturing complexity and to the best of our knowledge is the highest Q-factor resonator demonstrated to date using DPAM compatible materials and processes. The final version of the single resonator achieves a measured unloaded quality factor of 200-325 over the frequency range from 2.0 to 6.5 GHz. The two pole filter is designed using a coupled-resonator approach to operate at 2.44 GHz with 1.9% fractional bandwidth. The presented design approach simplifies evanescent-mode filter fabrication, eliminating the need for micromachining and vias, and achieving a total weight of 1.97 g. The design is fabricated to provide a proof-of-principle for the high-Q resonator and filter that compromises between performance, cost, size, and complexity. A stacked version of the two-pole filter is presented to provide a novel design for multi-layer embedded applications. The fabrication is performed using an nScrypt Tabletop 3Dn printer. Acrylonitrile Butadiene Styrene (ABS) (relative permittivity of 2.7 and loss tangent of 0.008) is deposited using fused deposition modeling to form the antenna, array, resonator, and filter structures, and Dupont CB028 silver paste is used to form the conductive traces conductive regions (the paste is dried at 90 °C for 60 minutes, achieving a bulk DC conductivity of 1.5×106 S/m.). A 1064 nm pulsed picosecond Nd:YAG laser is used to laser machine the resonator and filter input and output feedlines.

Face à la demande croissante de débits de données de plus en plus élevées, l’une des principales solutions proposées par la 5G est de densifier le réseau en y intégrant notamment de nouvelles « Small cells ». La réorganisation de l’architecture du réseau mobile pour s’adapter à l’intégration poussée de ces Small cells, fait naître la problématique de la connexion backhaul entre les stations de bases desservant les Small cells et le cœur de réseau. Ainsi, des liaisons backhaul de plusieurs Gb/s de données sont nécessaires pour pouvoir assurer un débit de données d’au moins 100Mb/s à l’utilisateur qui est l’un des objectifs fixés pour la 5G. Les solutions de connexion backhaul sans fils ont un avantage indiscutable face aux coûts de déploiements de fibres optiques qui sont très élevés. Pour augmenter la capacité spectrale des liaisons sans fils, l’utilisation des fréquences millimétriques au-delà de 6 GHz caractérisées par des larges bandes passantes sera prochainement discutée pour la 5G durant le World Radiocommunication Conference 2019. Parmi ces fréquences, les bandes V (57-66GHz) et E (71-76 GHz et 81-86 GHz) ont un intérêt indéniable grâce aux larges bandes passantes disponibles ainsi qu’aux conditions de licenciement peu exigeantes. Les travaux développés dans cette thèse consistent à concevoir des antennes directives à large bande passante permettant d’établir les liens backhaul point-à-point sans fils (LoS). En exploitant les technologies de fabrications à faibles coût telles que l’impression 3D et Printed Circuit Board (PCB) sur des substrats FR4, la conception de deux types d’antenne directives a été étudiée à savoir des antennes lentilles et des antennes réseaux
In order to address the ever-increasing demand of higher data rates, adding small cells to the existing macrocells infrastructure is one of the most important milestones of the 5G roadmap. With the integration of small cells and the re-organization of the network topology, backhaul bottleneck is the main challenge to address in the near future. Facing the costs of deployments of fiber optic connections, point-to-point wireless backhaul links using millimeter wave (mmW) frequencies are gaining prominence. 5G future frequencies, to be discussed under the World Radiocommunication Conference 2019 (WRC-19) open-up the way towards mmW frequency band where large bandwidths are naturally available. The high bandwidths available at these frequencies enable several Gbps data rate backhaul links, which is un utmost necessity to respect the 100 Mbps user-experienced data rate promised by the 5G standard. Millimeter-wave frequencies in V and E-bands unlicensed/light licensed spectrum are considered as primary candidates for backhaul links. In addition to the light license regime, the high free space path loss experienced at these frequencies is rather beneficial to limit the interference between small cells links. Moreover, the high available bandwidths at V and E-bands enable to achieve multi Gb/s links without using complex modulation schemes. In this thesis, we focused our research study on developing high gain wide-band antennas usable in point-to-point backhaul links in a Line of Sight (LoS) context. Leveraging cost-efficient technologies like 3D printing and Printed Circuit Board (PCB) on FR4 substrates, we studied two high-gain antenna types: lens antennas and flat array antennas

In dieser Arbeit wurde eine neue Markierungsstrategie von Antikörpern mit dem Markierungsreagenz MeCAT (Metal Coded Tag) unter physiologischen Reaktionsbedingungen, sowie deren Anwendung in einem 8-fach Multiplex-Immunoassay von in Formalin-fixierten und in Paraffin-eingebetteten Gewebeschnitten entwickelt. Für eine aussagekräftige LA-ICP-MS Detektion von MeCAT-modifizierten Antikörpern, wurde eine Standardisierung für biologische Proben auf NC-Membranen, basierend auf einer homogenen Aufbringung eines internen Standards und Kalibrierstandards durch einen kommerziell verfügbaren Tintenstrahldrucker entwickelt und mit der ICP-MS Analyse von Lösungen evaluiert. Die LA-ICP-MS wurde in zwei 8-fach Multiplex-Immunoassays von Tissue Micro Arrays vom Prostatakarzinom und in Maushirngewebeschnitten zur Einschätzung von neurogenerative Erkrankungen erfolgreich eingesetzt werden. Es konnte hierbei gezeigt werden, dass das Nachweisvermögen, der hier entwickelten Methode bereits ausreicht, um die gängigen klinischen Biomarker mit guter Ortsauflösung nachzuweisen.
In this work a new tagging strategy of antibodies with the tagging reagent MeCAT (Metal Coded Tag) was developed under physiological reaction conditions. Their application was proved in an 8-fold multiplex immunoassay of formalin-fixed and paraffin-embedded tissue sections. For a significant LA-ICP-MS detection of MeCAT tagged antibodies standardization for biological samples owere developed. The standardization based on a homogeneous deposition onto the NC membrane via conventional CD-ink-jet printer was validated in addition with the ICP-MS analysis of solutions. The internal standardization of LA-ICP-MS was successfully applied in two 8-fold multiplex immunoassays for Tissue Micro Arrays (TMA) of prostate cancer and for detection of biomarkers for neurodegenerative diseases in mouse brain tissue sections. In both examples it could be shown that the detection capability of the new tagging strategy in combination with the printing standardization allows the detection of the clinical biomarker with good spatial resolutions.

Additive manufacturing using 2 photon polymerization is of great interest as it can create nanostructures with feature sizes much below the diffraction limit. It can be called as true 3D printing as it can fabricate in 3 dimensions by moving the laser spot in any 3D pattern inside the resist. This unique property is attributed to the non-linearity of two photon absorption which makes the polymerization happen only at the focal spot of the laser beam. This method has a wide range of applications such as optics/photonics, metamaterials, metasurfaces, micromachines, microfluidics, tissue engineering and drug delivery.
This work focuses on utilizing 2 photon fabrication for creating a metasurface by printing diabolo antenna arrays on a glass substrate and subsequently metallizing it by coating with gold. A femtosecond laser is used along with a galvo-mirror to scan the geometry inside the photoresist to create the antenna. The structure is simulated using ANSYS HFSS to study its properties and optimize the parameters. The calculations show a reflectance dip and zero reflectance for the resonance condition of 4.04 μm. An array of antennas is fabricated using the optimized properties and coated with gold using e-beam evaporation. This array is studied using a fourier transform infrared spectrometer and polarization dependent reflectance dip to 40% is observed at 6.6 μm. The difference might be due to the small errors in fabrication. This method of 3D printing of antenna arrays and metallization by a single step of e-beam evaporation is hence proved as a viable method for creating optical metasurfaces. Areas of future research for perfecting this method include incorporating an autofocusing system, printing more complicated geometries for antennas, and achieving higher resolution using techniques like stimulated emission depletion.

Chemical and topographic surface patterning for the preparation of functional surfaces and particle arrays has been intensively investigated and widely applied in sensor technology, engineering of adhesion and wetting, catalysis, as well as nanobioanalytics. However, the parallel high-throughput functionalization of surfaces with microparticle arrays under ambient conditions by state-of-the-art surface patterning methods has remained challenging. The aim of this thesis is the parallel generation of microparticle arrays on surfaces to tailor the surface properties. Two strategies are studied for this purpose. The first strategy, inspired by the functional principles of adhesive secretion of insect feet’s hairy contact elements yielding tiny droplets as footprints onto contact substrates, involves the formation of microdot arrays by capillary submicron stamping using spongy continuous nanoporous block copolymer stamps with regular hexagonal arrays of contact elements. After infiltration of AgNO3 solution from the stamps’ backside, arrays of discrete two-dimensional AgNO3 microdots with an average diameter ~ 730 nm on silicon wafers extending several square millimetres were generated, while under higher pressure holey AgNO3 films were obtained. Subsequently, the patterns were transferred into Si wafers by surface-limited metal-assisted chemical etching (MACE). Topographically patterned silicon (tpSi) characterized by hexagonal arrays of wells resulted from MACE of Si wafers patterned with AgNO3 microdots, while MACE of Si wafers patterned with holey AgNO3 films yielded ordered Si pillar arrays. H2PtCl6, PdCl2 and HAuCl4 aqueous solutions were also employed as inks for preparation of tpSi by insect-inspired capillary sub-microstamping and MACE. Exploratory experiments suggest that inkjet printing of polymeric inks onto tpSi could yield persistent and scratch-resistant polymer blot patterns without coffee ring-like features for potential utilization as permanent identity labels or quick response codes. Hexagonal arrays of Au microparticles were rationally positioned by solid-state dewetting of thin gold films on tpSi at an elevated temperature under Ar atmosphere. The rationally positioned Au microparticles subsequently acted as seeds for the growth of dense, homogeneous layers of overlapping three-dimensional (3D) gold nanodendrites by templated galvanic displacement reactions. The obtained 3D gold nanodendrite layers on tpSi featuring high specific surfaces as well as abundance of sharp edges and vertices showed promising performances in SERS-based sensing and the heterocatalytic reduction of 4-nitrophenol to 4-aminophenol. The second example involves the functionalization of polymer surfaces with arrays of inorganic lubricant microparticles for friction management and the tailoring of tribological properties based on an imprint lithographic approach. For example, the tailoring of the interfacial shear behavior of a movable polymer part might be customized in this way by functionalizing the polymeric parts’ surfaces with MoS2 microparticle arrays. Monodomain monolayers of MoS2 microparticles were prepared on SiO2-coated Si wafers via thermal sulfurization arrays of ammonium tetrathiomolybdate microparticles obtained by imprint lithography. After transfer of the MoS2 microparticle arrays to poly(methyl methacrylate) (PMMA) monoliths (PMMA_MoS2) under conservation of the array order in such a way that the MoS2 microparticles were partially embedded into the PMMA and partially exposed, the obtained PMMA_MoS2 exhibited modified mechanical properties characterized by low friction coefficients half as that of non-modified PMMA monoliths. Therefore, the functionalization of surfaces with microparticle arrays is a viable and promising strategy to generate unprecedented surface functionalities.

碩士
國立臺灣師範大學
圖文傳播學系
101
The development of refractive micro-lens array remains limited because of the complex process, expensive cost, and finite format offered. In this study, transparent UV Inkjet ink was used to print the refractive micro-lens array, which was controlled for refractive conditions by using materials selected based on their thickness and micro-lens area coverage. The purpose of the study was to use a novel and flexible method to fabricate refractive micro-lens arrays and to improve current production processes. The concept of Moiré magnifier was used to design differently sized image files of lens arrays, and transparent ink was employed in UV inkjet printing to form the structure of micro-lenses on transparent materials with different thicknesses. The 1951 USAF resolution measuring chart is used to obtain the quantitative resolution of the structure of the UV inkjet refractive micro-lens array. The curvature of micro-lens contours and Modulation Transfer Function (MTF) were measured to analyze the image quality from the micro-lens array. The results show that the use of UV inkjet printing to produce a micro-lens array is a pragmatic method, and the array exhibits resolving power of 100 lpi. The larger lens area coverage at different thicknesses exhibits MTF number greater than 0.5, which meets commercial requirements. Furthermore, the micro-lens array fabricated in this study has potential value in anti-counterfeiting applications. Keywords : 1951 USAF test card, MTF, micro-lens array, UV ink-jet printing

碩士
國立中興大學
精密工程學系所
98
The purpose of this research is to present the fabrication of microlens array by using screen-printing. The printing mold was prepared by LIGA-like technology, lithography process is used to pattern the mold insert. Then this printing mold is electroformed by nickel sulfamate bath. The temperature played an important role in printing and thermal reflow process, that it can control the photoresist viscosity and the radius curvature of microlens. This study uses LIGA-like technologies at the early stage to prepare the screen-printing mold. The mold can be repeatedly use in the fabrication of microlens array. Microlens with diameter of 30 μm are successfully fabricated with this technique. This is an innovative and unique method. The experiment is successful to make the Microlens array in a simple manufacturing process with fast formation, cost reduction and controllable microstructure appearance advantages. The technique is expected to benefit further relation technology for industry.

碩士
國立臺灣科技大學
機械工程系
92
For recent years, micro lens array fabrication has been paid more and more attention, just like important technology of liquid crystal display in property, it’s Light Guide Plate of back light module distributes many structure of micro lens, and whether robust degree of focal length is good or not decide the quality of Light Guide Plate. The point of the dissertation mainly discusses prod micro lens by LIGA process, and using UV-proximity printing which differs from traditional exposure, we can get the lens shape of photoresist. The diameter of mask’s hole without reflow. The experiment uses the mask’ hole whose size is 80 µm, and we also consider the height of micro lens and decide the relative parameters which affect the robust degree and the height of micro lens. We do analysis by Taguchi and neural network. We hope to find the combination of parameters whose robust degree is highest. In the process of making the metal mold, we use the high hardness Ni-Co alloy, but Ni-Co alloy would produce higher stress to be out of shape. So we would explore the parameters of electroforming, which affect the stress, and find the best combination of parameters which can make the stress of the alloy model lowest., and we can get the high quality of micro lens array.

碩士
國立中興大學
光電工程研究所
102
In the recent years, with the raise in standard of Liquid Crystal Display (LCD) thin module, thin design becomes indispensable in the manufacturing process. Therefore, the back light module industry demands stricter design in thin light guide plate. While injecting thin light guide plate, high injection speed and molding pressure are required, so the remained residual stress often causes the plate transformed and warped. To resolve this, we can apply the properties of ink-jet printing, drop-on-demand and direct writing. By introducing these properties, no microstructure mold and stampers are fabricated, so the development period and cost can be reduced dramatically. In this paper, we will introduce printing materials, surface treatment of primer coating, parameter optimization of printing microlens, optimal design and product verification. With Miyakawa MLP-850UV, ink-jet printing process is used to manufacture micro lens array light guide plate, and establish the complete process. In our design, we adopted UV polyacrylamide, optimized ink-jet printing, 22V driving voltage, and 0.8mm substrate gap. After the first printing process and the hydrophobic layer with primer coating, we proceed with the second printing process on the substrate to form the micro lens array. 13.3" machines is operated with optical design, to control the micron lens of 70μm in diameter, 14um in height, and 0.539 coverage. Film size of hydrophobic layer primer is controlled by 0.723μm in thickness and 1.509 refractive index. With ink-jet printing technique, we can successfully manufacture 13.3" ink-jet light guide plate with 2419.18 nit luminance and 87.84% luminance uniformity in average. The experiment result validates the ability of Ink-Jet printing process in manufacturing thin light guide plate.

博士
淡江大學
電機工程學系博士班
102
Designing a good RF antenna has been a very obscure topic for mobile phones designers. Phone''s appearance is cannot too large it will affect the use and convenience to carry on. But today''s smart phones have many different features advertised. In addition to mobile radio communications for basic call function and transfer data, most of them are equipped with wireless Internet (WiFi), Bluetooth (Bluetooth), Global Positioning System (GPS) and other functions, recently added Near Field Communication (NFC) , the wireless charging (Qi) will be added in the near future. So many different "wireless" feature in addition to means that users can very easily make their own portable devices to connect and exchange information with other kinds of devices, but also the design of this device allows engineers hard to try in such a small area to place so many groups of antennas, and cannot interfere with each other. If in the original two-dimensional plane could not find the extra space to put so many antennas, but we cannot reduce any of the product features, whether we can make multiple sets of three-dimensional arrangement of the antenna? In this article a two-stage plan that we envisioned for antenna design improvements. We hope to be in the first stage of the initial antenna design we can rapid design and verification, the antenna can be designed depending on the needs of a variety of different shapes, but the performance approached the industry''s needs. The second stage is the use of newer manufacturing methods to produce the products which we want and further hope to combine different materials it will could reduce the size of the antenna let it can be applied in the future in portable devices. Through the two-stage step, we will be able to significantly reduce the design schedule and found the errors early in design period, and can reduce expenses during design. In addition, we also practiced the simulations for insulating material impact on antenna design and testing of antenna isolation status these data are the antenna design is very useful information.

博士
國立清華大學
工程與系統科學系
96
This work develops a novel micro contact printing system for printing tens of protein solutions into an array with batch filling and parallel printing. This printing system consists of a micro filling chip and a micro stamp chip. The micro filling chip can simultaneously transfer numerous protein solutions into the micro stamp chip in seconds by capillary force without cross-contamination, while preserving the functionality of proteins. Different proteins can be dispensed into the corresponding channels and driven into the tips of the micro stamps. The micro stamp can be then brought to contact with the substrate to produce bio-fluid spot arrays. Teflon patterns are applied on both the micro filling chip and the micro stamp chip to prevent cross-contamination during filling. Thirty-six proteins can be printed in parallel with a spot size variation of less than 5%. This device has a potential to be expanded to a passive and high throughput system for simultaneously printing hundreds of bio-fluid spots to form dense arrays for diagnosing disease or screening for drugs.

碩士
國立臺灣科技大學
機械工程系
101
The new micro-needle array mold fabrication method using micro-lens mask through contact printing is reported. At first, the parallel ultraviolet light would pass through the mask of micro-lens. The light is divergent on the photoresist. Finally, micro-needle array mold would be obtained. This study used two different prediction formulas, including Lensmaker’s formula and Optical path prediction formula. These results obtained by two methods would be compared with optical simulation results. The result of Optical path prediction formula, which was better than the other, would be used to design micro-lens. This micro-lens was 580μm in diameter; 38.57μm in height; and 2300μm of focal length. In fabrication process, the micro-lens mask could be obtained by using five different coating speeds and thermal reflow method. Five different types of the micro-lens focal length were 2410μm, 2314μm, 2216μm, 2263μm and 2279μm. After that, the detection results which used by high power red helium-neon laser, showed that micro-lens might be focus and then divergent. These five types of micro-lens mask with contact exposure method were manufactured in the negative photoresist (SU-8) formation micro-needle array mold. Three kinds of mold structure were showed, including inverted frustum shape, sand clock shape and frustum shape. The top and the bottom of the molds tended to reduce their dimension. By the other hand, another method to fabricate micro-needle array mold was by using fiber laser. The fiber laser was engraved in the positive photoresist (AZ4620) and silicon wafer, using different carving conditions with different power and frequency. The results indicated that when the power of 60% with the frequency of 30Hz, the positive photoresist mold would be completed. By using PDMS molds, micro-needle with the diameter of approximately 170μm and height of 60μm has shown a good quality of contour suface.

碩士
國立中興大學
機械工程學系
92
近接式微影為一種將光罩影像圖案轉移至基材的製程，應用於半導體製程、微機電及微元件之製作，但若使用不慎，非曝光區亦會產生曝光效果，造成影像變形。本研究由光學繞射理論著手，探討近接式微影製程因光罩與光阻之間隙變化造成的光學繞射效應而產生的圖案變形效果。文中以Huygens-Fresnel繞射理論為基礎，推導証明光強度隨著光罩與光阻之間隙增加而減少，而且即使間隙很小時，在非曝光區也會產生光強度，造成影像的模糊；隨著間隙的增加，非曝光區與曝光區的光強度越接近，造成曝光影像的變形，此現象在使用影像陣列光罩進行近接微影曝光時，由於繞射光的干涉效果更顯得明顯。研究中亦規劃實驗以驗証該理論，繞射實驗顯示，在ψ80μm之圓孔陣列曝光過程中，光強度分布在間隙為240μm時開始有圓孔相連接的現象，而間隙到達360μm時會產生部分的干涉條紋，超過此間隙則開始產生六角形的影像，此乃是光波之繞射使光強度由圓孔邊緣向外擴大，之後與相鄰圓孔之光波產生干涉而形成六角形影像，此實驗結果與推導之結果相當一致。本研究之主要貢獻在於利用基礎光學理論所推導出的繞射理論可以說明近接微影曝光製程影像變形的成因，並透過實驗驗證其正確性。

碩士
國立臺灣科技大學
機械工程系
100
In this study, an mold of micro-probe array was fabricated by a 3D-mask with proximity exposure. By the limit of thermal reflow, five kinds of microlenses were defined. The ranking of radius of curvature (RC) of microlens: Lens C > Lens E > Lens D > Lens A > Lens B. The aperture stop (Daperture) was half of diameter of lens (Dlens). The source was ultraviolet light with a 120 Watt/m2 flux. The exposure gap was calculated from 3D-mask, and establish the geometry of the mold of micro-probe array by the absorbed irradiance maps of the different levels calculated with the designed model of positive photoresist AZ4620 by optical software, respectively. In order to discuss the energy of ultraviolet light, this study defined three cases for comparing. In Case 1, the refractive index (n) was only considered ; in Case 2, the extinction value (k) of specimen was also considered; in Case 3, the complex refractive index was all considered. Different combinations of material properties will influence boundary conditions of every exposure system. In addition, the other parameters of the shape of micro-probe included diameter (Dlens) and height (h) of micro-lens, sizes of aperture stop, exposure gap (g). In Case 1, positive photoresist AZ4620 did not absorb any energy from UV light, so it wasn't bleached; in Case 2, the ranking of diameter of the mold of micro-probe (Dprobe): Lens E > Lens D > Lens C > Lens A > Lens B, and the depth of the mold of micro-probe (Lprobe) was 12 μm; in Case 3, the ranking of Dprobe: Lens E > Lens C > Lens D > Lens B > Lens A, and Lprobe was 10 μm. Through the outputs, the limit of Lprobe was the combination with different material properties, or the absorptance of positive photoresist. Case 3 was the most close to reality. Dprobe was limited by the range of diffraction. The ranking of the influence of parameters: Dlens > h > g. The diffraction effect is directly proportional to Dlens and g and is inversely proportional to h. (The larger Dlens and g are, the lager diffraction is, but the situation of h was upside down.) Finally, change Daperture into one fifth of Dlens, and simulate the system of Lens A with Case 3. The outputs were Lprobe =10μm, Dprobe =26μm, AR (aspect ratio)=0.4.

博士
國立臺灣科技大學
機械工程系
96
This thesis aims to develop the micro optical component production using UV-proximity printing, such as microlens array molds and optical waveguides are illustrated. In addition, artificial neural network and genetic algorithm technologies are combined with the Taguchi method to create a robust design for the high fill factor microlens array modeling. The finding of the robust parameters combination can result in the uniform microlens array fabrication. The optical component profiles were produced by utilizing a printing gap between the mask and photoresist substrate. The microlens array can use PDMS optical material of to replicate in mass production. A horizontal frustum optical waveguide with a both lateral and vertical taper structure was produced. The orthogonal and inclined masks with the diffraction effect were employed in the lithography process. A horizontal frustum optical waveguide provides a coupling efficiency higher than 52% from laser diode to the single-mode fiber when using 1550 nm laser diode. The artificial neural network and genetic algorithm technologies are combined with the robust design to reduce the variations in the focal length of the high fill factor microlens array. The orthogonal array was used for these experiments and calculated the S/N ratio of quality characteristic. The orthogonal array was used as the learning data for the artificial neural network to construct system model that can predict the focal length for arbitrary parameters setting. Then, the genetic algorithm was applied to obtain the parameters setting. The ANN/GA model is compared with the experimental result, the predicted error is about 2%. The experimental results prove that 34% and 56% reductions in sensitivity variation can be achieved using the Taguchi method and the ANN/GA model, respectively.

碩士
國立臺灣科技大學
機械工程系
103
The pyramid microneedle array is fabricated by contact exposure and micro-lens mask. Theory of the geometric optics can deduce the micro-lens length focus formula. This study used two different prediction formulas, including Lensmaker’s formula and Optical path calculation formula. These results obtained by two methods would be compared with optical simulation results. It is found that the relationship between micro-lens height and the error value of two methods, it is found that the micro-lens height is higher, the error value of two methods is bigger. The biggest error value of Lensmaker’s formula and Optical path calculation formula reaches 38.252%, 5.878%. Compared from two methods, Optical path calculation formula is more accurate. In fabrication process, the four kinds of micro-lens masks could be obtained by using vacuum evaporation method and thermal reflow method. Measuring its size through 3D-Profile and optical microscopy, the square metal aperture stop side length are 176.9μm, 181.4μm, 184.1μm and 181.4μm, the micro-lens diameter are 284.4μm, 281.1μm, 287.5μm, 296.9μm, the micro-lens height are 17.5μm, 18.1μm, 18.7μm, 19.7μm. The micro-lens center axis aligned with the center of the square metal aperture stop. These four different sizes of the micro-lens masks use photolithography process to fabricate JSR-126N pyramid microneedle array. By transmission electron microscope, it shows that the four different sizes of microneedles array are pyramid geometry. By white light interferometers, four different sizes of pyramid microneedles length are 113μm, 107μm, 103μm, 106μm. The length of pyramid microneedles size 1 and 4 are closed to Optical path calculation formula prediction result. Each difference value is 5.6μm, 26.4μm, the lowest error value reaches 4.7%.

Alkanethiols spontaneously assembles from solution or vapour on oxide free metal surfaces resulting in a close-packed molecular stuctures with a high degree of orientation and molecular order. In this study, inkjet printing technique is used to immobilize monolayers of alkanethiols on gold electrodes. The quality of the inkjetted monolayers are analyzed by electrochemical methods, i.e. cyclic voltammetry and electrochemical impedance spectroscopy, and by Polarization Modulation Infrared Reflection-Absorption Spectroscopy (PM-IRRAS) which show a similar molecular quality to those produced by immersion technique, the standard technique. The kinetic and mass transfer behaviours of micro-scale structures of inkjetted monolayers, e.g. bands and dots array electrodes, are explored by electrochemical methods. The microscale inkjetted structures of monolayers are of interest in the fields of microelectronic devices (e.g. chemical and biosensors) and optoelectronic devices. Taking benefits from multichannel existing in the printhead, mixtures of SAMs are demonstrated. Mixing of monolayers differing in functional groups provides a model surface to study interface phenomena at molecular level such as ion permeation, selective chemical binding, and electron transfer kinetic.

Dissertação de mestrado integrado em Eletrónica Industrial e de Computadores
Esta dissertação apresenta o desenvolvimento, desenho e fabrico de um array de sensores de pressão flexíveis, para monitorização de equilíbrio em atividades de reabilitação física. A solução proposta utiliza um processo de fabrico simples e de custo reduzido, que combina uma placa de circuito impresso flexível, para definir as ligações elétricas e as dimensões dos condensadores, juntamente com dois substratos flexíveis de Termoplástico Poliuretano (TPU) com os elétrodos impressos com tinta condutora, permitindo a obtenção de uma densidade razoável de sensores. A leitura dos sensores é efetuada através de um conversor de capacidade digital (CDC) ligado a uma aplicação gráfica em ambiente Matlab que permite a visualização dos dados em tempo real. A resposta dos sensores a variação de pressão e de carga foi testada e os resultados obtidos viabilizam a abordagem proposta. De modo a melhorar o sistema foi implementada uma segunda versão, que ainda necessita ser testada.
This work present the development, design and manufacture of an array of flexible pressure sensors for monitoring of balance in physical rehabilitation activities. The proposed solution uses a low cost manufacturing process, which combines a flexible printed circuit board, to define the electrical connections and the dimensions of the capacitors, along with two flexible substrates of thermoplastic polyurethane (TPU) with the electrodes printed with conductive ink, enabling a reasonable sensor density. The sensor readings are performed via a capacitance to digital converter (CDC) connected to a graphical application in Matlab, which allows the visualization of data in real time. The sensor response to changes in pressure and load were tested and the results are enabling the feasibility of the approach. A second system was implemented to improve the current system, but still needs to be characterized.
Este trabalho é co-financiado por fundos FEDER através do Programa Operacional Factores de competitividade-COMPETE através do projeto TICE-Healthy – QREN SI&IDT projetos mobilizadores

碩士
國立中正大學
機械工程所
95
The copper nanowires grown by the electro-deposition technique from a commercial anodic aluminum oxide (AAO) membrane with designated micro-sized patterns were presented in this study. The designed array patterns were first placed on a thin PMMA film pre-coated on a PDMS soft mold by the excimer laser micromachining and the patterned film was then transferred on the AAO membrane through the micro-contact printing technique. Copper nanowires with the diameters and lengths within the ranges from 100 nm to 200 nm and 5 μm to 10 μm, respectively, were obtained by different electro-deposition conditions. The morphology and the field-emission characteristics of the fabricated nanowires were examined. The differences in the field-emission characteristics from the nano-wires in the completely etched AAO membrane, the partially etched AAO membrane and the non-etched AAO membrane were compared and discussed. Incorporating the micro-contact printing technique for the designated pattern area with the electro-deposition method has the potential to uniformly fabricate large area metal field emitters.

[EN] The main objective of this thesis is the development of new sensors and actuators using Printed Electronics technology. For this, conductive, semiconductor and dielectric polymeric materials are used on flexible and/or elastic substrates. By means of suitable designs and application processes, it is possible to manufacture sensors capable of interacting with the environment. In this way, specific sensing functionalities can be incorporated into the substrates, such as textile fabrics. Additionally, it is necessary to include electronic systems capable of processing the data obtained, as well as its registration. In the development of these sensors and actuators, the physical properties of the different materials are precisely combined. For this, multilayer structures are designed where the properties of some materials interact with those of others. The result is a sensor capable of capturing physical variations of the environment, and convert them into signals that can be processed, and finally transformed into data. On the one hand, a tactile sensor printed on textile substrate for 2D gesture recognition was developed. This sensor consists of a matrix composed of small capacitive sensors based on a capacitor type structure. These sensors were designed in such a way that, if a finger or other object with capacitive properties, gets close enough, its behaviour varies, and it can be measured. The small sensors are arranged in this matrix as in a grid. Each sensor has a position that is determined by a row and a column. The capacity of each small sensor is periodically measured in order to assess whether significant variations have been produced. For this, it is necessary to convert the sensor capacity into a value that is subsequently digitally processed. On the other hand, to improve the effectiveness in the use of the developed 2D touch sensors, the way of incorporating an actuator system was studied. Thereby, the user receives feedback that the order or action was recognized. To achieve this, the capacitive sensor grid was complemented with an electroluminescent screen printed as well. The final prototype offers a solution that combines a 2D tactile sensor with an electroluminescent actuator on a printed textile substrate. Next, the development of a 3D gesture sensor was carried out using a combination of sensors also printed on textile substrate. In this type of 3D sensor, a signal is sent generating an electric field on the sensors. This is done using a transmission electrode located very close to them. The generated field is received by the reception sensors and converted to electrical signals. For this, the sensors are based on electrodes that act as receivers. If a person places their hands within the emission area, a disturbance of the electric field lines is created. This is due to the deviation of the lines to ground using the intrinsic conductivity of the human body. This disturbance affects the signals received by the electrodes. Variations captured by all electrodes are processed together and can determine the position and movement of the hand on the sensor surface. Finally, the development of an improved 3D gesture sensor was carried out. As in the previous development, the sensor allows contactless gesture detection, but increasing the detection range. In addition to printed electronic technology, two other textile manufacturing technologies were evaluated.
[ES] La presente tesis doctoral tiene como objetivo fundamental el desarrollo de nuevos sensores y actuadores empleando la tecnología electrónica impresa, también conocida como Printed Electronics. Para ello, se emplean materiales poliméricos conductores, semiconductores y dieléctricos sobre sustratos flexibles y/o elásticos. Por medio de diseños y procesos de aplicación adecuados, es posible fabricar sensores capaces de interactuar con el entorno. De este modo, se pueden incorporar a los sustratos, como puedan ser tejidos textiles, funcionalidades específicas de medición del entorno y de respuesta ante cambios de este. Adicionalmente, es necesario incluir sistemas electrónicos, capaces de realizar el procesado de los datos obtenidos, así como de su registro. En el desarrollo de estos sensores y actuadores se combinan las propiedades físicas de los diferentes materiales de forma precisa. Para ello, se diseñan estructuras multicapa donde las propiedades de unos materiales interaccionan con las de los demás. El resultado es un sensor capaz de captar variaciones físicas del entorno, y convertirlas en señales que pueden ser procesadas y transformadas finalmente en datos. Por una parte, se ha desarrollado un sensor táctil impreso sobre sustrato textil para reconocimiento de gestos en 2D. Este sensor se compone de una matriz formada por pequeños sensores capacitivos basados en estructura de tipo condensador. Estos se han diseñado de forma que, si un dedo u otro objeto con propiedades capacitivas se aproxima suficientemente, su comportamiento varía, pudiendo ser medido. Los pequeños sensores están ordenados en dicha matriz como en una cuadrícula. Cada sensor tiene una posición que viene determinada por una fila y por una columna. Periódicamente se mide la capacidad de cada pequeño sensor con el fin de evaluar si ha sufrido variaciones significativas. Para ello es necesario convertir la capacidad del sensor en un valor que posteriormente es procesado digitalmente. Por otro lado, con el fin de mejorar la efectividad en el uso de los sensores táctiles 2D desarrollados, se ha estudiado el modo de incorporar un sistema actuador. De esta forma, el usuario recibe una retroalimentación indicando que la orden o acción ha sido reconocida. Para ello, se ha complementado la matriz de sensores capacitivos con una pantalla electroluminiscente también impresa. El resultado final ofrece una solución que combina un sensor táctil 2D con un actuador electroluminiscente realizado mediante impresión electrónica sobre sustrato textil. Posteriormente, se ha llevado a cabo el desarrollo de un sensor de gestos 3D empleando una combinación de sensores impresos también sobre sustrato textil. En este tipo de sensor 3D, se envía una señal que genera un campo eléctrico sobre los sensores impresos. Esto se lleva a cabo mediante un electrodo de transmisión situado muy cerca de ellos. El campo generado es recibido por los sensores y convertido a señales eléctricas. Para ello, los sensores se basan en electrodos que actúan de receptores. Si una persona coloca su mano dentro del área de emisión, se crea una perturbación de las líneas de los campos eléctricos. Esto es debido a la desviación de las líneas de campo a tierra utilizando la conductividad intrínseca del cuerpo humano. Esta perturbación cambia/afecta a las señales recibidas por los electrodos. Las variaciones captadas por todos los electrodos son procesadas de forma conjunta pudiendo determinar la posición y el movimiento de la mano sobre la superficie del sensor. Finalmente, se ha llevado a cabo el desarrollo de un sensor de gestos 3D mejorado. Al igual que el desarrollo anterior, permite la detección de gestos sin necesidad de contacto, pero incrementando la distancia de alcance. Además de la tecnología de impresión electrónica, se ha evaluado el empleo de otras dos tecnologías de fabricación textil.
[CA] La present tesi doctoral té com a objectiu fonamental el desenvolupament de nous sensors i actuadors fent servir la tecnologia de electrònica impresa, també coneguda com Printed Electronics. Es va fer us de materials polimèrics conductors, semiconductors i dielèctrics sobre substrats flexibles i/o elàstics. Per mitjà de dissenys i processos d'aplicació adequats, és possible fabricar sensors capaços d'interactuar amb l'entorn. D'aquesta manera, es poden incorporar als substrats, com ara teixits tèxtils, funcionalitats específiques de mesurament de l'entorn i de resposta davant canvis d'aquest. Addicionalment, és necessari incloure sistemes electrònics, capaços de realitzar el processament de les dades obtingudes, així com del seu registre. En el desenvolupament d'aquests sensors i actuadors es combinen les propietats físiques dels diferents materials de forma precisa. Cal dissenyar estructures multicapa on les propietats d'uns materials interaccionen amb les de la resta. manera El resultat es un sensor capaç de captar variacions físiques de l'entorn, i convertirles en senyals que poden ser processades i convertides en dades. D'una banda, s'ha desenvolupat un sensor tàctil imprès sobre substrat tèxtil per a reconeixement de gestos en 2D. Aquest sensor es compon d'una matriu formada amb petits sensors capacitius basats en una estructura de tipus condensador. Aquests s'han dissenyat de manera que, si un dit o un altre objecte amb propietats capacitives s'aproxima prou, el seu comportament varia, podent ser mesurat. Els petits sensors estan ordenats en aquesta matriu com en una quadrícula. Cada sensor té una posició que ve determinada per una fila i per una columna. Periòdicament es mesura la capacitat de cada petit sensor per tal d'avaluar si ha sofert variacions significatives. Per a això cal convertir la capacitat del sensor a un valor que posteriorment és processat digitalment. D'altra banda, per tal de millorar l'efectivitat en l'ús dels sensors tàctils 2D desenvolupats, s'ha estudiat la manera d'incorporar un sistema actuador. D'aquesta forma, l'usuari rep una retroalimentació indicant que l'ordre o acció ha estat reconeguda. Per a això, s'ha complementat la matriu de sensors capacitius amb una pantalla electroluminescent també impresa. El resultat final ofereix una solució que combina un sensor tàctil 2D amb un actuador electroluminescent realitzat mitjançant impressió electrònica sobre substrat tèxtil. Posteriorment, s'ha dut a terme el desenvolupament d'un sensor de gestos 3D emprant una combinació d'un mínim de sensors impresos també sobre substrat tèxtil. En aquest tipus de sensor 3D, s'envia un senyal que genera un camp elèctric sobre els sensors impresos. Això es porta a terme mitjançant un elèctrode de transmissió situat molt a proper a ells. El camp generat és rebut pels sensors i convertit a senyals elèctrics. Per això, els sensors es basen en elèctrodes que actuen de receptors. Si una persona col·loca la seva mà dins de l'àrea d'emissió, es crea una pertorbació de les línies dels camps elèctrics. Això és a causa de la desviació de les línies de camp a terra utilitzant la conductivitat intrínseca de el cos humà. Aquesta pertorbació afecta als senyals rebudes pels elèctrodes. Les variacions captades per tots els elèctrodes són processades de manera conjunta per determinar la posició i el moviment de la mà sobre la superfície del sensor. Finalment, s'ha dut a terme el desenvolupament d'un sensor de gestos 3D millorat. A l'igual que el desenvolupament anterior, permet la detecció de gestos sense necessitat de contacte, però incrementant la distància d'abast. A més a més de la tecnologia d'impressió electrònica, s'ha avaluat emprar altres dues tecnologies de fabricació tèxtil.
Ferri Pascual, J. (2020). Tactile and Touchless Sensors Printed on Flexible Textile Substrates for Gesture Recognition [Tesis doctoral no publicada]. Universitat Politècnica de València. https://doi.org/10.4995/Thesis/10251/153075
TESIS