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Relevant bibliographies by topics / PiezoMEMS

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Journal articles

Academic literature on the topic 'PiezoMEMS'

Author: Grafiati

Published: 6 September 2023

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Journal articles on the topic "PiezoMEMS"

1

Fragkiadakis, Charalampos, Subramanian Sivaramakrishnan, Thorsten Schmitz-Kempen, Peter Mardilovich, and Susan Trolier-McKinstry. "Heat generation in PZT MEMS actuator arrays." Applied Physics Letters 121, no. 16 (2022): 162906. http://dx.doi.org/10.1063/5.0114670.

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Piezoelectric microelectromechanical systems (piezoMEMS) enable dense arrays of actuators which are often driven to higher electrical fields than their bulk piezoelectric counterparts. In bulk ceramics, high field driving causes internal heating of the piezoelectric, largely due to field-induced domain wall motion. Self-heating is then tracked as a function of vibration velocity to determine the upper bound for the drive levels. However, the literature is limited concerning self-heating in thin film piezoMEMS. In this work, it is shown that self-heating in piezoMEMS transducer arrays occurs due to domain wall motion and Ohmic losses. This was demonstrated via a systematic study of drive waveform dependence of self-heating in piezoMEMS arrays. In particular, the magnitude of self-heating was quantified as a function of different waveform parameters (e.g., amplitude, DC offset, and frequency). Thermal modeling of the self-heating of piezoMEMS using the measured hysteresis loss from electrical characterization as the heat source was found to be in excellent agreement with the experimental data. The self-heating model allows improved thermal design of piezoMEMS and can, furthermore, be utilized for functional heating, especially for device level poling.

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2

Ramachandramoorthy, Rajaprakash, Massimiliano Milan, Zhaowen Lin, Susan Trolier-McKinstry, Alberto Corigliano, and Horacio Espinosa. "Design of piezoMEMS for high strain rate nanomechanical experiments." Extreme Mechanics Letters 20 (April 2018): 14–20. http://dx.doi.org/10.1016/j.eml.2017.12.006.

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3

Jackson, Nathan. "PiezoMEMS Nonlinear Low Acceleration Energy Harvester with an Embedded Permanent Magnet." Micromachines 11, no. 5 (2020): 500. http://dx.doi.org/10.3390/mi11050500.

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Increasing the power density and bandwidth are two major challenges associated with microelectromechanical systems (MEMS)-based vibration energy harvesting devices. Devices implementing magnetic forces have been used to create nonlinear vibration structures and have demonstrated limited success at widening the bandwidth. However, monolithic integration of a magnetic proof mass and optimizing the magnet configuration have been challenging tasks to date. This paper investigates three different magnetic configurations and their effects on bandwidth and power generation using attractive and repulsive magnetic forces. A piezoMEMS device was developed to harvest vibration energy, while monolithically integrating a thick embedded permanent magnet (NdFeB) film. The results demonstrated that repulsive forces increased the bandwidth for in-plane and out-of-plane magnetic configurations from <1 to >7 Hz bandwidths. In addition, by using attractive forces between the magnets, the power density increased while decreasing the bandwidth. Combining these forces into a single device resulted in increased power and increased bandwidth. The devices created in this paper focused on low acceleration values (<0.1 g) and low-frequency applications.

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4

Kordrostami, Zoheir, and Sajjad Roohizadegan. "A groove engineered ultralow frequency piezomems energy harvester with ultrahigh output voltage." International Journal of Modern Physics B 32, no. 20 (2018): 1850208. http://dx.doi.org/10.1142/s0217979218502089.

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In this paper, for the first time, a new design for a MEMS cantilever-based energy harvester (EH) has been proposed which takes advantage of two engineered piezoelectric layers. The output voltage of the EH has been increased by the aid of making grooves in the piezoelectric layers. By application of the grooves in the piezoelectric layers, the sensitivity of the cantilever as the vibration sensor or the EH has been improved. Results have shown that these grooves can increase the output voltage and decrease the resonance frequency which are desired changes in designing EHs. The single and double groove bimorph cantilevers have been compared and discussed. The position, length and depth of the grooves have been used as optimization parameters and consequently an optimal design has been proposed at the end of the paper. In the optimal design the top and the bottom piezoelectric layers have not covered the entire beam and have different lengths to produce maximum voltage. By means of groove engineering, we could rise the voltage from 5.395 V to 28.35 V which is considered a great improvement compared to other structures reported previously.

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5

Jackson, Nathan, Oskar Z. Olszewski, Cian O’Murchu, and Alan Mathewson. "Ultralow-frequency PiezoMEMS energy harvester using thin-film silicon and parylene substrates." Journal of Micro/Nanolithography, MEMS, and MOEMS 17, no. 01 (2018): 1. http://dx.doi.org/10.1117/1.jmm.17.1.015005.

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6

Mere, Viphretuo, Sudhanshu Tiwari, Aneesh Dash, et al. "Photonics Integrated PiezoMEMS-PipMEMS: A Scalable Hybrid Platform for Next-Generation MEMS." IEEE Sensors Letters 4, no. 12 (2020): 1–4. http://dx.doi.org/10.1109/lsens.2020.3042708.

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7

Priya, Shashank, Hyun-Cheol Song, Yuan Zhou, et al. "A Review on Piezoelectric Energy Harvesting: Materials, Methods, and Circuits." Energy Harvesting and Systems 4, no. 1 (2019): 3–39. http://dx.doi.org/10.1515/ehs-2016-0028.

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Abstract Piezoelectric microelectromechanical systems (PiezoMEMS) are attractive for developing next generation self-powered microsystems. PiezoMEMS promises to eliminate the costly assembly for microsensors/microsystems and provide various mechanisms for recharging the batteries, thereby, moving us closer towards batteryless wireless sensors systems and networks. In order to achieve practical implementation of this technology, a fully assembled energy harvester on the order of a quarter size dollar coin (diameter=24.26 mm, thickness=1.75 mm) should be able to generate about 100 μW continuous power from low frequency ambient vibrations (below 100 Hz). This paper reviews the state-of-the-art in microscale piezoelectric energy harvesting, summarizing key metrics such as power density and bandwidth of reported structures at low frequency input. This paper also describes the recent advancements in piezoelectric materials and resonator structures. Epitaxial growth and grain texturing of piezoelectric materials is being developed to achieve much higher energy conversion efficiency. For embedded medical systems, lead-free piezoelectric thin films are being developed and MEMS processes for these new classes of materials are being investigated. Non-linear resonating beams for wide bandwidth resonance are also reviewed as they would enable wide bandwidth and low frequency operation of energy harvesters. Particle/granule spray deposition techniques such as aerosol-deposition (AD) and granule spray in vacuum (GSV) are being matured to realize the meso-scale structures in a rapid manner. Another important element of an energy harvester is a power management circuit, which should maximize the net energy harvested. Towards this objective, it is essential for the power management circuit of a small-scale energy harvester to dissipate minimal power, and thus it requires special circuit design techniques and a simple maximum power point tracking scheme. Overall, the progress made by the research and industrial community has brought the energy harvesting technology closer to the practical applications in near future.

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8

Esteves, Giovanni, Chris M. Fancher, Margeaux Wallace, et al. "In situ X-ray diffraction of lead zirconate titanate piezoMEMS cantilever during actuation." Materials & Design 111 (December 2016): 429–34. http://dx.doi.org/10.1016/j.matdes.2016.09.011.

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9

Sanchez, Luz M., Daniel M. Potrepka, Glen R. Fox, et al. "Optimization of PbTiO3 seed layers and Pt metallization for PZT-based piezoMEMS actuators." Journal of Materials Research 28, no. 14 (2013): 1920–31. http://dx.doi.org/10.1557/jmr.2013.172.

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10

Yang, Hao, Jinyan Zhao, Wei Ren, et al. "Lead free 0.9Na_1/2Bi_1/2TiO₃–0.1BaZr_0.2Ti_0.8O₃ thin film with large piezoelectric electrostrain." Applied Physics Letters 121, no. 13 (2022): 132903. http://dx.doi.org/10.1063/5.0106934.

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A sodium bismuth titanate-based thin film is widely investigated lead-free piezoelectrics with potential applications for modern micro-devices such as PiezoMEMS. In this work, a 0.9Na1/2Bi1/2TiO3–0.1BaZr0.2Ti0.8O3 thin film was deposited on a Pt/Ti/SiO2/Si (001) substrate by the sol–gel spin coating method. The deposited piezoelectric film shows low dielectric loss and high remnant polarization. The measured ferroelectricity loop showed a coercive field of 110 kV/cm and a saturation polarization of 46.83 μC/cm2. The piezoelectric response of this thin film does not decrease from room temperature to around 100 °C. The fabricated piezoelectric device with bottom and top electrodes showed a large macro-scale strain value of ∼4% under the DC (30 V) and AC voltages (f = 800 kHz, Vpp = 10 V).

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