Relevant bibliographies by topics / PiezoMEMS

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  1. Journal articles
  2. Dissertations / Theses
  3. Book chapters
  4. Conference papers

Academic literature on the topic 'PiezoMEMS'

Author: Grafiati
Published: 6 September 2023

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Journal articles on the topic "PiezoMEMS"

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Fragkiadakis, Charalampos, Subramanian Sivaramakrishnan, Thorsten Schmitz-Kempen, Peter Mardilovich, and Susan Trolier-McKinstry. "Heat generation in PZT MEMS actuator arrays." Applied Physics Letters 121, no. 16 (October 17, 2022): 162906. http://dx.doi.org/10.1063/5.0114670.

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Piezoelectric microelectromechanical systems (piezoMEMS) enable dense arrays of actuators which are often driven to higher electrical fields than their bulk piezoelectric counterparts. In bulk ceramics, high field driving causes internal heating of the piezoelectric, largely due to field-induced domain wall motion. Self-heating is then tracked as a function of vibration velocity to determine the upper bound for the drive levels. However, the literature is limited concerning self-heating in thin film piezoMEMS. In this work, it is shown that self-heating in piezoMEMS transducer arrays occurs due to domain wall motion and Ohmic losses. This was demonstrated via a systematic study of drive waveform dependence of self-heating in piezoMEMS arrays. In particular, the magnitude of self-heating was quantified as a function of different waveform parameters (e.g., amplitude, DC offset, and frequency). Thermal modeling of the self-heating of piezoMEMS using the measured hysteresis loss from electrical characterization as the heat source was found to be in excellent agreement with the experimental data. The self-heating model allows improved thermal design of piezoMEMS and can, furthermore, be utilized for functional heating, especially for device level poling.
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Ramachandramoorthy, Rajaprakash, Massimiliano Milan, Zhaowen Lin, Susan Trolier-McKinstry, Alberto Corigliano, and Horacio Espinosa. "Design of piezoMEMS for high strain rate nanomechanical experiments." Extreme Mechanics Letters 20 (April 2018): 14–20. http://dx.doi.org/10.1016/j.eml.2017.12.006.

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Jackson, Nathan. "PiezoMEMS Nonlinear Low Acceleration Energy Harvester with an Embedded Permanent Magnet." Micromachines 11, no. 5 (May 15, 2020): 500. http://dx.doi.org/10.3390/mi11050500.

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Increasing the power density and bandwidth are two major challenges associated with microelectromechanical systems (MEMS)-based vibration energy harvesting devices. Devices implementing magnetic forces have been used to create nonlinear vibration structures and have demonstrated limited success at widening the bandwidth. However, monolithic integration of a magnetic proof mass and optimizing the magnet configuration have been challenging tasks to date. This paper investigates three different magnetic configurations and their effects on bandwidth and power generation using attractive and repulsive magnetic forces. A piezoMEMS device was developed to harvest vibration energy, while monolithically integrating a thick embedded permanent magnet (NdFeB) film. The results demonstrated that repulsive forces increased the bandwidth for in-plane and out-of-plane magnetic configurations from <1 to >7 Hz bandwidths. In addition, by using attractive forces between the magnets, the power density increased while decreasing the bandwidth. Combining these forces into a single device resulted in increased power and increased bandwidth. The devices created in this paper focused on low acceleration values (<0.1 g) and low-frequency applications.
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Kordrostami, Zoheir, and Sajjad Roohizadegan. "A groove engineered ultralow frequency piezomems energy harvester with ultrahigh output voltage." International Journal of Modern Physics B 32, no. 20 (July 31, 2018): 1850208. http://dx.doi.org/10.1142/s0217979218502089.

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In this paper, for the first time, a new design for a MEMS cantilever-based energy harvester (EH) has been proposed which takes advantage of two engineered piezoelectric layers. The output voltage of the EH has been increased by the aid of making grooves in the piezoelectric layers. By application of the grooves in the piezoelectric layers, the sensitivity of the cantilever as the vibration sensor or the EH has been improved. Results have shown that these grooves can increase the output voltage and decrease the resonance frequency which are desired changes in designing EHs. The single and double groove bimorph cantilevers have been compared and discussed. The position, length and depth of the grooves have been used as optimization parameters and consequently an optimal design has been proposed at the end of the paper. In the optimal design the top and the bottom piezoelectric layers have not covered the entire beam and have different lengths to produce maximum voltage. By means of groove engineering, we could rise the voltage from 5.395 V to 28.35 V which is considered a great improvement compared to other structures reported previously.
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Jackson, Nathan, Oskar Z. Olszewski, Cian O’Murchu, and Alan Mathewson. "Ultralow-frequency PiezoMEMS energy harvester using thin-film silicon and parylene substrates." Journal of Micro/Nanolithography, MEMS, and MOEMS 17, no. 01 (March 23, 2018): 1. http://dx.doi.org/10.1117/1.jmm.17.1.015005.

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Mere, Viphretuo, Sudhanshu Tiwari, Aneesh Dash, Rakshitha Kallega, Akshay Naik, Rudra Pratap, and Shankar Kumar Selvaraja. "Photonics Integrated PiezoMEMS-PipMEMS: A Scalable Hybrid Platform for Next-Generation MEMS." IEEE Sensors Letters 4, no. 12 (December 2020): 1–4. http://dx.doi.org/10.1109/lsens.2020.3042708.

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Priya, Shashank, Hyun-Cheol Song, Yuan Zhou, Ronnie Varghese, Anuj Chopra, Sang-Gook Kim, Isaku Kanno, et al. "A Review on Piezoelectric Energy Harvesting: Materials, Methods, and Circuits." Energy Harvesting and Systems 4, no. 1 (August 27, 2019): 3–39. http://dx.doi.org/10.1515/ehs-2016-0028.

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Abstract Piezoelectric microelectromechanical systems (PiezoMEMS) are attractive for developing next generation self-powered microsystems. PiezoMEMS promises to eliminate the costly assembly for microsensors/microsystems and provide various mechanisms for recharging the batteries, thereby, moving us closer towards batteryless wireless sensors systems and networks. In order to achieve practical implementation of this technology, a fully assembled energy harvester on the order of a quarter size dollar coin (diameter=24.26 mm, thickness=1.75 mm) should be able to generate about 100 μW continuous power from low frequency ambient vibrations (below 100 Hz). This paper reviews the state-of-the-art in microscale piezoelectric energy harvesting, summarizing key metrics such as power density and bandwidth of reported structures at low frequency input. This paper also describes the recent advancements in piezoelectric materials and resonator structures. Epitaxial growth and grain texturing of piezoelectric materials is being developed to achieve much higher energy conversion efficiency. For embedded medical systems, lead-free piezoelectric thin films are being developed and MEMS processes for these new classes of materials are being investigated. Non-linear resonating beams for wide bandwidth resonance are also reviewed as they would enable wide bandwidth and low frequency operation of energy harvesters. Particle/granule spray deposition techniques such as aerosol-deposition (AD) and granule spray in vacuum (GSV) are being matured to realize the meso-scale structures in a rapid manner. Another important element of an energy harvester is a power management circuit, which should maximize the net energy harvested. Towards this objective, it is essential for the power management circuit of a small-scale energy harvester to dissipate minimal power, and thus it requires special circuit design techniques and a simple maximum power point tracking scheme. Overall, the progress made by the research and industrial community has brought the energy harvesting technology closer to the practical applications in near future.
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Esteves, Giovanni, Chris M. Fancher, Margeaux Wallace, Raegan Johnson-Wilke, Rudeger H. T. Wilke, Susan Trolier-McKinstry, Ronald G. Polcawich, and Jacob L. Jones. "In situ X-ray diffraction of lead zirconate titanate piezoMEMS cantilever during actuation." Materials & Design 111 (December 2016): 429–34. http://dx.doi.org/10.1016/j.matdes.2016.09.011.

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Sanchez, Luz M., Daniel M. Potrepka, Glen R. Fox, Ichiro Takeuchi, Ke Wang, Leonid A. Bendersky, and Ronald G. Polcawich. "Optimization of PbTiO3 seed layers and Pt metallization for PZT-based piezoMEMS actuators." Journal of Materials Research 28, no. 14 (July 19, 2013): 1920–31. http://dx.doi.org/10.1557/jmr.2013.172.

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Yang, Hao, Jinyan Zhao, Wei Ren, Zuo-Guang Ye, K. B. Vinayakumar, Rosana A. Dias, Rui M. R. Pinto, Jian Zhuang, and Nan Zhang. "Lead free 0.9Na1/2Bi1/2TiO3–0.1BaZr0.2Ti0.8O3 thin film with large piezoelectric electrostrain." Applied Physics Letters 121, no. 13 (September 26, 2022): 132903. http://dx.doi.org/10.1063/5.0106934.

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A sodium bismuth titanate-based thin film is widely investigated lead-free piezoelectrics with potential applications for modern micro-devices such as PiezoMEMS. In this work, a 0.9Na1/2Bi1/2TiO3–0.1BaZr0.2Ti0.8O3 thin film was deposited on a Pt/Ti/SiO2/Si (001) substrate by the sol–gel spin coating method. The deposited piezoelectric film shows low dielectric loss and high remnant polarization. The measured ferroelectricity loop showed a coercive field of 110 kV/cm and a saturation polarization of 46.83 μC/cm2. The piezoelectric response of this thin film does not decrease from room temperature to around 100 °C. The fabricated piezoelectric device with bottom and top electrodes showed a large macro-scale strain value of ∼4% under the DC (30 V) and AC voltages (f = 800 kHz, Vpp = 10 V).
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Dissertations / Theses on the topic "PiezoMEMS"

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Garcia, Vitor. "Sensor de pressão microeletronico baseado no efeito piezoMOS." [s.n.], 2006. http://repositorio.unicamp.br/jspui/handle/REPOSIP/261754.

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Orientador: Fabiano Fruett
Dissertação (mestrado) - Universidade Estadual de Campinas, Faculdade de Engenharia Eletrica e de Computação
Made available in DSpace on 2018-08-06T06:47:54Z (GMT). No. of bitstreams: 1 Garcia_Vitor_M.pdf: 2431852 bytes, checksum: 99df32075176f9b0322278b0ce286ba5 (MD5) Previous issue date: 2006
Resumo: Apresentamos neste trabalho um sensor de pressão de baixo consumo de potência. totalmente compatível com o processo de fabricação CMOS. constituído por um amplificador operacional sensível ao estresse mecânico fabricado sobre uma membrana. O desenho do layout do amplificador é feito de forma a maximizar o efeito do estresse sobre os transistores do par de entrada e minimizar sobre o restante do circuito. O projeto da membrana. bem como a localização dos elementos sensores sobre a mesma. Foram determinados através de simulação por elementos finitos. O sensor foi fabricado utilizando o processo CMOS 0.35 IJ.m AMS disponibilizado pelo Projeto Multi-Usuário (PMU) Fapesp. A membrana do sensor foi obtida através de um processo de desbaste mecânico da pastilha de silício onde o circuito foi fabricado. Analisamos também a dependência da tensão de limiar e da mobilidade de um transistor PMOS com relação ao estresse mecânico. O sensor fabricado apresentou um consumo de potência da ordem de 3 IJ. W e uma sensibilidade de 8.9 mV/psi
Abstract: A nove I Iow power totally CMOS compatible mechanical-stress sensitive differential amplifier. which can be used as a pressure sensor. is presented. This amplifier is based on a special designed layout where the stress sensitivity of the input differential pair. is maximized and the stress effects on the second stage are minimized. Finite element simulation was used to design the membrane and to locate the element sensor on it. The sensor was fabricated in a CMOS 0.35 IJ.m AMS process supported by the Fapesp Multi -User Project. In order to make a pressure sensor without a backside bulk micro-machining process. the thickness of the die was reduced by a mechanical polishing process. This work also analised the limiar-voltage and the mobility dependence with regard to mechanical stress. The sensor power consumption amounts to 3 IJ. W and the sensitivity amounts to 8.9 m V/psi
Mestrado
Eletrônica, Microeletrônica e Optoeletrônica
Mestre em Engenharia Elétrica
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Tiwari, Sudhanshu. "Development of PZT Based PiezoMEMS for Fluid Property Sensing." Thesis, 2020. https://etd.iisc.ac.in/handle/2005/5085.

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The research on Microelectromechanical Systems (MEMS) has resulted in several practical applications which have revolutionised the fi eld of sensors and actuators. Piezoresistive pressure sensors, capacitive micro-mirror devices, and accelerometers are a few of the earliest successful examples of practical MEMS devices. PiezoMEMS are a class of devices wherein thin piezoelectric films are used as active elements for transduction. These devices offer several advantages over capacitive MEMS such as low voltage operation, higher in-air Q-factor and relatively large actuation force. Lead Zirconate Titanate (PZT) is the most widely used bulk piezoelectric material owing to its high piezoelectric coupling coeffcients. The materials research community has been able to develop good quality thin fi lms of PZT for MEMS applications. How- ever, the introduction of PZT in MEMS devices has been mired with several challenges. These challenges were captured well by a Yole report from 2013 that stated, \The main difficulty for thin lm PZT technology is the integration of this exotic material into a ro- bust and reproducible process flow. There are major technological challenges associated with thin- lm PZT integration into a product: deposition, etching, process monitoring, test, reliability." The main goal of this thesis is to present engineering solutions to the challenges associated with the development of PZT based MEMS devices. Once a robust process for fabrication of different devices was achieved, we could scale up the process to fabricate several different devices on a single wafer, proving the viability of the process as a multiuser MEMS process. The results from several actuator/sensors realised using the process are presented in the thesis. One of our target applications was to develop a platform of self-actuating and self-sensing devices. Results from several such devices are presented, and challenges associated with such development are discussed. In the end, the design of a unique tip-coupled two-cantilever (TCTC) system working as a viscometer is presented. This viscometer design offers several advantages over the reported resonant MEMS sensors such as quick and direct measurement and the possibility to measure shear rate dependant viscosity. The thesis concludes with a roadmap for rapid development of PiezoMEMS devices on the technology platform created by this study.
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"Sensor de pressão microeletronico baseado no efeito piezoMOS." Tese, Biblioteca Digital da Unicamp, 2006. http://libdigi.unicamp.br/document/?code=vtls000380202.

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Book chapters on the topic "PiezoMEMS"

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García Muriel, Luisa Fernanda, C. A. DÌaz, A. Torres, and R. A. Torres. "Sistema de Plantillas Instrumentadas “PIEZOMED” destinadas a la valoración del Calzado." In IV Latin American Congress on Biomedical Engineering 2007, Bioengineering Solutions for Latin America Health, 797–800. Berlin, Heidelberg: Springer Berlin Heidelberg, 2007. http://dx.doi.org/10.1007/978-3-540-74471-9_185.

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Conference papers on the topic "PiezoMEMS"

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Polcawich, Ronald G., Jeffrey S. Pulskamp, Sarah Bedair, Gabriel Smith, Roger Kaul, Chris Kroninger, Eric Wetzel, Hengky Chandrahalim, and Sunil A. Bhave. "Integrated PiezoMEMS actuators and sensors." In 2010 Ninth IEEE Sensors Conference (SENSORS 2010). IEEE, 2010. http://dx.doi.org/10.1109/icsens.2010.5690603.

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Belavic, Darko, George Muscalu, Katarina Vojisavljevic, Marjan Hodnik, Danjela Kuscer, Tomaz Kos, Tanja Pecnik, et al. "Ceramic packaging of PiezoMEMS devices." In 2017 21st European Microelectronics and Packaging Conference (EMPC) & Exhibition. IEEE, 2017. http://dx.doi.org/10.23919/empc.2017.8346888.

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Ontronen, Antti, Ville Kaajakari, Konsta Wjuga, Akiko Uno, Seiji Umezawa, and Yasuhiro Aida. "71 kHz Frequency Modulated PiezoMEMS Gyroscope." In 2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL). IEEE, 2023. http://dx.doi.org/10.1109/inertial56358.2023.10104005.

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Pulskamp, Jeffrey S., Ronald G. Polcawich, and Kenn Oldham. "Highly Integrated PiezoMEMS Enabled Millimeter-Scale Robotics." In ASME 2009 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. ASMEDC, 2009. http://dx.doi.org/10.1115/detc2009-87231.

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This report provides an overview of ongoing research at the U.S. Army Research Laboratory regarding the development of piezoelectric MEMS-enabled millimeter-scale robotics. Research topics include the development of enabling technologies for terrestrial locomotion, insect-inspired micro-flight, gecko-inspired reversible adhesives, and piezoelectric energy harvesting. The development of complementary lead zirconate titanate thin film MEMS devices, applicable to highly integrated millimeter-scale robotics, is also reviewed.
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Tiwari, Sudhanshu, Randhir Kumar, Ajay Dangi, and Rudra Pratap. "Enabling Fabrication of PZT Based PiezoMEMS Devices." In 2018 IEEE Sensors. IEEE, 2018. http://dx.doi.org/10.1109/icsens.2018.8589565.

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Jackson, N. "Bistable PiezoMEMS Energy Harvester with varying Magnetic Configurations." In 2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS). IEEE, 2019. http://dx.doi.org/10.1109/powermems49317.2019.51289500405.

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Alejandre, Alvaro, Oskar Olszewski, and Nathan Jackson. "Actuation control of a PiezoMEMS biomimetic robotic jellyfish." In SPIE Microtechnologies, edited by Luis Fonseca, Mika Prunnila, and Erwin Peiner. SPIE, 2017. http://dx.doi.org/10.1117/12.2264605.

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Pulskamp, J. S., D. C. Judy, R. G. Polcawich, R. Kaul, H. Chandrahalim, and S. A. Bhave. "Monolithically Integrated Piezomems SP2T Switch and Contour-Mode Filters." In 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2009. http://dx.doi.org/10.1109/memsys.2009.4805529.

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Jackson, Nathan, Oskar Olszewski, Cian O'Murchu, and Alan Mathewson. "Powering a leadless pacemaker using a PiezoMEMS energy harvester." In SPIE Microtechnologies, edited by Luis Fonseca, Mika Prunnila, and Erwin Peiner. SPIE, 2017. http://dx.doi.org/10.1117/12.2264437.

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Cruau, A., G. Schropfer, and G. Lorenz. "A novel software environment for design and simulation of piezoMEMS." In 2012 International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD). IEEE, 2012. http://dx.doi.org/10.1109/smacd.2012.6339432.

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