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Journal articles on the topic 'Piezoelectric Micromachined Ultrasound Transducers'

Author: Grafiati

Published: 6 September 2023

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1

Peng, Chang, Huaiyu Wu, Seungsoo Kim, Xuming Dai, and Xiaoning Jiang. "Recent Advances in Transducers for Intravascular Ultrasound (IVUS) Imaging." Sensors 21, no. 10 (May 19, 2021): 3540. http://dx.doi.org/10.3390/s21103540.

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As a well-known medical imaging methodology, intravascular ultrasound (IVUS) imaging plays a critical role in diagnosis, treatment guidance and post-treatment assessment of coronary artery diseases. By cannulating a miniature ultrasound transducer mounted catheter into an artery, the vessel lumen opening, vessel wall morphology and other associated blood and vessel properties can be precisely assessed in IVUS imaging. Ultrasound transducer, as the key component of an IVUS system, is critical in determining the IVUS imaging performance. In recent years, a wide range of achievements in ultrasound transducers have been reported for IVUS imaging applications. Herein, a comprehensive review is given on recent advances in ultrasound transducers for IVUS imaging. Firstly, a fundamental understanding of IVUS imaging principle, evaluation parameters and IVUS catheter are summarized. Secondly, three different types of ultrasound transducers (piezoelectric ultrasound transducer, piezoelectric micromachined ultrasound transducer and capacitive micromachined ultrasound transducer) for IVUS imaging are presented. Particularly, the recent advances in piezoelectric ultrasound transducer for IVUS imaging are extensively examined according to their different working mechanisms, configurations and materials adopted. Thirdly, IVUS-based multimodality intravascular imaging of atherosclerotic plaque is discussed. Finally, summary and perspectives on the future studies are highlighted for IVUS imaging applications.

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2

Peng, Jue, Chen Chao, and Hu Tang. "Piezoelectric Micromachined Ultrasonic Transducer with a Dome-Shaped Single Layer Structure." Materials Science Forum 675-677 (February 2011): 1131–34. http://dx.doi.org/10.4028/www.scientific.net/msf.675-677.1131.

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Piezoelectric micromachined ultrasonic transducers (pMUTs) have been investigated as a promising new approach for ultrasound generation and reception. Most of the reported pMUTs employs a unimorph structure of a micromachined piezoelectric thin film on a silicon membrane. In this paper, a dome-shaped model for piezoelectric micromachined ultrasonic transducer (pMUT) was proposed to replace the conventional unimorph structure. A finite element analysis was carried out to study the elecro-mechanical behaviour of the dome-shaped model. The result showed that a considerable improvement of electro-mechanical coupling performance was achieved with the new model.

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3

Manwar, Rayyan, Karl Kratkiewicz, and Kamran Avanaki. "Overview of Ultrasound Detection Technologies for Photoacoustic Imaging." Micromachines 11, no. 7 (July 17, 2020): 692. http://dx.doi.org/10.3390/mi11070692.

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Ultrasound detection is one of the major components of photoacoustic imaging systems. Advancement in ultrasound transducer technology has a significant impact on the translation of photoacoustic imaging to the clinic. Here, we present an overview on various ultrasound transducer technologies including conventional piezoelectric and micromachined transducers, as well as optical ultrasound detection technology. We explain the core components of each technology, their working principle, and describe their manufacturing process. We then quantitatively compare their performance when they are used in the receive mode of a photoacoustic imaging system.

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4

Birjis, Yumna, Siddharth Swaminathan, Haleh Nazemi, Gian Carlo Antony Raj, Pavithra Munirathinam, Aya Abu-Libdeh, and Arezoo Emadi. "Piezoelectric Micromachined Ultrasonic Transducers (PMUTs): Performance Metrics, Advancements, and Applications." Sensors 22, no. 23 (November 25, 2022): 9151. http://dx.doi.org/10.3390/s22239151.

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With the development of technology, systems gravitate towards increasing in their complexity, miniaturization, and level of automation. Amongst these systems, ultrasonic devices have adhered to this trend of advancement. Ultrasonic systems require transducers to generate and sense ultrasonic signals. These transducers heavily impact the system’s performance. Advancements in microelectromechanical systems have led to the development of micromachined ultrasonic transducers (MUTs), which are utilized in miniaturized ultrasound systems. Piezoelectric micromachined ultrasonic transducers (PMUTs) exhibit higher capacitance and lower electrical impedance, which enhances the transducer’s sensitivity by minimizing the effect of parasitic capacitance and facilitating their integration with low-voltage electronics. PMUTs utilize high-yield batch microfabrication with the use of thin piezoelectric films. The deposition of thin piezoelectric material compatible with complementary metal-oxide semiconductors (CMOS) has opened novel avenues for the development of miniaturized compact systems with the same substrate for application and control electronics. PMUTs offer a wide variety of applications, including medical imaging, fingerprint sensing, range-finding, energy harvesting, and intrabody and underwater communication links. This paper reviews the current research and recent advancements on PMUTs and their applications. This paper investigates in detail the important transduction metrics and critical design parameters for high-performance PMUTs. Piezoelectric materials and microfabrication processes utilized to manufacture PMUTs are discussed. Promising PMUT applications and outlook on future advancements are presented.

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5

Roy, Kaustav, Harshvardhan Gupta, Vijayendra Shastri, Ajay Dangi, Antony Jeyaseelan, Soma Dutta, and Rudra Pratap. "Fluid Density Sensing Using Piezoelectric Micromachined Ultrasound Transducers." IEEE Sensors Journal 20, no. 13 (July 1, 2020): 6802–9. http://dx.doi.org/10.1109/jsen.2019.2936469.

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6

Liu, Ya-Han, Hsin-Yi Su, Hsiao-Chi Lin, Chih-Ying Li, Yeong-Her Wang, and Chih-Hsien Huang. "Investigation of Achieving Ultrasonic Haptic Feedback Using Piezoelectric Micromachined Ultrasonic Transducer." Electronics 11, no. 14 (July 7, 2022): 2131. http://dx.doi.org/10.3390/electronics11142131.

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Ultrasound haptics is a contactless tactile feedback method that creates a tactile sensation by focusing high-intensity ultrasound on human skin. Although air-coupled ultrasound transducers have been applied to commercial products, the existing models are too bulky to be integrated into consumer electronics. Therefore, this study proposes a piezoelectric micromachined ultrasonic transducer (pMUT) with a small size and low power consumption to replace traditional transducers. The proposed pMUT has a resonance frequency of 40 kHz and a radius designed through the circular plate model and finite element model. To achieve better performance, lead zirconate titanate was selected as the piezoelectric layer and fabricated via RF sputtering. The cavity of the pMUT was formed by releasing a circular membrane with deep reactive ion etching. The resonance frequency of the pMUT was 32.9 kHz, which was close to the simulation result. The acoustic pressure of a single pMUT was 0.227 Pa at 70 Vpp. This study has successfully demonstrated a pMUT platform, including the optimized design procedures, characterization techniques, and fabrication process, as well as showing the potential of pMUT arrays for ultrasound haptics applications.

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7

Li, Penglu, Zheng Fan, Xiaoya Duan, Danfeng Cui, Junbin Zang, Zengxing Zhang, and Chenyang Xue. "Enhancement of the Transmission Performance of Piezoelectric Micromachined Ultrasound Transducers by Vibration Mode Optimization." Micromachines 13, no. 4 (April 10, 2022): 596. http://dx.doi.org/10.3390/mi13040596.

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Ultrasound is widely used in industry and the agricultural, biomedical, military, and other fields. As key components in ultrasonic applications, the characteristic parameters of ultrasonic transducers fundamentally determine the performance of ultrasonic systems. High-frequency ultrasonic transducers are small in size and require high precision, which puts forward higher requirements for sensor design, material selection, and processing methods. In this paper, a three-dimensional model of a high-frequency piezoelectric micromachined ultrasonic transducer (PMUT) is established based on the finite element method (FEM). This 3D model consists of a substrate, a silicon device layer, and a molybdenum-aluminum nitride-molybdenum (Mo-AlN-Mo) sandwich piezoelectric layer. The effect of the shape of the transducer’s vibrating membrane on the transmission performance was studied. Through a discussion of the parametric scanning of the key dimensions of the diaphragms of the three structures, it was concluded that the fundamental resonance frequency of the hexagonal diaphragm was higher than that of the circle and the square under the same size. Compared with the circular diaphragm, the sensitivity of the square diaphragm increased by 8.5%, and the sensitivity of the hexagonal diaphragm increased by 10.7%. The maximum emission sound-pressure level of the hexagonal diaphragm was 6.6 times higher than that of the circular diaphragm. The finite element results show that the hexagonal diaphragm design has great advantages for improving the transmission performance of the high-frequency PMUT.

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8

Dangi, Ajay, Christopher Y. Cheng, Sumit Agrawal, Sudhanshu Tiwari, Gaurav Ramesh Datta, Robert R. Benoit, Rudra Pratap, Susan Trolier-Mckinstry, and Sri-Rajasekhar Kothapalli. "A Photoacoustic Imaging Device Using Piezoelectric Micromachined Ultrasound Transducers (PMUTs)." IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 67, no. 4 (April 2020): 801–9. http://dx.doi.org/10.1109/tuffc.2019.2956463.

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9

Yang, Yi, He Tian, Bing Yan, Hui Sun, Can Wu, Yi Shu, Li-Gang Wang, and Tian-Ling Ren. "A flexible piezoelectric micromachined ultrasound transducer." RSC Advances 3, no. 47 (2013): 24900. http://dx.doi.org/10.1039/c3ra44619k.

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10

Steve, Freidlay, Robert Littrell, Craig Core, Don Banfield, and Robert D. White. "Aluminum nitride piezoelectric micromachined ultrasound transducers with applications in sonic anemometry." Journal of the Acoustical Society of America 150, no. 4 (October 2021): A96. http://dx.doi.org/10.1121/10.0007747.

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11

Dausch, David E., John B. Castellucci, Derrick R. Chou, and Olaf T. von Ramm. "Theory and operation of 2-D array piezoelectric micromachined ultrasound transducers." IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 55, no. 11 (November 2008): 2484–92. http://dx.doi.org/10.1109/tuffc.956.

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12

Peng, Xiaojian, Jue Peng, Hu Tang, Tianfu Wang, and Siping Chen. "Ultrahigh Frequency Micromachined Ultrasound Transducers Based on Piezoelectric Single Crystalline Wafers." Journal of Medical Imaging and Health Informatics 5, no. 2 (April 1, 2015): 374–77. http://dx.doi.org/10.1166/jmihi.2015.1402.

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13

He, Yashuo, Haotian Wan, Xiaoning Jiang, and Chang Peng. "Piezoelectric Micromachined Ultrasound Transducer Technology: Recent Advances and Applications." Biosensors 13, no. 1 (December 29, 2022): 55. http://dx.doi.org/10.3390/bios13010055.

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The objective of this article is to review the recent advancement in piezoelectric micromachined ultrasound transducer (PMUT) technology and the associated piezoelectric materials, device fabrication and characterization, as well as applications. PMUT has been an active research topic since the late 1990s because of the ultrasound application needs of low cost large 2D arrays, and the promising progresses on piezoelectric thin films, semiconductors, and micro/nano-electromechanical system technology. However, the industrial and medical applications of PMUTs have not been very significant until the recent success of PMUT based fingerprint sensing, which inspired growing interests in PMUT research and development. In this paper, recent advances of piezoelectric materials for PMUTs are reviewed first by analyzing the material properties and their suitability for PMUTs. PMUT structures and the associated micromachining processes are next reviewed with a focus on the complementary metal oxide semiconductor compatibility. PMUT prototypes and their applications over the last decade are then summarized to show the development trend of PMUTs. Finally, the prospective future of PMUTs is discussed as well as the challenges on piezoelectric materials, micro/nanofabrication and device integration.

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14

Cheng, Christopher, Travis Peters, Ajay Dangi, Sumit Agrawal, Haoyang Chen, Sri-Rajasekhar Kothapalli, and Susan Trolier-McKinstry. "Improving PMUT Receive Sensitivity via DC Bias and Piezoelectric Composition." Sensors 22, no. 15 (July 27, 2022): 5614. http://dx.doi.org/10.3390/s22155614.

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The receive sensitivity of lead zirconate titanate (PZT) piezoelectric micromachined ultrasound transducers (PMUTs) was improved by applying a DC bias during operation. The PMUT receive sensitivity is governed by the voltage piezoelectric coefficient, h31,f. With applied DC biases (up to 15 V) on a 2 μm PbZr0.52Ti0.48O3 film, e31,f increased 1.6 times, permittivity decreased by a factor of 0.6, and the voltage coefficient increased by ~2.5 times. For released PMUT devices, the ultrasound receive sensitivity improved by 2.5 times and the photoacoustic signal improved 1.9 times with 15 V applied DC bias. B-mode photoacoustic imaging experiments showed that with DC bias, the PMUT received clearer photoacoustic signals from pencil leads at 4.3 cm, compared to 3.7 cm without DC bias.

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15

Wang, Haoran, Yifei Ma, Hao Yang, Huabei Jiang, Yingtao Ding, and Huikai Xie. "MEMS Ultrasound Transducers for Endoscopic Photoacoustic Imaging Applications." Micromachines 11, no. 10 (October 12, 2020): 928. http://dx.doi.org/10.3390/mi11100928.

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Photoacoustic imaging (PAI) is drawing extensive attention and gaining rapid development as an emerging biomedical imaging technology because of its high spatial resolution, large imaging depth, and rich optical contrast. PAI has great potential applications in endoscopy, but the progress of endoscopic PAI was hindered by the challenges of manufacturing and assembling miniature imaging components. Over the last decade, microelectromechanical systems (MEMS) technology has greatly facilitated the development of photoacoustic endoscopes and extended the realm of applicability of the PAI. As the key component of photoacoustic endoscopes, micromachined ultrasound transducers (MUTs), including piezoelectric MUTs (pMUTs) and capacitive MUTs (cMUTs), have been developed and explored for endoscopic PAI applications. In this article, the recent progress of pMUTs (thickness extension mode and flexural vibration mode) and cMUTs are reviewed and discussed with their applications in endoscopic PAI. Current PAI endoscopes based on pMUTs and cMUTs are also introduced and compared. Finally, the remaining challenges and future directions of MEMS ultrasound transducers for endoscopic PAI applications are given.

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16

Georgitzikis, Epimitheas, Pieter Gijsenbergh, Jeremy Segers, Dominika Wysocka, John Viaene, Tibor Kuna, Robert Ukropec, et al. "78‐2: A flat‐panel‐display compatible ultrasound platform." SID Symposium Digest of Technical Papers 54, no. 1 (June 2023): 1101–4. http://dx.doi.org/10.1002/sdtp.16764.

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We present a thin‐film piezoelectric micromachined ultrasonic transducer (PMUT) technology compatible with flat‐panel manufacturing methods. Using the developed flow which is based on a low temperature AlScN piezoelectric layer, we fabricate large area 48x48 element PMUT arrays on glass. Beam steering and ultrasound medical imaging are demonstrated. The developed transducer technology can be combined with a TFT backplane and has the potential of direct integration on top of display size glass sheets, expanding the boundaries of ultrasound application domains.

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17

Chan, Jasmine, Zhou Zheng, Kevan Bell, Martin Le, Parsin Haji Reza, and John T. W. Yeow. "Photoacoustic Imaging with Capacitive Micromachined Ultrasound Transducers: Principles and Developments." Sensors 19, no. 16 (August 20, 2019): 3617. http://dx.doi.org/10.3390/s19163617.

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Photoacoustic imaging (PAI) is an emerging imaging technique that bridges the gap between pure optical and acoustic techniques to provide images with optical contrast at the acoustic penetration depth. The two key components that have allowed PAI to attain high-resolution images at deeper penetration depths are the photoacoustic signal generator, which is typically implemented as a pulsed laser and the detector to receive the generated acoustic signals. Many types of acoustic sensors have been explored as a detector for the PAI including Fabry–Perot interferometers (FPIs), micro ring resonators (MRRs), piezoelectric transducers, and capacitive micromachined ultrasound transducers (CMUTs). The fabrication technique of CMUTs has given it an edge over the other detectors. First, CMUTs can be easily fabricated into given shapes and sizes to fit the design specifications. Moreover, they can be made into an array to increase the imaging speed and reduce motion artifacts. With a fabrication technique that is similar to complementary metal-oxide-semiconductor (CMOS), CMUTs can be integrated with electronics to reduce the parasitic capacitance and improve the signal to noise ratio. The numerous benefits of CMUTs have enticed researchers to develop it for various PAI purposes such as photoacoustic computed tomography (PACT) and photoacoustic endoscopy applications. For PACT applications, the main areas of research are in designing two-dimensional array, transparent, and multi-frequency CMUTs. Moving from the table top approach to endoscopes, some of the different configurations that are being investigated are phased and ring arrays. In this paper, an overview of the development of CMUTs for PAI is presented.

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18

Nyeon Kim, Jeong, Tianning Liu, Thomas N. Jackson, Kyusun Choi, Susan Trolier-McKinstry, Richard L. Tutwiler, and Judith A. Todd. "Design and Ultrasonic Characterization of a Thin-Film, Flexible, PMUT Array." AM&P Technical Articles 178, no. 8 (November 1, 2020): 15–20. http://dx.doi.org/10.31399/asm.amp.2020-08.p015.

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Abstract Ultrasound is widely used for nondestructive evaluation, structural health monitoring, acoustic emission, sound navigation ranging, and in sensors for automobiles, medicine, and many other applications. Next-generation, small-form-factor sensors have been achieved through advances in piezoelectric micromachined ultrasonic transducers (PMUTs) that can be positioned on either a flexible polymer or a silicon substrate to form an array. This article describes a materials and design optimization study that used finite element analyses to improve designs for robust and practical PMUT sensor arrays.

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19

Sadeghpour, Sina, Paulius Pobedinskas, Ken Haenen, and Robert Puers. "A Piezoelectric Micromachined Ultrasound Transducers (pMUT) Array, for Wide Bandwidth Underwater Communication Applications." Proceedings 1, no. 4 (August 7, 2017): 364. http://dx.doi.org/10.3390/proceedings1040364.

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20

Gijsenbergh, Pieter, Alexandre Halbach, Yongbin Jeong, Guilherme Brondani Torri, Margo Billen, Libertario Demi, Chih-Hsien Huang, David Cheyns, Xavier Rottenberg, and Veronique Rochus. "Characterization of polymer-based piezoelectric micromachined ultrasound transducers for short-range gesture recognition applications." Journal of Micromechanics and Microengineering 29, no. 7 (May 29, 2019): 074001. http://dx.doi.org/10.1088/1361-6439/ab1f41.

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21

Joshi, Sanjog Vilas, Sina Sadeghpour, and Michael Kraft. "Polyimide-On-Silicon 2D Piezoelectric Micromachined Ultrasound Transducer (PMUT) Array." Sensors 23, no. 10 (May 17, 2023): 4826. http://dx.doi.org/10.3390/s23104826.

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This paper presents a fully addressable 8 × 8 two-dimensional (2D) rigid piezoelectric micromachined ultrasonic transducer (PMUT) array. The PMUTs were fabricated on a standard silicon wafer, resulting in a low-cost solution for ultrasound imaging. A polyimide layer is used as the passive layer in the PMUT membranes on top of the active piezoelectric layer. The PMUT membranes are realized by backside deep reactive ion etching (DRIE) with an oxide etch stop. The polyimide passive layer enables high resonance frequencies that can be easily tuned by controlling the thickness of the polyimide. The fabricated PMUT with 6 µm polyimide thickness showed a 3.2 MHz in-air frequency with a 3 nm/V sensitivity. The PMUT has shown an effective coupling coefficient of 14% as calculated from the impedance analysis. An approximately 1% interelement crosstalk between the PMUT elements in one array is observed, which is at least a five-fold reduction compared to the state of the art. A pressure response of 40 Pa/V at 5 mm was measured underwater using a hydrophone while exciting a single PMUT element. A single-pulse response captured using the hydrophone suggested a 70% −6 dB fractional bandwidth for the 1.7 MHz center frequency. The demonstrated results have the potential to enable imaging and sensing applications in shallow-depth regions, subject to some optimization.

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22

Przybyla, Richard J., Stefon E. Shelton, André Guedes, Igor I. Izyumin, Mitchell H. Kline, David A. Horsley, and Bernhard E. Boser. "In-Air Rangefinding With an AlN Piezoelectric Micromachined Ultrasound Transducer." IEEE Sensors Journal 11, no. 11 (November 2011): 2690–97. http://dx.doi.org/10.1109/jsen.2011.2157490.

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23

Yao, Yunxin, Licheng Jia, Chongbin Liu, Xiangyang Wang, Chengliang Sun, Sheng Liu, and Guoqiang Wu. "A transceiver integrated piezoelectric micromachined ultrasound transducer array for underwater imaging." Sensors and Actuators A: Physical 359 (September 2023): 114476. http://dx.doi.org/10.1016/j.sna.2023.114476.

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24

Li, Tao, Le Zhang, Wenping Geng, Jian He, Yongkang Rao, Jiabing Huo, Kunxian Yan, and Xiujian Chou. "Fabrication and DC-Bias Manipulation Frequency Characteristics of AlN-Based Piezoelectric Micromachined Ultrasonic Transducer." Micromachines 14, no. 1 (January 14, 2023): 210. http://dx.doi.org/10.3390/mi14010210.

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Due to their excellent capabilities to generate and sense ultrasound signals in an efficient and well-controlled way at the microscale, piezoelectric micromechanical ultrasonic transducers (PMUTs) are being widely used in specific systems, such as medical imaging, biometric identification, and acoustic wireless communication systems. The ongoing demand for high-performance and adjustable PMUTs has inspired the idea of manipulating PMUTs by voltage. Here, PMUTs based on AlN thin films protected by a SiO2 layer of 200 nm were fabricated using a standard MEMS process with a resonant frequency of 505.94 kHz, a −6 dB bandwidth (BW) of 6.59 kHz, and an electromechanical coupling coefficient of 0.97%. A modification of 4.08 kHz for the resonant frequency and a bandwidth enlargement of 60.2% could be obtained when a DC bias voltage of −30 to 30 V was applied, corresponding to a maximum resonant frequency sensitivity of 83 Hz/V, which was attributed to the stress on the surface of the piezoelectric film induced by the external DC bias. These findings provide the possibility of receiving ultrasonic signals within a wider frequency range, which will play an important role in underwater three-dimensional imaging and nondestructive testing.

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25

Qiu, Yongqiang, James Gigliotti, Margeaux Wallace, Flavio Griggio, Christine Demore, Sandy Cochran, and Susan Trolier-McKinstry. "Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging." Sensors 15, no. 4 (April 3, 2015): 8020–41. http://dx.doi.org/10.3390/s150408020.

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26

Mitsuta, Hiroki, Taiichi Takezaki, Kaoru Sakai, Kenta Sumikawa, Masakatsu Murai, and Kotaro Kikukawa. "Improved Signal Detection Sensitivity for High Resolution Imaging in Scanning Acoustic Tomography." EDFA Technical Articles 22, no. 3 (August 1, 2020): 28–35. http://dx.doi.org/10.31399/asm.edfa.2020-3.p028.

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Abstract Scanning acoustic tomography (SAT) is widely used to detect defects such as voids and delamination in electronic devices. In this article, the authors explain how they improved the spatial resolution and detection sensitivity of SAT by switching from a conventional piezoelectric probe to a capacitive micromachined ultrasound transducer (CMUT) and by using pulse compression signal processing. They also present examples showing how the improvement makes it possible to detect very small defects in multilayer stacks and BGA packages whether in through-transmission or reflection imaging mode.

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Ngoc Thao, Pham, Shinya Yoshida, and Shuji Tanaka. "Fabrication and Characterization of PZT Fibered-Epitaxial Thin Film on Si for Piezoelectric Micromachined Ultrasound Transducer." Micromachines 9, no. 9 (September 11, 2018): 455. http://dx.doi.org/10.3390/mi9090455.

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This paper presents a fibered-epitaxial lead zirconate titanate (PZT) thin film with intermediate features between the monocrystalline and polycrystalline thin films for piezoelectric micromachined ultrasound transducer (pMUT). The grain boundaries confirmed by scanning electron microscopy, but it still maintained the in-plane epitaxial relationship found by X-ray diffraction analyses. The dielectric constant (εr33 = 500) was relatively high compared to those of the monocrystalline thin films, but was lower than those of conventional polycrystalline thin films near the morphotropic phase boundary composition. The fundamental characterizations were evaluated through the operation tests of the prototyped pMUT with the fibered-epitaxial thin film. As a result, its piezoelectric coefficient without poling treatment was estimated to be e31,f = −10–−11 C/m2, and thus reasonably high compared to polycrystalline thin films. An appropriate poling treatment increased e31,f and decreased εr33. In addition, this unique film was demonstrated to be mechanically tougher than the monocrystalline thin film. It has the potential ability to become a well-balanced piezoelectric film with both high signal-to-noise ratio and mechanical toughness for pMUT.

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Bespalova, Kristina, Elmeri Osterlund, Glenn Ross, Mervi Paulasto-Krockel, Abhilash Thanniyil Sebastian, Cyril Baby Karuthedath, Stefan Mertin, and Tuomas Pensala. "Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication." Journal of Microelectromechanical Systems 30, no. 2 (April 2021): 290–98. http://dx.doi.org/10.1109/jmems.2021.3056928.

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29

Liu, Chang, Binzhen Zhang, Chenyang Xue, Wendong Zhang, Guojun Zhang, and Yijun Cheng. "Multi-Perspective Ultrasound Imaging Technology of the Breast with Cylindrical Motion of Linear Arrays." Applied Sciences 9, no. 3 (January 26, 2019): 419. http://dx.doi.org/10.3390/app9030419.

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In this paper, we propose a multi-perspective ultrasound imaging technology with the cylindrical motion of four piezoelectric micromachined ultrasonic transducer (PMUT) rotatable linear arrays. The transducer is configured in a cross shape vertically on the circle with the length of the arrays parallel to the z axis, roughly perpendicular to the chest wall. The transducers surrounded the breast, which achieves non-invasive detection. The electric rotary table drives the PMUT to perform cylindrical scanning. A breast model with a 2 cm mass in the center and six 1-cm superficial masses were used for the experimental analysis. The detection was carried out in a water tank and the working temperature was constant at 32 °C. The breast volume data were acquired by rotating the probe 90° with a 2° interval, which were 256 × 180 A-scan lines. The optimized segmented dynamic focusing technology was used to improve the image quality and data reconstruction was performed. A total of 256 A-scan lines at a constant angle were recombined and 180 A-scan lines were recombined according to the nth element as a dataset, respectively. Combined with ultrasound imaging algorithms, multi-perspective ultrasound imaging was realized including vertical slices, horizontal slices and 3D imaging. The seven masses were detected and the absolute error of the size was approximately 1 mm where even the image of the injection pinhole could be seen. Furthermore, the breast boundary could be seen clearly from the chest wall to the nipple, so the location of the masses was easier to confirm. Therefore, the validity and feasibility of the data reconstruction method and imaging algorithm were verified. It will be beneficial for doctors to be able to comprehensively observe the pathological tissue.

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Jeong, Ji-Yong, Jong-Keun Song, Min-Seog Choi, Seong-Kwan Hong, and Oh-Kyong Kwon. "A High Frame Rate Analog Front-End IC With Piezoelectric Micromachined Ultrasound Transducers Using Analog Multi-Line Acquisition for Ultrasound Imaging Systems." IEEE Access 9 (2021): 119298–309. http://dx.doi.org/10.1109/access.2021.3108790.

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31

Xiu, Xueying, Haolin Yang, Meilin Ji, Haochen Lv, and Songsong Zhang. "Development of MEMS Airflow Volumetric Flow Sensing System with Single Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Array." Micromachines 13, no. 11 (November 15, 2022): 1979. http://dx.doi.org/10.3390/mi13111979.

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Compared to conventional ultrasonic flowmeters using multiple transducers, this paper reports, for the first time, an airflow volumetric flowmeter using a signal PMUT array to measure the flow rate in a rectangular pipe. The PMUT around 200 kHz is selected to fit the system requirements. All PMUT elements on this single array are then electrically grouped into transmitter and receiver. In order to minimize the crosstalk signal between transmitter and receiver, a phase shift signal is applied at the transmitter to reduce the amplitude of the crosstalk signal by 87.8%, hence, the resultant high sensing resolution. Based on the analog signal extracted from the single PMUT array, a complete flow sensing system is built by using the cross-correlation method and cosine interpolation, whereby the change in flow rate is reflected by the time of flight difference (dTof) recorded at the receiver. Meanwhile, the acoustic path self-calibration is realized by using multiple echoes. Compared with the previously reported MEMS flowmeters with dual or multiple PMUT devices, this paper proposes a single PMUT array flow sensing system, which is able to measure the flow rate changes up to 4 m3/h. With the implementation of a single device, the problem of ultrasound device/reflector misalignment during system setup is completely eradicated.

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Liu, Lifang, Weiliang Ji, Zhanqiang Xing, Xiangyu Sun, Yu Chen, Yijia Du, and Feng Qin. "A dual-frequency piezoelectric micromachined ultrasound transducer array with low inter-element coupling effects." Journal of Micromechanics and Microengineering 31, no. 4 (February 11, 2021): 045005. http://dx.doi.org/10.1088/1361-6439/abde8f.

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Sadeghpour, Sina, and Robert Puers. "Optimization in the Design and Fabrication of a PZT Piezoelectric Micromachined Ultrasound Transducer (PMUT)." Proceedings 2, no. 13 (November 29, 2018): 743. http://dx.doi.org/10.3390/proceedings2130743.

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This paper presents an optimized way of lead zirconate titanate (PZT) deposition in orderto selectively grow three different (100/001), (110), and (111) crystal orientation in two differentthickness ranges, thinner and thicker than 400 nm. The thickness of the PZT layer is also optimizedto not diminish the generated bending moment more than 10%. A 1μm PZT layer with (100/001)dominant crystal orientation and highly columnar crystal structure is deposited and used in thefabrication of a circular PMUT. The PMUT has a 410 μm diameter and resonates at 462 kHz withthe displacement of 1200 nm/V.

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Sadeghpour, Sina, Bram Lips, Michael Kraft, and Robert Puers. "Bendable Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays Based on Silicon-On-Insulator (SOI) Technology." Journal of Microelectromechanical Systems 29, no. 3 (June 2020): 378–86. http://dx.doi.org/10.1109/jmems.2020.2972729.

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Kim, Jeong Nyeon, Tianning Liu, Thomas N. Jackson, Kyusun Choi, Susan Trolier-McKinstry, Richard L. Tutwiler, and Judith A. Todd. "10 MHz Thin-Film PZT-Based Flexible PMUT Array: Finite Element Design and Characterization." Sensors 20, no. 15 (August 4, 2020): 4335. http://dx.doi.org/10.3390/s20154335.

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Piezoelectric micromachined ultrasound transducers (PMUT) incorporating lead zirconate titanate PbZr0.52Ti0.48O3 (PZT) thin films were investigated for miniaturized high-frequency ultrasound systems. A recently developed process to remove a PMUT from an underlying silicon (Si) substrate has enabled curved arrays to be readily formed. This research aimed to improve the design of flexible PMUT arrays using PZFlex, a finite element method software package. A 10 MHz PMUT 2D array working in 3-1 mode was designed. A circular unit-cell was structured from the top, with concentric layers of platinum (Pt)/PZT/Pt/titanium (Ti) on a polyimide (PI) substrate. Pulse-echo and spectral response analyses predicted a center frequency of 10 MHz and bandwidth of 87% under water load and air backing. A 2D array, consisting of the 256 (16 × 16) unit-cells, was created and characterized in terms of pulse-echo and spectral responses, surface displacement profiles, crosstalk, and beam profiles. The 2D array showed: decreased bandwidth due to protracted oscillation decay and guided wave effects; mechanical focal length at 2.9 mm; 3.7 mm depth of field for -6 dB; and -55.6 dB crosstalk. Finite element-based virtual prototyping identified figures of merit—center frequency, bandwidth, depth of field, and crosstalk—that could be optimized to design robust, flexible PMUT arrays.

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Wu, Sheng, Kangfu Liu, Wenjing Wang, Wei Li, Tao Wu, Heng Yang, and Xinxin Li. "Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducer Arrays for Non-Invasive Monitoring of Radial Artery Stiffness." Micromachines 14, no. 3 (February 25, 2023): 539. http://dx.doi.org/10.3390/mi14030539.

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An aluminum nitride (AlN) piezoelectric micromachined ultrasound transducer (PMUT) array was proposed and fabricated for non-invasive radial artery stiffness monitoring, which could be employed in human vascular health monitoring applications. Using surface micromachining techniques, four hexagonal PMUT arrays were fabricated within a chip area of 3 × 3 mm2. The mechanical displacement sensitivity and quality factor of a single PMUT were tested and found to be 24.47 nm/V at 5.94 MHz and 278 (in air), respectively. Underwater pulse-echo tests for the array demonstrated a −3 dB bandwidth of 0.76 MHz at 3.75 MHz and distance detection limit of approximately 25 mm. Using the PMUT array as an ultrasonic probe, the depth and diameter changes over cardiac cycles of the radial artery were measured to be approximately 3.8 mm and 0.23 mm, respectively. Combined with blood pressure calibration, the biomechanical parameters of the radial artery vessel were extracted using a one-dimensional vascular model. The cross-sectional distensibility, compliance, and stiffness index were determined to be 4.03 × 10−3/mmHg, 1.87 × 10−2 mm2/mmHg, and 5.25, respectively, consistent with the newest medical research. The continuous beat-to-beat blood pressure was also estimated using this model. This work demonstrated the potential of miniaturized PMUT devices for human vascular medical ultrasound applications.

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Liu, Wei, and Dawei Wu. "Low Temperature Adhesive Bonding-Based Fabrication of an Air-Borne Flexible Piezoelectric Micromachined Ultrasonic Transducer." Sensors 20, no. 11 (June 11, 2020): 3333. http://dx.doi.org/10.3390/s20113333.

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This paper presents the development of a flexible piezoelectric micromachined ultrasonic transducer (PMUT) that can conform to flat, concave, and convex surfaces and work in air. The PMUT consists of an Ag-coated polyvinylidene fluoride (PVDF) film mounted onto a laser-manipulated polymer substrate. A low temperature (<100 °C) adhesive bonding technique is adopted in the fabrication process. Finite element analysis (FEA) is implemented to confirm the capability of predicting the resonant frequency of composite diaphragms and optimizing the device. The manufactured PMUT exhibits a center frequency of 198 kHz with a wide operational bandwidth. Its acoustic performance is demonstrated by transmitting and receiving ultrasound in air on curved surface. The conclusions from this study indicate the proposed PMUT has great potential in ultrasonic and wearable devices applications.

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Kang, Woojin, Joontaek Jung, Wonjun Lee, Jungho Ryu, and Hongsoo Choi. "A thickness-mode piezoelectric micromachined ultrasound transducer annular array using a PMN–PZT single crystal." Journal of Micromechanics and Microengineering 28, no. 7 (April 26, 2018): 075015. http://dx.doi.org/10.1088/1361-6439/aab9d4.

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Sadeghpour, S., M. Kraft, and R. Puers. "Design and fabrication strategy for an efficient lead zirconate titanate based piezoelectric micromachined ultrasound transducer." Journal of Micromechanics and Microengineering 29, no. 12 (October 4, 2019): 125002. http://dx.doi.org/10.1088/1361-6439/ab4527.

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Draghi, Ferdinando, Pascal Lomoro, Chandra Bortolotto, Luca Mastrogirolamo, and Fabrizio Calliada. "Comparison between a new ultrasound probe with a capacitive micromachined transducer (CMUT) and a traditional one in musculoskeletal pathology." Acta Radiologica 61, no. 12 (March 4, 2020): 1653–60. http://dx.doi.org/10.1177/0284185120907983.

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Background The capacitive micromachined ultrasound transducer (CMUT) is a new ultrasound (US) probe manufactured by state-of-the-art cutting-edge semi-conductor micromachined electro-mechanical systems (MEMS) technology. Purpose To demonstrate the peculiar characteristics of each probe and the limitations that should be improved. Material and Methods This study was performed from March to April 2018. The only inclusion criterion was the presence of disease, so all patients with musculoskeletal, skin, and subcutaneous pathology were included. A total of 66 patients entered this study. The exams of each patient, with both probes, were evaluated retrospectively and independently by three radiologists. Panoramicity of the images, the definition of superficial structures (<2 cm of depth), the definition of deep structures (>2 cm), and Doppler signal were assessed. A 5-point scale was used for each parameter. Results A total of 89 pathologies were detected. The mean of score for 4G-CMUT was higher than L64 for the panoramicity of the images and the definition of the deep structures. Instead, the mean score for L64 was higher than for 4G-CMUT in the evaluation of superficial structures and Doppler signal. A statistically significant difference was found ( P < 0.05). Conclusion CMUT is a breakthrough in US technology. It allows the use of a single probe for different US examinations. The musculoskeletal, skin, and subcutaneous US can be evaluated with a piezoelectric linear transducer or CMUT. In the present study, the overall diagnostic performance was similar. Improvements in CMUT will provide even more dynamic and flexible imaging capabilities by a transducer, with a wider bandwidth.

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Zang, Junbin, Zheng Fan, Penglu Li, Xiaoya Duan, Chunsheng Wu, Danfeng Cui, and Chenyang Xue. "Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film." Micromachines 13, no. 8 (August 14, 2022): 1317. http://dx.doi.org/10.3390/mi13081317.

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A piezoelectric micromachined ultrasonic transducer (PMUT) is a microelectromechanical system (MEMS) device that can transmit and receive ultrasonic waves. Given its advantages of high-frequency ultrasound with good directionality and high resolution, PMUT can be used in application scenarios with low power supply, such as fingerprint recognition, nondestructive testing, and medical diagnosis. Here, a PMUT based on an aluminum nitride thin-film material is designed and fabricated. First, the eigenfrequencies of the PMUT are studied with multiphysics coupling simulation software, and the relationship between eigenfrequencies and vibration layer parameters is determined. The transmission performance of the PMUT is obtained via simulation. The PMUT device is fabricated in accordance with the designed simple MEMS processing process. The topography of the PMUT vibration layer is determined via scanning electron microscopy, and the resonant frequency of the PMUT device is 7.43 MHz. The electromechanical coupling coefficient is 2.21% via an LCR tester.

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Lu, Yipeng, Hao-Yen Tang, Stephanie Fung, Bernhard E. Boser, and David A. Horsley. "Pulse-Echo Ultrasound Imaging Using an AlN Piezoelectric Micromachined Ultrasonic Transducer Array With Transmit Beam-Forming." Journal of Microelectromechanical Systems 25, no. 1 (February 2016): 179–87. http://dx.doi.org/10.1109/jmems.2015.2503336.

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Liu, Chang, Binzhen Zhang, Chenyang Xue, Guojun Zhang, Wendong Zhang, and Yijun Cheng. "The Application of Adaptive Time Gain Compensation in an Improved Breast Ultrasound Tomography Algorithm." Applied Sciences 9, no. 12 (June 25, 2019): 2574. http://dx.doi.org/10.3390/app9122574.

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In order to better detect information about a mass in breast tissue, an ultrasound tomography algorithm based on adaptive time gain compensation (TGC) was designed. Field II was utilized to automatically evaluate the phantom attenuation coefficient and compensate for the attenuated image. The image reconstruction algorithm process is presented here. Furthermore, the experimental setup with the cylindrical motion of a piezoelectric micromachined ultrasonic transducer (PMUT) linear array was used to detect the mass in the breast model. The attenuation coefficient was evaluated by using the spectral cross-correlation method. According to the acquired attenuation coefficients, TGC compensates for the pulse-echo signal, and the horizontal slice image was reconstructed using the tomography algorithm. The experimental results show that this algorithm can evaluate the attenuation coefficient of the breast model and improve the ability to detect an internal mass. At the same time, the realization of attenuation compensation with software is beneficial to the development of portable medical equipment.

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Liu, Huicong, Jiangjun Geng, Qifeng Zhu, Lue Zhang, Fengxia Wang, Tao Chen, and Lining Sun. "Flexible Ultrasonic Transducer Array with Bulk PZT for Adjuvant Treatment of Bone Injury." Sensors 20, no. 1 (December 22, 2019): 86. http://dx.doi.org/10.3390/s20010086.

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Flexible electronic devices are developing rapidly, especially in medical applications. This paper reports an arrayed flexible piezoelectric micromachined ultrasonic transducer (FPMUT) with a sandwich structure for adjuvant treatment of bone injury. To make the device conformable and stretchable for attaching to the skin surface, the flexible substrate of polydimethylsiloxane (PDMS) was combined with the flexible metal line interconnection between the bulk lead zirconate titanate (PZT) arrays. Simulations and experiments were carried out to verify the resonant frequency and tensile property of the reported FPMUT device. The device had a resonant frequency of 321.15 KHz and a maximum sound pressure level (SPL) of 180.19 dB at the distance of 5 cm in water. In addition, detailed experiments were carried out to test its acoustic performance with different pork tissues, and the results indicated good ultrasound penetration. These findings confirm that the FPMUT shows unique advantages for adjuvant treatment of bone injury.

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Ledesma, Eyglis, Ivan Zamora, Arantxa Uranga, Francesc Torres, and Núria Barniol. "Enhancing AlN PMUTs’ Acoustic Responsivity within a MEMS-on-CMOS Process." Sensors 21, no. 24 (December 17, 2021): 8447. http://dx.doi.org/10.3390/s21248447.

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In this paper, guidelines for the optimization of piezoelectrical micromachined ultrasound transducers (PMUTs) monolithically integrated over a CMOS technology are developed. Higher acoustic pressure is produced by PMUTs with a thin layer of AlN piezoelectrical material and Si3N4 as a passive layer, as is studied here with finite element modeling (FEM) simulations and experimental characterization. Due to the thin layers used, parameters such as residual stress become relevant as they produce a buckled structure. It has been reported that the buckling of the membrane due to residual stress, in general, reduces the coupling factor and consequently degrades the efficiency of the acoustic pressure production. In this paper, we show that this buckling can be beneficial and that the fabricated PMUTs exhibit enhanced performance depending on the placement of the electrodes. This behavior was demonstrated experimentally and through FEM. The acoustic characterization of the fabricated PMUTs shows the enhancement of the PMUT performance as a transmitter (with 5 kPa V−1 surface pressure for a single PMUT) and as a receiver (12.5 V MPa−1) in comparison with previously reported devices using the same MEMS-on-CMOS technology as well as state-of-the-art devices.

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Zamora, Iván, Eyglis Ledesma, Arantxa Uranga, and Núria Barniol. "High Accuracy Ultrasound Micro-Distance Measurements with PMUTs under Liquid Operation." Sensors 21, no. 13 (July 1, 2021): 4524. http://dx.doi.org/10.3390/s21134524.

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Ultrasonic systems driven by multi-frequency continuous waves (MFCW) have been used for range distance measurement, offering high accuracy in long and medium range distance estimation. However, the use of continuous waves in very short-distance measurements causes large errors due to multipath reflections. This paper presents a new strategy to estimate very short relative distances with high accuracy based on the use of multi-frequency pulsed waves (MFPW). The proposed strategy allows to avoid the multipath reflections that appear when continuous waves are used, and it improves the achieved accuracy compared to the original MFCW method. To validate it, an 80 µm square AlScN piezoelectric micromachined ultrasonic transducer (PMUT) was chosen as a transmitter while a hydrophone was utilized as a target and receiver, immersed in fluorinert (FC-70) as a propagation medium. Three independent and consecutive tone-burst signals were transmitted successively. The selected frequencies are f1 = 2.3962 MHz, f2 = 2.327 MHz and f3 = 2.1195 MHz, giving first and second-order resolutions of 6.88 and 0.79 µm/°, respectively. Experimental results show a ±6.2 μm measured range error in a range of 3.5 mm, and therefore it represents a good candidate for ultrasound micro-profilometer applications under liquid operation.

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Chen, Mingzhu, Qiaozhen Zhang, Xiangyong Zhao, Feifei Wang, Huiling Liu, Baichuan Li, Xiangfen Zhang, and Haosu Luo. "Design and analysis of piezoelectric micromachined ultrasonic transducer using high coupling PMN-PT single crystal thin film for ultrasound imaging." Smart Materials and Structures 30, no. 5 (March 26, 2021): 055006. http://dx.doi.org/10.1088/1361-665x/abee37.

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Rossi, Stefano, Alessandro Ramalli, Fabian Fool, and Piero Tortoli. "High-Frame-Rate 3-D Vector Flow Imaging in the Frequency Domain." Applied Sciences 10, no. 15 (August 3, 2020): 5365. http://dx.doi.org/10.3390/app10155365.

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Ultrasound vector Doppler techniques for three-dimensional (3-D) blood velocity measurements are currently limited by low temporal resolution and high computational cost. In this paper, an efficient 3-D high-frame-rate vector Doppler method, which estimates the displacements in the frequency domain, is proposed. The novel method extends to 3-D an approach so far proposed for two-dimensional (2-D) velocity measurements by approximating the (x, y, z) displacement of a small volume through the displacements estimated for the 2-D regions parallel to the y and x directions, respectively. The new method was tested by simulation and experiments for a 3.7 MHz, 256-element, 2-D piezoelectric sparse spiral array. Simulations were also performed for an equivalent 7 MHz Capacitive Micromachined Ultrasonic Transducer spiral array. The results indicate performance (bias ± standard deviation: 6.5 ± 8.0) comparable to the performance obtained by using a linear array for 2-D velocity measurements. These results are particularly encouraging when considering that sparse arrays were used, which involve a lower signal-to-noise ratio and worse beam characteristics with respect to full 2-D arrays.

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Zamora, Iván, Eyglis Ledesma, Arantxa Uranga, and Núria Barniol. "Miniaturized 0.13-μm CMOS Front-End Analog for AlN PMUT Arrays." Sensors 20, no. 4 (February 22, 2020): 1205. http://dx.doi.org/10.3390/s20041205.

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This paper presents an analog front-end transceiver for an ultrasound imaging system based on a high-voltage (HV) transmitter, a low-noise front-end amplifier (RX), and a complementary-metal-oxide-semiconductor, aluminum nitride, piezoelectric micromachined ultrasonic transducer (CMOS-AlN-PMUT). The system was designed using the 0.13-μm Silterra CMOS process and the MEMS-on-CMOS platform, which allowed for the implementation of an AlN PMUT on top of the CMOS-integrated circuit. The HV transmitter drives a column of six 80-μm-square PMUTs excited with 32 V in order to generate enough acoustic pressure at a 2.1-mm axial distance. On the reception side, another six 80-μm-square PMUT columns convert the received echo into an electric charge that is amplified by the receiver front-end amplifier. A comparative analysis between a voltage front-end amplifier (VA) based on capacitive integration and a charge-sensitive front-end amplifier (CSA) is presented. Electrical and acoustic experiments successfully demonstrated the functionality of the designed low-power analog front-end circuitry, which outperformed a state-of-the art front-end application-specific integrated circuit (ASIC) in terms of power consumption, noise performance, and area.

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Akhbari, Sina, Firas Sammoura, Benjamin Eovino, Chen Yang, and Liwei Lin. "Bimorph Piezoelectric Micromachined Ultrasonic Transducers." Journal of Microelectromechanical Systems 25, no. 2 (April 2016): 326–36. http://dx.doi.org/10.1109/jmems.2016.2516510.

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