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1

Defaÿ, Emmanuel. Integration of Ferroelectric and Piezoelectric Thin Films. Hoboken, NJ, USA: John Wiley & Sons, Inc, 2011. http://dx.doi.org/10.1002/9781118616635.

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2

European, Workshop on Piezoelectric Materials (4th 2004 Montpellier France). 4th European Workshop on Piezoelectric Materials: Montpellier, France, 21-23 July, 2004. Les Ulis, France: EDP Sciences, 2005.

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3

Bruce, Tuttle, American Ceramic Society Meeting, and Advanced Dielectric, Piezoelectric and Ferroelectric Thin Films Symposium (2004 : Indianapolis, Ind.), eds. Advanced dielectric, piezoelectric and ferroelectric thin films: Proceedings of the 106th Annual Meeting of the American Ceramic Society : Indianapolis, Indiana, USA (2004). Westerville, Ohio: American Ceramic Society, 2005.

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4

Lang, Sydney B. Frontiers of ferroelectricity: A special issue of the Journal of materials science. New York: Springer, 2007.

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5

McGinn, Christine. Thin film piezoelectric elements for active devices. [New York, N.Y.?]: [publisher not identified], 2022.

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6

Güthner, Peter. Untersuchung der lokalen piezoelektrischen Eigenschaften dünner ferroelektrischer Polymerfilme. Konstanz: Hartung-Gorre, 1992.

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7

IEEE International Symposium on Applications of Ferroelectrics (10th 1996 East Brunswick, N.J.). ISAF '96: Proceedings of the Tenth IEEE International Symposium on Applications of Ferroelectrics, East Brunswick, NJ, U.S.A., August 18-21, 1996. Edited by Kulwicki Bernard M, Amin Ahmed, Safari Ahmad, Institute of Electrical and Electronics Engineers., and IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society. [New York, N.Y.]: Institute of Electrical and Electronics Engineers, 1996.

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8

IEEE International Symposium on Applications of Ferroelectrics (9th 1994 University Park, Pa.). ISAF '94: Proceedings of the Ninth IEEE International Symposium on Applications of Ferroelectrics, Penn State Scanticon Conference Center, the Pennsylvania State University, University Park, Pennsylvania, USA, August 7-August 10, 1994. Edited by Pandey R. K, Liu Michael, Safari Ahmad, Institute of Electrical and Electronics Engineers., and IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society. [New York, N.Y.]: Institute of Electrical and Electronics Engineers, 1994.

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9

IEEE International Symposium on Applications of Ferroelectrics (13th 2002 Nara-shi, Japan). ISAF 2002: Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics : Nara, Japan, May 28-June 1, 2002. Edited by White Grady, Tsurumi Takaaki, and IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society. Piscataway, NJ: Institute of Electrical and Electronics Engineers, Ultrasonics, Ferroelectrics, and Frequency Control Society, 2002.

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10

IEEE International Symposium on Applications of Ferroelectrics (11th 1998 Montreux, Switzerland). ISAF 1998: Proceedings of the Eleventh IEEE International Symposium on Applications of Ferroelectrics, Montreux, Switzerland, August 24-27, 1998. Edited by Colla Enrico, Damjanovic Dragon, Setter N. 1949-, IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society., and Institute of Electrical and Electronics Engineers. Piscataway, NJ: Institute of Electrical and Electronics Engineers, 1998.

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11

IEEE International Symposium on Applications of Ferroelectrics (12th 2000 Honolulu, Hawaii). ISAF 2000: Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics : Honolulu, Hawaii, U.S.A., July 21-August 2, 2000. Edited by Streiffer S. K, IEEE Ultrasonics, Ferroelectrics and Frequency Control Society., and Institute of Electrical and Electronics Engineers. Piscataway, New Jersey: IEEE, 2001.

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12

Gevorgian, Spartak Sh. Tuneable Film Bulk Acoustic Wave Resonators. London: Springer London, 2013.

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13

P, George Easo, and Materials Research Society Meeting, eds. Materials for smart systems II: Symposium held Dec. 2-5, 1996, Boston, Massachusetts, U.S.A. Pittsburgh, Pa: Materials Research Society, 1997.

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14

IEEE International Symposium on Applications of Ferroelectrics (10th 1996 East Brunswick, N.J.). ISAF '96: Proceedings of the Tenth IEEE International Symposium on Applications of Ferroelectrics, East Brunswick, NJ, U.S.A., August 18-21, 1996. Edited by Amin Ahmed 1945-, Kulwicki Bernard M, Safari Ahmad, IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society., and Institute of Electrical and Electronics Engineers. [New York, N.Y.]: Institute of Electrical and Electronics Engineers, 1996.

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15

Tuttle, Bruce A., Chonglin Chen, Quanxi Jia, and R. Ramesh, eds. Advanced Dielectric, Piezoelectric and Ferroelectric Thin Films. Wiley, 2006. http://dx.doi.org/10.1002/9781118407202.

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16

Integration of Ferroelectric and Piezoelectric Thin Films. Wiley-Iste, 2011.

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17

Tuttle, Bruce A., R. Ramesh, Quanxi Jia, and Chonglin Chen. Advanced Dielectric, Piezoelectric and Ferroelectric Thin Films. Wiley & Sons, Incorporated, John, 2012.

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18

Ye, Z.-G. Handbook of Advanced Dielectric Piezoelectric and Ferroelectric Materials. Woodhead Publishing Ltd, 2008.

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19

Ye, Z.-G. Handbook of Advanced Dielectric, Piezoelectric and Ferroelectric Materials: Synthesis, Properties and Applications. Elsevier Science & Technology, 2008.

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20

Defaÿ, Emmanuel. Integration of Ferroelectric and Piezoelectric Thin Films: Concepts and Applications for Microsystems. Wiley & Sons, Incorporated, John, 2013.

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21

Defaÿ, Emmanuel. Integration of Ferroelectric and Piezoelectric Thin Films: Concepts and Applications for Microsystems. Wiley & Sons, Incorporated, John, 2013.

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22

Defaÿ, Emmanuel. Integration of Ferroelectric and Piezoelectric Thin Films: Concepts and Applications for Microsystems. Wiley & Sons, Incorporated, John, 2013.

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23

Defaÿ, Emmanuel. Integration of Ferroelectric and Piezoelectric Thin Films: Concepts and Applications for Microsystems. Wiley & Sons, Incorporated, John, 2011.

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24

Žukauskaitė, Agnė, ed. Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices. MDPI, 2023. http://dx.doi.org/10.3390/books978-3-0365-6366-4.

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25

Advanced Dielectric, Piezoelectric, and Ferroelectric Thin Films: Proceedings of the 106th Annual Meeting of the American Ceramic Society, Indianaplois, ... Transactions) (Ceramic Transactions Series). Wiley-American Ceramic Society, 2005.

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26

DC Magnetron Reactive Sputtering of Low Stress AlN Piezoelectric Thin Films for MEMS Application. Storming Media, 1999.

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27

Dhaliwal, Gurbaksh Kaur. Studies in immunochemical and zeolite films as selective coatings of piezoelectric crystals for sensor applications. 1988.

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28

Lang, Sidney B., and Helen L. W. Chan. Frontiers of Ferroelectricity. Springer, 2006.

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29

Chan, Helen L. W., and Sidney B. Lang. Frontiers of Ferroelectricity: A Special Issue of the Journal of Materials Science. Springer, 2011.

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30

Tuttle, Bruce A., R. Ramesh, Quanxi Jia, and Chonglin Chen. Advanced Dielectric, Piezoelectric and Ferroelectric Thin Films: Proceedings of the 106th Annual Meeting of the American Ceramic Society, Indianapolis, Indiana, USA 2004. Wiley & Sons, Limited, John, 2012.

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31

Tuttle, Bruce A., R. Ramesh, Quanxi Jia, and Chonglin Chen. Advanced Dielectric, Piezoelectric and Ferroelectric Thin Films: Proceedings of the 106th Annual Meeting of the American Ceramic Society, Indianapolis, Indiana, USA 2004. Wiley & Sons, Incorporated, John, 2012.

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32

Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics: Honolulu, Hawaii, U.S.A., July 21-August 2, 2000. Inst Elect & Electronic Engineers, 2001.

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33

Applications of Ferroelectrics, 2002 IEEE 13th International Symposium. Ieee, 2002.

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34

Japan) IEEE International Symposium on Applications of Ferroelectrics (13th : 2002 : Nara-shi. Applications of Ferroelectrics, 2002 IEEE 13th International Symposium. Ieee, 2002.

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35

Tagantsev, Alexander K., Spartak Sh Gevorgian, and Andrei K. Vorobiev. Tuneable Film Bulk Acoustic Wave Resonators. Springer, 2013.

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36

Schuster, Simon and. SIMON AND SCHUSTER C. Pinnacle, 1992.

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37

Schuster, Simon and. SIMON AND SCHUSTER C: Symposium Held December 2-5, 1996, Boston, Massachusetts, U.S.A (Materials Research Society Symposium Proceedings). Pinnacle, 1992.

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38

Schuster, Simon and. SIMON AND SCHUSTER C: Symposium Held December 2-5, 1996, Boston, Massachusetts, U.S.A (Materials Research Society Symposium Proceedings). Pinnacle, 1992.

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39

Schuster, Simon and. SIMON AND SCHUSTER C: Symposium Held December 2-5, 1996, Boston, Massachusetts, U.S.A. (Materials Research Society Symposium Proceedings). Pinnacle, 1992.

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40

Institute Of Electrical and Electronics Engineers and IEEE Ultrasonics Ferroelectrics & Freque. 1996 IEEE 10th International Symposium on Applications of Ferroelectrics (Isaf. Institute of Electrical & Electronics Enginee, 1997.

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