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Journal articles on the topic 'Photocatalytic lithography'

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Author: Grafiati

Published: 9 March 2023

Last updated: 10 March 2023

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1

Panzarasa, Guido, and Guido Soliveri. "Photocatalytic Lithography." Applied Sciences 9, no. 7 (March 27, 2019): 1266. http://dx.doi.org/10.3390/app9071266.

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Patterning, the controlled formation of ordered surface features with different physico-chemical properties, is a cornerstone of contemporary micro- and nanofabrication. In this context, lithographic approaches owe their wide success to their versatility and their relative ease of implementation and scalability. Conventional photolithographic methods require several steps and the use of polymeric photoresists for the development of the desired pattern, all factors which can be deleterious, especially for sensitive substrates. Efficient patterning of surfaces, with resolution down to the nanometer scale, can be achieved by means of photocatalytic lithography. This approach is based on the use of photocatalysts to achieve the selective chemical modification or degradation of self-assembled monolayers, polymers, and metals. A wide range of photoactive compounds, from semiconducting oxides to porphyrins, have been demonstrated to be suitable photocatalysts. The goal of the present review is to provide a comprehensive state-of-the-art photocatalytic lithography, ranging from approaches based on semiconducting oxides to singlet oxygen-based lithography. Special attention will be dedicated to the results obtained for the patterning of polymer brushes, the sculpturing of metal nanoparticle arrays, and the patterning of graphene-based structures.

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2

Bearinger, Jane P., Gary Stone, Allen T. Christian, Lawrence Dugan, Amy L. Hiddessen, Kuang Jen J. Wu, Ligang Wu, Julie Hamilton, Cheryl Stockton, and Jeffrey A. Hubbell. "Porphyrin-Based Photocatalytic Lithography." Langmuir 24, no. 9 (May 2008): 5179–84. http://dx.doi.org/10.1021/la703992r.

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3

Tatsuma, Tetsu, and Wakana Kubo. "Photocatalytic Lithography Based on Photocatalytic Remote Oxidation." Journal of Photopolymer Science and Technology 20, no. 1 (2007): 83–86. http://dx.doi.org/10.2494/photopolymer.20.83.

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4

Skorb, E. V., V. G. Sokolov, T. V. Gaevskaya, and D. V. Sviridov. "Photocatalytic lithography with image inversion." Theoretical and Experimental Chemistry 45, no. 1 (January 2009): 40–43. http://dx.doi.org/10.1007/s11237-009-9067-8.

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5

Kubo, Wakana, Tetsu Tatsuma, Akira Fujishima, and Hironori Kobayashi. "Mechanisms and Resolution of Photocatalytic Lithography." Journal of Physical Chemistry B 108, no. 9 (March 2004): 3005–9. http://dx.doi.org/10.1021/jp037156g.

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6

Imajo, Tsukasa, Hiroshi Okano, and Atsushi Maeda. "Photocatalytic Lithography using Zinc Oxide Nanoislands." Japanese Journal of Applied Physics 47, no. 4 (April 18, 2008): 2330–35. http://dx.doi.org/10.1143/jjap.47.2330.

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7

Panzarasa, G., G. Soliveri, K. Sparnacci, and S. Ardizzone. "Patterning of polymer brushes made easy using titanium dioxide: direct and remote photocatalytic lithography." Chemical Communications 51, no. 34 (2015): 7313–16. http://dx.doi.org/10.1039/c5cc00255a.

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8

Katzenberg, Adlai, Akash Raman, Nicole L. Schnabel, Andrea L. Quispe, Andrea I. Silverman, and Miguel A. Modestino. "Photocatalytic hydrogels for removal of organic contaminants from aqueous solution in continuous flow reactors." Reaction Chemistry & Engineering 5, no. 2 (2020): 377–86. http://dx.doi.org/10.1039/c9re00456d.

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9

Dammel, R., K. F. Dössel, J. Lingnau, J. Theis, H. Huber, H. Oertel, and J. Trube. "Negative-tone high-resolution photocatalytic resist for x-ray lithography." Microelectronic Engineering 9, no. 1-4 (May 1989): 575–78. http://dx.doi.org/10.1016/0167-9317(89)90123-8.

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10

Lai, Yuekun, Changjian Lin, Hui Wang, Jianying Huang, Huifang Zhuang, and Lan Sun. "Superhydrophilic–superhydrophobic micropattern on TiO2 nanotube films by photocatalytic lithography." Electrochemistry Communications 10, no. 3 (March 2008): 387–91. http://dx.doi.org/10.1016/j.elecom.2007.12.020.

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11

Skorb, E. V., V. G. Sokolov, T. V. Byk, T. V. Gaevskaya, D. V. Sviridov, and Chang-Ho Noh. "Photocatalytic lithography based on thin films of amorphous hydrated titanium dioxide." High Energy Chemistry 42, no. 2 (March 2008): 127–31. http://dx.doi.org/10.1134/s0018143908020124.

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12

Blondiaux, Nicolas, Stefan Zürcher, Martha Liley, and Nicholas D. Spencer. "Fabrication of Multiscale Surface-Chemical Gradients by Means of Photocatalytic Lithography." Langmuir 23, no. 7 (March 2007): 3489–94. http://dx.doi.org/10.1021/la063186+.

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13

Notsu, Hideo, Wakana Kubo, Isao Shitanda, and Tetsu Tatsuma. "Super-hydrophobic/super-hydrophilic patterning of gold surfaces by photocatalytic lithography." Journal of Materials Chemistry 15, no. 15 (2005): 1523. http://dx.doi.org/10.1039/b418884e.

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14

Panzarasa, Guido, Guido Soliveri, Gianluigi Marra, Laura Meda, Alberto Savoini, Silvia Ardizzone, and Mario Salvalaggio. "Sculpturing patterns of plasmonic silver nanoprisms by means of photocatalytic lithography." Nanotechnology 28, no. 15 (March 16, 2017): 155302. http://dx.doi.org/10.1088/1361-6528/aa631b.

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15

Ganter, Pirmin, and Bettina V. Lotsch. "Photocatalytic Nanosheet Lithography: Photolithography based on Organically Modified Photoactive 2D Nanosheets." Angewandte Chemie 129, no. 29 (June 20, 2017): 8509–12. http://dx.doi.org/10.1002/ange.201703149.

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16

Ganter, Pirmin, and Bettina V. Lotsch. "Photocatalytic Nanosheet Lithography: Photolithography based on Organically Modified Photoactive 2D Nanosheets." Angewandte Chemie International Edition 56, no. 29 (June 20, 2017): 8389–92. http://dx.doi.org/10.1002/anie.201703149.

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17

Lee, Jae P., and Myung M. Sung. "A New Patterning Method Using Photocatalytic Lithography and Selective Atomic Layer Deposition." Journal of the American Chemical Society 126, no. 1 (January 2004): 28–29. http://dx.doi.org/10.1021/ja038769+.

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18

Panzarasa, Guido, Guido Soliveri, Silvia Ardizzone, and Katia Sparnacci. "Photocatalytic Lithography: An Innovative Approach to Obtain Patterned pH-responsive Polymer Brushes." Materials Today: Proceedings 2, no. 8 (2015): 4183–89. http://dx.doi.org/10.1016/j.matpr.2015.09.001.

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19

Liau, Leo Chau-Kuang, Wen-Wei Chou, and Rung-Kang Wu. "Photocatalytic Lithography Processing via Poly(vinyl butyral)/TiO2Photoresists by Ultraviolet (UV) Exposure." Industrial & Engineering Chemistry Research 47, no. 7 (April 2008): 2273–78. http://dx.doi.org/10.1021/ie071331o.

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20

Chang, Chi-Jung, Chih-Feng Wang, Jem-Kun Chen, Chih-Chiao Hsieh, and Po-An Chen. "Fast formation of hydrophilic and reactive polymer micropatterns by photocatalytic lithography method." Applied Surface Science 286 (December 2013): 280–86. http://dx.doi.org/10.1016/j.apsusc.2013.09.071.

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21

Panzarasa, Guido, Guido Soliveri, and Silvia Ardizzone. "Crafting positive/negative patterns and nanopillars of polymer brushes by photocatalytic lithography." Colloids and Surfaces A: Physicochemical and Engineering Aspects 506 (October 2016): 833–39. http://dx.doi.org/10.1016/j.colsurfa.2016.07.071.

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22

Dammel, R., K. F. Dössel, J. Lingnau, J. Theis, H. L. Huber, and H. Oertel. "Photocatalytic novolak-based positive resist for X-ray lithography - kinetics and simulation -." Microelectronic Engineering 6, no. 1-4 (December 1987): 503–9. http://dx.doi.org/10.1016/0167-9317(87)90080-3.

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23

Kubo, Wakana, and Tetsu Tatsuma. "Conversion of a solid surface from super-hydrophobic to super-hydrophilic by photocatalytic remote oxidation and photocatalytic lithography." Applied Surface Science 243, no. 1-4 (April 2005): 125–28. http://dx.doi.org/10.1016/j.apsusc.2004.09.102.

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24

Sung, DaIN, Hyun Gu Kim, Seung Keun Cha, Dong Hyun Kim, Han-Bo-Ram Lee, Sang Ouk Kim, Dong Woo Kim, and Geun Young Yeom. "Photocatalytic Effect of Ag/TiO2 Nanotubes Fabricated Using 40 nm-Scale BCP Lithography." Nanoscience and Nanotechnology Letters 9, no. 1 (January 1, 2017): 50–55. http://dx.doi.org/10.1166/nnl.2017.2295.

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25

Dundar Arisoy, Feyza, Kristopher W. Kolewe, Benjamin Homyak, Irene S. Kurtz, Jessica D. Schiffman, and James J. Watkins. "Bioinspired Photocatalytic Shark-Skin Surfaces with Antibacterial and Antifouling Activity via Nanoimprint Lithography." ACS Applied Materials & Interfaces 10, no. 23 (May 23, 2018): 20055–63. http://dx.doi.org/10.1021/acsami.8b05066.

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26

Vandenbroucke, Sofie S. T., Felix Mattelaer, Karolien Jans, Christophe Detavernier, Tim Stakenborg, and Rita Vos. "Photocatalytic Lithography with Atomic Layer–Deposited TiO 2 Films to Tailor Biointerface Properties." Advanced Materials Interfaces 6, no. 9 (April 3, 2019): 1900035. http://dx.doi.org/10.1002/admi.201900035.

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27

Komori, Kikuo, Jun Nada, Masaki Nishikawa, Hideo Notsu, Tetsu Tatsuma, and Yasuyuki Sakai. "Simultaneous evaluation of toxicities using a mammalian cell array chip prepared by photocatalytic lithography." Analytica Chimica Acta 653, no. 2 (October 2009): 222–27. http://dx.doi.org/10.1016/j.aca.2009.09.013.

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28

An, Ningli, Hongzhong Liu, Yucheng Ding, Bingheng Lu, and Min Zhang. "Fabrication of micro-structures on a PVDF/TiO2 nano-composite film using photocatalytic lithography." Applied Surface Science 258, no. 12 (April 2012): 5052–55. http://dx.doi.org/10.1016/j.apsusc.2012.01.103.

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29

Her, Hyun-Jung, Jung-Min Kim, C. J. Kang, and Yong-Sang Kim. "Fabrication of Thin Film Titania with Nanopores, Nanopoles, and Nanopipes by Nanoporous Alumina Template." Journal of Nanoscience and Nanotechnology 8, no. 9 (September 1, 2008): 4808–12. http://dx.doi.org/10.1166/jnn.2008.ic84.

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We demonstrate the formation of thin film titania (TiO2) with a dense array of nanopores, nanopoles, and nanopipes. The heights of pores, poles, and pipes were approximately 130 nm, 180 nm, and 200 nm, respectively. The aspect ratios of these three structures were approximated between 2 and 3. In order to obtain titania thin films, a nanoporous alumina (Al2O3) template was fabricated by performing a two-step anodization process. The spin-coated titania films were uniformly patterned by a nanoimprinting lithography technique with a textured poly(methyl methacrylate) (PMMA) mold or nanoporous alumina template. The titania films are very useful for solar cells, photocatalytic and sensing applications, in which nano-structuring of surfaces with controlled dimensions is vital.

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30

Tatsuma, Tetsu, Wakana Kubo, and Akira Fujishima. "Patterning of Solid Surfaces by Photocatalytic Lithography Based on the Remote Oxidation Effect of TiO2." Langmuir 18, no. 25 (December 2002): 9632–34. http://dx.doi.org/10.1021/la026246u.

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31

Panzarasa, Guido, Matthias Dübner, Guido Soliveri, Matthias Edler, and Thomas Griesser. "Branched poly(ethyleneimine): a versatile scaffold for patterning polymer brushes by means of remote photocatalytic lithography." Nanotechnology 28, no. 39 (September 8, 2017): 395302. http://dx.doi.org/10.1088/1361-6528/aa8108.

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32

Zhdanok, S. A., S. V. Gorbatov, A. A. Mikhailov, F. V. Plevako, K. F. Plevako, S. V. Shushkov, E. V. Skorb, V. G. Sokolov, T. V. Gaevskaya, and D. V. Sviridov. "Low-temperature plasma-chemical synthesis of carbon nanotubes on nickel patterns obtained by the photocatalytic-lithography method." Journal of Engineering Physics and Thermophysics 81, no. 2 (March 2008): 213–16. http://dx.doi.org/10.1007/s10891-008-0025-4.

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33

Wu, Hsing-Yu, Hung-Chun Lin, Yung-Hsien Liu, Kai-Lin Chen, Yu-Hsun Wang, Yung-Shin Sun, and Jin-Cherng Hsu. "Highly Sensitive, Robust, and Recyclable TiO2/AgNP Substrate for SERS Detection." Molecules 27, no. 19 (October 10, 2022): 6755. http://dx.doi.org/10.3390/molecules27196755.

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Label-free biosensors provide an important platform for detecting chemical and biological substances without needing extra labeling agents. Unlike surface-based techniques such as surface plasmon resonance (SPR), interference, and ellipsometry, surface-enhanced Raman spectroscopy (SERS) possesses the advantage of monitoring analytes both on surfaces and in solutions. Increasing the SERS enhancement is crucial to preparing high-quality substrates without quickly losing their stability, sensitivity, and repeatability. However, fabrication methods based on wet chemistry, nanoimprint lithography, spark discharge, and laser ablation have drawbacks of waste of time, complicated processes, or nonreproducibility in surface topography. This study reports the preparation of recyclable TiO2/Ag nanoparticle (AgNP) substrates by using simple arc ion plating and direct-current (dc) magnetron sputtering technologies. The deposited anatase-phased TiO2 ensured the photocatalytic degradation of analytes. By measuring the Raman spectra of rhodamine 6G (R6G) in titrated concentrations, a limit of detection (LOD) of 10−8 M and a SERS enhancement factor (EF) of 1.01 × 109 were attained. Self-cleaning was performed via UV irradiation, and recyclability was achieved after at least five cycles of detection and degradation. The proposed TiO2/AgNP substrates have the potential to serve as eco-friendly SERS enhancers for label-free detection of various chemical and biological substances.

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34

Duta, Liviu, and Andrei C. Popescu. "Current Research in Pulsed Laser Deposition." Coatings 11, no. 3 (February 26, 2021): 274. http://dx.doi.org/10.3390/coatings11030274.

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In industry, thin films proved invaluable for protection of tools withstanding high frictions and elevated temperatures, but also found successful applications as sensors, solar cells, bioactive coatings for implants, photocatalysis and in lithography [...]

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35

Herr, Ulrich, Balati Kuerbanjiang, Cahit Benel, Giorgos Papageorgiou, Manuel Goncalves, Johannes Boneberg, Paul Leiderer, Paul Ziemann, Peter Marek, and Horst Hahn. "Near-field effects and energy transfer in hybrid metal-oxide nanostructures." Beilstein Journal of Nanotechnology 4 (May 14, 2013): 306–17. http://dx.doi.org/10.3762/bjnano.4.34.

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One of the big challenges of the 21st century is the utilization of nanotechnology for energy technology. Nanoscale structures may provide novel functionality, which has been demonstrated most convincingly by successful applications such as dye-sensitized solar cells introduced by M. Grätzel. Applications in energy technology are based on the transfer and conversion of energy. Following the example of photosynthesis, this requires a combination of light harvesting, transfer of energy to a reaction center, and conversion to other forms of energy by charge separation and transfer. This may be achieved by utilizing hybrid nanostructures, which combine metallic and nonmetallic components. Metallic nanostructures can interact strongly with light. Plasmonic excitations of such structures can cause local enhancement of the electrical field, which has been utilized in spectroscopy for many years. On the other hand, the excited states in metallic structures decay over very short lifetimes. Longer lifetimes of excited states occur in nonmetallic nanostructures, which makes them attractive for further energy transfer before recombination or relaxation sets in. Therefore, the combination of metallic nanostructures with nonmetallic materials is of great interest. We report investigations of hybrid nanostructured model systems that consist of a combination of metallic nanoantennas (fabricated by nanosphere lithography, NSL) and oxide nanoparticles. The oxide particles were doped with rare-earth (RE) ions, which show a large shift between absorption and emission wavelengths, allowing us to investigate the energy-transfer processes in detail. The main focus is on TiO2 nanoparticles doped with Eu3+, since the material is interesting for applications such as the generation of hydrogen by photocatalytic splitting of water molecules. We use high-resolution techniques such as confocal fluorescence microscopy for the investigation of energy-transfer processes. The experiments are supported by simulations of the electromagnetic field enhancement in the vicinity of well-defined nanoantennas. The results show that the presence of the nanoparticle layer can modify the field enhancement significantly. In addition, we find that the fluorescent intensities observed in the experiments are affected by agglomeration of the nanoparticles. In order to further elucidate the possible influence of agglomeration and quenching effects in the vicinity of the nanoantennas, we have used a commercial organic pigment containing Eu, which exhibits an extremely narrow particle size distribution and no significant agglomeration. We demonstrate that quenching of the Eu fluorescence can be suppressed by covering the nanoantennas with a 10 nm thick SiO x layer.

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36

Akbar, Sheikh Ali. "(Invited) Ceramic Nano-Heterostructures By Materials Design: Platforms for Sensing Applications – Opportunities and Challengess." ECS Meeting Abstracts MA2022-01, no. 52 (July 7, 2022): 2141. http://dx.doi.org/10.1149/ma2022-01522141mtgabs.

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This talk summarizes R&D efforts in the author’s laboratory on the fabrication of oxide nano-heterostructures, exploiting intrinsic material properties, that are highly scalable and do not require use of lithography. One such process creates crystallographically oriented nanofiber arrays of single crystal TiO2 in H2/N2 environment. H2/N2 heat treatment was also used to grow nanofibers on polycrystalline SnO2, showing directional growth on grains with crystal facets. We have also developed a process to create nanofibers of TiO2 on Ti metal/alloys via oxidation under a limited supply of oxygen. In another process, SnO2 nanowires grown from commercial FTO slides using the vapor-liquid-solid (VLS) method were placed in a microwave-assisted hydrothermal chamber where TiO2 nanorods nucleated radially from the SnO2 nanowire cores. We developed yet another interesting nano-structure (nanoislands and/or nanobars) during thermal annealing of an oxide (GDC) on top of another oxide (YSZ) substrate that self-assembles along the softest elastic direction of the substrate. What is common about these structures is that they are fabricated without the use of lithographic techniques and involves simple processes such as gas-phase reactions and stress-driven processes. These nano-heterostructures can be used as platforms for chemical sensing, catalysis, photocatalysis, photovoltaics and biomedical applications. Sensing application presents opportunities and challenges that are presented including an Open access Database Of Resistive type gas Sensors (ODORS) that has been developed and can be used to select suitable sensing materials.

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37

Hunyadi Murph, Simona E., and Katie Heruox. "Shape-Selective Mesoscale Nanoarchitectures: Preparation and Photocatalytic Performance." Catalysts 10, no. 5 (May 12, 2020): 532. http://dx.doi.org/10.3390/catal10050532.

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We create ordered arrays of shape-selective gold-titania composite nanomaterials at the mesoscale (100 µm to 5 mm) by a combination of both bottom-up and top-down approaches for exquisite control of the size, shape, and arrangement of nanomaterials. Lithographic techniques along with wet chemical synthetic methods were combined to create these composite nanomaterials. The photocatalytic activity of these TiO2, TiO2-Au and SiO2-TiO2-Au nano-composite mesoscale materials was monitored by the photodegradation of a model analyte, methyl orange, under UV and visible (Vis) illumination. Bare TiO2- and SiO2-TiO2-coated pillar arrays showed significant activity toward methyl orange in UV light with degradation rates on the order of 10−4–10−3 min−1. The photocatalytic activity of these arrays was also found to depend on the nanoparticle shape, in which particles with more edges and corners were found to be more reactive than spherical particles (i.e., the photocatalytic activity decreased as follows: diamonds > squares > triangles > spheres). SiO2-TiO2-Au nano-composite pillar arrays were tested in both UV and Vis light and showed increased activity in Vis light but decreased activity in UV light as compared to the bare semiconductor arrays. Additionally, the Au nanorod-functionalized nanoarrays exhibit a strong shape-dependence in their photocatalytic activity toward methyl orange degradation in Vis light.

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38

Gupta, Vaibhav, Swagato Sarkar, Olha Aftenieva, Takuya Tsuda, Labeesh Kumar, Daniel Schletz, Johannes Schultz, et al. "Nanoimprint Lithography Facilitated Plasmonic‐Photonic Coupling for Enhanced Photoconductivity and Photocatalysis." Advanced Functional Materials 31, no. 36 (June 29, 2021): 2105054. http://dx.doi.org/10.1002/adfm.202105054.

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39

Schrittwieser, Stefan, Michael J. Haslinger, Tina Mitteramskogler, Michael Mühlberger, Astrit Shoshi, Hubert Brückl, Martin Bauch, Theodoros Dimopoulos, Barbara Schmid, and Joerg Schotter. "Multifunctional Nanostructures and Nanopocket Particles Fabricated by Nanoimprint Lithography." Nanomaterials 9, no. 12 (December 16, 2019): 1790. http://dx.doi.org/10.3390/nano9121790.

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Nanostructured surfaces and nanoparticles are already widely employed in many different fields of research, and there is an ever-growing demand for reliable, reproducible and scalable nanofabrication methods. This is especially valid for multifunctional nanomaterials with physical properties that are tailored for specific applications. Here, we report on the fabrication of two types of nanomaterials. Specifically, we present surfaces comprising a highly uniform array of elliptical pillars as well as nanoparticles with the shape of nanopockets, possessing nano-cavities. The structures are fabricated by nanoimprint lithography, physical and wet-chemical etching and sputter deposition of thin films of various materials to achieve a multifunctional nanomaterial with defined optical and magnetic properties. We show that the nanopockets can be transferred to solution, yielding a nanoparticle dispersion. All fabrication steps are carefully characterized by microscopic and optical methods. Additionally, we show optical simulation results that are in good agreement with the experimentally obtained data. Thus, this versatile method allows to fabricate nanomaterials with specific tailor-made physical properties that can be designed by modelling prior to the actual fabrication process. Finally, we discuss possible application areas of these nanomaterials, which range from biology and medicine to electronics, photovoltaics and photocatalysis.

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40

Verberne-Sutton, Susan D., Rashanique D. Quarels, Xianglin Zhai, Jayne C. Garno, and Justin R. Ragains. "Application of Visible Light Photocatalysis with Particle Lithography To Generate Polynitrophenylene Nanostructures." Journal of the American Chemical Society 136, no. 41 (October 6, 2014): 14438–44. http://dx.doi.org/10.1021/ja505521k.

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41

Sidaraviciute, Ruta, Vytautas Kavaliunas, Linas Puodziukynas, Asta Guobiene, Dainius Martuzevicius, and Mindaugas Andrulevicius. "Enhancement of photocatalytic pollutant decomposition efficiency of surface mounted TiO2 via lithographic surface patterning." Environmental Technology & Innovation 19 (August 2020): 100983. http://dx.doi.org/10.1016/j.eti.2020.100983.

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42

Suárez-Escobar, Andres, Alis Pataquiva-Mateus, and Andrés López-Vasquez. "Electrocoagulation—photocatalytic process for the treatment of lithographic wastewater. Optimization using response surface methodology (RSM) and kinetic study." Catalysis Today 266 (May 2016): 120–25. http://dx.doi.org/10.1016/j.cattod.2015.09.016.

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43

Ahmed, Haseeb, Min Wu, and Maria Stepanova. "Fabrication of plasmonic Au nanostructures on dielectric supports using 10 keV electron beam lithography and tests for SERS biodetection." Journal of Vacuum Science & Technology B 41, no. 2 (March 2023): 022202. http://dx.doi.org/10.1116/6.0002108.

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Plasmonic nanostructures have received an increasing attention due to their unique ability to mediate conversion of energy of light into different useful forms. This opens pathways for numerous applications from ultrasensitive surface-enhanced Raman scattering (SERS) characterization of materials to heterogeneous photocatalysis and green energy harvesting. However, plasmonic nanostructures should meet a number of requirements for their potential could be realized. In addition to nanoscale dimensions, a high uniformity and compatibility with existing microelectronic settings are required. Electron beam lithography (EBL) offers an unmatched control over nanoscale geometries and also a flexibility to allow for various designs. However, careful co-optimization of EBL exposure and development is required to fabricate periodic patterns with deep nanoscale dimensions. The usage of dielectric substrates is particularly challenging due to the accumulation of charge during EBL exposures. In this work, we have optimized a 10 keV EBL process to fabricate periodic arrays of 50 nm pitch dots on fused silica (FS) supports. To avoid distortions due to charging, a layer of conductive polymer was applied on the surface of the EBL resist, PMMA. In addition, we have investigated the impact of the conductive layer on the PMMA’s exposure by numerical modeling. Despite the predicted significant broadening of the 10 keV electron beam that reaches PMMA after traveling through the conductive layer, quality arrays of dots were successfully fabricated. We used the patterned PMMA as a mask to fabricate 50 nm pitch arrays of Au dots on FS. In order to verify the performance of these Au/FS structures, we used them for SERS biodetection. For this purpose, the samples were biofunctionalized with thiolated DNA aptamers that bind specifically to an important biomarker, protein interleukin 6 (IL-6). The samples were loaded with IL-6 from a solution and characterized by SERS. The results suggest that the fabricated Au/FS plasmonic nanostructures produce an efficient SERS effect. Anticipated multifunctional applications of the plasmonic nanostructures beyond the demonstrated SERS biodetection are discussed.

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44

Wen, Ming, Mingzhu Cheng, Shiqing Zhou, Qingsheng Wu, Na Wang, and Linyi Zhou. "Synthesis of Reusable NiCo@Pt Nanoalloys from Icosahedrons to Spheres by Element Lithography and Their Synergistic Photocatalysis for Nano-ZnO toward Dye Wastewater Degradation." Journal of Physical Chemistry C 116, no. 21 (May 17, 2012): 11702–8. http://dx.doi.org/10.1021/jp2115912.

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Lai, Y. K., Y. Yang, Y. X. Huang, Z. Q. Lin, Y. X. Tang, D. G. Gong, C. J. Lin, and Z. Chen. "Wetting Pattern on TiO2Nanostructure Films and its Application as a Template for Selective Materials Growth." MRS Proceedings 1316 (2011). http://dx.doi.org/10.1557/opl.2011.422.

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ABSTRACTThe present paper describes an unconventional approach to fabricate superhydrophilic-superhydrophobic template on the TiO2nanotube structured film by a combination of electrochemical anodization and photocatalytic lithography. Based on template with extreme wetting contrast, various functional nanostructures micropattern with high resolution have been successfully fabricated. The resultant micropattern has been characterized with scanning electron microscopy, optical microscopy, X-ray photoelectron spectroscopy. It is shown that functional nanostructures can be selectively grown at superhydrophilic areas which are confined by the hydrophobic regions, indicating that the combined process of electrochemically self-assembly and photocatalytic lithography is a very promising approach for constructing well-defined templates for various functional materials growth.

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"Functional Evaluation of Cellular Populations with Different Size Prepared by Photocatalytic Lithography." ECS Meeting Abstracts, 2008. http://dx.doi.org/10.1149/ma2008-02/14/1485.

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Zanchetta, E., G. Della Giustina, A. Gandin, V. Auzelyte, and G. Brusatin. "One-step fabrication of high refractive index inorganic nanostructures." Journal of Sol-Gel Science and Technology, October 28, 2021. http://dx.doi.org/10.1007/s10971-021-05633-8.

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AbstractDirect printing of spin-on functional films is probably the most efficient method to develop low-cost novel photonic nanodevices, such as diffraction gratings, planar waveguides, nano- lasers, and antireflective coatings. For these applications high refractive index transparent materials are demanded; however, this class of materials generally requires inorganic oxides, well known for their hardness, typical of ceramic materials, and so incompatible with a soft character of printable resins. Herein, inorganic high refractive index TiO2 micro- and nano- structures, with unusual depth up to 600 nm and aspect ratio larger than 5, are obtained by combining thermal nanoimprint lithography (NIL) with UV curing. To achieve printed patterns, a hybrid organic-inorganic spin-on film is deposited at low-temperature by sol–gel processing. Two distinct bottom-up synthetic approaches are used, called in situ and ex situ, using titanium isopropoxide (90%) or TiO2 anatase nanoparticles (70%), respectively, and adding a silica sol modified by organic moieties. The two syntheses were optimized to obtain, after patterning by thermal imprint, amorphous or crystalline titania crack-free micro- and nano- patterns for in situ and ex situ, respectively. The further UV irradiation converts imprinted films to totally inorganic patterns, through the titania photocatalytic effect, allowing refractive indexes up to 1.82 at 632 nm to be achieved. This novel strategy of combining thermal imprint with UV exposure allows inorganic deep patterns to be fabricated without a calcination step, which is generally needed for inorganic resists processing. Eventually, a thermal treatment only at 300 °C can be applied to achieve a final refractive index of 2 at 632 nm.

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Ridaoui, Hassan, Ali Dirani, Fernand Wieder, and Olivier Soppera. "Direct writing of ZrO2 and TiO2 nanostructures by ArF lithography." MRS Proceedings 1247 (2010). http://dx.doi.org/10.1557/proc-1247-c10-07.

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AbstractWe achieved the preparation of nanostructures based on negative tone inorganic resists by DUV lithography (193 nm). This entails the preparation of a complex of a transition metal by reaction between the metal alkoxide and a suitable ligand. The reaction was carried out in a solvent. Then, a partial hydrolysis of the complex allowed forming metal-oxides inorganic chains by condensation with good film-forming and photopatterning properties. This step corresponds to the synthesis of multifunctional oligomers that can be crosslinked by DUV irradiation.We obtained well-defined patterns exhibiting low rugosity with width down to 75 nm. An achromatic interferometer based on an ArF excimer laser was used to write the nanostructures. The sensitivity of the resin at 193 nm is in the order of magnitude of organic photoresists used in the microelectronics industry.The photoinduced processes were studied with care in order to state the physico-chemical phenomena occurring upon DUV-irradiation. FTIR, XPS and XRD were used for characterizing the material structure after irradiation and thermal treatment. Nanostructures were studied by AFM.The main interest of this resist is that after irradiation, the material is mainly inorganic. It can even be totally mineralized through a subsequent pyrolysis procedure. The process is compatible with a wide range of chemicals (ZrO2, TiO2…). Using lithographic route, it is possible to obtain such nanostructures on relatively wide surfaces. With this new process, we are targeting applications in microelectronics, optics, photonics, photocatalysis, photovoltaic…

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Zhang, Pingping, Gaoling Yang, Fei Li, Jianbing Shi, and Haizheng Zhong. "Direct in situ photolithography of perovskite quantum dots based on photocatalysis of lead bromide complexes." Nature Communications 13, no. 1 (November 7, 2022). http://dx.doi.org/10.1038/s41467-022-34453-9.

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AbstractPhotolithography has shown great potential in patterning solution-processed nanomaterials for integration into advanced optoelectronic devices. However, photolithography of perovskite quantum dots (PQDs) has so far been hindered by the incompatibility of perovskite with traditional optical lithography processes where lots of solvents and high-energy ultraviolet (UV) light exposure are required. Herein, we report a direct in situ photolithography technique to pattern PQDs based on the photopolymerization catalyzed by lead bromide complexes. By combining direct photolithography with in situ fabrication of PQDs, this method allows to directly photolithograph perovskite precursors, avoiding the complicated lift-off processes and the destruction of PQDs by solvents or high-energy UV light, as PQDs are produced after lithography exposure. We further demonstrate that the thiol-ene free-radical photopolymerization is catalyzed by lead bromide complexes in the perovskite precursor solution, while no external initiators or catalysts are needed. Using direct in situ photolithography, PQD patterns with high resolution up to 2450 pixels per inch (PPI), excellent fluorescence uniformity, and good stability, are successfully demonstrated. This work opens an avenue for non-destructive direct photolithography of high-efficiency light-emitting PQDs, and potentially expands their application in various integrated optoelectronic devices.

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Sui, Yunxia, Pan Hu, Dalong Pan, Zhanshuo Jiang, Qianliang Song, Guangxu Su, Wei Wu, and Fanxin Liu. "Long-range interference of localized electromagnetic field enhancement in plasmonic nanofinger lattices." Frontiers in Physics 10 (September 8, 2022). http://dx.doi.org/10.3389/fphy.2022.951944.

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Sub-wavelength strongly confined electromagnetic field induced by surface plasmon resonance offers a promising method to enhance the light-matter interactions, which has wide applications in the fields of enhanced spectroscopy, photovoltaic conversion, and photocatalysis. For periodic metal nanostructures, the localized surface plasmon resonance (LSPR) can couple with the long-range diffractive interaction, causing a narrow linewidth. Here, we report a new family of plasmonic nanostructure fabricated through nanoimprint lithograph, which enables completely uniform, reproducible, and low-cost Au nanofinger multimer arrays with high aspect ratio at the manufacturing scale. Through adjusting the lattice spacing and the angle of incident light, the different collective coupling strengths between the diffraction modes and the LSPR of trimer or pentamer Au nanofingers arrays are observed experimentally by angle-resolved reflection spectroscopy. According to the numerical simulation based on the finite element method, the dynamic evolution of collective coupled modes is demonstrated. The typical surface charge distribution and electric field distribution of the coupled dipole resonance show a significant electromagnetic field enhancement. By adjusting the height of nanofingers, lattice spacing and gap size of adjacent nanofingers, the feasibility of the coupled modes is further investigated. This work provides an excellent candidate for the localization of light as chip-scale plasmonic devices.

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